CN107761065B - Coating wire planar cathode short circuit repair method - Google Patents
Coating wire planar cathode short circuit repair method Download PDFInfo
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- CN107761065B CN107761065B CN201710832150.2A CN201710832150A CN107761065B CN 107761065 B CN107761065 B CN 107761065B CN 201710832150 A CN201710832150 A CN 201710832150A CN 107761065 B CN107761065 B CN 107761065B
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- cathode
- connecting line
- planar cathode
- control switch
- isolating transformer
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
Abstract
The invention belongs to glass manufacturing apparatus technical fields, more particularly to a kind of coating wire planar cathode short circuit repair method, when operation, determine that short trouble occurs in planar cathode first, and then use isolating transformer, connecting line group and control switch group, and 220V or 380v single-phase electricity is accessed into the high-pressure side of isolating transformer, connects to form load output loop by the cathode and anode and control switch group of connecting line group and planar cathode by the secondary side of isolating transformer, it can so carry out the maintenance and repair to planar cathode short trouble.It disconnects DC power supply and is closed control switch group n times, and the resistance of measurement planar cathode over the ground when disconnecting control switch group every time, restart above-mentioned steps if resistance value is zero, if resistance value is not zero illustrated planar cathode short trouble eliminate, so with regard to effective solution coating wire planar cathode occur short circuit cause jump target after can not be again turned on the technical issues of.
Description
Technical field
The invention belongs to glass manufacturing apparatus technical field more particularly to a kind of coating wire planar cathode short circuit maintenance sides
Method.
Background technique
Magnetron sputtering plating line is in normal productive process, narrow space between planar cathode and anode bottom plate, in magnetic field
Effect is lower to be easy the needle-shaped burr of growth, once planar cathode is connected to moment with anode bottom plate, just short circuit causes to jump target, DC power supply
It is fail to open due to there is short-circuit protection.In this case, the common practices of the prior art is that direct current is opened in multiple trial
Source, and fail to open, need to deflate processing, so the time is not only caused to waste, and cost correspondingly improves, it is also possible to cause
The delay of product term.
Summary of the invention
The purpose of the present invention is to provide a kind of coating wire planar cathode short circuit repair methods, it is intended to solve in the prior art
There is short circuit and causes to jump the technical issues of can not being again turned on after target in coating wire planar cathode.
To achieve the above object, the technical solution adopted by the present invention is that: a kind of coating wire planar cathode short circuit repair method,
Include the following steps:
S1: determining that short trouble occurs in planar cathode, judges that DC power supply is fail to open, and the planar cathode is over the ground
Resistance be zero；
S2: providing isolating transformer, connecting line group and control switch group, and the high-pressure side of the isolating transformer is accessed
220V or 380v single-phase electricity, the isolating transformer secondary side by the cathode terminal of the connecting line and the planar cathode,
The anode tap of the planar cathode connects to form load output loop with the control switch group；
S3: the DC power supply is disconnected；
S4: the control switch group n times, N >=2 are closed；And it is measured when disconnecting the control switch group every time described flat
The resistance of face cathode over the ground；
S5: measuring the resistance size of the planar cathode over the ground, if the resistance of the planar cathode over the ground is
Zero returns to the operation step S4, opens direct current source point target if the resistance of the planar cathode over the ground is not zero.
Further, the high-pressure side of the isolating transformer is equipped with the high input voltage for connecting 220V or 380v single-phase electricity
End, the secondary side of the isolating transformer are equipped with the low-voltage output for exporting 12V or 24V single-phase electricity.
Further, the connecting line group includes anode connecting line and cathode connecting line, the both ends of the anode connecting line
It is electrically connected respectively with the anode tap of the low-voltage output of the isolating transformer and the planar cathode, the cathode connecting line
Both ends respectively with the cathode terminal of the low-voltage output of the isolating transformer and the planar cathode be electrically connected.
Further, the low-voltage output of the isolating transformer is equipped with for being electrically connected with the anode connecting line
Anode interface and cathode interface for being electrically connected with the cathode connecting line.
Further, the diameter of the diameter of the anode connecting line and the cathode connecting line is 2.5mm or 4.0mm.
Further, the anode connecting line and the cathode connecting line are single copper wire or multicore copper wire.
Further, the control switch group includes the first control switch, and first control switch is set to the isolation
It is between transformer and the output end of the 220V or 380v single-phase electricity and mono- with the isolating transformer and the 220V or 380v
Mutually the output end of electricity is electrically connected.
Further, the control switch group further includes the second control switch, and second control switch is set to the sun
It is electrically connected on the connecting line of pole and with the anode tap of the low-voltage output of the isolating transformer and the planar cathode.
Further, first control switch and second control switch are knife switch.
Further, in the step S4, first first control switch is closed, is then closed second control
N times are switched, wherein N >=2.
Beneficial effects of the present invention: coating wire planar cathode short circuit repair method of the invention, it is first determined go out plane yin
There is short trouble in pole, and determines that DC power supply can not start, for above situation, using isolating transformer, connecting line group and
Control switch group, and lead to by the high-pressure side of isolating transformer access 220V or 380v single-phase electricity, by the secondary side of isolating transformer
Connecting line group is crossed to connect with the cathode of the planar cathode, the anode of the planar cathode and the control switch group and to form load
Output loop can so carry out maintenance and repair to planar cathode short trouble.Further, direct current is disconnected
Source, and it is closed control switch group n times, N >=2；And the resistance of measurement planar cathode over the ground when disconnecting control switch group every time, together
When measurement planar cathode resistance size over the ground, need to restart above-mentioned steps if resistance is zero, if resistance hinders
Value is not zero, and the short trouble of illustrated planar cathode has been eliminated, then can open direct current source point target at this time.It is so just fast
There is short circuit and causes to jump the technical issues of can not being again turned on after target in fast effective solution coating wire planar cathode.
Detailed description of the invention
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to embodiment or description of the prior art
Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only of the invention some
Embodiment for those of ordinary skill in the art without any creative labor, can also be according to these
Attached drawing obtains other attached drawings.
Fig. 1 is the process flow chart of coating wire planar cathode short circuit repair method provided in an embodiment of the present invention.
Fig. 2 is the structural schematic diagram of coating wire planar cathode short circuit apparatus for examination and repair provided in an embodiment of the present invention.
Wherein, each appended drawing reference in figure:
10-11-high-pressure side of isolating transformer, 12-secondary sides
13-high voltage input terminal 14-low-voltage output, 15-anode interfaces
16-cathode interface 20-connecting line group 21-anode connecting lines
22-cathode connecting line the 24-the second control switches of the 23-the first control switch
30-planar cathode 31-anode tap, 32-cathode terminals
33-220V or 380v single-phase electricities.
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment that Fig. 1~2 is described is exemplary, it is intended to is used to explain the present invention, and is not considered as limiting the invention.
In the description of the present invention, it is to be understood that, term " length ", " width ", "upper", "lower", "front", "rear",
The orientation or positional relationship of the instructions such as "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside" is based on attached drawing institute
The orientation or positional relationship shown, is merely for convenience of description of the present invention and simplification of the description, rather than the dress of indication or suggestion meaning
It sets or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as to limit of the invention
System.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include one or more of the features.In the description of the present invention, the meaning of " plurality " is two or more,
Unless otherwise specifically defined.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；It can be mechanical connect
It connects, is also possible to be electrically connected；It can be directly connected, can also can be in two elements indirectly connected through an intermediary
The interaction relationship of the connection in portion or two elements.It for the ordinary skill in the art, can be according to specific feelings
Condition understands the concrete meaning of above-mentioned term in the present invention.
As shown in Figure 1, a kind of coating wire planar cathode short circuit repair method provided in an embodiment of the present invention, including walk as follows
It is rapid:
S1: it determines that short trouble occurs in planar cathode 30, judges that DC power supply is fail to open, and planar cathode 30 is over the ground
Resistance be zero；
S2: isolating transformer 10, connecting line group 20 and control switch group are provided, the high-pressure side 11 of isolating transformer 10 is connect
Enter 220V or 380v single-phase electricity 33, the secondary side 12 of isolating transformer 10 passes through the cathode of connecting line and planar cathode 30, plane
The anode of cathode 30 connects to form load output loop with control switch group；
S3: DC power supply is disconnected；
S4: closure control switch group n times, N >=2；And planar cathode 30 is measured over the ground when disconnecting control switch group every time
Resistance；
S5: the resistance size of measurement planar cathode 30 over the ground, if the resistance of the planar cathode 30 over the ground is
Zero returns to the operation step S4, opens direct current source point if the resistance of the planar cathode 30 over the ground is not zero
Target.
Coating wire planar cathode short circuit repair method provided in an embodiment of the present invention, it is first determined go out planar cathode 30 and occur
Short trouble, and determine that DC power supply can not start, for above situation, using isolating transformer 10, connecting line group 20 and control
Switching group processed, and the high-pressure side of isolating transformer 10 11 accessed into 220V or 380v single-phase electricity 33, by the two of isolating transformer 10
Secondary side 12 connect by connecting line group 20 with the cathode of planar cathode 30, the anode of planar cathode 30 and control switch group to be formed it is negative
Output loop is carried, the maintenance and repair to 30 short trouble of planar cathode can be so carried out.
Specifically, the secondary side 12 of isolating transformer 10 passes through the cathode of connecting line group 20 and planar cathode 30, plane yin
The anode of pole 30 connected with control switch group to be formed load output loop after, load output loop electric current will act on it is flat
The needle-shaped burr of length out is bred under magnetic fields between face cathode 30 and anode bottom plate, and then is achieved that the burning to burr
Erosion so that the burr amount between planar cathode 30 and anode bottom plate substantially reduces, and then also avoids planar cathode 30 and sun
Occurred between the bottom plate of pole by the phenomenon that burr electrical communication, so eliminates the need for the feelings that short circuit occurs in coating wire planar cathode 30
Condition.
Further, DC power supply is disconnected, and is closed control switch group n times, N >=2；And in disconnection control switch group every time
When measurement planar cathode 30 resistance over the ground, while the resistance size of the planar cathode 30 over the ground is measured, if resistance hinders
Value is that zero need restarts above-mentioned steps, and the short trouble of illustrated planar cathode 30 has been eliminated if resistance is not zero,
Direct current source point target can be so opened at this time.It so just quickly and effectively solves coating wire planar cathode 30 and short circuit occurs and make
The technical issues of at that can not be again turned on after jump target.
In the present embodiment, as shown in Fig. 2, the high-pressure side 11 of isolating transformer 10 is equipped with mono- for connecting 220V or 380v
The mutually high voltage input terminal 13 of electricity 33, the secondary side 12 of isolating transformer 10 are equipped with defeated for exporting the low pressure of 12V or 24V single-phase electricity
Outlet 14.
Further, by being equipped in the high-pressure side of isolating transformer 10 11 for connecting 220V or 380v single-phase electricity 33
High voltage input terminal 13, then 220V or 380v single-phase electricity 33 can self-isolation transformer 10 high voltage input terminal 13 enter isolation become
In depressor 10 and it is changed into the output of low-voltage output 14 that the secondary side 12 of low tension self-isolation transformer 10 is equipped with, it is so just real
Show the transformation to external normal voltage to safety test voltage, both namely converts 12V for 220V or 380v single-phase electricity 33
Or the low tension of 24V.So that the maintenance process of 30 short circuit of coating wire planar cathode carries out under a suitable voltage conditions, such as
This just ensure that the safety and operability of the maintenance of 30 short circuit of coating wire planar cathode.
Further, by selecting the connecing as the high voltage input terminal 13 of isolating transformer 10 of 220V or 380v single-phase electricity 33
Enter electricity, due to the most commonly seen electrical energy transportation form of piece phase line of single-phase electricity and zero curve composition, then 220V or 380v
Single-phase electricity 33 is just relatively easy to find in 30 working environment of coating wire planar cathode, so just greatly improves flat to coating wire
The convenience of 30 short circuit maintenance of face cathode.
Further, by selecting the low tension of 12V or 24V defeated as 14 institute of low-voltage output of isolating transformer 10
Voltage out, then within the scope of being in human safety voltage due to the voltage range of 12V or 24V low tension, and it is much smaller than people
The upper limit of body safe voltage is so just effectively protected the personal safety of operator, improves coating wire planar cathode 30
The safety of the upkeep operation environment of short circuit.Meanwhile 12V or 24V low tension is due to its lower voltage range, then it is not yet
The electronic equipment in coating wire planar cathode 30 can be damaged in short-circuit maintenance process.In this way, passing through the low of selection 12V or 24V
The voltage that piezoelectricity is exported as the low-voltage output 14 of isolating transformer 10, has just taken into account the guarantor to operator's personal safety
Shield and the protection to the electronic equipment in coating wire planar cathode 30.
In the present embodiment, as shown in Fig. 2, connecting line group 20 includes anode connecting line 21 and cathode connecting line 22, anode
The both ends of connecting line 21 are electrically connected with the anode tap 31 of the low-voltage output 14 of isolating transformer 10 and planar cathode 30 respectively,
The both ends of cathode connecting line 22 are electrical with the cathode terminal 32 of the low-voltage output 14 of isolating transformer 10 and planar cathode 30 respectively
Connection.
Further, by making connecting line group 20 include anode connecting line 21 and cathode connecting line 22, then isolation becomes
The low-voltage output 14 of depressor 10 and the anode tap 31 of planar cathode 30 just can be by 21 electrical communications of anode connecting line, simultaneously
The low-voltage output 14 of isolating transformer 10 and the cathode terminal 32 of planar cathode 30 can also electrically be connected by cathode connecting line 22
It is logical.In this way, the low-voltage output 14 of isolating transformer 10 just can pass through with the anode tap 31 and cathode terminal 32 of planar cathode 30
22 electrical communication of anode connecting line 21 and cathode connecting line forms load circuit, and then realizes to planar cathode 30 and anode bottom
Burr between plate carries out ablation.
In the present embodiment, as shown in Fig. 2, the low-voltage output 14 of isolating transformer 10 be equipped with for anode connecting line
The 21 anode interfaces 15 being electrically connected and the cathode interface 16 for being electrically connected with cathode connecting line 22.Specifically, anode connects
Certain distance setting is separated between mouth 15 and cathode interface 16, and the surface of anode interface 15 and cathode interface 16 is coated with not
Same mark color, while the surface of anode interface 15 and cathode interface 16 also is provided with the embossing grid of different lines.
Further, anode interface 15 is equipped with by the low-voltage output 14 in isolating transformer 10, then anode connects
Line 21 just can grafting enter in anode interface 15 with isolating transformer 10 be electrically connected, pass through the low pressure in isolating transformer 10
Output end 14 be equipped with cathode interface 16, then cathode connecting line 22 just can grafting enter in cathode interface 16 with isolating transformer
10 are electrically connected.In this way, the both ends of the anode connecting line 21 anode interface 15 with 10 low-voltage output 14 of isolating transformer respectively
It is electrically connected with the anode tap of planar cathode 30, constitutes the phase line of 12V or 24V low tension, and the both ends of cathode connecting line 22
It is electrically connected, constitutes with the cathode terminal of the cathode interface 16 of 10 low-voltage output 14 of isolating transformer and planar cathode 30 respectively
The zero curve of 12V or 24V low tension.
Further, by be separated with certain distance setting between anode interface 15 and cathode interface 16, then
Be docked with the anode connecting line 21 of anode interface 15 and be docked with the cathode connecting line 22 of cathode interface 16 just will not be isolated
It influences each other at 10 low-voltage output 14 of transformer, so as to avoid anode connecting line 21 and cathode connecting line 22 due to apart from mistake
It closely and mutually winds, and then influences the problem of using.
Preferably, by being coated with different mark colors on the surface of anode interface 15 and cathode interface 16, then grasping
The anode interface 15 and cathode interface 16 of 10 low-voltage output 14 of isolating transformer can fast and accurately be identified by making personnel just,
And then can quick lap joint load circuit, so just save considerably needed for the maintenance to the short circuit of coating wire planar cathode 30
Time.
It is highly preferred that passing through the embossing grid for being equipped with different lines on the surface of anode interface 15 and cathode interface 16.That
What operator can be equipped under low-light or low light condition by the surface of contact anode interface 15 and cathode interface 16
The embossing grid of different lines judges and distinguishes anode interface 15 and cathode interface 16, so just significantly reduces anode connection
The time that line 21 and cathode connecting line 22 are plugged into anode interface 15 and 16 phase of cathode interface respectively, thus reduce in low-light or
30 short circuit of coating wire planar cathode is carried out overhauling the required time under low light condition.
In the present embodiment, the diameter of the diameter of anode connecting line 21 and cathode connecting line 22 is 2.5mm or 4.0mm.
Further, by the way that the diameter of the diameter of anode connecting line 21 and cathode connecting line 22 is set as 2.5mm or 4.0mm.Such as
This design, just taken into account the bonding strength for guaranteeing anode connecting line 21 and cathode connecting line 22 and reduces by 21 He of anode connecting line
The resistance value of cathode connecting line 22.
Preferably, the diameter of the diameter of anode connecting line 21 and cathode connecting line 22 is 4.0mm, is so achieved that pair
Meet the bonding strength of anode connecting line 21 and cathode connecting line 22 and reduces anode connecting line 21 and cathode connecting line 22
Optimal balance between resistance value.
In the present embodiment, anode connecting line 21 and cathode connecting line 22 are single copper wire or multicore copper wire.
In the present embodiment, as shown in Fig. 2, control switch group includes the first control switch 23, the first control switch 23 is set
It is between isolating transformer 10 and the output end of 220V or 380v single-phase electricity 33 and mono- with isolating transformer 10 and 220V or 380v
Mutually the output end of electricity 33 is electrically connected.
Further, by making control switch group include the first control switch 23, and the first control switch 23 is set to
It is between isolating transformer 10 and the output end of 220V or 380v single-phase electricity 33 and single-phase with isolating transformer 10 and 220V or 380v
The output end of electricity 33 is electrically connected, so just realize to the output end of isolating transformer 10 and 220V or 380v single-phase electricity 33 it
Between connection circuit on-off control.
In the present embodiment, as shown in Fig. 2, control switch group further includes the second control switch 24, the second control switch 24
It is electrically connected on anode connecting line 21 and with the anode tap of the low-voltage output of isolating transformer 10 14 and planar cathode 30.
Further, by making control switch group include the second control switch 24, and the second control switch 24 is set
It is electrically connected on anode connecting line 21 and with the anode tap 31 of the low-voltage output of isolating transformer 10 14 and planar cathode 30,
So just realize to circuit communication between the low-voltage output 14 of isolating transformer 10 and the anode tap 31 of planar cathode 30
Control.
Further, by making control switch group include the first control switch 23 and the second control switch 24, and will
First control switch 23 is set between isolating transformer 10 and the output end of 220V or 380v single-phase electricity 33, by the second control switch
24 are set between the low-voltage output 14 of isolating transformer 10 and the anode tap 31 of planar cathode 30, then just realizing pair simultaneously
The control that isolating transformer 10 and 220V or 380v single-phase electricity 33 input and 14 He of low-voltage output to isolating transformer 10
The control of 31 electrical communication of anode tap of planar cathode 30 carries out 30 short circuit of coating wire planar cathode to improve significantly
The operability of maintenance and the controllability of connecting and disconnecting of the circuit.
In the present embodiment, as shown in Fig. 2, the first control switch 23 and the second control switch 24 are knife switch.Into
One step, by the way that the first control switch 23 and the second control switch 24 are set as knife switch, and have benefited from knife switch knot
Structure is simple, easily fabricated and cheap feature, and the cost of implementation for so overhauling 30 short circuit of coating wire planar cathode can obtain
To declining to a great extent.It is high to have benefited from knife switch functional reliability simultaneously, and there is high-voltage cutoff ability, so and ensure that operation
The personal safety of personnel.
Specifically, when carrying out the step S4 in service work, mainly first the first control switch 23 is closed, is then closed
Close described second control switch 24N times, wherein N >=2.
The embodiment of the invention also provides a kind of coating wire planar cathode short circuit apparatus for examination and repair, including isolating transformer 10,
For by the connecting line group 20 of isolating transformer 10 and 30 electrical communication of planar cathode and being used for the control of control circuit on-off and opening
Pass group, isolating transformer 10 are equipped with two for accessing the high-pressure side 11 of 220V or 380v single-phase electricity 33 and for exporting low tension
The secondary side 12 of secondary side 12, one end of connecting line group 20 and isolating transformer 10 is electrically connected, the other end of connecting line group 20 with
Planar cathode 30 is electrically connected, and control switch group and connecting line group 20 are electrically connected.
The coating wire planar cathode short circuit apparatus for examination and repair of the embodiment of the present invention by the way that isolating transformer 10 is arranged, and makes
The high voltage input terminal 13 of high-pressure side 11 on isolating transformer 10 accesses 220V or 380v single-phase electricity 33, then 220V or 380v are mono-
Mutually electricity 33 can be converted into low tension in isolating transformer 10 and from the low-voltage output of the secondary side of isolating transformer 10 12
14 outputs, and then be electrically connected by connecting line group 20 and planar cathode 30, and make 20 electricity of control switch group and connecting line group
Property connection so that the low-voltage output 14 of the secondary side 12 of isolating transformer 10 and connecting line group 20, control switch group peace
Load output loop is collectively formed in face cathode 30, to realize the simple and effective maintenance to 30 short trouble of planar cathode.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (8)
1. a kind of coating wire planar cathode short circuit repair method, characterized by the following steps:
S1: determining that short trouble occurs in planar cathode, judges that DC power supply is fail to open, and the electricity of the planar cathode over the ground
Resistance is zero；
S2: providing isolating transformer, connecting line group and control switch group, by the high-pressure side of the isolating transformer access 220V or
380V single-phase electricity, the isolating transformer secondary side pass through the cathode terminal of the connecting line group and the planar cathode, described
The anode tap of planar cathode connects to form load output loop with the control switch group；
S3: the DC power supply is disconnected；
S4: the control switch group n times, N >=2 are closed；And the plane yin is measured when disconnecting the control switch group every time
The resistance of pole over the ground；
S5: the resistance size of the planar cathode over the ground is measured, if the resistance of the planar cathode over the ground is zero
It returns and operates the step S4, open direct current source point target if the resistance of the planar cathode over the ground is not zero；
The connecting line group includes anode connecting line and cathode connecting line, and the both ends of the anode connecting line are isolated with described respectively
The anode tap of the low-voltage output of transformer and the planar cathode be electrically connected, the both ends of the cathode connecting line respectively with institute
The cathode terminal of the low-voltage output and the planar cathode of stating isolating transformer is electrically connected；
The low-voltage output of the isolating transformer is equipped with anode interface and use for being electrically connected with the anode connecting line
In the cathode interface being electrically connected with the cathode connecting line, the anode interface and cathode interface interval setting, and institute
The surface for stating anode interface and the cathode interface is coated with different mark colors, the anode interface and the cathode interface
Surface is equipped with the embossing grid of different lines.
2. coating wire planar cathode short circuit repair method according to claim 1, it is characterised in that: the isolating transformer
High-pressure side be equipped with high voltage input terminal for connecting 220V or 380V single-phase electricity, the secondary side of the isolating transformer is equipped with
For exporting the low-voltage output of 12V or 24V single-phase electricity.
3. coating wire planar cathode short circuit repair method according to claim 1, it is characterised in that: the anode connecting line
Diameter and the diameter of the cathode connecting line be 2.5mm or 4.0mm.
4. coating wire planar cathode short circuit repair method according to claim 1, it is characterised in that: the anode connecting line
It is single copper wire or multicore copper wire with the cathode connecting line.
5. coating wire planar cathode short circuit repair method according to claim 2, it is characterised in that: the control switch group
Including the first control switch, first control switch is set to the isolating transformer and 220V the or 380V single-phase electricity
It is electrically connected between output end and with the isolating transformer and the output end of the 220V or 380V single-phase electricity.
6. coating wire planar cathode short circuit repair method according to claim 5, it is characterised in that: the control switch group
It further include the second control switch, second control switch is set on the anode connecting line and low with the isolating transformer
The anode tap of output end and the planar cathode is pressed to be electrically connected.
7. coating wire planar cathode short circuit repair method according to claim 6, it is characterised in that: first control is opened
It closes and second control switch is knife switch.
8. coating wire planar cathode short circuit repair method according to claim 6, it is characterised in that: in the step S4
In, first first control switch is closed, is then closed the second control switch n times, wherein N >=2.
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| CN108896856A (en) * | 2018-07-03 | 2018-11-27 | 北方工业大学 | Method and system for rapidly detecting cathode short circuit |
| CN109541370A (en) * | 2018-11-16 | 2019-03-29 | 北方工业大学 | Method and system for detecting cathode short circuit according to voltage drop |
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|---|---|---|---|---|
| CN86105616A (en) * | 1985-07-26 | 1987-04-22 | 西屋电气公司 | The method and apparatus of the sputtering chamber's high-voltage cathode after the cleaning short circuit |
| CN104674178A (en) * | 2015-03-24 | 2015-06-03 | 南华大学 | Power circuit for realizing multi-mode outputting of magnetron sputtering coating and control method |
| CN204959025U (en) * | 2015-09-16 | 2016-01-13 | 河源市璐悦自动化设备有限公司 | Planar cathode that magnetron sputtering coating film was used |
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2017
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| CN86105616A (en) * | 1985-07-26 | 1987-04-22 | 西屋电气公司 | The method and apparatus of the sputtering chamber's high-voltage cathode after the cleaning short circuit |
| CN104674178A (en) * | 2015-03-24 | 2015-06-03 | 南华大学 | Power circuit for realizing multi-mode outputting of magnetron sputtering coating and control method |
| CN204959025U (en) * | 2015-09-16 | 2016-01-13 | 河源市璐悦自动化设备有限公司 | Planar cathode that magnetron sputtering coating film was used |
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