CN107743531A - The island position detecting device and method of melting furnace - Google Patents

The island position detecting device and method of melting furnace Download PDF

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Publication number
CN107743531A
CN107743531A CN201680034902.4A CN201680034902A CN107743531A CN 107743531 A CN107743531 A CN 107743531A CN 201680034902 A CN201680034902 A CN 201680034902A CN 107743531 A CN107743531 A CN 107743531A
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island
melting furnace
image
region
seed crystal
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CN201680034902.4A
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CN107743531B (en
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金成烈
金哲珉
金努原
黄耿焕
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Korea Institute of Industrial Technology KITECH
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Korea Institute of Industrial Technology KITECH
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Priority claimed from PCT/KR2016/009926 external-priority patent/WO2017043826A1/en
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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/16—Oxides
    • C30B29/20—Aluminium oxides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/26—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using television detectors; using photo or X-ray detectors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B17/00—Single-crystal growth onto a seed which remains in the melt during growth, e.g. Nacken-Kyropoulos method

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Image Analysis (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The present invention relates to a kind of island position detecting device, and it is capable of the position that the Surface testing of the more rapid molten mass accurately flowed again from melting furnace goes out island.The control unit of the present invention exports multiple first singular points about temperature or brightness from the image on the melting furnace surface that shooting unit obtains, and multiple first singular points that be will be present in by Hough transformation (Hough transform) in described image are transformed to the line of virtual parameter coordinate, then the multiple intersection points for asking these lines to intersect, when with the ρ for forming the virtual parameter coordinate, θ axles and with the ρ, θ axles are respectively perpendicular, when the virtual parameter of axle about number of crossings spatially represents each intersection point, obtain multiple second singular points of the peak value formed in these intersection points in virtual parameter space, and the inverse transformation for passing through Hough transformation, these multiple second singular points are exported as into multiple connecting lines, position based on these multiple connection line options islands.

Description

The island position detecting device and method of melting furnace
Technical field
The present invention relates to the island position detecting device and method of a kind of melting furnace, is related to a kind of for accurately and promptly Detect the dress of the position on caused island on the surface of the heated molten mass flowed in the melting furnaces such as ingot growth furnace Put and method.
Background technology
In order to make the single crystal rod of the basic material used in the electronic product of precision, manufacture sapphire, silicon etc..For example, Semiconductor integrated circuit manufactures on monocrystalline silicon substrate, the element of light emitting diode, data storage device, photo-detector etc. It is generally basede on sapphire single crystal substrate and manufactures.
Fig. 1 is recorded in Korean granted patent the 10-1390804th, is shown and is used to cultivate in existing ingot growth furnace One of the device of monocrystalline.
In such device, after first putting into raw material to the crucible 2 of growth furnace, start heating unit to melt sapphire original Material, after the lower end of seed crystal connecting portion 3 installation seed crystal (seed) 3a, by the action of mobile unit 5, make seed crystal 3a close to earthenware The center of melt surface in crucible, so as to be contacted with molten mass (Melt) 1 or immerse a part.
In this state, the temperature of crucible 2 is adjusted, starts the culture of sapphire single-crystal, and suitably adjusts upper pulling rate Degree and position, temperature, so as to grow ingot.
At the initial stage of the technique, seed crystal 3a slowly rises after contacting molten mass 1 by the action of mobile unit 5, and seed The position of brilliant 3a contact molten mass and time of contact point dependent on user visually observe and micro-judgment.
Fig. 2 is the skeleton diagram for the flow regime for showing the molten mass surface 6 inside growth furnace.
Reference picture 2, island 8 are the part that represents, when in making molten mass good by heating in Fig. 2 with reference 8 When under the normal condition of ground melting, island 8 is rendered as the recognizable region with coin-size.The surface of molten mass 1 is divided into Ascending part 9a and falling portion 9b and flowed, the riser portions 9a rises from lower lateral surface and is in high temperature, the falling portion 9b is to rise to the part that the molten mass on surface declines again, and its temperature is slightly below riser portions 9a temperature.Dissipated from central part Into in radial falling portion 9b, the molten mass of surrounding is assembled and declined, so as to flow boundary line 7, this flow boundary occur Line 7 is generated as radial centered on island 8.
The island 8 is the part that fused solution declines, and is the temperature region lower than the peripheral region that fused solution rises.Therefore, Contact seed crystal 3a to the temperature island 8 lower than around, and since the island 8 monocrystalline growth.
Island 8 and the center for not always resulting from molten mass surface 6, but the flowing based on molten mass, its position with when Between change.
Therewith, the reasonable time point that operative employee needs to enter seed crystal 3a down position on the island 8 implements seed crystal 3a Step-down operation, therefore in order to catch the time point, it is necessary to the naked eye continually observe high temperature growth furnace inside.
In addition, in order to produce the single crystal rod of high-quality, it is necessary to make the seed crystal 3a islands 8 that accurately contact position persistently changes, It is therefore desirable to operated by the high operative employee of proficiency.
For these reasons, by the applicant, in No. 10-1481442 existing single crystal rod of Korean granted patent publication The island position detecting device of growth furnace is authorized to.
In this island position detecting device, the surface image of molten mass is analyzed, so as to which automatic detection goes out the position on island 8 Put, and when generating island 8 in defined position, the automatic decline for implementing seed crystal 3a.
The advantages of this device, is, even if visually observing independent of actuator, also can accurately be grasped Make.
But in order to carry out rapid and accurate operation, it is necessary to more quickly determine and result from molten mass surface 6 The position on island 8.Thus, the time between the time point that island is produced in assigned position and seed crystal 3a decline startup time point is reduced Interval, accurate before the position on island changes seed crystal 3a can be promptly set to contact island 8 again.
The content of the invention
Technical problem to be solved
The present invention is made based on viewpoint as described above, and it is an object of the present invention to provide one kind to be configured to The Surface testing of enough more rapid molten masses accurately flowed again from melting furnace goes out the island position detecting device of the position on island And detection method.
Solves the scheme of technical problem
The island position detecting device of melting furnace of the present invention is characterised by, including：Melting furnace, for melting material Material；Shooting unit, the upside of the melting furnace is arranged on, for obtaining the image on molten mass surface；Control unit, to the bat The image for taking the photograph unit acquisition is analyzed, to detect the position on island；Seed crystal driver element, the upside of the melting furnace is arranged on, Seed crystal is set to decline and contact molten mass surface, described control unit exports multiple first about temperature or brightness from described image Singular point, and by Hough transformation (Hough transform), multiple first singular points that will be present in described image The line of virtual parameter coordinate is transformed to, the multiple intersection points for then asking these lines to intersect, is sat when with the composition virtual parameter Target ρ, θ axle and be respectively perpendicular with ρ, θ axle, the virtual parameter of axle about number of crossings spatially represent each intersection point When, multiple second singular points of the peak value formed in these intersection points in the virtual parameter space are obtained, and pass through Hough transformation Inverse transformation, these multiple second singular points are exported as into multiple connecting lines, based on the positions on these multiple connection line options islands, Judge whether the island is located to be set in the seed crystal contact area of the seed crystal decline contact.
In addition, further feature is, described image is divided into the pixel region of prescribed level by described control unit, each In individual pixel region, the luminance difference for being present in the pixel in the pixel region is compared, and according to its comparative result, to each Individual pixel region carries out independent binaryzation respectively, so as to export first singular point.
Further feature is that described control unit makes after independent binaryzation is carried out respectively to each pixel region Gone unless Region Of Interest with masking (Masking) method, and deleted by low pass filter (Low passfilter) and small object Noise element is removed except (small object remove), so as to export first singular point.
In addition, further feature is, the connecting line that described control unit is formed to second singular point assigns base In the weighted value of the number of crossings, and explored on the image with the exploration region of prescribed level, so that it is determined that institute State island and be located at exploration region when being all added to the weighted value of the connecting line by the exploration region with maximum weighted value It is interior.
In addition, further feature is, and when the island is located in the seed crystal contact area, described control unit control institute Seed crystal driver element is stated so that the seed crystal drops to the display unit set outside molten mass surface, or quota so that it is given birth to Into notification signal.
On the other hand, according to another embodiment, the spy of the method for the present invention that island position is detected in melting furnace Sign is, including：First step, the image on molten mass surface is obtained by the shooting unit；Second step, from described Multiple first singular points of the image export about temperature or brightness obtained in one step；Third step, export multiple described the Linear multiple connecting lines that one singular point is connected and respectively constituted；Four steps, in the area that multiple connecting lines intersect The position on island is detected in domain, in the third step, the figure will be present in by Hough transformation (Hough transform) As upper multiple first singular points are transformed to the line of virtual parameter coordinate, multiple intersection points for then asking these lines to intersect, when In the void of axle being respectively perpendicular with ρ, θ axle for forming the virtual parameter coordinate and with ρ, θ axle, about number of crossings Intend on parameter space when representing each intersection point, obtain and multiple the of the peak value of the virtual parameter spatially is formed in these intersection points Two singular points, and by the inverse transformation of Hough transformation, these multiple second singular points are exported as into multiple connecting lines.
In addition, further feature is, in the second step, described image is divided into the pixel region of prescribed level Domain, in each pixel region, the luminance difference for being present in the pixel in the pixel region is compared, and knot is compared according to it Fruit, independent binaryzation is carried out respectively to each pixel region, so as to export first singular point.
In addition, further feature is, in the second step, independent binaryzation is carried out respectively to each pixel region Afterwards, gone using masking (Masking) method unless Region Of Interest, and by low pass filter (Low pass filter) and Small object deletes (small object remove) to remove noise element, so as to export first singular point.
In addition, further feature is, in the four steps, the connecting line that second singular point is formed is assigned The weighted value based on the number of crossings is given, and is explored on the image with the exploration region of prescribed level, so as to really The fixed island is located at exploration when being all added to the weighted value of the connecting line by the exploration region with maximum weighted value In region.
In addition, a further feature of the present disclosure is, further comprise the 5th step：It is defined as making seed crystal when the island is located at When in the seed crystal contact area of decline, the display unit additionally set generates notification signal.
Beneficial effect
The present invention removes the low most of connection of the possibility of flow boundary line in the image analysis process on detection island Line, screening extract the high connecting line of possibility of flow boundary line and carry out computing, so as to reduce operand to improve fortune Speed is calculated, while the exact position on island can be detected.
In addition, the present invention divides the image into the pixel region for prescribed level when the image to acquisition carries out binaryzation, In each pixel region, the luminance difference for being present in the pixel in the pixel region is compared, and it is poor according to relative luminance, Carry out binaryzation respectively in each pixel region.Thereby, it is possible to make the shape of flow boundary line significantly keep, so as to Improve the reliability of detection.
Brief description of the drawings
Fig. 1 is the structure chart for being used to cultivate the device of monocrystalline in existing ingot growth furnace.
Fig. 2 is the skeleton diagram for the flow regime for showing the molten mass surface inside ingot growth furnace.
Fig. 3 be show the present embodiments relate to ingot growth furnace integrally-built structure chart.
Fig. 4 be illustrate for the present embodiments relate to ingot growth furnace in the image on molten mass surface that shoots, according to Each pixel region carries out the explanation figure of the process of independent binaryzation respectively.
Fig. 5 be for the present embodiments relate to ingot growth furnace in the image on molten mass surface that shoots, according to each Pixel region carries out the image occurred after independent binaryzation respectively.
Fig. 6 is that Fig. 5 image is gone unless the figure of Region Of Interest, only reservation Region Of Interest using masking (Masking) method Picture.
Fig. 7 is to illustrate the image for Fig. 6, is deleted by low pass filter (Low pass filter) and small object The point transformation of image is parameter coordinate by Hough transformation to remove noise element by (small object remove) The explanation figure of the process of line.
Fig. 8 is the explanation figure for illustrating Hough transformation.
Fig. 9 is the explanation figure of the process of focus for illustrating to occur on the parameter coordinate of parameter space upper table diagram 8.
Figure 10 is that multiple second singular points for illustrating to obtain on Fig. 9 parameter space are transformed to the straight of image coordinate Line, and explore the explanation figure of the process on island.
Figure 11 is the explanation figure for the position that identified island is shown on image.
Embodiment
Below, embodiments of the invention are described in detail referring to the drawings.
The island position detecting device of melting furnace of the present invention can not only be in the ingot life for growing Sapphire ingot Used in long stove, moreover it is possible to used in the various technical fields for determining island position in needing the molten mass from melting furnace.
Below, the embodiment of the structure of the ingot growth furnace about sapphire, silicon etc. is illustrated.
Reference picture 3, the present embodiments relate to the position detecting device of island 8 of melting furnace 100 include：Melting furnace 100, use In melted material；Shooting unit 200, the upside of the melting furnace 100 is arranged on, for obtaining the image on molten mass surface 6；Control Unit 500 processed, the image obtained to the shooting unit 200 is analyzed, to detect the position on island 8；Seed crystal driver element 300, the upside of the melting furnace 100 is arranged on, molten mass surface 6 is contacted to decline seed crystal 340.
In the inside of the melting furnace 100, fill and melt the raw material for forming the monocrystalline such as sapphire.Set heating single Member 150, to melt the raw material supplied to melting furnace 100.
The top of melting furnace 100 is provided with lid 400, plays a part of protecting molten mass 6, and shooting unit is fixedly installed 200th, seed crystal driver element 300 etc..
The seed crystal driver element 300 is vertically installed in the central part of the upper lid 400 of melting furnace 100, possesses seeding bar 320, seed crystal (seed) 340 is attached to the lower end of the seeding bar 320, by the decline of seeding bar, seed crystal 340 can contact or Person is immersed in molten mass surface 6.
The shooting unit 200 is arranged on the side of seed crystal driver element 300 on the upper lid 400 of melting furnace 100, and On the downside of upper lid 400 shooting molten mass surface 6.Can use can obtain high temperature surface image common high image quality into As camera, or the thermal imaging camera of the Temperature Distribution on measure molten mass surface 6 can also be used.
The shooting unit 200 is used to shoot the flow boundary line 7 on surface, and the part on border is formed in flowing, when Occur luminance difference when detecting by an unaided eye, in terms of Temperature Distribution, flow boundary line 7 and its peripheral part there is also difference, thus Shot based on this.
In the image that molten mass surface 6 is shot by above-mentioned shooting unit 200, flow boundary line 7 shown in figure 2 On there is brightness or color distortion.Reference picture 4, can confirm in real image, flow boundary line 7 and its around brightness be present Difference.
The seed crystal driver element 300 is vertically installed in the central part of the upper lid 400 of melting furnace 100, possesses seeding bar 320, seed crystal 340 (seed) is attached to the lower end of the seeding bar 320, by the decline of seeding bar, seed crystal 340 can contact or Person is immersed in molten mass surface 6.
The transmission of control signals of described control unit 500, the control signal be used for the melting furnace 100 temperature adjustment, Action of the seed crystal driver element 300 etc..In addition, moved to implement the decline of seed crystal 340 by seed crystal driver element 300 Make, the image that described control unit 500 obtains to shooting unit 200 is analyzed, to detect the position on island 8.
Entered when the position that island 8 is detected by control unit 500, and on molten mass surface 6 by the flowing of molten mass As defined in the mobile entrance of island 8 of row during region, control unit 500 makes seed crystal driver element 300 carry out down maneuver, so that seed Crystalline substance 340 contacts the island 8 of molten mass.
Below, illustrate that the image that control unit 500 obtains to shooting unit 200 is analyzed, to detect the position on island 8 Action process.
Described control unit 500 carries out following steps successively：First step, melting body surface is obtained by shooting unit 200 The image in face 6；Second step, the image export multiple first about temperature or brightness obtained from the first step are strange Dissimilarity；Third step, export linear multiple connecting lines that multiple first singular points are connected and respectively constituted；4th Step, the position on island 8 is detected in the region that multiple connecting lines intersect, thus, determines the position on island 8.
The first step is the step of obtaining the image on molten mass surface 6 by shooting unit 200.
To obtain the image of shooting unit 200 and the on-off shutter and action that is shot during this period is at intervals of set time (such as 5 seconds) repeat, and are changed so as to monitor at intervals of set time on molten mass surface 6 by the flowing of molten mass The position on the island 8 of its position.
Because the flowing of molten mass persistently occurs, therefore the shape of the grade of flow boundary line 7 on captured molten mass surface 6 Shape changes over time.
Fig. 4 is the image 10 on the molten mass surface 6 actually obtained, due to the interference of device, only gets sector, melting The part in body surface face 6.Flow boundary line is represented with reference 7, and reference 13 is that molten mass surface 6 is taken unit The part of 200 maskings.
The second step is that multiple first about temperature or brightness are exported from the image 10 obtained in the first step The step of singular point.
First, in order to detect multiple first singular points, described image 10 is divided into the pixel region of prescribed level, each In individual pixel region, the luminance difference for being present in the pixel in the pixel region is compared, and according to its comparative result, to each Individual pixel region 15 carries out independent binaryzation.
That is, as shown in 4, the pixel region 15 for prescribed level is divided the image on the whole, and in each pixel region Binaryzation is carried out in 15 independently of one another.
For example, the brightness for the pixel in each pixel region 15, on the basis of the average value in the pixel region 15, enters Row divides into 0 and 1 binaryzation, and the process is carried out independently of each other with the process in other pixel regions 15.
The reasons why so carrying out binaryzation respectively to each pixel region 15 is, implements to unite when using general image as object During one binaryzation, according to positions such as the front side portion of image, rear lateral portion, left side, right side, central portions, have relative bright Degree is poor, therefore when carrying out binaryzation, relatively dark broad part turns into 0 value on the whole, so that image is removed.Example Such as, in fan-shaped molten mass surface 6 in Fig. 4, the brightness of lower portion is generally weaker than upper portion, therefore when based on average When value carries out unified binaryzation to general image, the quite broad part of central upper portion can have 1 value, center downside Partial quite broad part can largely have 0 value, making it difficult to distinguish desired flow boundary line 7.
By carrying out independent binaryzation respectively to each pixel region 15, this problem can solve the problem that.
For Fig. 4 image, independent binaryzation is carried out respectively to each pixel region 15, so as to obtain Fig. 5's Image 20.
In Fig. 5, the non-Region Of Interest such as contour line unrelated with flow boundary line 7 is emphasised, therefore in order to be only concerned about The image in region, gone using known masking (Masking) method unless Region Of Interest.By going unless Region Of Interest, is prevented not Necessarily form excessive noise or singular point described later.
Thus, made a return journey as shown in fig. 6, can obtain by using masking (Masking) method unless Region Of Interest, only retains The image 30 of Region Of Interest.As shown in Fig. 5 reference 22 and the 32 of Fig. 6, appear on flow boundary line.
It is low pass filter by known image processing techniques in addition, in order to further remove noise element in figure 6 (Low pass filter) and small object delete (small object remove) to remove noise element, so as to obtain Obtain the noise element outside as shown in Fig. 7 (a), flow boundary line 7 and be removed considerable image.
The small object deletes (small object remove) and removes the part that region is relatively small on image, flows side Boundary line 7 is shown greatly the form that many points are connected and integrated and shown on image, thus is not removed, and the dot being separate from is then It is removed, thus, stream can be concentrated on by removing the point stayed in after the significant component of noise outside flow boundary line 7 on image On moving boundary line 7, as shown in Figure 7.
After above-mentioned image processing process, the point of residual turns into the first singular point in the present invention.
The third step is the step for multiple connecting lines that multiple first singular points are connected and respectively constitute straight line by export Suddenly.
Therefore, be will be present in third step by Hough transformation (Hough transform) on image multiple first Singular point is transformed to the line of virtual parameter coordinate, the multiple intersection points for then asking these lines to intersect, and when with described in composition The virtual parameter of ρ, θ axle of virtual parameter coordinate and axle vertical with ρ, θ axle, about number of crossings spatially represents each During individual intersection point, multiple second singular points of the peak value formed in these intersection points on the virtual parameter space 60 are obtained, and are passed through The inverse transformation of Hough transformation, these multiple second singular points are exported as into multiple connecting lines.
First, multiple first singular points are transformed to by virtual parameter by Hough transformation (Hough transform) The line of coordinate.
Hough transformation (Hough transform) shows as straight line as shown in figure 8, on the image being made up of x, y-axis Equation y=mx+b can transform to equation ρ=xcos θ+ysin θ.Wherein, ρ represents the normal distance from origin to straight line, and θ is represented The angle formed with x-axis.
As known in, under Hough transformation, equation ρ=xcos θ+ysin θ of straight line are shown as in image space in θ, ρ axle Curve is shown as in parameter space.In addition, in image space, point P1, P2, P3 on straight line ρ=xcos θ+ysin θ exist Respective curve P1, P2, P3 are shown as in parameter space with θ, ρ axle.
As a result, the point in the parameter space has the property for showing as line in image space, due in described image Space midpoint P1, P2, P3 are the points on same straight line, therefore formation curve P1, P2, P3 are mutually handed in parameter space One point C of fork.Point C shows as straight line ρ=xcos θ+ysin θ on image space.
In the present embodiment, using the Hough transformation (Hough transform), make the image occurred in Fig. 7 (a) The first singular point (point stayed in after preprocessing process on image) on 40 shows as respective song on parameter coordinate 50 Line, as shown in Fig. 7 (b).Corresponding each curve is generated respectively for multiple singular points, therefore shows as numerous curve phases It is mutually overlapping.
Such as the principle of Fig. 8 Hough transformation (Hough transform), it is present in image coordinate on a straight line The curve that point generates on virtual parameter coordinate has the property in the point C intersections for representing the straight line.So if Fig. 7 (b) multiple curved intersections of generation then understand have multiple curves of the intersection point straight by being present in one on image in any in Point generation on line.
Thus, multiple first singular points are transformed to by virtual parameter coordinate by Hough transformation (Hough transform) Line, then asked on parameter coordinate these lines intersect multiple intersection points.
Fig. 9 (a), which passes the imperial examinations at the provincial level, is illustrated these multiple intersection points 53.
After obtaining multiple intersection points, can with form virtual parameter coordinate ρ, θ axle and it is vertical with ρ, θ axle, On the virtual parameter space 60 of axle (vertical axis in Fig. 9) about number of crossings, each intersection point 53 is represented.
Fig. 9 (b) is exemplified with the curve map that intersection point 53 is represented so on parameter space 60.It is three-dimensional on parameter space 60 Ground illustrates numerous intersection points 53.
When representing multiple intersection points 53 on the parameter space 60, occur to be formed on parameter space 60 in these intersection points 53 Peak value peak point, using these peak points as multiple second singular points.
In Fig. 9 (b), these the second singular points are represented with reference 61~65.
Second singular point 61~65 means in the region residing for it, the number of crossings point more than around, works as change During the line being changed on image, according to the image coordinate based on Hough transformation and parameter transformation of coordinates principle, it is meant that by many The straight line of more first singular points.As a result second singular point 61~65 be the flow boundary line 7 that represents to occur on image can Can the high straight line of property.
After obtaining multiple second singular points 61~65, straight line on image is transformed to by Hough transformation, then can be exported more Individual connecting line 71~73, as shown in Figure 10.
The four steps is the step of detecting the position on island 8 in the region that multiple connecting lines 71~73 intersect.
Reference picture 10, the connecting line 71~73 formed firstly for second singular point 61~65, assign being based on respectively The weighted value of number of crossings on parameter coordinate.
The point intersected on parameter coordinate often means the straight line for passing through numerous first singular points on image, therefore it is The possibility of flow boundary line 7 on image is relatively higher.
Therefore, assign the weighted value based on the number of crossings, so as to it is determined that island 8 position when assign it is higher important Degree.The weighted value based on number of crossings is assigned it is meant that number of crossings is given to count, or assigns size and number of crossings Proportional value.
The weighted value based on the number of crossings on parameter coordinate is assigned respectively to each connecting line 71~73 in Figure 10 and is given To represent.
Hereafter, in order to determine the position on island 8, start to explore with the exploration region 75 of prescribed level.It is preferred to explore region 75 For circle, the prescribed level can be the area value being empirically averaged to the generation size on common island 8.
The exploration region 75 is moved on connecting line 71~73 position intersected, and the position on island 8 is explored with this.
As shown in Figure 10, it is being explored as a result, it is possible to true with the exploration region 75 of prescribed level in described image 70 Determine island 8 to be located to having the spy of maximum weighted value when the weighted value of the connecting line 71~73 in region 75 is all added by exploring In rope region 75.
Figure 11 shows the position on identified island 8 on image 80.
The result of the position of island 8 is explored in four steps, the island 8, which is located at, to be set to make seed crystal 340 decline contact When in seed crystal contact area, notification signal is generated by the display unit 520 additionally set, so that operative employee knows.It can select Form the notification signal based on display unit 520 to property.
In addition, control unit 500 controls seed crystal driver element 300 so that seed crystal 340 declines, so that seed crystal 340 contacts Island 8, and start the culture of single crystal rod.
By the determination process of above-mentioned island position, extract the second singular point 61~65 and carry out computing, therefore reduce Operand, can promptly it be determined, additionally it is possible to improve accuracy.
Utilization possibility in industry
The present invention can act as realizing automation equipment and method to the growth furnace for manufacturing single crystal rod.Especially, can Used in the manufacturing process of sapphire single crystal ingot.

Claims (10)

  1. A kind of 1. island position detecting device of melting furnace, it is characterised in that including：
    Melting furnace (100), for melted material；
    Shooting unit (200), the upside of the melting furnace (100) is arranged on, for obtaining the image of molten mass surface (6)；
    Control unit (500), the image obtained to the shooting unit (200) is analyzed, to detect the position of island (8)；
    Seed crystal driver element (300), the upside of the melting furnace (100) is arranged on, seed crystal (340) is declined and is contacted molten mass Surface (6),
    Described control unit (500) exports multiple first singular points about temperature or brightness from described image, passes through Hough Convert (Hough transform), multiple first singular points that will be present in described image are transformed to virtual parameter seat Target line, multiple intersection points of these lines intersection are then obtained,
    When in number of crossings be respectively perpendicular with ρ, θ axle for forming the virtual parameter coordinate and with ρ, θ axle, relevant When representing each intersection point on the virtual parameter space (60) of axle, obtain and formed in these intersection points in the virtual parameter space (60) Peak value multiple second singular points (61~65),
    By the inverse transformation of Hough transformation, by the multiple second singular point (61~65) export as multiple connecting lines (71~ 73),
    Based on the multiple connecting line (71~73), the position of island (8) is determined.
  2. 2. the island position detecting device of melting furnace according to claim 1, it is characterised in that
    Described image is divided into the pixel region (15) of prescribed level by described control unit (500), in each pixel region (15), the luminance difference for being present in the pixel in the pixel region (15) is compared, and according to its comparative result, to each picture Plain region (15) carries out independent binaryzation respectively, so as to export first singular point.
  3. 3. the island position detecting device of melting furnace according to claim 2, it is characterised in that
    Described control unit (500) uses masking after independent binaryzation is carried out respectively to each pixel region (15) (Masking) method is gone unless Region Of Interest, and passes through low pass filter (Low pass filter) and small object is deleted (small object remove) removes noise element, so as to exporting first singular point.
  4. 4. the island position detecting device of melting furnace according to any one of claim 1 to 3, it is characterised in that
    The connecting line (71~73) that described control unit (500) is formed to second singular point (61~65) is assigned and is based on The weighted value of the number of crossings, and explored on the image with the exploration region (75) of prescribed level, so that it is determined that The island (8), which is located at when being all added to the weighted value by the connecting line (71~73) in exploration region (75), to be had most In the exploration region (75) of big weighted value.
  5. 5. the island position detecting device of melting furnace according to claim 4, it is characterised in that
    Whether described control unit (500) judges the island (8) positioned at the seed crystal for being set to the seed crystal (340) decline contact In contact area,
    When the island (8) are located in the seed crystal contact area, the seed crystal driver element (300) is controlled so that the seed crystal (340) display unit (520) set outside molten mass surface (6), or quota is dropped to so that it generates notification signal.
  6. 6. a kind of island method for detecting position of melting furnace, for the position of detection island (8) in melting furnace (100), its feature exists In, including：
    First step, the image of molten mass surface (6) is obtained by shooting unit (200)；
    Second step, multiple first singular points about temperature or brightness are exported from the image obtained in the first step；
    Third step, the linear multiple connecting lines for exporting that multiple first singular points are connected and respectively constitute (71~ 73)；
    Four steps, the position of island (8) is detected in the region that multiple connecting lines (71~73) are intersected,
    In the third step, will be present in by Hough transformation (Hough transform) multiple described in described image First singular point is transformed to the line of virtual parameter coordinate, then obtains multiple intersection points of these lines intersection,
    When in number of crossings be respectively perpendicular with ρ, θ axle for forming the virtual parameter coordinate and with ρ, θ axle, relevant When representing each intersection point on the virtual parameter space (60) of axle, obtain and formed in these intersection points in the virtual parameter space (60) Peak value multiple second singular points (61~65),
    By the inverse transformation of Hough transformation, by the multiple second singular point (61~65) export as multiple connecting lines (71~ 73)。
  7. 7. the island method for detecting position of melting furnace according to claim 6, it is characterised in that
    In the second step, described image is divided into the pixel region (15) of prescribed level, in each pixel region (15) in, the luminance difference for being present in the pixel in the pixel region (15) is compared, and according to its comparative result, to each Pixel region (15) carries out independent binaryzation respectively, so as to export first singular point.
  8. 8. the island method for detecting position of melting furnace according to claim 7, it is characterised in that
    In the second step, after carrying out independent binaryzation respectively to each pixel region (15), masking is used (Masking) method is gone unless Region Of Interest, and passes through low pass filter (Low pass filter) and small object is deleted (small object remove) removes noise element, so as to exporting first singular point.
  9. 9. the island method for detecting position of the melting furnace according to any one of claim 6 to 8, it is characterised in that
    In the four steps, the connecting line (71~73) that second singular point (61~65) is formed is assigned and is based on The weighted value of the number of crossings, and explored on the image with the exploration region (75) of prescribed level, so that it is determined that The island (8), which is located at when being all added to the weighted value by the connecting line (71~73) in exploration region (75), to be had most In the exploration region (75) of big weighted value.
  10. 10. the island method for detecting position of melting furnace according to claim 9, it is characterised in that further comprise：
    5th step, when the island (8), which are located at, to be set in the seed crystal contact area of seed crystal (340) decline contact, by volume Display unit (520) the generation notification signal of outer setting.
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