CN101008103A - Hough transform based CZ monocrystal silicon bar diameter measuring method - Google Patents
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Cited By (15)
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CN102061517A (en) * | 2010-12-13 | 2011-05-18 | 浙江长兴众成电子有限公司 | Czochralski single crystal silicon diameter measurement method |
CN102469323A (en) * | 2010-11-18 | 2012-05-23 | 深圳Tcl新技术有限公司 | Method for converting 2D (Two Dimensional) image to 3D (Three Dimensional) image |
CN102787353A (en) * | 2012-08-15 | 2012-11-21 | 北京七星华创电子股份有限公司 | Method for measuring crystal wire of silicon rod of single crystal furnace in non-contact mode |
CN102795627A (en) * | 2012-06-19 | 2012-11-28 | 合肥瑞石测控工程技术有限公司 | Multi-parameter online monitoring and optimizing control device and method of polycrystalline silicon reduction furnace |
CN103046128A (en) * | 2012-12-21 | 2013-04-17 | 西安隆基硅材料股份有限公司 | Diameter measurement method for straight pulling single crystal |
CN103558129A (en) * | 2013-11-22 | 2014-02-05 | 王学重 | Probe type online three-dimensional imaging detection system and probe type online three-dimensional imaging detection method |
CN104990510A (en) * | 2015-07-11 | 2015-10-21 | 烟台南山学院 | Direct-pull monocrystalline silicon diameter measurement method |
CN107743531A (en) * | 2015-09-07 | 2018-02-27 | 韩国生产技术研究院 | The island position detecting device and method of melting furnace |
CN111733449A (en) * | 2020-07-07 | 2020-10-02 | 上海新昇半导体科技有限公司 | Crystal bar growth equipment and growth method |
CN112381807A (en) * | 2020-11-18 | 2021-02-19 | 北京图知天下科技有限责任公司 | Method, system and computer for detecting crystal diameter in Czochralski single crystal production |
CN113112493A (en) * | 2021-04-29 | 2021-07-13 | 北京图知天下科技有限责任公司 | Method and system for calculating seeding brightness, terminal device and storage medium |
CN113829673A (en) * | 2021-11-26 | 2021-12-24 | 武汉宏博纸品包装有限公司 | Honeycomb paper core stretching control method and system based on Hough transform |
CN114252018A (en) * | 2021-12-29 | 2022-03-29 | 西安奕斯伟材料科技有限公司 | Crystal diameter detection method, system and computer program product |
CN114399489A (en) * | 2022-01-12 | 2022-04-26 | 苏州天准科技股份有限公司 | Method for monitoring aperture diameter in crystal pulling process, storage medium and terminal |
CN115546284A (en) * | 2022-11-18 | 2022-12-30 | 浙江晶盛机电股份有限公司 | Crystal furnace binocular three-dimensional measurement compensation method and device, computer equipment and storage medium |
Family Cites Families (4)
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EP0313619B1 (en) * | 1987-05-05 | 1992-07-01 | Mobil Solar Energy Corporation | System for controlling apparatus for growing tubular crystalline bodies |
US6171391B1 (en) * | 1998-10-14 | 2001-01-09 | Memc Electronic Materials, Inc. | Method and system for controlling growth of a silicon crystal |
US6589332B1 (en) * | 1998-11-03 | 2003-07-08 | Memc Electronic Materials, Inc. | Method and system for measuring polycrystalline chunk size and distribution in the charge of a Czochralski process |
TW498402B (en) * | 2000-04-26 | 2002-08-11 | Mitsubishi Material Silicon | Method for simulating the shape of the solid-liquid interface between a single crystal and a molten liquid, and the distribution of point defect of a single crystal |
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2006
- 2006-12-28 CN CNB2006101053317A patent/CN100436657C/en active Active
Cited By (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102469323A (en) * | 2010-11-18 | 2012-05-23 | 深圳Tcl新技术有限公司 | Method for converting 2D (Two Dimensional) image to 3D (Three Dimensional) image |
CN102469323B (en) * | 2010-11-18 | 2014-02-19 | 深圳Tcl新技术有限公司 | Method for converting 2D (Two Dimensional) image to 3D (Three Dimensional) image |
CN102061517B (en) * | 2010-12-13 | 2012-03-07 | 浙江长兴众成电子有限公司 | Czochralski single crystal silicon diameter measurement method |
CN102061517A (en) * | 2010-12-13 | 2011-05-18 | 浙江长兴众成电子有限公司 | Czochralski single crystal silicon diameter measurement method |
CN102795627A (en) * | 2012-06-19 | 2012-11-28 | 合肥瑞石测控工程技术有限公司 | Multi-parameter online monitoring and optimizing control device and method of polycrystalline silicon reduction furnace |
CN102795627B (en) * | 2012-06-19 | 2013-12-25 | 合肥瑞石测控工程技术有限公司 | Multi-parameter online monitoring and optimizing control device and method of polycrystalline silicon reduction furnace |
CN102787353A (en) * | 2012-08-15 | 2012-11-21 | 北京七星华创电子股份有限公司 | Method for measuring crystal wire of silicon rod of single crystal furnace in non-contact mode |
CN102787353B (en) * | 2012-08-15 | 2015-04-01 | 北京七星华创电子股份有限公司 | Method for measuring crystal wire of silicon rod of single crystal furnace in non-contact mode |
CN103046128B (en) * | 2012-12-21 | 2015-10-28 | 西安隆基硅材料股份有限公司 | Pulling of crystals diameter measuring method |
CN103046128A (en) * | 2012-12-21 | 2013-04-17 | 西安隆基硅材料股份有限公司 | Diameter measurement method for straight pulling single crystal |
CN103558129A (en) * | 2013-11-22 | 2014-02-05 | 王学重 | Probe type online three-dimensional imaging detection system and probe type online three-dimensional imaging detection method |
CN104990510B (en) * | 2015-07-11 | 2017-10-17 | 烟台南山学院 | A kind of Czochralski single crystal silicon diameter measurement method |
CN104990510A (en) * | 2015-07-11 | 2015-10-21 | 烟台南山学院 | Direct-pull monocrystalline silicon diameter measurement method |
CN107743531A (en) * | 2015-09-07 | 2018-02-27 | 韩国生产技术研究院 | The island position detecting device and method of melting furnace |
CN111733449A (en) * | 2020-07-07 | 2020-10-02 | 上海新昇半导体科技有限公司 | Crystal bar growth equipment and growth method |
CN111733449B (en) * | 2020-07-07 | 2021-04-27 | 上海新昇半导体科技有限公司 | Crystal bar growth equipment and growth method |
CN112381807B (en) * | 2020-11-18 | 2023-06-20 | 北京图知天下科技有限责任公司 | Crystal diameter detection method, system and equipment in Czochralski crystal production |
CN112381807A (en) * | 2020-11-18 | 2021-02-19 | 北京图知天下科技有限责任公司 | Method, system and computer for detecting crystal diameter in Czochralski single crystal production |
CN113112493A (en) * | 2021-04-29 | 2021-07-13 | 北京图知天下科技有限责任公司 | Method and system for calculating seeding brightness, terminal device and storage medium |
CN113112493B (en) * | 2021-04-29 | 2024-02-02 | 北京图知天下科技有限责任公司 | Computing method, system, terminal equipment and storage medium for seeding brightness |
CN113829673A (en) * | 2021-11-26 | 2021-12-24 | 武汉宏博纸品包装有限公司 | Honeycomb paper core stretching control method and system based on Hough transform |
CN113829673B (en) * | 2021-11-26 | 2022-03-18 | 武汉宏博纸品包装有限公司 | Honeycomb paper core stretching control method and system based on Hough transform |
CN114252018A (en) * | 2021-12-29 | 2022-03-29 | 西安奕斯伟材料科技有限公司 | Crystal diameter detection method, system and computer program product |
CN114252018B (en) * | 2021-12-29 | 2024-04-30 | 西安奕斯伟材料科技股份有限公司 | Crystal diameter detection method, system and computer program product |
CN114399489A (en) * | 2022-01-12 | 2022-04-26 | 苏州天准科技股份有限公司 | Method for monitoring aperture diameter in crystal pulling process, storage medium and terminal |
CN115546284A (en) * | 2022-11-18 | 2022-12-30 | 浙江晶盛机电股份有限公司 | Crystal furnace binocular three-dimensional measurement compensation method and device, computer equipment and storage medium |
CN115546284B (en) * | 2022-11-18 | 2023-04-28 | 浙江晶盛机电股份有限公司 | Crystal furnace binocular three-dimensional measurement compensation method, device, computer equipment and storage medium |
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Effective date of registration: 20210922 Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee after: Xi'an yisiwei Material Technology Co.,Ltd. Patentee after: Xi'an yisiwei Equipment Technology Co.,Ltd. Address before: E2-002, Science Park, Xi'an University of technology, No.26, gazelle Road, Zhangba Street office, high tech Zone, Xi'an City, Shaanxi Province, 710077 Patentee before: Xi'an yisiwei Equipment Technology Co.,Ltd. |
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Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee after: Xi'an Yisiwei Material Technology Co.,Ltd. Patentee after: Xi'an Xinhui Equipment Technology Co.,Ltd. Address before: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee before: Xi'an yisiwei Material Technology Co.,Ltd. Patentee before: Xi'an yisiwei Equipment Technology Co.,Ltd. |
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