CN107740042A - Mask plate - Google Patents
Mask plate Download PDFInfo
- Publication number
- CN107740042A CN107740042A CN201711244323.5A CN201711244323A CN107740042A CN 107740042 A CN107740042 A CN 107740042A CN 201711244323 A CN201711244323 A CN 201711244323A CN 107740042 A CN107740042 A CN 107740042A
- Authority
- CN
- China
- Prior art keywords
- opening
- mask substrate
- mask
- substrate
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Abstract
A kind of mask plate, including:First mask substrate and the second mask substrate;First mask substrate offers some first openings, and the second mask substrate offers some second openings, and every one first opening corresponds with one second opening;Second mask substrate is arranged in the first mask substrate and abutted with the first mask substrate activity, it is every one first opening with its corresponding to second be open it is least partially overlapped.Above-mentioned mask plate, the first opening is opened up in first mask substrate, the second opening is opened up in second mask substrate, first is open with the opening of the lap composition mask plate of the second opening to allow organic material to pass through, the size of first opening and the second opening can design that larger, precision is relatively low, to reduce technology difficulty, and the opening of final mask plate is determined by the first opening with the second superposition of end gap part as needed, remains able to be formed the opening of the mask plate for the meet demand that size is small, precision is high.
Description
Technical field
The present invention relates to display technology field, more particularly to a kind of mask plate.
Background technology
AMOLED (Active-matrix organic light emitting diode, active matrix organic light-emitting two
Pole pipe) the evaporation of organic film carried out by mask plate, have the opening for allowing organic material to pass through on mask plate, one
One layer of ground of layer is by organic material through in opening to substrate.Mask plate is divided into shared mask plate and fine mask plate, wherein, share
For mask plate due to for being deposited organic function layer, the size of organic function layer is big, precision is low so that shares the opening on mask plate
Size is big, precision is low, and manufacture craft is simpler, and fine mask plate is because for being deposited luminescent layer, the size of luminescent layer is small, smart
Degree is high so that opening size on fine mask plate is small, precision is high, and manufacture craft difficulty is big.
The content of the invention
Based on this, it is necessary to which for the opening size on existing fine mask plate is small, precision is high, manufacture craft difficulty is big
A kind of technical problem, there is provided mask plate.
A kind of mask plate, including:First mask substrate and the second mask substrate;First mask substrate offers some
First opening, second mask substrate offer some second openings, each first opening and second opening
Correspond;Second mask substrate is arranged in first mask substrate and supported with the first mask substrate activity
Connect, it is each it is described first opening with its corresponding to it is described second be open it is least partially overlapped.
In one of the embodiments, the shape of first opening is identical with the shape of the described second opening.
In one of the embodiments, the size of first opening is identical with the size of the described second opening.
In one of the embodiments, first opening is evenly distributed in first mask substrate, and described second
Opening is evenly distributed in second mask substrate.
In one of the embodiments, the first opening rectangular array is distributed in first mask substrate, institute
The second opening rectangular array is stated to be distributed in second mask substrate.
In one of the embodiments, the mask plate also includes fastener, first mask substrate and described
Two mask substrates are fixed by the fastener.
In one of the embodiments, the shape of first mask substrate and second mask substrate is rectangle,
The length and width dimensions of second mask substrate are less than the length and width dimensions of first mask substrate.
In one of the embodiments, the quantity of the fastener 300 is four, and four fasteners 300 divide
It is not arranged on four different edges of first mask substrate, first mask substrate and second mask substrate are led to
At least one fastener 300 is crossed to fix.
In one of the embodiments, the fastener 300 is elastic plate folder, and elastic plate folder is arranged on described the
It is connected in one mask substrate and with first mask substrate, the edge of second mask substrate is located in the elastic plate folder
Between first mask substrate.
In one of the embodiments, the quantity of the elastic plate folder is four, and four elastic plate folders are set respectively
In on four different edges of first mask substrate, at least one edge of the second mask substrate is located in a bullet
Property plate folder institute the first mask substrate between.
Above-mentioned mask plate, by forming mask plate, the first mask base with the first mask substrate and the second mask substrate respectively
The first opening is opened up on plate, the lap composition of the second opening, the first opening and the second opening is opened up in the second mask substrate
The opening of mask plate is to allow organic material to pass through.So, the size of the first opening and the second opening can design larger, precision
Relatively low, to reduce technology difficulty, and the opening of final mask plate is true with the second superposition of end gap part by the first opening as needed
It is fixed, remain able to be formed the opening of the mask plate for the meet demand that size is small, precision is high.
Brief description of the drawings
Fig. 1 is the structural representation of mask plate in one embodiment;
Fig. 2 is the structural representation of the first mask substrate in Fig. 1;
Fig. 3 is the structural representation of the second mask substrate in Fig. 1;
Fig. 4 is the structural representation of the first mask substrate in another embodiment.
Embodiment
In order to facilitate the understanding of the purposes, features and advantages of the present invention, below in conjunction with the accompanying drawings to the present invention
Embodiment be described in detail.Many details are elaborated in the following description in order to fully understand this hair
It is bright.But the invention can be embodied in many other ways as described herein, those skilled in the art can be not
Similar improvement is done in the case of running counter to intension of the present invention, therefore the present invention is not limited by following public specific embodiment.
In addition, term " first ", " second " are only used for describing purpose, and it is not intended that instruction or hint relative importance
Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can be expressed or
Implicitly include at least one this feature.In the description of the invention, " multiple " are meant that at least two, such as two, three
It is individual etc., unless otherwise specifically defined.
In the present invention, unless otherwise clearly defined and limited, term " installation ", " connected ", " connection ", " fixation " etc.
Term should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or integrally;Can be that machinery connects
Connect or electrically connect;Can be joined directly together, can also be indirectly connected by intermediary, can be in two elements
The connection in portion or the interaction relationship of two elements, limited unless otherwise clear and definite.For one of ordinary skill in the art
For, the concrete meaning of above-mentioned term in the present invention can be understood as the case may be.
It should be noted that when element is referred to as " being fixed on " or " being arranged at " another element, it can be directly another
On one element or there may also be element placed in the middle.When an element is considered as " connection " another element, it can be with
It is directly to another element or may be simultaneously present centering elements.Term as used herein " vertically ", " level
", " on ", " under ", "left", "right" and similar statement for illustrative purposes only, be not offered as being uniquely to implement
Mode.
Such as, a kind of mask plate, including:First mask substrate and the second mask substrate;First mask substrate opens up
There are some first openings, second mask substrate offers some second openings, each first opening and one described the
Two openings correspond;Second mask substrate is arranged in first mask substrate and lived with first mask substrate
It is dynamic to abut, each first opening with its corresponding to described second be open it is least partially overlapped.
In the prior art, for the mask plate of luminescent layer to be deposited, because the size of luminescent layer is small, precision is high so that institute
Opening size on the mask plate of demand is small, precision is high, and the manufacture craft difficulty of such mask plate is big.In the above-mentioned of the present invention
In embodiment, mask plate is formed with the first mask substrate and the second mask substrate respectively, opening up first in the first mask substrate opens
Mouthful, open up the second opening in the second mask substrate, the opening of the lap composition mask plate of the first opening and the second opening with
Organic material is allowed to pass through.So, the size of the first opening and the second opening can design that larger, precision is relatively low, to reduce work
Skill difficulty, and the opening of final mask plate is determined by the first opening with the second superposition of end gap part as needed, remains able to shape
Into the opening of the mask plate for the meet demand that size is small, precision is high.
For the ease of understanding the present invention, another example is to refer to Fig. 1, Fig. 2 and Fig. 3, a kind of mask plate 10, including:
First mask substrate 100 and the second mask substrate 200, the second mask substrate 200 are arranged in the first mask substrate 100.First
The mask substrate 200 of mask substrate 100 and second is used for the mask plate for cooperatively forming the evaporation for luminescent layer.
First mask substrate 100 offers some first openings 110, and the second mask substrate 200 offers some second and opened
Mouth 120, every opening 120 of one first opening 110 and one second correspond, i.e. each first opening corresponds to one second and opened
Mouthful.First opening 110 and the second opening 120 be used to allowing organic material by, by organic material evaporation on substrate with shape
Into luminescent layer.In order to reduce technology difficulty, the size of the first opening 110 and the second opening 120 is more than the size of tradition opening, this
It can be reached using technical solution of the present invention, and remain able to be formed the mask for the meet demand that size is small, precision is high
The opening of plate;That is, first opening 110 and second opening 120 size relative to the mask plate of demand in the prior art opening
Size is larger.For example, the shape of the first opening and the second opening is different, and both overlappings have coincidence part, i.e. lap,
Coincidence part is the plated film opening of mask plate, so, can be individually using the first mask substrate or the in different evaporation steps
Two mask substrates, it can also merge using the first mask substrate and the second mask substrate, so as to save process costs and reduce work
On the basis of skill difficulty, evaporation operation is facilitated, accuracy requirement is maintained, also improves process efficiency.
For example, the first opening 110 is evenly distributed in the first mask substrate 100, the second opening 120 is evenly distributed on second
In mask substrate 200.In another example the first 110 rectangular arrays of opening are distributed in the first mask substrate 100, the second opening 120
Rectangular array is distributed in the second mask substrate.For example, first opening 110 shape include but is not limited to square, rectangle,
Rhombus, circle and ellipse, for example, the shape of the second opening 210 includes but is not limited to square, rectangle, rhombus, circle and ellipse
Circle, it can be needed to design the first opening 110 of respective shapes and the second opening 210 according to evaporation, to allow to obtain what is needed
Plated film opening 101.
First mask substrate 100 is arranged in the second mask substrate 200 and abutted with the activity of the second mask substrate 200, often
One first opening 110 with its corresponding to the second opening it is 120 least partially overlapped, the first opening 110 and second be open it is 120 overlapping
Part be mask plate plated film opening 101.Second mask substrate 200 abuts with the activity of the first mask substrate 100, that is, is arranged on
The second mask substrate 200 in first mask substrate 100 can move relative to the first mask substrate 100, and cause the first opening
The 110 scope differences overlapping with the second opening 120.For example, the shape of plated film opening 101 include but is not limited to square, rectangle,
Rhombus, circle and ellipse, it can be needed to design the plated film opening 101 of respective shapes according to evaporation, respective shapes are designed with corresponding
First opening 110 and second opening 210.
When the first opening 110 and completely not overlapping the second opening 120, the first opening 110 is hidden by the second mask substrate 200
Gear, the second opening 120 are blocked by the first mask substrate 100, and the sizableness of mask plate plated film opening 101 is in for zero, mask plate
Not being open can allow organic material to pass through.First opening 110 and second opening 120 partly overlap to it is completely overlapped when, first
The 120 overlapping parts of opening of opening 110 and second are not blocked by the first mask substrate 100 or the second mask substrate 200, and first
The 120 nonoverlapping parts of opening of opening 110 and second can be blocked by the second mask substrate 200 and the first mask substrate 100 respectively,
Machine material is not allow for by the way that the first opening 110 and the plated film opening 101 that the second 120 overlapping parts of opening are mask plate can
Allow organic material by, and the size of the plated film opening 101 of mask plate can pass through change first opening 110 and second opening
120 overlapping range increases to certain limit always from zero.Therefore less technology difficulty is only needed in the He of the first mask substrate 100
The first opening 110 that manufactured size is big, precision is low is distinguished in second mask substrate 200, and when in use, covered by mobile second
Ilm substrate 200 is to control the first opening 110 and the second 120 overlapping scopes of opening, to control the big of mask plate plated film opening 101
It is small, make the big I of plated film opening 101 increase to certain limit always from zero, obtain the mask plate that any size is small, precision is high
Plated film opening 101.Such technology mode, the mask plate with the opening that size is small, precision is high can be obtained, so as to reduce
The technology difficulty of mask plate.
In order that the first opening 110 and the second opening 120 obtain the pattern of plated film opening 101 of rule, example after partly overlapping
Such as, the shape of the first opening 110 is identical with the shape of the second opening 120.So, the of the first opening 110 of rectangle and rectangle
Two openings 120 partly overlap, can make the first opening 110 and the second opening 120 partly overlap after obtain the plated film opening of rule
101 patterns.
In order to further reduce technology difficulty and obtain the pattern of plated film opening 101 of rule, for example, the first opening 110
Shape with second opening 120 shape just as, and first opening 110 size with second be open 120 size it is identical.This
Sample, the first mask substrate 100 and the second mask substrate 200 can use identical tool, and identical is obtained by identical technique
Opening, reduces technology difficulty.And when the first opening 110 and the second opening 120 are not rectangles, for circular or trapezoidal grade its
During its shape, same shape and the first opening 110 of identical size and the second opening 120 can obtain rule after partly overlapping
The pattern of plated film opening 101.
In order that the first opening 110 of the first mask substrate 100 and the second of the second mask substrate 200 are open 120 at least
Partly overlap, mask plate is fixed after obtaining required plated film opening 101, to avoid being moved, for example, please join
Fig. 4 is read, mask plate also includes fastener 300, and the first mask substrate 100 and the second mask substrate 200 pass through fastener 300
It is fixed.After glass substrate is conveyed into evaporation cavity, the first mask substrate 100 is bonded with glass substrate contraposition first, so
The second mask substrate 200 is carried out into contraposition with glass substrate afterwards to be bonded, so as to obtain the size of default plated film opening 101, by
In in actual use, although under certain active force, the second mask substrate 200 and the first mask substrate 100 can
Fitting does not relatively move, but when by extraneous possible interference, the second mask substrate 200 and the first mask substrate
100 still easily relatively move.And by the first mask after the first mask substrate 100 and the fitting of the second mask substrate 200
The mask substrate 200 of substrate 100 and second is fixed by fastener 300, can be effectively prevented from the second mask substrate 200 and
One mask substrate 100 relatively moves so that and the pattern of plated film opening 101 changes, so as to influence the evaporation effect of organic material,
Reduce the yield of glass substrate.
For example, a kind of most common situation is, the shape of the first mask substrate 100 and the second mask substrate 200 is square
Shape, the length and width dimensions of the second mask substrate 200 are less than the length and width dimensions of the first mask substrate 100.The length of second mask substrate 200
Wide size is less than the length and width dimensions of the first mask substrate 100, is all covered for shape for the first mask substrate 100 and second of rectangle
For ilm substrate 200, it is:The size of the length direction of second mask substrate 200 is less than the length side of the first mask substrate 100
To size, the size of the width of the second mask substrate 200 is less than the size of the width of the first mask substrate 100.
In actual applications, fastener 300 is arranged in the first larger mask substrate 100 of length and width dimensions, and in order to
Relative slip of second mask substrate 200 in the first mask substrate 100 is not influenceed, for example, fastener 300 is covered positioned at first
The edge of ilm substrate 100, and by fixing the edge of the second mask substrate 200 so that the first mask substrate 100 and second is covered
The phase of ilm substrate 200 is fixed.Assuming that the first mask substrate 100 is static, the second mask substrate 200 can be with respect to the first mask substrate 100
Toward four direction movement up and down to form the plated film opening 101 of the mask plate of different shape and size.So, covered second
The length and width dimensions of ilm substrate 200 are less than the length and width dimensions of the first mask substrate 100, and the edge of the second mask substrate 200 is first
In the edge of mask substrate 100,200 relative first mask substrate, 100 past four different directions up and down of the second mask substrate
It is mobile, the different edges for causing the second mask substrate 200 are changed with the distance at the corresponding different edges of the first mask substrate 100
Become, if only setting fastener 300 at an edge of the first mask substrate 100, when the second mask substrate 200 is toward away from first
After the border movement of mask substrate 100, it is possible to which fastener 300 can not connect with the edge of the second mask substrate 200
Touch, then can not be consolidated the first mask substrate 100 and the second mask substrate 200 by fastener 300 by fastener 300
It is fixed.
In order that fastener 300 as much as possible fixes the first mask substrate 100 and the second mask substrate 200, for example,
The quantity of fastener 300 is four, and four fasteners 300 are respectively arranged at four different edges of the first mask substrate 100
On edge, the first mask substrate 100 and the second mask substrate 200 are fixed by least one fastener 300.So, no matter
Two mask substrates 200 are moved to close to which edge of the first mask substrate 100, can pass through a hithermost fastener
300 fix.
For example, in one of the embodiments, fastener 300 presss from both sides for elastic plate, elastic plate folder is arranged on the first mask
It is connected on substrate 100 and with the first mask substrate 100, the edge of the second mask substrate 200 is located in elastic plate folder and first and covered
Between ilm substrate 100.In another example the quantity of elastic plate folder is four, four elastic plate folders are respectively arranged at the first mask substrate
On 100 four different edges, 200 at least one edge of the second mask substrate is located in elastic plate folder and the first mask base
Between plate 100.For example, plate folder is made up of fixed iron wire, spring, metallic plate.The concrete structure of plate folder is prior art, herein not
Repeat again.It should be noted that in addition to elastic plate presss from both sides, fastener 300 also can make the first mask substrate 100 to be other
The device fixed with the second mask substrate 200, no longer illustrates one by one herein.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, the scope that this specification is recorded all is considered to be.
Embodiment described above only expresses the several embodiments of the present invention, and its description is more specific and detailed, but simultaneously
Can not therefore it be construed as limiting the scope of the patent.It should be pointed out that come for one of ordinary skill in the art
Say, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Scope.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (10)
- A kind of 1. mask plate, it is characterised in that including:First mask substrate and the second mask substrate;First mask substrate offers some first openings, and second mask substrate offers some second openings, often One first opening corresponds with second opening;Second mask substrate is arranged in first mask substrate and abutted with the first mask substrate activity, each It is described first opening with its corresponding to it is described second be open it is least partially overlapped.
- 2. mask plate according to claim 1, it is characterised in that the shape of first opening and the described second opening Shape is identical.
- 3. mask plate according to claim 2, it is characterised in that the size of first opening and the described second opening Size is identical.
- 4. mask plate according to claim 1, it is characterised in that first opening is evenly distributed on first mask On substrate, second opening is evenly distributed in second mask substrate.
- 5. mask plate according to claim 4, it is characterised in that the first opening rectangular array is distributed in described the In one mask substrate, the second opening rectangular array is distributed in second mask substrate.
- 6. mask plate according to claim 1, it is characterised in that the mask plate also includes fastener, and described first Mask substrate and second mask substrate are fixed by the fastener.
- 7. mask plate according to claim 6, it is characterised in that first mask substrate and second mask substrate Shape be rectangle, the length and width dimensions of second mask substrate are less than the length and width dimensions of first mask substrate.
- 8. mask plate according to claim 7, it is characterised in that the quantity of the fastener 300 is four, four institutes State fastener 300 to be respectively arranged on four different edges of first mask substrate, first mask substrate and institute The second mask substrate is stated to fix by least one fastener 300.
- 9. mask plate according to claim 7, it is characterised in that the fastener 300 presss from both sides for elastic plate, the elasticity Plate folder is arranged in first mask substrate and is connected with first mask substrate, the edge folder of second mask substrate Between elastic plate folder and first mask substrate.
- 10. mask plate according to claim 9, it is characterised in that the quantity of the elastic plate folder is four, described in four Elastic plate folder is respectively arranged on four different edges of first mask substrate, at least one side of the second mask substrate Edge is located between an elastic plate folder and the first mask substrate of institute.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201711244323.5A CN107740042B (en) | 2017-11-30 | 2017-11-30 | Mask plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201711244323.5A CN107740042B (en) | 2017-11-30 | 2017-11-30 | Mask plate |
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Publication Number | Publication Date |
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CN107740042A true CN107740042A (en) | 2018-02-27 |
CN107740042B CN107740042B (en) | 2021-04-06 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201711244323.5A Active CN107740042B (en) | 2017-11-30 | 2017-11-30 | Mask plate |
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CN (1) | CN107740042B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111826608A (en) * | 2020-07-30 | 2020-10-27 | 昆山工研院新型平板显示技术中心有限公司 | Mask plate, preparation method of mask plate and evaporation device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN203834005U (en) * | 2014-05-07 | 2014-09-17 | 京东方科技集团股份有限公司 | Mask plate and mask assembly |
CN204265826U (en) * | 2014-12-02 | 2015-04-15 | 昆山工研院新型平板显示技术中心有限公司 | Metal mask version |
CN205688000U (en) * | 2016-06-29 | 2016-11-16 | 鄂尔多斯市源盛光电有限责任公司 | A kind of mask plate |
-
2017
- 2017-11-30 CN CN201711244323.5A patent/CN107740042B/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN203834005U (en) * | 2014-05-07 | 2014-09-17 | 京东方科技集团股份有限公司 | Mask plate and mask assembly |
CN204265826U (en) * | 2014-12-02 | 2015-04-15 | 昆山工研院新型平板显示技术中心有限公司 | Metal mask version |
CN205688000U (en) * | 2016-06-29 | 2016-11-16 | 鄂尔多斯市源盛光电有限责任公司 | A kind of mask plate |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111826608A (en) * | 2020-07-30 | 2020-10-27 | 昆山工研院新型平板显示技术中心有限公司 | Mask plate, preparation method of mask plate and evaporation device |
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CN107740042B (en) | 2021-04-06 |
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