CN107740042A

CN107740042A - Mask plate

Info

Publication number: CN107740042A
Application number: CN201711244323.5A
Authority: CN
Inventors: 张雪峰; 柯贤军; 苏君海; 李建华
Original assignee: Truly Huizhou Smart Display Ltd
Current assignee: Truly Huizhou Smart Display Ltd
Priority date: 2017-11-30
Filing date: 2017-11-30
Publication date: 2018-02-27
Anticipated expiration: 2037-11-30
Also published as: CN107740042B

Abstract

A kind of mask plate, including：First mask substrate and the second mask substrate；First mask substrate offers some first openings, and the second mask substrate offers some second openings, and every one first opening corresponds with one second opening；Second mask substrate is arranged in the first mask substrate and abutted with the first mask substrate activity, it is every one first opening with its corresponding to second be open it is least partially overlapped.Above-mentioned mask plate, the first opening is opened up in first mask substrate, the second opening is opened up in second mask substrate, first is open with the opening of the lap composition mask plate of the second opening to allow organic material to pass through, the size of first opening and the second opening can design that larger, precision is relatively low, to reduce technology difficulty, and the opening of final mask plate is determined by the first opening with the second superposition of end gap part as needed, remains able to be formed the opening of the mask plate for the meet demand that size is small, precision is high.

Description

Mask plate

Technical field

The present invention relates to display technology field, more particularly to a kind of mask plate.

Background technology

AMOLED (Active-matrix organic light emitting diode, active matrix organic light-emitting two Pole pipe) the evaporation of organic film carried out by mask plate, have the opening for allowing organic material to pass through on mask plate, one One layer of ground of layer is by organic material through in opening to substrate.Mask plate is divided into shared mask plate and fine mask plate, wherein, share For mask plate due to for being deposited organic function layer, the size of organic function layer is big, precision is low so that shares the opening on mask plate Size is big, precision is low, and manufacture craft is simpler, and fine mask plate is because for being deposited luminescent layer, the size of luminescent layer is small, smart Degree is high so that opening size on fine mask plate is small, precision is high, and manufacture craft difficulty is big.

The content of the invention

Based on this, it is necessary to which for the opening size on existing fine mask plate is small, precision is high, manufacture craft difficulty is big A kind of technical problem, there is provided mask plate.

A kind of mask plate, including：First mask substrate and the second mask substrate；First mask substrate offers some First opening, second mask substrate offer some second openings, each first opening and second opening Correspond；Second mask substrate is arranged in first mask substrate and supported with the first mask substrate activity Connect, it is each it is described first opening with its corresponding to it is described second be open it is least partially overlapped.

In one of the embodiments, the shape of first opening is identical with the shape of the described second opening.

In one of the embodiments, the size of first opening is identical with the size of the described second opening.

In one of the embodiments, first opening is evenly distributed in first mask substrate, and described second Opening is evenly distributed in second mask substrate.

In one of the embodiments, the first opening rectangular array is distributed in first mask substrate, institute The second opening rectangular array is stated to be distributed in second mask substrate.

In one of the embodiments, the mask plate also includes fastener, first mask substrate and described Two mask substrates are fixed by the fastener.

In one of the embodiments, the shape of first mask substrate and second mask substrate is rectangle, The length and width dimensions of second mask substrate are less than the length and width dimensions of first mask substrate.

In one of the embodiments, the quantity of the fastener 300 is four, and four fasteners 300 divide It is not arranged on four different edges of first mask substrate, first mask substrate and second mask substrate are led to At least one fastener 300 is crossed to fix.

In one of the embodiments, the fastener 300 is elastic plate folder, and elastic plate folder is arranged on described the It is connected in one mask substrate and with first mask substrate, the edge of second mask substrate is located in the elastic plate folder Between first mask substrate.

In one of the embodiments, the quantity of the elastic plate folder is four, and four elastic plate folders are set respectively In on four different edges of first mask substrate, at least one edge of the second mask substrate is located in a bullet Property plate folder institute the first mask substrate between.

Above-mentioned mask plate, by forming mask plate, the first mask base with the first mask substrate and the second mask substrate respectively The first opening is opened up on plate, the lap composition of the second opening, the first opening and the second opening is opened up in the second mask substrate The opening of mask plate is to allow organic material to pass through.So, the size of the first opening and the second opening can design larger, precision Relatively low, to reduce technology difficulty, and the opening of final mask plate is true with the second superposition of end gap part by the first opening as needed It is fixed, remain able to be formed the opening of the mask plate for the meet demand that size is small, precision is high.

Brief description of the drawings

Fig. 1 is the structural representation of mask plate in one embodiment；

Fig. 2 is the structural representation of the first mask substrate in Fig. 1；

Fig. 3 is the structural representation of the second mask substrate in Fig. 1；

Fig. 4 is the structural representation of the first mask substrate in another embodiment.

Embodiment

In order to facilitate the understanding of the purposes, features and advantages of the present invention, below in conjunction with the accompanying drawings to the present invention Embodiment be described in detail.Many details are elaborated in the following description in order to fully understand this hair It is bright.But the invention can be embodied in many other ways as described herein, those skilled in the art can be not Similar improvement is done in the case of running counter to intension of the present invention, therefore the present invention is not limited by following public specific embodiment.

In addition, term " first ", " second " are only used for describing purpose, and it is not intended that instruction or hint relative importance Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can be expressed or Implicitly include at least one this feature.In the description of the invention, " multiple " are meant that at least two, such as two, three It is individual etc., unless otherwise specifically defined.

In the present invention, unless otherwise clearly defined and limited, term " installation ", " connected ", " connection ", " fixation " etc. Term should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or integrally；Can be that machinery connects Connect or electrically connect；Can be joined directly together, can also be indirectly connected by intermediary, can be in two elements The connection in portion or the interaction relationship of two elements, limited unless otherwise clear and definite.For one of ordinary skill in the art For, the concrete meaning of above-mentioned term in the present invention can be understood as the case may be.

It should be noted that when element is referred to as " being fixed on " or " being arranged at " another element, it can be directly another On one element or there may also be element placed in the middle.When an element is considered as " connection " another element, it can be with It is directly to another element or may be simultaneously present centering elements.Term as used herein " vertically ", " level ", " on ", " under ", "left", "right" and similar statement for illustrative purposes only, be not offered as being uniquely to implement Mode.

Such as, a kind of mask plate, including：First mask substrate and the second mask substrate；First mask substrate opens up There are some first openings, second mask substrate offers some second openings, each first opening and one described the Two openings correspond；Second mask substrate is arranged in first mask substrate and lived with first mask substrate It is dynamic to abut, each first opening with its corresponding to described second be open it is least partially overlapped.

In the prior art, for the mask plate of luminescent layer to be deposited, because the size of luminescent layer is small, precision is high so that institute Opening size on the mask plate of demand is small, precision is high, and the manufacture craft difficulty of such mask plate is big.In the above-mentioned of the present invention In embodiment, mask plate is formed with the first mask substrate and the second mask substrate respectively, opening up first in the first mask substrate opens Mouthful, open up the second opening in the second mask substrate, the opening of the lap composition mask plate of the first opening and the second opening with Organic material is allowed to pass through.So, the size of the first opening and the second opening can design that larger, precision is relatively low, to reduce work Skill difficulty, and the opening of final mask plate is determined by the first opening with the second superposition of end gap part as needed, remains able to shape Into the opening of the mask plate for the meet demand that size is small, precision is high.

For the ease of understanding the present invention, another example is to refer to Fig. 1, Fig. 2 and Fig. 3, a kind of mask plate 10, including： First mask substrate 100 and the second mask substrate 200, the second mask substrate 200 are arranged in the first mask substrate 100.First The mask substrate 200 of mask substrate 100 and second is used for the mask plate for cooperatively forming the evaporation for luminescent layer.

First mask substrate 100 offers some first openings 110, and the second mask substrate 200 offers some second and opened Mouth 120, every opening 120 of one first opening 110 and one second correspond, i.e. each first opening corresponds to one second and opened Mouthful.First opening 110 and the second opening 120 be used to allowing organic material by, by organic material evaporation on substrate with shape Into luminescent layer.In order to reduce technology difficulty, the size of the first opening 110 and the second opening 120 is more than the size of tradition opening, this It can be reached using technical solution of the present invention, and remain able to be formed the mask for the meet demand that size is small, precision is high The opening of plate；That is, first opening 110 and second opening 120 size relative to the mask plate of demand in the prior art opening Size is larger.For example, the shape of the first opening and the second opening is different, and both overlappings have coincidence part, i.e. lap, Coincidence part is the plated film opening of mask plate, so, can be individually using the first mask substrate or the in different evaporation steps Two mask substrates, it can also merge using the first mask substrate and the second mask substrate, so as to save process costs and reduce work On the basis of skill difficulty, evaporation operation is facilitated, accuracy requirement is maintained, also improves process efficiency.

For example, the first opening 110 is evenly distributed in the first mask substrate 100, the second opening 120 is evenly distributed on second In mask substrate 200.In another example the first 110 rectangular arrays of opening are distributed in the first mask substrate 100, the second opening 120 Rectangular array is distributed in the second mask substrate.For example, first opening 110 shape include but is not limited to square, rectangle, Rhombus, circle and ellipse, for example, the shape of the second opening 210 includes but is not limited to square, rectangle, rhombus, circle and ellipse Circle, it can be needed to design the first opening 110 of respective shapes and the second opening 210 according to evaporation, to allow to obtain what is needed Plated film opening 101.

First mask substrate 100 is arranged in the second mask substrate 200 and abutted with the activity of the second mask substrate 200, often One first opening 110 with its corresponding to the second opening it is 120 least partially overlapped, the first opening 110 and second be open it is 120 overlapping Part be mask plate plated film opening 101.Second mask substrate 200 abuts with the activity of the first mask substrate 100, that is, is arranged on The second mask substrate 200 in first mask substrate 100 can move relative to the first mask substrate 100, and cause the first opening The 110 scope differences overlapping with the second opening 120.For example, the shape of plated film opening 101 include but is not limited to square, rectangle, Rhombus, circle and ellipse, it can be needed to design the plated film opening 101 of respective shapes according to evaporation, respective shapes are designed with corresponding First opening 110 and second opening 210.

When the first opening 110 and completely not overlapping the second opening 120, the first opening 110 is hidden by the second mask substrate 200 Gear, the second opening 120 are blocked by the first mask substrate 100, and the sizableness of mask plate plated film opening 101 is in for zero, mask plate Not being open can allow organic material to pass through.First opening 110 and second opening 120 partly overlap to it is completely overlapped when, first The 120 overlapping parts of opening of opening 110 and second are not blocked by the first mask substrate 100 or the second mask substrate 200, and first The 120 nonoverlapping parts of opening of opening 110 and second can be blocked by the second mask substrate 200 and the first mask substrate 100 respectively, Machine material is not allow for by the way that the first opening 110 and the plated film opening 101 that the second 120 overlapping parts of opening are mask plate can Allow organic material by, and the size of the plated film opening 101 of mask plate can pass through change first opening 110 and second opening 120 overlapping range increases to certain limit always from zero.Therefore less technology difficulty is only needed in the He of the first mask substrate 100 The first opening 110 that manufactured size is big, precision is low is distinguished in second mask substrate 200, and when in use, covered by mobile second Ilm substrate 200 is to control the first opening 110 and the second 120 overlapping scopes of opening, to control the big of mask plate plated film opening 101 It is small, make the big I of plated film opening 101 increase to certain limit always from zero, obtain the mask plate that any size is small, precision is high Plated film opening 101.Such technology mode, the mask plate with the opening that size is small, precision is high can be obtained, so as to reduce The technology difficulty of mask plate.

In order that the first opening 110 and the second opening 120 obtain the pattern of plated film opening 101 of rule, example after partly overlapping Such as, the shape of the first opening 110 is identical with the shape of the second opening 120.So, the of the first opening 110 of rectangle and rectangle Two openings 120 partly overlap, can make the first opening 110 and the second opening 120 partly overlap after obtain the plated film opening of rule 101 patterns.

In order to further reduce technology difficulty and obtain the pattern of plated film opening 101 of rule, for example, the first opening 110 Shape with second opening 120 shape just as, and first opening 110 size with second be open 120 size it is identical.This Sample, the first mask substrate 100 and the second mask substrate 200 can use identical tool, and identical is obtained by identical technique Opening, reduces technology difficulty.And when the first opening 110 and the second opening 120 are not rectangles, for circular or trapezoidal grade its During its shape, same shape and the first opening 110 of identical size and the second opening 120 can obtain rule after partly overlapping The pattern of plated film opening 101.

In order that the first opening 110 of the first mask substrate 100 and the second of the second mask substrate 200 are open 120 at least Partly overlap, mask plate is fixed after obtaining required plated film opening 101, to avoid being moved, for example, please join Fig. 4 is read, mask plate also includes fastener 300, and the first mask substrate 100 and the second mask substrate 200 pass through fastener 300 It is fixed.After glass substrate is conveyed into evaporation cavity, the first mask substrate 100 is bonded with glass substrate contraposition first, so The second mask substrate 200 is carried out into contraposition with glass substrate afterwards to be bonded, so as to obtain the size of default plated film opening 101, by In in actual use, although under certain active force, the second mask substrate 200 and the first mask substrate 100 can Fitting does not relatively move, but when by extraneous possible interference, the second mask substrate 200 and the first mask substrate 100 still easily relatively move.And by the first mask after the first mask substrate 100 and the fitting of the second mask substrate 200 The mask substrate 200 of substrate 100 and second is fixed by fastener 300, can be effectively prevented from the second mask substrate 200 and One mask substrate 100 relatively moves so that and the pattern of plated film opening 101 changes, so as to influence the evaporation effect of organic material, Reduce the yield of glass substrate.

For example, a kind of most common situation is, the shape of the first mask substrate 100 and the second mask substrate 200 is square Shape, the length and width dimensions of the second mask substrate 200 are less than the length and width dimensions of the first mask substrate 100.The length of second mask substrate 200 Wide size is less than the length and width dimensions of the first mask substrate 100, is all covered for shape for the first mask substrate 100 and second of rectangle For ilm substrate 200, it is：The size of the length direction of second mask substrate 200 is less than the length side of the first mask substrate 100 To size, the size of the width of the second mask substrate 200 is less than the size of the width of the first mask substrate 100.

In actual applications, fastener 300 is arranged in the first larger mask substrate 100 of length and width dimensions, and in order to Relative slip of second mask substrate 200 in the first mask substrate 100 is not influenceed, for example, fastener 300 is covered positioned at first The edge of ilm substrate 100, and by fixing the edge of the second mask substrate 200 so that the first mask substrate 100 and second is covered The phase of ilm substrate 200 is fixed.Assuming that the first mask substrate 100 is static, the second mask substrate 200 can be with respect to the first mask substrate 100 Toward four direction movement up and down to form the plated film opening 101 of the mask plate of different shape and size.So, covered second The length and width dimensions of ilm substrate 200 are less than the length and width dimensions of the first mask substrate 100, and the edge of the second mask substrate 200 is first In the edge of mask substrate 100,200 relative first mask substrate, 100 past four different directions up and down of the second mask substrate It is mobile, the different edges for causing the second mask substrate 200 are changed with the distance at the corresponding different edges of the first mask substrate 100 Become, if only setting fastener 300 at an edge of the first mask substrate 100, when the second mask substrate 200 is toward away from first After the border movement of mask substrate 100, it is possible to which fastener 300 can not connect with the edge of the second mask substrate 200 Touch, then can not be consolidated the first mask substrate 100 and the second mask substrate 200 by fastener 300 by fastener 300 It is fixed.

In order that fastener 300 as much as possible fixes the first mask substrate 100 and the second mask substrate 200, for example, The quantity of fastener 300 is four, and four fasteners 300 are respectively arranged at four different edges of the first mask substrate 100 On edge, the first mask substrate 100 and the second mask substrate 200 are fixed by least one fastener 300.So, no matter Two mask substrates 200 are moved to close to which edge of the first mask substrate 100, can pass through a hithermost fastener 300 fix.

For example, in one of the embodiments, fastener 300 presss from both sides for elastic plate, elastic plate folder is arranged on the first mask It is connected on substrate 100 and with the first mask substrate 100, the edge of the second mask substrate 200 is located in elastic plate folder and first and covered Between ilm substrate 100.In another example the quantity of elastic plate folder is four, four elastic plate folders are respectively arranged at the first mask substrate On 100 four different edges, 200 at least one edge of the second mask substrate is located in elastic plate folder and the first mask base Between plate 100.For example, plate folder is made up of fixed iron wire, spring, metallic plate.The concrete structure of plate folder is prior art, herein not Repeat again.It should be noted that in addition to elastic plate presss from both sides, fastener 300 also can make the first mask substrate 100 to be other The device fixed with the second mask substrate 200, no longer illustrates one by one herein.

Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited In contradiction, the scope that this specification is recorded all is considered to be.

Embodiment described above only expresses the several embodiments of the present invention, and its description is more specific and detailed, but simultaneously Can not therefore it be construed as limiting the scope of the patent.It should be pointed out that come for one of ordinary skill in the art Say, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention Scope.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.

Claims

A kind of 1. mask plate, it is characterised in that including：First mask substrate and the second mask substrate；

First mask substrate offers some first openings, and second mask substrate offers some second openings, often One first opening corresponds with second opening；

Second mask substrate is arranged in first mask substrate and abutted with the first mask substrate activity, each It is described first opening with its corresponding to it is described second be open it is least partially overlapped.
2. mask plate according to claim 1, it is characterised in that the shape of first opening and the described second opening Shape is identical.
3. mask plate according to claim 2, it is characterised in that the size of first opening and the described second opening Size is identical.
4. mask plate according to claim 1, it is characterised in that first opening is evenly distributed on first mask On substrate, second opening is evenly distributed in second mask substrate.
5. mask plate according to claim 4, it is characterised in that the first opening rectangular array is distributed in described the In one mask substrate, the second opening rectangular array is distributed in second mask substrate.
6. mask plate according to claim 1, it is characterised in that the mask plate also includes fastener, and described first Mask substrate and second mask substrate are fixed by the fastener.
7. mask plate according to claim 6, it is characterised in that first mask substrate and second mask substrate Shape be rectangle, the length and width dimensions of second mask substrate are less than the length and width dimensions of first mask substrate.
8. mask plate according to claim 7, it is characterised in that the quantity of the fastener 300 is four, four institutes State fastener 300 to be respectively arranged on four different edges of first mask substrate, first mask substrate and institute The second mask substrate is stated to fix by least one fastener 300.
9. mask plate according to claim 7, it is characterised in that the fastener 300 presss from both sides for elastic plate, the elasticity Plate folder is arranged in first mask substrate and is connected with first mask substrate, the edge folder of second mask substrate Between elastic plate folder and first mask substrate.
10. mask plate according to claim 9, it is characterised in that the quantity of the elastic plate folder is four, described in four Elastic plate folder is respectively arranged on four different edges of first mask substrate, at least one side of the second mask substrate Edge is located between an elastic plate folder and the first mask substrate of institute.