CN107726060A - A kind of array light source lighting device for exposure machine - Google Patents
A kind of array light source lighting device for exposure machine Download PDFInfo
- Publication number
- CN107726060A CN107726060A CN201711078214.0A CN201711078214A CN107726060A CN 107726060 A CN107726060 A CN 107726060A CN 201711078214 A CN201711078214 A CN 201711078214A CN 107726060 A CN107726060 A CN 107726060A
- Authority
- CN
- China
- Prior art keywords
- lens
- light source
- lenticule
- optical tunnel
- lamp bead
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 46
- 239000011324 bead Substances 0.000 claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 230000003321 amplification Effects 0.000 claims abstract description 4
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 4
- 238000009434 installation Methods 0.000 claims description 17
- 238000003780 insertion Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 4
- 238000009738 saturating Methods 0.000 claims 1
- 230000001795 light effect Effects 0.000 description 6
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 6
- 229910052753 mercury Inorganic materials 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21K—NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE; LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE; LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL; LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATING ELEMENTS; LIGHT SOURCES NOT OTHERWISE PROVIDED FOR
- F21K9/00—Light sources using semiconductor devices as light-generating elements, e.g. using light-emitting diodes [LED] or lasers
- F21K9/20—Light sources comprising attachment means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V15/00—Protecting lighting devices from damage
- F21V15/02—Cages
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V17/00—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages
- F21V17/10—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages characterised by specific fastening means or way of fastening
- F21V17/12—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages characterised by specific fastening means or way of fastening by screwing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V19/00—Fastening of light sources or lamp holders
- F21V19/001—Fastening of light sources or lamp holders the light sources being semiconductors devices, e.g. LEDs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V5/00—Refractors for light sources
- F21V5/04—Refractors for light sources of lens shape
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
- F21Y2115/00—Light-generating elements of semiconductor light sources
- F21Y2115/10—Light-emitting diodes [LED]
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optics & Photonics (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Abstract
The invention discloses a kind of array light source lighting device for exposure machine, including LED light source, LED light source includes fixed bottom plate and lamp bead component, LED lamp bead component includes substrate, the LED lamp bead and lampshade lens being fixed on substrate, lampshade lens include the collimation lens and collecting lens being detachably fixed by fixed structure, collecting lens is arranged at the light emission side of collimation lens, condenser lens is disposed with front of LED lamp bead component, optical tunnel, magnification lens group and exposure receiving plane, light is collected to the incident end face of optical tunnel by condenser lens, optical tunnel is taper optical tunnel, the area of the incident end face of optical tunnel is more than the area of outgoing end face, imaged in after the light amplification that magnification lens group sends optical tunnel outgoing end face on exposure receiving plane.The array light source lighting device utilizes LED array light source to be used for exposure machine, using the teaching of the invention it is possible to provide the uniform plane of exposure of hot spot, structure is compacter, and cost is lower.
Description
Technical field
The present invention relates to a kind of array light source lighting device, more particularly to a kind of array light source for exposure machine to illuminate dress
Put.
Background technology
Light source in exposure machine technical field is generally traditional mercury lamp, but mercury lamp has many weak points.Mercury lamp opens
It is dynamic to need to preheat.The life-span of mercury lamp is shorter, general only 1000 hours or so.The power consumption of mercury lamp is larger, and its wavelength contains infrared waves
Section and the efficiency of itself can lowly produce a large amount of heat energy.Mercury element contains toxicity, and the ultraviolet radioactive of short wavelength can produce ozone, with
Current environmental protection concept is not inconsistent.
The content of the invention
The technical problems to be solved by the invention are：A kind of array light source lighting device for exposure machine, the battle array are provided
Row light source illuminating apparatus utilizes LED array light source to be used for exposure machine, using the teaching of the invention it is possible to provide the uniform plane of exposure of hot spot, structure are more stepped up
Gather, cost is lower.
In order to solve the above technical problems, the technical scheme is that：A kind of array light source for exposure machine illuminates dress
Put, including LED light source, the LED light source include fixed bottom plate and multiple LED lamp bead components, LED lamp bead component two dimension is equidistantly
Array is installed on substrate, and the LED lamp bead component includes substrate, the LED lamp bead being fixed on substrate and lampshade lens, described
Lampshade lens cover whole LED lamp bead, and the lampshade lens include collimation lens and the receipts being detachably fixed by fixed structure
Collect lens, the collimation lens is into enlarging shape, and collecting lens is arranged at the light emission side of collimation lens, the LED lamp bead component
Front is disposed with condenser lens, optical tunnel, magnification lens group and exposure receiving plane, and the condenser lens is by LED
The light that pearl component is sent is collected to the incident end face of optical tunnel, and the optical tunnel is taper optical tunnel, the incident end face of optical tunnel
Area be more than the area of outgoing end face, the magnification lens group light that sends of optical tunnel outgoing end face is amplified after into
As on exposure receiving plane.
As a kind of preferable scheme, the exiting surface of the collimation lens of the lampshade lens and collecting lens enter smooth surface it
Between a cavity be present, the exiting surface of the collimation lens tightens solid matter and is furnished with several lenticules, and the lenticule is in cavity
It is interior.
As a kind of preferable scheme, the lenticule includes the first specification lenticule and the second specification lenticule, and first
The size of specification lenticule is more than the second specification lenticule, and the first specification lenticule is arranged in the light extraction of the collimation lens
On face, the blank space spread configuration of exiting surface top edge the second specification lenticule.
As a kind of preferable scheme, the first specification lenticule be conic section lenticule, second specification
Lenticule is spherical microlens.
As a kind of preferable scheme, the cross section of the optical tunnel is rectangle or regular hexagon, and the cone of optical tunnel
Degree is 1:10-1:Between 7.
As a kind of preferable scheme, the magnification lens group is including the first positive lens and second being oppositely arranged just
Lens, for the first positive lens close to the outgoing end face of optical tunnel, the focal length of the first positive lens is less than the focal length of the second positive lens.
As a kind of preferable scheme, the fixed structure includes fixed case, and the collecting lens insertion is installed on solid
Determine in case, one end of fixed case is provided with internal thread installation portion, and external screw thread installation portion, institute are provided with the collimation lens
State internal thread installation portion to be installed on external screw thread installation portion, being internally provided with for fixed case contacts with the positioning of collimation lens end face
Positioning step.
After employing above-mentioned technical proposal, effect of the invention is：1st, compared with prior art, array light source illumination dress
LED array light source can be collected with better simply structure by putting, and uniform hot spot, the incidence end of optical tunnel are shaped as by optical tunnel
The area in face is more than the area of outgoing end face, so ensures to shorten the length of optical tunnel while good even light effect, makes whole
The structure of individual array light source lighting device is simpler and compact, and 2. LED light sources include LED lamp bead and lampshade lens, described
Lampshade lens include the collimation lens and collecting lens that are detachably fixed by fixed structure, the collimation lens into enlarging shape,
Collecting lens is arranged at the light emission side of collimation lens, and so, the light that each LED lamp bead is sent is straight after collimation lens collimates
Connect and collected by collecting lens, making the light-ray condensing of transmitting as far as possible, the LED light source more compact structure is reasonable to condenser lens,
Effect is more preferable.
And there is a sky in the exiting surface and entering between smooth surface for collecting lens due to the collimation lens of the lampshade lens
Chamber, the exiting surface of the collimation lens tighten solid matter and are furnished with several lenticules, and the lenticule is in cavity, so, LED
The light that pearl sends is collected by collecting lens again after the even light of the lenticule closely arranged, even light and even light by lenticule
The even light of rod, even light effect is more preferable, and when even light requires relatively low during actual exposure, it can enter one by even light twice
Step shortens the length of optical tunnel, so as to not only meet relatively low even light effect, and makes more compact structure.
Again because the lenticule includes the first specification lenticule and the second specification lenticule, the chi of the first specification lenticule
Very little to be more than the second specification lenticule, the first specification lenticule is arranged on the exiting surface of the collimation lens, on exiting surface
The blank space spread configuration at edge the second specification lenticule, can so make whole exiting surface light can even light,
Overcome the defects of exiting surface edge even light effect of light is poor.
Again because the fixed structure includes fixed case, the collecting lens insertion is installed in fixed case, fixed
One end of case is provided with internal thread installation portion, and external screw thread installation portion, the internal thread installation are provided with the collimation lens
Portion is installed on external screw thread installation portion, and fixed case is internally provided with the positioning step contacted with the positioning of collimation lens end face,
This fixed structure quickly can fix collecting lens and collimation lens, at the same can be convenient for changing different fixed structures from
And the spacing between collecting lens and LED lamp bead is adjusted, adaptability is wider.
Brief description of the drawings
The present invention is further described with reference to the accompanying drawings and examples.
Fig. 1 is the structural representation of the embodiment of the present invention；
Fig. 2 is the structural representation of LED light source；
Fig. 3 is the arrangement schematic diagram of the lenticule on collimation lens；
Fig. 4 is the even smooth schematic diagram of optical tunnel；
In accompanying drawing：1.LED light sources；11. fix bottom plate；12.LED lamp bead components；121. substrate；122.LED lamp bead；123.
Lampshade lens；1231. collimation lens；1232. exiting surface；1233. first specification lenticules；1234. second specification lenticules；
1235. cavity；1236. collecting lens；1237. fixed case；1238. internal thread installation portion；1239. positioning step；2. focus on
Lens；3. optical tunnel；31. incident end face；32. it is emitted end face；4. magnification lens group；5. expose receiving plane；.
Embodiment
Below by specific embodiment, the present invention is described in further detail.
As shown in Figures 1 to 4, a kind of array light source lighting device for exposure machine, including LED light source 1, the LED
Light source 1 includes fixed bottom plate 11 and the component 12 of multiple LED lamp beads 122, the equidistantly array installation of the two dimension of 122 component of LED lamp bead 12
In on substrate 121, the component 12 of LED lamp bead 122 includes substrate 121, the LED lamp bead 122 being fixed on substrate 121 and lampshade
Lens 123, the lampshade lens 123 cover whole LED lamp bead 122, and the lampshade lens 123 include removable by fixed structure
Fixed collimation lens 1231 and collecting lens 1236 are unloaded, the collimation lens 1231 is set into enlarging shape, collecting lens 1236
In the light emission side of collimation lens 1231, the front of the component 12 of LED lamp bead 122 be disposed with condenser lens 2, optical tunnel 3,
Magnification lens group 4 and exposure receiving plane 5, the light that the component 12 of LED lamp bead 122 is sent is collected to even by the condenser lens 2
The incident end face 31 of optical wand 3, the optical tunnel 3 are taper optical tunnel 3, and the area of the incident end face 31 of optical tunnel 3 is more than outgoing
Optical tunnel 3 is emitted after the light that end face 32 sends amplifies and images in exposure by the area of end face 32, the magnification lens group 4
On receiving plane 5.
As shown in Fig. 2 the fixed structure includes fixed case 1237, the insertion of collecting lens 1236 is installed on fixation
1237 in case, one end of fixed case 1237 is provided with internal thread installation portion 1238, is provided with the collimation lens 1231
External screw thread installation portion, the internal thread installation portion 1238 are installed on external screw thread installation portion, and the inside of fixed case 1237 is set
There is the positioning step 1239 contacted with the positioning of collimation lens end face.
As shown in Figures 2 and 3, the exiting surface 1232 and collecting lens of the collimation lens 1231 of the lampshade lens 123
1236 enter between smooth surface to exist a cavity 1235, the exiting surface 1232 of the collimation lens 1231 tighten solid matter be furnished with it is some
Individual lenticule, the lenticule are in cavity 1235.
The lenticule includes the first specification lenticule 1233 and the second specification lenticule 1234, the first specification lenticule
1233 size is more than the second specification lenticule 1234, and the first specification lenticule 1233 is arranged in going out for the collimation lens
In smooth surface 1232, the blank space spread configuration of the top edge of the exiting surface 1,232 second specification lenticule 1234.Described first
Specification lenticule 1233 is the lenticule of conic section, and the second specification lenticule 1234 is spherical microlens.
Lampshade lens 123 are detachably installed, and each component 12 of LED lamp bead 122 is possessed the effect of collimation and even light, together
When even light after light be injected into as far as possible on condenser lens 2 after collecting lens 1236.It is and various sizes of by changing
Fixed case, it is possible to the spacing between different collecting lenses 1236 and LED lamp bead 122 is selected, so as to meet different want
Ask.
In the present embodiment, the cross section of the optical tunnel 3 is rectangle or regular hexagon, and the taper of optical tunnel 3 is 1:
10-1:Between 7.Optical tunnel 3 can use solid optical tunnel 3, be made up of quartz or K9 glass.Optical tunnel 3 is incident in the present embodiment
End face 31 is big, and outgoing end face 32 is small, is integrally conical, and often lateral displacement reduces light after two secondary reflections, so contracting in time
The even light effect of short optical tunnel 3 also can guarantee that.And the even light effect of optical tunnel 3 is current conventional principles, light is in optical tunnel 3
Face multiple reflections, virtual light source picture can be all formed per secondary reflection, multiple reflections form the virtual light source matrix of two dimension, so that
Light is more uniform.
The magnification lens group 4 includes the first positive lens and the second positive lens being oppositely arranged, and the first positive lens leans on
The outgoing end face 32 of nearly optical tunnel 3, the focal length of the first positive lens are less than the focal length of the second positive lens.
So, after the amplification of magnification lens group 4, magnification lens are passed through from the light of 3 inner outgoing of optical tunnel
Exposure receiving plane 5 is imaged in after the amplification of group 4.The array light source illuminator structure is compact, and imaging effect is good, the hot spot of plane of exposure
Uniformly.
Embodiment described above is only the description to the preferred embodiment of the present invention, not as the limit to the scope of the invention
It is fixed, the various modifications made on the basis of design spirit of the present invention is not departed to technical solution of the present invention and transformation, it all should fall
In the protection domain for entering claims of the present invention determination.
Claims (7)
1. a kind of array light source lighting device for exposure machine, including LED light source, it is characterised in that：The LED light source includes
Fixed bottom plate and multiple LED lamp bead components, equidistantly array is installed on substrate LED lamp bead component two dimension, the LED lamp bead group
Part includes substrate, the LED lamp bead being fixed on substrate and lampshade lens, and the lampshade lens cover whole LED lamp bead, the lamp
Cover lens include the collimation lens and collecting lens being detachably fixed by fixed structure, and the collimation lens is received into enlarging shape
Collection lens are arranged at the light emission side of collimation lens, be disposed with front of the LED lamp bead component condenser lens, optical tunnel,
The light that LED lamp bead component is sent is collected to entering for optical tunnel by magnification lens group and exposure receiving plane, the condenser lens
Penetrate end face, the optical tunnel is taper optical tunnel, and the area of the incident end face of optical tunnel is more than the area of outgoing end face, described times
Imaged in after the light amplification that rate enlarging lens group sends optical tunnel outgoing end face on exposure receiving plane.
A kind of 2. array light source lighting device for exposure machine as claimed in claim 1, it is characterised in that：The lampshade is saturating
The exiting surface of the collimation lens of mirror and collecting lens enter between smooth surface to exist a cavity, on the exiting surface of the collimation lens
Several lenticules are closely placed with, the lenticule is in cavity.
A kind of 3. array light source lighting device for exposure machine as claimed in claim 2, it is characterised in that：The lenticule
Including the first specification lenticule and the second specification lenticule, the size of the first specification lenticule is more than the second specification lenticule, institute
State the first specification lenticule to be arranged on the exiting surface of the collimation lens, the blank space spread configuration of exiting surface top edge institute
State the second specification lenticule.
A kind of 4. array light source lighting device for exposure machine as claimed in claim 3, it is characterised in that：First rule
Lattice lenticule is the lenticule of conic section, and the second specification lenticule is spherical microlens.
A kind of 5. array light source lighting device for exposure machine as claimed in claim 4, it is characterised in that：The optical tunnel
Cross section be rectangle or regular hexagon, and the taper of optical tunnel is 1:10-1:Between 7.
A kind of 6. array light source lighting device for exposure machine as claimed in claim 5, it is characterised in that：The multiplying power is put
Macro lens group includes the first positive lens and the second positive lens that are oppositely arranged, the first positive lens close to the outgoing end face of optical tunnel,
The focal length of first positive lens is less than the focal length of the second positive lens.
A kind of 7. array light source lighting device for exposure machine as claimed in claim 1, it is characterised in that：The fixed knot
Structure includes fixed case, and the collecting lens insertion is installed in fixed case, and one end of fixed case is provided with internal thread peace
Dress portion, external screw thread installation portion is provided with the collimation lens, the internal thread installation portion is installed on external screw thread installation portion, Gu
That determines case is internally provided with the positioning step contacted with the positioning of collimation lens end face.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711078214.0A CN107726060A (en) | 2017-11-06 | 2017-11-06 | A kind of array light source lighting device for exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711078214.0A CN107726060A (en) | 2017-11-06 | 2017-11-06 | A kind of array light source lighting device for exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107726060A true CN107726060A (en) | 2018-02-23 |
Family
ID=61222461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711078214.0A Pending CN107726060A (en) | 2017-11-06 | 2017-11-06 | A kind of array light source lighting device for exposure machine |
Country Status (1)
| Country | Link |
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| CN (1) | CN107726060A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109581641A (en) * | 2018-12-27 | 2019-04-05 | 武汉沃亿生物有限公司 | The lighting system of structure light micro-imaging |
| CN115199967A (en) * | 2022-07-15 | 2022-10-18 | 北京环境特性研究所 | Irradiation distance adjustable solar simulator system |
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