CN105805609A - LED light source illuminating system - Google Patents
LED light source illuminating system Download PDFInfo
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- CN105805609A CN105805609A CN201410854370.1A CN201410854370A CN105805609A CN 105805609 A CN105805609 A CN 105805609A CN 201410854370 A CN201410854370 A CN 201410854370A CN 105805609 A CN105805609 A CN 105805609A
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Abstract
The invention relates to an LED light source illuminating system. The LED light source illuminating system comprises an LED array light source, an optical baffle plate, a microlens array and a special-shaped quartz rod light homogenizer arranged in the light propagation direction in sequence; a light beam, emitted by the LED array light source, penetrates through the optical baffle plate for shaping, and passes through the microlens array for homogenizing; and after the aperture numerical value of the light beam is increased, the light beam enters the special-shaped quartz rod light homogenizer for homogenizing again, and is emitted to an illuminating object. The LED light source illuminating system homogenizes the light beam, emitted by the LED array light source, through the optical baffle plate, the microlens array and the special-shaped quartz rod light homogenizer in sequence, and uses the microlens array for increasing the aperture numerical value of the light beam, so that the reflecting times of the light beam entering the special-shaped quartz rod light homogenizer is increased, and the light homogenizing effect is improved. The uniformity of a generated illumination viewing field can reach below 1%; and the whole illuminating system is simple in structure, high in utilization rate of optical energy, convenient for installation and debugging and higher in safety.
Description
Technical field
The present invention relates to a kind of LED light source illuminator.
Background technology
The light source that existing lithography illuminating system adopts mainly has two kinds, and one is mercury lamp light source, and another kind is LED light source.
Fig. 1 is existing a kind of mercury lamp light source illuminator, the direction of propagation along light includes successively: mercury lamp light source 1, ellipsoidal reflector the 2, first plane mirror 3, coupling mirror group 4, even smooth quartz pushrod 5, relay lens group 6 and the second plane mirror 7, and finally it is incident on lighting object 8, it can thus be appreciated that, existing mercury lamp light source illuminator has disadvantages that in system design, system assembling and setting, complete machine use procedure, mainly includes following several:
1, the lamp house of mercury lamp light source is by ellipsoidal reflector 2, the first plane mirror 3 and mercury lamp light source 1 cooperative mechanical device composition, and assembly is more, and design comparison is complicated；And cause degree of freedom in debugging process many, and in the process of system equipment debugging, optimum position should not be debugged, debugging process is complicated, and debugging cycle is longer；
2, mercury lamp light source 1 has certain danger.It is full of high pressure mercury vapor in the bulb of mercury lamp light source 1, if improper use is revealed, staff's health and environment can be worked the mischief；
3, mercury lamp light source illuminator due to assembly more, in whole light path, optical energy loss is serious, and effective wave band efficiency of light energy utilization is low.
And along with the development of LED light source technology, the power of LED light source becomes closer to the demand of the modern semiconductors high-power high intensity of industry, LED light source has very big application prospect.Specifically, LED light source generally comprises substrate, and substrate has LED lamp, is potting resin outside LED lamp.Under different use scenes, LED light source requires over the different collection of energy of use and light balancing device meets different demand, but being generally change light distribution on illuminated area by lenticule, can only play preliminary even light action, the uniformity in even smooth region can only achieve 2%.
Summary of the invention
The present invention provides a kind of LED light source illuminator, to solve the above-mentioned technical problem in existing illuminator.
For solving above-mentioned technical problem, the present invention provides a kind of LED light source illuminator, include successively along optical propagation direction: LED array light source, optics catch, microlens array and special-shaped quartz pushrod light uniforming device, the light beam that described LED array light source sends carries out shaping through described optics catch, after described microlens array carries out even light and increases the numerical aperture of described light beam, after entering described special-shaped quartz pushrod light uniforming device even light once again, it is incident on lighting object.
It is preferred that increase the numerical aperture of described light beam by designing the curvature of described microlens array.
It is preferred that after the described special-shaped quartz pushrod light uniforming device even light once again of described light beam entrance, repeated mirror group and plane mirror are incident on lighting object.
It is preferred that described optics catch is the middle sheet metal with clear aperature, the light beam that described LED array light source sends is by the described clear aperature described optics catch of traverse.
Preferably, by adjusting the ratio of described special-shaped quartz pushrod light uniforming device incident end face and outgoing face size, or adjust the distance between described LED array light source and described special-shaped quartz pushrod light uniforming device, or adjust the size of the clear aperature of described optics catch, control the numerical aperture of the outgoing beam of described special-shaped quartz pushrod light uniforming device so that it is mate with relay lens group.
It is preferred that described LED array light source is by n2The LED light source of individual same model is uniformly arranged and is formed, and wherein, n is positive integer.
It is preferred that described microlens array is made up of two groups of orthogonal cylindrical mirror superpositions.
It is preferred that the distance between described LED array light source and described optics catch is L1, described L1 is less than 2mm.
Preferably, the exit cross-section of described LED array light source is the square of L3 × L3, the square that incident end face is L4 × L4 of described special-shaped quartz pushrod light uniforming device, outgoing end face is the square of L5 × L5, and L3 < L4 < L5.
It is preferred that the distance between described optics catch and described microlens array is L2, L2 < L4/2tan (θ), wherein, θ is maximum half angle of scattering of described LED array light source.
It is preferred that the distance between described microlens array and described special-shaped quartz pushrod light uniforming device is also L2.
It is preferred that the object plane of described relay lens group is positioned at the exit end of described special-shaped quartz pushrod light uniforming device.
It is preferred that the wavelength of described LED array light source is 465nm, 435nm or 365nm.
It is preferred that the reflecting surface of described special-shaped quartz pushrod light uniforming device is all coated with total reflection film.
Compared with prior art, a kind of LED light source illuminator provided by the invention has the advantage that
1. lighting system structure is simple, it is simple to install and debugging；
2. high pressure mercury vapor will not being occurred to reveal, will not staff's health and environment be worked the mischief, safety is higher；
3. even light effect is better, and the illumination field of view uniformity of its generation can reach less than 1%；
4. whole lighting system component is less, and illuminator transmitance is high, and the efficiency of light energy utilization is high.
Accompanying drawing explanation
Fig. 1 is the structural representation of mercury lamp light source illuminator of the prior art；
Fig. 2 is the structural representation of the LED light source illuminator of the embodiment of the invention；
Fig. 3 be the embodiment of the invention LED light source illuminator in the layout of LED array light source；
Fig. 4 be the embodiment of the invention LED light source illuminator in the emergent light spot analogous diagram of LED array light source.
In Fig. 1: 1-mercury lamp light source, 2-ellipsoidal reflector, 3-the first plane mirror, 4-coupling mirror group, the even smooth quartz pushrod of 5-, 6-relay lens group, 7-the second plane mirror, 8-lighting object；
In Fig. 2-4: 10-LED array light source, 11-LED light source, 12-emergent light spot, 20-optics catch, 30-microlens array, 40-abnormal shape quartz pushrod light uniforming device, 50-relay lens group, 60-plane mirror, 70-lighting object.
Detailed description of the invention
For the technical scheme of more detailed statement foregoing invention, it is exemplified below specific embodiment and proves technique effect；It is emphasized that these embodiments are for illustrating that the present invention is not limited to restriction the scope of the present invention.
nullA kind of LED light source illuminator provided by the invention，As shown in Figure 2，Include successively along optical propagation direction: LED array light source 10、Optics catch 20、Microlens array 30、Special-shaped quartz pushrod light uniforming device 40、Relay lens group 50 and plane mirror 60，Certainly，Described optics catch 20、Microlens array 30 and special-shaped quartz pushrod light uniforming device 40 may be contained within the main shaft of described LED array light source 10，Specifically，The light beam that described LED array light source 10 sends carries out shaping through described optics catch 20，After described microlens array 30 carries out even light and increases the numerical aperture of described light beam，Enter described special-shaped quartz pushrod light uniforming device 40 even light once again，Then after repeated mirror group 50 and plane mirror 60，It is incident on lighting object 70，Preferably，The object plane of described relay lens group 50 is positioned at the exit end of described special-shaped quartz pushrod light uniforming device 40，The uniform visual field of the exit end of special-shaped quartz pushrod light uniforming device 40 is amplified，And the uniformity illumination field of view of the image planes formation uniformity less than 1% in relay lens group 50.The light beam that described LED array light source 10 is sent successively by the present invention by described optics catch 20, microlens array 30 and special-shaped quartz pushrod light uniforming device 40 carries out even light, utilize described microlens array 30 that the numerical aperture (NA) of light beam is become big simultaneously, the order of reflection entering the light beam in special-shaped quartz pushrod light uniforming device 40 is increased, improves the effect of even light.The illumination field of view uniformity that the present invention produces can reach less than 1%, and whole lighting system structure is simple, and the efficiency of light energy utilization is high, it is simple to installing and debugging, safety is also higher.
It is preferred that please emphasis with reference to Fig. 3, described LED array light source 10 is by n2The LED light source 11 of individual same model is uniformly arranged and is formed, wherein, n is positive integer, in Fig. 3, for the quantity of LED light source 11 for 9, the angular distribution employing lambertian distribution of 9 LED light sources 11 so that the luminous disk of the approximate same brightness of same radius of the light beam that described LED array light source 10 sends, the emergent light spot 12 of the LED array light source 10 of the present embodiment is as shown in Figure 4.
Preferably, please continue to refer to Fig. 2, described optics catch 20 is the middle sheet metal with clear aperature, the light beam that described LED array light source 10 sends is by the described clear aperature described optics catch 20 of traverse, thus the size of light source hot spot is limited, specifically, can by adjusting the numerical aperture that the size dimension of described clear aperature adjusts the outgoing beam of described special-shaped quartz pushrod light uniforming device 40, and reach and the effect of subsequent optical system matches, in the present embodiment, subsequent optical system comprises relay lens group.
Preferably, please continue to refer to Fig. 2, described microlens array 30 is made up of two groups of orthogonal cylindrical mirror superpositions, single source can be resolved into multiple lighting source, improve illumination uniformity, in the present invention, utilizing described microlens array 30 is preliminary even light to collect the effect of light, and by the design of the curvature of microlens array is changed light beam numerical aperture, the numerical aperture entering the light beam of described special-shaped quartz pushrod light uniforming device 40 is made to become big, in described special-shaped quartz pushrod light uniforming device 40, the order of reflection of light beam increases, reach the more uniform effect of light distribution at special-shaped quartz pushrod light uniforming device 40 outgoing end face.
Preferably, distance between described LED array light source 10 and described optics catch 20 is L1, described L1 is less than 2mm, specifically, distance L1 between described LED array light source 10 and described optics catch 20 is determined by the size of the numerical aperture of the exit end of LED array light source 10 and the incident end face of special-shaped quartz pushrod light uniforming device 40, distance more near (L1 is more little), the light energy being coupled into microlens array 30 and special-shaped quartz pushrod light uniforming device 40 is more many, the efficiency of light energy utilization will be more high, when L1 is less than 1mm, the luminous energy being coupled into described microlens array 30 and special-shaped quartz pushrod light uniforming device 40 can reach 100%.
Preferably, the square that exit cross-section is L3 × L3 of described LED array light source 10, the square that incident end face is L4 × L4 of described special-shaped quartz pushrod light uniforming device 40, outgoing end face is the square of L5 × L5, and L3 < L4 < L5.The uniformity of the L5 × L5 illumination region less than 1% then it is sized in visual field, and the present embodiment adopts the combination of microlens array 30 and special-shaped quartz pushrod light uniforming device 40 to regulate the uniformity of reflection light, whole illuminator smaller, and the light beam that LED array light source 10 sends is made directly even light, there is no optical energy loss between, substantially increase the efficiency of light energy utilization.It addition, the present invention is also by the ratio adjusting L4 and L5, the numerical aperture of the outgoing beam of described special-shaped quartz pushrod light uniforming device 40 is adjusted, and reaches and the effect of subsequent optical system matches.
It is preferred that the distance between described optics catch 20 and described microlens array 30 is L2, L2 <
L4/2tan (θ), wherein, θ is maximum half angle of scattering of described LED array light source 10；Distance between described microlens array 30 and described special-shaped quartz pushrod light uniforming device 40 is also L2 so that special-shaped quartz pushrod light uniforming device 40 can collect all light passed from optics catch 20.Certainly, the present invention adjusts the numerical aperture of the outgoing beam of described special-shaped quartz pushrod light uniforming device 40 also by the distance adjusted between LED array light source 10 and special-shaped quartz pushrod light uniforming device 40, and reaches and the effect of subsequent optical system matches.
It is preferred that the wavelength of described LED array light source 10 is 465nm, 435nm or 365nm, even shorter wavelength.
Preferably, the reflecting surface of described special-shaped quartz pushrod light uniforming device 40 is all coated with total reflection film, that is, the numerical aperture of the outgoing beam of described LED array light source 10 is very big, when entering in special-shaped quartz pushrod light uniforming device 40, the light that incident angle is bigger can not meet total reflection condition, so needing four reflecting surface plating total reflection films to special-shaped quartz pushrod light uniforming device 40, to be greatly improved the efficiency of light energy utilization.
It should be noted that LED light source illuminator provided by the invention is due to without coupling mirror group, simple in construction, it is possible to be effectively improved capacity usage ratio when ensureing illumination field of view uniformity.And LED light source illuminator provided by the invention is not only applicable to the optical system in microlithography technology, apply also for other optical systems that illumination field of view uniformity requirement is higher.
In sum, a kind of LED light source illuminator provided by the invention, include successively along optical propagation direction: LED array light source 10, optics catch 20, microlens array 30 and special-shaped quartz pushrod light uniforming device 40, the light beam that described LED array light source 10 sends carries out shaping through described optics catch 20, after described microlens array 30 carries out even light and increases the numerical aperture of described light beam, after entering described special-shaped quartz pushrod light uniforming device 40 even light once again, it is incident on lighting object 70.The light beam that described LED array light source 10 is sent successively by the present invention by described optics catch 20, microlens array 30 and special-shaped quartz pushrod light uniforming device 40 carries out even light, utilize described microlens array 30 that the numerical aperture of light beam is become big simultaneously, the order of reflection entering the light beam in special-shaped quartz pushrod light uniforming device 40 is increased, improves the effect of even light.The illumination field of view uniformity that the present invention produces can reach less than 1%, and whole lighting system structure is simple, and the efficiency of light energy utilization is high, it is simple to installing and debugging, safety is also higher.
Obviously, invention can be carried out various change and modification without deviating from the spirit and scope of the present invention by those skilled in the art.So, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to include these change and modification.
Claims (14)
1. a LED light source illuminator, it is characterized in that, include successively along optical propagation direction: LED array light source, optics catch, microlens array and special-shaped quartz pushrod light uniforming device, the light beam that described LED array light source sends carries out shaping through described optics catch, after described microlens array carries out even light and increases the numerical aperture of described light beam, after entering described special-shaped quartz pushrod light uniforming device even light once again, it is incident on lighting object.
2. a kind of LED light source illuminator as claimed in claim 1, it is characterised in that increase the numerical aperture of described light beam by designing the curvature of described microlens array.
3. a kind of LED light source illuminator as claimed in claim 1, it is characterised in that after described light beam enters described special-shaped quartz pushrod light uniforming device even light once again, repeated mirror group and plane mirror are incident on lighting object.
4. a kind of LED light source illuminator as claimed in claim 3, it is characterised in that described optics catch is the middle sheet metal with clear aperature, the light beam that described LED array light source sends is by the described clear aperature described optics catch of traverse.
5. a kind of LED light source illuminator as claimed in claim 4, it is characterized in that, by adjusting the ratio of described special-shaped quartz pushrod light uniforming device incident end face and outgoing face size, or adjust the distance between described LED array light source and described special-shaped quartz pushrod light uniforming device, or adjust the size of the clear aperature of described optics catch, control the numerical aperture of the outgoing beam of described special-shaped quartz pushrod light uniforming device so that it is mate with relay lens group.
6. a kind of LED light source illuminator as claimed in claim 1, it is characterised in that described LED array light source is by n2The LED light source of individual same model is uniformly arranged and is formed, and wherein, n is positive integer.
7. a kind of LED light source illuminator as claimed in claim 1, it is characterised in that described microlens array is made up of two groups of orthogonal cylindrical mirror superpositions.
8. a kind of LED light source illuminator as claimed in claim 1, it is characterised in that the distance between described LED array light source and described optics catch is L1, and described L1 is less than 2mm.
9. a kind of LED light source illuminator as claimed in claim 1, it is characterized in that, the exit cross-section of described LED array light source is the square of L3 × L3, the square that incident end face is L4 × L4 of described special-shaped quartz pushrod light uniforming device, outgoing end face is the square of L5 × L5, and L3 < L4 < L5.
10. a kind of LED light source illuminator as claimed in claim 9, it is characterized in that, the distance between described optics catch and described microlens array is L2, L2 < L4/2tan (θ), wherein, θ is maximum half angle of scattering of described LED array light source.
11. a kind of LED light source illuminator as claimed in claim 10, it is characterised in that the distance between described microlens array and described special-shaped quartz pushrod light uniforming device is also L2.
12. a kind of LED light source illuminator as claimed in claim 1, it is characterised in that the object plane of described relay lens group is positioned at the exit end of described special-shaped quartz pushrod light uniforming device.
13. a kind of LED light source illuminator as claimed in claim 1, it is characterised in that the wavelength of described LED array light source is 465nm, 435nm or 365nm.
14. a kind of LED light source illuminator as claimed in claim 1, it is characterised in that be all coated with total reflection film on the reflecting surface of described special-shaped quartz pushrod light uniforming device.
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| CN201410854370.1A CN105805609B (en) | 2014-12-31 | 2014-12-31 | A kind of LED light source lighting system |
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| CN201410854370.1A CN105805609B (en) | 2014-12-31 | 2014-12-31 | A kind of LED light source lighting system |
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| CN105805609B CN105805609B (en) | 2019-03-12 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107726060A (en) * | 2017-11-06 | 2018-02-23 | 中国科学院重庆绿色智能技术研究院 | A kind of array light source lighting device for exposure machine |
| CN107806572A (en) * | 2016-09-04 | 2018-03-16 | 马田专业公司 | Include the light fixture of light source, lenslet and retroreflector |
| CN108803244A (en) * | 2017-04-27 | 2018-11-13 | 上海微电子装备（集团）股份有限公司 | Lighting device and means of illumination and a kind of litho machine |
| CN111752108A (en) * | 2019-03-28 | 2020-10-09 | 上海微电子装备（集团）股份有限公司 | LED lighting device and exposure machine |
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| JP2006171426A (en) * | 2004-12-16 | 2006-06-29 | Fuji Photo Film Co Ltd | Illumination optical system and exposure apparatus using the same |
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| CN103454865A (en) * | 2013-09-05 | 2013-12-18 | 中国科学院光电技术研究所 | Deep ultra-violet lithography illuminating system |
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| EP1109067A2 (en) * | 1999-12-13 | 2001-06-20 | Asm Lithography B.V. | Illuminator |
| JP2006171426A (en) * | 2004-12-16 | 2006-06-29 | Fuji Photo Film Co Ltd | Illumination optical system and exposure apparatus using the same |
| CN102566294A (en) * | 2010-12-28 | 2012-07-11 | 上海微电子装备有限公司 | Photoetching lamp optical system |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107806572A (en) * | 2016-09-04 | 2018-03-16 | 马田专业公司 | Include the light fixture of light source, lenslet and retroreflector |
| CN107806572B (en) * | 2016-09-04 | 2021-07-13 | 马田专业公司 | Luminaire comprising a light source, lenslets and a retroreflector |
| CN108803244A (en) * | 2017-04-27 | 2018-11-13 | 上海微电子装备（集团）股份有限公司 | Lighting device and means of illumination and a kind of litho machine |
| CN107726060A (en) * | 2017-11-06 | 2018-02-23 | 中国科学院重庆绿色智能技术研究院 | A kind of array light source lighting device for exposure machine |
| CN111752108A (en) * | 2019-03-28 | 2020-10-09 | 上海微电子装备（集团）股份有限公司 | LED lighting device and exposure machine |
| TWI725565B (en) * | 2019-03-28 | 2021-04-21 | 大陸商上海微電子裝備（集團）股份有限公司 | An LED lighting device and exposure machine |
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