CN203837664U - Shape measuring device - Google Patents
Shape measuring device Download PDFInfo
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- CN203837664U CN203837664U CN201420204535.6U CN201420204535U CN203837664U CN 203837664 U CN203837664 U CN 203837664U CN 201420204535 U CN201420204535 U CN 201420204535U CN 203837664 U CN203837664 U CN 203837664U
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Abstract
The utility model provides a shape measuring device which improves the light receiving efficiency of a light source light to ensure desired light receiving quantity without improving light source output. The shape measuring device (1) comprises a light projecting part (3) which projects a light to a set face (2) of a measured object (W) and a light receiving part (4) which receives the light projected by the light projecting part (3). Through the output of the light receiving part (4), the shape and the size of the measured object are measured. The light projecting part (3) comprises a light source (10), a rod integrator (11) which carries out incidence on a light emitted from the light source (10), and a light projecting optical system (20) which can take in the opening number and the view field of a full beam which is emitted from a light emitting face (11A) of the rod integrator (11) and is at least in a telecentric state on the measured object side. The light receiving part (4) comprises a shooting element (12) which receives a projection image of the measured object and an object side telecentric light receiving optical system (30) which enables the set face (2) and a light receiving face of the shooting element (12) to be conjugate. An opening aperture (22) in the light projecting optical system (20) and an opening aperture (33) in the light receiving optical system (30) are conjugate.
Description
Technical field
The utility model relates to a kind of form measuring instrument of measuring the shape and size of object being measured.
Background technology
The device of measuring the shape and size of object being measured by optical component conventionally possesses the oriented measurement range that disposes object being measured and projects the light-projecting portion of directional light and the light accepting part that receives the light not blocked by object being measured in the light being projected by light-projecting portion, light accepting part carries out optically focused by heart sensitive lens far away to the light being projected by light-projecting portion, receives the shape and size (with reference to following patent documentation 1) of measuring object being measured by being configured in the light of the aperture of focal position by imageing sensor.
Patent documentation 1: Japanese Patent Publication 2000-155013 communique
In this prior art, in light-projecting portion, use the light projector lens such as collimation lens that the emitted light of light source are made as to directional light, but not complete pointolite for light source, and because the resolution of optical system is directly proportional to (wavelength/opening number), therefore in order to obtain practical resolution, have to use the reasons such as light beyond directional light and the light from light source all can not be made as to directional light, therefore in light accepting part side, by telecentric optical system, suppress object being measured and decline because of the measuring accuracy that the off normal to optical axis direction causes.Yet, even if utilize telecentric optical system to be also difficult to increase opening number, can only receive a part for the light of light source ejaculation, therefore in order to ensure the light income of regulation, need to improve light source and export, from energy-conservation viewpoint, consider existing problems.
And the light penetrating from light source exists light quantity uneven, if this light quantity inequality is apparent in the output of imageing sensor, measuring accuracy reduces, and therefore, in aforesaid conventional art, at the former configuration diffuser plate of light source, eliminates light quantity inequality.Yet, if use diffuser plate, there are the following problems: non-parallel light further increases and causes light projector strength decreased, and light income reduces, and because diffusion light produces a large amount of parasitic lights, therefore the parasitic light by the aperture in light accepting part incides imageing sensor, and the contrast of imageing sensor output is reduced, and measuring accuracy is caused to harmful effect.
Utility model content
The utility model is usingd and is addressed this is that the example as problem.Be that the purpose of this utility model is, by improving the utilization ratio of light source light, not improve light source output, and guarantee desirable light income, and get rid of harmful effect that parasitic light causes measuring accuracy etc. when eliminating the light quantity inequality of light source light.
In order to reach this object, form measuring instrument of the present utility model at least possesses following structure.
A kind of form measuring instrument, it possesses light-projecting portion and the light accepting part that receives the light being projected by described light-projecting portion to the installation surface projection light of object being measured, by the output of described light accepting part, measure the shape of object being measured, wherein, described light-projecting portion possesses light source, bar integrator and light projector optical system, the light that in described bar integrator, incident is penetrated from described light source, described light projector optical system has opening number and the visual field that can be taken into the full light beam penetrating from the light emergence face of described bar integrator, and at least on described measured object side, be heart state far away, described light accepting part possesses capturing element and object side heart light receiving optical system far away, described capturing element receives the projection image of object being measured, described object side heart light receiving optical system far away makes the sensitive surface of described installation surface and described capturing element become conjugate relation, the opening aperture of described light projector optical system inside and the opening aperture of described light receiving optical system inside are in conjugate relation.
Possess the form measuring instrument of this feature by improving the utilization ratio of light source light, without improving light source output, just can guarantee desirable light income.And, when eliminating the light quantity inequality of light source light, can get rid of the harmful effect that parasitic light causes measuring accuracy.
Accompanying drawing explanation
Fig. 1 is the key diagram of the Sketch of the related form measuring instrument of an explanation embodiment of the present utility model.
Fig. 2 means the key diagram of an example of the light projector optical system in the related form measuring instrument of an embodiment of the present utility model.
Fig. 3 means the key diagram of an example of the light receiving optical system in the related form measuring instrument of an embodiment of the present utility model.
Fig. 4 means the key diagram of other structure example of the optical system in the related form measuring instrument of embodiment of the present utility model.Fig. 4 (a) represents the YZ cut-open view of optical system, and Fig. 4 (b) represents the XZ cut-open view of optical system, and Fig. 4 (c) represents the XY cut-open view of each optics important document.
Fig. 5 is the key diagram of the shade of explanation Fresnel Lenses.
Fig. 6 represents the key diagram of the function of illumination smoothing filter.Fig. 6 (a) is made as the transmissivity of central part 50% example, and Fig. 6 (b) is made as the transmissivity of central part 80% example.
Fig. 7 means the key diagram of the insertion effect of illumination smoothing filter.Illumination Distribution in the situation that Fig. 7 (a) represents not insert, the Illumination Distribution in the situation that Fig. 7 (b) represents to insert.
1-form measuring instrument, 2-installation surface, 3-light-projecting portion, 4-light accepting part, 5-shape measure portion, 10-light source, 11-bar integrator, 11A-light emergence face, 12-capturing element, 12A-sensitive surface, 20-light projector optical system, 21-first lens group, 22-opening aperture, 23-refraction of light path mirror, 24-the second lens combination, 24f-Fresnel Lenses, 25-illumination smoothing filter, 30-light receiving optical system, 31-the 3rd lens combination, 32-the 4th lens combination, 33-opening aperture, W-object being measured.
Embodiment
Below, with reference to accompanying drawing, embodiment of the present utility model is described.Fig. 1 is the key diagram of the related form measuring instrument of an explanation embodiment of the present utility model.Fig. 2 means the key diagram of an example of the light projector optical system in the related form measuring instrument of an embodiment of the present utility model.Fig. 3 means the key diagram of an example of the light receiving optical system in the related form measuring instrument of an embodiment of the present utility model.
Form measuring instrument 1 possesses: light-projecting portion 3, to installation surface 2 projection lights of object being measured W; Light accepting part 4, receives the light being projected by light-projecting portion 3.And, possess the shape measure portion 5 of measuring the shape and size of object being measured W by the output of light accepting part 4.
Light-projecting portion 3 possesses light source 10, bar integrator 11 and light projector optical system 20, and the light penetrating from light source 10 incides bar integrator 11, and the light penetrating from bar integrator 11 projects the installation surface 2 that is provided with object being measured W via light projector optical system 20.
Light source 10 can for example consist of light emitting diode monomer.Bar integrator 11 is by making the light of incident at inner multipath reflection, thereby can make the parts of light quantity distribution homogenising, and has the light diffusion not making from light source 10 ejaculations, and eliminates the function of light quantity inequality.
Light projector optical system 20 forms both sides telecentric optical system.Particularly, as shown in Figure 2, from bar integrator 11 sides, possess successively first lens group 21, opening aperture 22, refraction of light path mirror 23 and the second lens combination 24, there is opening number and the visual field that can be taken into the full light beam penetrating from the light emergence face 11A of bar integrator 11.And, by any the light in opening aperture 22, become directional light and be irradiated to installation surface 2, in the inhomogeneous situation of light intensity distributions on the light emergence face 11A of bar integrator 11, there is the function that makes its homogenising.Refraction of light path mirror 23 is in order to make the configuration space densification of each important document of light-projecting portion 3 and the parts that arrange.
Light accepting part 4 possesses: capturing element 12, the projection image of reception object being measured W; Object side heart light receiving optical system 30 far away, makes the sensitive surface 12A of installation surface 2 and capturing element 12 become conjugate relation.As shown in Figure 3, particularly, the internal configurations that light receiving optical system 30 possesses the 3rd lens combination 31 and the 4th lens combination 32, the four lens combination 32 has opening aperture 33.This light receiving optical system 30 make by the one point union in the installation surface 2 whole optically focused of light by opening aperture 33 to sensitive surface 12A a bit on.That is, the light optically focused of any of the profile by the object being measured W in installation surface 2 is upper to the sensitive surface 12A of capturing element 12, and the profile of object being measured W dwindles with the multiplying power of having set and imaging and form projection image on sensitive surface 12A.With regard to the relation between light projector optical system 20 and light receiving optical system 30, the opening aperture 22 in light projector optical system 20 and the relation between the opening aperture 33 in light receiving optical system 30 are conjugate relation.
And by described light projector optical system, the light emergence face of described bar integrator and described installation surface are conjugate relation.
The shape of object being measured W is measured by shape measure portion 5 according to the output from light accepting part 4, the contrast information obtaining according to the projection image of the profile by object being measured W, coordinate data and projection width's equidimension data of the contour shape of output object being measured W.
According to the form measuring instrument 1 with this structure, the light penetrating from light source 10 incides bar integrator 11 and homogenising, so the light emergence face 11A of bar integrator 11 becomes almost area source uniformly.Thus, even formed light source 10 by light emitting diode in the situation that, also can access the uniform area light source of light quantity distribution equalization.And near installation surface 2, the even directional light vertical with installation surface 2 projects object being measured W.In addition, light-projecting portion 3 side configuration both sides telecentric optical systems in installation surface 2, therefore in light accepting part 4 sides, dispose object side telecentric optical system, can make by almost all imagings on sensitive surface 12A of light of the profile of object being measured W, can improve edge resolution and improve measuring accuracy.
And, with regard to the relation between light projector optical system 20 and light receiving optical system 30, opening aperture 22 in light projector optical system 20 and the relation between the opening aperture 33 in light receiving optical system 30 are conjugate relation, therefore make the image size of opening aperture 33 identical with the image size of opening aperture 22, or the image size that is less than opening aperture 22, can suppress parasitic light thus effectively.In addition, the resolution of light receiving optical system 30 and the depth of focus depend on the opening number of light projector optical system and the opening number of light receiving optical system, therefore by one or both in opening aperture 22 and opening aperture 33 is made as to iris ring, thereby can change resolution and the depth of focus of light receiving optical system 30.
Now, preferably the peripheral shape of the light emergence face 11A of bar integrator 11 is similar to the peripheral shape of installation surface 2 that is provided with object being measured W.And the image that is preferably formed in the light emergence face 11A of installation surface 2 is more than or equal to the peripheral shape of installation surface 2.By such setting, can be to whole of the installation surface 2 uniform directional light of projection, even if any place that object being measured W is placed on to installation surface can both carry out the measurement that edge resolution is higher.And, make the light emergence face 11A of bar integrator 11 identical with the peripheral shape of installation surface 2, make both peripheries consistent, thus as previously mentioned, can be to whole of the installation surface uniform directional light of projection, and can suppress the generation of the parasitic light that departs from from installation surface 2.
Thus, the light that penetrates and incide bar integrator 11 from light source 10 almost all becomes uniform directional light and projects installation surface 2, these are all imagings on sensitive surface 12A almost, therefore can improve the utilization ratio of light source light, without the output that improves light source 10, just can guarantee the light income of regulation.And, can scattering light source light, when therefore can suppress the generation of parasitic light, can get rid of the decline of the measuring accuracy that the light quantity inequality because of light source 10 causes.
Fig. 4 means the key diagram of other structure example of the optical system in the related form measuring instrument of embodiment of the present utility model.(a) represent the YZ cut-open view of optical system, (b) represent the XZ cut-open view of optical system, (c) represent the XY cut-open view of each optics important document.Omit repeat specification with the local surcharge same-sign that aforesaid explanation is shared.
In example shown in Fig. 4, as bar integrator 11, use tabular bar prism, as light source 10, use LED file light source.And, in the second lens combination 24 in light projector optical system 20, use Fresnel Lenses 24f.Fresnel Lenses 24f compares price with glass lens low and easily carry out slimming, and easily carries out aspherisation, therefore has advantages of and can remove aberration.
As shown in Figure 5, the cross sectional shape of Fresnel Lenses 24f is zigzag, therefore can form shade 24s, this shade affects light quantity distribution, therefore between opening aperture 22 and the second lens combination 24, adds illumination smoothing filter (apodization wave filter) 25 to improve the inhomogeneous of light quantity distribution.Illumination smoothing filter 25 has the characteristic of transmittance as shown in Figure 6, therefore in order to suppress to cause because of the shade of Fresnel Lenses 24f the impact of the transmission light quantity reduction of comparing peripheral part with the core of lens, have and make the transmissivity of core lower than the filter mode of peripheral part.Fig. 6 (a) is made as the transmissivity of core with respect to peripheral part 50% example, and Fig. 6 (b) is made as the transmissivity of core with respect to peripheral part 80% example.By inserting this illumination smoothing filter 25, the uneven illumination as shown in Fig. 7 (a) can be improved as to the Illumination Distribution of the smoothing as shown in Fig. 7 (b).
As described above, the related form measuring instrument of embodiment of the present utility model 1 forms the object side telecentric optical system of employing in the both sides telecentric optical system that adopts in uniform area light source and combination light projector optical system 20 and light receiving optical system 30 by the bar integrator 11 by light-projecting portion 3, thereby improve the utilization ratio of light source light, without the output that improves light source 10, just can guarantee desirable light income, and when can eliminate the light quantity inequality of light source light, effectively get rid of the harmful effect that parasitic light causes measuring accuracy.
Claims (14)
1. a form measuring instrument, it possesses to the light-projecting portion of the installation surface projection light of object being measured and receives the light accepting part of the light being projected by described light-projecting portion, measures the shape and size of object being measured by the output of described light accepting part, it is characterized in that,
Described light-projecting portion possesses light source, bar integrator and light projector optical system, the light that in described bar integrator, incident is penetrated from described light source, described light projector optical system has opening number and the visual field that can be taken into the full light beam penetrating from the light emergence face of described bar integrator, and at least on described measured object side, be heart state far away
Described light accepting part possesses capturing element and object side heart light receiving optical system far away, and described capturing element receives the projection image of object being measured, and described object side heart light receiving optical system far away makes the sensitive surface of described installation surface and described capturing element become conjugate relation,
The opening aperture of described light projector optical system inside and the opening aperture of described light receiving optical system inside are in conjugate relation.
2. form measuring instrument according to claim 1, is characterized in that,
Described light projector optical system makes the light emergence face of described bar integrator and described installation surface become conjugate relation.
3. form measuring instrument according to claim 1 and 2, is characterized in that,
The peripheral shape of described light emergence face is similar to the peripheral shape of described installation surface.
4. form measuring instrument according to claim 3, is characterized in that,
The image that is formed at the described light emergence face of described installation surface is more than or equal to the peripheral shape of described installation surface.
5. a form measuring instrument, it possesses to the light-projecting portion of the installation surface projection light of object being measured and receives the light accepting part of the light being projected by described light-projecting portion, measures the shape and size of object being measured by the output of described light accepting part, it is characterized in that,
Described light-projecting portion possesses light source, bar integrator and light projector optical system, the light that in described bar integrator, incident is penetrated from described light source, described light projector optical system has opening number and the visual field that can be taken into the full light beam penetrating from the light emergence face of described bar integrator, and at least on described measured object side, be heart state far away
Described light accepting part possesses capturing element and object side heart light receiving optical system far away, and described capturing element receives the projection image of object being measured, and described object side heart light receiving optical system far away makes the sensitive surface of described installation surface and described capturing element become conjugate relation,
The opening aperture of described light projector optical system inside and the opening aperture of described light receiving optical system inside be in conjugate relation,
Described light projector optical system possesses first lens group, opening aperture, refraction of light path mirror and the second lens combination successively from described bar integrator side.
6. form measuring instrument according to claim 5, is characterized in that,
Described light projector optical system makes the light emergence face of described bar integrator and described installation surface become conjugate relation.
7. form measuring instrument according to claim 5, is characterized in that,
Described light source is light emitting diode.
8. form measuring instrument according to claim 7, is characterized in that,
Described light projector optical system makes the light emergence face of described bar integrator and described installation surface become conjugate relation.
9. according to the form measuring instrument described in any one in claim 5 to 8, it is characterized in that,
The peripheral shape of described light emergence face is similar to the peripheral shape of described installation surface.
10. form measuring instrument according to claim 9, is characterized in that,
The image that is formed at the described light emergence face of described installation surface is more than or equal to the peripheral shape of described installation surface.
11. 1 kinds of form measuring instruments, it possesses by the light-projecting portion of installation surface projection light and the light accepting part of the light that reception is projected by described light-projecting portion to measuring object, measures the shape and size of object being measured by the output of described light accepting part, it is characterized in that,
Described light-projecting portion possesses light source, bar integrator and light projector optical system, the light that in described bar integrator, incident is penetrated from described light source, described light projector optical system has opening number and the visual field that can be taken into the full light beam penetrating from the light emergence face of described bar integrator, and at least on described measured object side, be heart state far away
Described light accepting part possesses capturing element and object side heart light receiving optical system far away, and described capturing element receives the projection image of object being measured, and described object side heart light receiving optical system far away makes the sensitive surface of described installation surface and described capturing element become conjugate relation,
The opening aperture of described light projector optical system inside and the opening aperture of described light receiving optical system inside be in conjugate relation,
Described light source is light emitting diode.
12. form measuring instruments according to claim 11, is characterized in that,
Described light projector optical system makes the light emergence face of described bar integrator and described installation surface become conjugate relation.
13. according to the form measuring instrument described in claim 11 or 12, it is characterized in that,
The peripheral shape of described light emergence face is similar to the peripheral shape of described installation surface.
14. form measuring instruments according to claim 13, is characterized in that,
The image that is formed at the described light emergence face of described installation surface is more than or equal to the peripheral shape of described installation surface.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-091830 | 2013-04-24 | ||
| JP2013091830A JP6241061B2 (en) | 2013-04-24 | 2013-04-24 | Shape measuring device |
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| Publication Number | Publication Date |
|---|---|
| CN203837664U true CN203837664U (en) | 2014-09-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201420204535.6U Expired - Fee Related CN203837664U (en) | 2013-04-24 | 2014-04-24 | Shape measuring device |
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| Country | Link |
|---|---|
| JP (1) | JP6241061B2 (en) |
| CN (1) | CN203837664U (en) |
| TW (1) | TW201502468A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106124562A (en) * | 2016-06-22 | 2016-11-16 | 中国航空工业集团公司沈阳发动机设计研究所 | A kind of Liquid water content measuring method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105091780A (en) * | 2015-05-19 | 2015-11-25 | 哈尔滨工业大学 | Ultra-precision turning surface three-dimensional microscopic morphology measuring device based on characteristic of diffraction light spot of laser beam |
| CN106705887A (en) * | 2016-12-02 | 2017-05-24 | 中国科学院光电技术研究所 | Optical system generating multi-line structure light |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4185186B2 (en) * | 1998-07-02 | 2008-11-26 | 富士機械製造株式会社 | Imaging device |
| JP2006337834A (en) * | 2005-06-03 | 2006-12-14 | Fujifilm Holdings Corp | Exposing device and exposing method |
| JP5525953B2 (en) * | 2010-07-29 | 2014-06-18 | 株式会社キーエンス | Dimension measuring apparatus, dimension measuring method and program for dimension measuring apparatus |
| JP4975177B2 (en) * | 2010-09-10 | 2012-07-11 | キヤノン株式会社 | Imaging device |
| EP2859304B1 (en) * | 2012-06-08 | 2017-06-07 | VICI & C.- S.p.A. | Optical measuring machine and method |
-
2013
- 2013-04-24 JP JP2013091830A patent/JP6241061B2/en active Active
-
2014
- 2014-04-23 TW TW103114731A patent/TW201502468A/en unknown
- 2014-04-24 CN CN201420204535.6U patent/CN203837664U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106124562A (en) * | 2016-06-22 | 2016-11-16 | 中国航空工业集团公司沈阳发动机设计研究所 | A kind of Liquid water content measuring method |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201502468A (en) | 2015-01-16 |
| JP2014215139A (en) | 2014-11-17 |
| JP6241061B2 (en) | 2017-12-06 |
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Granted publication date: 20140917 Termination date: 20210424 |