CN107709617A - 用于燃气轮机的压缩机构件的仿形的保护层 - Google Patents

用于燃气轮机的压缩机构件的仿形的保护层 Download PDF

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Publication number
CN107709617A
CN107709617A CN201680039641.5A CN201680039641A CN107709617A CN 107709617 A CN107709617 A CN 107709617A CN 201680039641 A CN201680039641 A CN 201680039641A CN 107709617 A CN107709617 A CN 107709617A
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China
Prior art keywords
layer
coating system
substrate
gas turbine
structural components
Prior art date
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Pending
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CN201680039641.5A
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English (en)
Inventor
迈克尔·安嫩
约亨·巴尼克尔
阿尔图罗·弗洛勒斯伦特里亚
安德烈·吉科夫
萨沙·黑塞尔
托尔斯滕·内德迈尔
于尔根·拉姆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Siemens AG
Original Assignee
Oerlikon Surface Solutions AG Truebbach
Siemens AG
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Application filed by Oerlikon Surface Solutions AG Truebbach, Siemens AG filed Critical Oerlikon Surface Solutions AG Truebbach
Priority to CN202210299449.7A priority Critical patent/CN114774862A/zh
Publication of CN107709617A publication Critical patent/CN107709617A/zh
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
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    • C23C14/08—Oxides
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C23C28/3215—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer at least one MCrAlX layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
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    • C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
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    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
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    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
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    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12—Blades
    • F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
    • F01D5/286—Particular treatment of blades, e.g. to increase durability or resistance against corrosion or erosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
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    • F04D29/388—Blades characterised by construction
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
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    • F05D2230/00—Manufacture
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    • F05D2230/31—Layer deposition
    • F05D2230/312—Layer deposition by plasma spraying
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
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Abstract

提供一种用于基底的覆层系统，所述覆层系统包括第一层、第二层和第三层，其中第一层构成为增附剂层，第二层是具有柱状结构的可延展的金属层，而最上方的第三层是具有大的硬度的陶瓷氧化物层。基底在理想情况下是固定式燃气轮机的压缩机构件的组成部分。此外，提供一种用于制备覆层系统的方法。

Description

用于燃气轮机的压缩机构件的仿形的保护层
技术领域
本发明涉及一种用于承受腐蚀性负荷的基底的多层的覆层系统。
背景技术
燃气轮机的构件经受腐蚀性介质。施加覆层来保护这些构件免受腐蚀。因此，将含铝颗粒的耐高温漆用于燃气轮机的，尤其固定式燃气轮机的压缩机构件。然而，这种类型的覆层具有小的整体硬度(大约50HV)。由此，耐侵蚀性(例如，抗颗粒侵蚀或液滴冲击侵蚀)也是相对低的。小的整体硬度可主要归因于覆层中软的铝颗粒。由于低的耐侵蚀性，在特定的时间间隔之后必须检查构件的侵蚀情况，假如需要，就去除覆层，检验并且用相同的覆层重新覆层。这种方式是耗时的并且工作密集的。
发明内容
为此产生如下目的，改进燃气轮机的构件的耐侵蚀性。
该目的通过具有根据权利要求1的特征的覆层系统实现。本发明的其他有利的实施方式从并列权利要求和从属权利要求、附图和实施例中得出。
本发明的第一方面涉及一种用于具有表面的承受腐蚀性负荷的基底的覆层系统，所述覆层系统至少包括第一层、第二层和第三层，其中
-设置在基底的表面和第二层之间的第一层构成为增附剂层，
-第二层是具有柱状结构的可延展的金属层，并且
-设置在第二层的背离基底的一侧上的第三层是硬度为至少20GPa的陶瓷氧化物层。
根据本发明的覆层系统是有利的，因为与传统的覆层相比，所述覆层系统需要更少的维护并且维护间隔和检修间隔能够更宽地选择。由此，所述系统是更经济有效的，因为必须对于其维护使用更少的花费和时间。除了提高的耐侵蚀性之外，根据本发明的覆层具有与含铝颗粒的耐高温漆至少类似的振动腐蚀龟裂特性。
以单位GPa表示的硬度数据涉及如下压力，覆层能够以所述压力抵抗物品侵入。
第一层构成为增附剂层有利于在覆层系统的第二层和基本材料之间的更高的粘附。覆层系统的第一层优选具有铬或氮化铬。
第二层有利地通过其作为牺牲阳极的功能来阴极保护基底。第二层的延展性有利地用于拦截在存在振动负荷时的伸长，而在层中不出现裂纹。第二层的柱状结构有利地用于平衡残余应力应力，所述残余应力应力通过第三层引起。第二层的柱状结构优选由含铝的合金，例如包括铝和铬的合金构成。
根据本发明的覆层系统的第三层优选具有氧化铝和/或氧化铬和/或呈混晶结构形式的铝-铬氧化物。所述第三层也能够完全由这些氧化物构成。通过氧化物，第三层是抗氧化的，因为所述第三层已经由至少一种氧化物构成从而能够在高温下使用。第三层具有极其紧密的结构。第三层还有利地作用为第二层的防腐蚀部。此外，第三层由于其陶瓷质地起绝缘作用，由此有利地禁止电镀效应。此外，第三层明显比基本材料更硬从而对于位于其下方的层和基本材料有利地作用为防侵蚀部，尤其防液滴冲击侵蚀和颗粒侵蚀部。第三层的硬度优选为大约25GPa。
施加有三个层的基底优选是燃气轮机的压缩机构件的构件。基底尤其优选是固定式燃气轮机的压缩机构件的组成部分。压缩机构件例如能够是压缩机叶片。
本发明的第二方面涉及燃气轮机的具有根据本发明的覆层系统的压缩机构件。换言之，燃气轮机的根据本发明的压缩机构件包括如下覆层系统，所述覆层系统用于具有表面的承受腐蚀性负荷的基底，所述覆层系统至少包括第一层、第二层和第三层，其中设置在基底的表面和第二层之间的第一层构成为增附剂层，第二层是具有柱状结构的可延展的金属层，而设置在第二层的背离基底的一侧上的第三层是具有硬度为至少20GPa的陶瓷氧化物层。在此，燃气轮机优选是固定式燃气轮机。
本发明的第三方面涉及一种用于制造覆层系统的方法，所述覆层系统用于承受腐蚀性负荷的基底，所述覆层系统包括对应于根据本发明的覆层系统的三个层，其中全部层的材料通过物理气相沉积(physical vapor deposition，PVD)涂覆。所述方法是有利的，因为不需要在涂覆传统的层时必须执行的热处理。此外，通过PVD涂覆的层具有有利的表面粗糙度，所述表面粗糙度产生良好的空气动力学特性。此外，用于覆层的PVD方法是有利的，因为层的厚度能够在10μm之内从而覆层的构件能够以仿形的方式(konturgetreu)仿制，也就是说，不需要附加的掩模。
覆层系统的层优选通过阴极电弧蒸镀和/或溅射涂覆。换言之，所述层能够通过所提及的方法中的一种或两种方法的组合来涂覆。
附图说明
结合附图详细阐述本发明。附图示出：
图1示出覆层系统的一个实施方式。
图2示出根据图1的实施方式的电子显微图片。
图3示出根据本发明的方法的一个实施方式的流程图。
具体实施方式
在图1中示出的实施方式中，覆层系统1具有：基底2，所述基底具有表面2a；第一层3；第二层4和第三层5。基底2具有至少一种金属并且能够是金属合金。在腐蚀条件下，基底2能够是易受腐蚀的。
第一层3设置在表面2a上并且具有大约100nm的厚度。所述第一侧优选由铬或氮化铬构成，但在其作为增附剂层的特性中也能够具有其他金属或例如MCrAlY类型的其他成分。
第二层4设置在第一层3上并且具有在0.5μm至5.0μm，优选1.0μm至3.0μm的范围中的厚度。第二层4是由铝合金构成的具有柱状结构的可延展的金属层。例如，第二层4由具有铝和铬的合金构成；但是替选地，所述合金也能够包含另外的或不同于铬的金属。
第三层5设置在第二层4上并且具有在0.5μm至10.0μm，优选1.0μm至5.0μm的范围中的厚度。第三层5是具有非常紧密的结构的硬的陶瓷氧化物层。第三层5的材料是由氧化铬和氧化铝构成的混合物，优选由混晶化合物构成的混合物，所述混晶化合物由铝-铬氧化物和附加的Al-Cr金属间化合物构成。在第三层5中也能够存在另外的氧化物和其他化合物或元素。第三层5是耐腐蚀的，因为所述第三层已经由氧化物构成。由此，第三层5保护基底2和其他层免受腐蚀。陶瓷组成部分赋予第三层5大的硬度，所述硬度通常直至25GPa。因此，第三层5明显比基底2和其他层更硬。大的硬度有效地耐侵蚀，尤其耐液滴冲击侵蚀和颗粒侵蚀。
覆层系统的厚度整体上能够直至20μm。在此，个别层，尤其第二层4和第三层5也能够具有比上述更大的厚度。在图2中示出的嵌入物质6涂覆在第三层5上用于金相研究。嵌入层具有无机氧化物。图2是覆层系统1的扫描电子显微图像的照片，在所述照片中第一层3由于其小的厚度几乎无法察觉。
基底2优选属于固定式燃气轮机的压缩机构件，优选压缩机叶片。然而，所述基底也能够属于固定式燃气轮机或其他燃气轮机的其他构件或部件。
为了制备所述覆层系统1，在所述方法的一个实施方式中，根据图3的示意图在第一步骤S1中提供具有表面2a的基底2。在第二步骤S2中，第一层3的材料通过物理气相沉积(physical vapor deposition，PVD)涂覆。在第三步骤S3中，第二层4的材料同样通过PVD涂覆。在第四步骤S4中，第三层5的材料同样通过PVD涂覆。
在此，作为PVD的优选的方法执行阴极电弧蒸镀。同样优选的方法是溅射。两个方法彼此组合同样是优选的。能够替选地和/或与上述方法组合地使用的其他可行的、可应用的方法是热蒸镀、电子射束蒸镀、激光射束蒸镀或电弧蒸镀。
对于本领域技术人员容易想到的本发明的变型和变化落入权利要求的保护范围。

Claims (10)

1.一种用于承受腐蚀性负荷的基底(2)的覆层系统(1)，所述基底具有表面(2a)，所述覆层系统至少包括第一层(3)、第二层(4)和第三层(5)，其中
-设置在所述基底的所述表面(2a)和所述第二层(4)之间的所述第一层(3)构成为增附剂层，
-所述第二层(4)是具有柱状结构的可延展的金属层，并且
-设置在所述第二层的背离所述基底(2)的一侧上的所述第三层(5)是硬度为至少20GPa的陶瓷氧化物层。
2.根据权利要求1所述的覆层系统(1)，
其中所述第一层(3)具有铬或氮化铬。
3.根据权利要求1或2所述的覆层系统(1)，
其中所述第二层(4)的所述柱状结构由含铝的合金构成。
4.根据上述权利要求中任一项所述的覆层系统(1)，
其中所述第三层(5)具有氧化铝和/或氧化铬和/或呈混晶结构形式的铝-铬氧化物。
5.根据上述权利要求中任一项所述的覆层系统(1)，
其中所述第三层(5)的硬度为大约25GPa。
6.根据上述权利要求中任一项所述的覆层系统(1)，
其中所述基底(2)是燃气轮机的压缩机构件的组成部分。
7.根据权利要求6所述的覆层系统(1)，
其中所述基底(2)是固定式燃气轮机的压缩机构件的组成部分。
8.一种燃气轮机的压缩机构件，所述压缩机构件具有根据权利要求1至7中任一项所述的覆层系统。
9.一种用于制备覆层系统的方法，所述覆层系统用于承受腐蚀性负荷的基底，所述覆层系统包括根据权利要求1至7中任一项所述的三个层，其中全部层的材料通过物理气相沉积涂覆。
10.根据权利要求9所述的方法，
其中所述层的材料通过阴极电弧蒸镀和/或通过溅射涂覆。
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