CN107709254A - The manufacture method of glass substrate for display - Google Patents
The manufacture method of glass substrate for display Download PDFInfo
- Publication number
- CN107709254A CN107709254A CN201680036348.3A CN201680036348A CN107709254A CN 107709254 A CN107709254 A CN 107709254A CN 201680036348 A CN201680036348 A CN 201680036348A CN 107709254 A CN107709254 A CN 107709254A
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- China
- Prior art keywords
- temperature
- glass
- plate glass
- cooling
- cooling rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/067—Forming glass sheets combined with thermal conditioning of the sheets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/064—Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B25/00—Annealing glass products
- C03B25/04—Annealing glass products in a continuous way
- C03B25/10—Annealing glass products in a continuous way with vertical displacement of the glass products
- C03B25/12—Annealing glass products in a continuous way with vertical displacement of the glass products of glass sheets
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Abstract
When manufacturing the small glass substrate for display of percent thermal shrinkage, cooled down untill reaching 300 DEG C by forming step and the temperature of the central part of the width of plate glass shaped.Now, the cooling velocity of middle section is the average cooling rate for the middle section that the temperature of the central part is less than 450 DEG C and is less than for the average cooling rate in more than 300 DEG C of temperature province in the temperature province beyond the temperature province in the cooling step, and the middle section is that the both ends for being located at the width than plate glass are more leaned on the inside of the width of the plate glass and include the region of the central part.
Description
Technical field
The present invention relates to a kind of manufacture method of glass substrate for display.
Background technology
In the step of manufacturing display, glass substrate for display can carry out thermal contraction because of heat treatment.Now, if
The percent thermal shrinkage of glass substrate is big, then easily produces the spacing deviation formed in the configuration skew of the element of glass baseplate surface.
Therefore, according to the viewpoint for reducing spacing deviation, percent thermal shrinkage when requiring to be heat-treated to glass substrate for display is small.
As the method for the percent thermal shrinkage for reducing glass substrate, (1) can be enumerated by being adjusted glass composition to make
The strain point rise of glass；(2) cooling velocity of plate glass after forming step etc. is reduced.For example, as reduction glass base
The technology of the percent thermal shrinkage of plate, it is known to the skill improved in a manner of making strain point reach more than 680 DEG C to glass composition
Art (patent document 1).
Moreover, cooling step is divided into the first cooling step, the second cooling step and the 3rd cooling step, described first is cold
But step cools down to plate glass, untill the temperature of the middle section of the plate glass after shaping reaches slow cooling point,
Second cooling step cools down to plate glass, until the temperature of middle section cold spot of postponing reaches -50 DEG C of strain point
Untill, the 3rd cooling step cools down to plate glass, until the temperature of middle section reaches for -50 DEG C from strain point
Untill -200 DEG C of strain point.Now, it is known to which following technology, the technology make the average cooling rate ratio in the first cooling step
Average cooling rate in 3rd cooling step faster, and makes the average cooling rate in the 3rd cooling step than the second cooling step
Average cooling rate in rapid is faster (patent document 2).
[prior art literature]
[patent document]
[patent document 1] Japanese Patent Laid 2003-503301 publications
No. 5153965 publications of [patent document 2] Japanese Patent No.
The content of the invention
[problems to be solved by the invention]
However, according to patent document 1, if be adjusted in a manner of making strain point elevated to composition, easily produce
The problem of devitrification and infusibility solution, therefore, the limit be present making the elevated aspect of strain point.Moreover, there are the following problems：Work as utilization
When overflow downdraw makes glass substrate, if reducing the cooling speed of plate glass in the cooling step carried out after the formation step
Degree, then slow cooling path extension, the cost increase of annealing device.
Moreover, according to patent document 2, there are the following problems：Even if make the average cooling rate ratio in the first cooling step
Average cooling rate in 3rd cooling step faster, and makes the average cooling rate in the 3rd cooling step than the second cooling step
Average cooling rate in rapid is faster, there is also the limit and insufficient in terms of percent thermal shrinkage is reduced.
The increasingly desirable High precision of display and power reducing that the mobile devices such as mobile phone are carried.Therefore, in recent years, day
Benefit needs further to reduce the percent thermal shrinkage of caused glass substrate during the heat treatment in the manufacturing step of display.
Therefore, it is an object of the invention to provide the manufacture method of following glass substrate for display, it enters after forming
In capable cooling step, the percent thermal shrinkage of glass substrate can be reduced compared with existing.
[technological means for solving problem]
The first aspect of the present invention is the manufacture method of glass substrate for display.The manufacture method includes：
Forming step, it makes melten glass be configured to plate glass by glass tube down-drawing；And
Cooling step, its after making shaping the plate glass flowing when, cooled down until with the plate glass
The orthogonal width in flow direction central part temperature reach 300 DEG C untill.
In the cooling step, the cooling velocity of middle section is that the temperature of the central part is less than 450 DEG C and for 300
The average cooling rate in temperature province more than DEG C, less than the humidity province beyond the temperature province in the cooling step
The average cooling rate of the middle section in domain, the middle section are to be located at the width than the plate glass
Both ends more lean on the inner side of the width of the plate glass and include the region of the central part.
It is preferred that the cooling step includes：
First cooling step, its after the plate glass is configured to, the width of the plate glass
When the temperature of central part is more than slow cooling point, middle section is cooled down with the first average cooling rate, the middle section is
On the inside of width of the both ends of the width than the plate glass more by the plate glass and comprising described
The region of central part；
Second cooling step, its central part temperature be less than the slow cooling point and for more than 450 DEG C when, with second
Average cooling rate cools down to the middle section；And
3rd cooling step, its temperature of the central part be less than 450 DEG C and for more than 300 DEG C when, it is average with the 3rd
Cooling velocity cools down to the middle section,
3rd average cooling rate is less than first average cooling rate and second average cooling rate.
It is preferred that the cooling step and then including the 4th cooling step, temperature of the 4th cooling step in the central part
When less than 300 DEG C and being more than 100 DEG C, the middle section is cooled down with the 4th average cooling rate,
4th average cooling rate is more than the 3rd average cooling rate.
Moreover, the second aspect of the present invention is to be formed for implementing heat treatment according to specific treatment temperature on surface thin
The manufacture method of the glass substrate for display of film.The manufacture method includes：
Forming step, it makes melten glass be configured to plate glass by glass tube down-drawing；And
Cooling step, its after making shaping the plate glass flowing when, cooled down until with the plate glass
The orthogonal width in flow direction central part temperature reach 250 DEG C lower than the treatment temperature temperature it is i.e. (described
- 250 DEG C for the treatment of temperature) untill.
In the cooling step, the cooling velocity of middle section is that the temperature of the central part is less than than the processing temperature
Spend low 100 DEG C of temperature be less than (- 100 DEG C of the treatment temperature) and for 250 DEG C lower than the treatment temperature of temperature more than
The average cooling rate in temperature province i.e. more than (- 250 DEG C of the treatment temperature), described in the cooling step
The average cooling rate of the middle section in temperature province beyond temperature province, the middle section are located at than described
The both ends of the width of plate glass more lean on the inner side of the width of the plate glass and include the center
The region in portion.
It is preferred that the cooling step includes：
First cooling step, it is after the plate glass is configured to, the center of the width of the plate glass
When the temperature in portion is more than slow cooling point, middle section is cooled down with the first average cooling rate, the middle section is to be located at
Both ends than the width of the plate glass are more leaned on the inside of the width of the plate glass and include the center
The region in portion；
Second cooling step, it is less than the slow cooling point in the temperature of the central part and is lower than the treatment temperature
When more than 100 DEG C of temperature i.e. more than (- 100 DEG C of the treatment temperature), with the second average cooling rate to the middle section
Cooled down；And
3rd cooling step, it is small in temperature of the temperature of the central part less than 100 DEG C lower than the treatment temperature
In (- 100 DEG C of the treatment temperature) and it is more than 250 DEG C lower than the treatment temperature of the temperature i.e. (treatment temperature -250
DEG C) more than when, the middle section is cooled down with the 3rd average cooling rate,
3rd average cooling rate is less than first average cooling rate and second average cooling rate.
It is preferred that the cooling step and then including the 4th cooling step, temperature of the 4th cooling step in the central part
Temperature less than 250 DEG C lower than the treatment temperature is i.e. less than -250 DEG C of the treatment temperature (DEG C) and for than the processing temperature
When spending more than low 450 DEG C of temperature more than -450 DEG C of i.e. described treatment temperature (DEG C), with the 4th average cooling rate in described
Centre region is cooled down,
4th average cooling rate is more than the 3rd average cooling rate.
In first aspect and the second aspect, it is average that first average cooling rate is preferably greater than described second
Cooling velocity.
In first aspect and the second aspect, preferably less than 5.0 DEG C/sec of the 3rd average cooling rate.
In first aspect and the second aspect, the percent thermal shrinkage of the glass substrate is both preferably below 15ppm.
Wherein, the percent thermal shrinkage is with the receipts of the glass substrate after the heat treatment of 500 DEG C of holdings 30 minutes using implementation
Contracting amount, the value obtained according to following formula.
Percent thermal shrinkage (ppm)
={ length of the glass substrate before amount of contraction/heat treatment of the glass substrate after heat treatment } × 106
In first aspect and the second aspect, preferably more than 680 DEG C of the strain point of the glass substrate.
[The effect of invention]
According to the manufacture method of the glass substrate for display, percent thermal shrinkage can be reduced compared with existing.
Brief description of the drawings
The figure of one of the step of Fig. 1 is the manufacture method for the glass substrate for display for representing present embodiment.
Fig. 2 is the glass substrate manufacture device used in the manufacture method of the glass substrate for display of present embodiment
The schematic diagram of one.
Fig. 3 is cuing open for one of the building mortion in the manufacture method for the glass substrate for display for representing present embodiment
View.
Fig. 4 is one of the building mortion used in the manufacture method for the glass substrate for display for representing present embodiment
The side view of example.
Fig. 5 is the structure of the control device used in the manufacture method for the glass substrate for display for representing present embodiment
Into the figure of one.
Fig. 6 is the temperature used in the cooling step of the manufacture method for the glass substrate for display for representing present embodiment
Spend the figure of the example of distribution.
Fig. 7 is the plate glass in the manufacture method for the glass substrate for display for representing present embodiment along flowing
The figure of one of the temperature history in direction.
Fig. 8 is multiple temperature in the cooling step of the plate glass used in the manufacture method of glass substrate for display
The schematic diagram of the example of degree course.
Embodiment
Hereinafter, the manufacture method of the glass substrate for display of present embodiment is illustrated.In present embodiment
In the manufacture method of glass substrate for display, glass substrate is manufactured using overflow downdraw.In addition, in this manual,
(- X DEG C for the treatment of temperature) represents temperature (X is positive number) of low X DEG C compared with treatment temperature (DEG C).
(1) summary of the manufacture method of glass substrate
First, reference picture 1 and Fig. 2, to contained multiple steps and multiple steps in glass substrate for display manufacture method
Glass substrate manufacture device 100 used in rapid illustrates.Fig. 1 is the glass substrate for display for representing present embodiment
Manufacture method the step of the figure of one, Fig. 2 is made in the manufacture method of the glass substrate for display of present embodiment
The schematic diagram of one of glass substrate manufacture device.
As shown in figure 1, method for manufacturing glass substrate mainly comprising melting step S1, clarification steps S2, forming step S3 and
Cooling step S4.
Melting step S1 is the step of melting frit.Frit is passed through in a manner of reaching desired composition
After modulation, melting plant 11 is put into.Frit melts in melting plant 11 and turns into melten glass FG.According to glass
Species and adjust melting temperature.In the present embodiment, so that the maximum temperature of the melten glass FG in melting step S1 reaches
Heated to 1500 DEG C~1650 DEG C of modes.Melten glass FG is sent to clarifier 12 via upstream tube 23.
Clarification steps S2 is the step of the bubble in melten glass FG is removed.Thereafter, degassing is removed in clarifier 12
Melten glass FG after bubble is sent to building mortion 40 via downstream tube 24.
Forming step S3 is the step of melten glass FG is configured to foliated glass i.e. plate glass SG.Specifically, melt
Melt glass FG to be continuously fed into after formed body 41 (reference picture 3) contained in building mortion 40, from the overflow of formed body 41.Overflow
Surfaces of the melten glass FG along formed body 41 flow down.Thereafter, melten glass FG shapes at the bottom of formed body 41 interflow
For plate glass SG.
Cooling step S4 is the step of cooling to plate glass SG.Glass sheet is cooled via cooling step S4
To the temperature close to room temperature.In addition, the state of cooling in cooling step S4, the thickness (thickness of slab of glass substrate is determined
Degree), the value of the plane strain of the amount of warpage of glass substrate and glass substrate.
In addition, cut-out step can be also set after cooling step S4.For example, cut-out step is in shearing device 90,
The step of plate glass SG of temperature close to room temperature is cut to particular size.
In addition, the plate glass SG of particular size is cut in step is cut off, thereafter, via steps such as end face processing
And turn into glass substrate.After glass substrate is packaged, by shipment to panel vendor etc..Panel vendor is on the surface of glass substrate
Form element and manufacture display.
In addition, cut-out step can not be also set after cooling step S4.That is, the flat board through cooling in cooling step S4
Glass SG also can it is directly packaged after, by shipment to panel vendor etc..In the situation, panel vendor is plate glass SG's
Surface is formed after element, and plate glass SG is cut into particular size and carries out end face processing, thus manufactures display.
Hereinafter, 3~Fig. 5 of reference picture is said to the composition of building mortion 40 contained in glass substrate manufacture device 100
It is bright.In addition, in the present embodiment, so-called plate glass SG width, refer to plate glass SG surface face in side
The direction that the direction (flow direction) flowed down with plate glass SG in intersects, i.e. horizontal direction.
(2) composition of building mortion
First, the schematic configuration of building mortion 40 is represented in Fig. 3 and Fig. 4.Fig. 3 is the sectional view of building mortion 40.Fig. 4 is
The side view of building mortion 40.
Building mortion 40 has path, the space with surrounding path that plate glass SG is passed through.Surround the space of path
Such as it is made up of formed body room 20, the first cooling chamber 30 and the second cooling chamber 80.
In the present embodiment, when plate glass SG flows downwards from following location, along plate glass SG stream
In the temperature province in dynamic direction, plate glass SG central part C (reference picture 4) temperature is less than 450 DEG C and for more than 300 DEG C
Average cooling rate in temperature province is as described below, and the temperature less than the central part C in cooling step S4 is less than 450 DEG C and is
The average cooling rate in temperature province beyond more than 300 DEG C of temperature province, the position are that melten glass FG is shaping
The bottom 41a of body 41 collaborates and forms plate glass SG position.The content will be aftermentioned.In addition, average cooling rate is with
The temperature province that center portion C temperature is less than 450 DEG C and the average cooling rate for more than 300 DEG C of temperature province is made comparisons is for example
It is the temperature province that the temperature difference in upstream side and downstream is at least more than 10 DEG C.
In addition, the both ends of so-called plate glass SG width, refer to from plate glass SG two side ends to flat
The region in the range of width untill the progresses inside 200mm of glass sheet SG width position, by both ends
The region of inner side of width be referred to as plate glass SG middle section CA (reference picture 4).Plate glass SG both ends
R, L is the region for including the part that the object removed is cut off after manufacture, and on the other hand, plate glass SG middle section CA is
Include the region for the part for making the uniform object of plate thickness.Plate glass SG middle section CA is in plate glass SG width
Scope within the half width such as 85% that the center of the width from plate glass SG in the width in direction is counted.Institute
Central part C is called, refers to the center of plate glass SG width.So-called average cooling rate, refer to include central part C
Middle section CA average cooling rate, its be by it is determined that temperature province in same widths direction opening position stream
The temperature difference in dynamic direction, divided by values of the plate glass SG as obtained by the passage time of the temperature province.At such as less than 450 DEG C and
For be expressed as more than 300 DEG C of temperature provinces be less than X1 DEG C and be more than X2 DEG C temperature province in, central part C temperature difference
It is considered as X1-X2 (DEG C), calculates central part C average cooling rate.Part beyond middle section CA central part C it is flat
Equal cooling velocity is also by the temperature difference in the temperature province divided by the value obtained by passage time.
Formed body room 20 is the sky for making to be configured to plate glass SG from the melten glass FG that the clarifier 12 is conveyed
Between.
First cooling chamber 30 is arranged in the lower section of formed body room 20, and for the thickness and amount of warpage to plate glass SG
The space being adjusted.In the first cooling chamber 30, plate glass SG central part C temperature is higher than in the state of slow cooling point
Plate glass SG cooled down.Plate glass SG central part C is the center of plate glass SG width.
Second cooling chamber 80 is arranged in the lower section of the cooling chamber 30 of formed body room 20 and first, and for plate glass SG
The space that is adjusted of warpage, percent thermal shrinkage and strain value.In the second cooling chamber 80, by flat in the first cooling chamber 30
Glass sheet SG is at least cooled to temperature of 100 DEG C less than strain point via slow cooling point, strain point.However, in the second cooling
In room 80, untill plate glass SG can also be cooled to the temperature of near room temperature.In addition, the inside of the second cooling chamber 80 can also lead to
Cross heat insulating component 80b and be divided into multiple spaces.Multiple heat insulating component 80b multiple decline roller 81a~81g each between, match somebody with somebody
It is placed in the both sides of plate glass SG thickness direction.Thus, can precision more preferably to plate glass SG carry out temperature treatment.
Moreover, building mortion 40 for example including formed body 41, partition member 50, chill roll 51, temperature adjustment unit 60, under
Roller 81a~81g and heater 82a~82g drops.And then building mortion 40 includes control device 91 (reference picture 5).Control device
The drive division of contained each composition is controlled in 91 pairs of building mortions 40.
Hereinafter, each composition contained in building mortion 40 is illustrated in detail.
(2-1) formed body
Formed body 41 is arranged in formed body room 20.Formed body 41 makes melten glass FG by making melten glass FG overflows
It is configured to foliated glass i.e. plate glass SG.As shown in figure 3, it is in substantially pentagonal shape that formed body 41, which has section shape,
(shape for being similar to wedge shape).Bottom 41a of the substantially pentagonal front end equivalent to formed body 41.
Moreover, formed body 41 has inflow entrance 42 (reference picture 4) in first end.The upper surface of formed body 41 formed with
Groove 43.Inflow entrance 42 is connected with the downstream tube 24, and the melten glass FG flowed out from clarifier 12 is flowed into from inflow entrance 42
Groove 43.The melten glass FG of the groove 43 of formed body 41 is flowed into from a pair of top 41b, 41b overflows of formed body 41, and along shaping
A pair of sides (surface) 41c, 41c of body 41 is flowed down.Thereafter, melten glass FG is formed at the bottom 41a interflow of formed body 41
For plate glass SG.
(2-2) partition member
Partition member 50 is the component for blocking heat to be moved from formed body room 20 to the first cooling chamber 30.Partition member 50 configures
Near melten glass FG junction of two streams.Moreover, as shown in figure 3, partition member 50 is configured at the melting glass at junction of two streams interflow
Glass FG (plate glass SG) thickness direction both sides.Partition member 50 is, for example, heat-insulated material.Partition member 50 is by melten glass FG
Junction of two streams upside environment and downside environment separate, thus, block the heat between the upside and downside of partition member 50 mobile.
(2-3) chill roll
Chill roll 51 is arranged in the first cooling chamber 30.More particularly, chill roll 51 is being configured at partition member 50 just
Lower section.Moreover, chill roll 51 is configured at plate glass SG thickness direction both sides, and it is configured at plate glass SG width
Both ends R, L position.The chill roll 51 for being configured at plate glass SG thickness direction both sides is acted in couples.That is,
Plate glass SG width both ends are clamped by two pairs of chill rolls 51.
For example, chill roll 51 is cooled down by the air cooling pipe or water cooling tube for being passed into inside.Chill roll 51 and plate glass SG's
Both ends R, L contact, is rapidly cooled down by heat transfer to plate glass SG both ends R, L.Contacted with chill roll 51
Plate glass SG both ends R, L viscosity be, for example, 109.0It is more than pool.
Chill roll 51 is by chill roll drive motor 390 (reference picture 5) rotation driving.Chill roll 51 also has following function,
That is, plate glass SG both ends R, L are cooled down, and plate glass SG is declined downwards.In addition, chill roll 51 is right
The homogenization of plate glass SG width and plate glass SG thickness can be made in plate glass SG both ends R, L cooling
Into influence.
(2-4) temperature adjustment unit
Temperature adjustment unit 60 is provided in the first cooling chamber 30, and plate glass SG is cooled into slow cooling point and is nearby
Unit only.Temperature adjustment unit 60 is configured at the lower section of partition member 50, and be configured at the top plate 80a of the second cooling chamber 80
Top.
Temperature adjustment unit 60 cools down to plate glass SG, until plate glass SG central part C temperature reaches
Untill near slow cooling point.Thereafter, plate glass SG central part C is in the second cooling chamber 80, via slow cooling point, strain point by
Untill the temperature for being cooled near room temperature.
Temperature adjustment unit 60 can also have cooling unit 61.Multiple (these are configured on plate glass SG width
Locate as 3) cooling unit 61, and multiple cooling units 61 are configured on plate glass SG flow direction.Specifically, with
It is relative with plate glass SG both ends R, L each surface to mode and one by one configure cooling unit 61, and with it is aftermentioned
Middle section CA (reference picture 4) each surface it is relative to mode and configure a cooling unit 61.
(2-5) declines roller
Decline roller 81a~81g to be arranged in the second cooling chamber 80, and make by the plate glass SG in the first cooling chamber 30
Decline to plate glass SG flow direction.Decline roller 81a~81g to separate in the inside of the second cooling chamber 80, streamwise
Configure specific interval.Decline roller 81a~81g in plate glass SG thickness direction both sides (reference picture 3) and plate glass SG
Width both ends R, L position (reference picture 4) configure it is multiple.That is, decline roller 81a~81g while with flat board glass
Both ends R, L of glass SG width position contact, and with two side contacts of plate glass SG thickness direction, while making
Plate glass SG declines downwards.
Decline roller 81a~81g to be driven by decline roller drive motor 391 (reference picture 5).Set it is preferred that declining roller 81a~81g
Downstream must be got over, then makes decline roller 81a~81g circular velocity bigger.That is, in multiple decline roller 81a~81g, roller 81a is declined
Circular velocity it is minimum, the circular velocity for declining roller 81g is maximum.It is configured at the decline roller 81a of plate glass SG thickness direction both sides
~81g is acted in couples, paired decline roller 81a, 81a ... plate glass SG is in downward direction declined.
(2-6) heater
Heater 82a~82g is arranged on the inside of the second cooling chamber 80, and the temperature of the inner space to the second cooling chamber 80
Degree is adjusted.Specifically, heater 82a~82g is in plate glass SG flow direction and plate glass SG width side
It is multiple to configuring.For example, 7 heaters are configured on plate glass SG flow direction, in the width of plate glass
3 heaters of upper configuration.3 heaters of width are configured at respectively to plate glass SG middle section CA and flat board
Glass SG both ends R, L carries out temperature control.Heater 82a~82g output is controlled by control device 91 described later.By
This, to being controlled by the environment temperature near the plate glass SG inside the second cooling chamber 80.By heater 82a~
82g is controlled to the environment temperature in the second cooling chamber 80, thus, temperature control is carried out to plate glass SG.Moreover, pass through
Temperature control, plate glass SG is from adhesive region via Viscoelastic Region and to Hookean region transition.In this way, pass through heater
82a~82g control, in the second cooling chamber 80, the temperature that plate glass SG temperature is postponed near cold spot is cooled to room temperature
Untill neighbouring temperature.
In addition, the environment temperature testing agency detected to environment temperature can be also set near plate glass SG
(being in the present embodiment thermocouple) 380 (reference picture 5).For example, thermocouple 380 is in plate glass SG flow direction and puts down
Glass sheet SG width configures multiple.Thermocouple 380 can detect to the temperature on plate glass SG surfaces.For example,
Thermocouple 380 respectively the temperature to plate glass SG central part C, examine with plate glass SG both ends R, L temperature
Survey.Heater 82a~82g output is controlled based on the environment temperature detected by thermocouple 380.
(2-7) shearing device
Shearing device 90 is by the plate glass SG untill being cooled to the temperature of near room temperature in the second cooling chamber 80
It is cut to specific dimensions.Thus, plate glass SG turns into multiple glass plates.Shearing device 90 is by shearing device drive motor 392
(reference picture 5) drives.In addition, shearing device 90 can may not also be arranged on the underface of the second cooling chamber 80.Moreover, plate glass
SG can not also be cut off by shearing device 90, also plate glass SG can be wound as into web-like and be made the plate glass of web-like.
(2-8) control device
Fig. 5 is the figure of one of the composition for representing control device 91.
Control device 91 includes CPU (Central Processing Unit, central processing unit), RAM (Random
Access Memory, random access memory), ROM (Read Only Memory, the read only memory) and hard disk etc., to glass
Contained various equipment are controlled in glass apparatus for manufacturing substrate 100.Specifically, as shown in figure 5, control device 91 receives glass
Contained various sensors (such as thermocouple 380) or switch (such as main power switch 381) etc. in glass apparatus for manufacturing substrate 100
Signal, to temperature adjustment unit 60, heater 82a~82g, chill roll drive motor 390, decline roller drive motor 391, cut
Disconnected device drive motor 392 etc. is controlled.
(3) temperature treatment
In the cooling step S4 of the manufacture method of the glass substrate of present embodiment, middle section CA cooling velocity is
Central part C temperature is less than 450 DEG C and is the average cooling rate in more than 300 DEG C of temperature province, less than cooling step S4
In central part C temperature be less than 450 DEG C and for the central area in the temperature province beyond more than 300 DEG C of the temperature province
Domain CA average cooling rate.That is, in cooling step S4, it is less than 450 DEG C and in central part C temperature for more than 300 DEG C
In temperature province, the average cooling rate in middle section CA is minimum.Average cooling rate is adjusted in this way, thus, can
Extremely low percent thermal shrinkage is realized in the manufacturing line of glass substrate.In the situation, adjusted using the chill roll 51, temperature single
60 and heater 82a~82g of member and average cooling rate is adjusted.Certainly, now, by plate glass as shown in Figure 6
Temperature Distribution TP1~TP10 of SG width is set to the target temperature profiles in each temperature province of flow direction, to
The temperature of one cooling chamber 30 and the second cooling chamber 80 is controlled, and thus, to plate glass SG thickness, amount of warpage and can be answered
Change is adjusted.
Fig. 6 is a figure that i.e. Temperature Distribution TP1~TP10 is illustrated to the target temperature profiles in cooling step.
In Temperature Distribution TP1, plate glass SG middle section CA temperature is uniform, during plate glass SG both ends R, L are less than
Entreat region CA temperature.In a manner of plate glass SG is reached the Temperature Distribution TP1, using the chill roll 51 after shaping
Plate glass SG both ends R, L are cooled down.In Temperature Distribution TP2~TP5, while reducing plate glass SG entirety
Temperature, while make middle section CA Temperature Distribution turn into the substantially parabolic shape to raise up from rectangular shape, and progressively
Reduce the degree of convexity of substantially parabolic shape.In Temperature Distribution TP6, make the temperature in both ends R, L and middle section CA
It is fixed.Thereafter, in Temperature Distribution TP7~TP10, the Temperature Distribution of downwardly convex substantially parabolic shape is formed, while drop
Temperature overall low plate glass SG, while increase makes the downwardly convex degree of middle section CA Temperature Distribution.So that flat board
Glass SG temperature reaches the mode of Temperature Distribution as described above, using cooling unit 61 and heater 82a~82g to
One cooling chamber 30 and the second cooling chamber 80 enter trip temperature adjustment.
In addition, when entering the situation of trip temperature adjustment to the first cooling chamber 30 and the second cooling chamber 80, plate glass SG's
The measured value of plate glass SG temperature can be used in temperature, and, it is possible to use based on heated device 82a~82g controls
Plate glass SG environment temperature and by simulating the value that calculates.
Fig. 7 is the temperature history (temperature along flow direction for the plate glass SG for representing the central part C in present embodiment
The time change of degree) the figure of one.In the figure 7, in time point A, plate glass is formed in the bottom 41a of formed body 41
SG.The temperature of plate glass SG now is, for example, 1200 DEG C.In time point B, plate glass SG temperature reaches slow cooling point (glass
Glass viscosity is 1013Such as 775 DEG C of temperature during pool), in time point C, plate glass SG temperature reaches 450 DEG C.At time point
D, plate glass SG temperature reach 300 DEG C, and in time point E, plate glass SG temperature reaches less than 200 DEG C, the flat board glass
Glass SG is cut off by shearing device 90.Now, the temperature province of the plate glass SG untill time point A to time point B (is formed
After plate glass SG, temperature province more than slow cooling point) be set to the first temperature province R1, will after elapsed time point B until when
Between the temperature province (slow cooling point is less than more than 450 DEG C of temperature province) of plate glass SG untill point C be set to second temperature area
Domain R2, the temperature province of the plate glass SG after elapsed time point C untill time point D (is less than 450 DEG C and for 300 DEG C
Temperature province above) the 3rd temperature province R3 is set to, by the plate glass SG after elapsed time point D untill time point E
Temperature province (be less than 300 DEG C and for more than 100 DEG C of temperature province) be set to the 4th temperature province R4.Now, first~
In 4th temperature province R1~R4, the 3rd average cooling rate in the 3rd temperature province R3 be less than other the first, second, the 4th
Temperature province R1, R2, R4 the first, second, the 4th average cooling rate.Plate glass SG's in first temperature province R1 is cold
But step is the first cooling step, and the cooling step of the plate glass SG in second~the four temperature province R2~R4 is respectively
Two~the 4th cooling step.
In the present embodiment, temperature province (tool is determined even in arbitrarily dividing the scope beyond temperature province R3
Have the temperature province of more than 10 DEG C of temperature difference) situation when, the 3rd average cooling rate in temperature province R3 is also minimum.
Furthermore, it is contemplated that can effectively reduce percent thermal shrinkage, the averagely cooling speed of first in preferably the first temperature province R1
Degree is more than the second average cooling rate in second temperature region.Specifically, according to effectively reduce percent thermal shrinkage viewpoint,
For the rapid mitigation for carrying out the glass in the first temperature province R1, preferably make the second~the 4th temperature province R2~R4 cooling fast
Degree is slower than the first temperature province R1 cooling velocity.
Moreover, it is contemplated that the length to the path without the plate glass SG to cooling step S4 changes, and suppress glass
The 4th average cooling rate in the reduction of the production efficiency of glass substrate, preferably the 4th temperature province R4 of the 4th cooling step is big
The 3rd average cooling rate in the 3rd temperature province.
Moreover, it is contemplated that to that can reduce percent thermal shrinkage, the 3rd average cooling rate in the 3rd temperature province R3 is preferably 5
Below DEG C/sec.Moreover, there is no particular restriction for the lower limit of the 3rd average cooling rate, but in view of not to plate glass SG road
The length in footpath is changed, or the reduction of the production efficiency in view of that can suppress glass substrate, the 3rd average cooling rate
Lower limit for example be preferably more than 0.5 DEG C/sec.It is and then average according to the viewpoint for keeping productivity and reduction percent thermal shrinkage, the 3rd
Cooling velocity is preferably 1 DEG C/sec~4.5 DEG C/sec.
Moreover, the first average cooling rate in the first temperature province R1 is for example preferably 5 DEG C/sec~50 DEG C/sec, it is more excellent
Elect 15 DEG C/sec~35 DEG C/sec as.The second average cooling rate in the R2 of second temperature region is, for example, less than 5 DEG C/sec, preferably 1
DEG C/sec~5 DEG C/sec, more preferably 2 DEG C/sec~5 DEG C/sec.
Moreover, such as present embodiment, it is contemplated that do not extend plate glass SG path and reduce percent thermal shrinkage, preferably in
Center portion C temperature is less than 300 DEG C and is more than the 3rd for the 4th average cooling rate in more than 100 DEG C of the 4th temperature province R4
The 3rd average cooling rate in temperature province R3.
Temperature history centered on temperature history shown in Fig. 7 at C, but for off-center portion C middle section CA
Other parts width same position temperature time history for, it is equally, flat in the 3rd temperature province R3
Equal cooling velocity is also minimum.
The first~the 4th average cooling rate in the temperature province R4 of first temperature province R1~the 4th can be by first
The environment temperature of the cooling chamber 80 of cooling chamber 30 and second is adjusted and obtained, and is the speed smaller than the natural cooling under normal temperature
Degree.
In general, glass is noncrystalline, and for the glass of high temperature, its molecular structure can be because of heat and to optimum structure
Change, i.e. carry out hot mitigation and shrink.Therefore, in order to make the small glass substrate of percent thermal shrinkage, preferably so that flat board glass
Glass SG heat relaxes the mode being sufficiently carried out and slowly cooled down.If plate glass SG cooling velocity is fast, do not fill
Divide ground to carry out hot mitigation and cooled down to plate glass SG, then in the way that heat relaxes, the change of the molecular structure in glass
It can be suppressed or prevent because of high viscosity.Therefore, if in order to be heat-treated and to being obtained by plate glass SG as described above
Glass substrate is reheated, then the suppression or prevention relaxed for heat is released from, so as to be held again from the way that heat relaxes
The heat that begins relaxes.
However, glass has the different a variety of mitigations of speed, relaxing for glass can be by the mitigation with different mitigation speed
Coincidence represent (following, will to relax " composition " that the different mitigation of speed is referred to as relaxing).As described above, the mitigation as glass
Composition, exist the composition for carrying out hot mitigation rapidly and being shunk, the composition for smoothly carrying out hot mitigation and being shunk and then
The Multiple components such as the composition shunk with the hot mitigation of midrange speed progress.Therefore, in cooling step, preferably set as follows
Temperature history, the temperature history cause heat relaxes to be sufficiently carried out in the composition of whole.However, as shown in figure 4, cooling
The path of plate glass SG in step S4 is the path above the vertical of building mortion 40 downward, and is arranged on building
In the works such as thing, therefore, it is necessary to the works such as building reconstructed, extended etc. and extending path, so be difficult to extend
Path.It is therefore preferable that in existing transport path, plate glass SG temperature history is suitably carried out, so as to which efficiency is good
Ground reduces the percent thermal shrinkage of the glass substrate in cooling step S4.In the present embodiment, make flat in the 3rd temperature province R3
Equal cooling velocity is less than the average cooling rate in the temperature province beyond the 3rd temperature province R3 in cooling step S4, by
This, can efficiency reduce the percent thermal shrinkage of glass substrate well.The reason assumes as follows.
Fig. 8 is that transverse axis represents that time, the longitudinal axis represent the plate glass SG in the cooling step S4 of temperature in cooling step
Temperature history T1~T3 (solid line) schematic diagram.Time point A, E that time point A, E in figure correspond in Fig. 7.Herein, it is warm
Degree course T1 is one of the temperature history of present embodiment, and temperature history T2 is following form, i.e. at high operating temperatures, phase
Reduce cooling velocity for temperature history T1, thereafter, increase cooling velocity relative to temperature history T1, thereafter, make cooling
Speed turns into the cooling velocity equal with temperature history T1, and temperature history T3 is following form, i.e. reach at high operating temperatures with
Cooling velocity equal temperature history T1, thereafter, reduce cooling velocity relative to temperature history T1, thereafter, relative to temperature
Course T1 and increase cooling velocity.
For temperature history T1, T3, the composition for smoothly carrying out hot mitigation and being shunk (claims the composition
For component X) cooling velocity under the condition of high temperature can not be followed, at point P1, the change of the molecular structure related to component X is because viscous
Property and be suppressed or prevent.For temperature history T2, the cooling velocity of the condition of high temperature is small, therefore, at point P2, with composition
The change of molecular structure related X is suppressed or prevented because of viscosity.
On the other hand, for temperature history T1, the composition for carrying out hot mitigation rapidly and being shunk (claims the composition
For composition Y) at point P3 cooling velocity can not be followed, at point P3, the change of the molecular structure related to composition Y (heat relaxes)
It is suppressed or prevents because of viscosity.For temperature history T2, composition Y can not follow cooling velocity at point P4, in point P4
Place, the change (heat relaxes) of the molecular structure related to composition Y are suppressed or prevented because of viscosity.Come for temperature history T3
Saying, composition Y can not follow cooling velocity at point P5, at point P5, the change of the molecular structure related to composition Y (heat relaxes)
It is suppressed or prevents because of viscosity.
For temperature history T1~T3 as described above, change (heat relaxes) quilt of the molecular structure at point P1, P2
Suppress or prevent when temperature had no between point P1, P2 it is too different, but the change of the molecular structure related to composition Y by
Temperature at point P3~P5 of suppression differs widely.Specifically, the temperature at point P3 is minimum.Therefore, for temperature history T1
For~T3, the temperature for suppressing or preventing heat to relax is lower, then heat relaxes faster, therefore, the molecular structure related to composition Y
The temperature at the time point that change is suppressed or prevented is lower, then percent thermal shrinkage can be made smaller.Therefore, in temperature history T1~T3,
It can be cut with the temperature history T1 of minimum temperature suppression or the change for preventing the molecular structure related to composition Y in plate glass SG
Before disconnected, hot mitigation is sufficiently carried out, thus, it is possible to provide efficiency reduces the plate glass SG of percent thermal shrinkage well.
In addition, the first~the can be set in a manner of plate glass SG percent thermal shrinkage is reached specific desired value
The first~the 4th average cooling rate in four temperature provinces.For example, under a variety of cooling conditions, it is actual to plate glass SG's
Percent thermal shrinkage is measured, and calibration curve is made based on the measured value obtained.And then can be so that plate glass SG heat
Shrinkage factor reaches the mode of specific desired value, using manufactured calibration curve, to set plate glass SG width side
To Temperature Distribution TP1~TP10 as target be adjusted along the Temperature Distribution of flow direction, thus, setting first
The first~the 4th average cooling rate in~the four temperature province.
In the present embodiment, the 3rd temperature province R3 temperature range is set to be less than 450 DEG C and for more than 300 DEG C,
But forming the glass substrate for display of film on surface for implementing heat treatment according to specific treatment temperature when applying
When, the 3rd temperature province R3 can be also set to be less than (- 100 DEG C for the treatment of temperature) and for more than (- 250 DEG C of the treatment temperature)
Temperature province.In the situation, preferably more than 300 DEG C, more preferably more than 400 DEG C for the treatment of temperature.
For example, form low temperature polycrystalline silicon TFT (Thin Film Transistor, film crystal on the surface of glass substrate
Pipe) etc. film representated by the oxide semiconductor such as TFT or IGZO (indium, gallium, zinc, oxygen).When forming the film such as the semiconductor
When, such as glass substrate is heat-treated with more than 300 DEG C or more than 400 DEG C for the treatment of temperature.Therefore, for glass base
For plate, the 3rd temperature province R3 temperature range can be determined according to the treatment temperature of the heat treatment.In addition, form film
When the treatment temperature of heat treatment be, for example, 300 DEG C~700 DEG C or 400 DEG C~650 DEG C.
It is temperature more than slow cooling point by central part C temperature after plate glass SG is being formed in the situation
Region is set to the first temperature province R1, and central part C temperature is less than more than slow cooling point (- 100 DEG C for the treatment of temperature (DEG C))
When temperature province is set to second temperature region R2, the 3rd average cooling rate in preferably the 3rd temperature province R3 is less than the first temperature
The second average cooling rate spent in the first average cooling rate and second temperature region R2 in the R1 of region.
Moreover, less than (- 250 DEG C for the treatment of temperature (DEG C)) and it is (- 450 DEG C for the treatment of temperature (DEG C) by central part C temperature
Temperature province above is set to the 4th temperature province R4, it is contemplated that and do not extend transport path and reduce percent thermal shrinkage, the preferably the 4th
The 4th average cooling rate in temperature province R4 is more than the 3rd average cooling rate in the 3rd temperature province R3.
In the present embodiment, it is contemplated that the glass substrate for being suitable as glass substrate for display can be provided, preferably existed
Temperature history as described above is determined in cooling step S4, thus, the percent thermal shrinkage of glass substrate is set to below 15ppm.More
The percent thermal shrinkage of glass substrate is preferably set to below 10ppm.
Moreover, according to the viewpoint for the percent thermal shrinkage for reducing glass substrate, (glass viscosity is the strain point of glass substrate
1014.5Temperature during pool) it is preferably more than 680 DEG C, more preferably more than 700 DEG C, and then preferably more than 720 DEG C.However, such as
Fruit is adjusted in a manner of making strain point elevated to glass composition, then the elevated tendency of devitrification temperature, therefore, glass base be present
Preferably less than 780 DEG C, more preferably less than 760 DEG C of the upper limit of the strain point of plate.
In addition, devitrification temperature is preferably less than 1280 DEG C, according to the reduction for taking into account percent thermal shrinkage and the viewpoint of devitrification resistance,
Preferably 1100 DEG C~1270 DEG C, more preferably 1150 DEG C~1240 DEG C.
(glass composition)
Glass as the glass substrate manufactured by present embodiment forms, for example, with mole % show and below illustrating
Glass forms.
Comprising
SiO255~80%,
B2O30~18%,
Al2O33~20%,
MgO 0~20%,
CaO 0~20%,
SrO 0~20%,
BaO 0~20%,
RO 5~25%
(wherein, R is at least one element selected from Mg, Ca, Sr and Ba),
R′2O 0~2.0%
(wherein R ' is at least one element selected from Li, Na and K).
There is no particular restriction for total containing ratio of the oxide for the metal that valence mumber in melten glass changes, such as can also contain
Have 0.05~1.5%.Also, it is preferred that contain substantially no As2O3、Sb2O3And PbO.
(application examples of glass substrate)
Glass substrate manufactured by the manufacture method of the glass substrate of present embodiment be particularly suitable as liquid crystal display,
The glass substrate for display of plasma scope, organic el display etc. or the cover glass for protecting display.Using aobvious
In the display for showing device glass substrate, in addition to the flat-panel monitor flat comprising display surface, also comprising organic EL
Display, liquid crystal display are the flexible displays of display surface bending.Glass substrate is preferably used as fine display use
Glass substrate, it is used for example as liquid crystal display glass substrate, organic EL (Electro-Luminescence, organic electroluminescence hair
Light) glass substrate for display, LTPS (Low Temperature Poly-silicon, low temperature polycrystalline silicon) thin film semiconductor,
Or the display that use has the oxide semiconductors such as IGZO (Indium, Gallium, Zinc, Oxide, indium gallium zinc oxide) is used
Glass substrate.
Alkali-free glass can be used or contain the glass of micro alkali as glass substrate for display.Glass substrate for display
Viscosity in high temperature is high.For example, with 102.5The temperature of the sticky melten glass of pool is more than 1500 DEG C.In addition, alkali-free
Glass is to contain substantially no alkali metal oxide (R '2O the glass of composition).It is so-called to contain substantially no alkali metal oxidation
Thing, refer in addition to from the mixed impurity such as raw material, be not added with glass of the alkali metal oxide as the composition of frit,
Such as the amount of alkali metal oxide is less than 0.1 mass %.
(percent thermal shrinkage)
It is heat-treated and determines the percent thermal shrinkage in present embodiment.
Glass substrate is cut into the rectangle of specific dimensions, score line is drawn at long side both ends, in short side central portion
Cut off and be divided into two, obtain two glass samples.(500 DEG C, 30 points are heat-treated to a glass sample therein
Clock).Measure the length for another glass sample not being heat-treated.And then compare thermally treated glass sample with it is untreated
Glass sample, the offset of score line is measured using laser microscope etc., obtains the difference of the length of glass sample,
Thus, the thermal shrinking quantity of sample can be obtained.The use of the thermal shrinking quantity is the length of the glass sample before difference and heat treatment, according to
Following formula and obtain percent thermal shrinkage.The percent thermal shrinkage of the glass sample is set to the percent thermal shrinkage of glass substrate.
Percent thermal shrinkage (ppm)=(difference)/(length of the glass sample before heat treatment) × 106
(experimental example)
Using the glass substrate manufacture device 100 and the manufacture method of glass substrate, manufacture is real under the following conditions
Apply the glass substrate of example 1~3 and comparative example.The composition (mole %) of glass is SiO270.5%th, B2O37.2%th,
Al2O311.0%th, K2O 0.2%, CaO 11.0%, SnO20.09%th, Fe2O30.01%.The devitrification temperature of glass is 1206
DEG C, liquid phase viscosity is 1.9 × 105dPa·s.The slow cooling point of glass is 758 DEG C, and strain point is 699 DEG C.Moreover, plate glass SG
Width be set to 1600mm, thickness is set to 0.7mm (embodiment 1, comparative example 1), 0.5mm (embodiment 2, comparative example 2), 0.4mm
(embodiment 3, comparative example 3).Moreover, the heat treatment temperature for forming film in glass substrate is 550 DEG C.
Average cooling rate during by the central part C of plate glass SG width temperature to be more than slow cooling point is set to
First average cooling rate, by central part C temperature be less than slow cooling point and for more than 450 DEG C when average cooling rate be set to the
Two average cooling rates, by central part C temperature be less than 450 DEG C and for more than 300 DEG C when average cooling rate be set to the 3rd
Average cooling rate.In embodiment 1~3, the 3rd average cooling rate is than the first average cooling rate and the second average cooling
Speed is slower.On the other hand, in comparative example 1~3, second of the second average cooling rate compared with embodiment 1~3 is made averagely to cool down
Speed is slower, and make the 3rd average cooling rate compared with embodiment 1~3 the 3rd average cooling rate faster, therefore, comparative example 1
~3 the second average cooling rate is slower compared with the 3rd average cooling rate of comparative example 1~3.As a result, the heat of embodiment 1~3
Shrinkage factor is below 15ppm, but the percent thermal shrinkage of comparative example 1~3 is more than 15ppm.
According to the content, the effect of present embodiment is apparent.
More than, the manufacture method of the glass substrate of the present invention is illustrated in detail, but the present invention is not limited to
The embodiment and embodiment, it can also carry out various improvement or change without departing from the spirit and scope of the present invention certainly.
[mark of accompanying drawing]
11 melting plants
12 clarifiers
20 formed body rooms
30 first cooling chambers
40 building mortions
41 formed bodies
51 chill rolls
60 temperature adjustment units
80 second cooling chambers
80a top plates
80b heat insulating components
81a~81g declines roller
82a~82g heaters
90 shearing devices
91 control devices
100 glass substrate manufacture devices
Claims (10)
1. a kind of manufacture method of glass substrate for display, it includes：
Forming step, it makes melten glass be configured to plate glass by glass tube down-drawing；And
Cooling step, it is cooled down until the stream with the plate glass in the plate glass flowing after making shaping
Untill the temperature of the central part of the orthogonal width in dynamic direction reaches 300 DEG C,
In the cooling step, the cooling velocity of middle section be the temperature of the central part be less than 450 DEG C and for 300 DEG C with
On temperature province in average cooling rate be less than the cooling step in the temperature province beyond temperature province in
The middle section average cooling rate, the middle section be located at than the plate glass width both ends
Portion more leans on the inner side of the width of the plate glass and includes the region of the central part.
2. a kind of manufacture method of glass substrate for display, its be used to implementing heat treatment according to specific treatment temperature and
Surface forms the manufacture method of the glass substrate for display of film, and it includes：
Forming step, it makes melten glass be configured to plate glass by glass tube down-drawing；And
Cooling step, it is cooled down until the stream with the plate glass in the plate glass flowing after making shaping
Untill the temperature of the central part of the orthogonal width in dynamic direction reaches 250 DEG C lower than the treatment temperature of temperature,
In the cooling step, it is lower than the treatment temperature that the cooling velocity of middle section is that the temperature of the central part is less than
The average cooling rate in temperature province more than 100 DEG C of temperature and the temperature for being 250 DEG C lower than the treatment temperature, is less than
The average cooling rate of the middle section in the temperature province beyond the temperature province in the cooling step, it is described
Middle section is the both ends for being located at the width than the plate glass more by the width of the plate glass
Inner side and include the region of the central part.
3. the manufacture method of glass substrate for display according to claim 1, wherein the cooling step includes：
First cooling step, it is after the plate glass is configured to, the center of the width of the plate glass
When the temperature in portion is more than slow cooling point, middle section is cooled down with the first average cooling rate, the middle section is to be located at
Both ends than the width of the plate glass are more leaned on the inside of the width of the plate glass and include the center
The region in portion；
Second cooling step, its temperature of the central part be less than the slow cooling point and for more than 450 DEG C when, it is average with second
Cooling velocity cools down to the middle section；And
3rd cooling step, its temperature of the central part be less than 450 DEG C and for more than 300 DEG C when, with the 3rd average cooling
Speed cools down to the middle section,
3rd average cooling rate is less than first average cooling rate and second average cooling rate.
4. the manufacture method of glass substrate for display according to claim 3, wherein the cooling step further includes
Four cooling steps, the 4th cooling step the central part temperature be less than 300 DEG C and for more than 100 DEG C when, with Siping City
Equal cooling velocity cools down to the middle section,
4th average cooling rate is more than the 3rd average cooling rate.
5. the manufacture method of glass substrate for display according to claim 2, wherein the cooling step includes：
First cooling step, its after the plate glass is configured to, the central part of the width of the plate glass
When temperature is more than slow cooling point, middle section is cooled down with the first average cooling rate, the middle section is located at than institute
The both ends of the width of plate glass are stated more by the inside of the width of the plate glass and comprising the central part
Region；
Second cooling step, it is less than the slow cooling point and for 100 DEG C lower than the treatment temperature in the temperature of the central part
Temperature more than when, the middle section is cooled down with the second average cooling rate；And
3rd cooling step, it is in temperature of the temperature of the central part less than 100 DEG C lower than the treatment temperature and for than institute
When stating more than the temperature of low 250 DEG C for the treatment of temperature, the middle section is cooled down with the 3rd average cooling rate,
3rd average cooling rate is less than first average cooling rate and second average cooling rate.
6. the manufacture method of glass substrate for display according to claim 5, wherein the cooling step further includes
Four cooling steps, the 4th cooling step the central part temperature less than 250 DEG C lower than the treatment temperature temperature and
During to be more than 450 DEG C lower than the treatment temperature of temperature, the middle section is cooled down with the 4th average cooling rate,
4th average cooling rate is more than the 3rd average cooling rate.
7. the manufacture method of the glass substrate for display according to any one of claim 3 to 6, wherein described first is flat
Equal cooling velocity is more than second average cooling rate.
8. the manufacture method of the glass substrate for display according to any one of claim 3 to 7, wherein the described 3rd is flat
Equal cooling velocity is less than 5.0 DEG C/sec.
9. the manufacture method of glass substrate for display according to any one of claim 1 to 8, wherein the glass base
The percent thermal shrinkage of plate is below 15ppm,
Wherein, the percent thermal shrinkage is to use the amount of contraction for implementing to keep the glass substrate after the heat treatment of 30 minutes with 500 DEG C,
The value obtained according to following formula,
Percent thermal shrinkage (ppm)
={ length of the glass substrate before amount of contraction/heat treatment of the glass substrate after heat treatment } × 106。
10. the manufacture method of glass substrate for display according to any one of claim 1 to 9, wherein the glass
The strain point of substrate is more than 680 DEG C.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015130716 | 2015-06-30 | ||
| JP2015-130716 | 2015-06-30 | ||
| PCT/JP2016/067889 WO2017002632A1 (en) | 2015-06-30 | 2016-06-16 | Method for manufacturing display glass substrate |
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| CN107709254A true CN107709254A (en) | 2018-02-16 |
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| JP (1) | JP6823457B2 (en) |
| KR (1) | KR102006563B1 (en) |
| CN (1) | CN107709254A (en) |
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Also Published As
| Publication number | Publication date |
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| TWI696590B (en) | 2020-06-21 |
| JPWO2017002632A1 (en) | 2018-04-12 |
| KR20180005239A (en) | 2018-01-15 |
| TW201710196A (en) | 2017-03-16 |
| JP6823457B2 (en) | 2021-02-03 |
| WO2017002632A1 (en) | 2017-01-05 |
| KR102006563B1 (en) | 2019-08-01 |
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