CN107703624A - Resonator based on aperiodic sub-wave length grating and distribution Bragg reflector - Google Patents
Resonator based on aperiodic sub-wave length grating and distribution Bragg reflector Download PDFInfo
- Publication number
- CN107703624A CN107703624A CN201710791448.3A CN201710791448A CN107703624A CN 107703624 A CN107703624 A CN 107703624A CN 201710791448 A CN201710791448 A CN 201710791448A CN 107703624 A CN107703624 A CN 107703624A
- Authority
- CN
- China
- Prior art keywords
- resonator
- wave length
- sub
- length grating
- aperiodic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/0811—Construction or shape of optical resonators or components thereof comprising three or more reflectors incorporating a dispersive element, e.g. a prism for wavelength selection
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Semiconductor Lasers (AREA)
Abstract
The present invention relates to semiconductor photoelectronic device field, there is provided a kind of resonator based on aperiodic sub-wave length grating and distribution Bragg reflector, has the characteristic for the distribution that can control resonator standing internal wave light field.The structure of the resonator is from bottom to top：Distribution Bragg reflector, resonator, aperiodic sub-wave length grating speculum.Plane incident light reaches aperiodic sub-wave length grating speculum by resonator, realize the oblique reflection at deviation resonator center, oblique reflection multiple oscillation in resonator couples, form the stable stationary field that Light Energy is concentrated in the middle part of chamber, stationary field width determines by aperiodic sub-wavelength grate structure, so as to realize control to resonator standing internal wave field width degree by changing aperiodic sub-wavelength grate structure.The present invention solves the problems, such as that conventional resonance chamber can not control stationary field width, can be widely applied for optic communication and field of optical systems.
Description
Technical field
The present invention relates to semiconductor photoelectronic device field, more particularly, to based on aperiodic sub-wave length grating and point
The resonator of cloth Bragg mirror.
Background technology
With the fast development of optical communication system, semiconductor photoelectronic device is widely used.To study speed
Optical communication system higher, capacity is bigger, it is desirable to scientific research personnel's integrated design Du Genggao, structure is more excellent, performance is more stable half
Conductor opto-electronic device.
Resonator is a kind of important cavity configuration in semiconductor photoelectronic device, is widely used in laser and photo-detector
In.Wherein, Fabry-Perot cavity (F-P cavity) is a kind of typical resonator.F-P cavity is also referred to as the parallel chamber of plane, by two
Individual plane-parallel mirror (radius of curvature of two speculums is infinity) composition, the light parallel to resonator axis
Line, the direction of propagation will not be formed outside spill cavity in resonator all the time still parallel to axis after plane-parallel mirror reflects
Stable stationary field.As shown in figure 1, by two shapes of distribution Bragg reflector 11 and 13 for including 5 pairs of InP- air-gaps in Fig. 1
Into F-P cavity 12, incident ray 14 through distribution Bragg reflector 13 enter F-P cavity 12 in.Formation and F-P in F-P cavity 12
The stationary field 15 of the little stabilization of the different widths of chamber 12.
Because the width for the stable stationary field that can be formed in each resonator is fixed, and with the different widths of resonator not
Greatly, it is impossible to control the width of stationary field to change, limit resonator application in optical communication system.Now it is badly in need of providing
A kind of resonator for the stationary field that can form change width.
The content of the invention
To overcome above mentioned problem or solving the above problems at least in part, the invention provides based on aperiodic sub-wavelength
The resonator of grating and distribution Bragg reflector.
The invention provides a kind of resonator, the device architecture of resonator is from bottom to top：It is distribution Bragg reflector, humorous
Shake chamber, aperiodic sub-wave length grating speculum, is the cavity configuration of two mirror one.
Wherein, distribution Bragg reflector is made up of the alternate dielectric material of refractive index height, and every layer has specifically
Thickness, high reflection characteristic can be realized in compared with wide spectral range.
Wherein, the aperiodic sub-wave length grating speculum is made up of two kinds of larger materials of refringence, and it has
Specific optical grating construction, oblique reflection can be carried out to incident beam on the basis of high reflectance.
Wherein, in resonator, incident light reaches aperiodic sub-wave length grating speculum by resonator, and the reflected beams are real
The oblique reflection at resonator center is now inclined to, the reflected beams reflect through distribution Bragg reflector, arrived again again by resonator
Oblique reflection is realized up to aperiodic sub-wave length grating speculum, the process constantly repeats, and forms the multiple oscillation drawn close to chamber center.
Resonator edge light beam is mutually coupled with light beam in the middle part of chamber, forms the stable stationary field that Light Energy is concentrated in the middle part of chamber, standing wave
Field width degree is determined by aperiodic sub-wavelength grate structure, so as to be realized by changing aperiodic sub-wavelength grate structure to resonance
The control of intracavitary optical field distribution.
Wherein, the specific optical grating construction of the aperiodic sub-wave length grating speculum includes：It is one-dimensional, two and three dimensions non-
The speculum that cycle sub-wave length grating is formed；The one-dimensional grating be cycle and dutycycle in one-dimensional square with position given row
The sub-wave length grating of row；The two-dimensional grating is cycle and dutycycle in the two-dimensional direction with the sub-wavelength light of position particular arrangement
Grid；The three-dimensional grating is the grating that grating height changes with position on the basis of the aperiodic sub-wave length grating of two dimension.
Resonator provided by the invention, one is formed using aperiodic sub-wave length grating speculum and distribution Bragg reflector
The resonator of the individual stationary field for forming variable-width, can by changing the structural parameters of aperiodic sub-wave length grating speculum
The controllable stationary field of width is produced in resonator, the limitation of stationary field width can not be controlled by breaching conventional resonance chamber so that
Resonator can be widely used in the design and making of semiconductor photoelectronic device with more flexible, obtain integrated level it is higher, knot
The semiconductor photoelectronic device that structure is more excellent, performance is more stable.
Brief description of the drawings
Fig. 1 is the standing wave field pattern in resonator in the prior art；
Fig. 2 is the structural representation for the resonator that one embodiment of the invention provides；
Fig. 3 is the stationary field distributed effect schematic diagram in the resonator that one embodiment of the invention provides；
Fig. 4 is the one-dimensional list structure of aperiodic sub-wave length grating speculum in the resonator that one embodiment of the invention provides
Schematic diagram；
Fig. 5 is the two-dimentional cyclic structure of aperiodic sub-wave length grating speculum in the resonator that one embodiment of the invention provides
Schematic diagram；
Fig. 6 is the two-dimentional block array of aperiodic sub-wave length grating speculum in the resonator that one embodiment of the invention provides
Structural representation.
Embodiment
With reference to the accompanying drawings and examples, the embodiment of the present invention is described in further detail.Implement below
Example is used to illustrate the present invention, but is not limited to the scope of the present invention.
As shown in Fig. 2 providing a kind of resonator in one embodiment of the invention, the resonator has the chamber knot of two mirror one
Structure, two mirror are respectively aperiodic sub-wave length grating speculum and distribution Bragg reflector (Distributed Bragg
Reflector, DBR), two mirror is parallel and staggered relatively；One chamber is the resonator that two mirror is formed.
In Fig. 2, the structure of resonator is from bottom to top：Distribution Bragg reflector 24, resonator 22, aperiodic sub-wavelength
Optical grating reflection mirror 21, form the cavity configuration of two mirror one.Two mirrors using molecular beam epitaxy (Molecular Beam Epitaxy,
) or the organic first chemical gaseous phase deposition (Metal Organic Chemical Vapour Deposition, MOCVD) of metal MBE
Etc. technology epitaxial growth.The distribution Bragg reflector 24 be by InP and air portion packet into, resonator 22 is air-gap,
Aperiodic sub-wave length grating speculum 21 by InP and air portion packet into, because the refractive index of InP and air is very big, because
The sub-wave length grating of high index-contrast can be made in this.Air material part wherein used is handled using hollow out caustic solution,
Speculum generally InP frame structures.
Incident light 25 reaches aperiodic sub-wave length grating speculum 21 by resonator 22, and the reflected beams realize deviation resonance
The oblique reflection at chamber center, the reflected beams reflect through distribution Bragg reflector 24 again by resonator 22, arrive again at non-week
Phase sub-wave length grating speculum 21 realizes oblique reflection, and the process constantly repeats, and is formed and is repeatedly shaken to what the center of resonator 22 was drawn close
Swing.Resonator edge light beam is mutually coupled with light beam in the middle part of chamber, forms the stable stationary field 23 that Light Energy is concentrated in the middle part of chamber,
The width of stationary field 23 is by the aperiodic structures shape of sub-wave length grating speculum 21, so as to by changing aperiodic sub-wave length grating
The structure of speculum 21 realizes the control to the width of resonator standing internal wave field 23.
On the basis of above-described embodiment, in the resonator, incident light is passed through toward interflection, forms that width is controllable to stay
Wave field, the width of the stationary field oblique deflection angle and described humorous as caused by the aperiodic sub-wave length grating makes reflected light
The chamber chamber that shakes length determines.
Referring to Fig. 3, Fig. 3 is the specific implementation special case of the present invention, is respectively from top to bottom that distribution bragg is anti-in figure
Penetrate mirror, resonator and aperiodic sub-wave length grating speculum, in this embodiment, aperiodic sub-wave length grating speculum and distribution
Bragg mirror forms one a width of 25.14 μm, the resonator of a height of 18.63 μm (i.e. chamber is grown), aperiodic sub-wave length grating
The thickness of speculum is 0.5 μm, and its oblique deflection angle of reflection in vertical incidence to aperiodic sub-wave length grating speculum is
1 °, form the stationary field that width is 9.13 μm.
Referring to Fig. 4, Fig. 4 is the aperiodic sub-wave length grating mirror structure schematic diagram of one-dimensional strip, and the speculum is by multiple
The InP gratings strips 41 of different cycles are arranged to make up, and the air part 42 between grating stick is corroded to obtain by hollow out.
Referring to Fig. 5, Fig. 5 is the aperiodic sub-wave length grating mirror structure schematic diagram of two-dimentional ring-type, and the speculum is by multiple
The InP gratings ring 51 of different cycles is nested to be formed, and is air 52 between grating stick.
Referring to Fig. 6, Fig. 6 is the aperiodic sub-wave length grating mirror structure schematic diagram of two-dimentional block array, the speculum by
The InP blocks 61 of multiple different cycles are arranged to make up, and are air 62 between grating block.
Referring to Fig. 4-Fig. 6, three-dimensional aperiodic sub-wave length grating speculum is to change each grating on the basis of Fig. 4-Fig. 6
The thickness of bar, grating ring or grating block obtains.
On the basis of above-described embodiment, the aperiodic sub-wave length grating speculum is that oblique deflection mirror or convergence are anti-
Penetrate mirror.
On the basis of above-described embodiment, the aperiodic sub-wave length grating speculum is by different sub-wavelength of multiple cycles
Grating stick is formed, and different sub-wave length grating stick of the multiple cycle is on the aperiodic sub-wave length grating speculum
Central shaft is symmetrical.
On the basis of above-described embodiment, the aperiodic sub-wave length grating speculum is one-dimensional, two-dimentional or three-dimensional non-
Cycle sub-wave length grating.
, can be by the use of distribution Bragg reflector as a speculum of resonator on the basis of above-described embodiment, also can be by
There is the speculum of high reflectance characteristic to replace for other, such as cycle sub-wave length grating speculum.
On the basis of above-described embodiment, can be set aperiodic sub-wave length grating speculum screen periods 0.3 μm~
Between 1.8 μm, grating dutycycle is 15%~85%, and grating is highly 0.1~1.2 μm.
Resonator proposed by the present invention, can be in resonance by changing the structural parameters of aperiodic sub-wave length grating speculum
Intracavitary produces the controllable stationary field of width, and the limitation of stationary field width can not be controlled by breaching conventional resonance chamber so that resonator
Can be widely used in more flexible in the design and making of semiconductor photoelectronic device, obtain integrated level is higher, structure is more excellent,
The more stable semiconductor photoelectronic device of performance.
Finally, method of the invention is only preferable embodiment, is not intended to limit the scope of the present invention.It is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements made etc., the protection of the present invention should be included in
Within the scope of.
Claims (7)
1. a kind of resonator, it is characterised in that the resonator has the cavity configuration of two mirror one, and two mirror is respectively aperiodic Asia
Wave length grating speculum and distribution Bragg reflector, two mirror are parallel and staggered relatively；One chamber is the two mirrors structure
Into resonator.
2. resonator according to claim 1, it is characterised in that the aperiodic sub-wave length grating speculum is tiltedly deflection
Speculum or convergence speculum.
3. resonator according to claim 1, it is characterised in that the aperiodic sub-wave length grating speculum is by multiple weeks
Phase different sub-wave length grating stick is formed, and different sub-wave length grating stick of the multiple cycle is on the aperiodic sub- ripple
The central shaft of long optical grating reflection mirror is symmetrical.
4. resonator according to claim 1, it is characterised in that distribution Bragg reflector cycle sub-wavelength light
Grid speculum replaces.
5. resonator according to claim 1, it is characterised in that in the resonator, incident light is passed through toward interflection, shape
The stationary field controllable into width, the width of the stationary field tiltedly deflect as caused by the aperiodic sub-wave length grating makes reflected light
Angle and resonator length determine.
6. according to the resonator any one of claim 1-5, it is characterised in that the aperiodic sub-wave length grating reflection
The screen periods of mirror are 0.3 μm~1.8 μm, and dutycycle is 15%~85%, and grating is highly 0.1~1.2 μm.
7. according to the resonator any one of claim 1-5, it is characterised in that the aperiodic sub-wave length grating reflection
Mirror is one-dimensional, two-dimentional or three-dimensional aperiodic sub-wave length grating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710791448.3A CN107703624B (en) | 2017-09-05 | 2017-09-05 | Resonant cavity based on aperiodic sub-wave length grating and distribution Bragg reflector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710791448.3A CN107703624B (en) | 2017-09-05 | 2017-09-05 | Resonant cavity based on aperiodic sub-wave length grating and distribution Bragg reflector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107703624A true CN107703624A (en) | 2018-02-16 |
| CN107703624B CN107703624B (en) | 2019-10-01 |
Family
ID=61172061
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710791448.3A Active CN107703624B (en) | 2017-09-05 | 2017-09-05 | Resonant cavity based on aperiodic sub-wave length grating and distribution Bragg reflector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107703624B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102714396A (en) * | 2010-01-29 | 2012-10-03 | 惠普发展公司，有限责任合伙企业 | Multimode vertical-cavity surface-emitting laser arrays |
| CN104466617A (en) * | 2013-09-18 | 2015-03-25 | 中国科学院苏州纳米技术与纳米仿生研究所 | Terahertz light source chip and manufacturing method thereof, terahertz light source device and manufacturing method thereof, and terahertz light source module and manufacturing method thereof |
| CN105490166A (en) * | 2016-01-21 | 2016-04-13 | 苏州苏大维格光电科技股份有限公司 | Micro-cavity laser array and visible light photometer comprising micro-cavity laser array |
| CN106449806A (en) * | 2016-09-14 | 2017-02-22 | 北京邮电大学 | Narrow-linewidth and high-performance tunable optical detector based on non-periodic sub-wavelength grating |
-
2017
- 2017-09-05 CN CN201710791448.3A patent/CN107703624B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102714396A (en) * | 2010-01-29 | 2012-10-03 | 惠普发展公司，有限责任合伙企业 | Multimode vertical-cavity surface-emitting laser arrays |
| CN104466617A (en) * | 2013-09-18 | 2015-03-25 | 中国科学院苏州纳米技术与纳米仿生研究所 | Terahertz light source chip and manufacturing method thereof, terahertz light source device and manufacturing method thereof, and terahertz light source module and manufacturing method thereof |
| CN105490166A (en) * | 2016-01-21 | 2016-04-13 | 苏州苏大维格光电科技股份有限公司 | Micro-cavity laser array and visible light photometer comprising micro-cavity laser array |
| CN106449806A (en) * | 2016-09-14 | 2017-02-22 | 北京邮电大学 | Narrow-linewidth and high-performance tunable optical detector based on non-periodic sub-wavelength grating |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107703624B (en) | 2019-10-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP3065235B1 (en) | Hybrid vertical cavity laser for photonic integrated circuit | |
| CN106058642B (en) | The narrow spectral line width surface-emitting laser of high contrast grating coupler | |
| US5023944A (en) | Optical resonator structures | |
| US9337623B2 (en) | High density laser optics | |
| CN106449806A (en) | Narrow-linewidth and high-performance tunable optical detector based on non-periodic sub-wavelength grating | |
| Boutami et al. | Broadband and compact 2-D photonic crystal reflectors with controllable polarization dependence | |
| WO2003067724A1 (en) | Semiconductor light-emitting device and its manufacturing method | |
| JP2006339622A (en) | Parabolic waveguide-type collimating lens and wavelength-tunable external-cavity laser diode including the same | |
| CN103259190A (en) | Annular semiconductor laser of vertical coupling structure and preparing method thereof | |
| CN103259098A (en) | Multilayer symmetrical metamaterial capable of generating Fano resonance enhancing phenomenon and frequency tunable phenomenon | |
| CN101268593A (en) | Method and apparatus for electromagnetic resonance using negative index material | |
| CN105846311A (en) | Semiconductor laser | |
| CN108054634B (en) | Narrow linewidth semiconductor laser | |
| CN103199435A (en) | Ultra-low divergence angle inclined light beam single longitudinal mode artificial micro structure laser | |
| CN103986063B (en) | A kind of longitudinal mode semiconductor laser based on bandpass filtering structure | |
| CN103715607B (en) | A kind of tunable substrate emission quantum cascade laser array device | |
| CN107703624A (en) | Resonator based on aperiodic sub-wave length grating and distribution Bragg reflector | |
| KR101165526B1 (en) | Polarization beam splitter based on self-collimating photonic crystal, polarization beam splitter slab including the same and orthogonal polarizing method for light wave using the same | |
| JP5804690B2 (en) | Surface emitting laser | |
| CN106451076B (en) | Four wavelength output semiconductor lasers and preparation method thereof | |
| CN110426772B (en) | Photonic crystal heterostructure capable of realizing one-way transmission of elliptically polarized light | |
| CN110471141B (en) | Composite lattice point photonic crystal heterostructure with unidirectional high-transmission of light waves | |
| KR102623516B1 (en) | Metamaterial-based reflector, optical cavity structure including the same and vertical cavity surface emitting laser | |
| CN104393485A (en) | Laser array coherent device and preparation method thereof | |
| CN208580950U (en) | A kind of list based on orthogonal grating structure mode laser in length and breadth |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |