CN107664784A - A kind of ultra-fine spectrum sieve of integrated form and preparation method thereof - Google Patents
A kind of ultra-fine spectrum sieve of integrated form and preparation method thereof Download PDFInfo
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- CN107664784A CN107664784A CN201710907082.1A CN201710907082A CN107664784A CN 107664784 A CN107664784 A CN 107664784A CN 201710907082 A CN201710907082 A CN 201710907082A CN 107664784 A CN107664784 A CN 107664784A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/006—Filter holders
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Abstract
The invention discloses a kind of integrated form hyperfine spectrum sieve, it is integrated using more than 8 fillet optical filter bondings, control each face size, the accuracy of form and position of each fillet optical filter identical, control that the light pass surface of each fillet optical filter is indefectible, the two-sided depth of parallelism is less than 3 μm, the coated face up and down of fillet optical filter is machined with cross-shaped alignment marks, realize that length direction accurately splices, the light pass surface after integrating is less than 5 μm without step-like deviation, flatness.The invention also discloses the method for preparing above-mentioned integrated form hyperfine spectrum sieve, with precision is high, integrated technique is ripe, it is integrated after optical element surface overflow adhesive the advantages of, the integrated form hyperfine spectrum sifter device prepared has the advantages of integrated level is high, uniformity is high, precision is high, cost-effective, stability is good, suitable for high-resolution multi-spectral imager optical system.
Description
Technical field
The present invention relates to a kind of integrated form hyperfine spectrum sieve, suitable for fine optical spectrum imagers optical system, belongs to empty
Between optical field.
Background technology
Multi-spectral imager can collect abundant spectral information simultaneously, therefore in military investigation, meteorological research, accurate
The fields such as agricultural etc. is each are widely used.With the continuous development of spectral technique, common spectrum screening element is integrated due to spectral coverage
Spend low, preparation technology is immature, and collection information is few, expensive etc., is increasingly difficult to meet the needs of user, in recent years how
Realizing the fine multispectral imaging of high performance-price ratio turns into the focus of attention.
The preparation of current multispectral optical element mainly has two methods, and same substrate prepares and multispectral narrow bandpass collection
Into same substrate prepares and often led to following two problem：First, spectral coverage resolution ratio more high finished product rate is lower, typically seen light
Wave band；Second, steeply risen as spectral coverage resolution ratio increases cost, it is expensive.By contrast, multispectral narrow bandpass integration
Valency ratio is higher, but the multispectral optical element of existing integrated form often has following three：First, integrated level is low；It is second, scarce
Weary benchmark causes that uniformity is poor, poor dimensional stability；Three are a lack of controlling unit, and complex process is complicated.
Publication No. CN103217731A Chinese invention patent disclosed a kind of multispectral combination on July 24th, 2013
The preparation method of optical filter, there is provided bonded adhesives is prepared, and optical filter cleaning, optical filter gluing, is bonded adhesive curing, is spliced optical filter
A set of technique for sticking such as detection, realize that multispectral optical filter combines.But become more meticulous for spectral coverage, the demand such as high performance-price ratio still
So have the following disadvantages：First, the dimensional uniformity of uncontrollable bonding front filter；Second, do not have in integrating process
Benchmark, it is easy to cause working surface deviation, so as to which uniformity is poor, precision is low；3rd, the optical filter dimensional accuracy after integrating
It is low, the 4th, due to lacking multiple controlling units, integrated level is low.
The content of the invention
In order to overcome the shortcomings of the prior art, it is an object of the invention to provide a kind of integrated form hyperfine spectrum
Sieve, integrate eight and compose above multispectral, for high-resolution multi-spectral imager, splicing precision is high, stability is good, integrating process
It is overflow adhesive, simple and easy to get, cost-effective.
A kind of integrated form hyperfine spectrum sieve, if including each face size of dry plate, accuracy of form and position identical fillet optical filter, institute
The light pass surface of stating fillet optical filter is indefectible, the two-sided depth of parallelism is less than 3 μm；Lead between the coated face of each fillet optical filter
Cross resin bonding to integrate, overlapped after neat bonding is directed between the coated face, the integrated form hyperfine spectrum sieve
Light pass surface without step-like deviation, flatness is less than 5 μm.
Preferably, the both sides identical position of coated face is respectively provided with using photoetching technique above and below each fillet optical filter
One cross alignment mark, two cross-shaped alignment marks of upper coated face and two cross-shaped alignment marks of lower coated face
Overlook and overlap in coated face vertical direction, the cross-shaped alignment marks make neatly to be aligned between each fillet optical filter.
Preferably, the quantity of the fillet optical filter is at least eight.
Preferably, the spectral coverage of each fillet optical filter is different, and configurable spectral coverage scope is 400nm-1000nm.
Preferably, the resin is epoxy resin so that the integrated form hyperfine spectrum sieve is resistant to sinusoidal vibration
Test and 0~50 DEG C of thermal vacuum test.
A kind of method for preparing integrated form hyperfine spectrum sieve, comprises the following steps：
Step 1：Each fillet optical filter is processed so that each face size, the morpheme of each fillet optical filter
Precision is identical；
Step 2：The thickness of each fillet optical filter is detected, detects each fillet filter after working process under the microscope
Mating plate, picks out that light pass surface is indefectible, the two-sided depth of parallelism is less than 3 μm of fillet optical filter, wiped clean；
Step 3：Benchmark of the selection flatness less than 3 μm leans on face, light pass surface and the benchmark of current slice fillet optical filter
Precalculated position is slipped into while fitting by face, epoxy resin is uniformly coated in the upper coated face of current slice fillet optical filter；
Under the light pass surface of a piece of fillet optical filter slide while be bonded with the benchmark by face, a piece of fillet filters under making
The lower coated face of piece slides after being neatly aligned with the upper coated face of current slice fillet optical filter and is bonded, a piece of fillet optical filter under
Upper coated face uniformly coat epoxy resin；
The alignment of a piece of fillet optical filter, fitting, gluing process under repeating, complete the bonding collection of all fillet optical filters
Into the upper coated face of last a piece of fillet optical filter is not coated with epoxy resin.
Preferably, it is further comprising the steps of before the step 3：
The both sides identical position of coated face respectively processes a cross using photoetching technique above and below each fillet optical filter
Type alignment mark, two cross-shaped alignment marks of upper coated face are with two cross-shaped alignment marks of lower coated face in coated face
Overlook and overlap in vertical direction, the cross-shaped alignment marks make neatly to be aligned between each fillet optical filter, realize length
Uniformity on direction.
Preferably, the cross shape marks for carrying out the coated face under the microscope are aligned so that neat between fillet optical filter
Alignment.
Preferably, the process for coating epoxy resin is：
Hollow out thin slice is placed in fitting on the coated face of fillet optical filter, and center line and the fillet optical filter in hollow out gap apply
The center line of glue surface overlaps, and fills epoxy resin by glue injecting head and removes the hollow out thin slice behind the hollow out gap.
Preferably, set the width in the hollow out gap to be less than the 1/10 of the coated face width, control epoxy resin
Coated weight makes to be compacted overflow adhesive after fitting between fillet optical filter.
The method that the present invention prepares integrated form hyperfine spectrum sieve, the consistent of fillet optical filter is ensured by Combined machining
Property；High splicing precision is realized using special splicing apparatus, processes cross alignment on fillet optical filter using photoetching technique
Benchmark, realize that length direction accurately splices；Realize that bonding process glue-spread is controllable using special glue spreading apparatus, realize 8 spectrums with
Upper multispectral superelevation integrated level；With precision is high, integrated technique is ripe, it is integrated after optical element surface overflow adhesive it is excellent
Point.For the light pass surface of the integrated form hyperfine spectrum sieve of the present invention without step-like deviation, flatness is less than 5 μm, have integrated level it is high,
The advantages of uniformity is high, precision is high, cost-effective, stability is good.
Brief description of the drawings
Fig. 1 is the structural representation that the integrated form hyperfine spectrum of an embodiment sieves.
Fig. 2 is an embodiment by the integrated method for preparing integrated form hyperfine spectrum and sieving of cross-shaped alignment marks alignment
Schematic diagram.
Fig. 3 is the method schematic diagram that integrated form hyperfine spectrum sieve is prepared using hollow out thin slice gluing of an embodiment.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with accompanying drawing and specific implementation
Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only explaining this hair
It is bright, without being construed as limiting the invention.
The invention provides a kind of integrated form hyperfine spectrum sieve, if including each face size of dry plate, accuracy of form and position identical
Fillet optical filter, the light pass surface of the fillet optical filter is indefectible, the two-sided depth of parallelism is less than 3 μm；Each fillet optical filter
Coated face between integrated by resin bonding, overlapped after neat bonding is directed between coated face, integrated form is hyperfine
The light pass surface of spectrum sieve is less than 5 μm without step-like deviation, flatness.
Reference picture 1, it is the structural representation that the integrated form hyperfine spectrum of an embodiment sieves, in the present embodiment, integrates
Formula hyperfine spectrum sieve 9 includes fillet optical filter 1-8, fillet optical filter 1-8 each face size, accuracy of form and position all same.Fillet
Optical filter 1-8 spectral coverage differs, and spectral coverage scope is 400nm-1000nm.Pass through aviation ring between fillet optical filter 1-8
Oxygen tree fat gluing integrates, and is first directed at fillet optical filter 1-8 coated face neatly before gluing so that fillet is filtered two-by-two
Overlapped after coated face gluing between mating plate.The light pass surface of integrated form hyperfine spectrum sieve 9 is less than without step-like deviation, flatness
5μm。
In the present embodiment, carry out gluing using epoxy resin to integrate so that integrated form hyperfine spectrum sieve 9 disclosure satisfy that
Space flight level application demand, it is resistant to sinusoidal vibration test and 0~50 DEG C of thermal vacuum test.
In the present embodiment, the both sides of fillet optical filter 1-8 coated face up and down use photoetching technique in identical position
It is respectively provided with a cross alignment mark, two cross-shaped alignment marks of upper coated face and two cross pair of lower coated face
Fiducial mark note is overlooked in coated face vertical direction to be overlapped.Cross is provided with the both sides of fillet optical filter 1-8 coated face up and down
Alignment mark, it is therefore an objective to so that can be neatly aligned between each fillet optical filter, realize and integrated on fillet optical filter length direction
Uniformity.
In certain embodiments, the integrated of more than 8 fillet optical filters can be set as needed, be prepared into more than 8 spectrums
Integrated form hyperfine spectrum sieves.
The integrated form hyperfine spectrum sieve of the present invention, it is integrated using more than 8 fillet optical filter bondings, control each fillet
Each face size, the accuracy of form and position of optical filter are identical, control that the light pass surface of each fillet optical filter is indefectible, the two-sided depth of parallelism is less than
3 μm, the coated face up and down of fillet optical filter is machined with cross-shaped alignment marks, realizes that length direction accurately splices, after integrating
Light pass surface is less than 5 μm without step-like deviation, flatness.The integrated form hyperfine spectrum sifter device of the present invention has integrated level high, consistent
Property it is high, precision is high, cost-effective, stability is good the advantages of, it is especially suitable suitable for high-resolution multi-spectral imager optical system
Conjunction is applied in fields such as Aero-Space, military investigation, meteorological research, precision agriculture, forest fire protection and seashore cruises.
Present invention also offers a kind of method for preparing integrated form hyperfine spectrum sieve, comprise the following steps：
Step 1：Each fillet optical filter is processed so that each face size, the morpheme of each fillet optical filter
Precision is identical；
Step 2：The thickness of the fillet optical filter is detected, detects the fillet filter after working process under the microscope
Mating plate, picks out that light pass surface is indefectible, the two-sided depth of parallelism is less than 3 μm of fillet optical filters, wiped clean；
Step 3：Benchmark of the selection flatness less than 3 μm leans on face, light pass surface and the benchmark of current slice fillet optical filter
Precalculated position is slipped into while fitting by face, epoxy resin is uniformly coated in the upper coated face of current slice fillet optical filter；
Under the light pass surface of a piece of fillet optical filter slide while be bonded with the benchmark by face, a piece of fillet filters under making
The lower coated face of piece slides after being neatly aligned with the upper coated face of current slice fillet optical filter and is bonded, a piece of fillet optical filter under
Upper coated face uniformly coat epoxy resin；
The alignment of a piece of fillet optical filter, fitting, gluing process under repeating, complete the bonding collection of all fillet optical filters
Into the upper coated face of last a piece of fillet optical filter is not coated with epoxy resin.
In some embodiments, reference picture 2, it is that being aligned by cross-shaped alignment marks for an embodiment integrates preparation collection
The method schematic diagram of accepted way of doing sth hyperfine spectrum sieve, it is further comprising the steps of before step 3 is carried out：
The both sides identical position of coated face respectively processes a cross using photoetching technique above and below each fillet optical filter
Type alignment mark 11, two cross-shaped alignment marks 11 of upper coated face are applying with two cross-shaped alignment marks of lower coated face
Overlook and overlap in glue surface vertical direction.It is right between the cross shape marks 11 of fillet optical filter coated face two-by-two to carry out under the microscope
It is accurate so as to be neatly aligned between fillet optical filter, alignment precision is high.
In some preferred embodiments, reference picture 3, integrated form is prepared for the use hollow out thin slice gluing of an embodiment
The method schematic diagram of hyperfine spectrum sieve, gluing is carried out using hollow out thin slice 12, benchmark is designed to what both sides protruded by face 10
Abnormity, reserve 12 exercisable space of hollow out thin slice.
Wherein step 3 kind coating epoxy resin process be：Placement is bonded on the upper coated face of fillet optical filter 1 to engrave
Empty thin slice 12, the center line in hollow out gap 13 overlap with the center line of coated face on fillet optical filter 1, by glue injecting head 14 by ring
After oxygen tree fat fills hollow out gap 13, hollow out thin slice 12 is removed.
Then the lower coated face of fillet optical filter 2 slides after being neatly aligned with the upper coated face of fillet optical filter 1 and is bonded, so
The process of above-mentioned coating epoxy resin is repeated to the upper coated face of fillet optical filter 2 afterwards, the patch of a piece of fillet optical filter under repeating
Close, gluing process, until after the completion of last a piece of fillet optical filter fitting, no longer coat epoxy resin, integrated form on its surface
Hyperfine spectrum sieve series is standby to be completed.
In some preferred embodiments, 1/10 of width less than coated face width in hollow out gap 13 is also set up, and
The coated weight of control epoxy resin to be compacted overflow adhesive after fitting between fillet optical filter.
The method that the present invention prepares integrated form hyperfine spectrum sieve, the consistent of fillet optical filter is ensured by Combined machining
Property；High splicing precision is realized using special splicing apparatus, processes cross alignment on fillet optical filter using photoetching technique
Benchmark, realize that length direction accurately splices；Realize that bonding process glue-spread is controllable using special glue spreading apparatus, realize 8 spectrums with
Upper multispectral superelevation integrated level；With precision is high, integrated technique is ripe, it is integrated after optical element surface overflow adhesive it is excellent
Point, the light pass surface of integrated form hyperfine spectrum sieve is less than 5 μm without step-like deviation, flatness after integrating.
Described above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
Member, under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be regarded as
Protection scope of the present invention.
Claims (10)
1. a kind of integrated form hyperfine spectrum sieve, it is characterised in that if including each face size of dry plate, accuracy of form and position identical fillet
Optical filter, the light pass surface of the fillet optical filter is indefectible, the two-sided depth of parallelism is less than 3 μm；The coated face of each fillet optical filter
Between integrated by resin bonding, overlapped after neat bonding is directed between the coated face, the integrated form is hyperfine
The light pass surface of spectrum sieve is less than 5 μm without step-like deviation, flatness.
2. sieved according to the integrated form hyperfine spectrum described in claim 1, it is characterised in that each fillet optical filter applies up and down
The both sides identical position of glue surface is respectively provided with a cross alignment mark, two cross of upper coated face using photoetching technique
Alignment mark is overlooked in coated face vertical direction with two cross-shaped alignment marks of lower coated face and overlapped, the cross pair
Fiducial mark note makes neatly to be aligned between each fillet optical filter.
3. sieved according to the integrated form hyperfine spectrum described in claim 1, it is characterised in that the quantity of the fillet optical filter
At least eight.
4. sieved according to the integrated form hyperfine spectrum described in claim 1, it is characterised in that the spectral coverage of each fillet optical filter
Difference, configurable spectral coverage scope are 400nm-1000nm.
5. being sieved according to the integrated form hyperfine spectrum described in claim 1, it is characterised in that the resin is epoxy resin,
The integrated form hyperfine spectrum sieve is set to be resistant to sinusoidal vibration test and 0~50 DEG C of thermal vacuum test.
A kind of 6. method for preparing the integrated form hyperfine spectrum sieve in claim 1-5 described in any one, it is characterised in that
Comprise the following steps：
Step 1：Each fillet optical filter is processed so that each face size, the accuracy of form and position of each fillet optical filter
It is identical；
Step 2：The thickness of each fillet optical filter is detected, detects each fillet optical filter after working process under the microscope,
Pick out that light pass surface is indefectible, the two-sided depth of parallelism is less than 3 μm of fillet optical filter, wiped clean；
Step 3：Benchmark of the selection flatness less than 3 μm leans on face, and light pass surface and the benchmark of current slice fillet optical filter lean on face
Precalculated position is slipped into while fitting, epoxy resin is uniformly coated in the upper coated face of current slice fillet optical filter；
Under the light pass surface of a piece of fillet optical filter slide while be bonded with the benchmark by face, a piece of fillet optical filter under making
Lower coated face slides after being neatly aligned with the upper coated face of current slice fillet optical filter and is bonded, and a piece of fillet optical filter is upper under
Coated face uniformly coats epoxy resin；
The alignment of a piece of fillet optical filter, fitting, gluing process, the bonding for completing all fillet optical filters integrate under repeating, most
The upper coated face of a piece of fillet optical filter is not coated with epoxy resin afterwards.
7. a kind of method for preparing integrated form hyperfine spectrum sieve according to claim 6, it is characterised in that in the step
It is further comprising the steps of before rapid three：
Using photoetching technique, respectively processing one is cross right for the both sides identical position of coated face above and below each fillet optical filter
Fiducial mark remembers that two cross-shaped alignment marks of upper coated face and two cross-shaped alignment marks of lower coated face are vertical in coated face
Overlook and overlap on direction, the cross-shaped alignment marks make neatly to be aligned between each fillet optical filter, realized on length direction
Uniformity.
8. a kind of method for preparing integrated form hyperfine spectrum sieve according to claim 7, it is characterised in that in microscope
The lower cross shape marks for carrying out coated face, which are aligned, neatly to be aligned between fillet optical filter.
A kind of 9. method for preparing integrated form hyperfine spectrum sieve according to claim 6, it is characterised in that coating epoxy
The process of resin is：
Hollow out thin slice, center line and the fillet optical filter coated face in hollow out gap are placed in fitting on the coated face of fillet optical filter
Center line overlap, epoxy resin is filled by glue injecting head and removed the hollow out thin slice behind the hollow out gap.
10. a kind of method for preparing integrated form hyperfine spectrum sieve according to claim 9, it is characterised in that institute is set
The width for stating hollow out gap is less than the 1/10 of the coated face width, controls the coated weight of epoxy resin and makes between fillet optical filter
Overflow adhesive after compacting fitting.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114506089A (en) * | 2022-01-18 | 2022-05-17 | 北京智创芯源科技有限公司 | Preparation method of infrared multispectral optical filter |
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| CN107664784B (en) | 2019-03-05 |
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