CN114506089A - Preparation method of infrared multispectral optical filter - Google Patents

Preparation method of infrared multispectral optical filter Download PDF

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Publication number
CN114506089A
CN114506089A CN202210054832.6A CN202210054832A CN114506089A CN 114506089 A CN114506089 A CN 114506089A CN 202210054832 A CN202210054832 A CN 202210054832A CN 114506089 A CN114506089 A CN 114506089A
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optical
optical filter
filters
optical filters
filter
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CN114506089B (en
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不公告发明人
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Beijing Zhichuang Xinyuan Technology Co ltd
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Beijing Zhichuang Xinyuan Technology Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/48Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/40General aspects of joining substantially flat articles, e.g. plates, sheets or web-like materials; Making flat seams in tubular or hollow articles; Joining single elements to substantially flat surfaces
    • B29C66/41Joining substantially flat articles ; Making flat seams in tubular or hollow articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/80General aspects of machine operations or constructions and parts thereof
    • B29C66/87Auxiliary operations or devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00Optical elements, e.g. lenses, prisms
    • B29L2011/0066Optical filters

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Filters (AREA)

Abstract

The invention provides a preparation method of an infrared multi-spectral-band optical filter, which comprises the steps of preparing more than two groups of optical filters with different spectral bands, arranging spectral channel alignment marks on the optical filters, placing the optical filters in a sample box, fixing a piece suction tool on a piece carrying base station of a piece sticking instrument, arranging a vacuum suction channel and an alignment mark corresponding to the alignment mark of the optical filters on the piece suction tool, moving the piece sticking instrument to sequentially suck the optical filters to move above the piece carrying base station, adjusting the positions of the optical filters to enable the alignment mark on the optical filters to be consistent with the alignment mark on the piece suction tool, placing the optical filters on the piece suction tool, starting the vacuum channel to suck the optical filters, filling glue in gaps between the optical filters, and then curing. The preparation method provided by the invention can improve the spectrum registration precision among the multi-spectral-band filters, the coplanarity among the filters is good, the process method is simple, and the prepared infrared multi-spectral-band filters can cover various spectral bands and can be used for combining the filters with different thicknesses and widths.

Description

Preparation method of infrared multispectral optical filter
Technical Field
The invention relates to the technical field of infrared multispectral imaging, in particular to a preparation method of an infrared multispectral optical filter.
Background
The infrared multispectral imaging detection technology is a new generation photoelectric detection technology, and the infrared multispectral imaging detector technology is widely applied to the fields of satellite remote sensing, resource detection and the like. The multispectral combined optical filter is arranged at the near end of the infrared detector with wide spectral response, the spectral response of the detector is subdivided, the target characteristics are identified by utilizing the multispectral image with spectral resolution, and the detection and identification capability of the infrared system on the target under the complex background condition is improved.
At present, the preparation method of domestic infrared multi-spectral filter generally has 2 methods, one is a multi-spectral filter prepared by coating on the same infrared optical material substrate, and the other is to arrange and combine a plurality of single spectral filters according to certain spectral characteristics.
The method for coating the film on the same infrared optical material substrate is to prepare the multi-spectral-band optical filters with different spectrum transmission by evaporating different optical film layers at different positions on the same substrate material, and the method is to carry out evaporation on the film layer of each spectral band respectively due to the need of a film curing or covering method, so that the yield is low along with the increase of the number of the spectral bands, and the infrared optical filters covering short waves, medium waves and long waves simultaneously cannot be prepared because the substrate is made of the same material;
the method for combining and integrating a plurality of optical filters is to combine a plurality of optical filters with different spectral bands by using a method of gluing, mechanically extruding and fixing the optical filters which are subjected to optical coating, so as to realize multi-spectral band optical limitation. The method adopts the optical filter side surface to fill glue, the size of the gap between the optical filters is controlled by the extrusion pressure degree and the size of the optical filters, the precise control of the size of the gap between the spliced optical filters is difficult, the coplanarity between the optical filters is difficult to guarantee due to the extrusion force of the optical filter side surface, and because each spectral filter is extruded and combined by glue in sequence, once any spectral filter is unqualified in spliced gap or the surface is scratched due to the extrusion process, other optical filters cannot be reused, the yield of the multi-spectral filter prepared by the mechanical extrusion combination method is low, and the combination of the optical filters with different thicknesses cannot be carried out.
Disclosure of Invention
The technical problem to be solved by the invention is to overcome the defects of the prior art, and provide a method for preparing an infrared multi-spectral-band optical filter, which can improve the spectral registration precision among the multi-spectral-band optical filters, has good coplanarity among the optical filters and simple process method, and the spectrum of the prepared infrared multi-spectral-band optical filter can cover short-wave, medium-wave, long-wave and very long-wave spectral bands and can be combined with optical filters with different thicknesses and widths.
In order to solve the technical problems, the technical scheme provided by the invention is as follows:
a preparation method of an infrared multispectral optical filter comprises the following steps: s01, preparing more than two groups of optical filters with different spectral bands, wherein spectral channel alignment marks are arranged at two ends of each optical filter; s02, arranging the optical filters according to the spectrum combination requirement and placing the optical filters in a sample box; s03, fixing the sheet suction tool on a slide glass base table of the sheet sticking instrument; the vacuum absorption device comprises a piece absorption tool, a vacuum absorption device and a piece detection device, wherein the piece absorption tool is provided with a platform for placing optical filters and independently controlled vacuum absorption channels corresponding to each group of optical filters, and the platform is provided with alignment marks corresponding to the alignment marks of the optical filters; s04, sequentially absorbing the optical filters by a suction head on a mechanical arm of the mobile patch instrument according to the spectrum combination requirement and moving the optical filters to the upper part of a slide glass base station; s05, adjusting the position of the optical filter to make the alignment mark position on the optical filter consistent with the alignment mark position on the sheet suction tool, then placing the optical filter on the sheet suction tool, and starting a control switch of the vacuum channel to adsorb the optical filter; and S06, filling glue in the gaps among the optical filters, and curing for a preset time to obtain the multi-spectral-segment combined optical filter.
According to the infrared multispectral optical filter preparation method, tool design with functions of fixing and aligning the multi-channel vacuum absorption optical filter is adopted, precise alignment of the optical filter and the alignment mark of the assembly and absorption tool is utilized by the surface mounting instrument, registration precision of the multispectral optical filter spectral bands is guaranteed, coplanarity among the optical filters is good, the process method is simple, damage to the optical filter in the assembly process is reduced by the multi-channel vacuum absorption optical filter fixing method, glue filling amount of the optical filter gap is precisely controlled by a glue dispenser, and therefore the problems of edge breakage of the optical filter, uneven glue filling on the side surface of the optical filter, inconsistent coplanarity among the optical filters and gaps among the optical filters caused by extrusion and fixation and the like caused by the original method for assembling the multispectral optical filter by mechanical extrusion and adhesion are solved, the infrared multispectral optical filter preparation qualification rate is improved, and the spectrum can cover short wave, Medium wave, long wave and very long wave spectral bands, and can be combined with filters with different thicknesses and widths.
With respect to the above technical solution, further improvements as described below can be made.
In a preferred embodiment, the method for preparing an infrared multispectral filter further includes, in step S01: and (3) soaking the optical filter in an acetone reagent for a preset time, taking out the optical filter, washing the optical filter with the acetone reagent, cleaning the optical filter in absolute ethyl alcohol, and drying the optical filter with nitrogen for later use.
Through the cleaning steps, the imaging effect of the infrared multi-spectral-band optical filter and the wettability of the filling adhesive can be effectively improved.
Specifically, in a preferred embodiment, in step S03, the slide suction tool is fixed to the slide mount of the placement machine by vacuum or mechanical means.
By adopting the fixing mode, the operation is simple and convenient, and the structure is stable and reliable.
Further, in a preferred embodiment, in step S05, the position of the optical filter is adjusted after the alignment marks on the optical filter and the suction tool are observed through the upper and lower lens barrels of the microscope, and the optical filter is placed after the microscope is moved out of the observation field.
The precision and efficiency of the registration of the spectral bands of the multi-spectral filter can be greatly improved through the precise detection function of the microscope.
Specifically, in a preferred embodiment, in step S06, the sheet suction tool is tilted by 42 to 48 °, and particularly preferably 45 °, and 4 to 6 drops of glue are dispensed at the middle position and the higher end of the gap between the optical filters by using a dispenser, so that the glue does not flow out of the other end of the optical filters and penetrate into the bottom surface.
Adopt the point gum machine to be convenient for the point income volume of gluing of the gap filling between the accurate control light filter, through will inhaling piece frock slope and arrange, be convenient for glue evenly to fill in the gap.
Specifically, in a preferred embodiment, in step S06, the preset time period for curing is 6 hours.
The time duration is cured at room temperature, so that the stable reliability of connection between the optical filters can be effectively ensured.
Specifically, in a preferred embodiment, in step S06, the two-component epoxy optical cement is filled in the gap between the optical filters.
The double-component epoxy optical cement is adopted for bonding, so that the structural stability and reliability of the multi-spectral-band spectral filter can be effectively ensured.
Specifically, in a preferred embodiment, the two-component epoxy optical cement is proportioned and weighed, and a defoaming machine is used for defoaming the two-component epoxy optical cement.
The two-component epoxy optical adhesive after the treatment can further ensure the stable and reliable bonding between the optical filters.
In particular, in a preferred embodiment, the alignment marks are in the form of a cross-shaped structure.
The alignment mark with the cross structure is easy to process and manufacture, and can effectively ensure the alignment accuracy.
Specifically, in a preferred embodiment, the substrate material used for the optical filter includes any one of silicon, sapphire, and germanium.
The optical filter made of the material has high structural strength and good imaging effect.
Compared with the prior art, the invention has the advantages that: the spectrum registration precision among the multi-spectral-band optical filters can be improved, the coplanarity among the optical filters is good, the process method is simple, the spectrum of the prepared infrared multi-spectral-band optical filter can cover short-wave, medium-wave, long-wave and very long-wave spectral bands, and optical filter combinations with different thicknesses and widths can be carried out.
Drawings
The invention will be described in more detail hereinafter on the basis of embodiments and with reference to the accompanying drawings. Wherein:
FIG. 1 is a schematic diagram showing the overall structure of a filter in an embodiment of the present invention;
FIG. 2 schematically shows an embodiment of the invention in which filters are placed in a sample cell in the order of spectral band grouping;
FIG. 3 is a schematic view showing the overall structure of a suction pad fixture in an embodiment of the present invention;
FIG. 4 is a schematic view showing the overall structure of a patch device in the embodiment of the present invention;
FIG. 5 is a schematic diagram illustrating the assembled effect of the filter according to the embodiment of the present invention;
FIG. 6 is a view schematically showing the state of the filling paste in the embodiment of the present invention;
fig. 7 schematically shows a multi-spectral band combining filter obtained in an embodiment of the present invention.
In the drawings, like parts are provided with like reference numerals. The figures are not drawn to scale.
Detailed Description
The invention will be described in further detail with reference to the following figures and specific examples, without thereby limiting the scope of protection of the invention.
Fig. 1 schematically shows the overall structure of the optical filter A, B, C, D, E in the embodiment of the present invention. Fig. 2 schematically shows the placement of filters A, B, C, D, E in the sample cell 200 according to the sequence of spectral band combinations in an embodiment of the present invention. Fig. 3 schematically shows the overall structure of the sheet suction tool 2 in the embodiment of the present invention. Fig. 4 schematically shows the overall structure of the patch device 10 in the embodiment of the present invention. Fig. 5 schematically illustrates the effect of filter A, B, C, D, E after assembly in an embodiment of the invention. Fig. 6 schematically shows the state of the filling paste in the embodiment of the present invention. Fig. 7 schematically shows a multi-spectral band combining filter 100 obtained in an embodiment of the present invention.
As shown in fig. 1 to 7, the method for manufacturing an infrared multispectral optical filter according to an embodiment of the present invention includes the following steps: s01, preparing more than two groups of optical filters A, B, C, D, E with different spectral bands, wherein spectral channel alignment marks 1 are arranged at two ends of an optical filter A, B, C, D, E; specifically, the optical filter A, B, C, D, E is an optical coating film that has been completed to limit spectral transmission; s02, arranging the filters A, B, C, D, E according to the spectrum combination requirement and placing the filters in the sample box 10; s03, fixing the piece suction tool 2 on the slide base 101 of the piece sticking instrument 10; the piece sucking tool 2 is provided with a platform 21 for placing the optical filter A, B, C, D, E, and independently controlled vacuum adsorption channels A ', B', C ', D', E 'and vacuum adsorption holes 22 corresponding to the optical filter A, B, C, D, E, and the platform 21 is provided with an alignment mark 1' corresponding to the alignment mark 1 of the optical filter A, B, C, D, E; s04, sequentially sucking the optical filters A, B, C, D, E by a suction head 102 on a mechanical arm of the mobile chip mounter 10 according to spectrum combination requirements and moving the optical filters A, B, C, D, E to the upper part of a slide base platform 101; specifically, the mobile patch device 10 has three-axis movement and rotation adjustment functions, so that precise alignment and in-situ patch placement of the optical filter and an alignment mark on the patch absorbing tool are realized; s05, adjusting the position of the optical filter A, B, C, D, E to enable the position of an alignment mark 1 on the optical filter A, B, C, D, E to be consistent with the position of an alignment mark 1 'on the piece sucking tool 2, then placing the optical filter A, B, C, D, E on the piece sucking tool 2, and starting control switches A', B ', C', D 'and E' of a vacuum channel to suck the optical filter A, B, C, D, E; s06, filling glue 3 into the gaps between the filters A, B, C, D, E, and curing for a predetermined time to obtain the multi-spectral-band combined filter 100.
According to the infrared multi-spectral-band optical filter preparation method provided by the embodiment of the invention, the tool design with the functions of fixing and aligning the identification of the multi-channel vacuum absorption optical filter is adopted, the precise alignment of the optical filter and the alignment identification of the assembly and absorption tool is utilized by the surface mount device, the spectral band registration precision of the multi-spectral-band optical filter is ensured, the coplanarity among the optical filters is good, the process method is simple, the method for fixing the optical filter by multi-channel vacuum absorption reduces the damage to the optical filter in the assembly process, and the glue filling amount of the gap among the optical filters is precisely controlled by the glue dispenser, so that the problems of edge breakage of the optical filter, uneven glue filling on the side surface of the optical filter, inconsistent coplanarity among the optical filters and the gap among the optical filters caused by extrusion and fixation and the like caused by the original method for assembling the multi-spectral-band optical filter by mechanical extrusion and bonding are avoided, the preparation qualification rate of the infrared multi-spectral-band optical filter can be improved, the spectrum of the prepared infrared multi-spectral-band optical filter can cover short wave, Medium wave, long wave and very long wave spectral bands, and can be combined with filters with different thicknesses and widths.
Specifically, in the present embodiment, the alignment marks 1 and 1' have a cross-shaped structure. The alignment mark with the cross structure is easy to process and manufacture, and can effectively ensure the alignment accuracy. Specifically, in a preferred embodiment, the substrate material used for the optical filter includes any one of silicon, sapphire, and germanium. The optical filter made of the material has high structural strength and good imaging effect.
Further, in this embodiment, in step S01, the method further includes cleaning the filter A, B, C, D, E: soaking the optical filter A, B, C, D, E in an acetone reagent for 5min, clamping the optical filter A, B, C, D, E by using forceps, washing the optical filter by holding an acetone spray pen with hands, then cleaning the optical filter in absolute ethyl alcohol, taking out the optical filter, and drying the optical filter by using nitrogen for later use. Through the cleaning steps, the imaging effect of the infrared multi-spectral filter can be effectively improved.
Specifically, in this embodiment, in step S03, the suction tool 2 and the slide mount 101 of the placement apparatus 10 are fixed in vacuum or mechanically, and the direction of the suction tool 2 is determined according to the filter spectrum combination direction. By adopting the fixing mode, the operation is simple and convenient, and the structure is stable and reliable.
Further, in this embodiment, in step S05, the position of the filter A, B, C, D, E is adjusted after the alignment marks 1 and 1' on the filter A, B, C, D, E and the suction tool 2 are observed through the upper and lower barrels of the microscope 103, and the filter A, B, C, D, E is placed after the microscope 103 is moved out of the observation field. The precision and the efficiency of the registration of the spectral bands of the multi-spectral band optical filter can be greatly improved through the precise detection function of the microscope.
As shown in fig. 6, in this embodiment, in step S06, the suction tool 2 is tilted by 42 to 48 °, preferably 45 °, and 4 to 6 drops of glue 3 are dispensed by a dispenser along the middle position and the higher end of the gap between the filters A, B, C, D, E, so that the glue does not flow out of the other end of the filter A, B, C, D, E and penetrate to the bottom surface. Adopt the point gum machine to be convenient for the point income volume of gluing of the gap filling between the accurate control light filter, through will inhaling piece frock slope and arrange, be convenient for glue evenly to fill in the gap. Specifically, in the present embodiment, in step S06, the preset time period for curing is 6 hours. The time duration is cured at room temperature, so that the stable reliability of connection between the optical filters can be effectively ensured.
Specifically, in this embodiment, in step S06, the two-component epoxy optical cement is filled in the gap between the optical filters A, B, C, D, E. The double-component epoxy optical cement is adopted for bonding, so that the structural stability and reliability of the multi-spectral-band spectral filter can be effectively ensured. Specifically, in this embodiment, the two-component epoxy optical cement is weighed and configured in proportion, a defoaming machine is used to perform defoaming treatment on the two-component epoxy optical cement, and the defoaming machine has high-speed centrifugal defoaming and vacuum-pumping degassing functions. The two-component epoxy optical adhesive after the treatment can further ensure the stable and reliable bonding between the optical filters.
According to the embodiment, the preparation method of the infrared multi-spectral-band optical filter can improve the spectral registration precision among the multi-spectral-band optical filters, the coplanarity among the optical filters is good, the process method is simple, the spectrum of the prepared infrared multi-spectral-band optical filter can cover short-wave, medium-wave, long-wave and very-long-wave spectral bands, and the optical filters with different thicknesses and widths can be combined.
While the invention has been described with reference to a preferred embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In particular, the technical features mentioned in the embodiments can be combined in any way as long as there is no structural conflict. It is intended that the invention not be limited to the particular embodiments disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.

Claims (10)

1. A preparation method of an infrared multi-spectral filter is characterized by comprising the following steps:
s01, preparing more than two groups of optical filters with different spectral bands, wherein spectral channel alignment marks are arranged at two ends of each optical filter;
s02, arranging the optical filters according to the spectrum combination requirement and placing the optical filters in a sample box;
s03, fixing the sheet suction tool on a slide glass base table of the sheet sticking instrument; the optical filter sucking tool is provided with a platform for placing the optical filters and independently controlled vacuum adsorption channels corresponding to each group of the optical filters, and the platform is provided with alignment marks corresponding to the alignment marks of the optical filters;
s04, sequentially absorbing the optical filters by a suction head on a mechanical arm of the mobile patch instrument according to the spectrum combination requirement and moving the optical filters to the upper part of a slide glass base station;
s05, adjusting the position of the optical filter to make the alignment mark position on the optical filter consistent with the alignment mark position on the sheet suction tool, then placing the optical filter on the sheet suction tool, and starting a control switch of a vacuum channel to adsorb the optical filter;
and S06, filling glue in the gaps among the optical filters, and curing for a preset time to obtain the multi-spectral-segment combined optical filter.
2. The method for manufacturing an infrared multispectral filter as recited in claim 1, further comprising, in the step S01, cleaning the filter: and putting the optical filter into an acetone reagent, soaking for a preset time, taking out the optical filter, washing the optical filter with the acetone reagent, putting the optical filter into absolute ethyl alcohol, cleaning, and drying the optical filter with nitrogen for later use.
3. The method for manufacturing an infrared multispectral optical filter as recited in claim 1 or 2, wherein in step S03, the slide suction tool is fixed to the slide mount of the placement machine by vacuum or mechanical means.
4. The method according to claim 1 or 2, wherein in step S05, the position of the optical filter is adjusted after the alignment marks on the optical filter and the suction tool are observed through the upper and lower barrels of the microscope, and the optical filter is placed after the microscope is moved out of the observation field.
5. The method for preparing the infrared multispectral optical filter according to claim 1 or 2, wherein in the step S06, the sheet suction tool is tilted by 42 to 48 degrees, 4 to 6 drops of glue are dispensed by a glue dispenser along the middle position and the higher end of the gap between the optical filters, so that the glue does not flow out of the other end of the optical filter and permeate into the bottom surface.
6. The method for manufacturing an infrared multispectral filter as recited in claim 1 or 2, wherein the predetermined period of time for curing in step S06 is 6 hours.
7. The method according to claim 1 or 2, wherein in step S06, a two-component epoxy optical cement is filled in a gap between the optical filters.
8. The method according to claim 7, wherein the two-component epoxy optical cement is prepared by weighing in proportion, and a defoaming machine is used to defoam the two-component epoxy optical cement.
9. The method of claim 1 or 2, wherein the alignment marks are cross-shaped structures.
10. The method of claim 1 or 2, wherein the substrate material used for the optical filter comprises any one of silicon, sapphire and germanium.
CN202210054832.6A 2022-01-18 2022-01-18 Preparation method of infrared multi-band optical filter Active CN114506089B (en)

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CN115125485A (en) * 2022-07-14 2022-09-30 北京同生科技有限公司 Preparation method of medium-wave infrared filter

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CN109959995A (en) * 2017-12-14 2019-07-02 惠州海格光学技术有限公司 Novel filter cradle fits process
CN113295387A (en) * 2021-05-25 2021-08-24 中国科学院合肥物质科学研究院 System and method for testing optical parameters of multiband strip-shaped optical filter

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CN1696658A (en) * 2005-05-18 2005-11-16 中国科学院上海技术物理研究所 Multichannel detector module on focal plane of infrared ray and installation method
CN1928630A (en) * 2005-09-08 2007-03-14 精工爱普生株式会社 Optical low pass filter
CN103217731A (en) * 2013-04-22 2013-07-24 兰州空间技术物理研究所 Method for manufacturing multi-spectrum combining optical filter
CN107175193A (en) * 2017-06-02 2017-09-19 信利光电股份有限公司 The preparation method and making frock of a kind of graphical optical filter
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Publication number Priority date Publication date Assignee Title
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CN115125485B (en) * 2022-07-14 2023-09-12 北京同生科技有限公司 Method for preparing medium wave infrared filter

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