CN107664784B - A kind of integrated form hyperfine spectrum sieve and preparation method thereof - Google Patents

A kind of integrated form hyperfine spectrum sieve and preparation method thereof Download PDF

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CN107664784B
CN107664784B CN201710907082.1A CN201710907082A CN107664784B CN 107664784 B CN107664784 B CN 107664784B CN 201710907082 A CN201710907082 A CN 201710907082A CN 107664784 B CN107664784 B CN 107664784B
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narrow
filter
fillet
optical filter
glued
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CN107664784A (en
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张新
王灵杰
谢晓麟
吴洪波
付强
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/006—Filter holders

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Abstract

The invention discloses a kind of integrated form hyperfine spectrum sieves, it is integrated using 8 or more fillet optical filter bondings, each face size, the accuracy of form and position for controlling each fillet optical filter are identical, the light pass surface for controlling each fillet optical filter is indefectible, the two-sided depth of parallelism is less than 3 μm, the coated face up and down of fillet optical filter is machined with cross-shaped alignment marks, realize that length direction accurately splices, the light pass surface after integrating is without step-like deviation, and flatness is less than 5 μm.The invention also discloses the methods for preparing above-mentioned integrated form hyperfine spectrum sieve, have the advantages that precision is high, integrated technique is mature, it is integrated after optical element surface overflow adhesive, the integrated form hyperfine spectrum sifter device prepared has the advantages that integrated level is high, consistency is high, precision is high, cost performance is high, stability is good, is suitable for high-resolution multi-spectral imager optical system.

Description

A kind of integrated form hyperfine spectrum sieve and preparation method thereof
Technical field
The present invention relates to a kind of integrated form hyperfine spectrum sieves, are suitable for fine optical spectrum imagers optical system, belong to sky Between optical field.
Background technique
Multi-spectral imager can collect spectral information abundant simultaneously, therefore in military investigation, meteorological research, accurate Each equal fields such as agricultural are widely used.With the continuous development of spectral technique, common spectrum screening element is integrated due to spectral coverage Spend low, preparation process is immature, and acquisition information is few, expensive etc., be increasingly difficult to meet the needs of users, in recent years how Realize that the fine multispectral imaging of high performance-price ratio becomes the focus of attention.
There are mainly two types of method, same substrate preparation and multispectral narrow bandpass collection for the preparation of current multispectral optical element At same substrate preparation has often led to following two problem: first is that spectral coverage resolution ratio more high finished product rate is lower, typically seen light Wave band；Second is that steeply risen as spectral coverage resolution ratio increases cost, it is expensive.In contrast, multispectral narrow bandpass integration Valence ratio is higher, but the multispectral optical element of existing integrated form often has following three: first is that integrated level is low；Second is that lacking Weary benchmark leads to that consistency is poor, poor dimensional stability；Three are a lack of controlling unit, and complex process is complicated.
The Chinese invention patent of Publication No. CN103217731A discloses a kind of multispectral combination on July 24th, 2013 The preparation method of optical filter, provides bonded adhesives preparation, optical filter cleaning, and optical filter gluing is bonded adhesive curing, splices optical filter A set of technique for sticking such as detection realize multispectral optical filter combination.But still for demands such as spectral coverage fining, high performance-price ratios So have the following disadvantages: first, it is unable to control the dimensional uniformity of bonding front filter；Second, do not have in integrating process Benchmark is easy to lead to working surface deviation, so that consistency is poor, precision is low；Third, the optical filter dimensional accuracy after integrating It is low, the 4th, due to lacking multiple controlling units, integrated level is low.
Summary of the invention
In order to overcome the shortcomings of the prior art, the purpose of the present invention is to provide a kind of integrated form hyperfine spectrums Sieve integrates the multispectral of eight spectrums or more, is used for high-resolution multi-spectral imager, splicing precision is high, stability is good, integrating process Overflow adhesive, simple and easy to get, cost performance is high.
A kind of integrated form hyperfine spectrum sieve, if including each face size of dry plate, the identical fillet optical filter of the accuracy of form and position, institute The light pass surface for stating fillet optical filter is indefectible, the two-sided depth of parallelism is less than 3 μm；Lead between the coated face of each fillet optical filter It crosses resin bonding to integrate, be overlapped after neat bonding is directed between the coated face, the integrated form hyperfine spectrum sieve Light pass surface without step-like deviation, flatness is less than 5 μm.
Preferably, the identical position in two sides of coated face is respectively provided with using photoetching technique above and below each fillet optical filter One cross alignment mark, two cross-shaped alignment marks of upper coated face and two cross-shaped alignment marks of lower coated face It overlooks and is overlapped in coated face vertical direction, the cross-shaped alignment marks make neatly to be aligned between each fillet optical filter.
Preferably, the quantity of the fillet optical filter is at least eight.
Preferably, the spectral coverage of each fillet optical filter is different, and configurable spectral coverage range is 400nm-1000nm.
Preferably, the resin is epoxy resin, so that integrated form hyperfine spectrum sieve is resistant to sinusoidal vibration Test and 0~50 DEG C of thermal vacuum test.
A method of preparing integrated form hyperfine spectrum sieve, comprising the following steps:
Step 1: being processed each fillet optical filter, so that each face size, the morpheme of each fillet optical filter Precision is identical；
Step 2: detecting the thickness of each fillet optical filter, each fillet filter after detecting working process under the microscope Mating plate, picks out that light pass surface is indefectible, two-sided fillet optical filter of the depth of parallelism less than 3 μm, wiped clean；
Step 3: benchmark of the selection flatness less than 3 μm leans on face, the light pass surface of current slice fillet optical filter and the benchmark Predetermined position is slid into while conjunction by face paste, uniformly coats epoxy resin in the upper coated face of current slice fillet optical filter；
Under light pass surface and the benchmark of a piece of fillet optical filter slide while closed by face paste, a piece of fillet filters under making The lower coated face of piece slides fitting, a piece of fillet optical filter under after being neatly aligned with the upper coated face of current slice fillet optical filter Upper coated face uniformly coat epoxy resin；
Alignment, the fitting, gluing process of a piece of fillet optical filter, complete the bonding collection of all fillet optical filters under repeating At the upper coated face of last a piece of fillet optical filter is not coated with epoxy resin.
Preferably, further comprising the steps of before the step 3:
The identical position in two sides of coated face respectively processes a cross using photoetching technique above and below each fillet optical filter Type alignment mark, two cross-shaped alignment marks of upper coated face and two cross-shaped alignment marks of lower coated face are in coated face It overlooks and is overlapped in vertical direction, the cross-shaped alignment marks make neatly to be aligned between each fillet optical filter, realize length Consistency on direction.
Preferably, the cross shape marks for carrying out the coated face under the microscope are aligned so that neat between fillet optical filter Alignment.
Preferably, the process of epoxy resin is coated are as follows:
Hollow out thin slice is placed in fitting on the coated face of fillet optical filter, and the center line and fillet optical filter in hollow out gap apply The center line of glue surface is overlapped, and is filled epoxy resin by glue injecting head and is removed the hollow out thin slice behind the hollow out gap.
Preferably, the width that the hollow out gap is arranged is less than the 1/10 of the coated face width, controls epoxy resin Coated weight makes overflow adhesive after being compacted be bonded between fillet optical filter.
The method that the present invention prepares integrated form hyperfine spectrum sieve guarantees the consistent of fillet optical filter by Combined machining Property；High splicing precision is realized using special splicing apparatus, processes cross alignment on fillet optical filter using photoetching technique Benchmark realizes that length direction accurately splices；Realize that bonding process glue-spread is controllable using special glue stations, realize 8 spectrums with Upper multispectral superelevation integrated level；It is high with precision, integrated technique is mature, it is integrated after optical element surface overflow adhesive it is excellent Point.The light pass surface of integrated form hyperfine spectrum sieve of the invention without step-like deviation, flatness less than 5 μm, have integrated level it is high, The advantage that consistency is high, precision is high, cost performance is high, stability is good.
Detailed description of the invention
Fig. 1 is the structural schematic diagram that the integrated form hyperfine spectrum of an embodiment sieves.
Fig. 2 is an embodiment by the integrated method for preparing integrated form hyperfine spectrum sieve of cross-shaped alignment marks alignment Schematic diagram.
Fig. 3 is the method schematic diagram that integrated form hyperfine spectrum sieve is prepared using hollow out thin slice gluing of an embodiment.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing and specific implementation Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only to explain this hair It is bright, but not to limit the present invention.
The present invention provides a kind of integrated form hyperfine spectrum sieves, if including each face size of dry plate, the accuracy of form and position it is identical Fillet optical filter, the light pass surface of the fillet optical filter is indefectible, the two-sided depth of parallelism is less than 3 μm；Each fillet optical filter Coated face between integrated by resin bonding, be overlapped after neat bonding is directed between coated face, integrated form is hyperfine The light pass surface of spectrum sieve is without step-like deviation, and flatness is less than 5 μm.
Referring to Fig.1, the structural schematic diagram sieved for the integrated form hyperfine spectrum of an embodiment integrates in the present embodiment Formula hyperfine spectrum sieve 9 includes fillet optical filter 1-8, and each face size, the accuracy of form and position of fillet optical filter 1-8 is all the same.Fillet The spectral coverage of optical filter 1-8 is all different, and spectral coverage range is 400nm-1000nm.Pass through aviation ring between fillet optical filter 1-8 Oxygen resin gluing integrates, and is first directed at the coated face of fillet optical filter 1-8 neatly before gluing, so that fillet is filtered two-by-two It is overlapped after coated face gluing between mating plate.Without step-like deviation, flatness is less than the light pass surface of integrated form hyperfine spectrum sieve 9 5μm。
In the present embodiment, it carries out gluing using epoxy resin to integrate, so that integrated form hyperfine spectrum sieve 9 can satisfy Space flight grade application demand is resistant to sinusoidal vibration test and 0~50 DEG C of thermal vacuum test.
In the present embodiment, the two sides of the coated face up and down of fillet optical filter 1-8 use photoetching technique in identical position It is respectively provided with a cross alignment mark, two cross-shaped alignment marks of upper coated face and two cross pair of lower coated face Fiducial mark note is overlooked in coated face vertical direction to be overlapped.Cross is equipped in the two sides of the coated face up and down of fillet optical filter 1-8 Alignment mark, it is therefore an objective to so that can be neatly aligned between each fillet optical filter, realize and be integrated on fillet optical filter length direction Consistency.
In some embodiments, the integrated of 8 or more fillet optical filters can be set as needed, be prepared into 8 spectrums or more Integrated form hyperfine spectrum sieve.
Integrated form hyperfine spectrum sieve of the invention, it is integrated using 8 or more fillet optical filter bondings, control each fillet Each face size, the accuracy of form and position of optical filter are identical, and the light pass surface for controlling each fillet optical filter is indefectible, the two-sided depth of parallelism is less than 3 μm, the coated face up and down of fillet optical filter is machined with cross-shaped alignment marks, realizes that length direction accurately splices, after integrating Light pass surface is without step-like deviation, and flatness is less than 5 μm.Integrated form hyperfine spectrum sifter device of the invention has integrated level high, consistent Property high, precision is high, cost performance is high, stability is good advantage, be suitable for high-resolution multi-spectral imager optical system, it is especially suitable Conjunction is applied in fields such as aerospace, military investigation, meteorological research, precision agriculture, forest fire protection and seashore cruises.
The present invention also provides a kind of methods for preparing integrated form hyperfine spectrum sieve, comprising the following steps:
Step 1: being processed each fillet optical filter, so that each face size, the morpheme of each fillet optical filter Precision is identical；
Step 2: detecting the thickness of the fillet optical filter, the fillet filter after detecting working process under the microscope Mating plate, picks out that light pass surface is indefectible, two-sided less than 3 μm fillet optical filters of the depth of parallelism, wiped clean；
Step 3: benchmark of the selection flatness less than 3 μm leans on face, the light pass surface of current slice fillet optical filter and the benchmark Predetermined position is slid into while conjunction by face paste, uniformly coats epoxy resin in the upper coated face of current slice fillet optical filter；
Under light pass surface and the benchmark of a piece of fillet optical filter slide while closed by face paste, a piece of fillet filters under making The lower coated face of piece slides fitting, a piece of fillet optical filter under after being neatly aligned with the upper coated face of current slice fillet optical filter Upper coated face uniformly coat epoxy resin；
Alignment, the fitting, gluing process of a piece of fillet optical filter, complete the bonding collection of all fillet optical filters under repeating At the upper coated face of last a piece of fillet optical filter is not coated with epoxy resin.
It in some embodiments, is that being aligned by cross-shaped alignment marks for an embodiment integrates preparation collection referring to Fig. 2 The method schematic diagram of accepted way of doing sth hyperfine spectrum sieve, further comprising the steps of before carrying out step 3:
The identical position in two sides of coated face respectively processes a cross using photoetching technique above and below each fillet optical filter Type alignment mark 11, two cross-shaped alignment marks 11 of upper coated face are being applied with two cross-shaped alignment marks of lower coated face It overlooks and is overlapped in glue surface vertical direction.It is right between the cross shape marks 11 of fillet optical filter coated face two-by-two to carry out under the microscope Standard, so that being neatly aligned between fillet optical filter, alignment precision is high.
In some preferred embodiments, referring to Fig. 3, integrated form is prepared for the use hollow out thin slice gluing of an embodiment The method schematic diagram of hyperfine spectrum sieve carries out gluing using hollow out thin slice 12, and benchmark is designed to that two sides are outstanding by face 10 Abnormity reserves the operable space of hollow out thin slice 12.
The wherein process of step 3 kind coating epoxy resin are as follows: fitting is placed and engraved on the upper coated face of fillet optical filter 1 The center line of empty thin slice 12, hollow out gap 13 is overlapped with the center line of coated face on fillet optical filter 1, by glue injecting head 14 by ring After oxygen resin fills hollow out gap 13, hollow out thin slice 12 is removed.
Then fitting is slid after the lower coated face of fillet optical filter 2 is neatly aligned with the upper coated face of fillet optical filter 1, so The process of above-mentioned coating epoxy resin is repeated to the upper coated face of fillet optical filter 2 afterwards, the patch of a piece of fillet optical filter under repeating It closes, gluing process, until no longer coating epoxy resin, integrated form on its surface after the completion of last a piece of fillet optical filter fitting Hyperfine spectrum sieve preparation is completed.
In some preferred embodiments, 1/10 of width less than coated face width in hollow out gap 13 is also set up, and The coated weight of control epoxy resin makes overflow adhesive after being compacted be bonded between fillet optical filter.
The method that the present invention prepares integrated form hyperfine spectrum sieve guarantees the consistent of fillet optical filter by Combined machining Property；High splicing precision is realized using special splicing apparatus, processes cross alignment on fillet optical filter using photoetching technique Benchmark realizes that length direction accurately splices；Realize that bonding process glue-spread is controllable using special glue stations, realize 8 spectrums with Upper multispectral superelevation integrated level；It is high with precision, integrated technique is mature, it is integrated after optical element surface overflow adhesive it is excellent Point, the light pass surface of integrated form hyperfine spectrum sieve is without step-like deviation after integrating, and flatness is less than 5 μm.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art Member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should be regarded as Protection scope of the present invention.

Claims (2)

1.一种集成式超精细光谱筛，其特征在于，包括若干片各面尺寸、形位精度相同的窄条滤光片，所述窄条滤光片的通光面无瑕疵、双面平行度小于3μm；各个窄条滤光片的涂胶面之间通过树脂粘接集成在一起，所述涂胶面之间对准整齐粘接后重合，所述集成式超精细光谱筛的通光面无台阶状偏差，平面度小于5μm；1. An integrated ultra-fine spectral sieve is characterized in that, comprising several narrow strip filters with the same size and shape and position accuracy on each side, the light-transmitting surface of the narrow strip filters is flawless and double-sided parallel. The thickness is less than 3μm; the glued surfaces of each narrow strip filter are integrated by resin bonding, and the glued surfaces are aligned neatly and then overlapped after bonding, and the integrated ultra-fine spectral sieve is transparent There is no step-like deviation on the surface, and the flatness is less than 5μm; 各个窄条滤光片上下涂胶面的两侧相同的位置采用光刻技术各设有一个十字型对准标记，上涂胶面的两个十字形对准标记与下涂胶面的两个十字形对准标记在涂胶面垂直方向上俯视重合，所述十字形对准标记使各个窄条滤光片间整齐对准；Each narrow strip filter is provided with a cross-shaped alignment mark at the same position on both sides of the upper and lower glued surfaces using photolithography technology. Two cross-shaped alignment marks on the upper glued surface and two on the lower glued surface. The cross-shaped alignment marks are overlapped in the vertical direction of the glued surface, and the cross-shaped alignment marks align the narrow strip filters neatly; 所述窄条滤光片的数量至少为八片；The number of the narrow strip filters is at least eight; 各个窄条滤光片的谱段不同，可配置的谱段范围为400nm-1000nm；The spectral bands of each narrow strip filter are different, and the configurable spectral band range is 400nm-1000nm; 所述树脂为环氧树脂，使所述集成式超精细光谱筛能够耐受正弦振动测试及0～50℃热真空测试。The resin is epoxy resin, so that the integrated ultra-fine spectral sieve can withstand the sinusoidal vibration test and the 0-50°C thermal vacuum test. 2.一种制备权利要求1所述的集成式超精细光谱筛的方法，其特征在于，包括以下步骤：2. a method for preparing the integrated ultra-fine spectral sieve of claim 1, characterized in that, comprising the following steps: 步骤一：对各个窄条滤光片进行加工处理，使得各个窄条滤光片的各面尺寸、形位精度相同；Step 1: Process each narrow-stripe filter, so that each surface of each narrow-stripe filter has the same size, shape and position accuracy; 步骤二：检测各个窄条滤光片的厚度，在显微镜下检测加工处理后的各个窄条滤光片，挑选出通光面无瑕疵、双面平行度小于3μm的窄条滤光片，擦拭干净；Step 2: Detect the thickness of each narrow-stripe filter, inspect each processed narrow-stripe filter under a microscope, and select the narrow-stripe filter with flawless light-transmitting surface and double-sided parallelism less than 3μm, and wipe it. clean; 步骤三：选择平面度小于3μm的基准靠面，当前片窄条滤光片的通光面与所述基准靠面贴合的同时滑入预定位置，在当前片窄条滤光片的上涂胶面均匀涂覆环氧树脂：在窄条滤光片的涂胶面上贴合放置镂空薄片，镂空缝隙的中心线与窄条滤光片涂胶面的中心线重合，通过注胶头将环氧树脂涂满所述镂空缝隙后将所述镂空薄片取下，所述镂空缝隙的宽度小于所述涂胶面宽度的1/10，控制环氧树脂的涂覆量使窄条滤光片之间压实贴合后无溢胶；Step 3: Select a reference surface with a flatness of less than 3 μm, slide the light-transmitting surface of the current narrow-strip filter into the predetermined position while attaching to the reference surface, and apply a coating on the current narrow-strip filter. The glue surface is evenly coated with epoxy resin: the hollow sheet is placed on the glued surface of the narrow strip filter. After the epoxy resin is coated with the hollowed-out gap, the hollowed-out sheet is removed. The width of the hollowed-out gap is less than 1/10 of the width of the glued surface. Control the coating amount of epoxy resin to make the narrow strip filter There is no glue overflow after compaction and lamination; 下一片窄条滤光片的通光面与所述基准靠面贴合的同时滑动，使下一片窄条滤光片的下涂胶面与当前片窄条滤光片的上涂胶面整齐对准后滑落贴合，在下一片窄条滤光片的上涂胶面均匀涂覆环氧树脂；The light-transmitting surface of the next piece of narrow-stripe filter is slid while being attached to the reference surface, so that the lower glued surface of the next piece of narrowstripe filter and the upper glued surface of the current piece of narrow-stripe filter are tidy After alignment, slide it down and attach it, and evenly coat the epoxy resin on the glued surface of the next narrow strip filter; 重复下一片窄条滤光片的对准、贴合、涂胶过程，完成所有窄条滤光片的粘接集成，最后一片窄条滤光片的上涂胶面不再涂覆环氧树脂；Repeat the alignment, lamination and gluing process of the next narrow strip filter to complete the bonding and integration of all narrow strip filters. The glued surface of the last narrow strip filter is no longer coated with epoxy resin. ; 在所述步骤三之前，还包括以下步骤：Before the third step, the following steps are also included: 在各个窄条滤光片上下涂胶面的两侧相同的位置采用光刻技术各加工一个十字型对准标记，上涂胶面的两个十字形对准标记与下涂胶面的两个十字形对准标记在涂胶面垂直方向上俯视重合，所述十字形对准标记使各个窄条滤光片间整齐对准，实现长度方向上的一致性；A cross-shaped alignment mark is processed by photolithography at the same position on both sides of the upper and lower glued surfaces of each narrow strip filter. The two cross-shaped alignment marks on the upper glued surface and the two crossed alignment marks on the lower glued surface The cross-shaped alignment marks are superimposed on the vertical direction of the glued surface, and the cross-shaped alignment marks make the narrow strips of filters align neatly to achieve consistency in the length direction; 在显微镜下进行涂胶面的十字形标记对准使得窄条滤光片之间整齐对准。Alignment of the cross marks on the glued side under the microscope allows for neat alignment between the narrow strip filters.
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CN103217731A (en) * 2013-04-22 2013-07-24 兰州空间技术物理研究所 Method for manufacturing multi-spectrum combining optical filter
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