CN107664784B - A kind of integrated form hyperfine spectrum sieve and preparation method thereof - Google Patents
A kind of integrated form hyperfine spectrum sieve and preparation method thereof Download PDFInfo
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- CN107664784B CN107664784B CN201710907082.1A CN201710907082A CN107664784B CN 107664784 B CN107664784 B CN 107664784B CN 201710907082 A CN201710907082 A CN 201710907082A CN 107664784 B CN107664784 B CN 107664784B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/006—Filter holders
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Abstract
The invention discloses a kind of integrated form hyperfine spectrum sieves, it is integrated using 8 or more fillet optical filter bondings, each face size, the accuracy of form and position for controlling each fillet optical filter are identical, the light pass surface for controlling each fillet optical filter is indefectible, the two-sided depth of parallelism is less than 3 μm, the coated face up and down of fillet optical filter is machined with cross-shaped alignment marks, realize that length direction accurately splices, the light pass surface after integrating is without step-like deviation, and flatness is less than 5 μm.The invention also discloses the methods for preparing above-mentioned integrated form hyperfine spectrum sieve, have the advantages that precision is high, integrated technique is mature, it is integrated after optical element surface overflow adhesive, the integrated form hyperfine spectrum sifter device prepared has the advantages that integrated level is high, consistency is high, precision is high, cost performance is high, stability is good, is suitable for high-resolution multi-spectral imager optical system.
Description
Technical field
The present invention relates to a kind of integrated form hyperfine spectrum sieves, are suitable for fine optical spectrum imagers optical system, belong to sky
Between optical field.
Background technique
Multi-spectral imager can collect spectral information abundant simultaneously, therefore in military investigation, meteorological research, accurate
Each equal fields such as agricultural are widely used.With the continuous development of spectral technique, common spectrum screening element is integrated due to spectral coverage
Spend low, preparation process is immature, and acquisition information is few, expensive etc., be increasingly difficult to meet the needs of users, in recent years how
Realize that the fine multispectral imaging of high performance-price ratio becomes the focus of attention.
There are mainly two types of method, same substrate preparation and multispectral narrow bandpass collection for the preparation of current multispectral optical element
At same substrate preparation has often led to following two problem: first is that spectral coverage resolution ratio more high finished product rate is lower, typically seen light
Wave band；Second is that steeply risen as spectral coverage resolution ratio increases cost, it is expensive.In contrast, multispectral narrow bandpass integration
Valence ratio is higher, but the multispectral optical element of existing integrated form often has following three: first is that integrated level is low；Second is that lacking
Weary benchmark leads to that consistency is poor, poor dimensional stability；Three are a lack of controlling unit, and complex process is complicated.
The Chinese invention patent of Publication No. CN103217731A discloses a kind of multispectral combination on July 24th, 2013
The preparation method of optical filter, provides bonded adhesives preparation, optical filter cleaning, and optical filter gluing is bonded adhesive curing, splices optical filter
A set of technique for sticking such as detection realize multispectral optical filter combination.But still for demands such as spectral coverage fining, high performance-price ratios
So have the following disadvantages: first, it is unable to control the dimensional uniformity of bonding front filter；Second, do not have in integrating process
Benchmark is easy to lead to working surface deviation, so that consistency is poor, precision is low；Third, the optical filter dimensional accuracy after integrating
It is low, the 4th, due to lacking multiple controlling units, integrated level is low.
Summary of the invention
In order to overcome the shortcomings of the prior art, the purpose of the present invention is to provide a kind of integrated form hyperfine spectrums
Sieve integrates the multispectral of eight spectrums or more, is used for high-resolution multi-spectral imager, splicing precision is high, stability is good, integrating process
Overflow adhesive, simple and easy to get, cost performance is high.
A kind of integrated form hyperfine spectrum sieve, if including each face size of dry plate, the identical fillet optical filter of the accuracy of form and position, institute
The light pass surface for stating fillet optical filter is indefectible, the two-sided depth of parallelism is less than 3 μm；Lead between the coated face of each fillet optical filter
It crosses resin bonding to integrate, be overlapped after neat bonding is directed between the coated face, the integrated form hyperfine spectrum sieve
Light pass surface without step-like deviation, flatness is less than 5 μm.
Preferably, the identical position in two sides of coated face is respectively provided with using photoetching technique above and below each fillet optical filter
One cross alignment mark, two cross-shaped alignment marks of upper coated face and two cross-shaped alignment marks of lower coated face
It overlooks and is overlapped in coated face vertical direction, the cross-shaped alignment marks make neatly to be aligned between each fillet optical filter.
Preferably, the quantity of the fillet optical filter is at least eight.
Preferably, the spectral coverage of each fillet optical filter is different, and configurable spectral coverage range is 400nm-1000nm.
Preferably, the resin is epoxy resin, so that integrated form hyperfine spectrum sieve is resistant to sinusoidal vibration
Test and 0~50 DEG C of thermal vacuum test.
A method of preparing integrated form hyperfine spectrum sieve, comprising the following steps:
Step 1: being processed each fillet optical filter, so that each face size, the morpheme of each fillet optical filter
Precision is identical；
Step 2: detecting the thickness of each fillet optical filter, each fillet filter after detecting working process under the microscope
Mating plate, picks out that light pass surface is indefectible, two-sided fillet optical filter of the depth of parallelism less than 3 μm, wiped clean；
Step 3: benchmark of the selection flatness less than 3 μm leans on face, the light pass surface of current slice fillet optical filter and the benchmark
Predetermined position is slid into while conjunction by face paste, uniformly coats epoxy resin in the upper coated face of current slice fillet optical filter；
Under light pass surface and the benchmark of a piece of fillet optical filter slide while closed by face paste, a piece of fillet filters under making
The lower coated face of piece slides fitting, a piece of fillet optical filter under after being neatly aligned with the upper coated face of current slice fillet optical filter
Upper coated face uniformly coat epoxy resin；
Alignment, the fitting, gluing process of a piece of fillet optical filter, complete the bonding collection of all fillet optical filters under repeating
At the upper coated face of last a piece of fillet optical filter is not coated with epoxy resin.
Preferably, further comprising the steps of before the step 3:
The identical position in two sides of coated face respectively processes a cross using photoetching technique above and below each fillet optical filter
Type alignment mark, two cross-shaped alignment marks of upper coated face and two cross-shaped alignment marks of lower coated face are in coated face
It overlooks and is overlapped in vertical direction, the cross-shaped alignment marks make neatly to be aligned between each fillet optical filter, realize length
Consistency on direction.
Preferably, the cross shape marks for carrying out the coated face under the microscope are aligned so that neat between fillet optical filter
Alignment.
Preferably, the process of epoxy resin is coated are as follows:
Hollow out thin slice is placed in fitting on the coated face of fillet optical filter, and the center line and fillet optical filter in hollow out gap apply
The center line of glue surface is overlapped, and is filled epoxy resin by glue injecting head and is removed the hollow out thin slice behind the hollow out gap.
Preferably, the width that the hollow out gap is arranged is less than the 1/10 of the coated face width, controls epoxy resin
Coated weight makes overflow adhesive after being compacted be bonded between fillet optical filter.
The method that the present invention prepares integrated form hyperfine spectrum sieve guarantees the consistent of fillet optical filter by Combined machining
Property；High splicing precision is realized using special splicing apparatus, processes cross alignment on fillet optical filter using photoetching technique
Benchmark realizes that length direction accurately splices；Realize that bonding process glue-spread is controllable using special glue stations, realize 8 spectrums with
Upper multispectral superelevation integrated level；It is high with precision, integrated technique is mature, it is integrated after optical element surface overflow adhesive it is excellent
Point.The light pass surface of integrated form hyperfine spectrum sieve of the invention without step-like deviation, flatness less than 5 μm, have integrated level it is high,
The advantage that consistency is high, precision is high, cost performance is high, stability is good.
Detailed description of the invention
Fig. 1 is the structural schematic diagram that the integrated form hyperfine spectrum of an embodiment sieves.
Fig. 2 is an embodiment by the integrated method for preparing integrated form hyperfine spectrum sieve of cross-shaped alignment marks alignment
Schematic diagram.
Fig. 3 is the method schematic diagram that integrated form hyperfine spectrum sieve is prepared using hollow out thin slice gluing of an embodiment.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing and specific implementation
Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only to explain this hair
It is bright, but not to limit the present invention.
The present invention provides a kind of integrated form hyperfine spectrum sieves, if including each face size of dry plate, the accuracy of form and position it is identical
Fillet optical filter, the light pass surface of the fillet optical filter is indefectible, the two-sided depth of parallelism is less than 3 μm；Each fillet optical filter
Coated face between integrated by resin bonding, be overlapped after neat bonding is directed between coated face, integrated form is hyperfine
The light pass surface of spectrum sieve is without step-like deviation, and flatness is less than 5 μm.
Referring to Fig.1, the structural schematic diagram sieved for the integrated form hyperfine spectrum of an embodiment integrates in the present embodiment
Formula hyperfine spectrum sieve 9 includes fillet optical filter 1-8, and each face size, the accuracy of form and position of fillet optical filter 1-8 is all the same.Fillet
The spectral coverage of optical filter 1-8 is all different, and spectral coverage range is 400nm-1000nm.Pass through aviation ring between fillet optical filter 1-8
Oxygen resin gluing integrates, and is first directed at the coated face of fillet optical filter 1-8 neatly before gluing, so that fillet is filtered two-by-two
It is overlapped after coated face gluing between mating plate.Without step-like deviation, flatness is less than the light pass surface of integrated form hyperfine spectrum sieve 9
5μm。
In the present embodiment, it carries out gluing using epoxy resin to integrate, so that integrated form hyperfine spectrum sieve 9 can satisfy
Space flight grade application demand is resistant to sinusoidal vibration test and 0~50 DEG C of thermal vacuum test.
In the present embodiment, the two sides of the coated face up and down of fillet optical filter 1-8 use photoetching technique in identical position
It is respectively provided with a cross alignment mark, two cross-shaped alignment marks of upper coated face and two cross pair of lower coated face
Fiducial mark note is overlooked in coated face vertical direction to be overlapped.Cross is equipped in the two sides of the coated face up and down of fillet optical filter 1-8
Alignment mark, it is therefore an objective to so that can be neatly aligned between each fillet optical filter, realize and be integrated on fillet optical filter length direction
Consistency.
In some embodiments, the integrated of 8 or more fillet optical filters can be set as needed, be prepared into 8 spectrums or more
Integrated form hyperfine spectrum sieve.
Integrated form hyperfine spectrum sieve of the invention, it is integrated using 8 or more fillet optical filter bondings, control each fillet
Each face size, the accuracy of form and position of optical filter are identical, and the light pass surface for controlling each fillet optical filter is indefectible, the two-sided depth of parallelism is less than
3 μm, the coated face up and down of fillet optical filter is machined with cross-shaped alignment marks, realizes that length direction accurately splices, after integrating
Light pass surface is without step-like deviation, and flatness is less than 5 μm.Integrated form hyperfine spectrum sifter device of the invention has integrated level high, consistent
Property high, precision is high, cost performance is high, stability is good advantage, be suitable for high-resolution multi-spectral imager optical system, it is especially suitable
Conjunction is applied in fields such as aerospace, military investigation, meteorological research, precision agriculture, forest fire protection and seashore cruises.
The present invention also provides a kind of methods for preparing integrated form hyperfine spectrum sieve, comprising the following steps:
Step 1: being processed each fillet optical filter, so that each face size, the morpheme of each fillet optical filter
Precision is identical；
Step 2: detecting the thickness of the fillet optical filter, the fillet filter after detecting working process under the microscope
Mating plate, picks out that light pass surface is indefectible, two-sided less than 3 μm fillet optical filters of the depth of parallelism, wiped clean；
Step 3: benchmark of the selection flatness less than 3 μm leans on face, the light pass surface of current slice fillet optical filter and the benchmark
Predetermined position is slid into while conjunction by face paste, uniformly coats epoxy resin in the upper coated face of current slice fillet optical filter；
Under light pass surface and the benchmark of a piece of fillet optical filter slide while closed by face paste, a piece of fillet filters under making
The lower coated face of piece slides fitting, a piece of fillet optical filter under after being neatly aligned with the upper coated face of current slice fillet optical filter
Upper coated face uniformly coat epoxy resin；
Alignment, the fitting, gluing process of a piece of fillet optical filter, complete the bonding collection of all fillet optical filters under repeating
At the upper coated face of last a piece of fillet optical filter is not coated with epoxy resin.
It in some embodiments, is that being aligned by cross-shaped alignment marks for an embodiment integrates preparation collection referring to Fig. 2
The method schematic diagram of accepted way of doing sth hyperfine spectrum sieve, further comprising the steps of before carrying out step 3:
The identical position in two sides of coated face respectively processes a cross using photoetching technique above and below each fillet optical filter
Type alignment mark 11, two cross-shaped alignment marks 11 of upper coated face are being applied with two cross-shaped alignment marks of lower coated face
It overlooks and is overlapped in glue surface vertical direction.It is right between the cross shape marks 11 of fillet optical filter coated face two-by-two to carry out under the microscope
Standard, so that being neatly aligned between fillet optical filter, alignment precision is high.
In some preferred embodiments, referring to Fig. 3, integrated form is prepared for the use hollow out thin slice gluing of an embodiment
The method schematic diagram of hyperfine spectrum sieve carries out gluing using hollow out thin slice 12, and benchmark is designed to that two sides are outstanding by face 10
Abnormity reserves the operable space of hollow out thin slice 12.
The wherein process of step 3 kind coating epoxy resin are as follows: fitting is placed and engraved on the upper coated face of fillet optical filter 1
The center line of empty thin slice 12, hollow out gap 13 is overlapped with the center line of coated face on fillet optical filter 1, by glue injecting head 14 by ring
After oxygen resin fills hollow out gap 13, hollow out thin slice 12 is removed.
Then fitting is slid after the lower coated face of fillet optical filter 2 is neatly aligned with the upper coated face of fillet optical filter 1, so
The process of above-mentioned coating epoxy resin is repeated to the upper coated face of fillet optical filter 2 afterwards, the patch of a piece of fillet optical filter under repeating
It closes, gluing process, until no longer coating epoxy resin, integrated form on its surface after the completion of last a piece of fillet optical filter fitting
Hyperfine spectrum sieve preparation is completed.
In some preferred embodiments, 1/10 of width less than coated face width in hollow out gap 13 is also set up, and
The coated weight of control epoxy resin makes overflow adhesive after being compacted be bonded between fillet optical filter.
The method that the present invention prepares integrated form hyperfine spectrum sieve guarantees the consistent of fillet optical filter by Combined machining
Property；High splicing precision is realized using special splicing apparatus, processes cross alignment on fillet optical filter using photoetching technique
Benchmark realizes that length direction accurately splices；Realize that bonding process glue-spread is controllable using special glue stations, realize 8 spectrums with
Upper multispectral superelevation integrated level；It is high with precision, integrated technique is mature, it is integrated after optical element surface overflow adhesive it is excellent
Point, the light pass surface of integrated form hyperfine spectrum sieve is without step-like deviation after integrating, and flatness is less than 5 μm.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
Member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should be regarded as
Protection scope of the present invention.
Claims (2)
1. a kind of integrated form hyperfine spectrum sieve, which is characterized in that if including each face size of dry plate, the identical fillet of the accuracy of form and position
Optical filter, the light pass surface of the fillet optical filter is indefectible, the two-sided depth of parallelism is less than 3 μm；The coated face of each fillet optical filter
Between integrated by resin bonding, be overlapped after neat bonding is directed between the coated face, the integrated form is hyperfine
The light pass surface of spectrum sieve is without step-like deviation, and flatness is less than 5 μm；
The identical position in two sides of coated face is respectively provided with a cross alignment using photoetching technique above and below each fillet optical filter
Label, two cross-shaped alignment marks of upper coated face and two cross-shaped alignment marks of lower coated face are in coated face Vertical Square
It overlooks and is overlapped upwards, the cross-shaped alignment marks make neatly to be aligned between each fillet optical filter；
The quantity of the fillet optical filter is at least eight；
The spectral coverage of each fillet optical filter is different, and configurable spectral coverage range is 400nm-1000nm；
The resin is epoxy resin, and the integrated form hyperfine spectrum sieve is made to be resistant to sinusoidal vibration test and 0~50 DEG C
Thermal vacuum test.
2. a kind of method for preparing integrated form hyperfine spectrum sieve described in claim 1, which is characterized in that including following step
It is rapid:
Step 1: being processed each fillet optical filter, so that each face size, the accuracy of form and position of each fillet optical filter
It is identical；
Step 2: detecting the thickness of each fillet optical filter, detects each fillet optical filter after working process under the microscope,
Pick out that light pass surface is indefectible, two-sided fillet optical filter of the depth of parallelism less than 3 μm, wiped clean；
Step 3: benchmark of the selection flatness less than 3 μm leans on face, and the light pass surface of current slice fillet optical filter and the benchmark lean on face
Predetermined position is slid into while fitting, uniformly coats epoxy resin in the upper coated face of current slice fillet optical filter: being filtered in fillet
Hollow out thin slice, the center line in hollow out gap and the center line weight of fillet optical filter coated face are placed in fitting on the coated face of mating plate
It closes, epoxy resin is filled by glue injecting head and is removed the hollow out thin slice behind the hollow out gap, the width in the hollow out gap
Degree is less than the 1/10 of the coated face width, and the coated weight for controlling epoxy resin makes nothing after being compacted fitting between fillet optical filter overflow
Glue；
Under light pass surface and the benchmark of a piece of fillet optical filter slide while closed by face paste, a piece of fillet optical filter under making
Lower coated face slides fitting after being neatly aligned with the upper coated face of current slice fillet optical filter, and a piece of fillet optical filter is upper under
Coated face uniformly coats epoxy resin；
Alignment, the fitting, gluing process of a piece of fillet optical filter under repeating, the bonding for completing all fillet optical filters is integrated, most
The upper coated face of a piece of fillet optical filter is not coated with epoxy resin afterwards；
It is further comprising the steps of before the step 3:
Above and below each fillet optical filter the identical position in two sides of coated face using photoetching technique respectively process one it is cross right
Fiducial mark note, two cross-shaped alignment marks of upper coated face and two cross-shaped alignment marks of lower coated face are vertical in coated face
It overlooks and is overlapped on direction, the cross-shaped alignment marks make neatly to be aligned between each fillet optical filter, realize on length direction
Consistency；
The cross shape marks for carrying out coated face under the microscope are aligned so that being neatly aligned between fillet optical filter.
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| CN114506089B (en) * | 2022-01-18 | 2024-01-05 | 北京智创芯源科技有限公司 | Preparation method of infrared multi-band optical filter |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP3923113B2 (en) * | 1996-11-11 | 2007-05-30 | 日本真空光学株式会社 | Bonding filter |
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