CN203572768U - Crystal liquid birefraction effect-based high-resolution polarization spectrum imaging system - Google Patents
Crystal liquid birefraction effect-based high-resolution polarization spectrum imaging system Download PDFInfo
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- CN203572768U CN203572768U CN201320797124.8U CN201320797124U CN203572768U CN 203572768 U CN203572768 U CN 203572768U CN 201320797124 U CN201320797124 U CN 201320797124U CN 203572768 U CN203572768 U CN 203572768U
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Abstract
The utility model discloses a crystal liquid birefraction effect-based high-resolution polarization spectrum imaging system. The crystal liquid birefraction effect-based high-resolution polarization spectrum imaging system comprises an optical imaging lens, a liquid crystal polarization spectrum modulator, an image sensor, a power supply control system and a data processing center. The whole crystal liquid birefraction effect-based high-resolution polarization spectrum imaging system is operated by electric control without mechanical modulation, so the detection speed is fast and the detection precision is high; the measuring wavelength and polarization state can be freely adjusted in the whole detection spectrum band, and the full polarization spectrum image of a target is obtained; the whole system is simple in structure, small in size, light in weight, strong in transportability, and suitable for diversified detection platforms.
Description
Technical field
The utility model relates to the imaging system of optical field, specifically refers to a kind of high-resolution polarization spectrum imaging system based on liquid crystal birefringence rate effect.
Background technology
The mankind couple and the perception of objective world are to be based upon on the coherent signal basis that sensor is sent to human brain, and several century experimental science development greatly expanded ability and the scope of human perception objective world.In numerous sensor signals, be sent in the process of human brain, human visual system has played critical effect.Human visual system can perception certain limit in light wavelength and Strength Changes, but the shear wave characteristic of light wave, wavelength and intensity are only parts for light wave essential characteristic, even visible in visible-range, human visual system also can only the perception external world partial information, the entrained information of polarisation of light cannot be by the perception of human eye institute, and human visual system also cannot realize the precise light spectrum discrimination in optical information in addition.
Polarization spectrum imaging system is by parameters such as the spectral coverage of control incident light and polarization states, target is carried out to imaging, the key character of polarization spectrum imaging system and sign are polarization information, spectral information and the spatial informations that can simultaneously obtain target, form the data cube that comprises target light intensity, polarization and spectral information.High-resolution polarization spectrum imaging equipment can be realized the mutual supplement with each other's advantages of polarization imaging technology and light spectrum image-forming technology, effectively increase the quantity of information of optical detection, complete Boundary Extraction and the feature identification of target in complex environment, realize the multimodal information fusion of optical imagery, the target of under common imaging system " invisible " is become " visible ", thereby promote the fast development of infotech.At airborne remote sensing, agricultural weather and flood emergency monitoring, environment monitoring, criminal investigation material evidence, identify and the field such as target detection has significant application value and application prospect widely.
Polarization spectrum imaging technology is owing to being with a wide range of applications, and therefore some countries in the world, as the U.S., Canada, Australia, France, Germany etc., competitively drop into ample resources and carry out the development and application of polarization spectrum instrument system.Through the effort of more than 20 years, people's development and design success multiple polarization spectrum imaging sniffer, but also there is no the imaging polarization spectrum detection instrument of the universal standard at present.In existing imaging Intensity modulation, spectral modulation technology is mainly divided into four kinds of technology such as color dispersion-type, interfere type, optical filter wheel type and automatically controlled modulation type.Automatically controlled modulation technique is mainly with tuning (the Liquid Crystal Tunable Filter of liquid crystal, LCTF) and acousto-optic tunable (Acousto-Optic Tunable Filter, AOTF) mode is carried out the adjusting of automatic spectrum spectral coverage, wherein LCTF regulates spectral coverage in the mode of light intensity attenuation, and AOTF sets up the mode of mobile diffraction grating and regulates by apply radio frequency sound wave to birefringece crystal; Utilize tunable optical filter to replace mechanical optical filter runner, wave band quantity rises to up to a hundred even thousands of, can realize quick wave band switches, the function that channel position can real-time online be adjusted, and system can retain the high spatial resolution of traditional optical filter wheel system, thereby realize the combination of high spatial resolution and high spectral resolution.In existing imaging Intensity modulation, polarization Modulation mainly changes polarization state in the mode of rotatory polarization sheet or control phase delayer; And gather the ageing of image in order to guarantee, adopt the collaborative mode of Electric Machine Control rotation, light splitting or multiple-camera to gather image more.
Japanese national aeronautical laboratory has designed and produced a mode that adopts electricity to adjust optical filter to add motor rotation for 1999 and has gathered the Intensity modulation of image, this system utilizes LCTF as spectral modulation system, and using LCTF entirety as a polaroid, the mode of rotating LCTF by machinery realizes Polarization Modulation, thereby has realized the polarization spectrum image acquisition within the scope of 400nm ~ 1100nm.The polarization spectrum imaging instrument of AUS research laboratory design in 2002 is mainly by AOTF and liquid crystal adjustable phase retarder (Liquid Crystal Variable Retarder, LCVR) combine, covered the spectral range of 0.4 μ m ~ 11.5 μ m, because system is all by Electronic Control, so real-time is better, but acousto-optic sensor itself is very sensitive to noise, so imaging signal to noise ratio (S/N ratio) is lower.European Space Agency/European Space Technical Center Earth Observations Programs department utilizes two Brewster prisms to carry out light splitting modulation tissue and has developed space flight polarization remote sensing polarization observing unit, and has carried out earth ozone observation.The POLDER of France's Center For Space Research adopts polaroid, filter plate structure, and solar radiation and degree of polarization are carried out to global observation, can extract atmospheric aerosol and cloud layer information.
From current domestic and international research, find out, polarization spectrum imaging detection system at present, the most of system of deep space probing system for use in carrying that field is studied adopts machinery modulation method, not only because mechanical shaking has certain deviation to imaging, and cannot realize dynamic real time imagery.Current airborne polarization spectrum system adopts color dispersion-type modulation technique to carry out spectral modulation more in addition, and the mode that is equipped with mechanical rotatory polarization sheet is carried out polarization adjusting, this system is limited by technical characterstic, and volume and weight is larger conventionally, to carrying platform, requires more severe.
Utility model content
The purpose of this utility model is to provide a kind of high-resolution polarization spectrum imaging system based on liquid crystal birefringence rate effect, solves mechanical shaking in prior art imaging is had to certain deviation, and cannot realize the problem of dynamic real time imagery.
The purpose of this utility model is achieved through the following technical solutions:
A high-resolution polarization spectrum imaging system based on liquid crystal birefringence rate effect, comprising:
Optical imaging lens, is positioned at whole optical system foremost, for measured target being imaged in to imageing sensor focal plane;
Liquid crystal polarized spectrum modulator, is positioned at the rear of imaging lens, for incident light is carried out to spectrum light splitting and phase-modulation;
Imageing sensor, is positioned at liquid crystal polarized spectrum modulator rear, for receiving the light signal of liquid crystal polarization spectrum modulator output, and surveys the light radiation intensity information of incident light, and carries out image acquisition;
Power control system: comprise automatic control circuit board, automatic control circuit board is connected with temperature controller, power-supply controller of electric, video memory respectively, wherein temperature controller, power-supply controller of electric are connected with liquid crystal polarized spectrum modulator simultaneously, and automatic control circuit board is controlled respectively temperature and the power supply of liquid crystal polarized spectrum modulator by temperature controller, power-supply controller of electric; Video memory is connected with imageing sensor, the order that automatic control circuit board control chart image-position sensor sends to video memory, and control video memory and want the communication of data processing centre (DPC);
Data processing centre (DPC), for carrying out computational analysis, also final imaging to the picture of data memory transfer.
The utility model is by automatic control circuit board in power control system and the communication connection of liquid crystal polarized spectrum modulator, utilize temperature controller and power-supply controller of electric as the interlocutory order topworks that controls liquid crystal polarized spectrum modulator state, thereby adjust the parameter state of liquid crystal polarized spectrum modulator, power-supply controller of electric is exported one group of multichannel low pressure alternating signal, drives the work of liquid crystal polarized spectrum modulator; Liquid crystal polarized spectrum modulator, under driving voltage effect, carries out filtering and polarization state modulation to the light signal from scenery; The light signal from scenery that imageing sensor is accepted to see through liquid crystal polarized spectrum modulator is to Scenery Imaging, image capture device receives the picture signal of imageing sensor, data processing software by the picture collecting is merged, enhancing, noise reduction process, and finally realize the imaging output of polarization spectrum image.
Described liquid crystal polarized spectrum modulator comprises liquid crystal adjustable optical filter LCTF, the liquid crystal wave plate LC1, the liquid crystal wave plate LC2 that stack successively, wherein, liquid crystal wave plate LC1 quick shaft direction and reference levels angular separation θ are 0 °, and in liquid crystal wave plate LC2 and liquid crystal adjustable optical filter LCTF, the quick shaft direction of liquid crystal ripple and reference levels angular separation θ are 45 °.Liquid crystal polarized spectrum controller comprises 10 liquid crystal wave plate LC1, LC2, LC3, LC4, LC5, LC6, LC7, LC8, LC9, LC10,8 polaroid P1, P2, P3, P4, P5, P6, P7, P8, and 5 stationary phase retardation plate R1, R2, R3, R4, R5, wherein liquid crystal wave plate LC1 quick shaft direction and reference levels angular separation θ are 0 °, and LC2～LC10 quick shaft direction and reference levels angular separation θ are 45 °; 8 polaroids are arranged parallel to each other, and transmission direction and reference levels angular separation are 90 °; The quick shaft direction of 5 stationary phase retardation plates and reference levels angular separation are 45 °, the phase-delay quantity of 5 stationary phase retardation plates determines according to birefringence rate variance Δ n and the cascade progression of liquid crystal wave plate, and liquid crystal polarized spectrum modulator is divided into spectrum spectral module and polarization state modulation module: the liquid crystal adjustable optical filter LCTF spectrum spectral module of wherein LC3～LC10, P1～P8 and R1～R5 composition Leo configuration; Spectrum spectral module is whole, and to regard a transmission direction and reference levels angular separation as be the linear polarizer of 90 °, jointly can form polarization state modulation module with LC1 and LC2, liquid crystal wave plate LC1 and LC2 are mainly used in Polarization Modulation, and liquid crystal wave plate and polaroid is below arranged parallel to each other, interval stacks, and is mainly used in realizing spectrum light splitting function.Spectrum spectral module principle of work in liquid crystal polarized spectrum modulator: spectrum spectral module is mainly liquid crystal Leo configuration, by the multi-stage cascade of being permitted being arranged in parallel, formed, every one-level comprises two polaroids that are parallel to each other, the optical birefringence rate unit that sandwich is comprised of liquid crystal wave plate and stationary phase retardation plate.When incident light enters first order polaroid, incident light is decomposed into two identical components of crystallographic axis along optical birefringence rate unit, by change, be applied to voltage on optical birefringence rate unit and can cause the variation of the refractive index on one of them crystallographic axis, phase-delay quantity between two components produces phase differential, on outgoing polaroid, two components are combined as a polarization state again.Relative delay between two components is relevant with wavelength, and therefore Leo configurational unit can be selected the wavelength seeing through.By multistage Leo configurational unit is carried out to cascade, and according to rule, change the on-load voltage of every one-level, thereby can realize spectrum light splitting function.Polarization state modulation module mainly contains liquid crystal wave plate LC1, liquid crystal wave plate LC2 and 1 liquid crystal adjustable optical filter LCTF spectrum spectral module composition, by changing the on-load voltage of liquid crystal wave plate LC1 and liquid crystal wave plate LC2, make the phase-delay quantity (δ 1 of liquid crystal wave plate LC1 and liquid crystal wave plate LC2, δ 2) be respectively (0 °, 0 °), (0 °, 90 °), (90 °, 90 °) and (0 °, 180 °), the plot of light intensity that so now imageing sensor obtains looks like to be respectively (0 ° of I ', 0 °), (0 ° of I ', 90 °), (90 ° of I ', 90 °) and (0 ° of I ', 180 °), the Stokes component (I of incident light, Q, U, V) be:
The utility model polarization spectrum modulator provides three kinds of mode of operations: (1) individual spectral is divided optical mode: now two liquid crystal retardation of wave plate δ are fixed as 0 above, by liquid crystal wave plate and polaroid below, make its transmission passband central wavelength lambda 0 in certain spectral, carry out spectral scan under the control of driving governor; (2) independent polarimetry pattern: the driving voltage of fixing liquid crystal wave plate below, make the transmission passband central wavelength lambda 0 of polarization spectrum modulator be fixed on a certain assigned address, now by loading different voltage, according to specific mode, regulate successively the phase-delay quantity (δ 1 of the first two liquid crystal wave plate, δ 2), and can obtain the corresponding polarization image of the detection of a target by Inversion Calculation; (3) polarization spectrum pattern: increase spectral scan on the basis of independent polarimetry pattern, each spectral coverage is carried out to a polarimetry, thereby can obtain whole spectral informations and the polarization information of the detection of a target.
Described liquid crystal wave plate comprises two transparency carriers, at two relative faces of transparency carrier, is coated with alignment films, is provided with transparent dottle pin between two alignment films, between two alignment films, is filled with liquid crystal layer.
Between described transparency carrier and alignment films, be also provided with nesa coating.In order to control the phase retardation of optical phase, can utilize electrode at nesa coating, to apply the voltage of certain amplitude, for liquid crystal layer provides an electric field along optical direction, the sensing of liquid crystal molecule is rotated, thereby change the optics bit phase delay of liquid crystal wave plate.Because the size of electric field can reach meticulous control by controlling voltage, therefore optical phase put-off of the present utility model can regulate meticulously and accurately control, can be by accurately controlling the working temperature of liquid crystal polarized spectrum modulator, the drift producing thereby the work centre wavelength of restraining polarization spectrum modulator varies with temperature, thus spectral resolution and the measuring polarization state precision of system can significantly be improved.
In a described liquid crystal wave plate, the frictional direction of two alignment films is antiparallel.
Described transparent dottle pin adopts glass fibre, glass microballoon or plastics microballon to make.
The utility model compared with prior art, has following advantage and beneficial effect:
A kind of high-resolution polarization spectrum imaging system based on liquid crystal birefringence rate effect of 1 the utility model, utilize temperature controller and power-supply controller of electric as the interlocutory order topworks that controls liquid crystal polarized spectrum modulator state, thereby adjust the parameter state of liquid crystal polarized spectrum modulator, power-supply controller of electric is exported one group of multichannel low pressure alternating signal, drives the work of liquid crystal polarized spectrum modulator; Liquid crystal polarized spectrum modulator, under driving voltage effect, carries out filtering and polarization state modulation to the light signal from scenery; The light signal from scenery that imageing sensor is accepted to see through liquid crystal polarized spectrum modulator is to Scenery Imaging, image capture device receives the picture signal of imageing sensor, data processing software by the picture collecting is merged, enhancing, noise reduction process, and finally realize the imaging output of polarization spectrum image;
A kind of high-resolution polarization spectrum imaging system based on liquid crystal birefringence rate effect of 2 the utility model, the full electric control operation of whole system, machinery-free modulation, therefore speed of detection is fast, and detection accuracy is high; Can in whole detection spectral coverage, adjust arbitrarily and measure wavelength and polarization state, obtain the full-polarization spectrum image of target; Whole system is simple in structure, volume is little, lightweight, portability is strong, is applicable to multiple test platform;
A kind of high-resolution polarization spectrum imaging system based on liquid crystal birefringence rate effect of 3 the utility model, because the size of electric field can reach meticulous control by controlling voltage, therefore optical phase put-off of the present utility model can regulate meticulously and accurately control, can be by accurately controlling the working temperature of liquid crystal polarized spectrum modulator, the drift producing thereby the work centre wavelength of restraining polarization spectrum modulator varies with temperature, thus spectral resolution and the measuring polarization state precision of system can significantly be improved.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide the further understanding to the utility model embodiment, forms the application's a part, does not form the restriction to the utility model embodiment.In the accompanying drawings:
Fig. 1 is the utility model theory diagram;
Fig. 2 is the structural representation of the liquid crystal polarized spectrum modulator of the utility model;
Fig. 3 is the structural representation of the utility model liquid crystal wave plate.
Mark and corresponding parts title in accompanying drawing:
1-liquid crystal wave plate, 101-transparency carrier, 102-alignment films, the transparent dottle pin of 103-, 104-liquid crystal layer, 105-nesa coating, 2-matching fluid or coupling glue.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with embodiment and accompanying drawing, the utility model is described in further detail, exemplary embodiment of the present utility model and explanation thereof are only for explaining the utility model, and conduct is not to restriction of the present utility model.
Embodiment
As shown in Figures 1 to 3, a kind of high-resolution polarization spectrum imaging system based on liquid crystal birefringence rate effect of the utility model, comprise optical imaging lens, be positioned at whole optical system foremost, for measured target is imaged in to imageing sensor focal plane, adopt C-mount interface and F-mount interface, can select microspur according to application, far away burnt, focus isotype, in the present embodiment, adopt Nikon AF-S 24-70 f2.8G ED camera lens, this camera lens can carry out zoom within the scope of 24mm～70mm, and there is the large aperture of F/2.8, can meet in-plant static state or dynamic object optical information and survey demand, liquid crystal polarized spectrum modulator, be positioned at the rear of imaging lens, for incident light is carried out to spectrum light splitting and phase-modulation, liquid crystal polarized spectrum controller comprises 10 liquid crystal wave plate LC1, LC2, LC3, LC4, LC5, LC6, LC7, LC8, LC9, LC10,8 polaroid P1, P2, P3, P4, P5, P6, P7, P8, and 5 stationary phase retardation plate R1, R2, R3, R4, R5, wherein liquid crystal wave plate LC1 quick shaft direction and reference levels angular separation θ are 0 °, and LC2～LC10 quick shaft direction and reference levels angular separation θ are 45 °, 8 polaroids are arranged parallel to each other, and transmission direction and reference levels angular separation are 90 °, the quick shaft direction of 5 stationary phase retardation plates and reference levels angular separation are 45 °, the phase-delay quantity of 5 stationary phase retardation plates determines according to birefringence rate variance Δ n and the cascade progression of liquid crystal wave plate, and liquid crystal polarized spectrum modulator is divided into spectrum spectral module and polarization state modulation module: the liquid crystal adjustable optical filter LCTF spectrum spectral module of wherein LC3～LC10, P1～P8 and R1～R5 composition Leo configuration, spectrum spectral module is whole, and to regard a transmission direction and reference levels angular separation as be the linear polarizer of 90 °, jointly can form polarization state modulation module with LC1 and LC2, liquid crystal wave plate LC1 and LC2 are mainly used in Polarization Modulation, and liquid crystal wave plate and polaroid is below arranged parallel to each other, interval stacks, be mainly used in realizing spectrum light splitting function, wherein liquid crystal wave plate LC1～LC10 comprises two transparency carriers 101, at two relative faces of transparency carrier 10, be coated with alignment films 102, between two alignment films 102, be provided with transparent dottle pin 103, between two alignment films, be filled with liquid crystal layer 104, between transparency carrier 101 and alignment films 102, be also provided with nesa coating 105, by the working temperature of the liquid crystal polarized spectrum modulator of accurate control, the drift producing thereby the work centre wavelength of restraining polarization spectrum modulator varies with temperature, thereby can significantly improve spectral resolution and the measuring polarization state precision of system, in a liquid crystal wave plate, the frictional direction of two alignment films 102 is antiparallel, and transparent dottle pin 103 adopts glass fibre, glass microballoon or plastics microballon to make, imageing sensor, is positioned at liquid crystal polarized spectrum modulator rear, for receiving the light signal of liquid crystal polarization spectrum modulator output, and surveys the light radiation intensity information of incident light, and carries out image acquisition, power control system: comprise automatic control circuit board, automatic control circuit board is connected with temperature controller, power-supply controller of electric, video memory respectively, wherein temperature controller, power-supply controller of electric are connected with liquid crystal polarized spectrum modulator simultaneously, and automatic control circuit board is controlled respectively temperature and the power supply of liquid crystal polarized spectrum modulator by temperature controller, power-supply controller of electric, video memory is connected with imageing sensor, the order that automatic control circuit board control chart image-position sensor sends to video memory, and control video memory and want the communication of data processing centre (DPC), data processing centre (DPC), for carrying out computational analysis, also final imaging to the picture of data memory transfer.
Above-described embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; institute is understood that; the foregoing is only embodiment of the present utility model; and be not used in limit protection domain of the present utility model; all within spirit of the present utility model and principle, any modification of making, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.
Claims (6)
1. the high-resolution polarization spectrum imaging system based on liquid crystal birefringence rate effect, is characterized in that, comprising:
Optical imaging lens, is positioned at whole optical system foremost, for measured target being imaged in to imageing sensor focal plane;
Liquid crystal polarized spectrum modulator, is positioned at the rear of imaging lens, for incident light is carried out to spectrum light splitting and phase-modulation;
Imageing sensor, is positioned at liquid crystal polarized spectrum modulator rear, for receiving the light signal of liquid crystal polarization spectrum modulator output, and surveys the light radiation intensity information of incident light, and carries out image acquisition;
Power control system: comprise automatic control circuit board, automatic control circuit board is connected with temperature controller, power-supply controller of electric, video memory respectively, wherein temperature controller, power-supply controller of electric are connected with liquid crystal polarized spectrum modulator simultaneously, and automatic control circuit board is controlled respectively temperature and the power supply of liquid crystal polarized spectrum modulator by temperature controller, power-supply controller of electric; Video memory is connected with imageing sensor, the order that automatic control circuit board control chart image-position sensor sends to video memory, and control video memory and want the communication of data processing centre (DPC);
Data processing centre (DPC), for carrying out computational analysis, also final imaging to the picture of data memory transfer.
2. a kind of high-resolution polarization spectrum imaging system based on liquid crystal birefringence rate effect according to claim 1, it is characterized in that: described liquid crystal polarized spectrum modulator comprises liquid crystal adjustable optical filter LCTF, the liquid crystal wave plate LC1, the liquid crystal wave plate LC2 that stack successively, wherein, liquid crystal wave plate LC1 quick shaft direction and reference levels angular separation θ are 0 °, and in liquid crystal wave plate LC2 and liquid crystal adjustable optical filter LCTF, the quick shaft direction of liquid crystal ripple and reference levels angular separation θ are 45 °.
3. a kind of high-resolution polarization spectrum imaging system based on liquid crystal birefringence rate effect according to claim 2, it is characterized in that: described liquid crystal wave plate comprises two transparency carriers (101), at the relative face of two transparency carriers (101), be coated with alignment films (102), between two alignment films (102), be provided with transparent dottle pin (103), between two alignment films (102), be filled with liquid crystal layer (104).
4. a kind of high-resolution polarization spectrum imaging system based on liquid crystal birefringence rate effect according to claim 3, is characterized in that: between described transparency carrier (101) and alignment films (102), be also provided with nesa coating (105).
5. according to a kind of high-resolution polarization spectrum imaging system based on liquid crystal birefringence rate effect described in claim 3 or 4, it is characterized in that: in a described liquid crystal wave plate, the frictional direction of two alignment films (102) is antiparallel.
6. a kind of high-resolution polarization spectrum imaging system based on liquid crystal birefringence rate effect according to claim 5, is characterized in that: described transparent dottle pin (103) adopts glass fibre, glass microballoon or plastics microballon to make.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103983649A (en) * | 2014-05-27 | 2014-08-13 | 中国工程物理研究院流体物理研究所 | Foreign substance detection system based on spectral imaging and foreign substance detection method based on spectral imaging |
| CN104330363A (en) * | 2014-10-30 | 2015-02-04 | 厦门市美亚柏科信息股份有限公司 | Spectral imaging analysis system, imaging and analyzing method using same |
| CN105444883A (en) * | 2015-12-22 | 2016-03-30 | 武汉麦视威光电科技有限公司 | Imaging spectrometer based on liquid crystal tunable optical filter and full spectrum range automatic acquiring method |
| CN105987754A (en) * | 2015-03-04 | 2016-10-05 | 中国人民解放军电子工程学院 | Imager integrating hyperspectral and polarization hyperspectral detectability |
| CN112129704A (en) * | 2020-11-25 | 2020-12-25 | 中国工程物理研究院流体物理研究所 | Focus-dividing planar polarization imaging device based on liquid crystal microarray device |
| CN112798614A (en) * | 2020-12-25 | 2021-05-14 | 长江存储科技有限责任公司 | Semiconductor machine and detection method |
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- 2013-12-09 CN CN201320797124.8U patent/CN203572768U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103983649A (en) * | 2014-05-27 | 2014-08-13 | 中国工程物理研究院流体物理研究所 | Foreign substance detection system based on spectral imaging and foreign substance detection method based on spectral imaging |
| CN103983649B (en) * | 2014-05-27 | 2016-05-25 | 中国工程物理研究院流体物理研究所 | A kind of foreign matter detecting method based on light spectrum image-forming |
| CN104330363A (en) * | 2014-10-30 | 2015-02-04 | 厦门市美亚柏科信息股份有限公司 | Spectral imaging analysis system, imaging and analyzing method using same |
| CN105987754A (en) * | 2015-03-04 | 2016-10-05 | 中国人民解放军电子工程学院 | Imager integrating hyperspectral and polarization hyperspectral detectability |
| CN105444883A (en) * | 2015-12-22 | 2016-03-30 | 武汉麦视威光电科技有限公司 | Imaging spectrometer based on liquid crystal tunable optical filter and full spectrum range automatic acquiring method |
| CN112129704A (en) * | 2020-11-25 | 2020-12-25 | 中国工程物理研究院流体物理研究所 | Focus-dividing planar polarization imaging device based on liquid crystal microarray device |
| CN112798614A (en) * | 2020-12-25 | 2021-05-14 | 长江存储科技有限责任公司 | Semiconductor machine and detection method |
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