CN107662840A - One kind motion cable take-up - Google Patents

One kind motion cable take-up Download PDF

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Publication number
CN107662840A
CN107662840A CN201610617026.XA CN201610617026A CN107662840A CN 107662840 A CN107662840 A CN 107662840A CN 201610617026 A CN201610617026 A CN 201610617026A CN 107662840 A CN107662840 A CN 107662840A
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CN
China
Prior art keywords
screw mandrel
shape groove
circle shape
helical line
screw
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201610617026.XA
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Chinese (zh)
Other versions
CN107662840B (en
Inventor
王斌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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Filing date
Publication date
Application filed by Shanghai Micro Electronics Equipment Co Ltd filed Critical Shanghai Micro Electronics Equipment Co Ltd
Priority to CN201610617026.XA priority Critical patent/CN107662840B/en
Publication of CN107662840A publication Critical patent/CN107662840A/en
Application granted granted Critical
Publication of CN107662840B publication Critical patent/CN107662840B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H54/00Winding, coiling, or depositing filamentary material
    • B65H54/02Winding and traversing material on to reels, bobbins, tubes, or like package cores or formers
    • B65H54/023Hank to spool winders
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H54/00Winding, coiling, or depositing filamentary material
    • B65H54/02Winding and traversing material on to reels, bobbins, tubes, or like package cores or formers
    • B65H54/28Traversing devices; Package-shaping arrangements
    • B65H54/2818Traversing devices driven by rod
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00Handled material; Storage means
    • B65H2701/30Handled filamentary material
    • B65H2701/31Textiles threads or artificial strands of filaments

Landscapes

  • Coiling Of Filamentary Materials In General (AREA)
  • Manipulator (AREA)

Abstract

The present invention relates to one kind to move cable take-up, including:Base;Screw mandrel, it is fixed on base;Screw, match with screw mandrel;Winding box, the outside of screw mandrel is sheathed on, and is fixedly connected with screw, the inner surface of winding box is provided with the first helical line semi-circle shape groove;Deconcentrator, be sheathed on outside screw mandrel, and be installed in winding box, the outer surface of deconcentrator be provided with first helical line semi-circle shape groove identical the second helical line semi-circle shape groove, the pitch of the first helical line semi-circle shape groove is equal with the pitch of screw mandrel, but in the opposite direction;And drive mechanism, it is connected with screw mandrel, drive screw rotation;One end of cable is fixed on base, and the circular hole of composition is fastened through the first helical line semi-circle shape groove and the second helical line semi-circle shape groove, and is stretched out from line outlet, and the other end is connected through cable connecting plate with the terminals on sports platform.Cable can be accommodated in less space by the take-up of the present invention, and to the perturbed force substantially constant of sports platform.

Description

One kind motion cable take-up
Technical field
The present invention relates to lithographic equipment field, more particularly to a kind of motion cable take-up.
Background technology
TFT litho machines are the capital equipments of flat board manufacturing field, for the figure on mask to be projected to by object lens On substrate.With the rapid development of FPD industry, substrate size is being continuously increased, and in order to increase yield, object lens are also from one Individual visual field expands to the structure of multiple visual fields, as G6 object lens use 6 visual fields.The movable edge of a knife is to be used to illuminate to carry out static exposure With block masks mark etc. effect mechanism, with the increase of objective angular field, the size of the movable edge of a knife is also with increase, such as G6 things Mirror, demand are changed into 750mm from original G4.5 for the 40mm of object lens, and scanning direction blade movement scope is expanded to by original 44mm 1100mm, non-scan direction blade expand to 700mm by original 44mm;The movable edge of a knife originally is arranged in the side of illuminator Method can not meet to use needs;The edge of a knife of non-scan direction is placed between object lens and sports platform, narrow space, wherein having one Individual or two blade anti-collision switch motion cable, in general motion cable can use a drag chain come carry out the protection of cable with The planning of motion path.Because Ge Er cables have bending radius and aerial length, larger space can be taken, and meeting when stroke is larger There is the phenomenon of drag chain " collapse waist ", it is necessary to set extra support.Further, since drag chain makes somebody a mere figurehead the change of length, to sports platform Perturbed force is not known, and can influence control accuracy, and certainly, this shortcoming of drag chain also appears in the motion of other similar sports platforms In cable.
The content of the invention
The present invention provides a kind of motion cable take-up, to solve above-mentioned technical problem.
In order to solve the above technical problems, the present invention provides a kind of motion cable take-up, including:
Base;
Screw mandrel, it is fixed on by a bearing on the base, the outside of the screw mandrel is provided with external screw thread;
Screw, the centre bore of the screw is interior to be provided with internal thread, and the internal thread matches with the external screw thread;
Winding box, the winding box is sheathed on the outside of the screw mandrel, and is fixedly connected with the screw, the winding box Inner surface be provided with the first helical line semi-circle shape groove;
Deconcentrator, the deconcentrator are sheathed on outside the screw mandrel, and are installed in the winding box, the deconcentrator Outer surface is provided with and the first helical line semi-circle shape groove identical the second helical line semi-circle shape groove, first helical line semi-circle Shape groove is equal with the pitch of the screw mandrel and screw with the pitch of the second helical line semi-circle shape groove, but in the opposite direction;And
Drive mechanism, the drive mechanism are connected with the screw mandrel, drive the screw mandrel to rotate;
One end of cable is fixed on the base, through the first helical line semi-circle shape groove and the second helical line semi-circle Shape groove fastens the circular hole of composition, and is stretched out from line outlet, and the other end is connected through cable connecting plate with the terminals on sports platform.
It is preferred that the drive mechanism uses constant force spring, one end of the constant force spring passes through mounting seat and the silk Bar is connected, and the other end is fixed on the cable connecting plate.
It is preferred that the mounting seat is connected by key with the screw mandrel.
It is preferred that the drive mechanism uses rotating servo motor, the output shaft of the rotating servo motor and the silk Bar is fixedly connected.
It is preferred that when the quantity of the cable is more, the first helical line semi-circle shape groove and the second helix half Circular trough is using corresponding multi-head spiral line.
It is preferred that the outside of the winding box is provided with a guide pad, guide pad is provided with a pilot hole;Also include one to be oriented to Bar, one end of the guide rod are fixed on the base, and the other end passes through the pilot hole, the guide rod and the screw mandrel It is arranged in parallel.
It is preferred that it is provided with jackscrew in the second helical line semi-circle shape groove.
It is preferred that the winding box is fixedly connected by bolt with the screw.
It is preferred that being fixed with a fixing clamper on the base, one end of the cable is fixed by the fixing clamper In on the base.
It is preferred that the deconcentrator is connected by key with the screw mandrel.
It is preferred that the motion cable take-up, during take-up, the cable is takeing in the motion cable receipts Before line apparatus, identical angle of inclination is kept.
Compared with prior art, motion cable take-up provided by the invention has the following advantages that:
1. cable is accommodated in winding box by the present invention using the opposed helical raising and lowering between deconcentrator and winding box The first helical line semi-circle shape groove in, without the bending radius of drag chain, greatly save space, and can be provided for cable enough Stroke space;
2. using constant force spring as drive mechanism, during take-up and unwrapping wire, main stress unit is all perseverance Power spring, so the perturbed force that sports platform is subject to is essentially constant force;
3. setting jackscrew in the second helical line semi-circle shape groove, withstood on always on cable using jackscrew, cable is in all the time Tensioning state, cable is avoided to deviate from out of first helical line semi-circle shape groove.
Brief description of the drawings
Fig. 1 is the structural representation that cable take-up is moved in the embodiment of the present invention one;
Fig. 2 is the profile that winding box in cable take-up is moved in the embodiment of the present invention one;
Fig. 3 is the take-up principle schematic that cable take-up is moved in the embodiment of the present invention one;
Fig. 4 is the structural representation that cable take-up is moved in the embodiment of the present invention two;
Fig. 5 is the structural representation that cable take-up is moved in the embodiment of the present invention three.
In figure:10- bases, 11- guide rods, 12- fixing clampers, 20- screw mandrels, 30- screws, 40- winding box, 41- first Helical line semi-circle shape groove, 42- line outlets, 43- guide pads, 44- pilot holes, 50- deconcentrators, 51- the second helical line semi-circle shapes groove, 52- jackscrews, 60- drive mechanisms, 61- cables connecting plate, 62- mounting seats, 70- cables.
Embodiment
In order to facilitate the understanding of the purposes, features and advantages of the present invention, below in conjunction with the accompanying drawings to the present invention Embodiment be described in detail.It should be noted that accompanying drawing of the present invention uses using simplified form and non-essence Accurate ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Embodiment one
Motion cable take-up provided by the invention, as Figure 1-3, including:
Base 10;
Screw mandrel 20, it is fixed on by a bearing (not shown) on the base 10, the outside of the screw mandrel 20 is provided with outer spiral shell Line;
Screw 30, the centre bore of the screw 30 is interior to be provided with internal thread, and the internal thread matches with the external screw thread;
Winding box 40, the winding box 40 is sheathed on the outside of the screw mandrel 20, and is fixedly connected with the screw 30, compared with Goodly, the winding box 40 is fixedly connected by bolt with the screw 30, and the inner surface of the winding box 40 is provided with the first spiral shell Spin line semi-circular groove 41;
Deconcentrator 50, the deconcentrator 50 are sheathed on outside the screw mandrel 20, specifically, the deconcentrator 50 by key with The screw mandrel 20 is connected, and the deconcentrator 50 is installed in the winding box 40, the outer surface of the deconcentrator 50 be provided with Identical the second helical line semi-circle shape groove 51 of first helical line semi-circle shape groove 41, the first helical line semi-circle shape groove 41 with The pitch of second helical line semi-circle shape groove 51 is equal with the pitch of the screw mandrel 20 and screw 30, but in the opposite direction;And
Drive mechanism 60, the drive mechanism 60 are connected with the screw mandrel 20, drive the screw mandrel 20 to rotate;
One end of cable 70 is fixed on the base 10, specifically, a fixing clamper 12 is fixed with the base 10, One end of the cable 70 is fixed on the base 10 by the fixing clamper 12, and cable 70 passes through first helix The helical line semi-circle shape groove 51 of semi-circular groove 41 and second fastens the circular hole of composition, and is stretched out from line outlet 42, and the other end passes through line Cable connecting plate 61 is connected with the terminals on sports platform, for being connected to corresponding sports platform.
In the present invention, using the opposed helical raising and lowering between deconcentrator 50 and winding box 40, cable 70 is stored In in the first helical line semi-circle shape groove 41 of winding box 40, without the bending radius of drag chain, space is greatlyd save, and can be Cable 70 provides enough stroke spaces.
It is preferred that asking emphasis, with reference to figure 1 and Fig. 3, the drive mechanism 60 uses constant force spring, the one of the constant force spring End is connected by mounting seat 62 with the screw mandrel 20, and specifically, the mounting seat 62 is connected by key with the screw mandrel 20;It is another End is fixed on the cable connecting plate 61, and the present invention uses constant force spring as drive mechanism 60, in take-up and the mistake of unwrapping wire Cheng Zhong, main stress unit is all constant force spring, so the perturbed force that sports platform is subject to is essentially constant force.
It is preferred that please continue to refer to Fig. 1 to Fig. 3, the outside of the winding box 40 is provided with a guide pad 43, on guide pad 43 Provided with a pilot hole 44;Also include a guide rod 11, one end of the guide rod 11 is fixed on the base 10, and the other end is worn The pilot hole 44 is crossed, the guide rod 11 be arranged in parallel with the screw mandrel 20, in screw mandrel 20 relative to (the i.e. winding box of screw 30 40) when moving downward, guide rod 11 moves in pilot hole 44, it is ensured that screw mandrel 20 and winding box 40 and deconcentrator 50 are vertically It is mobile.
It is preferred that asking emphasis, with reference to figure 1 and Fig. 3, the second helical line semi-circle shape groove 51 is interior to be provided with jackscrew 52, the top Silk 52 is withstood on cable 70 always, cable 70 is in tensioning state all the time, is avoided cable 70 from the first helical line semi-circle shape groove Deviate from 41.
Specifically, the motion process of take-up provided by the invention is as follows:
First, by cable 70, the direction as shown in arrow in Fig. 2 is penetrated into deconcentrator 50 and winding box 40, while with fix Wire clamp 12 is fixed on base 10, and the other end of the other end and constant force spring is co-mounted on cable connecting plate 61, for even It is connected on corresponding sports platform;
Fig. 1 show sports platform when distalmost end, and constant force spring is tightened up, when sports platform (moves toward opposite direction Platform to close to winding box 40 direction) motion when, constant force spring starts to shrink at, and the bending force of itself can make the installation of constant force spring Seat 62 is rotated, and so as to drive screw mandrel 20 and deconcentrator 50 to rotate, deconcentrator 50, which turns clockwise, to be brought into winding box 40, jackscrew 52 Cable 70 is headed into the first helical line semi-circle shape groove 41 of winding box 40;Simultaneously as the rotation of screw mandrel 20, screw 30 drives Winding box 40 is moved downward, so that moving, cable 70 is a-circle-by-a-circle to be pressed into winding box 40, as shown in figure 3, wherein l is For first spiral semi-circular groove 41 of winding box 40 in level to the girth of projection and several product of turn-taking, h is 40 liters of winding box High height, l and h square root are the length that cable 70 takes in winding box 40;
When sports platform positive (i.e. sports platform to the direction away from winding box 40) moves to distalmost end, by constant force spring with Cable 70 pulls out winding box 40, the rotate counterclockwise of mounting seat 62 of constant force spring, drives deconcentrator 50, screw mandrel 20 to rotate, take-up Box 40 rises, by the a-circle-by-a-circle pull-out winding box 40 of cable 70.
Embodiment two
Please emphasis be with reference to figure 4, the present embodiment and the difference of embodiment one:The quantity of the cable 70 is more (these In embodiment by taking two cables 70 as an example) when, the first helical line semi-circle shape groove 41 and the second helical line semi-circle shape groove 51 are equal Using corresponding multi-head spiral line, certainly, the first helical line semi-circle of the pitch of the screw mandrel 20 and screw 30 with winding box 40 Groove 41 keeps matching, so as to realize the take-up of more cables 70.
Embodiment three
Please emphasis be with reference to figure 5, the present embodiment and the difference of embodiment one:The drive mechanism 60 uses rotating servo Motor, the output shaft of the rotating servo motor are fixedly connected with the screw mandrel 20, the present invention can by change type of drive come Realize the scene of different accuracy demand, in the present embodiment, carry out drive screw 20 using rotating servo motor, ensure take-up speed with The synchronization of sports platform speed, the disturbance to sports platform can be reduced, reduce the damage to cable 70, so that the device use exists On the sports platform of higher precision.
In summary, motion cable take-up provided by the invention, including:Base 10;Screw mandrel 20, consolidated by a bearing Due on the base 10, the outside of the screw mandrel 20 is provided with external screw thread;Screw 30, the centre bore of the screw 30 are interior provided with interior Screw thread, the internal thread match with the external screw thread;Winding box 40, the winding box 40 are sheathed on the outer of the screw mandrel 20 Portion, and be fixedly connected with the screw 30, the inner surface of the winding box 40 is provided with the first helical line semi-circle shape groove 41;Deconcentrator 50, the deconcentrator 50 is sheathed on outside the screw mandrel 20, and is installed in the winding box 40, the appearance of the deconcentrator 50 Face is provided with and identical the second helical line semi-circle shape groove 51 of the first helical line semi-circle shape groove 41, first helical line semi-circle Shape groove 41 is equal with the pitch of the screw mandrel 20 and screw 30 with the pitch of the second helical line semi-circle shape groove 51, but in the opposite direction; And drive mechanism 60, the drive mechanism 60 are connected with the screw mandrel 20, drive the screw mandrel 20 to rotate;One end of cable 70 It is fixed on the base 10, fastens and form through the first helical line semi-circle shape groove 41 and the second helical line semi-circle shape groove 51 Circular hole, and stretched out from line outlet 42, the other end is connected through cable connecting plate 61 with the terminals on sports platform.The present invention's Cable 70 can be accommodated in less space by take-up, and to the perturbed force substantially constant of sports platform.
Obviously, those skilled in the art can carry out the spirit of various changes and modification without departing from the present invention to invention And scope.So, if these modifications and variations of the present invention belong to the claims in the present invention and its equivalent technologies scope it Interior, then the present invention is also intended to including these changes and modification.

Claims (11)

1. one kind motion cable take-up, it is characterised in that including:
Base;
Screw mandrel, it is fixed on by a bearing on the base, the outside of the screw mandrel is provided with external screw thread;
Screw, the centre bore of the screw is interior to be provided with internal thread, and the internal thread matches with the external screw thread;
Winding box, the winding box is sheathed on the outside of the screw mandrel, and is fixedly connected with the screw, the winding box it is interior Surface is provided with the first helical line semi-circle shape groove;
Deconcentrator, the deconcentrator are sheathed on outside the screw mandrel, and are installed in the winding box, the appearance of the deconcentrator Face is provided with and the first helical line semi-circle shape groove identical the second helical line semi-circle shape groove, the first helical line semi-circle shape groove It is equal with the pitch of the screw mandrel and screw with the pitch of the second helical line semi-circle shape groove, but in the opposite direction;And
Drive mechanism, the drive mechanism are connected with the screw mandrel, drive the screw mandrel to rotate;
One end of cable is fixed on the base, through the first helical line semi-circle shape groove and the second helical line semi-circle shape groove The circular hole of composition is fastened, and is stretched out from line outlet, the other end is connected through cable connecting plate with the terminals on sports platform.
2. motion cable take-up as claimed in claim 1, it is characterised in that the drive mechanism uses constant force spring, One end of the constant force spring is connected by mounting seat with the screw mandrel, and the other end is fixed on the cable connecting plate.
3. motion cable take-up as claimed in claim 2, it is characterised in that the mounting seat passes through key and the screw mandrel Connection.
4. motion cable take-up as claimed in claim 1, it is characterised in that the drive mechanism is using rotating servo electricity Machine, the output shaft of the rotating servo motor are fixedly connected with the screw mandrel.
5. motion cable take-up as claimed in claim 1, it is characterised in that when the quantity of the cable is more, The first helical line semi-circle shape groove uses corresponding multi-head spiral line with the second helical line semi-circle shape groove.
6. motion cable take-up as claimed in claim 1, it is characterised in that the outside of the winding box is provided with one and is oriented to Block, guide pad are provided with a pilot hole;Also include a guide rod, one end of the guide rod is fixed on the base, another End be arranged in parallel through the pilot hole, the guide rod with the screw mandrel.
7. motion cable take-up as claimed in claim 1, it is characterised in that set in the second helical line semi-circle shape groove There is jackscrew.
8. motion cable take-up as claimed in claim 1, it is characterised in that the winding box passes through bolt and the silk Mother is fixedly connected.
9. motion cable take-up as claimed in claim 1 a, it is characterised in that fixing line is fixed with the base Folder, one end of the cable is fixed on the base by the fixing clamper.
10. motion cable take-up as claimed in claim 1, it is characterised in that the deconcentrator passes through key and the silk Bar connects.
11. motion cable take-up as claimed in claim 1, it is characterised in that the motion cable take-up is being received In line process, the cable keeps identical angle of inclination before the motion cable take-up is taken in.
CN201610617026.XA 2016-07-29 2016-07-29 A kind of movement cable take-up Active CN107662840B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610617026.XA CN107662840B (en) 2016-07-29 2016-07-29 A kind of movement cable take-up

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610617026.XA CN107662840B (en) 2016-07-29 2016-07-29 A kind of movement cable take-up

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CN107662840B CN107662840B (en) 2019-07-23

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112173175A (en) * 2020-10-12 2021-01-05 长光卫星技术有限公司 Solar wing wire harness management device suitable for cube star
CN117283148A (en) * 2023-11-24 2023-12-26 深圳市爱迪达科技有限公司 Cold light laser marking machine

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH333681A (en) * 1954-09-06 1958-10-31 Friedrich Wessels Johann Storage device for hose-like bodies for the transmission of gases and electricity
GB2457548A (en) * 2008-02-09 2009-08-26 Alan Hall Compact travel clothes line
KR20130102797A (en) * 2012-03-08 2013-09-23 중경기술주식회사 Hose-reel apparatus
CN103670247A (en) * 2012-09-18 2014-03-26 林雅莹 Curtain
US20150108265A1 (en) * 2012-03-23 2015-04-23 Panasonic Corporation Cord reel device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH333681A (en) * 1954-09-06 1958-10-31 Friedrich Wessels Johann Storage device for hose-like bodies for the transmission of gases and electricity
GB2457548A (en) * 2008-02-09 2009-08-26 Alan Hall Compact travel clothes line
KR20130102797A (en) * 2012-03-08 2013-09-23 중경기술주식회사 Hose-reel apparatus
US20150108265A1 (en) * 2012-03-23 2015-04-23 Panasonic Corporation Cord reel device
CN103670247A (en) * 2012-09-18 2014-03-26 林雅莹 Curtain

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112173175A (en) * 2020-10-12 2021-01-05 长光卫星技术有限公司 Solar wing wire harness management device suitable for cube star
CN112173175B (en) * 2020-10-12 2022-08-02 长光卫星技术股份有限公司 Solar wing wire harness management device suitable for cube star
CN117283148A (en) * 2023-11-24 2023-12-26 深圳市爱迪达科技有限公司 Cold light laser marking machine
CN117283148B (en) * 2023-11-24 2024-02-27 深圳市爱迪达科技有限公司 Cold light laser marking machine

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