CN200996584Y - Stand for fixing high-light lamp - Google Patents
Stand for fixing high-light lamp Download PDFInfo
- Publication number
- CN200996584Y CN200996584Y CN 200620049267 CN200620049267U CN200996584Y CN 200996584 Y CN200996584 Y CN 200996584Y CN 200620049267 CN200620049267 CN 200620049267 CN 200620049267 U CN200620049267 U CN 200620049267U CN 200996584 Y CN200996584 Y CN 200996584Y
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- China
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- column
- fixator
- adjusting knob
- fixed
- fixed support
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- Expired - Lifetime
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Abstract
A fixation bracket is used for fixing strong light lamp. The strong light lamp is used to illuminate the grain circle on the machine station of optical microscope. The fixation bracket consists of a base and a column fixed to the base. The fixation bracket is characterized in that two fixers are set in the column, and each fixer is equipped with at least one adjustment knob and one via hole. The fixer can slip along the column when the adjustment knob unscrews while the fixer is fixed to the column when the adjustment knob screws.
Description
Technical field
The utility model relates to the wafer sort technology, relates to a kind of supporting structure, specifically, is a kind of support that is used for fixing major light.
Background technology
In process for fabrication of semiconductor device, need carry out shipment quality assurance (OQA, OutgoingQuality Assurance) check to wafer, it is that crystal column surface is carried out macroscopical visual inspection that a program is wherein arranged.
Macroscopical visual inspection apparatus commonly used mainly comprises light microscope (OM) board 1, is used to carry the wafer-supporting platform 2 of wafer 5 as shown in Figure 1, and the major light 3 that is fixed on OM board 1 one sides by a simple support 4.Major light 3 is made of optical fiber and lamp holder 31, and optical fiber is installed in 32 li of the flexible pipes made by aluminium alloy.Support 4 is made up of base 41, column 42 and the retaining element 43 that is fixed on column 42 upper ends, and optical fiber flexible pipe 32 is fixed on the column 42 by retaining element 43.In macroscopical visual inspection process, angle that can be by manual adjustments optical fiber flexible pipe 32 bending and the length different zone, wafer 5 surfaces of throwing light on.
Yet, because the column 42 of existing support 4 is shorter, making optical fiber flexible pipe 32 the first half can not get external force supports, thereby in operating process, because the gravity of the flexibility of aluminium alloy and lamp holder 31 itself, major light 3 is easy to take place lamp holder 31 tenesmus and runs into wafer 5, causes the phenomenon of wafer 5 scratches even fragmentation.In addition, for the clear situation that shows wafer 5 surperficial zoness of different, often twisting optical fiber flexible pipe 32 makes that to regulate the emergent light angle of lamp holder 31 optical fiber in the flexible pipe 32 is easy to damage.
The utility model content
The purpose of this utility model is to provide a kind of fixed support that is used for fixing major light, it is not only simple in structure, easy to use, can prevent effectively that lamp holder tenesmus from running into the wafer damage that wafer causes, can also avoid the optical fiber of major light to be damaged because of overflexing.
To achieve the above object, the utility model provides a kind of fixed support that is used for fixing major light, described major light is used for the wafer on the light optics microscope board, described fixed support comprises that a base and an end are fixed on the column on the base, also is arranged with two fixators on the described column, and each fixator has at least one adjusting knob and a through hole, when adjusting knob unscrews, fixator can slide along column, and when adjusting knob was locked, fixator was fixed on the column.
In the above-mentioned fixed support that is used for fixing major light, described adjusting knob is a screw.
In the above-mentioned fixed support that is used for fixing major light, described fixator has two through holes, and the external diameter size of the internal diameter of one of them through hole size and column is complementary.
In the above-mentioned fixed support that is used for fixing major light, the height of described column is greater than the height of light microscope board.
The fixed support that is used for fixing major light of the present utility model, adopt two mobilizable fixators that the optical fiber flexible pipe of major light is fixed on the column, adjusting knob by fixator can be regulated the length of optical fiber flexible pipe arbitrarily, thereby cap part can freely be twisted to obtain the best angle of macroscopical visual inspection.Can prevent that by this fixed support lamp holder tenesmus from running into wafer, can prevent that again optical fiber is damaged because of overflexing, thereby prolong the service life of major light.
Description of drawings
The support bracket fastened structure that is used for fixing major light of the present utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the structural representation of existing macroscopical visual inspection apparatus;
Fig. 2 is the use schematic diagram of fixed support of the present utility model in macroscopical visual inspection apparatus;
Fig. 3 is the fixer structure vertical view of the utility model one specific embodiment;
Fig. 4 is the fixer structure vertical view of another specific embodiment of the utility model.
The specific embodiment
Below will be described in further detail the fixed support that is used for fixing major light of the present utility model.
Referring to Fig. 2, it has shown the operating position of fixed support of the present utility model in macroscopical visual inspection apparatus.This fixed support 6 comprises that a base 61 and an end are fixed on the column 62 on the base, are arranged with two fixators 63 on the column 62.The height of column 62 is greater than the height of OM board 1, thereby the first half of optical fiber flexible pipe 32 can be fixed by fixator 63.Each fixator 63 has at least one adjusting knob 631 and through hole (among the figure not label) and passes for column 62 and optical fiber flexible pipe 32, when adjusting knob 631 unscrews, fixator 63 can slide along column 62, to regulate the length that optical fiber flexible pipe 32 the first half are exposed, after length adjustment finishes, with adjusting knob 631 lockings, then fixator 63 is fixed on the relevant position of column 62 together with optical fiber flexible pipe 32.
Fig. 3 is the fixer structure vertical view of the utility model one specific embodiment, in present embodiment, this fixator 63 is made up of two stators, the folding activity relatively of this two stator, Fig. 3 (a) is the open mode schematic diagram, and Fig. 3 (b) is the closure state schematic diagram.Fixator 63 has an adjusting knob 631 and two through holes 632,633, is respectively applied for and wears column 62 and optical fiber flexible pipe 32.Adjusting knob 631 can be screw and nut, and two through holes 632 and 633 internal diameter size are equal to or slightly less than the external diameter size of column 62 and optical fiber flexible pipe 32.When adjusting knob 631 unscrewed, column 62 and optical fiber flexible pipe 32 can pass in through hole 632,633 respectively, and fixator 63 can slide up and down along column 62.When fixator 63 moves to the precalculated position, with adjusting knob 631 locking, then since two stators along x to pressure, column 62 and optical fiber flexible pipe 32 tightly are locked in the through hole 632,633, simultaneously, fixator 63 also firmly is being fixed on the column 62 under the effect of stiction.
Fig. 4 is the fixer structure vertical view of another specific embodiment of the utility model, in present embodiment, this fixator 63 is made up of two parts, shown in Fig. 4 (a), every part all has a groove 632,633, is respectively applied for to be installed with column 62 and optical fiber flexible pipe 32, and these two parts can connect by adjusting knob 631, combining forms a through hole 634, sees Fig. 4 (b).The internal diameter size of groove 632,633 is complementary with the size of column 62, optical fiber flexible pipe 32 external diameters respectively.When adjusting knob 631 unscrewed, column 62 and optical fiber flexible pipe 32 can pass in groove 632,633 respectively, and fixator 63 can slide up and down the precalculated position along column 62.When needs fixed fiber flexible pipe 32, only need adjusting knob 631 lockings, then column 62 and optical fiber flexible pipe 32 y between fixator 63 two parts is under active force, tightly be locked in the through hole of forming by two grooves 632,633 634, simultaneously, fixator 63 also is being fixed on the column 62 under the effect of stiction.
The utility model is by adopting above-mentioned fixed support 6, but the length of the optical fiber flexible pipe 32 of regulated at will major light 3 can prevent that lamp holder 31 tenesmus from running into wafer 5, can prevent that again optical fiber is damaged because of overflexing.
This fixing rack structure is applicable to employed all kinds of light microscope boards in the wafer sort process.
Claims (4)
1, a kind of fixed support that is used for fixing major light, described major light is used for the wafer on the light optics microscope board, described fixed support comprises that a base and an end are fixed on the column on the base, it is characterized in that: also be arranged with two fixators on the described column, each fixator has at least one adjusting knob and a through hole, and when adjusting knob unscrewed, fixator can slide along column, when adjusting knob was locked, fixator was fixed on the column.
2, the fixed support that is used for fixing major light as claimed in claim 1, it is characterized in that: described adjusting knob is a screw.
3, the fixed support that is used for fixing major light as claimed in claim 1 is characterized in that: described fixator has two through holes, and the external diameter size of the internal diameter of one of them through hole size and column is complementary.
4, the fixed support that is used for fixing major light as claimed in claim 1, it is characterized in that: the height of described column is greater than the height of light microscope board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620049267 CN200996584Y (en) | 2006-12-20 | 2006-12-20 | Stand for fixing high-light lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620049267 CN200996584Y (en) | 2006-12-20 | 2006-12-20 | Stand for fixing high-light lamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN200996584Y true CN200996584Y (en) | 2007-12-26 |
Family
ID=38995015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620049267 Expired - Lifetime CN200996584Y (en) | 2006-12-20 | 2006-12-20 | Stand for fixing high-light lamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN200996584Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103385740A (en) * | 2013-07-24 | 2013-11-13 | 江苏蓝域创新技术投资有限公司 | Gasless laparoscope abdominal wall lifting support |
| CN103489809A (en) * | 2013-09-22 | 2014-01-01 | 上海华力微电子有限公司 | Defect detection system for particles on surface of wafer and working method of defect detection system |
| CN106773484A (en) * | 2016-12-28 | 2017-05-31 | 广东威创视讯科技股份有限公司 | A kind of projector of energy quick regulation and alignment DMD hot spots |
-
2006
- 2006-12-20 CN CN 200620049267 patent/CN200996584Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103385740A (en) * | 2013-07-24 | 2013-11-13 | 江苏蓝域创新技术投资有限公司 | Gasless laparoscope abdominal wall lifting support |
| CN103489809A (en) * | 2013-09-22 | 2014-01-01 | 上海华力微电子有限公司 | Defect detection system for particles on surface of wafer and working method of defect detection system |
| CN106773484A (en) * | 2016-12-28 | 2017-05-31 | 广东威创视讯科技股份有限公司 | A kind of projector of energy quick regulation and alignment DMD hot spots |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130318 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130318 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 No. 18 Zhangjiang Road, Shanghai Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CX01 | Expiry of patent term |
Granted publication date: 20071226 |
|
| EXPY | Termination of patent right or utility model |