CN107591497B - A kind of adjustable oscillator sensor installation seat - Google Patents
A kind of adjustable oscillator sensor installation seat Download PDFInfo
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- CN107591497B CN107591497B CN201710769552.2A CN201710769552A CN107591497B CN 107591497 B CN107591497 B CN 107591497B CN 201710769552 A CN201710769552 A CN 201710769552A CN 107591497 B CN107591497 B CN 107591497B
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- trigger unit
- oscillator sensor
- pedestal
- honour
- sensor installation
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Abstract
The present invention provides a kind of adjustable oscillator sensor installation seats comprising pedestal.With the seat of honour is connected on the pedestal, it is provided with bracket on the seat of honour, is rotatably connected to support shaft on the bracket.Described support shaft one end connects rotor, and the other end connects the first trigger unit of oscillator sensor.The second trigger unit of the oscillator sensor is additionally provided on the seat of honour.Wherein when the rotor touches substrate, the substrate pushes meeting to it so that the support shaft surrounds the holder pivots, so that first trigger unit of its other end connection is close or contacts second trigger unit, the close or contact of two trigger unit can generate electric signal, and the oscillator sensor can receive the electric signal and then send the signal that substrate enters to place OLED device.
Description
Technical field
The present invention relates to the oscillator sensor modules that OLED manufacturing process equipment uses, especially, one such adjustable
Formula oscillator sensor installation seat.
Background technique
It is known that in field of display technology, liquid crystal display device (Liquid Crystal Display, LCD) and organic hair
The flat-panel display devices such as optical diode display device (Organic Light Emitting Diode, OLED) gradually replace
CRT monitor.
Wherein LCD display part is by one sheet of film transistor (TFT) array substrate (Thin Film Transistor Array
Substrate, TFT Array Substrate) it is bonded with a piece of colored filter (Color Filter, CF) substrate,
And liquid crystal is poured between TFT substrate and CF substrate, liquid crystal molecule is controlled whether by being powered and changes direction, by backlight module
Light refraction come out generate picture.
And OLED is with self-luminous, driving voltage is low, luminous efficiency is high, the response time is short, clarity and contrast are high, close
180 ° of visual angles, use temperature range are wide, it can be achieved that many advantages, such as Flexible Displays and large area total colouring, are known as by industry
It is the display device for most having development potentiality.
Common OLED display device generally includes: substrate, the anode on substrate, the hole injection on anode
Layer, the hole transmission layer on hole injection layer, the luminescent layer on hole transmission layer, the electronics on luminescent layer pass
Defeated layer, the electron injecting layer on electron transfer layer and the cathode on electron injecting layer, principle of luminosity are semiconductor material
Material and luminous organic material pass through carrier injection and composite guide photoluminescence under electric field driven.
In the entire manufacturing process of OLED, it can be related to using plurality of devices is arrived, to carry out various fabrication process to substrate.
And generally oscillator sensor can be all set in these equipment, the signal for transferring substrates access device.
But in some cases, the oscillator sensor cannot be when substrate enter place equipment or leave, normally
Electric signal is sent out, so as to cause equipment false alarm where it；Or cause the substrate where it when equipment internal stops
Between it is too long so that the substrate may be over treated and cause discarded or do over again, not only cause the waste in cost, together
When will also result in certain influence to the production capacity of equipment.
Therefore, it is necessory to develop a kind of novel oscillator sensor installation seat, to overcome defect in the prior art.
Summary of the invention
The purpose of the present invention is to provide a kind of adjustable oscillator sensor installation seats, enable to the vibration being arranged thereon
Sub- sensor can be in equipment where substrate disengaging, and stable transmits electric signal to the OLED process apparatus at place, so that its
It is capable of information of timely learning processing substrate in it.
To achieve the goals above, The technical solution adopted by the invention is as follows:
A kind of adjustable oscillator sensor installation seat comprising pedestal.Match on the pedestal and be connected to the seat of honour, on the seat of honour
It is provided with bracket, is rotatably connected to support shaft on the bracket.Described support shaft one end connects rotor, and the other end connects oscillator and passes
First trigger unit of sensor.The second trigger unit of the oscillator sensor is additionally provided on the seat of honour.Wherein when described
When rotor touches substrate, the substrate meeting is pushed to it so that the support shaft surround the holder pivots so that its
First trigger unit of other end connection is close or contacts second trigger unit, and two trigger unit approaches
Or contact can generate electric signal, and the oscillator sensor can receive the electric signal and then send base to place OLED device
The signal that plate enters；And when the substrate leaves the rotor, the support shaft sets back, and makes first triggering
Unit far from second trigger unit, between two trigger unit far from can also make the electric signal generated between the two weaken or
It is to disappear, the oscillator sensor can also receive the electric signal and then send the signal that substrate leaves to place OLED device.
Further, in different embodiments, wherein first trigger unit passes through with second trigger unit
Electric lead is connect with the control unit of the oscillator sensor, and is sent to it electric signal.
Further, in different embodiments, wherein first trigger unit includes magnetite.
Further, in different embodiments, wherein second trigger unit includes magnetite.
Further, in different embodiments, wherein being provided with fixation hole on the seat of honour, second trigger unit
It is at least partly revealed in the fixation hole, matches in the fixation hole and be connected to fixing piece for fastening second trigger unit.
Further, in different embodiments, wherein the fixing piece includes bolt.In other embodiments, institute
State bolt can also by other similar function fixing piece instead of using.
Further, in different embodiments, wherein being provided with extend up and down first on the pedestal with access slot, institute
The seat of honour is stated by described with access slot, its interface sites relative to the pedestal can be adjusted up and down.
Further, in different embodiments, wherein described base ends or so, which are extended, assembly side, the assembly
Left and right extends second is provided on end with access slot, the pedestal matches access slot by described second, and left and right is adjustable to be mounted on
In the chamber of place OLED device.
Further, in different embodiments, wherein described second matches access slot including two, it is oppositely arranged on the dress
With on end.
Further, in different embodiments, it wherein being additionally provided with third on the upper surface of the pedestal with access slot, uses
It is coupled in place OLED device chamber doors structure.
Further, in different embodiments, wherein being provided with the seat of honour of 2 or more quantity on the pedestal.
Compared with the existing technology, the beneficial effects of the present invention are: a kind of adjustable oscillator sensor peace of the present invention
Seat is filled, the oscillator sensor being arranged thereon carries out spy when substrate enters apparatus cavity or leaves by the way of physical contact
It surveys, the substrate signal detected so as to stable transmitting.
Further, the mounting base of the present invention, setting is multiple to match access slot, so that it can adjust it in OLED
The indoor installation site of equipment cavity, while the height and position of its seat of honour also its adjustable relatively described pedestal, in this way, making it
It is widely applicable, it is promoted the use of in different OLED device chambers convenient for it.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram for adjustable oscillator sensor installation seat that an embodiment of the present invention provides.
The reference numerals are as follows in Fig. 1:
Pedestal 10 first matches access slot 11
Assembly side 12 second matches access slot 13
Third matches 15 seat of honour 20 of access slot
21 bracket 22 of fixation hole
24 rotor 26 of support shaft
First trigger unit, 32 second trigger unit 34
Specific embodiment
Below with reference to drawings and examples, to a kind of technology of adjustable oscillator sensor installation seat of the present invention
Scheme is described in further detail.
An embodiment of the invention provides a kind of adjustable oscillator sensor installation seat, sets for being mounted on OLED
In standby chamber, it is provided with oscillator sensor, for transmitting whether deposit pending base in it to place OLED device
Plate.
Refering to Figure 1, the adjustable oscillator sensor installation seat of the present invention, including pedestal 10.It is described
With the seat of honour 20 is connected on pedestal 10, bracket 22 is provided on the seat of honour 20.It is rotatably connected to support shaft 24 on the bracket 22,
Described 24 one end of support shaft connects rotor 26, and the other end connects the first trigger unit 32 of the oscillator sensor, specifically can be with
It is magnetite.It is additionally provided with the second trigger unit 34 of the oscillator sensor on the seat of honour 20, specifically can be, magnetite.Its
Described in the first trigger unit 32 and the second trigger unit 34 connect by electric lead with the control unit of the oscillator sensor,
And electric signal is transmitted to it.
Wherein when the rotor 26 touches substrate, the substrate pushes meeting to it so that the support shaft 24 surrounds institute
The rotation of bracket 22 is stated, so that first trigger unit 32 of its other end connection is close or contacts second triggering
The close or contact of unit 34, two trigger unit 32,34 can generate electric signal, and the oscillator sensor can receive institute
It states electric signal and then sends the signal that substrate enters to place OLED device.
And when the substrate leaves the rotor 26, the support shaft 24 sets back, and makes first triggering
Unit 32 far from second trigger unit 34, between two trigger unit 32,34 far from can also to generate between the two
Electric signal weakens or disappears, and the oscillator sensor can also receive the electric signal and then send base to place OLED device
The signal that plate leaves.
In this way, being come by way of being physically contacted between the substrate and rotor 26 so that two trigger units 32,34 are because mutually
Close or separate generated change in electric, stablizes the control unit of the oscillator sensor and effectively knows
Information substrate, so that the OLED device where it also can know in time and accurately in its processing chamber housing whether have base
Plate.
Further, wherein being provided with fixation hole 21 on the seat of honour 20, second trigger unit at least partly appears
In in the fixation hole 21, the external position that second trigger unit 34 can be determined by the fixation hole 21, and then can be with
Accurately it is fastened without causing to damage to it.
Wherein the fixation hole 21 can have certain length range, to select suitable fastening position.Then exist
By fixing piece, for example, bolt, but be not limited to；Enter the fixation hole 21 in place, to the second triggering in it
Unit 34 is fastened.
Extend up and down first is wherein provided on the pedestal 10 with access slot 11, the seat of honour 20 is matched by described first
Access slot 11 can adjust its interface sites relative to the pedestal 10 up and down.In this way, making the institute being arranged on the seat of honour 20
The first trigger unit 32 and the second trigger unit 34 for stating oscillator sensor, can adjust up and down in height.It is also possible to
The height of its rotor 26 is adjusted up and down, preferably to be contacted with the substrate of different height input, thus
Its scope of application is expanded to a certain extent.
Described 10 end of pedestal or so, which is extended, assembly side 12, and left and right extends second is provided in the assembly side 12
With access slot 13, the pedestal 10 matches access slot 13, the adjustable chamber for being mounted on place OLED device in left and right by described second
It is interior.Preferably, wherein described second with access slot 13 may include two, be oppositely arranged in the assembly side 12.
Further, it wherein being additionally provided with third on the upper surface of the pedestal 10 with access slot 15, is used for and place OLED
The mating of equipment cavity doors structure.The third matches the setting of access slot 15, and cooperation described second matches access slot 13, can make the base
Seat 10 is more firm to be placed in the chamber of place OLED device.The third is also to have certain length with access slot 15, to make
It is obtained with more installation sites, to expand its applicable OLED device range.
Further, in different embodiments, wherein on the pedestal 10 settable multiple first match access slot 11, so as to
In installing multiple seats of honour 20 on the pedestal 10, used with coping with the OLED device chamber of more processing substrates.It is wherein described
The particular number at the seat of honour 20 is set on pedestal 10, can with the need depending on, and be not limited.
A kind of adjustable oscillator sensor installation seat of the present invention, the oscillator sensor being arranged thereon are connect using physics
The mode of touching carries out detection when substrate enters apparatus cavity or leaves, the substrate letter detected so as to stable transmitting
Number.
Further, the mounting base of the present invention, setting is multiple to match access slot, so that it can adjust it in OLED
The indoor installation site of equipment cavity, while the height and position of its seat of honour also its adjustable relatively described pedestal, in this way, making it
It is widely applicable, it is promoted the use of in different OLED devices convenient for it.
Technical scope of the invention is not limited solely to the content in above description, and those skilled in the art can not take off
Under the premise of from technical thought of the invention, many variations and modifications are carried out to above-described embodiment, and these deformations and modification should all
When within the scope of the present invention.
Claims (10)
1. a kind of adjustable oscillator sensor installation seat, which is characterized in that including pedestal, match on the pedestal and be connected to the seat of honour；Institute
It states and is provided with bracket on the seat of honour, be rotatably connected to support shaft on the bracket；Described support shaft one end connects rotor, and the other end connects
The first trigger unit of oscillator sensor is connect, the second trigger unit of the oscillator sensor is additionally provided on the seat of honour；
Wherein when the rotor touches substrate, the substrate pushes meeting to it so that the support shaft turns around the bracket
It is dynamic, so that first trigger unit of its other end connection is close or contacts second trigger unit, described the
The close or contact of one trigger unit and second trigger unit can generate electric signal, and the oscillator sensor can receive
The electric signal and then the signal that substrate entrance is sent to place OLED device；
And when the substrate leaves the rotor, the support shaft sets back, and makes first trigger unit separate
The separate of second trigger unit, first trigger unit and second trigger unit can also to generate between the two
Electric signal weakens or disappears, and the oscillator sensor can also receive the electric signal and then send base to place OLED device
The signal that plate leaves.
2. a kind of adjustable oscillator sensor installation seat according to claim 1, which is characterized in that wherein first touching
Bill member is connect by electric lead with the control unit of the oscillator sensor with second trigger unit, and is sent to it electricity
Signal.
3. a kind of adjustable oscillator sensor installation seat according to claim 1, which is characterized in that wherein first touching
Bill member includes magnetite.
4. a kind of adjustable oscillator sensor installation seat according to claim 1, which is characterized in that wherein second touching
Bill member includes magnetite.
5. a kind of adjustable oscillator sensor installation seat according to claim 1, which is characterized in that wherein on the seat of honour
It is provided with fixation hole, second trigger unit is at least partly revealed in the fixation hole, solid with being connected in the fixation hole
Part is determined for fastening second trigger unit.
6. a kind of adjustable oscillator sensor installation seat according to claim 1, which is characterized in that wherein on the pedestal
Extend up and down first is provided with access slot, the seat of honour matches access slot by described, can adjust it up and down relative to the base
The interface sites of seat.
7. a kind of adjustable oscillator sensor installation seat according to claim 1, which is characterized in that the wherein pedestal end
End left and right, which is extended, assembly side, left and right extends second is provided in the assembly side with access slot, the pedestal passes through described
Second matches access slot, left and right is adjustable be mounted on where OLED device chamber in.
8. a kind of adjustable oscillator sensor installation seat according to claim 7, which is characterized in that wherein described second matches
Access slot includes two, is oppositely arranged in the assembly side.
9. a kind of adjustable oscillator sensor installation seat according to claim 1, which is characterized in that the wherein pedestal
Third is additionally provided on upper surface with access slot, for being coupled with place OLED device chamber doors structure.
10. a kind of adjustable oscillator sensor installation seat according to claim 1, which is characterized in that the wherein pedestal
On be provided with the seat of honour of 2 or more quantity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710769552.2A CN107591497B (en) | 2017-08-31 | 2017-08-31 | A kind of adjustable oscillator sensor installation seat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710769552.2A CN107591497B (en) | 2017-08-31 | 2017-08-31 | A kind of adjustable oscillator sensor installation seat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107591497A CN107591497A (en) | 2018-01-16 |
| CN107591497B true CN107591497B (en) | 2019-04-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710769552.2A Active CN107591497B (en) | 2017-08-31 | 2017-08-31 | A kind of adjustable oscillator sensor installation seat |
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| CN (1) | CN107591497B (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013093279A (en) * | 2011-10-27 | 2013-05-16 | Hitachi High-Technologies Corp | Organic el device manufacturing apparatus |
| US20160193543A1 (en) * | 2012-12-18 | 2016-07-07 | Korea Institute Of Industrial Technology | Method and apparatus for purifying organic material using ionic liquid |
| KR102098789B1 (en) * | 2015-12-02 | 2020-04-08 | 세메스 주식회사 | Apparatus of manufacturing display cells and method of controlling temperature thereof |
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| CN107591497A (en) | 2018-01-16 |
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