CN107591497A - A kind of adjustable oscillator sensor installation seat - Google Patents
A kind of adjustable oscillator sensor installation seat Download PDFInfo
- Publication number
- CN107591497A CN107591497A CN201710769552.2A CN201710769552A CN107591497A CN 107591497 A CN107591497 A CN 107591497A CN 201710769552 A CN201710769552 A CN 201710769552A CN 107591497 A CN107591497 A CN 107591497A
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- China
- Prior art keywords
- oscillator sensor
- trigger element
- somebody
- installation seat
- honour
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Abstract
The invention provides a kind of adjustable oscillator sensor installation seat, it includes pedestal.With the seat of honour is connected on the pedestal, support is provided with the seat of honour, support shaft is rotatably connected on the support.Described support shaft one end connects rotor, and the other end connects the first trigger element of oscillator sensor.The second trigger element of the oscillator sensor is additionally provided with the seat of honour.Wherein when the rotor touches substrate, the substrate promotes to it can cause the support shaft to surround the holder pivots, so that first trigger element of its other end connection is close or contacts second trigger element, the close or contact of two trigger element can produce electric signal, and the oscillator sensor can receive the electric signal and then the signal of substrate entrance is sent to place OLED device.
Description
Technical field
The present invention relates to the oscillator sensor cluster that OLED manufacturing process equipment uses, and especially, one kind therein is adjustable
Formula oscillator sensor installation seat.
Background technology
, it is known that in display technology field, liquid crystal display device (Liquid Crystal Display, LCD) and organic light emission two
The flat-panel display devices such as pole pipe display device (Organic Light Emitting Diode, OLED) progressively substitute CRT monitor.
Wherein LCD display part is by one sheet of film transistor (TFT) array substrate (Thin Film Transistor Array
Substrate, TFT Array Substrate) formed with the fitting of a piece of colored filter (Color Filter, CF) substrate,
And liquid crystal is poured between TFT substrate and CF substrates, control liquid crystal molecule to change direction by whether being powered, by backlight module
Light reflect generation picture.
And OLED has that self-luminous, driving voltage are low, luminous efficiency is high, the response time is short, definition and contrast are high, near
180 ° of visual angles, use temperature ranges are wide, and many advantages, such as Flexible Displays are with large area total colouring can be achieved, be known as by industry
It is the display device for most having development potentiality.
Common OLED display device generally includes:Substrate, the anode on substrate, the hole injection on anode
Layer, the hole transmission layer on hole injection layer, the luminescent layer on hole transmission layer, the electronics on luminescent layer pass
Defeated layer, the electron injecting layer on electron transfer layer and the negative electrode on electron injecting layer, principle of luminosity are semiconductor material
Material and luminous organic material pass through carrier injection and composite guide photoluminescence under electric field driven.
In OLED whole manufacturing process, plurality of devices can be directed to use with, to carry out various fabrication process to substrate.
And typically oscillator sensor can be all set in these equipment, the signal for transferring substrates access device.
But in some cases, the oscillator sensor can not be in equipment where substrate entrance or when leaving, normally
Electric signal is sent out, so as to cause equipment false alarm where it;Or cause the substrate where it during device interior stop
Between it is long so that the substrate may be over treated and cause discarded or do over again, not only cause the waste in cost, together
When certain influence will also result in the production capacity of equipment.
Therefore, it is necessory to develop a kind of new oscillator sensor installation seat, the defects of to overcome in the prior art.
The content of the invention
It is an object of the invention to provide a kind of adjustable oscillator sensor installation seat, what it enabled to set thereon shakes
Sub- sensor can be in equipment where substrate disengaging, OLED process apparatus of the stable transmission electric signal to place so that its
The information of processing substrate in it can be known in time.
To achieve these goals, the technical solution adopted by the present invention is as follows:
A kind of adjustable oscillator sensor installation seat, it includes pedestal.Match somebody with somebody on the pedestal and be connected to the seat of honour, on the seat of honour
Support is provided with, support shaft is rotatably connected on the support.Described support shaft one end connects rotor, and other end connection oscillator passes
First trigger element of sensor.The second trigger element of the oscillator sensor is additionally provided with the seat of honour.Wherein when described
When rotor touches substrate, the substrate promotes to it can cause the support shaft to surround the holder pivots, so that its
First trigger element of other end connection is close or contacts second trigger element, two trigger element close or
It is that contact can produce electric signal, the oscillator sensor can receive the electric signal and then send substrate to place OLED device
The signal entered;And when the substrate leaves the rotor, the support shaft sets back, and causes first trigger element
Away from second trigger element, between two trigger element away from can also cause between the two caused electric signal weaken or
Disappear, the oscillator sensor can also receive the electric signal and then the signal left to place OLED device transmission substrate.
Further, in different embodiments, wherein first trigger element passes through with second trigger element
Electric lead is connected with the control unit of the oscillator sensor, and is sent to electric signal.
Further, in different embodiments, wherein first trigger element includes magnetite.
Further, in different embodiments, wherein second trigger element includes magnetite.
Further, in different embodiments, wherein being provided with fixing hole on the seat of honour, second trigger element
At least partly it is revealed in the fixing hole, matches somebody with somebody in the fixing hole and be connected to fixture for fastening second trigger element.
Further, in different embodiments, wherein the fixture includes bolt.In other embodiments, institute
State bolt can also by other similar functions fixture instead of using.
Further, in different embodiments, wherein first extended up and down is provided with the pedestal matches somebody with somebody access slot, institute
State the seat of honour and match somebody with somebody access slot by described, its interface sites relative to the pedestal can be adjusted up and down.
Further, in different embodiments, wherein described base ends or so, which are extended, assembly side, the assembling
Second that left and right extension is provided with end matches somebody with somebody access slot, and the pedestal matches somebody with somebody access slot by described second, and left and right is adjustable to be arranged on
In the chamber of place OLED device.
Further, in different embodiments, wherein described second includes two with access slot, it is oppositely arranged on the dress
With on end.
Further, in different embodiments, wherein the 3rd is additionally provided with the upper surface of the pedestal matches somebody with somebody access slot, use
It is coupled in place OLED device chamber inner structure.
Further, in different embodiments, wherein being provided with the seat of honour of 2 or more quantity on the pedestal.
Relative to prior art, the beneficial effects of the invention are as follows:A kind of adjustable oscillator sensor peace of the present invention
Fill seat, spy of the oscillator sensor set thereon when substrate is carried out by the way of physical contact and enters apparatus cavity or leaves
Survey, the substrate signal detected so as to stable transmission.
Further, the mounting seat of the present invention, it, which is set, multiple matches somebody with somebody access slot so that it can adjust it in OLED
Installation site in apparatus cavity, while its seat of honour can also adjust the height and position of its relatively described pedestal, so so that its
It is widely applicable, it is easy to it to be promoted the use of in different OLED device chambers.
Brief description of the drawings
Fig. 1 is that a kind of structure for adjustable oscillator sensor installation seat that an embodiment of the present invention provides is shown
It is intended to.
Description of reference numerals in Fig. 1 is as follows:
Pedestal 10 first matches somebody with somebody access slot 11
Assembly side 12 second matches somebody with somebody access slot 13
3rd matches somebody with somebody the seat of honour 20 of access slot 15
The support 22 of fixing hole 21
The rotor 26 of support shaft 24
The trigger element 34 of first trigger element 32 second
Embodiment
Below with reference to drawings and examples, to a kind of technology of adjustable oscillator sensor installation seat of the present invention
Scheme is described in further detail.
An embodiment of the invention provides a kind of adjustable oscillator sensor installation seat, for being set installed in OLED
In standby chamber, oscillator sensor is provided with, for transmitting pending processing base whether is deposited in it to place OLED device
Plate.
Refer to shown in Fig. 1, the adjustable oscillator sensor installation seat of the present invention, including pedestal 10.It is described
With the seat of honour 20 is connected on pedestal 10, support 22 is provided with the seat of honour 20.Support shaft 24 is rotatably connected on the support 22,
Described one end of support shaft 24 connects rotor 26, and the other end connects the first trigger element 32 of the oscillator sensor, specifically can be with
It is magnetite.The second trigger element 34 of the oscillator sensor is additionally provided with the seat of honour 20, can be specifically, magnetite.Its
Described in the first trigger element 32 and the second trigger element 34 be connected by electric lead with the control unit of the oscillator sensor,
And transmit electric signal to it.
Wherein when the rotor 26 touches substrate, the substrate promotes to it can cause the support shaft 24 to surround institute
State support 22 to rotate, so that first trigger element 32 of its other end connection is close or contacts second triggering
Unit 34, the close or contact of two trigger element 32,34 can produce electric signal, and the oscillator sensor can receive institute
State electric signal and then the signal of substrate entrance is sent to place OLED device.
And when the substrate leaves the rotor 26, the support shaft 24 sets back, and causes first triggering
Unit 32 is caused between the two away from can also cause between two trigger element 32,34 away from second trigger element 34
Electric signal weakens or disappeared, and the oscillator sensor can also receive the electric signal and then send base to place OLED device
The signal that plate leaves.
In this way, by way of being physically contacted between the substrate and rotor 26, to cause two trigger elements 32,34 because mutually
Close or remote caused change in electric so that the control unit of the oscillator sensor, which can be stablized, effectively know
Information substrate, and then so that the OLED device where it also can in time and accurately know in its processing chamber housing whether have base
Plate.
Further, wherein being provided with fixing hole 21 on the seat of honour 20, second trigger element at least partly appears
In in the fixing hole 21, outside can determine the position of second trigger element 34 by the fixing hole 21, and then can be with
Accurately it is fastened without causing to damage to it.
Wherein described fixing hole 21 can have certain length range, to select suitable restraint location.Then exist
By fixture, for example, bolt, but be not limited to;Enter the fixing hole 21 in place, with to the second triggering in it
Unit 34 is fastened.
First extended up and down is provided with wherein described pedestal 10 and matches somebody with somebody access slot 11, the seat of honour 20 is matched somebody with somebody by described first
Access slot 11, its interface sites relative to the pedestal 10 can be adjusted up and down.So so that the institute set on the seat of honour 20
The first trigger element 32 and the second trigger element 34 of oscillator sensor are stated, can be adjusted up and down in height.It is also possible to
The height of its rotor 26 is adjusted up and down, so that the substrate preferably with different height input is contacted, so that
Its scope of application is expanded to a certain extent.
Described end of pedestal 10 or so, which is extended, assembly side 12, and the second of left and right extension is provided with the assembly side 12
With access slot 13, the pedestal 10 matches somebody with somebody access slot 13, the adjustable chamber installed in place OLED device in left and right by described second
It is interior.Preferably, wherein described second can include two with access slot 13, it is oppositely arranged in the assembly side 12.
Further, wherein the 3rd is additionally provided with the upper surface of the pedestal 10 matches somebody with somebody access slot 15, for place OLED
Apparatus cavity inner structure is coupled.Described 3rd matches somebody with somebody the setting of access slot 15, coordinates described second to match somebody with somebody access slot 13, can cause the base
Seat 10 is more firm to be placed in the chamber of place OLED device.Described 3rd matches somebody with somebody access slot 15 and has certain length, to make
Obtaining it has more installation sites, so as to expand its applicable OLED device scope.
Further, in different embodiments, wherein multiple first can be set on the pedestal 10 matches somebody with somebody access slot 11, so as to
In installing multiple seats of honour 20 on the pedestal 10, to tackle the use of the OLED device chamber of more processing substrates.It is wherein described
The particular number at the seat of honour 20 is set on pedestal 10, can with the need depending on, and be not limited.
A kind of adjustable oscillator sensor installation seat of the present invention, the oscillator sensor set thereon are connect using physics
Tactile mode carries out detection when substrate enters apparatus cavity or left, the substrate letter detected so as to stable transmission
Number.
Further, the mounting seat of the present invention, it, which is set, multiple matches somebody with somebody access slot so that it can adjust it in OLED
Installation site in apparatus cavity, while its seat of honour can also adjust the height and position of its relatively described pedestal, so so that its
It is widely applicable, it is easy to it to be promoted the use of in different OLED devices.
The technical scope of the present invention is not limited solely to the content in described above, and those skilled in the art can not take off
On the premise of from the technology of the present invention thought, many variations and modifications are carried out to above-described embodiment, and these deformations and modification all should
When being within the scope of the present invention.
Claims (10)
1. a kind of adjustable oscillator sensor installation seat, it is characterised in that match somebody with somebody including pedestal, on the pedestal and be connected to the seat of honour;Institute
State and support is provided with the seat of honour, support shaft is rotatably connected on the support;Described support shaft one end connects rotor, and the other end connects
The first trigger element of oscillator sensor is connect, the second trigger element of the oscillator sensor is additionally provided with the seat of honour;
Wherein when the rotor touches substrate, the substrate promotes to it can cause the support shaft to turn around the support
It is dynamic, so that first trigger element of its other end connection is close or contacts second trigger element, described two
The close or contact of trigger element can produce electric signal, and the oscillator sensor can receive the electric signal and then to place
OLED device sends the signal that substrate enters;
And when the substrate leaves the rotor, the support shaft sets back, and make it that first trigger element is remote
Second trigger element, between two trigger element away from can also make it that caused electric signal weakens or disappeared between the two
Lose, the oscillator sensor can also receive the electric signal and then the signal left to place OLED device transmission substrate.
2. a kind of adjustable oscillator sensor installation seat according to claim 1, it is characterised in that wherein described first touches
Bill is first to be connected with second trigger element by electric lead with the control unit of the oscillator sensor, and is sent to electricity
Signal.
3. a kind of adjustable oscillator sensor installation seat according to claim 1, it is characterised in that wherein described first touches
Bill member includes magnetite.
4. a kind of adjustable oscillator sensor installation seat according to claim 1, it is characterised in that wherein described second touches
Bill member includes magnetite.
5. a kind of adjustable oscillator sensor installation seat according to claim 1, it is characterised in that on the wherein described seat of honour
Fixing hole is provided with, second trigger element is at least partly revealed in the fixing hole, solid with being connected in the fixing hole
Determine part to be used to fasten second trigger element.
6. a kind of adjustable oscillator sensor installation seat according to claim 1, it is characterised in that on wherein described pedestal
It is provided with first extended up and down and matches somebody with somebody access slot, access slot is matched somebody with somebody in the seat of honour by described, can adjust it up and down relative to the base
The interface sites of seat.
A kind of 7. adjustable oscillator sensor installation seat according to claim 1, it is characterised in that wherein described pedestal end
End left and right, which is extended, assembly side, and second that left and right extension is provided with the assembly side matches somebody with somebody access slot, and the pedestal passes through described
Second matches somebody with somebody access slot, and left and right is adjustable in the chamber of place OLED device.
8. a kind of adjustable oscillator sensor installation seat according to claim 7, it is characterised in that wherein described second matches somebody with somebody
Access slot includes two, is oppositely arranged in the assembly side.
9. a kind of adjustable oscillator sensor installation seat according to claim 1, it is characterised in that wherein described pedestal
The 3rd is additionally provided with upper surface and matches somebody with somebody access slot, for being coupled with place OLED device chamber inner structure.
A kind of 10. adjustable oscillator sensor installation seat according to claim 1, it is characterised in that wherein described pedestal
On be provided with the seat of honour of 2 or more quantity.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710769552.2A CN107591497B (en) | 2017-08-31 | 2017-08-31 | A kind of adjustable oscillator sensor installation seat |
Applications Claiming Priority (1)
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CN201710769552.2A CN107591497B (en) | 2017-08-31 | 2017-08-31 | A kind of adjustable oscillator sensor installation seat |
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CN107591497A true CN107591497A (en) | 2018-01-16 |
CN107591497B CN107591497B (en) | 2019-04-16 |
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CN201710769552.2A Active CN107591497B (en) | 2017-08-31 | 2017-08-31 | A kind of adjustable oscillator sensor installation seat |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103094492A (en) * | 2011-10-27 | 2013-05-08 | 株式会社日立高新技术 | Manufacturing apparatus for organic EL devices |
CN104884146A (en) * | 2012-12-18 | 2015-09-02 | 韩国生产技术研究院 | Method and apparatus for purifying organic material using ionic liquid |
KR20170064753A (en) * | 2015-12-02 | 2017-06-12 | 세메스 주식회사 | Apparatus of manufacturing display cells and method of controlling temperature thereof |
-
2017
- 2017-08-31 CN CN201710769552.2A patent/CN107591497B/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103094492A (en) * | 2011-10-27 | 2013-05-08 | 株式会社日立高新技术 | Manufacturing apparatus for organic EL devices |
CN104884146A (en) * | 2012-12-18 | 2015-09-02 | 韩国生产技术研究院 | Method and apparatus for purifying organic material using ionic liquid |
KR20170064753A (en) * | 2015-12-02 | 2017-06-12 | 세메스 주식회사 | Apparatus of manufacturing display cells and method of controlling temperature thereof |
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CN107591497B (en) | 2019-04-16 |
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