CN107588699A - A kind of coated thread feeler gauge - Google Patents
A kind of coated thread feeler gauge Download PDFInfo
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- CN107588699A CN107588699A CN201710774365.3A CN201710774365A CN107588699A CN 107588699 A CN107588699 A CN 107588699A CN 201710774365 A CN201710774365 A CN 201710774365A CN 107588699 A CN107588699 A CN 107588699A
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Abstract
The invention discloses a kind of coated thread feeler gauge, its drip irrigation device is to include screw rod, the both ends of the screw rod are detachably provided with thread gage, the surface of the thread gage is sequentially provided with TiAlN film layers from the bottom to top, ZrCN film layers and CrSiAlN film layers, the present invention is using ZrCN film layers as intermediate layer, can preferably it soak on the surface of CrSiAlN film layers and TiAlN film layers, so that the distance between CrSiAlN film layers and polar group in TiAlN film layers become very small, because the effect of Van der Waals force or hydrogen bond produces attachment balance between polar group, improve adhesive force of the CrSiAlN film layers in TiAlN film layers, so as to improve the abrasion resistance properties on thread gage surface.
Description
Technical field
The present invention relates to test measuring device, more particularly to a kind of coated thread feeler gauge.
Background technology
Plug thread gauge is the correctness instrument for measuring dimension of inner screw thread.Generally, the species of plug thread gauge can be divided into common thick
Three kinds of tooth, closely-pitched and gas pipe thread.At this stage, plug thread gauge is mostly portable, including screw rod, is removably connected with screw rod
Various sizes of thread gage, with convenient use person according to different demands, from different types of plug thread gauge.
At present, Authorization Notice No. is that CN105674835A patent of invention discloses a kind of portable screw thread in existing patent
Feeler gauge, including screw rod and the first measurement portion, the first measurement portion are set coning, and the external diameter of its upper end is more than the outer of its lower end
Footpath, the outer surface of the first measurement portion are provided with multilayer external screw thread, are separated by that externally threaded pitch is identical, and screw rod is fixedly connected on first
The top of measurement portion, the plug thread gauge can rapidly measure the thread size of testee, and detection process is quick and easy,
Time of measuring is shorter.
But adhesion mill can occur in measurement process, between the first measurement portion and internal thread to be measured for above-mentioned plug thread gauge
Damage and abrasive wear, reduce the service life of the first measurement portion；From the point of view of being modified angle from surface, improve plug thread gauge first and survey
The wear-resisting and antifriction performance in amount portion is the main path for extending plug thread gauge service life.
The content of the invention
It is an object of the invention to provide a kind of coated thread feeler gauge, and coating is coated with the first measurement portion of plug thread gauge, shows
Write the wear-resisting and antifriction performance for enhancing measurement portion.
The present invention above-mentioned technical purpose technical scheme is that：
A kind of coated thread feeler gauge, including screw rod, the both ends of the screw rod are detachably provided with thread gage, the surface of the thread gage
TiAlN film layers, ZrCN film layers and CrSiAlN film layers are sequentially provided with from the bottom to top.
By using above-mentioned technical proposal, TiAlN film layers are the progress alloying formation on the basis of TiN, in purple
Black.It it is 3~4 times of TiN coating lifes when working as processing stainless steel, titanium alloy, nickel alloy and high-alloy steel.As can be seen here
TiAlN films are compared with TiAlN thin film, in hardness, friction factor, thermal conductivity, film-substrate cohesion, thermohardening, high-temperature oxidation resistance
Having etc. all many-sides greatly improves, and extends the service life of coating.When Al levels increase to one in TiAlN films
During definite value, in high temperature working processes, the surface of workpiece can generate one layer of fine and close Al2O3Film, protected so as to form hard inertia
Sheath, improve the abrasion resistance properties of the coating；ZrCN film layers have the advantages that intensity is high, and wearability is good, the addition energy of C element
It is enough to form the amorphous carbon self-lubricating layer with self-lubricating function on thread gage surface, so as to reduce the coefficient of friction of coating；With
Ti base coatings are compared, and oxidation susceptibility, decay resistance, abrasion resistance properties and the toughness of Cr base coatings are all very superior, Cr-Al-N
Coating system can accommodate more Al and keep stable cubic lattice structure, moreover, Cr, Al member in CrAlN coatings
Element reacts to form Al with the O in air2O3And Cr2O3Oxide-film, play suppression oxidation, wear-resisting and heat-insulated effect；In CrAlN
In coating introduce Si elements after, preferred orientation from（111）It is changed into（200）, microstructure refined, CrAlSiN film layer knots
Structure becomes fine and close and does not have column crystal；Be coated with successively on the surface of thread gage TiAlN film layers, ZrCN film layers with
CrSiAlN film layers, if CrSiAlN film layers are directly coated in TiAlN film layers, CrSiAlN film layers are in TiAlN films
Adhesive force on layer is smaller；The present invention is using ZrCN film layers as intermediate layer, can preferably be soaked in CrSiAlN film layers
With on the surface of TiAlN film layers so that the distance between CrSiAlN film layers and polar group in TiAlN film layers become
It is very small, because the effect of Van der Waals force or hydrogen bond produces attachment balance between polar group, improve CrSiAlN film layers and exist
Adhesive force in TiAlN film layers, so that there is excellent fastness in coating prepared by thread gage surface, improve screw thread
Advise wear-resistant, the corrosion-resistant and pyro-oxidation resistance on surface.
The present invention is further arranged to：Ti and Al mass ratio 1 in the TiAlN film layers：1~3.
By using above-mentioned technical proposal, the density of Titanium is 4.51g/cm3, higher than aluminium less than steel, copper, nickel, but
Specific strength is located at first of metal；Titanium and oxygen have very big affinity, in atmosphere or in oxygen containing medium, one layer of titanium Surface Creation
The oxide-film fine and close, adhesive force is strong, inertia is big；Self-healing or it can also be regenerated again quickly even if mechanical wear occurs, so, gold
Category titanium be it is a kind of it is in light weight, intensity is high, have good resistance to corrosion metal；Metallic aluminium forms alloy with other elements
Afterwards, intensity significantly increases, and specific stiffness is significantly larger than stainless steel, and aluminium also has good corrosion resistance and preferable plasticity；Together
When, aluminium has good thermal conductivity, can be used as various heat sink materials；The mass ratio of Ti and Al in TiAlN film layers is limited as 1：1
~ 3 so that the coating is with good decay resistance and excellent intensity.
The present invention is further arranged to：The preparation method of the TiAlN film layers is as follows：
（1）Thread gage is polished using sand paper, is then polished using abrasive pastes, removes corrosion and the oxygen of specimen surface
Change film；
（2）Then by thread gage successively in acetone and absolute ethyl alcohol distinguish ultrasonic wave cleaning 10min, remove surface greasy dirt and
The acetone of residual；
（3）Thread gage is dried, and put into purge chamber, aura cleans 30 ~ 40min；
（4）Once purged thread gage is sent in sputtering chamber, using high-purity Ti target and Al targets, Ti targets access dc source, Al targets
Radio-frequency power supply is accessed, and is passed through gas Ar and reacting gas N2, vacuumize simultaneously, regulation vacuum is 6 ~ 6.5 × 10-4Pa, work
It is 0.5 ~ 0.6Pa to make pressure, and the temperature of thread gage is 350 ~ 380 DEG C；
（5）After pre-sputtering 5min, start sputter coating, coating film thickness is 0.0006 ~ 0.0007mm；
（6）After stopping sputtering, parameter is adjusted to initial value, treats that thread gage carries out being cooled to room temperature.
The present invention is further arranged to：Step（4）Middle Ti targets sputtering current is 0.2 ~ 0.25A.
The present invention is further arranged to：Step（4）Middle Al target power outputs are 40 ~ 120W.
The present invention is further arranged to：Step（4）Middle nitrogen flow is 30 ~ 40sccm, and argon flow amount is 10 ~ 20sccm.
By using above-mentioned technical proposal, thread gage surface is polished first with abrasive pastes, polished, then with third
Ketone, absolute ethyl alcohol clean to specimen surface respectively, are dried after cleaning up；Ti targets are bombarded using DC current, adopted
Al targets are bombarded with radio-frequency current, Ti ions, Al ion depositions are formed uniform and stable on the surface of thread gage caused by bombardment
TiAlN film layers, keep being passed through environmental gas nitrogen and argon working gas in deposition process, process of preparing letter
It is single, coating uniform, stably.
The present invention is further arranged to：The preparation method of the ZrCN film layers is as follows：
（1）The thread gage for being coated with TiAlN film layers is placed in sputtering chamber, using high-purity Zr targets, C targets, Zr targets access direct current
Power supply, C targets access radio-frequency power supply, and it is passed through gas Ar and reacting gas N2, vacuumize simultaneously, regulation vacuum is 6 × 10- 4Pa, operating pressure are 0.5 ~ 0.6Pa, and the temperature of thread gage is 330 ~ 350 DEG C；
（2）After pre-sputtering 1min, start sputter coating, coating film thickness is 0.0002 ~ 0.0003mm；
（3）After stopping sputtering, parameter is adjusted to initial value, treats that thread gage carries out being cooled to room temperature.
By using above-mentioned technical proposal, magnetron sputtering is carried out in TiAlN film layers, using high-purity Zr targets, C targets as target
Source, ZrCN film layers are deposited in TiAlN film layers, in deposition process, the surface temperature of thread gage is 330 ~ 350 DEG C, Zr
Element can be deposited more stably, and the attachment in TiAlN film layers is stronger.
The present invention is further arranged to：The preparation method of the CrSiAlN film layers is as follows：
（1）The thread gage for being coated with ZrCN film layers is placed in sputtering chamber, using the mono- target co-sputtering of high-purity Cr, Al, Si, Cr,
Si targets access dc source, Al targets access radio-frequency power supply, and are passed through gas Ar and reacting gas N2, vacuumize simultaneously, regulation is true
Reciprocal of duty cycle is 6 × 10-4Pa, operating pressure are 0.5 ~ 0.6Pa, and the temperature of thread gage is 320 ~ 330 DEG C；
（2）Sputter coating, until coating film thickness is 0.0002 ~ 0.0003mm；
（3）After stopping sputtering, parameter is adjusted to initial value, treats that thread gage is cooled down.
By using above-mentioned technical proposal, using the mono- target co-sputtering of high-purity Cr, Al, Si, Cr, Si target access dc source,
Al targets access radio-frequency power supply, are advantageous to be coated with the uniform and stable CrSiAlN film layers of performance in ZrCN film layers.
In summary, the invention has the advantages that：
1st, the present invention carries out coating on thread gage surface by way of magnetron sputtering, and it is thin to be coated with TiAlN successively from the bottom to top
Film layer, ZrCN film layers and CrSiAlN film layers so that the thread gage of preparation has high intensity, excellent wear-resistant, corrosion resistant
Erosion, high-low temperature resistant and antioxygenic property；
2nd, ZrCN film layers are coated between TiAlN film layers and CrSiAlN film layers, ZrCN film layers have intensity height, resistance to
The advantages that mill property is good, adding for C element can form the amorphous carbon self-lubricating layer with self-lubricating function on thread gage surface,
Be advantageous to improve the self-leveling between TiAlN film layers and CrSiAlN film layers, so as to strengthen TiAlN film layers with
Adhesive force between CrSiAlN film layers；
3rd, when preparing TiAlN film layers, the surface temperature of thread gage is 350 ~ 380 DEG C, and when preparing ZrCN film layers, regulation
Specimen temperature is 330 ~ 350 DEG C, and when preparing CrSiAlN film layers, adjusting sample temperature is 320 ~ 330 DEG C, is favorably improved
The adhesive force on thread gage surface.
Brief description of the drawings
Fig. 1 is the structural representation of embodiment plug thread gauge；
Fig. 2 is the sectional view of embodiment plug thread gauge.
In figure：1st, screw rod；2nd, thread gage；3rd, TiAlN film layers；4th, ZrCN film layers；5th, CrSiAlN film layers.
Embodiment
The present invention is described in further detail below in conjunction with drawings and examples.
Embodiment one：
A kind of coated thread feeler gauge, as shown in figure 1, including the screw rod 1 of cylindrical shape, screw thread is detachably provided with the both ends of screw rod 1
Rule 2, on the surface of thread gage 2 from the bottom to top successively magnetron sputtering be formed with TiAlN film layers 3, ZrCN film layers 4 with
CrSiAlN film layers 5.
The preparation process of wherein TiAlN film layers 3 is as follows：
（1）The surface of thread gage 2 is polished using sand paper, is then polished using abrasive pastes, removes specimen surface
Corrosion and oxide-film；
（2）Then thread gage 2 is distinguished to ultrasonic wave cleaning 10min in acetone and absolute ethyl alcohol successively, remove the greasy dirt on surface
With the acetone of residual；
（3）Thread gage 2 is dried, and put into purge chamber, aura cleaning 30min；
（4）Thread gage 2 after cleaning is sent in sputtering chamber, uses purity as 99.999% Ti targets and Al targets, the size of target
Specification is 50.8 × 3mm of Φ3, Ti targets access dc source, sputtering current 0.2A, Al target access radio-frequency power supply, adjust Al targets
Power is 80W, and is passed through working gas Ar and reacting gas N2, purity 99.999%, N2Flow is 30sccm, Ar gas flows
For 10sccm, vacuumize simultaneously, regulation vacuum is 6.0 × 10-4Pa, operating pressure 0.5Pa, operating temperature are 350 DEG C；
（5）After pre-sputtering 5min, start sputter coating, coating film thickness 0.0006mm；
（6）After stopping sputtering, parameter is adjusted to initial value, pass hull closure, treats that thread gage 2 carries out being cooled to room temperature.
The preparation process of ZrCN film layers 4 is as follows：
（1）The thread gage 2 for being coated with TiAlN film layers 3 is placed in sputtering chamber, target is changed, using high-purity Zr targets, C targets, Zr
Target accesses dc source, sputtering current 0.2A, C target access radio-frequency power supply, power 60W, and is passed through working gas Ar and anti-
Answer gas N2, vacuumize simultaneously, regulation vacuum is 6 × 10-4Pa, operating pressure 0.5Pa, operating temperature are 330 DEG C；
（2）After pre-sputtering 1min, start sputter coating, coating film thickness 0.0001mm；
（3）After stopping sputtering, parameter is adjusted to initial value, pass hull closure, treats that thread gage carries out being cooled to room temperature.
The preparation process of CrSiAlN film layers 5 is as follows：
（1）The thread gage 2 for being coated with ZrCN film layers 4 is placed in sputtering chamber, target is changed, using the mono- target of high-purity Cr, Al, Si
Cosputtering, Cr, Si target access dc source, Cr targets sputtering current are 0.25A, and Si targets sputtering current is 0.15A, and the access of Al targets is penetrated
Frequency power, Al target power outputs are 100W, and are passed through gas Ar and reacting gas N2, vacuumize simultaneously, regulation vacuum is 6 × 10- 4Pa, operating pressure 0.5Pa, operating temperature are 320 DEG C；
（2）Sputter coating, until coating film thickness is 0.0002mm；
（3）After stopping sputtering, parameter is adjusted to initial value, treats that thread gage is cooled down.
Embodiment two：
A kind of coated thread feeler gauge, the difference with embodiment one are：
Wherein, the preparation process of TiAlN film layers 3 is as follows：
（1）The surface of thread gage 2 is polished using sand paper, is then polished using abrasive pastes, removes specimen surface
Corrosion and oxide-film；
（2）Then thread gage 2 is distinguished to ultrasonic wave cleaning 10min in acetone and absolute ethyl alcohol successively, remove the greasy dirt on surface
With the acetone of residual；
（3）Thread gage 2 is dried, and put into purge chamber, aura cleaning 35min；
（4）Thread gage 2 after cleaning is sent in sputtering chamber, uses purity as 99.999% Ti targets and Al targets, the size of target
Specification is 50.8 × 3mm of Φ3, Ti targets access dc source, sputtering current 0.22A, Al target access radio-frequency power supply, adjust Al targets
Power is 40W, and is passed through working gas Ar and reacting gas N2, purity 99.999%, N2Flow is 35sccm, Ar gas flows
For 10sccm, vacuumize simultaneously, regulation vacuum is 6.0 × 10-4Pa, operating pressure 0.55Pa, operating temperature are 360 DEG C；
（5）After pre-sputtering 5min, start sputter coating, coating film thickness 0.00065mm；
（6）After stopping sputtering, parameter is adjusted to initial value, pass hull closure, treats that thread gage 2 carries out being cooled to room temperature.
The preparation process of ZrCN film layers 4 is as follows：
（1）The thread gage 2 for being coated with TiAlN film layers 3 is placed in sputtering chamber, target is changed, using high-purity Zr targets, C targets, Zr
Target accesses dc source, sputtering current 0.25A, C target access radio-frequency power supply, power 60W, and is passed through working gas Ar and anti-
Answer gas N2, vacuumize simultaneously, regulation vacuum is 6.5 × 10-4Pa, operating pressure 0.55Pa, operating temperature are 330 DEG C；
（2）After pre-sputtering 1min, start sputter coating, coating film thickness 0.00015mm；
（3）After stopping sputtering, parameter is adjusted to initial value, pass hull closure, treats that thread gage carries out being cooled to room temperature.
The preparation process of CrSiAlN film layers 5 is as follows：
（1）The thread gage 2 for being coated with ZrCN film layers 4 is placed in sputtering chamber, target is changed, using the mono- target of high-purity Cr, Al, Si
Cosputtering, Cr, Si target access dc source, Cr targets sputtering current are 0.25A, and Si targets sputtering current is 0.15A, and the access of Al targets is penetrated
Frequency power, Al target power outputs are 100W, and are passed through gas Ar and reacting gas N2, vacuumize simultaneously, regulation vacuum is 7 × 10- 4Pa, operating pressure 0.6Pa, operating temperature are 325 DEG C；
（2）Sputter coating, until coating film thickness is 0.00015mm；
（3）After stopping sputtering, parameter is adjusted to initial value, pass hull closure, treats that thread gage is cooled down.
Embodiment three：
A kind of coated thread feeler gauge, the difference with embodiment one are：
Wherein, the preparation process of TiAlN film layers 3 is as follows：
（1）The surface of thread gage 2 is polished using sand paper, is then polished using abrasive pastes, removes specimen surface
Corrosion and oxide-film；
（2）Then thread gage 2 is distinguished to ultrasonic wave cleaning 10min in acetone and absolute ethyl alcohol successively, remove the greasy dirt on surface
With the acetone of residual；
（3）Thread gage 2 is dried, and put into purge chamber, aura cleaning 40min；
（4）Thread gage 2 after cleaning is sent in sputtering chamber, uses purity as 99.999% Ti targets and Al targets, the size of target
Specification is 50.8 × 3mm of Φ3, Ti targets access dc source, sputtering current 0.25A, Al target access radio-frequency power supply, adjust Al targets
Power is 60W, and is passed through working gas Ar and reacting gas N2, purity 99.999%, N2Flow is 40sccm, Ar gas flows
For 15sccm, vacuumize simultaneously, regulation vacuum is 6.0 × 10-4Pa, operating pressure 0.6Pa, operating temperature are 370 DEG C；
（5）After pre-sputtering 5min, start sputter coating, coating film thickness 0.0007mm；
（6）After stopping sputtering, parameter is adjusted to initial value, pass hull closure, treats that thread gage 2 carries out being cooled to room temperature.
The preparation process of ZrCN film layers 4 is as follows：
（1）The thread gage 2 for being coated with TiAlN film layers 3 is placed in sputtering chamber, target is changed, using high-purity Zr targets, C targets, Zr
Target accesses dc source, sputtering current 0.27A, C target access radio-frequency power supply, power 80W, and is passed through working gas Ar and anti-
Answer gas N2, vacuumize simultaneously, regulation vacuum is 6.5 × 10-4Pa, operating pressure 0.6Pa, operating temperature are 330 DEG C；
（2）After pre-sputtering 1min, start sputter coating, coating film thickness 0.0001mm；
（3）After stopping sputtering, parameter is adjusted to initial value, pass hull closure, treats that thread gage carries out being cooled to room temperature.
The preparation process of CrSiAlN film layers 5 is as follows：
（1）The thread gage 2 for being coated with ZrCN film layers 4 is placed in sputtering chamber, target is changed, using the mono- target of high-purity Cr, Al, Si
Cosputtering, Cr, Si target access dc source, Cr targets sputtering current are 0.25A, and Si targets sputtering current is 0.15A, and the access of Al targets is penetrated
Frequency power, Al target power outputs are 100W, and are passed through gas Ar and reacting gas N2, vacuumize simultaneously, regulation vacuum is 6 × 10- 4Pa, operating pressure 0.6Pa, operating temperature are 330 DEG C；
（2）Sputter coating, until coating film thickness is 0.0002mm；
（3）After stopping sputtering, parameter is adjusted to initial value, pass hull closure, treats that thread gage is cooled down.
Example IV：
A kind of coated thread feeler gauge, the difference with embodiment one are：
Wherein, the preparation process of TiAlN film layers 3 is as follows：
（1）The surface of thread gage 2 is polished using sand paper, is then polished using abrasive pastes, removes specimen surface
Corrosion and oxide-film；
（2）Then thread gage 2 is distinguished to ultrasonic wave cleaning 10min in acetone and absolute ethyl alcohol successively, remove the greasy dirt on surface
With the acetone of residual；
（3）Thread gage 2 is dried, and put into purge chamber, aura cleaning 40min；
（4）Thread gage 2 after cleaning is sent in sputtering chamber, uses purity as 99.999% Ti targets and Al targets, the size of target
Specification is 50.8 × 3mm of Φ3, Ti targets access dc source, sputtering current 0.23A, Al target access radio-frequency power supply, adjust Al targets
Power is 120W, and is passed through working gas Ar and reacting gas N2, purity 99.999%, N2Flow is 40sccm, Ar gas streams
Measure as 20sccm, vacuumize simultaneously, regulation vacuum is 6.0 × 10-4Pa, operating pressure 0.6Pa, operating temperature are 370 DEG C；
（5）After pre-sputtering 5min, start sputter coating, coating film thickness 0.0007mm；
（6）After stopping sputtering, parameter is adjusted to initial value, pass hull closure, treats that thread gage 2 carries out being cooled to room temperature.
The preparation process of ZrCN film layers 4 is as follows：
（1）The thread gage 2 for being coated with TiAlN film layers 3 is placed in sputtering chamber, target is changed, using high-purity Zr targets, C targets, Zr
Target accesses dc source, sputtering current 0.3A, C target access radio-frequency power supply, power 100W, and is passed through working gas Ar and anti-
Answer gas N2, vacuumize simultaneously, regulation vacuum is 6.5 × 10-4Pa, operating pressure 0.6Pa, operating temperature are 340 DEG C；
（2）After pre-sputtering 1min, start sputter coating, coating film thickness 0.0002mm；
（3）After stopping sputtering, parameter is adjusted to initial value, pass hull closure, treats that thread gage carries out being cooled to room temperature.
The preparation process of CrSiAlN film layers 5 is as follows：
（1）The thread gage 2 for being coated with ZrCN film layers 4 is placed in sputtering chamber, target is changed, using the mono- target of high-purity Cr, Al, Si
Cosputtering, Cr, Si target access dc source, Cr targets sputtering current are 0.25A, and Si targets sputtering current is 0.15A, and the access of Al targets is penetrated
Frequency power, Al target power outputs are 100W, and are passed through gas Ar and reacting gas N2, vacuumize simultaneously, regulation vacuum is 6.5 × 10-4Pa, operating pressure 0.6Pa, operating temperature are 320 DEG C；
（2）Sputter coating, until coating film thickness is 0.0001mm；
（3）After stopping sputtering, parameter is adjusted to initial value, pass hull closure, treats that thread gage is cooled down.
Comparative example one：Compared with embodiment one, lack ZrCN film layers.
Comparative example two：Compared with embodiment one, lack ZrCN film layers and CrSiAlN film layers.
Comparative example three：Compared with embodiment one, lack TiAlN film layers and ZrCN film layers.
Detection means：
Nano hardness detects：Hardness and the sign of modulus of elasticity are carried out to film using nano indentation test method.Using nanometer
Impression instrument is that the G200 nano-hardness testers maximum load of Agilent company of the U.S. production is 10mN, and load resolution ratio is 1nN, maximum
Compression distance is 15nm, displacement resolution 0.0002nm.
Hardness and the testing result of modulus of elasticity are as shown in the table
| Sample | Hardness（GPa） | Modulus of elasticity（GPa） |
| Embodiment one | 18.56 | 286.7 |
| Embodiment two | 13.87 | 228.3 |
| Embodiment three | 14.28 | 236.1 |
| Example IV | 16.35 | 265.6 |
| Comparative example one | 7.68 | 146.8 |
| Comparative example two | 9.62 | 152.9 |
| Comparative example three | 10.34 | 168.2 |
By upper table, the hardness for the coating being coated with through embodiment is up to more than 13GPa, and comparative example one lacks ZrCN films
Layer, hardness are remarkably decreased, and show that the binding ability of TiAlN film layers and CrSiAlN film layers is not strong, and CrSiAlN film layers
Adhesive force in TiAlN film layers is weaker；Correspondingly, modulus of elasticity is identical with the variation tendency of hardness.
Embodiment is compared with comparative example two, comparative example three, independent TiAlN film layers and independent CrSiAlN film layers, the two
Hardness in 10GPa or so, show that embodiment has higher hardness, resistance external force polishing machine is excellent.
This specific embodiment is only explanation of the invention, and it is not limitation of the present invention, people in the art
Member can make the modification of no creative contribution to the present embodiment as needed after this specification is read, but as long as at this
All protected in the right of invention by Patent Law.
Claims (8)
1. a kind of coated thread feeler gauge, including screw rod, the both ends of the screw rod are detachably provided with thread gage, it is characterised in that：Institute
The surface for stating thread gage is sequentially provided with TiAlN film layers, ZrCN film layers and CrSiAlN film layers from the bottom to top.
A kind of 2. coated thread feeler gauge according to claim 1, it is characterised in that：Ti and Al in the TiAlN film layers
Mass ratio 1：1~3.
A kind of 3. coated thread feeler gauge according to claim 2, it is characterised in that the preparation method of the TiAlN film layers
It is as follows：
（1）Thread gage is polished using sand paper, is then polished using abrasive pastes, removes corrosion and the oxygen of specimen surface
Change film；
（2）Then by thread gage successively in acetone and absolute ethyl alcohol distinguish ultrasonic wave cleaning 10min, remove surface greasy dirt and
The acetone of residual；
（3）Thread gage is dried, and put into purge chamber, aura cleans 30 ~ 40min；
（4）Once purged thread gage is sent in sputtering chamber, using high-purity Ti target and Al targets, Ti targets access dc source, Al targets
Radio-frequency power supply is accessed, and is passed through gas Ar and reacting gas N2, vacuumize simultaneously, regulation vacuum is 6 ~ 6.5 × 10-4Pa, work
It is 0.5 ~ 0.6Pa to make pressure, and operating temperature is 350 ~ 380 DEG C；
（5）After pre-sputtering 5min, start sputter coating, coating film thickness is 0.0006 ~ 0.0007mm；
（6）After stopping sputtering, parameter is adjusted to initial value, treats that thread gage carries out being cooled to room temperature.
A kind of 4. coated thread feeler gauge according to claim 3, it is characterised in that：Step（4）Middle Ti targets sputtering current is
0.2~0.25A。
A kind of 5. coated thread feeler gauge according to claim 3, it is characterised in that：Step（4）Middle Al target power outputs be 40 ~
120W。
A kind of 6. coated thread feeler gauge according to claim 3, it is characterised in that：Step（4）Middle nitrogen flow be 30 ~
40sccm, argon flow amount are 10 ~ 20sccm.
A kind of 7. coated thread feeler gauge according to claim 1, it is characterised in that the preparation method of the ZrCN film layers
It is as follows：
（1）The thread gage for being coated with TiAlN film layers is placed in sputtering chamber, using high-purity Zr targets, C targets, Zr targets access direct current
Power supply, C targets access radio-frequency power supply, and it is passed through gas Ar and reacting gas N2, vacuumize simultaneously, regulation vacuum is 6 × 10- 4Pa, operating pressure are 0.5 ~ 0.6Pa, and operating temperature is 330 ~ 350 DEG C；
（2）After pre-sputtering 1min, start sputter coating, coating film thickness is 0.0002 ~ 0.0003mm；
（3）After stopping sputtering, parameter is adjusted to initial value, treats that thread gage carries out being cooled to room temperature.
A kind of 8. coated thread feeler gauge according to claim 1, it is characterised in that the preparation side of the CrSiAlN film layers
Method is as follows：
（1）The thread gage for being coated with ZrCN film layers is placed in sputtering chamber, using the mono- target co-sputtering of high-purity Cr, Al, Si, Cr,
Si targets access dc source, Al targets access radio-frequency power supply, and are passed through gas Ar and reacting gas N2, vacuumize simultaneously, regulation is true
Reciprocal of duty cycle is 6 × 10-4Pa, operating pressure are 0.5 ~ 0.6Pa, and operating temperature is 320 ~ 330 DEG C；
（2）Sputter coating, until coating film thickness is 0.0002 ~ 0.0003mm；
（3）After stopping sputtering, parameter is adjusted to initial value, treats that thread gage is cooled down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710774365.3A CN107588699B (en) | 2017-08-31 | 2017-08-31 | Coating thread plug gauge |
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