CN107577089A - The processing procedure and processing apparatus of a kind of display panel - Google Patents
The processing procedure and processing apparatus of a kind of display panel Download PDFInfo
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- CN107577089A CN107577089A CN201710838185.7A CN201710838185A CN107577089A CN 107577089 A CN107577089 A CN 107577089A CN 201710838185 A CN201710838185 A CN 201710838185A CN 107577089 A CN107577089 A CN 107577089A
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- Prior art keywords
- alignment film
- substrate
- display panel
- film
- over again
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
Abstract
The present invention discloses the processing procedure and processing apparatus of a kind of display panel, and the processing procedure includes step：Two pieces of substrates are provided：First substrate and second substrate；Initial alignment film is coated with the first surface of the substrate；Post bake is carried out to the initial alignment film heating；The setting of the initial alignment film is detected, determines the orientation film unit therein that need to be done over again；The orientation film unit that need to be done over again is removed using alignment film remover.The present invention using alignment film remover after detecting the setting of initial alignment film due to removing the orientation film unit that need to be done over again, possible destruction is not caused to the substrate of display panel, the orientation film unit that need to be done over again timely and effectively is handled while not increasing extra fabrication steps, rework cost is reduced, improves production efficiency.
Description
Technical field
The present invention relates to display technology field, in particular, is related to the processing procedure and processing apparatus of a kind of display panel.
Background technology
Liquid crystal display has many merits such as thin fuselage, power saving, radiationless, is widely used.Existing market
On liquid crystal display it is most of be backlight liquid crystal display, it includes liquid crystal panel and backlight module
(backlightmodule).The operation principle of liquid crystal panel is to place liquid crystal molecule among the parallel glass substrate of two panels, and
Apply driving voltage on two panels glass substrate to control the direction of rotation of liquid crystal molecule, the light of backlight module is reflected
To produce picture.
Wherein, Thin Film Transistor-LCD (Thin Film Transistor-Liquid Crystal
Display, TFT-LCD) due to performances such as low power consumption, excellent picture quality and higher production yields, at present
The leading position of display field is gradually occupied.Equally, Thin Film Transistor-LCD includes liquid crystal panel and backlight
Module, liquid crystal panel include color membrane substrates (Color Filter Substrate, CF Substrate, also referred to as colored filter
Substrate), thin-film transistor array base-plate (Thin Film Transistor Substrate, TFT Substrate) and light shield
(Mask), there is transparency electrode in the relative inner of aforesaid substrate.One layer of liquid crystal molecule (Liquid is pressed from both sides between two plate bases
Crystal, LC).
But alignment film can run into situations such as doing over again, to the demoulding of alignment film unavoidably in the coating of display panel is set
But it can not timely and effectively handle, so often not only influence the raising of production capacity, it is also usually bigger caused by demoulding destroys substrate
Workload and cost allowance.
The content of the invention
The technical problems to be solved by the invention are to provide the display panel that a kind of rework cost is low, production efficiency is high
Processing procedure.
In addition, the present invention also provides a kind of processing apparatus of display panel.
The purpose of the present invention is achieved through the following technical solutions：
A kind of processing procedure of display panel, the processing procedure include step：
Two pieces of substrates are provided：First substrate and second substrate；
Initial alignment film is coated with the first surface of the substrate；
Post bake is carried out to the initial alignment film heating；
The setting of the initial alignment film is detected, determines the orientation film unit therein that need to be done over again；
The orientation film unit that need to be done over again is removed using alignment film remover.
Wherein, the orientation film unit that need to be done over again is removed using the mode of wet etching.Wet etching (Wet etch)
It is a kind of lithographic method, mainly carves matte on more smooth film surface, so as to increase light path, reduce the reflection of light, etches
Hydrochloric acid of dilution etc. can be used.Wet etching is that etachable material is immersed in the technology corroded in corrosive liquid, and it is a kind of pure
Chemical etching, there is excellent selectivity, having etched current film will stop, without damaging following one layer of other materials
Film.Wet etching is commonly used in that wafer before technological process prepares, cleaning etc. is not related to the link of figure.
Wherein, step is also included in the step of being coated with initial alignment film on the surface of the substrate：
It is coated with by way of ink-jet and the initial alignment film is set；
Front baking is carried out to the initial alignment film heating；
The mode effect of ink-jet namely ink coating (INK) is good, and adhesion property is excellent, and operating procedure is simple, it is not easy to goes out
The phenomenon now to come off with light leak.Front baking (pre bake), which is realized, pre-baked removes solvent (solvent, for lifting the dissolving of alignment film
Property and impressionability), cause alignment film planarizing, can evaporation of solvent as far as possible.Post bake (Post bake) consolidates alignment film
By cyclisation, FAR INFRARED HEATING, Cycling hot-blast heating, hot plate heating etc. can be used.
Wherein, step is also included before the step of being coated with initial alignment film on the surface of the substrate：
Clean the substrate；
Substrate described in heat drying.Ensure that substrate keeps the dry state of cleaning before alignment film is coated with, be easy to orientation
The setting of film.
Wherein, chromatic filter layer and transparent electrode layer, the first substrate and described are provided with the first substrate
Two substrates are opposed, and the first surface of the first surface of the first substrate and the second substrate is opposed, the first substrate and
Spacer units and liquid crystal molecule are provided between the second substrate.Here it is COT (CF on TFT), POT (PS on TFT)
Embodiment.Spacer units (photo spacer, PS) are spread between two pieces of substrates to be used for making both keep certain interval,
So it is easy into box.
According to a further aspect of the invention, the invention also discloses a kind of processing procedure of display panel.
A kind of processing procedure of display panel, the processing procedure include step：
Two pieces of substrates are provided：First substrate and second substrate；
Initial alignment film is coated with the first surface of the substrate：It is coated with to set by way of ink-jet and described initially matches somebody with somebody
To film, front baking is carried out to the initial alignment film heating；
Post bake is carried out to the initial alignment film heating；
The setting of the initial alignment film is detected, determines the orientation film unit therein that need to be done over again；
The orientation film unit that need to be done over again is removed using alignment film remover；
Wherein, chromatic filter layer and transparent electrode layer, the first substrate and described are provided with the first substrate
Two substrates are opposed, and the first surface of the first surface of the first substrate and the second substrate is opposed, the first substrate and
Spacer units and liquid crystal molecule are provided between the second substrate.
According to a further aspect of the invention, the invention also discloses a kind of processing procedure of display panel dress
Put.A kind of processing apparatus of display panel, the processing apparatus include：
Alignment film coater unit：To the initial alignment film of coating setting on the substrate of the display panel；
Alignment film detection unit：The orientation film unit that the defects of to detect the initial alignment film, determination need to do over again；
Alignment film demoulding unit：To remove the orientation film unit that need to be done over again, the alignment film demoulding unit includes
Alignment film remover.
Wherein, the alignment film demoulding unit includes wet etching machine, the side that the wet etching machine passes through wet etching
Formula removes the orientation film unit that need to be done over again.Alignment film demoulding unit can specific equipment selection.
Wherein, the alignment film coater unit includes alignment film oven, and the alignment film oven is initially matched somebody with somebody to described
Heated to film and carry out front baking, post bake.Alignment film coater unit can specific equipment selection.
Wherein, the alignment film detection unit includes charge coupled device camera, the charge coupled device camera
Collection image to be checked is continuously shot to the initial alignment film by way of scanning, then the image to be checked is detected,
It is determined that the orientation film unit that need to be done over again.Charge coupled device camera includes charged coupled device chip, the image of subject
By on lens focus to CCD (Charge Coupled Device) chip, CCD is according to the strong and weak accumulation corresponding proportion of light
Electric charge, the electric charge of each pixel accumulation is under the control of video sequential, point-by-point outer shifting, after filtered, enhanced processing, forms video
Signal output.
Compared with prior art, the solution have the advantages that：
The present invention using alignment film remover after detecting the setting of initial alignment film due to removing the alignment film list that need to be done over again
Member, possible destruction is not caused to the substrate of display panel, timely and effectively handled while not increasing extra fabrication steps
The orientation film unit that need to be done over again, reduce rework cost, improve production efficiency.
Brief description of the drawings
Included accompanying drawing is used for providing being further understood from the embodiment of the present application, which constitutes one of specification
Point, for illustrating presently filed embodiment, and come together with word description to explain the principle of the application.Under it should be evident that
Accompanying drawing in the description of face is only some embodiments of the present application, for those of ordinary skill in the art, is not paying wound
On the premise of the property made is laborious, other accompanying drawings can also be obtained according to these accompanying drawings.In the accompanying drawings：
Fig. 1 is a kind of schematic flow sheet of the processing procedure of display panel of the embodiment of the present invention；
Fig. 2 is a kind of schematic flow sheet of the processing procedure of display panel of the embodiment of the present invention；
Fig. 3 is a kind of structured flowchart of the processing apparatus of display panel of the embodiment of the present invention；
Fig. 4 is a kind of structured flowchart of the processing apparatus of display panel of the embodiment of the present invention；
Fig. 5 is a kind of structural representation of display panel of the embodiment of the present invention；
Fig. 6 is a kind of structural representation of display panel of the embodiment of the present invention；
Fig. 7 is a kind of structural representation of display panel of the embodiment of the present invention.
Wherein, 1, first substrate；2nd, second substrate；3rd, alignment film；4th, defect；5th, chromatic filter layer；6th, transparent electrode layer；
7th, thin film transistor (TFT)；8th, spacer units.
Embodiment
Concrete structure and function detail disclosed herein are only representational, and are for describing showing for the present invention
The purpose of example property embodiment.But the present invention can be implemented by many alternative forms, and it is not interpreted as
It is limited only by the embodiments set forth herein.
In the description of the invention, it is to be understood that term " " center ", " transverse direction ", " on ", " under ", "left", "right",
The orientation or position relationship of the instruction such as " vertical ", " level ", " top ", " bottom ", " interior ", " outer " be based on orientation shown in the drawings or
Position relationship, it is for only for ease of and describes the present invention and simplify description, rather than indicates or imply that signified device or element must
There must be specific orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.In addition, art
Language " first ", " second " are only used for describing purpose, and it is not intended that instruction or implying relative importance or implicit indicating institute
The quantity of the technical characteristic of instruction.Thus, " first " is defined, one can be expressed or be implicitly included to the feature of " second "
Or more this feature.In the description of the invention, unless otherwise indicated, " multiple " are meant that two or more.
In addition, term " comprising " and its any deformation, it is intended that cover non-exclusive include.
In the description of the invention, it is necessary to illustrate, unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or be integrally connected；Can
To be mechanical connection or electrical connection；Can be joined directly together, can also be indirectly connected by intermediary, Ke Yishi
The connection of two element internals.For the ordinary skill in the art, with concrete condition above-mentioned term can be understood at this
Concrete meaning in invention.
Term used herein above is not intended to limit exemplary embodiment just for the sake of description specific embodiment.Unless
Context clearly refers else, otherwise singulative used herein above "one", " one " also attempt to include plural number.Should also
When understanding, term " comprising " and/or "comprising" used herein above provide stated feature, integer, step, operation,
The presence of unit and/or component, and do not preclude the presence or addition of other one or more features, integer, step, operation, unit,
Component and/or its combination.
The present invention is described in further detail with preferred embodiment below in conjunction with the accompanying drawings.
As one embodiment of the present of invention, as shown in figure 1, the processing procedure of the display panel includes step：
S11：Two pieces of substrates are provided：First substrate and second substrate；
S12：Initial alignment film is coated with the first surface of the substrate；
S13：Post bake is carried out to the initial alignment film heating；
S14：The setting of the initial alignment film is detected, determines the orientation film unit therein that need to be done over again；
S15：The orientation film unit that need to be done over again is removed using alignment film remover.The present invention is due to detecting initial orientation
The orientation film unit that need to do over again is removed using alignment film remover after the setting of film, the substrate of display panel is not caused possible
Destroy, timely and effectively handle the orientation film unit that need to be done over again while not increasing extra fabrication steps, reduce rework cost,
Improve production efficiency.Alignment film can also be detected and removed in the step of initial alignment film is set.Wherein, post bake
(Post bake) consolidates alignment film by cyclisation, can use FAR INFRARED HEATING, Cycling hot-blast heating, hot plate heating etc..Typically exist
IR furnace high-temperatures, such uniformity are more preferable.Post bake is to dry glass after development with appropriate temperature to remove moisture and strengthen
It polymerize, and the technique for improving intensity, it enhances the adhesiveness of glued membrane and glass.The temperature and time needed for post bake is set, should
With the fastness of film layer figure and principle will not be deformed into.
Wherein, alignment film demoulding agent material can use NMP (1-METHYLPYRROLIDONE), also known as the pyrrolidones of 1- methyl -2,
METHYLPYRROLIDONE.Colourless transparent oil liquid, micro- smell for having amine.Can be with water, alcohol, ether, ester, ketone, halogenated hydrocarbons, virtue
Hydrocarbon and castor oil dissolve each other.Volatility is low, and heat endurance, chemical stability are good, can be volatilized with vapor.There is hygroscopicity.To light
It is sensitive.Compare, spacer units (PS) can be influenceed thickness causes into box to have by sloughing alignment film (Stripper) using dry etching
Gravity inequality problem.Meanwhile the requirement that alignment film (Stripper) is sloughed using dry etching is higher：Short time dissolving is needed to match somebody with somebody
To film, can not array substrate side (array side) cause aluminium (Al) or copper (Cu) to corrode, also cannot be to color membrane substrates
Side (CF side) pressure gram is vertical to be damaged, and can not injure processing procedure mechanism, i.e., cannot be to PVC, PE, PP, PTFE (polytetrafluoro
Ethene), nylon -66, EPDM (ethylene propylene diene rubber), SUS304 (304 stainless steel) damage.Therefore can not in processing procedure
Convenient use at the same also need to not because its Stripper processing produce it is new the problem of influence processing procedure progress.
As another embodiment of the present invention, as shown in Fig. 2 the processing procedure of the display panel includes step：
S21：Two pieces of substrates are provided：First substrate and second substrate；
S22：It is coated with by way of ink-jet and the initial alignment film is set；
S23：Front baking is carried out to the initial alignment film heating；
S24：Post bake is carried out to the initial alignment film heating；
S25：The setting of the initial alignment film is detected, determines the orientation film unit therein that need to be done over again；
S26：The orientation film unit that need to be done over again is removed using alignment film remover.
The orientation film unit that need to be done over again is removed using alignment film remover after detecting the setting of initial alignment film, not to display
The substrate of panel causes possible destruction, and the orientation that need to be done over again timely and effectively is handled while not increasing extra fabrication steps
Film unit, reduce rework cost, improve production efficiency.Alignment film can also be examined in the step of initial alignment film is set
Survey and remove.The mode effect of ink-jet namely ink coating (INK) is good, and adhesion property is excellent, and operating procedure is simple, it is not easy to goes out
The phenomenon now to come off with light leak.Front baking (pre bake), which is realized, pre-baked removes solvent (solvent, for lifting the dissolving of alignment film
Property and impressionability), cause alignment film planarizing, can evaporation of solvent as far as possible.Typically carried out in predrying stove.Front baking
Purpose is that the solvent in the photoresist film for promoting to have applied volatilizees to increase the adhesiveness of glued membrane and glass baseplate surface.It is general to adopt more
With infra-red furnace low-temperature heat, it is at not only drying but also unhardened state.So, photoresist can still be changed when being exposed
Learn reaction.Specifically, also include step before the step of being coated with initial alignment film on the surface of the substrate：Clean the base
Plate；Substrate described in heat drying.Ensure that substrate keeps the dry state of cleaning before alignment film is coated with, be easy to setting for alignment film
Put.Highdensity hairbrush can be used to coordinate mixing lotion to be washed under water jets under high pressure to substrate.It can in addition contain use
Atmospheric plasma (AP) acts on substrate so that surface tension stabilization when ink droplet drips.Utilized using Excimer UV light (UV) short
The UV of wavelength cuts off the combination of substrate and organic matter, and to be decomposed into water and carbon dioxide can send out, and reaches and removes organic effect swum
Fruit.Infrared ray (IR) baking substrate combination coldplate is used to cause substrate to be in the state of dry alignment film to be coated.
Wherein, as illustrated in figs. 5-7, it is provided with chromatic filter layer and transparent electrode layer on the first substrate, described first
Substrate and the second substrate are opposed, and the first surface of the first surface of the first substrate and the second substrate is opposed, institute
State and be provided with spacer units and liquid crystal molecule between first substrate and the second substrate.Here it is COT (CF on TFT), POT
The embodiment of (PS on TFT).Spacer units (photo spacer, PS) are spread between two pieces of substrates to be used for keeping both
Certain interval, is so easy into box.Such as physical vapour deposition (PVD), exposure, wet method are carried out to first substrate in Array factories to carve
The processing of the processes such as erosion, chemical vapour deposition technique, dry etching；Filter layer of enameling will be covered on first substrate in CF factories again；
Then such as chemical vapor deposition, exposure, dry etching, physical vaporous deposition, wet is carried out to first substrate in Array factories
The process processing such as method etching；Transparency conducting layer will be covered on first substrate in CF factories again.CVD(Chemical Vapor
Deposition) chemical vapour deposition technique, gas phase reaction at high temperature, is developed as the means of coating, but is not only applied
In the coating of coctostable substance, and applied to the refined of high purity metal, powder synthesis, semiconductive thin film etc..Depositing temperature is low,
Film composition is easily-controllable, and thickness is directly proportional to deposition time, and uniformity is reproducible, and step coverage is excellent.It can also equally adopt
With PVD (Physical Vapor Deposition) physical vaporous deposition, realize that material shifts using physical process, by original
Son or molecule are transferred to the process on substrate surface by source.Its effect is can to make some have specific characteristics can (intensity is high, wear-resisting
Property, thermal diffusivity, rotproofness etc.) particulate be sprayed on the relatively low parent of performance so that parent has better performance.PVD bases
This method：Be evaporated in vacuo, sputtering, ion plating (hallow cathode deposition, HCD, hot cathode ion plating, arc ion plating, active reaction from
Sub- plating, RF ion plating, direct-current discharge ion plating).As shown in figure 5, find that first substrate or second substrate have by detection
Problem need to do over again to substrate, and the Array or CF after doing over again must return factory Recycle to bare glass (bare glass),
Cause production capacity and cost allowance；Then, as shown in fig. 6-7, problematic (such as the defective feelings on film of alignment film are found after testing
Condition) just need the defects of existing of doing over again to alignment film or only remove.
As another embodiment of the present invention, the processing procedure of the display panel includes step：Two pieces of substrates are provided：First
Substrate and second substrate；It is coated with by way of ink-jet and the initial alignment film is set；The initial alignment film heating is carried out
Front baking；Post bake is carried out to the initial alignment film heating；Detect the setting of the initial alignment film, determine therein to do over again
Orientation film unit；The orientation film unit that need to be done over again is removed using the mode of wet etching.Detect the setting of initial alignment film
The orientation film unit that need to be done over again is removed using alignment film remover afterwards, possible destruction is not caused to the substrate of display panel, no
The orientation film unit that need to be done over again timely and effectively is handled while increasing extra fabrication steps, rework cost is reduced, improves life
Produce efficiency.Alignment film can also be detected and removed in the step of initial alignment film is set.Ink-jet namely ink coating
(INK) mode effect is good, and adhesion property is excellent, and operating procedure is simple, it is not easy to the phenomenon to come off with light leak occurs.Front baking
(pre bake) realize it is pre-baked go solvent (solvent, for lifting the dissolubility and impressionability of alignment film), cause alignment film
Planarizing, can evaporation of solvent as far as possible.Typically carried out in predrying stove.The purpose of front baking is the photoresist film for promoting to have applied
Interior solvent volatilizees to increase the adhesiveness of glued membrane and glass baseplate surface.It is general to use infra-red furnace low-temperature heat more, make at its
In not only drying but also unhardened state.So, photoresist can still chemically react when being exposed.Post bake (Post bake)
Alignment film is consolidated by cyclisation, FAR INFRARED HEATING, Cycling hot-blast heating, hot plate heating etc. can be used.Typically in IR furnace high-temperatures,
So uniformity is more preferable.Post bake is after development with appropriate temperature drying glass to remove moisture and strengthen its polymerization, is improved
The technique of intensity, it enhances the adhesiveness of glued membrane and glass.The temperature and time needed for post bake is set, should be with film layer figure
Fastness and principle will not be deformed into.Wet etching (Wet etch) is a kind of lithographic method, mainly in more smooth film surface
On carve matte, so as to increase light path, reduce the reflection of light, etching can use hydrochloric acid of dilution etc..Wet etching is will to etch material
Material is immersed in the technology corroded in corrosive liquid, and it is a kind of pure chemistry etching, has excellent selectivity, has been etched current
Film will stop, the film without damaging following one layer of other materials.Wet etching is commonly used in before technological process
Wafer prepare, cleaning etc. is not related to the link of figure.
Specifically, also include step before the step of being coated with initial alignment film on the surface of the substrate：Described in cleaning
Substrate；Substrate described in heat drying.Ensure that substrate keeps the dry state of cleaning before alignment film is coated with, be easy to alignment film
Set.Highdensity hairbrush can be used to coordinate mixing lotion to be washed under water jets under high pressure to substrate.It can in addition contain adopt
Substrate is acted on atmospheric plasma (AP) so that surface tension stabilization when ink droplet drips.Utilized using Excimer UV light (UV)
The UV of short wavelength cuts off the combination of substrate and organic matter, and to be decomposed into water and carbon dioxide can send out, and reaches and removes organic swim
Effect.Infrared ray (IR) baking substrate combination coldplate is used to cause substrate to be in the state of dry alignment film to be coated.
Wherein, as illustrated in figs. 5-7, it is provided with chromatic filter layer and transparent electrode layer on the first substrate, described first
Substrate and the second substrate are opposed, and the second surface of the first surface of the first substrate and the second substrate is opposed, institute
State and be provided with spacer units and liquid crystal molecule between first substrate and the second substrate.Here it is COT (CF on TFT), POT
The embodiment of (PS on TFT).Spacer units (photo spacer, PS) are spread between two pieces of substrates to be used for keeping both
Certain interval, is so easy into box.Such as physical vapour deposition (PVD), exposure, wet method are carried out to first substrate in Array factories to carve
The processing of the processes such as erosion, chemical vapour deposition technique, dry etching；Filter layer of enameling will be covered on first substrate in CF factories again；
Then such as chemical vapor deposition, exposure, dry etching, physical vaporous deposition, wet is carried out to first substrate in Array factories
The process processing such as method etching；Transparency conducting layer will be covered on first substrate in CF factories again.As shown in figure 5, by detection hair
Existing first substrate or second substrate is problematic to be done over again to substrate, the Array or CF after doing over again must return factory Recycle
To bare glass (bare glass), cause production capacity and cost allowance；Then, as shown in fig. 6-7, find that alignment film has after testing
Problem (such as defective situation on film) just needs the defects of existing of doing over again to alignment film or only remove.
As another embodiment of the present invention, as shown in figure 3, the processing apparatus of the display panel includes：Alignment film
Coater unit：To the initial alignment film of coating setting on the substrate of the display panel；Alignment film detection unit：To detect
The orientation film unit that the defects of initial alignment film, determination need to do over again；Alignment film demoulding unit：Described it need to be done over again to remove
Orientation film unit, the alignment film demoulding unit includes alignment film remover.Initially matched somebody with somebody by the detection of alignment film detection unit
The orientation film unit that need to be done over again is removed after to the setting of film using alignment film remover, possibility is not caused to the substrate of display panel
Destruction, timely and effectively handle the orientation film unit that need to be done over again while not increasing extra fabrication steps, reduction is done over again into
Originally production efficiency, is improved.
As another embodiment of the present invention, as shown in figure 4, the processing apparatus of the display panel includes：Alignment film
Coater unit：To the initial alignment film of coating setting on the substrate of the display panel；Alignment film detection unit：To detect
The orientation film unit that the defects of initial alignment film, determination need to do over again；Alignment film demoulding unit：Described it need to be done over again to remove
Orientation film unit, the alignment film demoulding unit includes alignment film remover.Initially matched somebody with somebody by the detection of alignment film detection unit
The orientation film unit that need to be done over again is removed after to the setting of film using alignment film remover, possibility is not caused to the substrate of display panel
Destruction, timely and effectively handle the orientation film unit that need to be done over again while not increasing extra fabrication steps, reduction is done over again into
Originally production efficiency, is improved.The alignment film coater unit includes alignment film oven, and the alignment film oven is to described initial
Alignment film heating carries out front baking, post bake.The alignment film oven includes IR stoves, first in IR stoves through ink-jet application orientation thickness
Low-temperature heat, which is realized, pre-baked removes solvent (solvent, for lifting the dissolubility and impressionability of alignment film), so that alignment film is put down
Integralization, can evaporation of solvent, then consolidate alignment film by cyclisation in the effect of IR furnace high-temperatures as far as possible.The alignment film detection is single
Member includes charge coupled device camera, and the charge coupled device camera is by way of scanning to the initial alignment film
Collection image to be checked is continuously shot, then the image to be checked is detected, determines the orientation film unit that need to do over again.Charged Couple
Device camera includes charged coupled device chip, and the image of subject is by lens focus to CCD (Charge Coupled
Device) on chip, CCD is according to the strong and weak electric charge for accumulating corresponding proportion of light, and the electric charge of each pixel accumulation is in video sequential
Control under, it is point-by-point outer to move, after filtered, enhanced processing, form vision signal output.The detection of alignment film detection unit is initially matched somebody with somebody
The defects of to film, defect include the defects of substrate on film, in film or after previous step effect by foreign matter, cause thickness
Uneven or previous step repairing failure particle, stabs that (glass is pierced through by sharp foreign matter, may be relevant with high temperature process, makes
Glass is more crisp fragile), scratch (caused by due to the object friction above glass route) and Mura.In addition, orientation
The use of film detection unit, can also be between front baking and post bake process not only after post bake process.
As another embodiment of the present invention, the processing apparatus of the display panel includes：Alignment film coater unit：With
To be coated with the substrate of the display panel, initial alignment film is set；Alignment film detection unit：Described initially match somebody with somebody to detect
To film the defects of, determine the orientation film unit that need to do over again；Alignment film demoulding unit：To remove the alignment film list that need to be done over again
Member, the alignment film demoulding unit include wet etching machine, and the wet etching machine is removed described by way of wet etching
The orientation film unit that need to be done over again.By way of using wet etching after alignment film detection unit detects the setting of initial alignment film
The orientation film unit that need to be done over again is removed, possible destruction is not caused to the substrate of display panel, does not increase extra fabrication steps
While timely and effectively handle the orientation film unit that need to be done over again, reduce rework cost, improve production efficiency.The alignment film applies
Cloth unit includes alignment film oven, and the alignment film oven carries out front baking, post bake to the initial alignment film heating.It is described
Alignment film oven includes IR stoves, is realized through the first low-temperature heat in IR stoves of ink-jet application orientation thickness and pre-baked removes solvent
(solvent, for lifting the dissolubility and impressionability of alignment film), cause alignment film planarizing, can vapor away as far as possible
Solvent, then consolidate alignment film by cyclisation in the effect of IR furnace high-temperatures.The alignment film detection unit is taken the photograph including charge coupling device
Camera, the charge coupled device camera are continuously shot collection figure to be checked by way of scanning to the initial alignment film
Picture, then the image to be checked is detected, determines the orientation film unit that need to do over again.Charge coupled device camera includes electric charge
Coupled Device chip, the image of subject pass through on lens focus to CCD (Charge Coupled Device) chip, CCD
According to the electric charge of the strong and weak accumulation corresponding proportion of light, the electric charge of each pixel accumulation is outer point by point to move under the control of video sequential,
After filtered, enhanced processing, vision signal output is formed.Alignment film detection unit detects the defects of initial alignment film, defect bag
The defects of substrate by foreign matter on film, in film or after previous step effect is included, causes thickness inequality or previous step
The particle of repairing failure, stab (glass is pierced through by sharp foreign matter, may be relevant with high temperature process, make glass more crisp fragile),
Scratch (caused by due to the object friction above glass route) and Mura.In addition, the use of alignment film detection unit
, can also be between front baking and post bake process not only after post bake process.
It should be noted that in the above-described embodiments, the material of the substrate can select glass, plastics etc..
In the above-described embodiments, display panel includes liquid crystal panel, OLED (Organic Light-Emitting
Diode) panel, curved surface panel, plasma panel etc., by taking liquid crystal panel as an example, liquid crystal panel includes array base palte (Thin
Film Transistor Substrate, TFT Substrate) and color membrane substrates (Color Filter Substrate, CF
Substrate), the array base palte is oppositely arranged with color membrane substrates, and liquid crystal is provided between the array base palte and color membrane substrates
With spacer units (PS, photo spacer), the array base palte is provided with thin film transistor (TFT) (TFT, Thin Film
Transistor), color membrane substrates are provided with chromatic filter layer.
In the above-described embodiments, color membrane substrates may include tft array, and color film and tft array can be formed on same substrate,
Array base palte may include chromatic filter layer.
In the above-described embodiments, display panel of the invention can be curved face type panel.
Above content is to combine specific preferred embodiment further description made for the present invention, it is impossible to is assert
The specific implementation of the present invention is confined to these explanations.For general technical staff of the technical field of the invention,
On the premise of not departing from present inventive concept, some simple deduction or replace can also be made, should all be considered as belonging to the present invention's
Protection domain.
Claims (10)
1. a kind of processing procedure of display panel, it is characterised in that the processing procedure includes step：
Two pieces of substrates are provided：First substrate and second substrate；
Initial alignment film is coated with the first surface of the substrate；
Post bake is carried out to the initial alignment film heating；
The setting of the initial alignment film is detected, determines the orientation film unit therein that need to be done over again；
The orientation film unit that need to be done over again is removed using alignment film remover.
2. the processing procedure of display panel as claimed in claim 1, it is characterised in that remove the need using the mode of wet etching
The orientation film unit done over again.
3. the processing procedure of display panel as claimed in claim 1, it is characterised in that be coated with the surface of the substrate and initially match somebody with somebody
Also include step into the step of film：
It is coated with by way of ink-jet and the initial alignment film is set；
Front baking is carried out to the initial alignment film heating.
4. the processing procedure of the display panel as described in claim 1-3 is any, it is characterised in that be coated with the surface of the substrate
Also include step before the step of initial alignment film：
Clean the substrate；
Substrate described in heat drying.
5. the processing procedure of display panel as claimed in claim 1, it is characterised in that be provided with colorized optical filtering on the first substrate
Layer and transparent electrode layer, the first substrate and the second substrate are opposed, the first surface of the first substrate and described the
The first surface of two substrates is opposed, and spacer units and liquid crystal molecule are provided between the first substrate and the second substrate.
6. a kind of processing procedure of display panel, it is characterised in that the processing procedure includes step：
Two pieces of substrates are provided：First substrate and second substrate；
Initial alignment film is coated with the first surface of the substrate：It is coated with by way of ink-jet and the initial orientation is set
Film, front baking is carried out to the initial alignment film heating；
Post bake is carried out to the initial alignment film heating；
The setting of the initial alignment film is detected, determines the orientation film unit therein that need to be done over again；
The orientation film unit that need to be done over again is removed using alignment film remover；
Wherein, chromatic filter layer and transparent electrode layer, the first substrate and second base are provided with the first substrate
Plate is opposed, and the first surface of the first surface of the first substrate and the second substrate is opposed, the first substrate and described
Spacer units and liquid crystal molecule are provided between second substrate.
7. a kind of processing apparatus of display panel, it is characterised in that the processing apparatus includes：
Alignment film coater unit：To the initial alignment film of coating setting on the substrate of the display panel；
Alignment film detection unit：The orientation film unit that the defects of to detect the initial alignment film, determination need to do over again；
Alignment film demoulding unit：To remove the orientation film unit that need to be done over again, the alignment film demoulding unit includes orientation
Film remover.
8. the processing apparatus of display panel as claimed in claim 7, it is characterised in that the alignment film demoulding unit includes wet
Method etching machine, the wet etching machine remove the orientation film unit that need to be done over again by way of wet etching.
9. the processing apparatus of display panel as claimed in claim 7, it is characterised in that the alignment film coater unit includes matching somebody with somebody
To film oven, the alignment film oven carries out front baking, post bake to the initial alignment film heating.
10. the processing apparatus of display panel as claimed in claim 7, it is characterised in that the alignment film detection unit includes
Charge coupled device camera, the charge coupled device camera are continuously clapped the initial alignment film by way of scanning
Collection image to be checked is taken the photograph, then the image to be checked is detected, determines the orientation film unit that need to do over again.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710838185.7A CN107577089A (en) | 2017-09-18 | 2017-09-18 | The processing procedure and processing apparatus of a kind of display panel |
| PCT/CN2017/106291 WO2019051918A1 (en) | 2017-09-18 | 2017-10-16 | Display panel processing and processing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710838185.7A CN107577089A (en) | 2017-09-18 | 2017-09-18 | The processing procedure and processing apparatus of a kind of display panel |
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| Publication Number | Publication Date |
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| CN107577089A true CN107577089A (en) | 2018-01-12 |
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|---|---|---|---|
| CN201710838185.7A Pending CN107577089A (en) | 2017-09-18 | 2017-09-18 | The processing procedure and processing apparatus of a kind of display panel |
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| WO (1) | WO2019051918A1 (en) |
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| WO2019051918A1 (en) | 2019-03-21 |
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