CN107565922A - The preparation method of SMD ceramic flat surface pedestals - Google Patents

The preparation method of SMD ceramic flat surface pedestals Download PDF

Info

Publication number
CN107565922A
CN107565922A CN201710820078.1A CN201710820078A CN107565922A CN 107565922 A CN107565922 A CN 107565922A CN 201710820078 A CN201710820078 A CN 201710820078A CN 107565922 A CN107565922 A CN 107565922A
Authority
CN
China
Prior art keywords
ceramic
ceramic substrate
copper
base unit
elargol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201710820078.1A
Other languages
Chinese (zh)
Other versions
CN107565922B (en
Inventor
肖旭辉
唐北安
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hunan Province Fu Jing Electronics Co Ltd
Original Assignee
Hunan Province Fu Jing Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hunan Province Fu Jing Electronics Co Ltd filed Critical Hunan Province Fu Jing Electronics Co Ltd
Priority to CN201710820078.1A priority Critical patent/CN107565922B/en
Publication of CN107565922A publication Critical patent/CN107565922A/en
Application granted granted Critical
Publication of CN107565922B publication Critical patent/CN107565922B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

The present invention provides the preparation method of SMD ceramic flat surface pedestals, and described preparation method includes following steps:Ceramic substrate is made first, and the very empty Splash of use penetrates plated film and metallic film is made, punched after ceramic base plate surface is separated to form several base units;Dried after ceramic substrate after punching is cleaned;Then copper is covered in slot electrode and is formed and covers copper electrode and is carrying out attached copper, protective layer is formed after the ceramic base plate surface marking circuit diagram, gold-plated, pin bores filling perforation after attached copper;Then elargol is printed on ceramic substrate;Place the wafer on corresponding elargol, then chip is fixed by roasting glue;Ceramic substrate will finally be cut after roll welding, form single base unit, the base unit after cutting is tested,.Using the good integrity after this programme, pad solder intensity is high, and oxidation-protective effect is good.

Description

The preparation method of SMD ceramic flat surface pedestals
Technical field
Invention is related to electronic component technology field, refers in particular to the preparation method of SMD ceramic flat surface pedestals.
Background technology
Existing tuning fork crystal pedestal is made using glassy metal sintering method, and packing forms use plug-in unit mode (DIP), its intensity is relatively low, and sealing is poor, it is impossible to automatic chip mounting(SMT)Operation, it is domestic temporarily to be given birth to without SMD tuning fork crystals pedestal Production.
The content of the invention
Invention aims to overcome that the deficiencies in the prior art, there is provided a kind of intensive properties is good, good seal, production cost are low, Energy automatic chip mounting does the preparation method of the SMD ceramic flat surface pedestals of industry.
To achieve the above object, inventing provided technical scheme is:The preparation method of SMD ceramic flat surface pedestals, it is described Preparation method include following steps:
1), make thickness be 0.3 ~ 0.8mm ceramic substrate;
2), using gold-plated method to ceramic substrate carry out ceramic metallization, make ceramic base plate surface formed metallic film;
3), ceramic base plate surface delineate cut line groove, several base units are separated to form by wire casing;
4), ceramic substrate is put into puncher, each base unit is punched, enters the linker that metallizes so as to the hole of air exercise Plate tow sides, form electrode path;
5), the ceramic substrate after punching be put into plasma cleaning equipment cleaned;
6), ceramic surface cover copper formed cover copper electrode;
7), to complete the 6th)The ceramic substrate of step carries out covering copper, makes ceramic base plate surface composite multi-layer metal, institute by covering copper State that to cover the metallic element of copper be titanium, nickel, one kind in copper or multi-layer metal structure;
8), after copper is covered ceramic base plate surface marking circuit diagram;
9), marking circuit after carry out it is gold-plated, institute's metal cladding thickness be 1-10 μm;
10), will complete the 9th)The ceramic substrate of step carries out pin bores filling perforation, again by plating in ceramic substrate table after filling perforation Face forms protective layer;
11), will complete the 10th)Elargol is printed on the ceramic substrate of step, elargol corresponds to the copper electrode that covers on each base unit, institute State and cover copper electrode and be located at base unit side, elargol is located at base unit opposite side, elargol and covers and passes through pin between copper electrode Hole connects;
12), place the wafer on corresponding elargol, then fix chip by roasting glue;
13), using pulse seam welder by it is upper lid be welded on completion the 12nd)After step on corresponding base unit;The welding is In high vacuum 8X10-3More than Pa is welded;
14), ceramic substrate is cut after roll welding, form single base unit, the base unit after cutting tested, .
This programme uses pedestal made of ceramic material, and it has, and high intensity, good insulating while manufacturing cost are low, More metal layers are plated again after marking circuit, are easy to protect circuit, circuit and metal layer are prevented using protective layer, Using the good integrity after this programme, intensity is high, and oxidation-protective effect is good.
Brief description of the drawings
Fig. 1 is the overall structure diagram of invention.
Fig. 2 is the base unit structural representation of invention.
Fig. 3 is the SMD base of ceramic cellular construction schematic diagrams of invention.
Embodiment
Invention is described further with reference to all accompanying drawings, the preferred embodiment of invention is:Referring to accompanying drawing 1 to accompanying drawing 3, the preparation method of the SMD ceramic flat surface pedestals described in the present embodiment, described preparation method includes following steps:
1), make thickness be 0.3 ~ 0.8mm ceramic substrate;
2), using gold-plated method to ceramic substrate carry out ceramic metallization, make ceramic base plate surface formed metallic film;
3), ceramic base plate surface delineate cut line groove, several base units are separated to form by wire casing;
4), ceramic substrate is put into puncher, each base unit is punched, the hole beaten is pin bores and slot electrode;
5), the ceramic substrate after punching be put into plasma cleaning equipment cleaned;
6), cover in slot electrode copper and formed and cover copper electrode;
7), to complete the 6th)The ceramic substrate of step carries out attached copper, ceramic base plate surface is compounded to form multilayer gold by covering copper Category, the metallic element of the attached copper are the one or more in titanium, nickel, copper;
8), after copper is covered ceramic base plate surface marking circuit diagram;
9), marking circuit after carry out it is gold-plated, institute's metal cladding thickness be 1-10 μm;
10), will complete the 9th)The ceramic substrate of step carries out pin bores filling perforation, again by plating in ceramic substrate table after filling perforation Face forms protective layer;
11), will complete the 10th)Elargol is printed on the ceramic substrate of step, elargol corresponds to the copper electrode that covers on each base unit, institute State and cover copper electrode and be located at base unit side, elargol is located at base unit opposite side, elargol and covers and passes through pin between copper electrode Hole connects;
12), place the wafer on corresponding elargol, then fix chip by roasting glue;
13), using pulse seam welder by it is upper lid be welded on completion the 12nd)After step on corresponding base unit;The welding is In 8X10-3More than Pa is welded;
14), ceramic substrate is cut after roll welding, form single base unit, the base unit after cutting tested, .
The SMD base of ceramic units made as stated above include rectangular pedestal 1, the length direction both ends of pedestal 1 Bottom be provided with slot electrode, copper is covered in slot electrode and forms electrode 2, pedestal 1 is provided with the pin bores 3 that run through up and down, and pin bores 3 are Two, in the side wall of slot electrode opposite side, cover the surface of the pedestal after copper 1 and be provided with attached layers of copper 4, attached layers of copper 4 wherein side Surface be imprinted with circuit figure layer 5, the surface gold-plating of circuit figure layer 5 forms metal level 6, and the surface of metal level 6 is provided with protective layer 7;Seat The top at the length direction both ends of body 1 is provided with elargol layer 8, and the elargol in elargol layer 8 connects through pin bores 3 with corresponding electrode 2, Chip 9 is fixed with elargol layer 8, the pedestal 1 in the outside of chip 9 is provided with upper lid 10.
The present embodiment uses pedestal made of ceramic material, and it has, and high intensity, good insulating while manufacturing cost are low, More metal layers are plated again after circuit is marked, are easy to protect circuit, and circuit and metal level oxygen are prevented using protective layer Change, using the good integrity after the present embodiment, intensity is high, and oxidation-protective effect is good.
Embodiment described above is only the preferred embodiment of invention, and the practical range of invention is not limited with this, therefore all The change made according to the shape of invention, principle, it all should cover in the protection domain of invention.

Claims (1)

  1. The preparation method of 1.SMD ceramic flat surface pedestals, it is characterised in that:Described preparation method includes following steps:
    1), make thickness be 0.3 ~ 0.8mm ceramic substrate;
    2), penetrate using Zhen Kong Splash plated film ceramic metallization carried out to ceramic substrate, ceramic base plate surface is formed metallic film;
    3), ceramic base plate surface delineate cut line groove, several base units are separated to form by wire casing;
    4), ceramic substrate is put into puncher, each base unit is punched, the hole beaten is pin bores and slot electrode;
    5), the ceramic substrate after punching be put into plasma cleaning equipment cleaned, dry;
    6), cover in slot electrode copper and formed and cover copper electrode;
    7), to complete the 6th)The ceramic substrate of step carries out attached copper, makes ceramic base plate surface composite multi-layer metal, institute by attached copper The metallic element for stating attached copper is titanium, the one or more in nickel, copper;
    8), after attached copper ceramic base plate surface marking circuit diagram;
    9), marking circuit after carry out it is gold-plated, institute's metal cladding thickness be 1-10 μm;
    10), will complete the 9th)The ceramic substrate of step carries out pin bores filling perforation, again by plating in ceramic substrate table after filling perforation Face forms protective layer;
    11), will complete the 10th)Elargol is printed on the ceramic substrate of step, elargol corresponds to the copper electrode that covers on each base unit, institute State and cover copper electrode and be located at base unit side, elargol is located at base unit opposite side, elargol and covers and passes through pin between copper electrode Hole connects;
    12), place the wafer on corresponding elargol, then fix chip by roasting glue;
    13), using pulse seam welder by it is upper lid be welded on completion the 12nd)After step on corresponding base unit;The welding is In high vacuum 8X10-3More than Pa is welded;
    14), ceramic substrate is cut after roll welding, form single base unit, the base unit after cutting tested, .
CN201710820078.1A 2017-09-13 2017-09-13 Preparation method of SMD ceramic planar base Active CN107565922B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710820078.1A CN107565922B (en) 2017-09-13 2017-09-13 Preparation method of SMD ceramic planar base

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710820078.1A CN107565922B (en) 2017-09-13 2017-09-13 Preparation method of SMD ceramic planar base

Publications (2)

Publication Number Publication Date
CN107565922A true CN107565922A (en) 2018-01-09
CN107565922B CN107565922B (en) 2020-07-03

Family

ID=60979774

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710820078.1A Active CN107565922B (en) 2017-09-13 2017-09-13 Preparation method of SMD ceramic planar base

Country Status (1)

Country Link
CN (1) CN107565922B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114899154A (en) * 2022-06-02 2022-08-12 江苏富乐华功率半导体研究院有限公司 High-efficiency double-side heat dissipation power module packaging method
CN116477963A (en) * 2023-04-18 2023-07-25 福建华清电子材料科技有限公司 Method for producing ceramic copper-clad substrate with pins by using porous ceramic

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1342035A (en) * 2000-09-04 2002-03-27 三洋电机株式会社 Circuit device and its manufacturing method
CN102044535A (en) * 2009-10-26 2011-05-04 佛山市国星光电股份有限公司 Surface mounted device (SMD) light emitting diode (LED) device and display module thereof for outdoor display screen
CN102185580A (en) * 2010-01-18 2011-09-14 精工爱普生株式会社 Electronic apparatus, method of manufacturing substrate, and method of manufacturing electronic apparatus
US20150130326A1 (en) * 2013-11-12 2015-05-14 Seiko Epson Corporation Wiring board, method of manufacturing the same, element housing package, electronic device, electronic apparatus, and moving object
CN106486490A (en) * 2015-08-31 2017-03-08 广州万维立视数码科技有限公司 New LED panel assembly, 3D panel assembly and 3D display screen

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1342035A (en) * 2000-09-04 2002-03-27 三洋电机株式会社 Circuit device and its manufacturing method
CN102044535A (en) * 2009-10-26 2011-05-04 佛山市国星光电股份有限公司 Surface mounted device (SMD) light emitting diode (LED) device and display module thereof for outdoor display screen
CN102185580A (en) * 2010-01-18 2011-09-14 精工爱普生株式会社 Electronic apparatus, method of manufacturing substrate, and method of manufacturing electronic apparatus
US20150130326A1 (en) * 2013-11-12 2015-05-14 Seiko Epson Corporation Wiring board, method of manufacturing the same, element housing package, electronic device, electronic apparatus, and moving object
CN106486490A (en) * 2015-08-31 2017-03-08 广州万维立视数码科技有限公司 New LED panel assembly, 3D panel assembly and 3D display screen

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114899154A (en) * 2022-06-02 2022-08-12 江苏富乐华功率半导体研究院有限公司 High-efficiency double-side heat dissipation power module packaging method
CN116477963A (en) * 2023-04-18 2023-07-25 福建华清电子材料科技有限公司 Method for producing ceramic copper-clad substrate with pins by using porous ceramic
CN116477963B (en) * 2023-04-18 2023-12-26 福建华清电子材料科技有限公司 Method for producing ceramic copper-clad substrate with pins by using porous ceramic

Also Published As

Publication number Publication date
CN107565922B (en) 2020-07-03

Similar Documents

Publication Publication Date Title
TWI294757B (en) Circuit board with a through hole wire, and forming method thereof
CN103718288B (en) Ceramic substrate and manufacture method thereof
JP2012064911A (en) Package substrate unit and manufacturing method therefor
CN105321712B (en) The attachment structure of cascade capacitor
CN201910973U (en) Full-series LED (Light-Emitting Diode) circuit board made of flat leads
CN108811320A (en) electronic module and circuit board
CN107565922A (en) The preparation method of SMD ceramic flat surface pedestals
WO2005071744A1 (en) Multilayer electronic part and structure for mounting multilayer electronic part
CN105762131A (en) Package structure and manufacturing method thereof
CN104254202B (en) Circuit board with interior embedded electronic component and preparation method thereof
JP2015173141A (en) Capacitor built-in substrate and method of manufacturing capacitor built-in substrate
CN105592620B (en) Circuit board and its preparation method
CN104105337A (en) Circuit board with high-density circuits and method for manufacturing the circuit board
JP2004221388A (en) Multilayer circuit board for mounting electronic component and its manufacturing method
JP2007103720A (en) Ceramic package
CN203057702U (en) Multi-layer ceramic circuit board
CN208655696U (en) A kind of LED flip chip packaging structure
CN203057695U (en) Ceramic circuit board
JP2011071373A (en) Wiring board
JP4571012B2 (en) Crystal unit with pedestal
CN211909298U (en) Double-sided circuit board for LED lamp strip
JP4174407B2 (en) Electronic component storage package
CN214429772U (en) Multilayer immersion gold circuit board
CN207200674U (en) SMD ceramic flat surface pedestals
CN202008888U (en) Laminated ceramic element

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant