CN107561689B - KDP crystal surface shape control device based on voice coil motor drive - Google Patents

KDP crystal surface shape control device based on voice coil motor drive Download PDF

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CN107561689B
CN107561689B CN201710994589.5A CN201710994589A CN107561689B CN 107561689 B CN107561689 B CN 107561689B CN 201710994589 A CN201710994589 A CN 201710994589A CN 107561689 B CN107561689 B CN 107561689B
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plate
motor positioning
motor
pressure
voice coil
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CN107561689A (en
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邵忠喜
徐旭
叶朗
武晋国
富宏亚
裴国庆
独伟峰
刘长春
李珂
曹庭分
田曌鹏
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Harbin Institute of Technology Shenzhen
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Abstract

一种基于音圈电机驱动的KDP晶体面形控制装置,本发明涉及一种基于音圈电机驱动的KDP晶体面形控制装置。本发明要解决现有装置不能直观的研究晶体面形质量对激光频率转换效率和光束质量的影响的问题。本发明装置由晶体框模块、晶体驱动模块、电机定位模块和外框模块组成;所述晶体框模块由加压板、承压板、底侧固定件、顶侧固定件、左约束板、右约束板、加载块、弧形弹片、弹性垫板组成;所述晶体驱动模块由16个驱动器组成,单个驱动器由平头件、柔性铰链和音圈电机组成;所述电机定位模块由电机定位顶盖、电机定位前板、电机定位后板和电机定位底座组成。本发明用于研究激光穿过KDP晶体时的频率转换效率和光束质量。

Figure 201710994589

A KDP crystal surface shape control device driven by a voice coil motor relates to a KDP crystal surface shape control device driven by a voice coil motor. The present invention solves the problem that the existing device cannot intuitively study the influence of the crystal surface quality on the laser frequency conversion efficiency and beam quality. The device of the present invention is composed of a crystal frame module, a crystal drive module, a motor positioning module and an outer frame module; the crystal frame module is composed of a pressure plate, a pressure-bearing plate, a bottom-side fixing piece, a top-side fixing piece, a left restraining plate, a right Constraining plate, loading block, arc shrapnel, elastic backing plate; the crystal drive module is composed of 16 drivers, and a single driver is composed of a flat head piece, a flexible hinge and a voice coil motor; the motor positioning module is composed of a motor positioning top cover, It consists of a motor positioning front plate, a motor positioning rear plate and a motor positioning base. The invention is used to study the frequency conversion efficiency and beam quality when the laser passes through the KDP crystal.

Figure 201710994589

Description

一种基于音圈电机驱动的KDP晶体面形控制装置A KDP crystal surface shape control device based on voice coil motor drive

技术领域technical field

本发明涉及一种基于音圈电机驱动的KDP晶体面形控制装置。The invention relates to a KDP crystal surface shape control device driven by a voice coil motor.

背景技术Background technique

KDP晶体作为倍频晶体广泛应用于高功率激光系统受控热核反应、核爆模拟等重大技术中。为了获得更高的峰值功率和更好的光束质量,ICF装置中KDP晶体的径厚比在逐渐增大,而弹性模量较小,导致KDP晶体面形精度在使用过程中非常容易受到自身重力、环境温度、框体支撑表面的平面度、晶体组件的夹持力等外界因素的影响,从而直接影响到激光的频率转换效率和光束质量。As a frequency-doubling crystal, KDP crystals are widely used in major technologies such as controlled thermonuclear reactions in high-power laser systems and nuclear explosion simulations. In order to obtain higher peak power and better beam quality, the aspect ratio of the KDP crystal in the ICF device is gradually increasing, while the elastic modulus is small, which makes the surface shape accuracy of the KDP crystal very easy to be affected by its own gravity during use. , ambient temperature, the flatness of the frame support surface, the clamping force of the crystal components and other external factors, which directly affect the frequency conversion efficiency and beam quality of the laser.

因此,对KDP晶体的面形控制提出了极高的要求,急需通过一种晶体面形控制装置来模拟其在各种复杂环境下的变形,以便掌握其激光频率转换效率和光束质量,从而为实际应用提供理论支持。Therefore, extremely high requirements are placed on the surface shape control of KDP crystals. It is urgent to simulate its deformation in various complex environments through a crystal surface shape control device, so as to master its laser frequency conversion efficiency and beam quality, so as to provide Practical applications provide theoretical support.

发明内容SUMMARY OF THE INVENTION

本发明是为了解决现有装置不能直观的研究晶体面形质量对激光频率转换效率和光束质量的影响的问题,而提供一种基于音圈电机驱动的KDP晶体面形控制装置。The invention provides a KDP crystal surface control device driven by a voice coil motor to solve the problem that the existing device cannot intuitively study the influence of the crystal surface quality on the laser frequency conversion efficiency and beam quality.

本发明的一种基于音圈电机驱动的KDP晶体面形控制装置由晶体框模块、晶体驱动模块、电机定位模块和外框模块组成;所述晶体框模块由加压板、承压板、底侧固定件、顶侧固定件、约束板、加载块、弧形弹片和弹性垫板组成;所述加压板和承压板的外框上均设置有与弹性垫板相匹配的凹槽,所述加压板和承压板外框上的凹槽内分别设置有一个弹性垫板;KDP晶体竖直设置在加压板和承压板之间;所述加压板和承压板的外框上均匀设置有多个凹口,所述加压板外框上的凹口与承压板外框上的凹口相对应;所述KDP晶体的顶部设置有弧形弹片,所述KDP晶体、加压板和承压板的上部设置有顶侧固定件,所述顶侧固定件底端设置有一横向凸起用以压紧弧形弹片;所述KDP晶体、加压板和承压板的下部设置有底侧固定件;所述承压板两侧外框上的凹口内均设置有加载块,所述承压板两侧外框的外侧分别设置有约束板,所述约束板上设置有若干销孔和若干螺孔,所述销孔内设置有定位销用以固定约束板,所述螺孔内设置有加载螺钉用以控制加载块在承压板两侧外框上的凹口内滑动;所述晶体驱动模块由16个驱动器组成,单个驱动器由平头件、柔性铰链和音圈电机组成;所述平头件和音圈电机通过柔性铰链连接,所述音圈电机的中轴与柔性铰链通过螺纹连接;所述电机定位模块由电机定位顶盖、电机定位前板、电机定位后板和电机定位底座组成;所述电机定位前板和电机定位后板上均按5×5阵列分布有25个通光口径,所述电机定位前板上的25个通光口径与所述电机定位后板上的25个通光口径相对称且同轴设置;所述电机定位前板上按4×4阵列设置有16个驱动器前装配处,所述驱动器前装配处设置在每四个相邻通光口径围成的正方形的中心点处;所述电机定位后板上按4×4阵列设置有16个驱动器后装配处,所述驱动器前装配处设置在每四个相邻通光口径围成的正方形的中心点处;所述单个驱动器的平头件穿过电机定位前板上的驱动器前装配处并通过螺栓固定;所述单个驱动器的音圈电机的底端通过螺栓固定在驱动器后装配处;所述电机定位前板和电机定位后板的上端面设置有电机定位顶盖,所述电机定位前板和电机定位后板的下端面设置有电机定位底座;所述外框模块由外框顶盖、外框左板、外框右板和外框底座组成;所述电机定位底座固定在外框底座上,所述外框顶盖固定在电机定位顶盖的上方,所述外框左板固定在电机定位模块的左侧,所述外框右板固定在电机定位模块的右侧;所述晶体框模块设置电机定位前板的外侧与单个驱动器的平头件接触。A KDP crystal surface shape control device driven by a voice coil motor of the present invention is composed of a crystal frame module, a crystal drive module, a motor positioning module and an outer frame module; the crystal frame module is composed of a pressure plate, a pressure-bearing plate, a bottom The side fixing piece, the top side fixing piece, the restraining plate, the loading block, the arc-shaped elastic sheet and the elastic pad are composed; the outer frame of the pressure plate and the pressure-bearing plate are provided with grooves matching the elastic pad, An elastic backing plate is respectively arranged in the groove on the outer frame of the pressure plate and the pressure plate; the KDP crystal is vertically arranged between the pressure plate and the pressure plate; A plurality of notches are evenly arranged on the outer frame, and the notches on the outer frame of the pressure plate correspond to the notches on the outer frame of the pressure-bearing plate; the top of the KDP crystal is provided with an arc-shaped shrapnel, and the KDP The upper part of the crystal, the pressure plate and the pressure-bearing plate is provided with a top-side fixing piece, and the bottom end of the top-side fixing piece is provided with a lateral protrusion to press the arc-shaped elastic piece; the KDP crystal, the pressure-bearing plate and the pressure-bearing plate The lower part of the pressure-bearing plate is provided with a bottom-side fixing member; the notches on the outer frames on both sides of the pressure-bearing plate are provided with loading blocks, and the outer sides of the outer frames on both sides of the pressure-bearing plate are respectively provided with restraining plates, A number of pin holes and a number of screw holes are provided, the pin holes are provided with positioning pins to fix the restraining plate, and the screw holes are provided with loading screws to control the concave recesses of the loading blocks on the outer frames on both sides of the pressure-bearing plate. Intraoral sliding; the crystal drive module is composed of 16 drivers, and a single driver is composed of a flat head piece, a flexible hinge and a voice coil motor; the flat head piece and the voice coil motor are connected by a flexible hinge, and the central axis of the voice coil motor is connected with the flexible hinge Connected by screws; the motor positioning module is composed of a motor positioning top cover, a motor positioning front plate, a motor positioning rear plate and a motor positioning base; the motor positioning front plate and the motor positioning rear plate are distributed in a 5×5 array. 25 clear apertures, the 25 clear apertures on the front plate of the motor positioning are symmetrical and coaxial with the 25 clear apertures on the rear plate of the motor positioning; 4 arrays are provided with 16 driver front assembly positions, and the driver front assembly positions are set at the center point of the square surrounded by every four adjacent light apertures; the motor positioning rear plate is provided with 4×4 arrays. 16 driver rear assembly positions, the driver front assembly positions are set at the center point of the square surrounded by every four adjacent light apertures; the flat head piece of the single driver passes through the driver front assembly on the motor positioning front plate and fixed by bolts; the bottom end of the voice coil motor of the single driver is fixed at the rear assembly of the driver by bolts; the upper end surfaces of the motor positioning front plate and the motor positioning rear plate are provided with a motor positioning top cover, and the motor positioning The lower end surfaces of the positioning front plate and the motor positioning rear plate are provided with a motor positioning base; the outer frame module is composed of an outer frame top cover, an outer frame left plate, an outer frame right plate and an outer frame base; the motor positioning base is fixed on the outer frame. On the frame base, the outer frame top cover is fixed above the motor positioning top cover, the outer frame left plate is fixed on the left side of the motor positioning module, and the outer frame right plate is fixed on the right side of the motor positioning module; The crystal frame module set the motor The outside of the positioning front plate is in contact with the flat head piece of the single drive.

有益效果:Beneficial effects:

本发明可以精确模拟KDP晶体在各种复杂环境下的面形变化,通过晶体驱动模块控制其变形来研究激光通过晶体的频率转换效率和光束质量。本发明采用音圈电机实现对KDP晶体的面形控制,具有结构简单、延迟时间短、响应快、行程大、控制精度高、能量转换效率高,符合对KDP晶体驱动装置的要求。The invention can accurately simulate the surface shape change of the KDP crystal under various complex environments, and control the deformation of the KDP crystal through the crystal drive module to study the frequency conversion efficiency and beam quality of the laser passing through the crystal. The invention adopts the voice coil motor to realize the surface shape control of the KDP crystal, and has the advantages of simple structure, short delay time, fast response, large stroke, high control precision and high energy conversion efficiency, and meets the requirements of the KDP crystal driving device.

附图说明Description of drawings

图1为基于音圈电机驱动的KDP晶体面形控制装置的结构示意图;Fig. 1 is a structural schematic diagram of a KDP crystal surface shape control device driven by a voice coil motor;

图2为基于音圈电机驱动的KDP晶体面形控制装置的分解结构示意图;2 is a schematic diagram of the exploded structure of a KDP crystal surface shape control device driven by a voice coil motor;

图3为晶体框模块的分解结构示意图;3 is a schematic diagram of an exploded structure of a crystal frame module;

图4为电机定位模块的结构示意图;4 is a schematic structural diagram of a motor positioning module;

图5为承压板侧面的放大示意图;Figure 5 is an enlarged schematic view of the side of the pressure-bearing plate;

图6为单个驱动器的结构示意图;6 is a schematic structural diagram of a single driver;

图7为电机定位后板的正视图;Figure 7 is a front view of the motor positioning rear plate;

图8为电机定位后板的后视图。Figure 8 is a rear view of the motor positioning rear plate.

具体实施方式Detailed ways

具体实施方式一:结合图1~图6说明本实施方式,本实施方式一种基于音圈电机驱动的KDP晶体面形控制装置由晶体框模块1、晶体驱动模块2、电机定位模块3和外框模块4组成;所述晶体框模块1由加压板1-1、承压板1-2、底侧固定件1-3、顶侧固定件1-4、约束板1-5、加载块1-7、弧形弹片1-8和弹性垫板1-9组成;所述加压板1-1和承压板1-2的外框上均设置有与弹性垫板1-9相匹配的凹槽,所述加压板1-1和承压板1-2外框上的凹槽内分别设置有一个弹性垫板1-9;KDP晶体6竖直设置在加压板1-1和承压板1-2之间;所述加压板1-1和承压板1-2的外框上均匀设置有多个凹口,所述加压板1-1外框上的凹口与承压板1-2外框上的凹口相对应;所述KDP晶体6的顶部设置有弧形弹片1-8,所述KDP晶体6、加压板1-1和承压板1-2的上部设置有顶侧固定件1-4,所述顶侧固定件1-4底端设置有一横向凸起用以压紧弧形弹片1-8;所述KDP晶体6、加压板1-1和承压板1-2的下部设置有底侧固定件1-3;所述承压板1-2两侧外框上的凹口内均设置有加载块1-7,所述承压板1-2两侧外框的外侧分别设置有约束板1-5,所述约束板1-5上设置有若干销孔和若干螺孔,所述销孔内设置有定位销1-6用以固定约束板1-5,所述螺孔内设置有加载螺钉1-10用以控制加载块1-7在承压板1-2两侧外框上的凹口内滑动;所述晶体驱动模块2由16个驱动器组成,单个驱动器由平头件2-1、柔性铰链2-2和音圈电机2-3组成;所述平头件2-1和音圈电机2-3通过柔性铰链2-2连接,所述音圈电机2-3的中轴与柔性铰链2-2通过螺纹连接;所述电机定位模块3由电机定位顶盖3-1、电机定位前板3-2、电机定位后板3-3和电机定位底座3-4组成;所述电机定位前板3-2和电机定位后板3-3上均按5×5阵列分布有25个通光口径,所述电机定位前板3-2上的25个通光口径与所述电机定位后板3-3上的25个通光口径相对称且同轴设置;所述电机定位前板3-2上按4×4阵列设置有16个驱动器前装配处,所述驱动器前装配处设置在每四个相邻通光口径围成的正方形的中心点处;所述电机定位后板3-3上按4×4阵列设置有16个驱动器后装配处,所述驱动器前装配处设置在每四个相邻通光口径围成的正方形的中心点处;所述单个驱动器的平头件2-1穿过电机定位前板3-2上的驱动器前装配处并通过螺栓固定;所述单个驱动器的音圈电机2-3的底端通过螺栓固定在驱动器后装配处;所述电机定位前板3-2和电机定位后板3-3的上端面设置有电机定位顶盖3-1,所述电机定位前板3-2和电机定位后板3-3的下端面设置有电机定位底座3-4;所述外框模块4由外框顶盖4-1、外框左板4-2、外框右板4-3和外框底座4-4组成;所述电机定位底座3-4固定在外框底座4-4上,所述外框顶盖4-1固定在电机定位顶盖3-1的上方,所述外框左板4-2固定在电机定位模块3的左侧,所述外框右板4-3固定在电机定位模块3的右侧;所述晶体框模块1设置电机定位前板3-2的外侧与单个驱动器的平头件2-1接触。Embodiment 1: This embodiment will be described with reference to FIG. 1 to FIG. 6. A KDP crystal surface shape control device based on voice coil motor drive in this embodiment consists of a crystal frame module 1, a crystal drive module 2, a motor positioning module 3 and an external device. The crystal frame module 1 is composed of a pressure plate 1-1, a pressure bearing plate 1-2, a bottom side fixing piece 1-3, a top side fixing piece 1-4, a restraining plate 1-5, a loading block 1-7. Arc shrapnel 1-8 and elastic pads 1-9 are formed; the outer frames of the pressure plate 1-1 and the pressure-bearing plate 1-2 are provided with matching elastic pads 1-9 The grooves on the outer frame of the pressure plate 1-1 and the pressure bearing plate 1-2 are respectively provided with an elastic backing plate 1-9; the KDP crystal 6 is vertically arranged on the pressure plate 1-1 and the pressure-bearing plate 1-2; the outer frames of the pressure-bearing plate 1-1 and the pressure-bearing plate 1-2 are evenly provided with a plurality of notches, and the depressions on the outer frame of the pressure-bearing plate 1-1 The opening corresponds to the notch on the outer frame of the pressure-bearing plate 1-2; the top of the KDP crystal 6 is provided with an arc-shaped elastic piece 1-8, the KDP crystal 6, the pressure plate 1-1 and the pressure-bearing plate 1 The upper part of -2 is provided with a top side fixing member 1-4, and the bottom end of the top side fixing member 1-4 is provided with a lateral protrusion for pressing the arc-shaped elastic pieces 1-8; the KDP crystal 6, the pressure plate 1 -1 and the lower part of the pressure-bearing plate 1-2 are provided with bottom-side fixing pieces 1-3; the notches on the outer frames on both sides of the pressure-bearing plate 1-2 are provided with loading blocks 1-7. Constraining plates 1-5 are respectively provided on the outer sides of the outer frames on both sides of the plate 1-2, the constraining plates 1-5 are provided with a number of pin holes and a number of screw holes, and the pin holes are provided with positioning pins 1-6 for use In order to fix the restraint plate 1-5, the screw holes are provided with loading screws 1-10 to control the loading blocks 1-7 to slide in the notches on the outer frames on both sides of the pressure plate 1-2; the crystal drive module 2 is composed of 16 drivers, and a single driver is composed of a flat head piece 2-1, a flexible hinge 2-2 and a voice coil motor 2-3; the flat head piece 2-1 and the voice coil motor 2-3 are connected by the flexible hinge 2-2, The central axis of the voice coil motor 2-3 is connected with the flexible hinge 2-2 through threads; the motor positioning module 3 is composed of a motor positioning top cover 3-1, a motor positioning front plate 3-2, and a motor positioning rear plate 3- 3 and the motor positioning base 3-4; the motor positioning front plate 3-2 and the motor positioning rear plate 3-3 are distributed with 25 clear apertures in a 5×5 array, and the motor positioning front plate 3- The 25 clear apertures on 2 are symmetrical and coaxial with the 25 clear apertures on the motor positioning rear plate 3-3; the motor positioning front plate 3-2 is arranged in a 4×4 array with 16 apertures. There are 16 front assembly places of the driver, and the front assembly place of the driver is set at the center point of the square surrounded by every four adjacent clear apertures; the motor positioning rear plate 3-3 is arranged in a 4×4 array with 16 The rear assembly place of the driver, the front assembly place of the driver is set at the center point of the square surrounded by every four adjacent clear apertures; the flat head piece 2-1 of the single driver passes through the motor positioning front plate 3-2 before the drive The assembly place is fixed by bolts; the bottom end of the voice coil motor 2-3 of the single driver is fixed at the rear assembly place of the driver by bolts; the upper end face of the motor positioning front plate 3-2 and the motor positioning rear plate 3-3 A motor positioning top cover 3-1 is provided, and the lower end surfaces of the motor positioning front plate 3-2 and the motor positioning rear plate 3-3 are provided with a motor positioning base 3-4; the outer frame module 4 is formed by the outer frame top cover. 4-1. The outer frame left plate 4-2, the outer frame right plate 4-3 and the outer frame base 4-4 are composed; the motor positioning base 3-4 is fixed on the outer frame base 4-4, and the outer frame top The cover 4-1 is fixed above the motor positioning top cover 3-1, the outer frame left plate 4-2 is fixed on the left side of the motor positioning module 3, and the outer frame right plate 4-3 is fixed on the motor positioning module 3 The right side of the crystal frame module 1 is provided with the outer side of the motor positioning front plate 3-2 in contact with the flat head piece 2-1 of the single driver.

本实施方式的基于音圈电机驱动的KDP晶体面形控制装置的最大驱动力为20N。The maximum driving force of the KDP crystal surface shape control device driven by the voice coil motor of this embodiment is 20N.

本实施方式中晶体框模块用于低应力夹持和支撑KDP晶体;晶体驱动模块用于驱动晶体变形,使其符合实验所需的晶体面形值;电机定位模块用于实现音圈电机的高精度定位,使其定位误差在可控范围之内;外框模块用于连接晶体框模块和电机定位模块,通过外框模块上的定位点来确保位置精度。In this embodiment, the crystal frame module is used to clamp and support the KDP crystal with low stress; the crystal drive module is used to drive the deformation of the crystal to make it conform to the crystal surface shape value required by the experiment; the motor positioning module is used to realize the high-quality voice coil motor Accurate positioning, so that the positioning error is within the controllable range; the outer frame module is used to connect the crystal frame module and the motor positioning module, and the positioning point on the outer frame module is used to ensure the position accuracy.

本实施方式采用16个驱动器可以保证在各自位置对晶体产生像包络线一样的变形,不可能达到或超过晶体在重力下产生的变形,既满足所要求的面形精度需求,又兼顾了成本。The use of 16 drivers in this embodiment can ensure that the crystal is deformed like an envelope at each position, and it is impossible to reach or exceed the deformation of the crystal under gravity, which not only meets the required surface shape accuracy requirements, but also takes into account the cost. .

本实施方式中所述加压板和承压板外框上的凹槽内分别设置有一个弹性垫板,约束其五个自由度,保证弹性垫板与晶体柔性接触。In this embodiment, an elastic backing plate is respectively provided in the groove on the outer frame of the pressure plate and the pressure-bearing plate to constrain the five degrees of freedom and ensure that the elastic backing plate and the crystal are in flexible contact.

本实施方式中加载块置于承压板两侧外框上的凹口内,通过加载螺钉驱动加载块在凹口内滑动,两个定位销实现加载块的定位,从而约束KDP晶体沿左右方向的移动。In this embodiment, the loading block is placed in the notch on the outer frame on both sides of the bearing plate, and the loading block is driven to slide in the notch by the loading screw, and the positioning of the loading block is realized by two positioning pins, thereby restricting the movement of the KDP crystal in the left and right directions .

本实施方式中KDP晶体竖直放置,底侧固定件为承重板,承受整个KDP晶体的重量,对与晶体接触面进行精加工,保证晶体受力均匀。In this embodiment, the KDP crystal is placed vertically, and the bottom fixing member is a load-bearing plate, which bears the weight of the entire KDP crystal, and the contact surface with the crystal is precisely processed to ensure that the crystal is uniformly stressed.

本实施方式KDP晶体顶部采用弧形弹片作为弹性约束,并采用顶侧固定件压紧弹片,确保晶体低应力固定。In this embodiment, the top of the KDP crystal adopts an arc-shaped shrapnel as an elastic constraint, and a top-side fixing member is used to press the shrapnel to ensure low-stress fixation of the crystal.

本实施方式中电机定位模块通过电机定位顶盖和底座来保证位置精度;电机定位后板作为主要受力板,承受着音圈电机的重力及其驱动力的反作用力;电机定位前板作为辅助支撑,可卸掉部分反作用力。In this embodiment, the motor positioning module ensures the positional accuracy by positioning the top cover and the base of the motor; the motor positioning rear plate is used as the main force bearing plate to bear the gravity of the voice coil motor and the reaction force of the driving force; the motor positioning front plate is used as an auxiliary Support can remove part of the reaction force.

具体实施方式二:本实施方式与具体实施方式一的不同之处在于:所述柔性铰链2-2为直圆形多轴柔性铰链。其他与具体实施方式一相同。Embodiment 2: The difference between this embodiment and Embodiment 1 is that the flexible hinge 2-2 is a straight circular multi-axis flexible hinge. Others are the same as the first embodiment.

具体实施方式三:本实施方式与具体实施方式一或二的不同之处在于:所述通光口径的直径为20mm。其他与具体实施方式一或二相同。Embodiment 3: The difference between this embodiment and Embodiment 1 or 2 is that the diameter of the light-transmitting aperture is 20 mm. Others are the same as in the first or second embodiment.

具体实施方式四:本实施方式与具体实施方式一至三之一的不同之处在于:所述平头件2-1的截面直径为6mm。如此设置,可以保证平头件与KDP晶体合理的接触面积,以免在所要求基准面形下因接触面过小而超出晶体承压能力或因接触面过大而使实际面形与基准面形之间的不重合误差超过允许值。通过具有X轴转动和Y轴转动两个自由度的柔性铰链保证平头件与KDP晶体的完全接触。音圈电机内部集成的压力传感器感知平头件是否与KDP晶体接触,二者接触时视为控制“零点”,同时监控KDP晶体压力不超出规定范围,防止损坏晶体。其他与具体实施方式一至三之一相同。Embodiment 4: The difference between this embodiment and one of Embodiments 1 to 3 is that the cross-sectional diameter of the flat head piece 2-1 is 6 mm. This setting can ensure a reasonable contact area between the flat head part and the KDP crystal, so as to avoid the fact that the contact surface is too small to exceed the pressure bearing capacity of the crystal or the contact surface is too large to make the actual surface shape and the reference surface shape. The misalignment error between them exceeds the allowable value. The full contact between the flat head and the KDP crystal is ensured by a flexible hinge with two degrees of freedom of X-axis rotation and Y-axis rotation. The pressure sensor integrated inside the voice coil motor senses whether the flat head is in contact with the KDP crystal. When the two are in contact, it is regarded as the control "zero point". At the same time, it monitors that the pressure of the KDP crystal does not exceed the specified range to prevent damage to the crystal. Others are the same as one of Embodiments 1 to 3.

具体实施方式五:如图7和图8所示,本实施方式与具体实施方式一至四之一的不同之处在于:所述电机定位后板3-3的前面板设置有用于定位音圈电机2-3底端的圆柱凹坑,所述电机定位后板3-3的后面板切除材料制成三角形加强筋板。其他与具体实施方式一至四之一相同。Embodiment 5: As shown in FIG. 7 and FIG. 8 , the difference between this embodiment and one of Embodiments 1 to 4 is that the front panel of the motor positioning rear plate 3-3 is provided with a voice coil motor for positioning 2-3 The cylindrical pit at the bottom end, the rear panel of the motor positioning rear plate 3-3 is cut out of material to make a triangular reinforcing rib plate. Others are the same as one of Embodiments 1 to 4.

本实施方式在保证变形精度的前提下,将重量降到最低。电机定位前板同电机定位后板前侧,不设置筋板结构,仅起辅助定位和支撑音圈电机的作用。In this embodiment, the weight is minimized on the premise of ensuring the deformation accuracy. The motor positioning front plate is the same as the front side of the motor positioning rear plate, and there is no rib structure, which only plays the role of auxiliary positioning and supporting the voice coil motor.

具体实施方式六:本实施方式与具体实施方式一至五之一的不同之处在于:所述电机定位顶盖3-1和电机定位底座3-4上均加工有用于固定电机定位前板3-2和电机定位后板3-3的长条凸台。其他与具体实施方式一至五之一相同。Embodiment 6: The difference between this embodiment and one of Embodiments 1 to 5 is that the motor positioning top cover 3-1 and the motor positioning base 3-4 are processed with a front plate 3-4 for fixing the motor positioning. 2 and the motor positioning the elongated bosses of the rear plate 3-3. Others are the same as one of Embodiments 1 to 5.

本实施方式通过设置凸台可以精确定位电机定位前板和电机定位后板位置,并且减少零件的加工面积和零件间的接触面积,使得结合面接触良好。In this embodiment, the position of the motor positioning front plate and the motor positioning rear plate can be precisely positioned by arranging the bosses, and the processing area of the parts and the contact area between the parts can be reduced, so that the joint surfaces are in good contact.

通过以下实施例验证本发明的有益效果:The beneficial effects of the present invention are verified by the following examples:

实施例一:一种基于音圈电机驱动的KDP晶体面形控制装置由晶体框模块1、晶体驱动模块2、电机定位模块3和外框模块4组成;所述晶体框模块1由加压板1-1、承压板1-2、底侧固定件1-3、顶侧固定件1-4、约束板1-5、加载块1-7、弧形弹片1-8和弹性垫板1-9组成;所述加压板1-1和承压板1-2的外框上均设置有与弹性垫板1-9相匹配的凹槽,所述加压板1-1和承压板1-2外框上的凹槽内分别设置有一个弹性垫板1-9;KDP晶体6竖直设置在加压板1-1和承压板1-2之间;所述加压板1-1和承压板1-2的外框上均匀设置有多个凹口,所述加压板1-1外框上的凹口与承压板1-2外框上的凹口相对应;所述KDP晶体6的顶部设置有弧形弹片1-8,所述KDP晶体6、加压板1-1和承压板1-2的上部设置有顶侧固定件1-4,所述顶侧固定件1-4底端设置有一横向凸起用以压紧弧形弹片1-8;所述KDP晶体6、加压板1-1和承压板1-2的下部设置有底侧固定件1-3;所述承压板1-2两侧外框上的凹口内均设置有加载块1-7,所述承压板1-2两侧外框的外侧分别设置有约束板1-5,所述约束板1-5上设置有若干销孔和若干螺孔,所述销孔内设置有定位销1-6用以固定约束板1-5,所述螺孔内设置有加载螺钉1-10用以控制加载块1-7在承压板1-2两侧外框上的凹口内滑动;所述晶体驱动模块2由16个驱动器组成,单个驱动器由平头件2-1、柔性铰链2-2和音圈电机2-3组成;所述平头件2-1和音圈电机2-3通过柔性铰链2-2连接,所述音圈电机2-3的中轴与柔性铰链2-2通过螺纹连接;所述电机定位模块3由电机定位顶盖3-1、电机定位前板3-2、电机定位后板3-3和电机定位底座3-4组成;所述电机定位前板3-2和电机定位后板3-3上均按5×5阵列分布有25个通光口径,所述电机定位前板3-2上的25个通光口径与所述电机定位后板3-3上的25个通光口径相对称且同轴设置;所述电机定位前板3-2上按4×4阵列设置有16个驱动器前装配处,所述驱动器前装配处设置在每四个相邻通光口径围成的正方形的中心点处;所述电机定位后板3-3上按4×4阵列设置有16个驱动器后装配处,所述驱动器前装配处设置在每四个相邻通光口径围成的正方形的中心点处;所述单个驱动器的平头件2-1穿过电机定位前板3-2上的驱动器前装配处并通过螺栓固定;所述单个驱动器的音圈电机2-3的底端通过螺栓固定在驱动器后装配处;所述电机定位前板3-2和电机定位后板3-3的上端面设置有电机定位顶盖3-1,所述电机定位前板3-2和电机定位后板3-3的下端面设置有电机定位底座3-4;所述外框模块4由外框顶盖4-1、外框左板4-2、外框右板4-3和外框底座4-4组成;所述电机定位底座3-4固定在外框底座4-4上,所述外框顶盖4-1固定在电机定位顶盖3-1的上方,所述外框左板4-2固定在电机定位模块3的左侧,所述外框右板4-3固定在电机定位模块3的右侧;所述晶体框模块1设置电机定位前板3-2的外侧与单个驱动器的平头件2-1接触。Embodiment 1: A KDP crystal surface shape control device driven by a voice coil motor is composed of a crystal frame module 1, a crystal drive module 2, a motor positioning module 3 and an outer frame module 4; the crystal frame module 1 is composed of a pressure plate 1-1, bearing plate 1-2, bottom side fixing piece 1-3, top side fixing piece 1-4, restraining plate 1-5, loading block 1-7, arc shrapnel 1-8 and elastic pad 1 -9 composition; the outer frames of the pressure plate 1-1 and the pressure-bearing plate 1-2 are provided with grooves that match the elastic pads 1-9, and the pressure plate 1-1 and the pressure-bearing plate An elastic backing plate 1-9 is respectively arranged in the groove on the outer frame of the plate 1-2; the KDP crystal 6 is vertically arranged between the pressure plate 1-1 and the pressure bearing plate 1-2; the pressure plate 1-1 and the outer frame of the pressure-bearing plate 1-2 are evenly provided with a plurality of notches, and the notches on the outer frame of the pressure-bearing plate 1-1 are the same as the notches on the outer frame of the pressure-bearing plate 1-2. Correspondingly; the top of the KDP crystal 6 is provided with an arc-shaped elastic piece 1-8, and the upper part of the KDP crystal 6, the pressure plate 1-1 and the pressure plate 1-2 is provided with a top side fixing member 1-4, so The bottom end of the top-side fixing member 1-4 is provided with a lateral protrusion to press the arc-shaped elastic piece 1-8; the lower part of the KDP crystal 6, the pressure plate 1-1 and the pressure-bearing plate 1-2 is provided with a bottom side Fixing parts 1-3; loading blocks 1-7 are provided in the notches on the outer frames on both sides of the pressure-bearing plate 1-2, and restraining plates are respectively provided on the outer sides of the outer frames on both sides of the pressure-bearing plate 1-2 1-5, the restraining plate 1-5 is provided with a number of pin holes and a number of screw holes, the pin holes are provided with positioning pins 1-6 to fix the restraint plate 1-5, and the screw holes are provided with The loading screws 1-10 are used to control the loading blocks 1-7 to slide in the notches on the outer frames on both sides of the pressure plate 1-2; the crystal drive module 2 consists of 16 drivers, and a single driver consists of a flat head piece 2-1 , a flexible hinge 2-2 and a voice coil motor 2-3; the flat head piece 2-1 and the voice coil motor 2-3 are connected by a flexible hinge 2-2, and the central axis of the voice coil motor 2-3 is connected with the flexible hinge 2 -2 is connected by screws; the motor positioning module 3 is composed of a motor positioning top cover 3-1, a motor positioning front plate 3-2, a motor positioning rear plate 3-3 and a motor positioning base 3-4; The board 3-2 and the motor positioning rear board 3-3 are distributed with 25 clear apertures in a 5×5 array, and the 25 light clear apertures on the motor positioning front board 3-2 and the motor positioning rear board The 25 clear apertures on 3-3 are relatively symmetrical and coaxially arranged; the motor positioning front plate 3-2 is provided with 16 driver front assembly positions in a 4×4 array, and the driver front assembly positions are arranged in each At the center point of the square surrounded by four adjacent clear apertures; the motor positioning rear plate 3-3 is provided with 16 driver rear assembly positions in a 4×4 array, and the driver front assembly positions are set at every four At the center point of the square surrounded by two adjacent clear apertures; the flat head piece 2-1 of the single driver passes through the front assembly of the driver on the motor positioning front plate 3-2 and is fixed by bolts; voice coil motor The bottom end of 2-3 is fixed at the rear assembly place of the driver by bolts; the upper end faces of the motor positioning front plate 3-2 and the motor positioning rear plate 3-3 are provided with a motor positioning top cover 3-1. The lower end surfaces of the plate 3-2 and the motor positioning rear plate 3-3 are provided with a motor positioning base 3-4; the outer frame module 4 consists of an outer frame top cover 4-1, an outer frame left plate 4-2, an outer frame right The board 4-3 and the outer frame base 4-4 are composed; the motor positioning base 3-4 is fixed on the outer frame base 4-4, and the outer frame top cover 4-1 is fixed above the motor positioning top cover 3-1 , the outer frame left plate 4-2 is fixed on the left side of the motor positioning module 3, the outer frame right plate 4-3 is fixed on the right side of the motor positioning module 3; the crystal frame module 1 is provided with a motor positioning front plate The outside of 3-2 is in contact with the flat head piece 2-1 of the single driver.

所述平头件2-1的截面直径为6mm。The cross-sectional diameter of the flat head piece 2-1 is 6 mm.

所述电机定位后板3-3的前面板设置有用于定位音圈电机2-3底端的圆柱凹坑,所述电机定位后板3-3的后面板切除材料制成三角形加强筋板。所述电机定位顶盖3-1和电机定位底座3-4上均加工有用于固定电机定位前板3-2和电机定位后板3-3的长条凸台。The front panel of the motor positioning rear plate 3-3 is provided with a cylindrical recess for positioning the bottom end of the voice coil motor 2-3, and the rear panel of the motor positioning rear plate 3-3 is cut out of material to make a triangular reinforcing rib plate. The motor positioning top cover 3-1 and the motor positioning base 3-4 are both machined with elongated bosses for fixing the motor positioning front plate 3-2 and the motor positioning rear plate 3-3.

本实施例可以精确模拟KDP晶体在各种复杂环境下的面形变化,通过晶体驱动模块控制其变形来研究激光通过晶体的频率转换效率和光束质量。本发明采用音圈电机实现对KDP晶体的面形控制,具有结构简单、延迟时间短、响应快、行程大、控制精度高、能量转换效率高,符合对KDP晶体驱动装置的要求。This embodiment can accurately simulate the surface shape change of the KDP crystal in various complex environments, and control the deformation of the KDP crystal through the crystal drive module to study the frequency conversion efficiency and beam quality of the laser passing through the crystal. The invention adopts the voice coil motor to realize the surface shape control of the KDP crystal, and has the advantages of simple structure, short delay time, fast response, large stroke, high control precision and high energy conversion efficiency, and meets the requirements of the KDP crystal driving device.

Claims (6)

1.一种基于音圈电机驱动的KDP晶体面形控制装置,其特征在于基于音圈电机驱动的KDP晶体面形控制装置由晶体框模块(1)、晶体驱动模块(2)、电机定位模块(3)和外框模块(4)组成;所述晶体框模块(1)由加压板(1-1)、承压板(1-2)、底侧固定件(1-3)、顶侧固定件(1-4)、约束板(1-5)、加载块(1-7)、弧形弹片(1-8)和弹性垫板(1-9)组成;所述加压板(1-1)和承压板(1-2)的外框上均设置有与弹性垫板(1-9)相匹配的凹槽,所述加压板(1-1)和承压板(1-2)外框上的凹槽内分别设置有一个弹性垫板(1-9);KDP晶体(6)竖直设置在加压板(1-1)和承压板(1-2)之间;所述加压板(1-1)和承压板(1-2)的外框上均匀设置有多个凹口,所述加压板(1-1)外框上的凹口与承压板(1-2)外框上的凹口相对应;所述KDP晶体(6)的顶部设置有弧形弹片(1-8),所述KDP晶体(6)、加压板(1-1)和承压板(1-2)的上部设置有顶侧固定件(1-4),所述顶侧固定件(1-4)底端设置有一横向凸起用以压紧弧形弹片(1-8);所述KDP晶体(6)、加压板(1-1)和承压板(1-2)的下部设置有底侧固定件(1-3);所述承压板(1-2)两侧外框上的凹口内均设置有加载块(1-7),所述承压板(1-2)两侧外框的外侧分别设置有约束板(1-5),所述约束板(1-5)上设置有若干销孔和若干螺孔,所述销孔内设置有定位销(1-6)用以固定约束板(1-5),所述螺孔内设置有加载螺钉(1-10)用以控制加载块(1-7)在承压板(1-2)两侧外框上的凹口内滑动;所述晶体驱动模块(2)由16个驱动器组成,单个驱动器由平头件(2-1)、柔性铰链(2-2)和音圈电机(2-3)组成;所述的16个驱动器是按照4×4阵列设置在电机定位前板(3-2)和电机定位后板(3-3)之间;所述平头件(2-1)和音圈电机(2-3)通过柔性铰链(2-2)连接,所述音圈电机(2-3)的中轴与柔性铰链(2-2)通过螺纹连接;所述电机定位模块(3)由电机定位顶盖(3-1)、电机定位前板(3-2)、电机定位后板(3-3)和电机定位底座(3-4)组成;所述电机定位前板(3-2)和电机定位后板(3-3)上均按5×5阵列分布有25个通光口径,所述电机定位前板(3-2)上的25个通光口径与所述电机定位后板(3-3)上的25个通光口径相对称且同轴设置;所述电机定位前板(3-2)上按4×4阵列设置有16个驱动器前装配处,所述驱动器前装配处设置在每四个相邻通光口径围成的正方形的中心点处;所述电机定位后板(3-3)上按4×4阵列设置有16个驱动器后装配处,所述驱动器前装配处设置在每四个相邻通光口径围成的正方形的中心点处;所述单个驱动器的平头件(2-1)穿过电机定位前板(3-2)上的驱动器前装配处并通过螺栓固定;所述单个驱动器的音圈电机(2-3)的底端通过螺栓固定在驱动器后装配处;所述电机定位前板(3-2)和电机定位后板(3-3)的上端面设置有电机定位顶盖(3-1),所述电机定位前板(3-2)和电机定位后板(3-3)的下端面设置有电机定位底座(3-4);所述外框模块(4)由外框顶盖(4-1)、外框左板(4-2)、外框右板(4-3)和外框底座(4-4)组成;所述电机定位底座(3-4)固定在外框底座(4-4)上,所述外框顶盖(4-1)固定在电机定位顶盖(3-1)的上方,所述外框左板(4-2)固定在电机定位模块(3)的左侧,所述外框右板(4-3)固定在电机定位模块(3)的右侧;所述晶体框模块(1)设置电机定位前板(3-2)的外侧与单个驱动器的平头件(2-1)接触。1. A KDP crystal surface shape control device driven by a voice coil motor is characterized in that the KDP crystal surface shape control device driven by a voice coil motor is composed of a crystal frame module (1), a crystal drive module (2), a motor positioning module (3) is composed of an outer frame module (4); the crystal frame module (1) is composed of a pressure plate (1-1), a pressure bearing plate (1-2), a bottom fixing member (1-3), a top A side fixing member (1-4), a restraining plate (1-5), a loading block (1-7), an arc-shaped elastic piece (1-8) and an elastic backing plate (1-9) are composed; the pressure plate ( 1-1) and the outer frame of the pressure-bearing plate (1-2) are provided with grooves that match the elastic backing plate (1-9), and the pressure plate (1-1) and the pressure-bearing plate ( 1-2) An elastic backing plate (1-9) is respectively arranged in the groove on the outer frame; the KDP crystal (6) is vertically arranged on the pressure plate (1-1) and the pressure bearing plate (1-2) between; the outer frames of the pressure plate (1-1) and the pressure-bearing plate (1-2) are evenly provided with a plurality of notches, and the notches on the outer frame of the pressure plate (1-1) Corresponding to the notch on the outer frame of the pressure-bearing plate (1-2); the top of the KDP crystal (6) is provided with an arc-shaped elastic piece (1-8), the KDP crystal (6), the pressure plate ( 1-1) and the upper part of the pressure-bearing plate (1-2) are provided with a top side fixing member (1-4), and the bottom end of the top side fixing member (1-4) is provided with a transverse protrusion for pressing the arc A shrapnel (1-8); a bottom side fixing member (1-3) is provided on the lower part of the KDP crystal (6), the pressure plate (1-1) and the pressure bearing plate (1-2); the pressure bearing plate (1-3) Loading blocks (1-7) are provided in the notches on the outer frames on both sides of the plate (1-2), and restraining plates (1-5) are respectively provided on the outer sides of the outer frames on both sides of the pressure-bearing plate (1-2). ), the restraining plate (1-5) is provided with a number of pin holes and a number of screw holes, and a positioning pin (1-6) is arranged in the pin hole to fix the restraint plate (1-5), the screw A loading screw (1-10) is arranged in the hole to control the loading block (1-7) to slide in the notches on the outer frames on both sides of the pressure bearing plate (1-2); the crystal drive module (2) consists of 16 A single driver consists of a flat head piece (2-1), a flexible hinge (2-2) and a voice coil motor (2-3); the 16 drivers are arranged in a 4×4 array on the front plate of the motor positioning (3-2) and the motor positioning rear plate (3-3); the flat head piece (2-1) and the voice coil motor (2-3) are connected through a flexible hinge (2-2), and the voice coil motor The central axis of (2-3) is connected with the flexible hinge (2-2) by screws; the motor positioning module (3) consists of a motor positioning top cover (3-1), a motor positioning front plate (3-2), a motor positioning The positioning rear plate (3-3) and the motor positioning base (3-4) are composed; the motor positioning front plate (3-2) and the motor positioning rear plate (3-3) are distributed with 25 25 clear apertures on the motor positioning front plate (3-2) and the motor positioning rear plate (3-3) The 25 clear apertures are relatively symmetrical and coaxially arranged; the motor positioning front plate (3-2) is provided with 16 driver front assembly locations in a 4×4 array, and the driver front assembly locations are arranged at every four At the center point of the square surrounded by adjacent clear apertures; the motor positioning rear plate (3-3) is provided with 16 driver rear assembly positions in a 4×4 array, and the driver front assembly positions are set at every four At the center point of the square surrounded by two adjacent clear apertures; the flat head piece (2-1) of the single driver passes through the front assembly of the driver on the motor positioning front plate (3-2) and is fixed by bolts; The bottom end of the voice coil motor (2-3) of the single driver is fixed at the rear assembly position of the driver by bolts; the upper end faces of the motor positioning front plate (3-2) and the motor positioning rear plate (3-3) are provided with a motor positioning top cover (3-1), a motor positioning base (3-4) is provided on the lower end surfaces of the motor positioning front plate (3-2) and the motor positioning rear plate (3-3); the outer frame module (4) It consists of an outer frame top cover (4-1), an outer frame left plate (4-2), an outer frame right plate (4-3) and an outer frame base (4-4); the motor positioning base ( 3-4) is fixed on the outer frame base (4-4), the outer frame top cover (4-1) is fixed above the motor positioning top cover (3-1), the outer frame left plate (4-2) ) is fixed on the left side of the motor positioning module (3), the outer frame right plate (4-3) is fixed on the right side of the motor positioning module (3); the crystal frame module (1) is provided with a motor positioning front plate ( The outside of 3-2) is in contact with the flat head (2-1) of the single driver. 2.根据权利要求1所述的一种基于音圈电机驱动的KDP晶体面形控制装置,其特征在于所述柔性铰链(2-2)为直圆形多轴柔性铰链。2 . The KDP crystal surface shape control device driven by a voice coil motor according to claim 1 , wherein the flexible hinge ( 2 - 2 ) is a straight circular multi-axis flexible hinge. 3 . 3.根据权利要求1所述的一种基于音圈电机驱动的KDP晶体面形控制装置,其特征在于所述通光口径的直径为20mm。3 . The KDP crystal surface shape control device driven by a voice coil motor according to claim 1 , wherein the diameter of the light-transmitting aperture is 20 mm. 4 . 4.根据权利要求1所述的一种基于音圈电机驱动的KDP晶体面形控制装置,其特征在于所述平头件(2-1)的截面直径为6mm。4. The KDP crystal surface shape control device driven by a voice coil motor according to claim 1, characterized in that the cross-sectional diameter of the flat head piece (2-1) is 6 mm. 5.根据权利要求1所述的一种基于音圈电机驱动的KDP晶体面形控制装置,其特征在于所述电机定位后板(3-3)的前面板设置有用于定位音圈电机(2-3)底端的圆柱凹坑,所述电机定位后板(3-3)的后面板切除材料制成三角形加强筋板。5. A kind of KDP crystal surface shape control device based on voice coil motor drive according to claim 1, it is characterized in that the front panel of described motor positioning rear plate (3-3) is provided with for positioning voice coil motor (2 -3) The cylindrical pit at the bottom end, the rear panel of the motor positioning rear panel (3-3) is cut out of material to make a triangular reinforcing rib plate. 6.根据权利要求1所述的一种基于音圈电机驱动的KDP晶体面形控制装置,其特征在于所述电机定位顶盖(3-1)和电机定位底座(3-4)上均加工有用于固定电机定位前板(3-2)和电机定位后板(3-3)的长条凸台。6. A KDP crystal surface shape control device based on voice coil motor drive according to claim 1, characterized in that both the motor positioning top cover (3-1) and the motor positioning base (3-4) are processed There are long bosses for fixing the motor positioning front plate (3-2) and the motor positioning rear plate (3-3).
CN201710994589.5A 2017-10-23 2017-10-23 KDP crystal surface shape control device based on voice coil motor drive Expired - Fee Related CN107561689B (en)

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