CN107785054B - Six-degree-of-freedom micro-displacement workbench for spatial curved beam - Google Patents
Six-degree-of-freedom micro-displacement workbench for spatial curved beam Download PDFInfo
- Publication number
- CN107785054B CN107785054B CN201711155975.1A CN201711155975A CN107785054B CN 107785054 B CN107785054 B CN 107785054B CN 201711155975 A CN201711155975 A CN 201711155975A CN 107785054 B CN107785054 B CN 107785054B
- Authority
- CN
- China
- Prior art keywords
- workbench
- curved beam
- base
- shaped driving
- degree
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B1/00—Sensitive elements capable of producing movement or displacement for purposes not limited to measurement; Associated transmission mechanisms therefor
Landscapes
- Manipulator (AREA)
- Radiation-Therapy Devices (AREA)
- Machine Tool Units (AREA)
Abstract
The invention discloses a six-degree-of-freedom micro-displacement workbench with a spatial curved beam, which comprises a base, a workbench, a flexible curved beam element, a side plate, a Z-shaped driving frame, an L-shaped driving frame and a driving differential head, wherein the working platform is arranged on the base; the workbench is arranged on the base through flexible curved beam elements, and four groups of the flexible curved beam elements are respectively arranged on the periphery of the workbench; each group of flexible curved beam elements consists of two sections of quarter arc curved beams which are arranged on one side of the workbench in a herringbone manner. The invention adopts four herringbone flexible curved beam elements to realize the six-degree-of-freedom movement of the workbench, the deformation is more flexible when the workbench is stressed, and the structure is more compact. Because the invention installs 10 driving differential heads on the Z-shaped driving frame and the L-shaped driving frame, if different driving displacement combinations are respectively input, the workbench can respectively obtain the movement along the X, Y, Z triaxial and the rotation around the X, Y, Z triaxial, and the movement of the workbench with six degrees of freedom in space is realized.
Description
Technical Field
The invention relates to a micro-positioning technology, in particular to a spatial six-degree-of-freedom micro-worktable.
Background
With the rapid development of science and technology, the requirements on mechanical equipment are continuously improved, and the flexible mechanism has the advantages of cost reduction, precision improvement, easiness in miniaturization and the like, so that the urgent needs of people are met. The flexible mechanism has higher inherent precision and is widely applied to various science and technology leading-edge fields of precision engineering, aerospace, bionic machinery, biomedical treatment and the like. Because the stress analysis of the straight beam is simpler, the straight beam is mostly adopted in the existing compliant mechanism, but the straight beam has less geometric parameters and limited adjustment range, so that the adjustment capability of the straight beam on performance indexes is limited. Taking the existing planar single-degree-of-freedom and multi-degree-of-freedom micro-displacement working table as an example, because the straight beams have fewer geometric parameters, for the operation of spatial multi-degree-of-freedom, the straight beams in various forms need to be combined in series and parallel, so that the structure is overstaffed and is not easy to adjust.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a spatial curved beam six-degree-of-freedom micro-displacement workbench which is compact in structure and convenient to adjust.
In order to achieve the purpose, the technical scheme of the invention is as follows: a six-degree-of-freedom micro-displacement workbench with a spatial curved beam comprises a base, a workbench, a flexible curved beam element, a side plate, a Z-shaped driving frame, an L-shaped driving frame and a driving differential head; the workbench is arranged on the base through flexible curved beam elements, and four groups of the flexible curved beam elements are respectively arranged on the periphery of the workbench; each group of flexible curved beam elements consists of two sections of quarter arc curved beams which are arranged on one side of the workbench in a herringbone manner; the upper end of the arc curved beam is fixed on the workbench, and the lower end of the arc curved beam is fixed on the base; the four side plates are respectively arranged on the periphery of the workbench; four Z-shaped driving frames are arranged and are respectively fixed on the periphery of the base; the two L-shaped driving frames are respectively arranged on the bases at the two sides of the workbench, and the Z-shaped driving frame and the L-shaped driving frame are both provided with horizontal driving differential heads; and vertical driving differential heads are arranged on the Z-shaped driving frames.
Furthermore, the Z-shaped driving frame is arranged on the central axis of the base; the L-shaped driving frames are arranged on two sides of the same central axis of the base.
Furthermore, the horizontal plane of the base is square.
Furthermore, the upper end of the arc curved beam is fixed in the middle of the side edge of the workbench through an inner hexagonal cylindrical head screw.
Furthermore, the Z-shaped driving frame is fixed at the peripheral groove of the base through hexagon socket countersunk head screws.
Furthermore, the whole workbench is of a central symmetrical structure.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention adopts four herringbone flexible curved beam elements to realize the six-degree-of-freedom movement of the workbench, the deformation is more flexible when the workbench is stressed, and the structure is more compact.
2. Because the invention installs 10 driving differential heads on the Z-shaped driving frame and the L-shaped driving frame, if different driving displacement combinations are respectively input, the workbench can respectively obtain the movement along the X, Y, Z triaxial and the rotation around the X, Y, Z triaxial, and the movement of the workbench with six degrees of freedom in space is realized.
3. The invention adopts the driving differential head as the driver, has simple and flexible operation and convenient maintenance, and greatly reduces the cost.
4. The invention has the advantages of convenient processing, simple structure, no need of lubrication and high structural precision.
Drawings
The invention is shown in the attached figure 4, wherein:
FIG. 1 is a front view of the structure of the present invention;
FIG. 2 is a top view of the structure of the present invention;
FIG. 3 is a left side view of the structure of the present invention;
fig. 4 is a perspective view of the structure of the present invention.
In the figure: 1. a base, 2, a workbench, 3, a flexible curved beam element, 4, a side plate, 5, a Z-shaped driving frame, 6, an L-shaped driving frame, 71, horizontal driving differential heads A,72, horizontal driving differential heads B,73, horizontal driving differential heads C,74, horizontal driving differential heads D,75, horizontal driving differential heads E,76, horizontal driving differential heads F,81, vertical driving differential heads A,82, vertical driving differential heads B,83, vertical driving differential heads C,84, vertical driving differential heads D.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
As shown in fig. 1-4, a spatial curved beam six-degree-of-freedom micro-displacement workbench comprises a base 1, a workbench 2, a flexible curved beam element 3, a side plate 4, a Z-shaped driving frame 5, an L-shaped driving frame 6 and a driving differential head; the workbench 2 is arranged on the base 1 through the flexible curved beam elements 3, and four groups of the flexible curved beam elements 3 are respectively arranged on the periphery of the workbench 2; each group of flexible curved beam elements 3 consists of two sections of quarter arc curved beams which are arranged on one side of the workbench 2 in a herringbone manner; the upper end of the arc curved beam is fixed on the workbench 2, and the lower end is fixed on the base 1; four side plates 4 are arranged and are respectively arranged on the periphery of the workbench 2; four Z-shaped driving frames 5 are respectively fixed on the periphery of the base 1; the two L-shaped driving frames 6 are respectively arranged on the bases 1 at the two sides of the workbench 2, and the Z-shaped driving frame 5 and the L-shaped driving frame 6 are both provided with horizontal driving differential heads; and vertical driving differential heads are arranged on the Z-shaped driving frame 5.
Further, the Z-shaped driving frame 5 is arranged on the central axis of the base 1; the L-shaped driving frames 6 are arranged on two sides of the same central axis of the base 1.
Further, the shape of the horizontal plane of the base 1 is square.
Furthermore, the upper end of the arc curved beam is fixed in the middle of the side of the workbench 2 through an inner hexagonal socket head cap screw.
Furthermore, the Z-shaped driving frame 5 is fixed at the peripheral groove of the base 1 through hexagon socket countersunk head screws.
Furthermore, the whole workbench is of a central symmetrical structure.
The working principle of the invention is as follows:
the input of the present invention is accomplished by driving the differential head. For the in-plane degree of freedom driven by 6 horizontally driven differential heads, as shown in fig. 2, the table 2 is subjected to the driving force input by two symmetrically driven differential heads, a horizontally driven differential head B72 and a horizontally driven differential head D74, to thereby generate the movement in the X-axis direction. Similarly, the movement of the table 2 in the Y-axis direction is inputted by two driving differential heads, a horizontal driving differential head a71 and a horizontal driving differential head C73. When the horizontal driving differentiating head E75 and the horizontal driving differentiating head F76 are driven, the table 2 is subjected to equal and opposite driving torques, thereby generating rotation in the Z-axis direction. The out-of-plane degree of freedom is realized by four vertical driving differential heads installed on the Z-type driving frame 5 and evenly distributed at the lower end of the table 2, as shown in fig. 1 and 3, when the four vertical driving differential heads simultaneously perform input, the table 2 is subjected to a driving force along the Z-axis direction, thereby generating movement along the Z-axis direction, and when the vertical driving differential head a81 or the vertical driving differential head C83 performs input, the table 2 is subjected to a moment along the Y-axis direction, thereby generating rotation along the Y-axis direction. Similarly, when the vertical driving differential head B82 or the vertical driving differential head D84 performs an input, the table 2 is rotated in the X-axis direction.
The present invention is not limited to the embodiment, and any equivalent idea or change within the technical scope of the present invention is to be regarded as the protection scope of the present invention.
Claims (6)
1. A spatial curved beam six-degree-of-freedom micro-displacement workbench comprises a base (1), a workbench (2), side plates (4), a Z-shaped driving frame (5), an L-shaped driving frame (6) and a driving differential head; the method is characterized in that: the workbench (2) is arranged on the base (1) through flexible curved beam elements (3), and four groups of the flexible curved beam elements (3) are respectively arranged on the periphery of the workbench (2); each group of flexible curved beam elements (3) consists of two sections of quarter arc curved beams which are arranged on one side of the workbench (2) in a herringbone manner; the upper end of the arc curved beam is fixed on the workbench (2), and the lower end is fixed on the base (1); four side plates (4) are arranged and are respectively arranged on the periphery of the workbench (2); four Z-shaped driving frames (5) are respectively fixed on the periphery of the base (1); the two L-shaped driving frames (6) are respectively arranged on the bases (1) at the two sides of the workbench (2), and horizontal driving differential heads are respectively arranged on the Z-shaped driving frame (5) and the L-shaped driving frame (6); and vertical driving differential heads are arranged on the Z-shaped driving frames (5).
2. The spatial curved beam six-degree-of-freedom micro-displacement workbench according to claim 1, characterized in that: the Z-shaped driving frame (5) is arranged on the central axis of the base (1); the L-shaped driving frames (6) are arranged on two sides of the same central axis of the base (1).
3. The spatial curved beam six-degree-of-freedom micro-displacement workbench according to claim 1, characterized in that: the horizontal plane shape of the base (1) is square.
4. The spatial curved beam six-degree-of-freedom micro-displacement workbench according to claim 1, characterized in that: the upper end of the arc curved beam is fixed in the middle of the side of the workbench (2) through an inner hexagonal cylindrical head screw.
5. The spatial curved beam six-degree-of-freedom micro-displacement workbench according to claim 1, characterized in that: the Z-shaped driving frame (5) is fixed at the peripheral groove of the base (1) through inner hexagonal countersunk head screws.
6. The spatial curved beam six-degree-of-freedom micro-displacement workbench according to claim 1, characterized in that: the whole workbench is of a centrosymmetric structure.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2017214944332 | 2017-11-10 | ||
| CN201721494433 | 2017-11-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107785054A CN107785054A (en) | 2018-03-09 |
| CN107785054B true CN107785054B (en) | 2023-02-21 |
Family
ID=61430051
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711155975.1A Active CN107785054B (en) | 2017-11-10 | 2017-11-20 | Six-degree-of-freedom micro-displacement workbench for spatial curved beam |
| CN201721552888.5U Withdrawn - After Issue CN207381097U (en) | 2017-11-10 | 2017-11-20 | A kind of Space Curved-Beam six-degree of freedom micro-displacement workbench |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721552888.5U Withdrawn - After Issue CN207381097U (en) | 2017-11-10 | 2017-11-20 | A kind of Space Curved-Beam six-degree of freedom micro-displacement workbench |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN107785054B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107785054B (en) * | 2017-11-10 | 2023-02-21 | 大连交通大学 | Six-degree-of-freedom micro-displacement workbench for spatial curved beam |
| CN109550982A (en) * | 2019-01-28 | 2019-04-02 | 大连交通大学 | The three-dimensional elliptical vibration cutting device of Space Curved-Beam |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2626683Y (en) * | 2003-06-17 | 2004-07-21 | 合肥工业大学 | Single layer structure micromotion workbench with six degrees of freedom |
| CN1565811A (en) * | 2003-06-17 | 2005-01-19 | 合肥工业大学 | Single-layer structure micromotion workbench with six degrees of freedom and its parallel control mode |
| CN103531252A (en) * | 2013-10-22 | 2014-01-22 | 大连交通大学 | Micrometric displacement working table |
| CN106338805A (en) * | 2016-10-31 | 2017-01-18 | 中国科学院长春光学精密机械与物理研究所 | Optical element's six-degree-of-freedom micro-displacement adjusting device, projection objective lens and lithography machine |
| CN207381097U (en) * | 2017-11-10 | 2018-05-18 | 大连交通大学 | A kind of Space Curved-Beam six-degree of freedom micro-displacement workbench |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6290183B1 (en) * | 1999-10-19 | 2001-09-18 | Csa Engineering, Inc. | Three-axis, six degree-of-freedom, whole-spacecraft passive vibration isolation system |
| CN100448627C (en) * | 2007-06-15 | 2009-01-07 | 重庆大学 | Six degree of freedom buttjunction platform |
| EP3228579A1 (en) * | 2016-04-04 | 2017-10-11 | Importaciones Nauticas, S.A. | Hoisting jack with rotating and swivelling supporting fork |
-
2017
- 2017-11-20 CN CN201711155975.1A patent/CN107785054B/en active Active
- 2017-11-20 CN CN201721552888.5U patent/CN207381097U/en not_active Withdrawn - After Issue
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2626683Y (en) * | 2003-06-17 | 2004-07-21 | 合肥工业大学 | Single layer structure micromotion workbench with six degrees of freedom |
| CN1565811A (en) * | 2003-06-17 | 2005-01-19 | 合肥工业大学 | Single-layer structure micromotion workbench with six degrees of freedom and its parallel control mode |
| CN103531252A (en) * | 2013-10-22 | 2014-01-22 | 大连交通大学 | Micrometric displacement working table |
| CN106338805A (en) * | 2016-10-31 | 2017-01-18 | 中国科学院长春光学精密机械与物理研究所 | Optical element's six-degree-of-freedom micro-displacement adjusting device, projection objective lens and lithography machine |
| CN207381097U (en) * | 2017-11-10 | 2018-05-18 | 大连交通大学 | A kind of Space Curved-Beam six-degree of freedom micro-displacement workbench |
Non-Patent Citations (1)
| Title |
|---|
| 2-DOF并联柔性结构微动平台的新构型及尺寸优化;崔玉国等;《机器人》;20160515(第03期);98-105页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107785054A (en) | 2018-03-09 |
| CN207381097U (en) | 2018-05-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10384341B2 (en) | Redundant parallel positioning table device | |
| CN107785054B (en) | Six-degree-of-freedom micro-displacement workbench for spatial curved beam | |
| CN103021472B (en) | Plane parallel type three-freedom-degree precise positioning work table | |
| CN104505128B (en) | Two-freedom-degree, large-travel and large-load micro-positioning platform | |
| CN105006254A (en) | Large-stroke quick-response X-Y micro-motion workbench with double displacement magnification | |
| CN103104793A (en) | Integrated type six degrees of freedom precision positioning platform | |
| CN103586864A (en) | Planar three degree-of-freedom drive redundancy parallel robot mechanism formed by four PRR branched chains | |
| CN203726481U (en) | Robot head | |
| CN103592095A (en) | Two-rotation two-motion four-freedom-degree parallel excitation platform | |
| US20190368652A1 (en) | Redundant Parallel Positioning Table Device | |
| CN102592684A (en) | Spatial three-dimensionally translatory and two-dimensionally rotary full-compliant parallel mechanism | |
| CN104669248A (en) | Adjustable motion platform for three-freedom parallel mechanisms and adjusting method of adjustable motion platform | |
| CN108000459B (en) | Six-degree-of-freedom hybrid curved beam space compliant mechanism | |
| CN106313003A (en) | Large-stroke and high-precision three-moving-freedom-degree flexible parallel mechanism | |
| CN104742099A (en) | Self-propelled planar three-degrees-of-freedom piezoelectric driving platform | |
| CN104001943A (en) | Three-dimensional oval vibration turning head | |
| CN103495970A (en) | Three-freedom-degree parallel mechanism | |
| Yang et al. | Design, analysis and experiments of a stick-slip piezoelectric actuator working under the self-deformation mode | |
| CN108418465B (en) | Submicron-level precise flexible micro-motion system | |
| CN204989748U (en) | A three -dimensional elliptic motion workstation for two -photon polymerization processing | |
| EP3782769A1 (en) | Redundant parallel positioning table device | |
| US10557534B2 (en) | Linear-rotary actuator | |
| CN104669161B (en) | Localizer micromatic setting | |
| CN103531252B (en) | Micrometric displacement working table | |
| Liu et al. | A spatial design of a large stroke compliant XY nanomanipulator with cross-coupling error reduction |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |