CN107560447A - A kind of shutter vacuum drying oven observation window - Google Patents

A kind of shutter vacuum drying oven observation window Download PDF

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Publication number
CN107560447A
CN107560447A CN201710827812.7A CN201710827812A CN107560447A CN 107560447 A CN107560447 A CN 107560447A CN 201710827812 A CN201710827812 A CN 201710827812A CN 107560447 A CN107560447 A CN 107560447A
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CN
China
Prior art keywords
observation window
imaging
drying oven
vacuum drying
lens
Prior art date
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Pending
Application number
CN201710827812.7A
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Chinese (zh)
Inventor
赵文天
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ningbo Xinli Vacuum Technology Co Ltd
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Ningbo Xinli Vacuum Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ningbo Xinli Vacuum Technology Co Ltd filed Critical Ningbo Xinli Vacuum Technology Co Ltd
Priority to CN201710827812.7A priority Critical patent/CN107560447A/en
Publication of CN107560447A publication Critical patent/CN107560447A/en
Pending legal-status Critical Current

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Abstract

The present invention relates to a kind of shutter vacuum drying oven observation window, observation window cylinder including may be mounted to vacuum drying oven observation panel, imaging orifice plate mounted in observation window cylinder front end, glass lens and eyeglass pressing plate are mounted with observation window cylinder back-end, and are used between eyeglass and cylinder the sealing ring for forming vacuum sealing loop.An argon gas inflation road is provided between glass lens and imaging orifice plate.It is imaging lens barrel on the outside of glass lens, condenser lens, imaging len is mounted with successively in lens barrel, due to driving vane slit to form shutter by motor speed, therefore stroboscopic phenomenon is inevitable.When operating personnel directly observe, stroboscopic can cause visual fatigue, very unfavorable to the operating personnel of long-term work.When carrying out remote monitoring using camera, due to the difference of the speed and camera-scanning frequency of slit shutter, frequently result in remote monitoring screen and alternately dark space occur.Caused by these problems are all due to slit stroboscopic, unavoidably.

Description

A kind of shutter vacuum drying oven observation window
Technical field
The present invention relates to a kind of vacuum drying oven observation window construction and guard method, more particularly to one kind can long continuous operation and Prevent observation window construction without stroboscopic and its guard method of volatile matter attachment eyeglass.
Background technology
During melting or evaporation processing are carried out in vacuum drying oven, staff usually needs to observe material and work in stove Make state, to grasp situation in stove at any time, control adjusting process and avoid fortuitous event.This point is to electronic torch melting Stove and vacuum coating equipment are particularly important, but all kinds of evaporants in stove can be usually deposited on the eyeglass for being attached to observation window, shape Into blocking, seriously hinder one's work human users.Therefore, one can protect observation window lens not blocked by evaporation, and reliable steady Fixed observation window just must be indispensable.
At present, observation window universal in industry is based on the structure for being referred to as " flash window ", and slit is provided with using blade The blade of rotation forms the mechanism of similar shutter at a high speed so that an only very narrow slit can be with thang-kng, together in the same time When also drastically reduce the area evaporation steam and observation window lens time of contact, so as to improve observation window lens service life.Example A kind of side that observation window lens are protected using rotating vane and inflation system is such as disclosed in patent CN 102425956A Method.But this method has the following disadvantages:
1. blade rotating mechanism is complicated, with high costs.This method is revolved at a high speed using the method band movable vane piece of vacuum chamber built-in motor Turn, although avoiding power transmission shaft vacuum dynamic seal problem caused by electric machine external, also due to using vacuum motor and significantly Improve cost.
2. observation window volume is big.Because blade rotation needs space, thus cause the overall more required space of observation window compared with Directly light path volume needed for observation is big a lot, and it is even less to be effectively typically only 1/4 using area.This causes the cloth of observation window Put and occupy a large amount of positions, be often required to consider to select with the issuable interference of miscellaneous part, the arrangement for seriously constraining observation window Select.And observation window overall weight is big, maintenance and repair operation difficulty is big.
3. due to driving vane slit to form shutter by motor speed, therefore stroboscopic phenomenon is inevitable.Work as operator When member directly observes, stroboscopic can cause visual fatigue, very unfavorable to the operating personnel of long-term work.It is remote when being carried out using camera During range monitoring, due to the difference of the speed and camera-scanning frequency of slit shutter, frequently result in remote monitoring screen and hand over For dark space.Caused by these problems are all due to slit stroboscopic, unavoidably.
The content of the invention
To the above-mentioned state of the art, the technical problems to be solved by the invention are that providing one kind is based on pinhole imaging system Principle without stroboscopic type vacuum drying oven observation element, can be from existing " flash window " structure be thoroughly overcome in principle using it The defects of window stroboscopic, mechanism are complicated, volume is big, cost is high, the performance of vacuum drying oven observation window is greatly improved.
Technical scheme is used by the present invention solves above-mentioned technical problem:A kind of shutter vacuum drying oven observation window, including The observation window cylinder of vacuum drying oven observation panel is may be mounted to, the imaging orifice plate mounted in observation window cylinder front end, in observation window cylinder Rear end is mounted with glass lens and eyeglass pressing plate, and is used between eyeglass and cylinder the sealing for forming vacuum sealing loop Circle.Argon gas inflation road is provided between glass lens and imaging orifice plate, is imaging lens barrel on the outside of glass lens, lens barrel Condenser lens, imaging len are inside mounted with successively.
Further, the imaging aperture plate center has a 0.5 ~ 2mm of diameter circular hole, and hole central axis is imaged with outside The light shaft coaxle of two lens in lens barrel.
Further, the imaging hole plate thickness is not less than 1mm to ensure use intensity.
Further, the aperture both sides diameter of the imaging orifice plate is different, is more than outside towards the inside diameter of body of heater.
Further, the glass lens need to can be used 1 ~ 2 layer according to use, internal layer preferably resistant to elevated temperatures quartzy glass Glass.
Further, the condenser lens, imaging len light shaft coaxle.
Argon gas inflation road is used to be filled with micro argon gas to the space between glass lens and imaging orifice plate, to suppress smelting furnace Interior steam is deposited to deposition on glass lens.
Compared with prior art, the advantage of the invention is that:The present invention is based on pinhole imaging system principle, eliminates and rotates at a high speed The blade for having slit, imaging be not present brightness at a high speed change, be inherently eliminated observation window stroboscopic phenomenon, greatly avoided Operating personnel eyes visual fatigues, while also avoid the stroboscopic of the video camera used in remote monitoring.Eliminate rotating vane and The parts such as the motor of driving blade, bearing, drastically reduce the area observation window amount of parts, so as to greatly reduce manufacturing cost And maintenance difficulties.Without rotating vane so that observation window volume is greatly reduced, and all spaces of observation window contribute to printing opacity And imaging, occupied without extra more, significantly reduce the volume of observation window, substantially increase the space spirit of observation window installation Activity.Due to daylighting hole diameter very little, while coordinate micro argon gas to be filled with, can largely alleviate volatilization gas to sight Examine and be deposited on glass pane and produce and block.
Brief description of the drawings
Fig. 1 is a kind of shutter vacuum drying oven observation window structural representation of the present invention.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with accompanying drawing, the present invention is entered Row is further described.
As illustrated, a kind of shutter vacuum drying oven observation window, including may be mounted to the observation window cylinder of vacuum drying oven observation panel 1, the imaging orifice plate 2 mounted in the front end of observation window cylinder 1, glass lens 3 and eyeglass pressing plate are mounted with the rear end of observation window cylinder 1 4, and be used between eyeglass 3 and cylinder 1 to form the sealing ring 5 in vacuum sealing loop.In glass lens 3 and imaging orifice plate 2 Between be provided with argon gas inflation road 6.It is imaging lens barrel 7 in the outside of glass lens 3, it is saturating is mounted with focusing in lens barrel 7 successively Mirror 8, imaging len 9, the imaging aperture plate center have a 0.5 ~ 2mm of diameter circular hole, hole central axis and outside imaging lens The light shaft coaxle of two lens in cylinder, the imaging hole plate thickness are not less than 1mm to ensure use intensity, the imaging orifice plate Aperture both sides diameters it is different, be more than outside towards the inside diameter of body of heater, the glass lens need to can be used 1 according to use ~ 2 layers, the preferably resistant to elevated temperatures quartz glass of internal layer, the condenser lens, imaging len light shaft coaxle.
Argon gas inflation road is used to be filled with micro argon gas to the space between glass lens and imaging orifice plate, to suppress smelting furnace Interior steam is deposited to deposition on glass lens.
Compared with prior art, the advantage of the invention is that:The present invention is based on pinhole imaging system principle, eliminates and rotates at a high speed The blade for having slit, imaging be not present brightness at a high speed change, be inherently eliminated observation window stroboscopic phenomenon, greatly avoided Operating personnel eyes visual fatigues, while also avoid the stroboscopic of the video camera used in remote monitoring.Eliminate rotating vane and The parts such as the motor of driving blade, bearing, drastically reduce the area observation window amount of parts, so as to greatly reduce manufacturing cost And maintenance difficulties.Without rotating vane so that observation window volume is greatly reduced, and all spaces of observation window contribute to printing opacity And imaging, occupied without extra more, significantly reduce the volume of observation window, substantially increase the space spirit of observation window installation Activity.Due to daylighting hole diameter very little, while coordinate micro argon gas to be filled with, can largely alleviate volatilization gas to sight Examine and be deposited on glass pane and produce and block.

Claims (7)

  1. A kind of 1. shutter vacuum drying oven observation window, it is characterised in that the observation window cylinder including may be mounted to vacuum drying oven observation panel, Imaging orifice plate mounted in observation window cylinder front end, glass lens and eyeglass pressing plate are mounted with observation window cylinder back-end, and It is used for the sealing ring for forming vacuum sealing loop between eyeglass and cylinder.
  2. It is imaging lens barrel on the outside of glass lens 2. being provided with an argon gas inflation road between glass lens and imaging orifice plate, Condenser lens, imaging len are mounted with lens barrel successively.
  3. 3. a kind of shutter vacuum drying oven observation window according to claim 1, it is characterised in that the imaging aperture plate center has One 0.5 ~ 2mm of diameter circular hole, the light shaft coaxle of hole central axis and two lens in the imaging lens barrel of outside.
  4. 4. a kind of shutter vacuum drying oven observation window according to claim 1, it is characterised in that the imaging hole plate thickness is not Less than 1mm to ensure use intensity.
  5. A kind of 5. shutter vacuum drying oven observation window according to claim 1, it is characterised in that the aperture of the imaging orifice plate Both sides diameter is different, is more than outside towards the inside diameter of body of heater.
  6. 6. a kind of shutter vacuum drying oven observation window according to claim 1, it is characterised in that the glass lens are according to making With needing to can be used 1 ~ 2 layer, the preferably resistant to elevated temperatures quartz glass of internal layer.
  7. 7. a kind of shutter vacuum drying oven observation window according to claim 1, it is characterised in that the condenser lens, imaging Lens axis is coaxial.
CN201710827812.7A 2017-09-14 2017-09-14 A kind of shutter vacuum drying oven observation window Pending CN107560447A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710827812.7A CN107560447A (en) 2017-09-14 2017-09-14 A kind of shutter vacuum drying oven observation window

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710827812.7A CN107560447A (en) 2017-09-14 2017-09-14 A kind of shutter vacuum drying oven observation window

Publications (1)

Publication Number Publication Date
CN107560447A true CN107560447A (en) 2018-01-09

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CN201710827812.7A Pending CN107560447A (en) 2017-09-14 2017-09-14 A kind of shutter vacuum drying oven observation window

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114934263A (en) * 2022-06-22 2022-08-23 季华实验室 Manufacturing method of observation window of vacuum radio frequency coating equipment and observation window
CN115404428A (en) * 2022-11-02 2022-11-29 华北理工大学 Observation window of closed galvanized heating furnace

Citations (6)

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Publication number Priority date Publication date Assignee Title
CN2068506U (en) * 1990-04-05 1991-01-02 国家建材局秦皇岛玻璃工业设计研究院 Protective observation aperture for air differential pressure
GB2235548A (en) * 1989-08-07 1991-03-06 Gen Electric Observation window with cleaning device
CN1118549A (en) * 1994-09-05 1996-03-13 株式会社天野研究所 Monitoring camera
CN201376990Y (en) * 2009-02-17 2010-01-06 宝山钢铁股份有限公司 Observation hole of annealing furnace
JP2010002150A (en) * 2008-06-23 2010-01-07 Takuma Co Ltd Furnace monitoring device, furnace monitoring method and furnace operation control method using the device and method
CN105629417A (en) * 2014-10-27 2016-06-01 北京北方微电子基地设备工艺研究中心有限责任公司 Observation window assembly of reaction chamber, and reaction chamber provided with observation window assembly

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2235548A (en) * 1989-08-07 1991-03-06 Gen Electric Observation window with cleaning device
CN2068506U (en) * 1990-04-05 1991-01-02 国家建材局秦皇岛玻璃工业设计研究院 Protective observation aperture for air differential pressure
CN1118549A (en) * 1994-09-05 1996-03-13 株式会社天野研究所 Monitoring camera
JP2010002150A (en) * 2008-06-23 2010-01-07 Takuma Co Ltd Furnace monitoring device, furnace monitoring method and furnace operation control method using the device and method
CN201376990Y (en) * 2009-02-17 2010-01-06 宝山钢铁股份有限公司 Observation hole of annealing furnace
CN105629417A (en) * 2014-10-27 2016-06-01 北京北方微电子基地设备工艺研究中心有限责任公司 Observation window assembly of reaction chamber, and reaction chamber provided with observation window assembly

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
中国科学院自然科学史研究所: "《中国古代重要科技发明创造》", 30 June 2016, 科学普及出版社 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114934263A (en) * 2022-06-22 2022-08-23 季华实验室 Manufacturing method of observation window of vacuum radio frequency coating equipment and observation window
CN114934263B (en) * 2022-06-22 2023-08-15 季华实验室 Manufacturing method of observation window of vacuum radio frequency coating equipment and observation window
CN115404428A (en) * 2022-11-02 2022-11-29 华北理工大学 Observation window of closed galvanized heating furnace

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Application publication date: 20180109