CN105629417A - Observation window assembly of reaction chamber, and reaction chamber provided with observation window assembly - Google Patents
Observation window assembly of reaction chamber, and reaction chamber provided with observation window assembly Download PDFInfo
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- CN105629417A CN105629417A CN201410583803.4A CN201410583803A CN105629417A CN 105629417 A CN105629417 A CN 105629417A CN 201410583803 A CN201410583803 A CN 201410583803A CN 105629417 A CN105629417 A CN 105629417A
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- observation window
- reaction chamber
- window assembly
- concavees lens
- chamber
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Abstract
The invention provides an observation window assembly of a reaction chamber, and the reaction chamber provided with the observation window assembly. The chamber wall of the reaction chamber is provided with an observation hole. The observation window assembly comprises a piece of transparent glass and a concave lens. The piece of transparent glass is disposed on the chamber wall of the reaction chamber and is positioned opposite to the observation hole. The concave lens is arranged on the chamber wall of the reaction chamber and is positioned opposite to the observation hole. According to the invention, by means of the observation window assembly of reaction chamber, the field of view of the observation window can be expanded on the premise that the area of the observation window is kept the same. Therefore, the required region inside the reaction chamber can be observed.
Description
Technical field
The present invention relates to microelectronics technology, in particular it relates to the observation window assembly of a kind of reaction chamber and apply its reaction chamber.
Background technology
In vacuum equipment, observation window is a kind of indispensable parts, for the state for operator's observing response chamber interior. For PVD chamber, the Main Function of observation window is embodied in: when the internally installed parts of reaction chamber, and operator can pass through observation window from ad-hoc location observe the installation situation of parts, puts in place judging whether parts are installed, if meet the requirements; In the front and back carrying out technique, namely the pallet of transmission chamber is transferred into and out in the process of reaction chamber by mechanical hand, can observe the lifting situation of thimble and the situation that puts in place of pallet through observation window; When carrying out technique, the starter situation of technique can be observed through observation window, the situations such as whether wafer is stuck and whether chamber interior breaks down.
As shown in Figure 1-Figure 3, observation window assembly 2 is arranged on the sidewall 101 of reaction chamber 1 existing a kind of observation window structure, and it includes quartz glass 202 and mounting flange 201. Wherein, the arranged outside at sidewall 101 has chamber flange 102, and it docks with mounting flange 201, and is provided with sealing ring 3 between, in order to gap therebetween to be sealed. And, sidewall 101, chamber flange 102 and mounting flange 201 are linked together by screw 6, and three is respectively provided with corresponding three through hole, quartz glass 202 is embedded in the through hole of mounting flange 201, by the state arbitrarily observing chamber interior for operator.
But, in actual mechanical process, the above-mentioned observation window visual field is too little, it is impossible to observe the region of required observation. As shown in Figure 4, when observer observes to chamber interior in a position, in the visual field, only has a-quadrant scope; If observer wants the situation observing B region, then need to watch at b point. And due to the restriction of exterior thereto layout, the head of observer often by chamber outside such as joint, pipeline and some electronic components etc. block, it is impossible to b point observe. And, field of view can not be expanded simply by the mode increasing observation window area, this is because:
One, due to the restriction by chamber practical structures, and in chamber design, there is also other demand, such as, in PVD chamber, it is necessary to be installed into pore, temperature detect switch (TDS), vacuum pump interface, vacuum gauge interface etc., these interfaces can take the installing space of chamber periphery in a large number, so that not having enough spaces and area to arrange observation window.
They are two years old, in order to obtain homogeneous process results, in chamber, need to maintain homogeneous plasma environment, this quantity and area of just requiring as far as possible to reduce hole or opening on chamber in chamber design, therefore, excessive observation window area may affect the uniformity of process results.
Summary of the invention
It is contemplated that at least solve one of technical problem of existence in prior art, propose the observation window assembly of a kind of reaction chamber and apply its reaction chamber, it can when identical observation window area, expand the visual field of observation window, such that it is able to the required region observed in observing chamber.
The observation window assembly of a kind of reaction chamber is provided for realizing the purpose of the present invention, the chamber wall of described reaction chamber is provided with observation port, described observation window assembly includes clear glass, described clear glass is arranged on described chamber wall, and it is positioned at the position relative with described observation port, described observation window assembly also includes concavees lens, and described concavees lens are arranged on described chamber wall, and is positioned at the position relative with described observation port.
Wherein, described concavees lens are biconcave lens, planoconcave lens or the concavity meniscus more than convexity.
Preferably, the corresponding relation that the concavity of any one concave spherical surface of described concavees lens is all proportionate with the field range of described concavees lens.
Preferably, described concavees lens are positioned at the inner side of described chamber wall; Described observation window assembly also includes the first mounting assembly, and described first mounting assembly includes: snap ring, for pushing down described concavees lens towards the surface edge zone within described reaction chamber; First screw, for being fixed on the chamber wall of described reaction chamber by snap ring.
Preferably, described snap ring includes the ring body being looped around around described concavees lens, and is surrounded with an annular flange flange along the internal perisporium of described ring body, and described annular flange flange is stacked in described concavees lens towards the surface edge zone within described reaction chamber.
Preferably, described snap ring includes the ring body being looped around around described concavees lens, and is arranged at intervals with multiple paw along the internal perisporium of described ring body, and the plurality of paw is stacked in described concavees lens towards the surface edge zone within described reaction chamber.
Preferably, described observation window assembly also includes the second mounting assembly, and described second mounting assembly includes: chamber flange, is fixed on the outside of described chamber wall, and has the first centre bore, and described first centre bore is coaxial with described observation port; Mounting flange, superposed with described chamber flange accordingly, and there is the second centre bore, described second centre bore is coaxial with described observation port; Sealing ring, is arranged between described chamber flange and mounting flange, in order to gap therebetween to be sealed; Second screw, for being fixed together described chamber flange and mounting flange; Described clear glass is arranged in described first centre bore or the second centre bore.
Preferably, described concavees lens are embedded in described observation port.
Preferably, described clear glass is embedded in described observation port, and is positioned at inner side or the outside of described concavees lens.
As another technical scheme, the present invention also provides for a kind of reaction chamber, is provided with observation port, is provided with observation window assembly on described observation port on the chamber wall of described reaction chamber, and described observation window assembly adopts above-mentioned observation window assembly provided by the invention.
The method have the advantages that
The observation window assembly of reaction chamber provided by the invention, it is by the chamber wall of reaction chamber, and the position being positioned at observation port relative arranges concavees lens, can utilize it that light has the function of disperse function, when identical observation window area, expand the visual field of observation window, such that it is able to the required region observed in observing chamber.
Reaction chamber provided by the invention, it is by adopting above-mentioned observation window assembly provided by the invention, it is possible to when identical observation window area, expands the visual field of observation window, such that it is able to the required region observed in observing chamber.
Accompanying drawing explanation
Fig. 1 is the top view of existing reaction chamber;
Fig. 2 is the side view of the reaction chamber in Fig. 1;
Fig. 3 is the enlarged drawing in I region in Fig. 1;
Fig. 4 is the field range schematic diagram of the observation window in Fig. 1;
The sectional view of the observation window assembly that Fig. 5 provides for the embodiment of the present invention;
Fig. 6 is the field range schematic diagram of the observation window assembly in Fig. 5;
Fig. 7 A is the concavity graph of a relation with field range of biconcave lens; And
Fig. 7 B is the concavity graph of a relation with field range of planoconcave lens.
Detailed description of the invention
For making those skilled in the art be more fully understood that technical scheme, below in conjunction with the accompanying drawing observation window assembly to reaction chamber provided by the invention and apply its reaction chamber and be described in detail.
The sectional view of the observation window assembly that Fig. 5 provides for the embodiment of the present invention. Refer to N direction in Fig. 5, figure and point to the inside of reaction chamber. Being provided with observation port 301 on the chamber wall 30 of reaction chamber, observation window assembly includes clear glass 34, and clear glass 34 is arranged on chamber wall 30, and is positioned at the position relative with observation port 301. Specifically, observation port 301 can need to be arranged on chamber sidewall or chamber roof according to differential responses chamber, i.e. the chamber wall 30 in Fig. 5 can be chamber sidewall or chamber roof; Clear glass 34 adopts the transparent materials such as quartz to make, and may be mounted at outside or the inner side of chamber wall 30, it is also possible to be arranged in observation port 301.
In the present embodiment, clear glass 34 is arranged on the outside of chamber wall 30, and observation window assembly also includes concavees lens 41, these concavees lens 41 are arranged on inside chamber wall 30, and it is positioned at the position relative with observation port 301, that is, the outside of autoreaction chamber is internally disposed with clear glass 34, observation port 301 and concavees lens 41, clear glass 34 and concavees lens 41 and supplies the inside of observer's observing response chamber as double-deck observation window.
As shown in Figure 6, for the field range schematic diagram of the observation window assembly in Fig. 5. When setting up clear glass 34 as observation window, when observer observes to chamber interior in a position, in the visual field, only has a-quadrant scope; If observer wants the situation observing B region, then need to watch at b point. By comparison, in the present embodiment, according to the law of refraction and concavees lens principle, concavees lens 41 imaging is less than virtual image material object, upright, and light is had disperse function, thus the light within reaction chamber is by being dispersed after concavees lens 41, namely from a point it is seen that the scope in A ' region, A ' region is more than a-quadrant. When observer wants the state observing B region, only need to somewhat move a head portion it is seen that, and basic without mobile to the viewing of b point. Therefore, when identical observation window area, concavees lens 41 can expand the visual field of observation window, such that it is able to the required region observed in observing chamber.
It is described in detail below in conjunction with Fig. 7 A-7B structure to concavees lens 41 and principle. Specifically, at least one surface of concavees lens 41 is concave spherical surface. Furtherly, there are three kinds of forms in concavees lens 41, is respectively as follows: biconcave lens, planoconcave lens or meniscus (playing disperse function). Wherein, as shown in Figure 7 A, it has relative two concave spherical surface to the structure of biconcave lens, and the radius of curvature of two concave spherical surfaces is as follows with the relation of the field range of this biconcave lens:
Wherein, f is focal length, and n is the index of refraction in lens, r1For deviating from the radius of curvature of the concave spherical surface in N direction, r2Radius of curvature for the concave spherical surface towards N direction.
For biconcave lens, radius of curvature r1For negative value, radius of curvature r2For on the occasion of, focal distance f is negative value. According to formula it can be seen that when index of refraction in lens n is constant, focal distance f and radius of curvature r1It is directly proportional, with radius of curvature r2It is inversely proportional to. When a branch of light being parallel to main shaft passes through biconcave lens, the reverse extending line of transmitted ray and main shaft intersect at focus. By Fig. 7 A it can be seen that if the focus of lens is in m position, field range is M; If the focus of lens is in l position, field range is L, and therefore, focal length numerical value | f | is more big, and the field range of lens is more little, again because Concave Mirrors Focus f is negative value, so field range is directly proportional to focal distance f, with radius of curvature r1It is directly proportional, with radius of curvature r2It is inversely proportional to. Want to obtain bigger field range, it is necessary to increase radius of curvature r1, reduce radius of curvature r2. Again because of radius of curvature r1For negative value, radius of curvature r2For on the occasion of, thus the two of biconcave lens concave spherical surfaces are closer to sphere, i.e. concavity is more big, then field range is more big; Otherwise, closer to plane, i.e. concavity is more little, then field range is more little.
For planoconcave lens, as shown in Figure 7 B, it only has a concave spherical surface towards N direction and its radius of curvature r2For on the occasion of, focal distance f is negative value. Similar with above-mentioned biconcave lens, if the focus of lens is in m position, field range is M; If the focus of lens is in l position, field range is L, and therefore field range is directly proportional to focal distance f, radius of curvature r2It is inversely proportional to. Want to obtain bigger field range, it is necessary to reduce radius of curvature r2, again because of radius of curvature r2For on the occasion of, thus the concave spherical surface of planoconcave lens is closer to sphere, i.e. concavity is more big, then field range is more big; Otherwise, closer to plane, i.e. concavity is more little, then field range is more little. Concavity is similar with principle and above two concavees lens more than the structure of the meniscus of convexity, does not repeat them here. It should be noted that for planoconcave lens or meniscus, no matter its concave spherical surface towards N direction or deviates from N direction, is respectively provided with the function of the scope of broadening one's vision, and this is had no particular limits by the present invention.
In sum, the corresponding relation that the concavity of any one concave spherical surface of above-mentioned concavees lens is all proportionate with the field range of concavees lens. Therefore, it can obtain bigger field range by suitably increasing the concavity of concavees lens.
It addition, be positioned at the inner side of chamber wall for concavees lens 41, the present embodiment installs concavees lens 41 in the following ways, as it is shown in figure 5, observation window assembly also includes the first mounting assembly, this first mounting assembly includes snap ring 42 and the first screw 43. Wherein, snap ring 42 is used for pushing down the surface edge zone of concavees lens 41 orientating reaction chamber interior (towards N direction); First screw 43 for being fixed on the chamber wall 30 of reaction chamber by snap ring 42. Furtherly, snap ring 42 includes the ring body being looped around around concavees lens 41, and is surrounded with an annular flange flange 421 along the internal perisporium of this ring body, and annular flange flange 421 is stacked in the surface edge zone of concavees lens 41 orientating reaction chamber interior. By ring body, it is possible to limit the position of concavees lens 41, it is prevented that it offsets relative to observation port 301. Meanwhile, by annular flange flange 421, concavees lens 41 are fixed on inside chamber wall 30, to ensure that it does not fall out. Easy to understand, the internal diameter of above-mentioned ring body is not less than the external diameter of concavees lens 41.
In addition, the spaced multiple paws of the internal perisporium along ring body can also be adopted to replace above-mentioned annular flange flange 421, multiple paws are stacked in the surface edge zone of concavees lens orientating reaction chamber interior, and concavees lens 41 are fixed on inside chamber wall 30 by this equally possible realization. Certainly, in actual applications, snap ring 42 can also save annular flange flange or paw, and is only a ring body, and the internal diameter of this ring body is less than the external diameter of concavees lens, to utilize the annular distance peripheral part of ring body to push down the surface edge zone of concavees lens orientating reaction chamber interior.
In the present embodiment, it is positioned at the outside of chamber wall 30 for clear glass 34, clear glass 34 is installed in the following ways, specifically, observation window assembly also includes the second mounting assembly, and this second mounting assembly includes chamber flange 31, mounting flange 32, sealing ring 33 and the second screw 35. Wherein, chamber flange 31 is fixed on the outside of chamber wall 30, and has the first centre bore 311, and the first centre bore 311 is coaxial with observation port 301; Mounting flange 32 is superposed with chamber flange 31 accordingly, and has the second centre bore 321, and the second centre bore 321 is coaxial with observation port 301, and clear glass 34 is arranged in the second centre bore 321; Sealing ring 33 is arranged between chamber flange 31 and mounting flange 32, in order to gap therebetween to be sealed, thereby may be ensured that the vacuum state of reaction chamber. Second screw 35 is for being fixed together chamber flange 31 and mounting flange 32. Certainly, in actual applications, clear glass 34 can also be arranged in the first centre bore 31.
It should be noted that, in the present embodiment, clear glass 34 is arranged on the outside of chamber wall 30, concavees lens 41 are arranged on inside chamber wall 30, but the invention is not limited in this, in actual applications, it is possible to so that concavees lens 41 are arranged on the outside of chamber wall 30, and clear glass 34 is arranged on the inner side of chamber wall 30; Or, it is also possible to make concavees lens and/or clear glass be embedded in chamber wall, and clear glass may be located at outside or the inner side of concavees lens. Meanwhile, for being respectively mounted the mounting assembly of concavees lens and clear glass, adaptability design should be made according to the respective position of concavees lens and clear glass, and the sealing to reaction chamber need to be ensured.
The embodiment of the present invention also provides for a kind of reaction chamber, is provided with observation port, is provided with observation window assembly on this observation port on the chamber wall of this reaction chamber, and this observation window assembly adopts the above-mentioned observation window assembly that the embodiment of the present invention provides.
The reaction chamber that the embodiment of the present invention provides, its above-mentioned observation window assembly provided by adopting the embodiment of the present invention, it is possible to when identical observation window area, expand the visual field of observation window, such that it is able to the required region observed in observing chamber.
It is understood that the principle that is intended to be merely illustrative of the present of embodiment of above and the illustrative embodiments that adopts, but the invention is not limited in this. For those skilled in the art, without departing from the spirit and substance in the present invention, it is possible to make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.
Claims (10)
1. the observation window assembly of a reaction chamber, the chamber wall of described reaction chamber is provided with observation port, described observation window assembly includes clear glass, described clear glass is arranged on described chamber wall, and it is positioned at the position relative with described observation port, it is characterized in that, described observation window assembly also includes concavees lens
Described concavees lens are arranged on described chamber wall, and are positioned at the position relative with described observation port.
2. the observation window assembly of reaction chamber according to claim 1, it is characterised in that described concavees lens are biconcave lens, planoconcave lens or the concavity meniscus more than convexity.
3. the observation window assembly of reaction chamber according to claim 2, it is characterised in that the corresponding relation that the concavity of any one concave spherical surface of described concavees lens is all proportionate with the field range of described concavees lens.
4. the observation window assembly of the reaction chamber according to claim 1-3 any one, it is characterised in that described concavees lens are positioned at the inner side of described chamber wall;
Described observation window assembly also includes the first mounting assembly, and described first mounting assembly includes:
Snap ring, for pushing down described concavees lens towards the surface edge zone within described reaction chamber;
First screw, for being fixed on the chamber wall of described reaction chamber by snap ring.
5. the observation window assembly of reaction chamber according to claim 4, it is characterized in that, described snap ring includes the ring body being looped around around described concavees lens, and it being surrounded with an annular flange flange along the internal perisporium of described ring body, described annular flange flange is stacked in described concavees lens towards the surface edge zone within described reaction chamber.
6. the observation window assembly of reaction chamber according to claim 4, it is characterized in that, described snap ring includes the ring body being looped around around described concavees lens, and it being arranged at intervals with multiple paw along the internal perisporium of described ring body, the plurality of paw is stacked in described concavees lens towards the surface edge zone within described reaction chamber.
7. the observation window assembly of reaction chamber according to claim 1, it is characterised in that described observation window assembly also includes the second mounting assembly, and described second mounting assembly includes:
Chamber flange, is fixed on the outside of described chamber wall, and has the first centre bore, and described first centre bore is coaxial with described observation port;
Mounting flange, superposed with described chamber flange accordingly, and there is the second centre bore, described second centre bore is coaxial with described observation port;
Sealing ring, is arranged between described chamber flange and mounting flange, in order to gap therebetween to be sealed;
Second screw, for being fixed together described chamber flange and mounting flange;
Described clear glass is arranged in described first centre bore or the second centre bore.
8. the observation window assembly of reaction chamber according to claim 1, it is characterised in that described concavees lens are embedded in described observation port.
9. the observation window assembly of the reaction chamber according to claim 1 or 8, it is characterised in that described clear glass is embedded in described observation port, and it is positioned at inner side or the outside of described concavees lens.
10. a reaction chamber, is provided with observation port on the chamber wall of described reaction chamber, is provided with observation window assembly on described observation port, it is characterised in that described observation window assembly adopts the observation window assembly described in claim 1-9 any one.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410583803.4A CN105629417A (en) | 2014-10-27 | 2014-10-27 | Observation window assembly of reaction chamber, and reaction chamber provided with observation window assembly |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410583803.4A CN105629417A (en) | 2014-10-27 | 2014-10-27 | Observation window assembly of reaction chamber, and reaction chamber provided with observation window assembly |
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| CN105629417A true CN105629417A (en) | 2016-06-01 |
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| CN201410583803.4A Pending CN105629417A (en) | 2014-10-27 | 2014-10-27 | Observation window assembly of reaction chamber, and reaction chamber provided with observation window assembly |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107560447A (en) * | 2017-09-14 | 2018-01-09 | 宁波鑫利成真空科技有限公司 | A kind of shutter vacuum drying oven observation window |
| CN108444306A (en) * | 2018-03-16 | 2018-08-24 | 株洲稀美泰材料有限责任公司 | Observation window for observing metal smelting process |
| CN109141053A (en) * | 2017-06-27 | 2019-01-04 | 宁波鑫利成真空科技有限公司 | A kind of novel no stroboscopic vacuum drying oven observation window |
| WO2022151729A1 (en) * | 2021-01-18 | 2022-07-21 | 长鑫存储技术有限公司 | Tool and method for correcting position of wafer in semiconductor manufacturing machine |
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| CN103972812A (en) * | 2013-01-31 | 2014-08-06 | 西门子公司 | Gas chamber observation mechanism |
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| JP2002043236A (en) * | 2000-07-28 | 2002-02-08 | Shibaura Mechatronics Corp | Semiconductor processing system |
| DE202009003715U1 (en) * | 2009-02-09 | 2009-06-10 | Vacom Vakuum Komponenten & Messtechnik Gmbh | Quick-release door for vacuum applications |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109141053A (en) * | 2017-06-27 | 2019-01-04 | 宁波鑫利成真空科技有限公司 | A kind of novel no stroboscopic vacuum drying oven observation window |
| CN107560447A (en) * | 2017-09-14 | 2018-01-09 | 宁波鑫利成真空科技有限公司 | A kind of shutter vacuum drying oven observation window |
| CN108444306A (en) * | 2018-03-16 | 2018-08-24 | 株洲稀美泰材料有限责任公司 | Observation window for observing metal smelting process |
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| WO2022151729A1 (en) * | 2021-01-18 | 2022-07-21 | 长鑫存储技术有限公司 | Tool and method for correcting position of wafer in semiconductor manufacturing machine |
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Address after: 100176 No. 8 Wenchang Avenue, Beijing economic and Technological Development Zone Applicant after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Applicant before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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