CN107560335A - Bake equipment - Google Patents
Bake equipment Download PDFInfo
- Publication number
- CN107560335A CN107560335A CN201710728545.8A CN201710728545A CN107560335A CN 107560335 A CN107560335 A CN 107560335A CN 201710728545 A CN201710728545 A CN 201710728545A CN 107560335 A CN107560335 A CN 107560335A
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- Prior art keywords
- air inlet
- side wall
- baking equipment
- gas
- exhaust outlet
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Abstract
Baking equipment the invention discloses one kind includes casing, and casing is hollow and for accommodating product to be baked, and casing offers at least one exhaust outlet and at least one air inlet, and exhaust outlet is located at the top of air inlet.By the above-mentioned means, the present invention can avoid secondary pollution of the caused smog to product during baking.
Description
Technical field
The present invention relates to field display panel process technique field, and equipment is baked more particularly to one kind.
Background technology
At present, flexible pliability substrate, such as flexible display substrates, it usually needs prepared by baking, such as PI
Solvent volatilization of (Polyimide, the polyimides) substrate when being toasted in baking equipment in PI coatings produces smog, these smog
Particle is easily accumulated on property PI substrates easily to PI substrate secondary pollutions, causes PI substrates to scrap, PI greatly reduces
The making yield of substrate.
The content of the invention
The present invention solves the technical problem of a kind of baking equipment is provided, caused cigarette during baking can be avoided
Secondary pollution of the mist to product.
In order to solve the above technical problems, one aspect of the present invention is：A kind of baking equipment is provided, baking is set
Standby to include casing, casing is hollow and is used to accommodate product to be baked, and casing offers at least one exhaust outlet and at least one
Air inlet, exhaust outlet are located at the top of air inlet.
The beneficial effects of the invention are as follows：The situation of prior art is different from, the present invention is by setting baking equipment to include case
Body, casing is hollow and for accommodating product to be baked, and casing offers at least one exhaust outlet and at least one air inlet, row
Gas port is located at the top of air inlet, by the above-mentioned means, the gas that caused smog enters with air inlet during product baking
Exhaust outlet discharge is risen to, so as to which smog will not be deposited on product to product secondary pollution.
Brief description of the drawings
Fig. 1 is the schematic top plan view of the baking equipment of the embodiment of the present invention；
Fig. 2 is the dimensional structure diagram of the casing of embodiment；
Fig. 3 is the dimensional structure diagram of another embodiment of the present invention middle case；
Fig. 4 is the stereochemical structure rough schematic view of further embodiment of this invention middle case.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes.It is understood that specific embodiment described herein is only used for explaining the present invention, rather than the limit to the present invention
It is fixed.It also should be noted that for the ease of description, part related to the present invention illustrate only in accompanying drawing and not all knot
Structure.Based on the embodiment in the present invention, what those of ordinary skill in the art were obtained under the premise of creative work is not made
Every other embodiment, belongs to the scope of protection of the invention.
Term " first ", " second " in the present invention etc. are to be used to distinguish different objects, rather than specific suitable for describing
Sequence.In addition, term " comprising " and " having " and their any deformations, it is intended that cover non-exclusive include.Such as comprising
The step of process of series of steps or unit, method, system, product or equipment are not limited to list or unit, and
It is alternatively also to include the step of not listing or unit, or alternatively also includes for these processes, method, product or equipment
Intrinsic other steps or unit.
Referenced herein " embodiment " is it is meant that the special characteristic, structure or the characteristic that describe can wrap in conjunction with the embodiments
In at least one embodiment of the present invention.Each position in the description occur the phrase might not each mean it is identical
Embodiment, nor the independent or alternative embodiment with other embodiments mutual exclusion.Those skilled in the art explicitly and
Implicitly understand, embodiment described herein can be combined with other embodiments.
Fig. 1 and Fig. 2 are please referred to, Fig. 1 is the schematic top plan view of the baking equipment of the embodiment of the present invention, and Fig. 2 is to implement
The stereochemical structure rough schematic view of the casing of example.
In the present embodiment, baking equipment includes：Casing 11, product supporting mechanism 12, air inlet pipeline 13, gas exhaust piping
14th, exhaust gas processing device 15, flow sensor (not shown) and flow control valve (not shown).
Casing 11 can be cuboid, and in other embodiments, casing 11 can also be square.Casing includes roof
111st, bottom wall 112 and four side walls 113a, 113b, 113c, 113d of connection roof 111 and bottom wall 112.
In other embodiments, the quantity of side wall can be other, such as three side walls, i.e. casing 11 can be for bottom surface
The cylinder of triangle, then a such as side wall, i.e. casing 11 can be that bottom surface is circular or ellipse cylinder, and the present invention is real
Example is applied not limit this.
Casing 11 is hollow and for accommodating product A to be baked, and casing 11 offers at least one exhaust outlet C and at least one
Individual air inlet D1, D2, exhaust outlet C are located at air inlet D1, D2 top.Product to be baked can be flexible display substrates, example
Such as, PI (Polyimide, polyimides) substrate.
By the way that exhaust outlet C to be arranged on to air inlet D1, D2 top, caused smog is with air inlet during product A is baked
The gas that mouth enters rises to exhaust outlet discharge, so as to which smog will not be deposited on product to product secondary pollution
Product supporting mechanism 12 is used to support product A to be baked.Product supporting mechanism 12 can be located at air inlet D1, D2
Top, product supporting mechanism 12 can be located at exhaust outlet D1, D2 lower section.
The top that exhaust outlet C is located at air inlet D1, D2 can refer to that exhaust outlet C height above sea level is more than air inlet D sea
Degree of lifting.Similar, it will be apparent to those skilled in the art that product supporting mechanism 12 and exhaust outlet C and air inlet D1, D2 position
The relation of putting can do similar explanation, and here is omitted.
Before baking first by product material (for example, PI solution or emulsion, the solvent of the solutions emulsions can be nmp solvent,
Nmp solvent refers to 1-METHYLPYRROLIDONE, Chinese nickname：NMP；The pyrrolidones of 1- methyl -2；METHYLPYRROLIDONE) apply
Cloth is on product supporting mechanism 12, and air inlet D1 or D2 continue into the state that nitrogen makes to be in starvation in casing 11, so
Product supporting mechanism 12 is put into casing 11 afterwards, heating system again by temperature in casing 11 be increased to predetermined temperature (for example,
450 degrees Celsius) toasted, nmp solvent starts to volatilize, and produces smoke particle, and smoke particle rises to exhaust outlet C with nitrogen and arranged
Go out, after toasting the scheduled time, PI substrates are gradually oven-dried shaping, and air inlet D1 or D2 continue into cooling gas, and smog is with cold
But gas and nitrogen are discharged from exhaust outlet C, and smoke particle, which hardly deposits down to drop down onto PI substrates and produce substrate, to be polluted, and gas
Body discharge improves the producing efficiency of substrate in time, improves equipment mobility, improves product yield/production capacity, is advantageous to look forward to
Industry reduces production cost, strengthens its competitiveness.
Air inlet D1, D2 can be opened in any one in side wall 113a, 113b, 113c or 113d, exhaust outlet C
It can be opened on roof 111.
Exhaust outlet C is arranged at close side wall 113a, 113b, 113c or 113d of roof 111 fringe region.In this reality
Apply in example, the fringe region close to four side walls 113a, 113b, 113c or 113d of roof 111 is provided with exhaust outlet C.
In other embodiments, fringe region that can be only in roof close to certain a part of side wall 113a, 113b, 113c or 113d
Upper setting exhaust outlet C.For example, the fringe region only in roof 111 close to side wall 113a, 113c for offering air inlet D1, D2
Open up exhaust outlet C.
Exhaust outlet C near side wall 113c Edge Distance side wall 113c distance S between 0-5cm, specifically, should
Distance S can be 2cm.
In one embodiment, at least one air inlet D1, D2 can include multiple first air inlet D1 and multiple second
Air inlet D2, multiple first air inlet D1 and multiple second air inlet D2 are located at least one side wall 113a, 113b, 113c respectively
Or the different lateral in 113d.Specifically, the first air inlet D1 be located at side wall 113a, the second air inlet D2 can be located at
Side wall 113c relative side wall 113a.First air inlet D1 can be used for the entrance of process gas, and the second air inlet D2 can be used
In the entrance of cooling gas.
Process gas can be nitrogen (N2), cooling gas can be CDA (clean dry air, the compression of clean dried
Air).Process gas can allow the gas of the environment in starvation in casing 11 in baking process, and cooling gas can
To be to allow gas-cooled gas in casing 11 after the completion of baking.
Exhaust gas processing device 15 connects exhaust outlet C by gas exhaust piping 14, and air inlet pipeline 13 connects air inlet D1, D2.Tail
Flash Gas Compression Skid System 15 is used to handle the tail gas of exhaust outlet C discharges.
The material of air inlet pipeline 13 and gas exhaust piping 14 can be stainless steel material.For example, SUS304 materials, SUS304 materials
Material density is 7.93g/cm3, also referred to as 18/8 stainless steel.800 degree of high temperature resistant.
Each air inlet pipeline 13 and each gas exhaust piping 14 are equipped with flow sensor and flow control valve.Flow control valve
It can be magnetic valve.
Heating system and air intake control system etc. can also be included by baking equipment, due to not being related to the improvement to them, this
Place does not illustrate its structure, and heating system is used to raise the temperature in casing 11.Air intake control system and flow sensor
Connected with flow control valve, by controlling the size of air inflow and capacity (such as air inflow is more than capacity), so as to control
Air pressure in casing 11 specifically, slight positive pressure state, i.e. casing 11 is in control casing 11 higher than the air pressure outside casing 11
The difference of interior air pressure and the air pressure outside casing 11 is less than predetermined value, for example, predetermined value can be 0.1-5pa.On the one hand,
It can be excluded in order to the smog in casing 11, avoid smog secondary pollution from the other hand reducing the speed that heat dissipates in casing 11
Rate, improve the efficiency of heating surface.
Fig. 3 is referred to incorporated by reference to Fig. 1, Fig. 3 is the three-dimensional rough schematic view of another embodiment of the present invention middle case.In another reality
Apply in example, at least one air inlet E1, E2, E3, E4 can include multiple first air inlet E1, multiple second air inlet E2, more
Individual 3rd air inlet E3 and multiple 4th air inlet E4, multiple first air inlet E1 and multiple second air inlet E2 are positioned at same
Side wall 113a, multiple 3rd air inlet E3 and multiple 4th air inlet E4 are located at same side wall 113c, multiple first air inlet E1
It is located at different lateral with multiple 3rd air inlet E3.For example, the first air inlet E1 is located at side wall 113a, the 3rd air inlet E3 is located at
The side wall 113c relative with side wall 113a.
First air inlet E1 and the 3rd air inlet E3 is used for the entrance of process gas, the second air inlet E2 and the 4th air inlet
E4 is used for the entrance of cooling gas.
Process gas can be nitrogen (N2), cooling gas can be CDA (clean dry air, the compression of clean dried
Air).Process gas can allow the gas of the environment in starvation in casing 11 in baking process, and cooling gas can
To be to allow gas-cooled gas in casing 11 after the completion of baking.
Multiple first air inlet E1 can connect same air inlet pipeline, and multiple second air inlet E2 can connect same air inlet
Pipeline, multiple 3rd air inlet E3 can connect same air inlet pipeline, and multiple 4th air inlet E4 can connect same air inlet pipe
Road, and the first air inlet E1, the second air inlet E2, the 3rd air inlet E3 and the 4th air inlet E4 connect different air inlets respectively
Pipeline.
Further referring to Fig. 4, Fig. 4 is the stereochemical structure rough schematic view of further embodiment of this invention middle case.Exhaust
Mouth F is located above air inlet.Air inlet and exhaust outlet F are opened on side wall 113a, 113b, 113c or 113d.Air inlet
Open up mode and can open up mode described in any one embodiment as described above.
Exhaust outlet F can be arranged at the fringe region of side wall 113a, 113b, 113c or 113d close roof 111.
Exhaust outlet F near side wall 113a, 113b, 113c either 113d edge from side wall 113a, 113b, 113c or
113d distance can be 0-5cm, preferably 2cm.
In above-mentioned any one embodiment, a gas exhaust piping 14 can be connected with three exhaust outlets, an air inlet pipeline
13 can be connected with three air inlets.For entering same gas (such as previously described process gas or cooling gas)
Air inlet can be connected with same air inlet pipeline 13.
The present invention is by setting baking equipment to include casing, and casing is hollow and for accommodating product to be baked, and casing is opened
Provided with least one exhaust outlet and at least one air inlet, exhaust outlet is located at the top of air inlet, by the above-mentioned means, product dries
The gas that caused smog enters with air inlet during system rises to exhaust outlet discharge, so as to which smog will not be deposited on product
To product secondary pollution.
Embodiments of the present invention are the foregoing is only, are not intended to limit the scope of the invention, it is every to utilize this
The equivalent structure or equivalent flow conversion that description of the invention and accompanying drawing content are made, or directly or indirectly it is used in other correlations
Technical field, it is included within the scope of the present invention.
Claims (10)
1. one kind bakes equipment, it is characterised in that the baking equipment includes casing, and the casing is hollow and waits to dry for accommodating
Roasting product, the casing offer at least one exhaust outlet and at least one air inlet, and the exhaust outlet is located at the air inlet
The top of mouth.
2. baking equipment according to claim 1, it is characterised in that the casing includes roof, bottom wall, the connection top
At least one side wall of wall and the bottom wall, the air inlet are opened in the side wall, and the exhaust outlet is opened in the top
On wall.
3. baking equipment according to claim 2, it is characterised in that the exhaust outlet is arranged at the close institute of the roof
State the fringe region of side wall.
4. baking equipment according to claim 1, it is characterised in that the casing includes roof, bottom wall, the connection top
At least one side wall of wall and the bottom wall, the air inlet and the exhaust outlet are opened in the side wall.
5. baking equipment according to claim 4, it is characterised in that the exhaust outlet is arranged at the close institute of the side wall
State the fringe region of roof.
6. the baking equipment according to claim 2 or 4, it is characterised in that at least one air inlet includes multiple the
One air inlet and multiple second air inlets, the multiple first air inlet and the multiple second air inlet respectively positioned at it is described extremely
Different lateral in a few side wall, first air inlet are used for the entrance of process gas, and second air inlet is used for cold
But the entrance of gas.
7. the baking equipment according to claim 2 or 4, it is characterised in that at least one air inlet includes multiple the
One air inlet, multiple second air inlets, multiple 3rd air inlets and multiple 4th air inlets, the multiple first air inlet and
The multiple second air inlet is located at same side wall, the multiple 3rd air inlet and the multiple 4th air inlet positioned at same
Side wall, the multiple first air inlet and the multiple 3rd air inlet are located at different lateral, first air inlet and described
3rd air inlet is used for the entrance of process gas, and second air inlet and the 4th air inlet are used for entering for cooling gas
Enter.
8. baking equipment according to claim 1, it is characterised in that the baking equipment further comprises that vent gas treatment fills
Put, gas exhaust piping and air inlet pipeline, the exhaust gas processing device connects the exhaust outlet by the gas exhaust piping, it is described enter
Air pipe connects the air inlet.
9. baking equipment according to claim 8, it is characterised in that the material of the air inlet pipeline and gas exhaust piping is not
Become rusty Steel material.
10. baking equipment according to claim 8, it is characterised in that the baking equipment further comprises being arranged at institute
State the flow sensor and flow control valve of air inlet pipeline and the gas exhaust piping.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710728545.8A CN107560335A (en) | 2017-08-18 | 2017-08-18 | Bake equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710728545.8A CN107560335A (en) | 2017-08-18 | 2017-08-18 | Bake equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107560335A true CN107560335A (en) | 2018-01-09 |
Family
ID=60976561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710728545.8A Pending CN107560335A (en) | 2017-08-18 | 2017-08-18 | Bake equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107560335A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109534686A (en) * | 2018-12-04 | 2019-03-29 | 武汉华星光电半导体显示技术有限公司 | Baking box |
| CN109830451A (en) * | 2019-01-23 | 2019-05-31 | 武汉华星光电半导体显示技术有限公司 | Substrate drying device |
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| JP2011192390A (en) * | 2010-03-11 | 2011-09-29 | Noritake Co Ltd | Drying method and drying device of metal foil laminated body |
| CN204177136U (en) * | 2014-09-02 | 2015-02-25 | 浙江朗博药业有限公司 | A kind of vacuum drying chamber |
| CN104596209A (en) * | 2014-11-27 | 2015-05-06 | 百顺松涛（天津）动力电池科技发展有限公司 | Baking and cooling integrated device for lithium ion battery production |
| CN204555567U (en) * | 2015-02-27 | 2015-08-12 | 重庆雅马拓科技有限公司 | A kind of novel evacuated drying equipment |
| CN205262082U (en) * | 2016-01-07 | 2016-05-25 | 伊犁师范学院 | Chemistry experiment uses oven in room |
| CN205351962U (en) * | 2015-12-29 | 2016-06-29 | 浙江普洛医药科技有限公司 | Drying device |
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Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011192390A (en) * | 2010-03-11 | 2011-09-29 | Noritake Co Ltd | Drying method and drying device of metal foil laminated body |
| CN201772703U (en) * | 2010-08-26 | 2011-03-23 | 昆山大阳机电设备制造有限公司 | High-temperature oxidation-free program-control baking oven |
| CN204177136U (en) * | 2014-09-02 | 2015-02-25 | 浙江朗博药业有限公司 | A kind of vacuum drying chamber |
| CN104596209A (en) * | 2014-11-27 | 2015-05-06 | 百顺松涛（天津）动力电池科技发展有限公司 | Baking and cooling integrated device for lithium ion battery production |
| CN204555567U (en) * | 2015-02-27 | 2015-08-12 | 重庆雅马拓科技有限公司 | A kind of novel evacuated drying equipment |
| CN205351962U (en) * | 2015-12-29 | 2016-06-29 | 浙江普洛医药科技有限公司 | Drying device |
| CN205262082U (en) * | 2016-01-07 | 2016-05-25 | 伊犁师范学院 | Chemistry experiment uses oven in room |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109534686A (en) * | 2018-12-04 | 2019-03-29 | 武汉华星光电半导体显示技术有限公司 | Baking box |
| CN109830451A (en) * | 2019-01-23 | 2019-05-31 | 武汉华星光电半导体显示技术有限公司 | Substrate drying device |
| CN109830451B (en) * | 2019-01-23 | 2021-07-23 | 武汉华星光电半导体显示技术有限公司 | Substrate drying device |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
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| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20180109 |