CN107532292B - 具有中间涂层和碳涂层的基材 - Google Patents

具有中间涂层和碳涂层的基材 Download PDF

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CN107532292B
CN107532292B CN201680023061.7A CN201680023061A CN107532292B CN 107532292 B CN107532292 B CN 107532292B CN 201680023061 A CN201680023061 A CN 201680023061A CN 107532292 B CN107532292 B CN 107532292B
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乔安娜·普罗塞莱夫斯卡
埃德加·舒尔茨
亚沙尔·穆萨耶夫
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Schaeffler Technologies AG and Co KG
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Abstract

本发明涉及一种构件(100)，它包括基材(10)，该基材具有至少一个设有层体系(14)的表面(12)，其中，该层体系(14)包括至少一个无定形的碳层。层体系(14)还包括至少一个金属的中间层(16)，该金属的中间层布置在基材(10)和该至少一个无定形的碳层之间。该至少一个无定形的碳层形成层体系(14)的背离基材(10)的外层(18)并且包括至少一个无定形的含氢的碳层。本发明还公开了该构件(100)的用途以及生产该构件(100)的方法。

Description

具有中间涂层和碳涂层的基材
技术领域
本发明涉及一种构件，其包括基材，该基材具有至少一个设有层体系的表面，其中，层体系包括至少一个无定形的碳层。本发明还涉及该构件的用途以及生产该构件的方法。
背景技术
开篇所述的具有层体系的构件应用于多种技术领域中。由现有技术已知具有摩擦学特性例如耐磨损性或者耐腐蚀性的层体系，从而对于高性能组件例如对于高负荷的链传动组件、滚动轴承组件、马达元件和刀具保证这些特性。
CN 103046001A记载了一种起摩擦学作用的层体系，其具有钛层、碳-钛过渡层以及无定形的碳层。
根据应用情况，这些层由硬质材料层或者碳层组成，它们通过已知的PVD或者PACVD工艺施加于构件上。
PVD或者PACVD工艺是多种技术领域中已知的并且导致摩擦学特性的显著改善，例如导致经涂层的构件的改善的耐磨损性和摩擦降低。然而，在用于化学侵蚀性介质中的情况下，基础材料本身必须具有足够的耐腐蚀性。
为了实现经济性，构件主要由低合金耐腐蚀材料生产。然而不利的是，这些技术在构件中一方面在升高的负荷的情况下不足以提供可靠的磨损防护，另一方面在化学侵蚀性介质中没有提供足够的腐蚀防护。
发明内容
因此，本发明的任务是按如下方式改进一种构件，其包括基材，该基材具有至少一个设有层体系的表面，其中层体系包括至少一个无定形的碳层，从而使得该构件受到针对摩擦学负荷的防护，并且尤其是在这种情况下保证在化学侵蚀性环境介质中的可靠且持久的磨损防护。
该任务通过具有权利要求1的特征的构件得以解决。该构件是耐腐蚀且耐磨损的并且适合在极端的摩擦学负荷的情况下应用于化学侵蚀性环境条件中。
本发明的另一个任务是提供这样的构件的用途，使得构件在使用中针对摩擦学负荷受到防护并且尤其是在这种情况下保证可靠且持久的磨损防护。
该任务通过根据本发明的包括权利要求7的特征的构件的用途得以解决。
本发明的再一个任务是提供一种大批量地、工艺可靠地且经济地生产构件的方法。
该任务通过包括权利要求8的特征的根据本发明的生产构件的方法得以解决。由此形成的构件在使用中具有高摩擦学负荷的情况下可以可靠地使用并且在化学侵蚀性环境介质中具有耐受性。
根据本发明的构件包括基材，该基材具有至少一个设有层体系的表面，其中，层体系包括至少一个无定形的碳层。层体系还具有至少一个金属的中间层，该金属的中间层布置在该基材和该至少一个无定形的碳层之间。该至少一个无定形的碳层形成层体系的背离基材的外层并且包括至少一个无定形的含氢的碳层。
无定形的碳层形成起摩擦学功能的层。尤其是，无定形的含氢的碳层(在这里也称为a-C:H层)是所谓的DLC层(DLC＝类金刚石碳)。
优选地，该无定形的含氢的碳层具有在10至25％、尤其是15至20％范围中的氢含量。在这种情况下，这里以及下面的合金组成的百分比信息是原子百分比。
在根据本发明的构件的一种优选实施方式中，无定形的含氢的碳层是一种改性的含氢的无定形的碳层，它包括掺杂元素，该掺杂元素由金属或者非金属形成。
含金属的无定形的含氢的碳层(这里也称为a-C:H:Me层)优选以具有至少一种来自周期表的4至11副族的掺杂元素的方式形成。通过用金属掺杂，层体系的无定形的碳层例如具有高的耐磨强度、小的摩擦系数以及与相邻层的改善的附着能力。通过改变金属含量，可以强烈影响层体系的材料特性。
含有非金属的无定形的含氢的碳层(在这里也称为a-C:H:X层)优选以具有来自包括硅、氧、氮、氟、硼的组的至少一种掺杂元素的方式形成。将含氢的无定形的碳层用非金属掺杂同样可以强烈改变层体系的期望特性。硅例如提高在含氧环境中的耐热性。用硅和氧掺杂可以强烈降低表面能(直至PTFE量级的值)。此外，可以生产透明的并且非常防刮的层。
根据本发明的构件的另一种实施方式还可以提出的是，该至少一个无定形的碳层包括两个无定形的碳层，其中，存在第一无定形的含氢的碳层以及另一用掺杂元素改性的无定形的含氢的碳层。在这种情况下，该第一或者第二碳层形成层体系的外层。
在本发明的一种优选实施方式中，该至少一个金属的中间层由钛、钛合金、镍或者镍合金组成。尤其是，中间层由钛-镍合金或者钛-镍-钒合金形成。
因此利用了例如PVD覆层与钛和/或镍合金的中间层相结合的良好的摩擦学特性，以便能够在侵蚀性环境介质中配备在摩擦学方面高负荷的构件。通过有针对性的沉积方法获得合金搭配的份额(例如钛/镍40/60％)。通过使用额外的模拟工具，在这里确定最优的层组成，其根据摩擦学体系的不同保证最高程度的腐蚀防护。
优选地，层体系的总层厚度D在2至100μm的范围中，尤其是2至50μm的范围中，特别优选2至25μm的范围中。
在构件的一种优选实施方式中，还存在至少一个增附层，其布置在该至少一个中间层与基材之间。增附层可以改善中间层的附着，改善层体系的牢固性和/或构件的耐腐蚀性。在这种情况下，该至少一个增附层优选由金属或者金属合金形成，其中，该至少一个增附层的组成不同于该至少一个中间层的组成。
构件的基材尤其由钢形成，尤其由调质钢形成。
在这样的情况下，适合作为增附层的尤其是镍合金，优选镍-铬合金或者镍-钒合金。这些组成尤其用于改善层体系在基材表面上的附着。此外，镍-磷合金也适合作为增附层。在这种情况下，镍-磷合金(NiP)优选具有大于10％的、优选在12至15％的范围中的磷含量。尤其是，在这种情况下构造成无定形的NiP层。这种由NiP组成的增附层与其说用于增附还不如说用作基材的额外的腐蚀防护。
在构件的一种特别优选的实施方式中，存在一个至少两层式构造的增附层，它具有与基材邻接的由NiP组成的第一增附层以及其上的由镍-铬合金或者镍-钒合金组成的第二增附层，该第二增附层邻接于中间层。该多层式增附层保证了层体系在基材上的良好附着并同时保证了基材的腐蚀防护的改善。
已证明具有耐腐蚀性和耐磨损性的是这样一种构件：它包括由钢制成的基材以及层体系，其中，层体系从基材出发依次具有可选的由NiV或者NiCr组成的增附层、具有由钛-镍合金尤其是钛-镍-铬合金或者钛-镍-钒合金组成的金属的中间层并具有无定形的含氢的碳层。
已证明具有特别高的耐腐蚀性和耐磨损性的是这样一种构件：它包括由钢制成的基材和层体系，其中，层体系从基材出发依次具有由NiP组成的第一增附层和由NiV或者NiCr组成的第二增附层所组成的多层式增附层、具有由钛-镍合金尤其是钛-镍-铬合金或者钛-镍-钒合金组成的金属的中间层并具有无定形的含氢的碳层。
用于生产根据本发明的构件的根据本发明的方法的特征在于以下步骤：
-可选地沉积至少一个增附层；
-在基材的表面上或者可选的至少一个增附层上沉积至少一个金属的中间层；以及
-在至少一个金属的中间层上沉积包括至少一个无定形的含氢的碳层的至少一个无定形的碳层。
优选地，将该可选的至少一个增附层和/或该至少一个金属的中间层和/或该包括至少一个无定形的含氢的碳层的至少一个无定形的碳层通过PVD或者PACVD沉积。
备选地，将该至少一个金属的中间层、必要时还将该可选的至少一个增附层通过电镀和/或通过热喷涂进行沉积，并且还将该包括至少一个无定形的含氢的碳层的至少一个无定形的碳层通过PVD或者PACVD沉积。
根据本发明的方法的第一优选实施方式还可以提出的是，金属的中间层由钛、钛合金、镍或者镍合金组成，它们通过单个的靶和/或镶嵌靶通过PVD或者PACVD沉积于基材上。
包括上述的层体系(该层体系包括至少一个无定形的含氢的碳层)的构件带来突出的摩擦学性质。此外，该层体系除了对于构件的可靠且耐久的磨损防护以外还由于必要时在至少一个增附层上的至少一个金属的中间层而保证了在化学侵蚀性环境介质中的腐蚀防护。在这里，化学侵蚀性的环境介质指的是例如烃类、溶剂、有机溶液、海水、酸、碱液等。
因此，本发明也可以用于高负荷的机械元件。属于此的例如有暴露于化学侵蚀性环境介质的轴或者滚动轴承。本发明还可用于对表面有特殊要求的特定应用，例如在存在润滑不良的情况下或者滚动轴承中的介质入口，尤其是在食品或者药品工业中，在用于牙钻的支承机构、涡轮增压机、心轴轴承、泵、水下涡轮机等中。本发明的另一优点在于这里所述的层体系从设备技术(例如在线设备)和工艺技术方面来看可以相应容易地且经济地实现，从而通过根据本发明的方法可实现耐腐蚀且耐磨损的构件的大批量的且工艺可靠的生产。
附图说明
下面将参照附图详细地解释本发明的实施例及其优点。图中的比例不对应于真实的比例，这是因为将层体系的层以分解视图单独地且简化地示出。其中：
图1示出构件的部分剖视图，其中，基材的表面设有根据本发明的层体系。
具体实施方式
图1示出构件100的部分剖视图，该构件包括由钢制成的基材10以及层体系14。基材10的表面12设有根据本发明的层体系14，其中，这里示出直接安置在基材10的表面12上的增附层20。在这种情况下，增附层20仅仅是可选地存在的并且不是必需的。此外存在一个金属的中间层16，它直接安置在基材10的表面12上或者安置在可选存在的增附层20上。此外，外层18以起摩擦学功能的无定形的含氢的碳层的形式存在，它背离基材10地布置。金属的增附层在这里例如由镍-钒合金组成。但是增附层也可以以多层的方式构成并且尤其是包括例如由NiP组成的第一增附层以及例如由NiCr组成的第二增附层。
金属的中间层16优选由钛、钛合金、镍或者镍合金组成。在这里使用由钛-镍-钒合金组成的中间层16。在通过PVD或者PACVD生产层体系14的层的情况下，可以使用单个的靶，也可以使用所谓的镶嵌靶。起摩擦学功能的无定形的含氢的碳层在一种实施方式中是改性的含氢的无定形的碳层。形成于构件100上的层体系14在这里具有25μm的总层厚度D。
所示的构件的实施方式仅仅构成关于根据本发明的构件以及根据本发明的生产方法可以如何配置的一个示例。例如可以将增附层完全省略或者在基材上设置不同组成的多个增附层。此外，可以存在多个金属的中间层。最后，也可以存在包括至少一个无定形的含氢的碳层的多个无定形的碳层。
附图标记列表
100 构件
10 基材
12 表面
14 层体系
16 金属的中间层
18 外层
20 增附层
22 掺杂元素
D 总层厚度

Claims (10)

1.一种构件(100)，其包括基材(10)，所述基材具有至少一个设有层体系(14)的表面(12)，其中，所述层体系(14)包括至少一个无定形的碳层，其中，所述层体系(14)还包括至少一个金属的中间层(16)，所述金属的中间层布置在所述基材(10)与所述至少一个无定形的碳层之间，其中，所述金属的中间层(16)由钛、钛合金、镍或者镍合金组成，其中，还存在两层式的增附层(20)，所述两层式的增附层布置在所述至少一个中间层(16)与所述基材(10)之间，其中，存在由NiP组成的第一增附层以及其上的由镍-铬合金或者镍-钒合金组成的第二增附层，并且其中，所述至少一个无定形的碳层形成所述层体系(14)的背离所述基材(10)的外层(18)并且包括至少一个无定形的含氢的碳层。
2.根据权利要求1所述的构件(100)，其中，所述至少一个无定形的含氢的碳层包括掺杂元素(22)，所述掺杂元素由金属或者非金属形成。
3.根据权利要求1所述的构件(100)，其中，所述无定形的含氢的碳层具有在10至25原子％范围中的氢含量。
4.根据权利要求1所述的构件(100)，其中，所述层体系(14)的总层厚度(D)在2μm至100μm范围中。
5.根据权利要求1所述的构件(100)，其中，所述基材(10)由钢形成。
6.根据权利要求1至5中任意一项所述的构件(100)，其中，所述金属的中间层(16)由钛-镍合金形成。
7.根据权利要求1至6中任意一项所述的构件(100)的用途，其中，所述构件(100)至少在层体系(14)的区域中与摩擦对象在化学侵蚀性环境介质中协作。
8.一种用于生产根据权利要求1至6中任意一项所述的构件(100)的方法，其特征在于下列步骤：
-沉积两层式的增附层(20)；
-在所述两层式的增附层(20)上沉积至少一个金属的中间层(16)；以及
-在所述至少一个金属的中间层(16)上沉积包括至少一个无定形的含氢的碳层的至少一个无定形的碳层。
9.根据权利要求8所述的方法，其中，将所述两层式的增附层(20)和/或所述至少一个金属的中间层(16)和/或所述包括至少一个无定形的含氢的碳层的至少一个无定形的碳层通过PVD或者PACVD沉积。
10.根据权利要求8所述的方法，其中，将所述至少一个金属的中间层(16)、必要时还将所述两层式的增附层(20)通过电镀和/或通过热喷涂进行沉积，并且其中，将所述包括至少一个无定形的含氢的碳层的至少一个无定形的碳层通过PVD或者PACVD沉积。
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