CN107523789A - A kind of gradual change ash filter is coated with device and its plating method - Google Patents

A kind of gradual change ash filter is coated with device and its plating method Download PDF

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Publication number
CN107523789A
CN107523789A CN201710842319.2A CN201710842319A CN107523789A CN 107523789 A CN107523789 A CN 107523789A CN 201710842319 A CN201710842319 A CN 201710842319A CN 107523789 A CN107523789 A CN 107523789A
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CN
China
Prior art keywords
baffle plate
plate tool
coated
gradual change
coating materials
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Granted
Application number
CN201710842319.2A
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Chinese (zh)
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CN107523789B (en
Inventor
张卫良
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Jiangmen Color Optical Co Ltd
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Jiangmen Color Optical Co Ltd
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Priority to CN201710842319.2A priority Critical patent/CN107523789B/en
Priority to PCT/CN2017/119986 priority patent/WO2019052090A1/en
Publication of CN107523789A publication Critical patent/CN107523789A/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

A kind of gradual change ash filter that the present invention uses is coated with device and its plating method, including coating materials vaporising device, plated film umbrella disk, baffle plate tool and baffle plate tool support, coating materials vaporising device can make coating materials be evaporated by baffle plate tool and the surface of substrate is deposited in the form of gas phase, realize the process of evaporation coating, the zigzag formed due to one end of baffle plate tool for limited individual isosceles triangle, and then from blocking completely completely unobstructed linear transitions, so as to cause the thickness of film layer on substrate to show from a lateral opposite side trend of linear decrease, filter can not only be made to possess fade effect, but also the linearity of filter can be improved.

Description

A kind of gradual change ash filter is coated with device and its plating method
Technical field
The present invention relates to optical filter field, particularly a kind of gradual change ash filter is coated with device and its plating method.
Background technology
Gradual change ash filter is one kind of conventional physics filter, also referred to as GND filters, the upper half of the gradual change ash filter eyeglass Part is grey black, and the latter half is Transparent color, is mainly used in balancing light ratio, the dark portion in picture is rationally exposed with high light portion Light, suitable for big light than environment, such as shooting the scene at sunrise and dusk.In gradual change ash filter structure include substrate and Film layer, contain black material in film layer, in order to reach fade effect, the thickness of film layer must be showed from a lateral opposite side by The trend gradually successively decreased, therefore the side color of gradual change ash filter is grey black, it is gradually thin out to opposite side, so that opposite side becomes For Transparent color.In order that filter has fade effect, it is necessary to use the device for being coated with gradual change ash filter, gradual change ash filter is coated with dress The baffle plate for being used for blocking coating materials is included in putting, is difficult to the gradual change linear effects of the filter to being coated with according to the baffle plate of ordinary construction Produce larger benefit.
The content of the invention
To solve the above problems, it is an object of the invention to provide a kind of gradual change ash filter to be coated with device and its side of being coated with Method, the thicknesses of layers in filter can be made to show good linear change, make filter that there is more preferable fade effect.
Technical scheme is used by the present invention solves its problem:
A kind of gradual change ash filter is coated with device, it is characterised in that:Plated film including coating materials vaporising device, for fixing substrate Umbrella disk, the baffle plate tool for linearly blocking coating materials and the baffle plate tool support for connecting plated film umbrella disk and baffle plate tool, institute The top for stating baffle plate tool support is connected to plated film umbrella disk, and the baffle plate tool support is additionally coupled to baffle plate tool, the coating materials Vaporising device is located at the lower section of baffle plate tool.
Further, the coating umbrella panel surface offers the more than one installing port for being used to fix substrate, the peace Dress mouth is located at the top of baffle plate tool.
Further, the baffle plate tool rack surface offers the notch for adjusting plate washer tool height, the shelves Plate tool is connected to plate washer tool support by notch.
Further, the global shape of the baffle plate tool is rectangle, and one side of the baffle plate tool is fixed on baffle plate and controlled Has the notch position of support, the offside another side of the baffle plate tool is the zigzag of limited individual isosceles triangle composition.
Further, the ratio of the length of the baffle plate tool and width is 44:13.
Further, the height of the isosceles triangle and the ratio on base are 25:1.
A kind of plating method that device is coated with using above-mentioned gradual change ash filter, it is characterised in that comprise the following steps:
S1:Start;
S2:Gradual change ash filter is coated with into device to be placed in vacuum environment;
S3:The coating materials vaporising device is evaporated after handling coating materials in the form of gas phase;
S4:The plate washer tool can linearly be blocked to the coating materials being evaporated;
S5:The coating materials can in the form of gas phase linear deposit to the surface of substrate;
S6:Terminate.
The beneficial effects of the invention are as follows:A kind of gradual change ash filter that the present invention uses is coated with device and its plating method, bag Coating materials vaporising device, plated film umbrella disk, baffle plate tool and baffle plate tool support are included, coating materials can be made to be evaporated by baffle plate tool And the surface of substrate is deposited in the form of gas phase, the process of evaporation coating is realized, because baffle plate tool can be to the film of evaporation Material is linearly blocked, so that the thickness of film layer shows the trend of linear decrease from a lateral opposite side on substrate, not only Filter can be made to possess fade effect, but also the linearity of filter can be improved.
Brief description of the drawings
The invention will be further described with example below in conjunction with the accompanying drawings.
Fig. 1 is the basic block diagram for the gradual change ash filter that a kind of gradual change ash filter of the present invention is coated with device;
Fig. 2 be a kind of gradual change ash filter of the present invention be coated with device plated film umbrella disk, baffle plate tool and baffle plate tool support it Between position annexation figure;
Fig. 3 is plated film umbrella disk installing port, baffle plate tool and the baffle plate tool that a kind of gradual change ash filter of the present invention is coated with device Location diagram between support;
Fig. 4 is the concrete structure diagram for the baffle plate tool that a kind of gradual change ash filter of the present invention is coated with device;
Fig. 5 is the zigzag A positions enlarged drawing for the baffle plate tool that a kind of gradual change ash filter of the present invention is coated with device;
Fig. 6 is the specific steps flow chart for the plating method that a kind of gradual change ash filter of the present invention is coated with device.
Embodiment
Gradual change ash filter is one kind of conventional physics filter, also referred to as GND filters, is mainly used in balancing light ratio, makes picture In dark portion rationally exposed with high light portion, suitable for big light than environment, such as shooting the scene at sunrise and dusk.Gradually Include substrate 110 and film layer 120 in graying filter structure, contain black material in film layer 120, in order to reach fade effect, film The thickness of layer 120 must show the trend gradually successively decreased from a lateral opposite side, therefore the side color of gradual change ash filter is Grey black, it is gradually thin out to opposite side, so that opposite side is changed into Transparent color.
Reference picture 1, a kind of gradual change ash filter of the present invention are coated with the basic block diagram of the gradual change ash filter of device.Fig. 1 is single The situation that face is coated with, the film layer 120 is attached to the single side surface of substrate 110, and the thickness of film layer 120 is by a lateral opposite side Show the trend gradually successively decreased.When double coated, the film layer 120 is attached to the both side surface of substrate 110, and both sides The thickness of film layer 120 shows the trend gradually successively decreased by a lateral opposite side, and the thickness distribution of film layer 120 is with substrate 110 Centered on show symmetrical structure distribution.
A kind of gradual change ash filter is coated with device, including coating materials vaporising device, plated film umbrella disk 210, baffle plate tool 230 and baffle plate Tool support 220, the top of the baffle plate tool support 220 are connected to plated film umbrella disk 210, and the baffle plate tool support 220 is also Baffle plate tool 230 is connected to, the coating materials vaporising device is located at the lower section of baffle plate tool 230.Open on the surface of plated film umbrella disk 210 Provided with the more than one installing port 211 for being used to fix substrate 110, the installing port 211 is located at the top of baffle plate tool 230. The surface of baffle plate tool support 220 offers the notch 221 for adjusting plate washer tool height, and the plate washer tool passes through groove Mouth 221 is connected to plate washer tool support.
Reference picture 2 and Fig. 3, a kind of gradual change ash filter of the present invention are coated with the plated film umbrella disk of device, plated film umbrella disk installing port, gear Location diagram between plate tool and baffle plate tool support.The plated film umbrella disk 210 includes multiple installing ports 211, the peace Dress mouth 211 is used to place substrate 110.The lower section of each installing port 211 is corresponding with a baffle plate tool 230, each Individual baffle plate tool 230 is all corresponding with a baffle plate tool support 220 and is attached baffle plate tool 230 and plated film umbrella disk 210.Institute To state the surface of baffle plate tool support 220 and offer notch 221, the plate washer tool is connected to plate washer tool support by notch 221, The thickness of film layer 120 that can be coated with as needed is freely adjusted between plate washer tool and installing port 211 by notch 221 Vertical range.
The coating materials vaporising device is located at the lower section of plated film umbrella disk 210, baffle plate tool 230 and baffle plate tool support 220, institute State after coating materials vaporising device can be handled coating materials and be evaporated upwards in the form of gas phase, the coating materials of evaporation passes upward through Baffle plate tool 230 and the surface that substrate 110 is deposited in the form of gas phase, the process of evaporation coating is realized, due to baffle plate tool 230 can linearly be blocked to the coating materials of evaporation, so that the thickness of film layer 120 is in from a lateral opposite side on substrate 110 Reveal the trend of linear decrease, so that filter possesses fade effect, be successfully coated with gradual change ash filter.
When need be coated with the film layer 120 of multiple layers of different materials on the surface of substrate 110 when, by the coating materials vaporising device according to Different coating materials carry out processing evaporation corresponding to secondary selection.
When needing double coated, it is necessary to which the upper and lower surface of substrate 110 is exchanged, and it is reinstalled in plated film umbrella disk 210 The position of installing port 211 another surface of substrate 110 is coated with, then can realize double coated effect.
A kind of gradual change ash filter is coated with device, including coating materials vaporising device, plated film umbrella disk 210, baffle plate tool 230 and baffle plate Tool support 220, the global shape of the baffle plate tool 230 is rectangle, and one side of the baffle plate tool 230 is fixed on baffle plate and controlled Has the position of notch 221 of support 220, the offside another side of the baffle plate tool 230 is the saw of limited individual isosceles triangle composition Dentation, the length of the baffle plate tool 230 and the ratio of width are 44:13, the height and the ratio on base of the isosceles triangle For 25:1.
Reference picture 4 and Fig. 5, a kind of gradual change ash filter of the present invention are coated with the concrete structure diagram and sawtooth of the baffle plate tool of device Shape A positions enlarged drawing.The global shape of the baffle plate tool 230 is rectangle, wherein while being zigzag;The baffle plate tool 230 length is 220mm, and width (including zigzag position) is 65mm, and wherein the length at zigzag position is also 220mm, wide Spend for 15mm.The zigzag position is made up of limited individual isosceles triangle, equivalent to evaporate coating materials shielded area by It is tapered small, and then from blocking completely completely unobstructed linear transitions.Because zigzag is by limited individual isosceles triangle Composition, and the number of isosceles triangle is more, the unobstructed space between adjacent isosceles triangle will be smaller, linear transitions Effect can be better, can be more preferable so as to the gradual change ash effect of filter.
Reference picture 6, a kind of gradual change ash filter of the present invention are coated with the specific steps flow chart of the plating method of device:
S1:Start;
S2:Gradual change ash filter is coated with into device to be placed in vacuum environment;The present invention uses vacuum coating technology, described true Empty plated film is a kind of technology that thin-film material is produced by physical method, and the atom of material isolates from heating source in vacuum environment To get on the surface of plated object.
S3:The coating materials vaporising device is evaporated after handling coating materials in the form of gas phase;The present invention is using steaming Plated film mode is sent out, the evaporation coating is that certain material makes it be deposited on the surface of solid by heating evaporation.The coating materials steams The evaporation mode of transmitting apparatus includes resistance heating manner, high-frequency induction mode and electron beam mode of heating.The coating materials evaporation dress Putting can select corresponding evaporation mode be evaporated processing to coating materials according to different material, make coating materials in the form of gas phase to On be evaporated.
S4:The plate washer tool can linearly be blocked to the coating materials being evaporated;The overall shape of the baffle plate tool 230 Shape is rectangle, wherein while being zigzag;The zigzag position is made up of limited individual isosceles triangle, equivalent to evaporation The shielded area of coating materials is gradually reduced, and then from blocking completely completely unobstructed linear transitions.
S5:The coating materials can in the form of gas phase linear deposit to the surface of substrate;The coating materials being evaporated passes through Baffle plate tool 230 and the surface that substrate 110 is deposited in the form of gas phase, the process of evaporation coating is realized, due to baffle plate tool 230 can linearly be blocked to the coating materials of evaporation, so that the thickness of film layer 120 is in from a lateral opposite side on substrate 110 Reveal the trend of linear decrease, filter can not only be made to possess fade effect, but also the linearity of filter can be improved.
S6:Terminate.
It is described above, simply presently preferred embodiments of the present invention, the invention is not limited in above-mentioned embodiment, as long as It reaches the technique effect of the present invention with identical means, should all belong to protection scope of the present invention.

Claims (7)

1. a kind of gradual change ash filter is coated with device, it is characterised in that:Coating umbrella including coating materials vaporising device, for fixing substrate Disk (210), the baffle plate tool (230) for linearly blocking coating materials and the baffle plate tool for connecting plated film umbrella disk and baffle plate tool Support (220), the top of the baffle plate tool support (220) are connected to plated film umbrella disk (210), the baffle plate tool support (220) baffle plate tool (230) is additionally coupled to, the coating materials vaporising device is located at the lower section of baffle plate tool (230).
2. a kind of gradual change ash filter according to claim 1 is coated with device, it is characterised in that:
Plated film umbrella disk (210) surface offers the more than one installing port (211) for being used to fix substrate, the installing port (211) it is located at the top of baffle plate tool (230).
3. a kind of gradual change ash filter according to claim 1 is coated with device, it is characterised in that:
Baffle plate tool support (220) surface offers the notch (221) for adjusting plate washer tool height, and the plate washer is controlled Tool (230) is connected to plate washer tool support (220) by notch (221).
4. a kind of gradual change ash filter according to claim 3 is coated with device, it is characterised in that:
The global shape of the baffle plate tool (230) is rectangle, and one side of the baffle plate tool (230) is fixed on baffle plate tool branch The notch position of frame (220), the offside another side of the baffle plate tool (230) are the sawtooth of limited individual isosceles triangle composition Shape.
5. a kind of gradual change ash filter according to claim 4 is coated with device, it is characterised in that:
The length of the baffle plate tool (230) and the ratio of width are 44:13.
6. a kind of gradual change ash filter according to claim 4 is coated with device, it is characterised in that:
The height of the isosceles triangle is 25 with the ratio on base:1.
A kind of 7. plating method that device is coated with using any gradual change ash filters of claim 1-6, it is characterised in that including Following steps:
S1:Start;
S2:Gradual change ash filter is coated with into device to be placed in vacuum environment;
S3:The coating materials vaporising device is evaporated after handling coating materials in the form of gas phase;
S4:The plate washer tool can linearly be blocked to the coating materials being evaporated;
S5:The coating materials can in the form of gas phase linear deposit to the surface of substrate;
S6:Terminate.
CN201710842319.2A 2017-09-18 2017-09-18 A kind of gradual change ash filter is coated with device and its plating method Active CN107523789B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201710842319.2A CN107523789B (en) 2017-09-18 2017-09-18 A kind of gradual change ash filter is coated with device and its plating method
PCT/CN2017/119986 WO2019052090A1 (en) 2017-09-18 2017-12-29 Reinforced toughened filter, graduated neutral-density filter plating device and plating method therefor

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Application Number Priority Date Filing Date Title
CN201710842319.2A CN107523789B (en) 2017-09-18 2017-09-18 A kind of gradual change ash filter is coated with device and its plating method

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CN107523789B CN107523789B (en) 2019-04-19

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108396291A (en) * 2018-04-09 2018-08-14 东莞市瑞得光电科技有限公司 It is a kind of to realize gradient color electro plating device and its film plating process using electron beam evaporation deposition machine
CN110221372A (en) * 2019-06-24 2019-09-10 惠州信诺精密光学有限公司 Two-in-one gradual change mirror and preparation method thereof
CN114000119A (en) * 2021-10-31 2022-02-01 东莞市齐品光学有限公司 Left-right gradient coating device and coating process
CN115079440A (en) * 2022-06-15 2022-09-20 明月镜片股份有限公司 Progressive color-changing film lens and manufacturing process thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0982604A2 (en) * 1998-08-26 2000-03-01 Nippon Telegraph and Telephone Corporation Method for manufacturing optical filter
CN1924623A (en) * 2005-08-30 2007-03-07 佳能电子株式会社 ND filter, and IRIS device and optical apparatus having the same
CN101994095A (en) * 2009-08-14 2011-03-30 鸿富锦精密工业(深圳)有限公司 Coated umbrella stand
CN104049291A (en) * 2014-06-23 2014-09-17 孙义昌 Neutral grey level ND filter of multiple film layers and manufacturing method thereof
CN207313688U (en) * 2017-09-18 2018-05-04 江门市卡色光学有限公司 A kind of gradual change ash filter is coated with device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0982604A2 (en) * 1998-08-26 2000-03-01 Nippon Telegraph and Telephone Corporation Method for manufacturing optical filter
CN1924623A (en) * 2005-08-30 2007-03-07 佳能电子株式会社 ND filter, and IRIS device and optical apparatus having the same
CN101994095A (en) * 2009-08-14 2011-03-30 鸿富锦精密工业(深圳)有限公司 Coated umbrella stand
CN104049291A (en) * 2014-06-23 2014-09-17 孙义昌 Neutral grey level ND filter of multiple film layers and manufacturing method thereof
CN106168692A (en) * 2014-06-23 2016-11-30 孙义昌 The neutral gray scale dim light filter of a kind of stratified film and manufacture method thereof
CN207313688U (en) * 2017-09-18 2018-05-04 江门市卡色光学有限公司 A kind of gradual change ash filter is coated with device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108396291A (en) * 2018-04-09 2018-08-14 东莞市瑞得光电科技有限公司 It is a kind of to realize gradient color electro plating device and its film plating process using electron beam evaporation deposition machine
CN110221372A (en) * 2019-06-24 2019-09-10 惠州信诺精密光学有限公司 Two-in-one gradual change mirror and preparation method thereof
CN114000119A (en) * 2021-10-31 2022-02-01 东莞市齐品光学有限公司 Left-right gradient coating device and coating process
CN114000119B (en) * 2021-10-31 2023-08-25 东莞市齐品光学有限公司 Coating device and coating process capable of gradually changing color left and right
CN115079440A (en) * 2022-06-15 2022-09-20 明月镜片股份有限公司 Progressive color-changing film lens and manufacturing process thereof
CN115079440B (en) * 2022-06-15 2024-01-16 明月镜片股份有限公司 Progressive color-changing film lens and manufacturing process thereof

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