CN107493109A - The cantilever beam microwave receiver front end that internet of things oriented carrier energy is collected - Google Patents
The cantilever beam microwave receiver front end that internet of things oriented carrier energy is collected Download PDFInfo
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- CN107493109A CN107493109A CN201710698242.6A CN201710698242A CN107493109A CN 107493109 A CN107493109 A CN 107493109A CN 201710698242 A CN201710698242 A CN 201710698242A CN 107493109 A CN107493109 A CN 107493109A
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/06—Receivers
- H04B1/16—Circuits
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/06—Receivers
- H04B1/16—Circuits
- H04B1/1607—Supply circuits
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/06—Receivers
- H04B1/16—Circuits
- H04B1/22—Circuits for receivers in which no local oscillation is generated
Abstract
The invention discloses the cantilever beam microwave receiver front end that a kind of internet of things oriented carrier energy is collected, including the output of microwave antenna, microwave filter, low-noise amplifier, online cantilever beam demodulator, demodulated signal, AC/DC modular converters, rechargeable battery and dc source.Pass through the demodulation function and LPF function of online cantilever beam demodulator, only need to measure the electric capacity on the first capacitor plate and the second capacitor plate, the demodulation of am signals can be achieved, mixing structure, local oscillator and the intermediate-frequency filter in traditional microwave receiver front end need not be used, so as to simplify system architecture, system power dissipation is reduced.Carrier energy can be collected simultaneously, the carrier wave of am signals is converted to DC voltage by AC/DC modular converters, is finally stored in rechargeable battery, after rechargeable battery is in parallel with dc source, realizes the self-powered of low-noise amplifier.
Description
Technical field
The present invention proposes the cantilever beam microwave receiver front end that a kind of internet of things oriented carrier energy is collected, and belongs to micro- electricity
The technical field of sub- mechanical system (MEMS).
Background technology
The application of Internet of Things more and more permeate we life each corner, urban transportation, household, finance and
The fields such as production, which are progressively expanded, comes.The target of Internet of Things is to realize thing and thing, and thing is connected with people, and realizes this connected needs
Microwave transceiver, however, current microwave receiver front end has the characteristics of complicated and power consumption is higher, than if desired for two level
Mixing can just obtain the low frequency signal that late-class circuit can handle, it is necessary to wave filter realizes filtering, and compared with useful signal
The carrier energy for relatively accounting for exhausted large scale is all wasted.Exactly because in this way, before the microwave receiver of a kind of low-power consumption and simplification
Hold the development for Internet of Things particularly significant.With the development of MEMS technology, MEMS demodulator techniques are on microwave receiver
Using increasingly being paid attention to and there is development potentiality.
The content of the invention
In order to overcome the deficiencies in the prior art, the present invention provides a kind of the outstanding of internet of things oriented carrier energy collection
Arm beam microwave receiver front end, using online cantilever beam demodulator, not only realize online microwave amplitude modulation signal demodulation
Function, while the energy for the carrier signal that exhausted large scale is accounted for compared with useful signal is collected, and be stored among rechargeable battery.
Rechargeable battery is connected with after dc source parallel connection with low-noise amplifier, realizes the self-powered of low-noise amplifier.
To achieve the above object, the technical solution adopted by the present invention is：
The cantilever beam microwave receiver front end that a kind of internet of things oriented carrier energy is collected, including the filter of microwave antenna, microwave
Ripple device, low-noise amplifier, online cantilever beam demodulator, demodulated signal output end, AC/DC modular converters, rechargeable battery and
Dc source；The output end of the microwave antenna is connected to the input of microwave filter, the output end of the microwave filter
It is connected with the input of low-noise amplifier, the output end of the low-noise amplifier and the signal of online cantilever beam demodulator
Input coplanar waveguide transmission line is connected, the signal output part coplanar waveguide transmission line connection of the online cantilever beam demodulator
The input of AC/DC modular converters, the output termination rechargeable battery of the AC/DC modular converters, the rechargeable battery and direct current
Powered after power sources in parallel for low-noise amplifier；The the first metal Pad and the second metal Pad of online cantilever beam demodulator with
Demodulated signal output end is connected.
Further：By setting online cantilever beam demodulator, entered by the microwave signal of low-noise amplifier amplification
Online cantilever beam demodulator, the low-frequency modulation signal inputted in microwave signal pass through the online cantilever beam demodulator the
One metal pad and the second metal pad obtain demodulated signal, and demodulated signal is exported by demodulated signal output end；And input microwave
The carrier signal of signal medium-high frequency part exports from the signal output part coplanar waveguide transmission line of online cantilever beam demodulator, and
AC/DC modular converters are connected to, carrier signal is converted to DC voltage by AC/DC modular converters, and by energy savings in charging electricity
Among pond, rechargeable battery is in parallel with dc source, realizes the self-powered of low-noise amplifier, and improve dc source utilizes effect
Rate.
Yet further：The online cantilever beam demodulator is used to utilize its demodulation function and LPF function, only
Need to measure the capacitance variations on the first capacitor plate and the second capacitor plate, you can realize the demodulation of am signals, no
Frequency mixer, local oscillator and the wave filter in legacy demodulator are needed, enormously simplify system architecture；The online cantilever
Beam demodulator device include cantilever beam one, cantilever beam two, microwave signal line, the first anchor area, the second anchor area, substrate, the first capacitor plate,
Second capacitor plate, first medium layer, second dielectric layer and the 3rd dielectric layer；The substrate top surface is provided with ground wire one and ground
Line two, and the ground wire one and ground wire two are located at the upper surface both ends of substrate, the second dielectric layer, first medium layer and the 3rd
Dielectric layer is from left to right set in turn on the substrate surface between ground wire one and ground wire two；First capacitor plate is situated between positioned at second
In matter layer, and the bottom of first capacitor plate is in contact with the substrate surface；Microwave signal line is located at first medium layer
It is interior, and the bottom of the microwave signal line is in contact with the substrate surface；Second capacitor plate is located in the 3rd dielectric layer, and
The bottom of second capacitor plate is in contact with the substrate surface；The first anchor area is provided with the ground wire one, describedly
The second anchor area is provided with line two, one end of the cantilever beam one is fixed in the first anchor area, and the other end is hanging, and described outstanding
Arm beam one is located at the top of first medium layer and second dielectric layer；One end of the cantilever beam two is fixed in the second anchor area, and
The other end is hanging, and the cantilever beam two is located at the top of first medium layer and the 3rd dielectric layer；Second metal pad one end leads to
Cross metal wire two and connect the first capacitor plate, the other end of the second metal pad connects the second capacitance pole by metal wire one
Plate, the metal wire one are embedded in below ground wire two, are arranged on substrate, and are not contacted with the surface of ground wire two, the metal wire
Two are embedded in below ground wire one, are arranged on substrate, and are not contacted with the surface of ground wire one.
Preferably：The first medium layer, second dielectric layer, the 3rd dielectric layer are insulating silicon nitride dielectric layer.
Preferably：The substrate is silicon substrate.
Beneficial effect：
The cantilever beam microwave receiver front end that the internet of things oriented carrier energy of the present invention is collected is online demodulation, is only needed
Measure the capacitance size on the metal Pad12 and metal Pad13 of online cantilever beam demodulator 3, you can realize microwave signal
Demodulation, it is not necessary to be mixed structure, local oscillator and intermediate-frequency filter, greatly simplified the knot of traditional microwave receiver
Structure, reduce system power dissipation.
The cantilever beam microwave receiver front end that the internet of things oriented carrier energy of the present invention is collected has carrier energy collection
Function.Due to equivalent to one low pass filter of online cantilever beam demodulator, so the low frequency modulations letter in input signal
Number demodulated signal output end can be output to by metal pad, and the carrier signal of HFS can be defeated from signal output part CPW8
Go out, and be connected to AC/DC modular converters, realize that carrier signal is converted to DC voltage, and by energy savings among rechargeable battery.
Rechargeable battery is in parallel with dc source, realizes the self-powered of low-noise amplifier.
Brief description of the drawings
Fig. 1 is the structured flowchart for the cantilever beam microwave receiver front end that internet of things oriented carrier energy is collected；
Fig. 2 is the AA' profiles of online cantilever beam demodulator 3；
Fig. 3 is the BB' profiles of online cantilever beam demodulator 3.
Figure includes：Microwave antenna 1, microwave filter 2, online cantilever beam demodulator 3, demodulated signal output end 4,
AC/DC modular converters 5, rechargeable battery 6, signal input part coplanar waveguide transmission line 7, signal output part coplanar waveguide transmission line 8,
Cantilever beam 9, the 9-1 of cantilever beam one, the 9-2 of cantilever beam two, the 10-1 of ground wire one, the 10-2 of ground wire two, microwave signal line 11, the first metal
Pad12, the second metal Pad13, the first anchor area 14, the second anchor area 15, substrate 16, the first capacitor plate 17, the second capacitor plate
18th, second dielectric layer 19, the 3rd dielectric layer 20, first medium layer 21, low-noise amplifier 22, dc source 23, metal wire one
24th, metal wire 2 25.
Embodiment
Below in conjunction with the accompanying drawings and specific embodiment, the present invention is furture elucidated, it should be understood that these examples are merely to illustrate this
Invention rather than limitation the scope of the present invention, after the present invention has been read, those skilled in the art are various to the present invention's
The modification of the equivalent form of value falls within the application appended claims limited range.
As shown in figure 1, the cantilever beam microwave receiver front end that a kind of internet of things oriented carrier energy is collected, by being arranged on
Wire type cantilever beam demodulator 3, the microwave signal amplified by low-noise amplifier 22 enter online cantilever beam demodulator 3, input
Low-frequency modulation signal in microwave signal is the first metal pole by the first metal pad of the online cantilever beam demodulator 3
The metal pad of plate 12 and second is that the second metal polar plate 13 obtains demodulated signal, and demodulated signal is defeated by demodulated signal output end 4
Go out；And the carrier signal of microwave signal medium-high frequency part is inputted from the coplanar ripple of signal output part of online cantilever beam demodulator 3
To lead transmission line 8 to export, and be connected to AC/DC modular converters 5, carrier signal is converted to DC voltage by AC/DC modular converters 5, and
By energy savings among rechargeable battery 6, rechargeable battery 6 is in parallel with dc source 23, realizes the confession of low-noise amplifier 22
Electricity, improve the utilization ratio of dc source.
The cantilever beam microwave receiver front end that a kind of internet of things oriented carrier energy is collected, including the filter of microwave antenna 1, microwave
Ripple device 2, low-noise amplifier 22, online cantilever beam demodulator 3, demodulated signal output 4, AC/DC modular converters 5, charging electricity
Pond 6 and dc source 23；The microwave antenna 1 is used to receive microwave signal；The microwave filter 2 is used to filter out microwave antenna
Clutter in 1 signal received；The low-noise amplifier 22 is used for the microwave signal for amplifying the output of microwave filter 2, and
Access online cantilever beam demodulator 3；The online cantilever beam demodulator 3 is used to utilize its demodulation function and LPF work(
Input range modulated signal can be demodulated, it is only necessary to measure the electricity on the first capacitor plate 17 and the second capacitor plate 18
Hold change, you can realize the demodulation of am signals, it is not necessary to frequency mixer, local oscillator and filtering in legacy demodulator
Device, system architecture is enormously simplify, reduce system power dissipation, it is only necessary to which consuming few energy just can realize the work(of reception signal
Energy；The demodulated signal output 4 is used to export demodulated signal；The AC/DC modular converters 5 are that the unit of dual-port integrates mould
Block, the carrier signal for signal output part coplanar waveguide transmission line 8 to be exported are converted into DC voltage；The rechargeable battery is used
DC energy after storage AC/DC modular converters 5 are changed, and it is in parallel with dc source 23 after supply for low-noise amplifier 22
Electricity.
The output end of the microwave antenna 1 is connected to the input of microwave filter 2, the output of the microwave filter 2
End is connected with the input of low-noise amplifier 22, the output end of the low-noise amplifier 22 and online cantilever beam demodulator
3 signal input part coplanar waveguide transmission line 7 is connected, the signal output part co-planar waveguide of the online cantilever beam demodulator 3
Transmission line 8 connects the input of AC/DC modular converters 5, and the output termination rechargeable battery 6 of the AC/DC modular converters 5 is described
Powered after rechargeable battery 6 is in parallel with dc source 23 for low-noise amplifier 22；First metal of online cantilever beam demodulator 3
Pad12 and the second metal Pad13 are connected with demodulated signal output end 4.
Fig. 2 and Fig. 3 is the AA' profiles and BB' profiles of online cantilever beam demodulator 3, as shown in Figure 1, Figure 2, Fig. 3 institutes
Show, the online cantilever beam demodulator 3 includes the 9-1 of cantilever beam one, the 9-2 of cantilever beam two, microwave signal line 11, the first anchor area
14th, the second anchor area 15, substrate 16, the first capacitor plate 17, the second capacitor plate 18, first medium floor 21, second dielectric layer 19
With the 3rd dielectric layer 20；The upper surface of substrate 16 is provided with the 10-1 of ground wire one and the 10-2 of ground wire two, and the 10-1 of the ground wire one
It is located at the upper surface both ends of substrate 16, the second dielectric layer 19, the dielectric layer of first medium layer 21 and the 3rd with the 10-2 of ground wire two
20 are from left to right set in turn on the surface of substrate 16 between the 10-1 of ground wire one and the 10-2 of ground wire two；First capacitor plate 17
In in second dielectric layer 19, and the bottom of first capacitor plate 17 is in contact with the surface of substrate 16；Microwave signal line
11 in first medium layer 21, and the bottom of the microwave signal line 11 is in contact with the surface of substrate 16；Second electric capacity
Pole plate 18 is located in the 3rd dielectric layer 20, and the bottom of second capacitor plate 18 is in contact with the surface of substrate 16；Institute
State and the first anchor area 14 is provided with the 10-1 of ground wire one, the second anchor area 15, the cantilever beam one are provided with the 10-2 of ground wire two
9-1 one end is fixed in the first anchor area 14, and the other end is hanging, and the 9-1 of the cantilever beam one is located at the He of first medium layer 21
The top of second dielectric layer 19；One end of the 9-2 of cantilever beam two is fixed in the second anchor area 14, and the other end is hanging, and institute
State the top that the 9-2 of cantilever beam two is located at the dielectric layer 20 of first medium layer 21 and the 3rd；Second metal pad12 one end passes through metal
Line 2 25 connects the first capacitor plate 17, and the other end of the second metal pad12 connects the second electric capacity by metal wire 1
Pole plate 18, the metal wire 1 are embedded in below the 10-2 of ground wire two, are arranged over substrate 16, and with the 10-2 surfaces of ground wire two not
Contact, the metal wire 2 25 are embedded in below the 10-1 of ground wire one, and arrangement over substrate 16, and does not connect with the 10-1 surfaces of ground wire one
Touch.The first medium layer 21, second dielectric layer 19, the 3rd dielectric layer 20 are insulating silicon nitride dielectric layer, the substrate 16
For silicon substrate.
Due to equivalent to one low pass filter of online cantilever beam demodulator 3, input and low frequency is included in microwave signal
Modulated signal fs and high frequency carrier signal fc, wherein low-frequency modulation signal fs are after the low pass filter, from the first metal
Pad12 and the second metal Pad13 are output to demodulated signal output end 4, and the carrier signal fc of HFS can be from signal output
End coplanar waveguide transmission line 8 exports.The carrier signal that coplanar waveguide transmission line 8 exports is converted into direct current by AC/DC modular converters 5
Voltage.
The signal input part coplanar waveguide transmission line 7 of signal from online cantilever beam demodulator 3 inputs；What it is when input is one
When individual power is P microwave signal, microwave signal can produce electrostatic force to cantilever beam 9 so that and cantilever beam 9 is subjected to displacement,
First capacitor plate 17 is connected with the second capacitor plate 18 by the second metal pad13, as a pole plate, so that cantilever beam
Electric capacity between 9 and lower section pole plate changes；The size of electrostatic force is related to microwave signal power, passes through measuring pad and cantilever
Electric capacity C between beam 9bThe power P size of microwave signal can be extrapolated；Electric capacity CbRelation with signal power P is：
Wherein A1It is the area of microwave signal line 11 and the overlapping part of cantilever beam 9, A2It is the first capacitor plate 17 and cantilever beam
9th, the second capacitor plate 18 and the gross area of the overlapping part of cantilever beam 9, g0It is the thickness of air layer between pole plate and cantilever beam 9, g1
It is the thickness of dielectric layer on pole plate, εrIt is the relative dielectric constant of dielectric layer, k1It is the coefficient of elasticity of cantilever beam 9, Z0It is coplanar ripple
Lead transmission line CPW characteristic impedance.
As can be seen that electric capacity C from formulabSize and the power P of input microwave signal be that a fixed function closes
System.The signal of two frequencies of fc and fs is included when input signal is an am signals, namely in input signal, now
The power P of input signal can change with low-frequency modulation signal fs, because the vibration frequency of mechanical system is far smaller than amplitude
The carrier frequency fc of modulated signal, so cantilever beam can only respond to the low-frequency modulation signal fs in am signals, without
Carrier signal fc can be responded.The result that cantilever beam responds for low-frequency modulation signal is reflected in the change of capacitance size, so
The size of measurement electric capacity is the signal that can be demodulated.
Described online cantilever beam demodulator 3 being capable of direct demodulated signal, it is not necessary to frequency mixer, local oscillator and filter
Ripple device；AC/DC modular converters 5 and rechargeable battery 6 can collect the energy of carrier signal, and improve dc source utilizes effect
Rate；The cantilever beam microwave receiver front end that the internet of things oriented carrier energy is collected is that one kind is based on online cantilever beam demodulator
3 microwave receiver front end, input range modulated signal is demodulated using online cantilever beam demodulator 3, and passes through survey
Amount capacitance variations can be completed to demodulate, and obtain modulated signal, greatly simplified the structure of traditional microwave receiver, reduce and be
System power consumption, it is only necessary to which consuming few energy just can realize the function of reception signal；Microwave signal is inputted from online cantilever beam
The output of signal output part coplanar waveguide transmission line 8 of demodulator 3 is followed by AC/DC modular converters 5, realizes carrier signal to direct current
The conversion of pressure, and by energy storage among rechargeable battery 6, rechargeable battery 6 is in parallel with dc source 23, realizes low noise amplification
The self-powered of device.
The preparation method for the cantilever beam microwave receiver front end that internet of things oriented carrier energy is collected specifically includes following step
Suddenly.
1) preparing substrate：Silicon is selected as substrate；
2) lithographic transfer line and capacitor plate：Resist coating and chemical wet etching go out microwave signal line 11, the 10-1 of ground wire one,
The 10-2 of line two, the first metal Pad12, the second metal Pad13, the shape of the first capacitor plate 17 and the second capacitor plate 18；
3) Au layers are sputtered：In entirely processing plane sputteringThick Au layers；
4) photoetching Au layers：Peel off unwanted photoresist, formed microwave signal line 11, the 10-1 of ground wire one, the 10-2 of ground wire two,
First metal Pad12, the second metal Pad13, the first capacitor plate 17 and the second capacitor plate 18；
5) photoetching, deposit SiN dielectric layers：Microwave signal line 11, the first capacitor plate 17 and the top of the second capacitor plate 18
Subregion is grown with plasma-reinforced chemical vapor deposition processSi dielectric layers and photoetching；
6) polyimide sacrificial layer is deposited：In entirely processing 1.6 microns of thick polyimide sacrificial layers of planar deposition；
7) Ti/Au/Ti layers are sputtered：The down payment Ti/Au/Ti layers for plating are sputtered on polyimide layer, thickness is
500/1500/Form the down payment Seed Layer for electroplating cantilever beam.
8) photoetching Ti/Au/Ti layers：Photoetching titanium/gold/titanium (Ti/Au/Ti) layer, retain the local photoetching that need not be electroplated
Glue；
9) Au layers are electroplated：The layer gold of cantilever beam is electroplated, gold is electroplated in 55 ° of cyano group solution, the thickness for electroplating layer gold is micro- for 2
Rice；
10) discharge polyimide sacrificial layer and corrode down payment Ti/Au/Ti layers：Acetone removes the photoresist of remaining, then with aobvious
Polyimide sacrificial layer under shadow liquid dissolving cantilever beam, and be dehydrated with absolute ethyl alcohol, form hanging cantilever beam structure.
Difference with the prior art of the present invention：
The cantilever beam microwave receiver front end that the internet of things oriented carrier energy of the present invention is collected is a kind of based on online
The microwave receiver front end of cantilever beam demodulator, input range modulated signal is solved using online cantilever beam demodulator
Adjust, and can complete to demodulate by measuring capacitance variations, obtain modulated signal.Therefore structure, local oscillator need not be mixed
And intermediate-frequency filter, the structure of traditional microwave receiver is greatly simplified, reduces system power dissipation, it is only necessary to is consumed few
Energy just can realize the function of reception signal.
Described receiver front end has the function that carrier energy is collected.Microwave signal is inputted from online cantilever beam demodulator
The output end output of device is followed by AC/DC modular converters, realizes conversion of the carrier signal to DC voltage, and by energy storage in filling
Among battery.Rechargeable battery is in parallel with dc source, realizes the self-powered of low-noise amplifier.
Meet that the structure of conditions above can be considered the cantilever beam microwave that the internet of things oriented carrier energy of the present invention is collected
Receiver front end.
Described above is only the preferred embodiment of the present invention, it should be pointed out that：For the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (5)
- A kind of 1. cantilever beam microwave receiver front end that internet of things oriented carrier energy is collected, it is characterised in that：Including microwave day Line (1), microwave filter (2), low-noise amplifier (22), online cantilever beam demodulator (3), demodulated signal output end (4), AC/DC modular converters (5), rechargeable battery (6) and dc source (23)；The output end of the microwave antenna (1) is connected to microwave The input of wave filter (2), the output end of the microwave filter (2) are connected with the input of low-noise amplifier (22), institute State the output end of low-noise amplifier (22) and the signal input part coplanar waveguide transmission line of online cantilever beam demodulator (3) (7) it is connected, signal output part coplanar waveguide transmission line (8) the connection AC/DC moduluss of conversion of the online cantilever beam demodulator (3) The input of block (5), the output termination rechargeable battery (6) of the AC/DC modular converters (5), the rechargeable battery (6) and direct current Powered after power supply (23) is in parallel for low-noise amplifier (22)；First metal Pad (12) of online cantilever beam demodulator (3) and Second metal Pad (13) is connected with demodulated signal output end (4).
- 2. the cantilever beam microwave receiver front end that a kind of internet of things oriented carrier energy according to claim 1 is collected, its It is characterised by：By setting online cantilever beam demodulator (3), entered by the microwave signal of low-noise amplifier (22) amplification Wire type cantilever beam demodulator (3), the low-frequency modulation signal inputted in microwave signal pass through the online cantilever beam demodulator (3) The first metal pad (12) and the second metal pad (13) obtain demodulated signal, demodulated signal passes through demodulated signal output end (4) Output；And the carrier signal for inputting microwave signal medium-high frequency part is total to from the signal output part of online cantilever beam demodulator (3) Coplanar waveguide transmission line (8) exports, and is connected to AC/DC modular converters (5), and AC/DC modular converters (5) are converted to carrier signal directly Voltage is flowed, and by energy savings among rechargeable battery (6), rechargeable battery (6) is in parallel with dc source (23), realizes low noise The self-powered of amplifier (22), improve the utilization ratio of dc source.
- 3. the cantilever beam microwave receiver front end that a kind of internet of things oriented carrier energy according to claim 1 is collected, its It is characterised by：The online cantilever beam demodulator (3) is used to utilize its demodulation function and LPF function, it is only necessary to measures Capacitance variations on first capacitor plate (17) and the second capacitor plate (18), you can realize the demodulation of am signals, no Frequency mixer, local oscillator and the wave filter in legacy demodulator are needed, enormously simplify system architecture；The online cantilever Beam demodulator device (3) includes cantilever beam one (9-1), cantilever beam two (9-2), microwave signal line (11), the first anchor area (14), the second anchor Area (15), substrate (16), the first capacitor plate (17), the second capacitor plate (18), first medium floor (21), second dielectric layer And the 3rd dielectric layer (20) (19)；Substrate (16) upper surface is provided with ground wire one (10-1) and ground wire two (10-2), and institute State ground wire one (10-1) and ground wire two (10-2) is located at the upper surface both ends of substrate (16), the second dielectric layer (19), first Dielectric layer (21) and the 3rd dielectric layer (20) are from left to right set in turn between ground wire one (10-1) and ground wire two (10-2) On substrate (16) surface；First capacitor plate (17) is located in second dielectric layer (19), and first capacitor plate (17) Bottom is in contact with the substrate (16) surface；Microwave signal line (11) is located in first medium layer (21), and the microwave is believed The bottom of number line (11) is in contact with the substrate (16) surface；Second capacitor plate (18) is located in the 3rd dielectric layer (20), And the bottom of second capacitor plate (18) is in contact with the substrate (16) surface；It is provided with the ground wire one (10-1) First anchor area (14), the second anchor area (15) is provided with the ground wire two (10-2), one end of the cantilever beam one (9-1) is fixed In the first anchor area (14), and the other end is hanging, and the cantilever beam one (9-1) is located at first medium layer (21) and second medium The top of layer (19)；One end of the cantilever beam two (9-2) is fixed in the second anchor area (14), and the other end is hanging, and described Cantilever beam two (9-2) is located at the top of first medium layer (21) and the 3rd dielectric layer (20)；Second metal pad (12) one end leads to Cross metal wire two (25) and connect the first capacitor plate (17), the other end of the second metal pad (12) passes through metal wire one (24) the second capacitor plate (18) is connected, the metal wire one (24) is embedded in below ground wire two (10-2), is arranged in substrate (16) on, and do not contacted with ground wire two (10-2) surface, the metal wire two (25) is embedded in below ground wire one (10-1), arrangement Do not contacted on substrate (16), and with ground wire one (10-1) surface.
- 4. the cantilever beam microwave receiver front end that a kind of internet of things oriented carrier energy according to claim 3 is collected, its It is characterised by：The first medium layer (21), second dielectric layer (19), the 3rd dielectric layer (20) are insulating silicon nitride medium Layer.
- 5. the cantilever beam microwave receiver front end that a kind of internet of things oriented carrier energy according to claim 3 is collected, its It is characterised by：The substrate (16) is silicon substrate.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2524433Y (en) * | 2002-02-06 | 2002-12-04 | 信息产业部电子第五十四研究所 | Multichannel radio signal transponder |
| CN101752676A (en) * | 2008-12-05 | 2010-06-23 | 沈阳铁路信号工厂 | Transponder duplex multifrequency community antenna |
| CN103281078A (en) * | 2013-06-19 | 2013-09-04 | 东南大学 | Frequency divider and preparation method based on micromechanics clamped beam capacitive power sensor |
| CN104254958A (en) * | 2012-02-09 | 2014-12-31 | 胡玛沃克斯公司 | Energy harvesting system |
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| CN2524433Y (en) * | 2002-02-06 | 2002-12-04 | 信息产业部电子第五十四研究所 | Multichannel radio signal transponder |
| CN101752676A (en) * | 2008-12-05 | 2010-06-23 | 沈阳铁路信号工厂 | Transponder duplex multifrequency community antenna |
| CN104254958A (en) * | 2012-02-09 | 2014-12-31 | 胡玛沃克斯公司 | Energy harvesting system |
| CN103281078A (en) * | 2013-06-19 | 2013-09-04 | 东南大学 | Frequency divider and preparation method based on micromechanics clamped beam capacitive power sensor |
| CN104771140A (en) * | 2015-03-13 | 2015-07-15 | 江苏物联网研究发展中心 | RFID-based self-powered intelligent sensor |
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Application publication date: 20171219 |