CN107475680A - A kind of substrate bearing device and evaporated device - Google Patents
A kind of substrate bearing device and evaporated device Download PDFInfo
- Publication number
- CN107475680A CN107475680A CN201710757002.9A CN201710757002A CN107475680A CN 107475680 A CN107475680 A CN 107475680A CN 201710757002 A CN201710757002 A CN 201710757002A CN 107475680 A CN107475680 A CN 107475680A
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- Prior art keywords
- substrate
- carrier strip
- bearing device
- pin
- chassis
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The invention discloses a kind of substrate bearing device and evaporated device, is related to display device manufacturing technology field, to solve the problems, such as that existing substrate bearing device changes the longer invention of adhesive member used time.The substrate bearing device, including substrate and carrier strip, the carrier strip is detachably connected with the substrate, the loading end of the carrier strip is provided with adhesive member, in the case where the carrier strip and the substrate are in connection status, the loading end for all carrier strips being connected with the substrate forms flat surfaces.The present invention can be used for the carrying and transmission of the substrates such as OLED.
Description
Technical field
The present invention relates to display device manufacturing technology field, more particularly to a kind of substrate bearing device and evaporated device.
Background technology
In the manufacturing process of display device, substrate bearing device is typically necessary to transmit substrate, such as in OLED
During the whole evaporation of (Organic Light-Emitting Diode Organic Light Emitting Diodes) display device, substrate be with
Substrate bearing device is what carrier was transmitted in evaporated device, and whether the structure design of substrate bearing device is reasonable,
It is directly related to the production efficiency of whole evaporation process and mobility (the actual production quantity of a machinery equipment of evaporated device
With the ratio of possible production quantity).
A kind of existing substrate bearing device, as shown in figure 1, including substrate 01 (base), set on the upper surface of substrate 01
There are multiple adhesive members 02, the one side of adhesive member 02 is pasted onto in substrate 01, and another side can pass through intermolecular force and substrates into intimate
Fitting.Wherein, adhesive member 01 is adhesive pad, and the one side of adhesive pad is mutually Nian Jie with substrate 01, and another side (does not show with substrate in figure
Go out) fit, intermolecular force when being bonded by adhesive pad with substrate, so that both tightly stick together, ensure base
Plate does not separate with substrate 01.
However, adhesive member 02 on substrate bearing device is with the life-span, it is necessary to regular change, no person can influence pair
The coating performance of substrate, especially when because of certain reason fragmentation occurs for the substrate that adhesive member 02 is bonded, glass caused by substrate
Glass bits can fall on the binding face of adhesive member 02 and substrate, now just need to change adhesive member 02.Existing this base plate carrying
Device when changing adhesive member 02, it is necessary to substrate 01 is taken out from evaporated device, then by adhesive member 02 from the upper of substrate 01
Surface is torn one by one, the cull of wiped clean original bonding location, then attaches new adhesive member 02, the whole Renewal process time compared with
It is long, so as to be unfavorable for improving the mobility of production efficiency and equipment.
The content of the invention
Embodiments of the invention provide a kind of substrate bearing device and evaporated device, to solve existing base plate carrying dress
Put change the adhesive member used time it is longer the problem of.
To reach above-mentioned purpose, the embodiment provides a kind of substrate bearing device, including substrate and carrier strip,
The carrier strip is detachably connected with the substrate, and the loading end of the carrier strip is provided with adhesive member, the carrier strip with
The substrate is under connection status, and the loading end for all carrier strips being connected with the substrate forms flat surfaces.
Further, the number of the carrier strip is multiple, in the case where the carrier strip and the substrate are in connection status,
The loading end flush of multiple carrier strips.
Further, the carrier strip includes the first carrier strip and the second carrier strip, the number of first carrier strip
To be multiple, multiple first carrier strips surround a bearing area, and second carrier strip is arranged in the bearing area.
Further, the carrier strip is detachably connected by threaded fastener and the substrate.
Further, the carrier strip is provided with defining flange, and stopper slot, the defining flange are offered in the substrate
With stopper slot phase clamping.
Further, the substrate is the rectangular frame structure with hollow out opening.
Further, in addition to fixture, the fixture are detachably connected with the substrate, in the fixture and institute
State substrate to be under connection status, the fixture is located at side of the flat surfaces away from the bonding piece, the fixation
Magnetic absorption part is fixed with the first surface of part, the first surface is parallel with the flat surfaces.
Further, the fixture includes chassis and fixed strip, and the chassis is detachably connected with the substrate, institute
State fixed strip to be detachably connected with the chassis, the magnetic absorption part is fixed on the fixed strip.
Further, the chassis is detachably connected by latch structure and the substrate, and the latch structure includes
The first pin-and-hole for being opened on the chassis, open up the second pin-and-hole and pin rod on the substrate, first pin-and-hole and institute
It is coaxial to state the second pin-and-hole, the pin rod is inserted in first pin-and-hole and second pin-and-hole, and with first pin-and-hole, described
Second pin-and-hole is interference fitted.
Further, along on the direction of the flat surfaces, the substrate away from the flat surfaces one
Open up fluted on side surface, the chassis is arranged in the groove, and first pin-and-hole is opened in the side wall of the chassis
On, second pin-and-hole is opened on the cell wall of the groove.
The substrate bearing device that embodiments of the invention provide, because carrier strip and substrate are detachably connected, carrier strip
Loading end is provided with adhesive member, so when needing to change adhesive member, only need to change the carrier strip to match with substrate,
Exactly original carrier strip is pulled down, then installs new carrier strip；Due to the loading end shape of each carrier strip being connected with substrate
Into flat surfaces, it can so ensure that adhesive member is fully bonded with substrate, so as to prevent substrate during evaporation with holding
Carrier strip is separated.Compared with prior art, the substrate bearing device provided in the embodiment of the present invention is by changing carrier strip come more
Change adhesive member, it is more succinct the step of this substitute mode, conveniently, eliminate adhesive member and tear off, paste etc. than relatively time-consuming step
Suddenly, so as to which can greatly shortens the replacing construction of adhesive member, and then the mobility of production efficiency and equipment can be improved.
On the other hand, the embodiment of the present invention additionally provides a kind of evaporated device, including described in any of the above-described embodiment
Substrate bearing device.
Due in the substrate bearing device included by evaporated device provided in an embodiment of the present invention and any of the above-described embodiment
Described substrate bearing device is identical, so also solving same technical problem, has reached same technique effect.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is a kind of existing top view of substrate bearing device；
Fig. 2 is the top view of the substrate bearing device in the embodiment of the present invention；
Fig. 3 is the cross section view of A-A in Fig. 2；
Fig. 4 is that the first carrier strip, the second carrier strip of the substrate bearing device in the embodiment of the present invention are connected with substrate
Schematic diagram；
Fig. 5 is the sectional view of the substrate of the substrate bearing device in the embodiment of the present invention；
Fig. 6 is the upward view of the substrate bearing device in the embodiment of the present invention；
Fig. 7 is the cross section view of B-B in Fig. 6；
Fig. 8 is the schematic diagram that substrate is lifted off by push rod from substrate.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
In the description of the invention, it is to be understood that term " " center ", " on ", " under ", "front", "rear", " left side ",
The orientation or position relationship of the instruction such as " right side ", " vertical ", " level ", " top ", " bottom ", " interior ", " outer " are to be installed based on embodiment
Orientation or position relationship shown in position, it is for only for ease of description description of the invention and simplified, rather than instruction or hint institute
The device or component of finger must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to this hair
Bright limitation.
Term " first ", " second " be only used for describe purpose, and it is not intended that instruction or imply relative importance or
The implicit quantity for indicating indicated technical characteristic.Thus, " first " is defined, the feature of " second " can be expressed or imply
Ground includes one or more this feature.In the description of the invention, unless otherwise indicated, " multiple " be meant that two or
Two or more.
Referring to Fig. 2 and Fig. 3, the embodiment provides a kind of substrate bearing device, including substrate 1 and carrier strip 2,
Carrier strip 2 is detachably connected with substrate 1, and the loading end of carrier strip 2 is provided with adhesive member 3, is in and is connected in carrier strip 2 and substrate 1
Connect under state, the loading end for all carrier strips 2 being connected with substrate 1 forms flat surfaces 4.
Wherein, adhesive member 3 is consistent with adhesive member of the prior art (adhesive member 02 shown in Fig. 1), the present invention
It is not made improvements in implementation.
The substrate bearing device that embodiments of the invention provide, as shown in Figures 2 and 3, because carrier strip 2 and substrate 1 can
Dismantling connection, the loading end of carrier strip 2 are provided with adhesive member 3, so when needing to change adhesive member 3, need to only change and substrate 1
The carrier strip 2 to match, that is, original carrier strip 2 is pulled down, then install new carrier strip 2；Due to substrate 1
The loading end of each carrier strip 2 of connection forms flat surfaces 4, can so ensure that adhesive member 3 is fully bonded with substrate, so as to
To prevent substrate to be separated during evaporation with carrier strip 2.Compared with prior art, the substrate provided in the embodiment of the present invention is held
Carry that to put be to change adhesive member 3 by changing carrier strip 2, it is more succinct the step of this substitute mode, conveniently, eliminate viscous
Property part 3 tear off, paste etc. than relatively time-consuming step, so as to which can greatly shortens the replacing construction of adhesive member 3, and then can carry
The mobility of high efficiency and equipment.
The substrate bearing device that embodiments of the invention provide can be used for carrying a variety of substrates, such as glass substrate, battle array
Row substrate, color membrane substrates etc., when the substrate that the substrate bearing device that embodiments of the invention provide is carried is used to make OLED
During display device, because the organic luminous layer of OLED display is mainly that material is deposited on substrate by the mode being deposited
, and be to need to overturn substrate bearing device in evaporation, i.e. the carrying of carrier strip 2 is face-down, and now substrate is by viscosity
Intermolecular force when part 3 is bonded with substrate overcomes gravity, in order to make substrate preferably be fixed on carrier strip 2
On, as shown in Fig. 2 the number of carrier strip 2 is multiple, in the case where carrier strip 2 and substrate 1 are in connection status, multiple carrier strips 2
Loading end flush, to form flat surfaces 4.By setting multiple carrier strips 2, the number of adhesive member 3 is so added, works as base
When plate is bonded with adhesive member 3, intermolecular force can between the two is bigger, can preferably overcome the gravity of substrate,
Substrate is avoided to depart from carrier strip 2, so that substrate is preferably fixed in carrier strip 2.
Wherein, the distribution mode of multiple carrier strips 2 is not unique, for example multiple carrier strips 2 can be distributed in the following manner：
As shown in Fig. 2 carrier strip 2 includes the first carrier strip 21 and the second carrier strip 22, the number of the first carrier strip 21 be it is multiple, it is multiple
First carrier strip 21 surrounds a bearing area (in Fig. 2 shown in label d), and the second carrier strip 22 is arranged in bearing area.In addition,
Multiple carrier strips 2 can also be distributed in the following manner：Carrier strip 2 only includes the first carrier strip 21, the number of the first carrier strip 21
To be multiple, multiple first carrier strips 21 surround a bearing area.Compared to the scheme that carrier strip 2 only includes the first carrier strip 21, Fig. 2
In shown scheme, by being additionally provided with the second carrier strip 22 in the bearing area that the first carrier strip 21 is surrounded, so when
In evaporation, the can of adhesive member 3 in the second carrier strip 22 is bonded substrate to central region on substrate, so as to subtract
On small substrate this subregion because of gravity and caused by concave deformation.
In the substrate bearing device that embodiments of the invention provide, the mode that carrier strip 2 is detachably connected with substrate 1 is not
Uniquely, for example carrier strip 2 can realize and be detachably connected that specifically, carrier strip 2 is provided with elastic card with substrate 1 by clamping
Hook, neck, elastic fastening hook and neck phase clamping is offered in substrate 1, to realize the clamping of carrier strip 2 and substrate 1；Need to hold
When carrier strip 2 is pulled down, elastic fastening hook can be exerted a force to disengage it from neck, so as to complete the dismounting of carrier strip 2 and substrate 1.
In addition, carrier strip 2 can also be detachably connected by threaded fastener and substrate 1, specifically, opened in carrier strip 2
Provided with through hole, the position relative with through hole offers screwed hole in substrate 1, and screw is passed through after through hole and matched somebody with somebody with screwed hole screw thread
Close, to realize being fixedly connected for carrier strip 2 and substrate 1；When needing to pull down carrier strip 2, unscrew screw, so as to complete carrier strip
2 with the dismounting of substrate 1.Compared to clamping, carrier strip 2 is detachably connected by threaded fastener and substrate 1, it is easier to ensures carrying
Bonding strength between bar 2 and substrate 1, so as to more can guarantee that the steadiness connected between carrier strip 2 and substrate 1.
When carrier strip 2 is installed on the base 1, in order to facilitate the positioning of carrier strip 2, as shown in Figure 3 and Figure 4, carrier strip 2
Defining flange 23 is provided with, stopper slot 11, defining flange 23 and the phase clamping of stopper slot 11 are offered in substrate 1.So in substrate 1
During upper installation carrier strip 2, the can of carrier strip 2 is by defining flange 23 and the phase clamping of stopper slot 11, to realize the peace of carrier strip 2
Position is set, so as to the convenient subsequently fixation to carrier strip 2.
When the substrate that the substrate bearing device that embodiments of the invention provide is carried is used to make OLED display,
, it is necessary to substrate and mask plate be aligned, mask plate can be to being not required on substrate before substrate carries out evaporation luminous organic material
The position for carrying out material deposition is blocked, because mask plate is than relatively thin, it is easy to deform upon, thus in actual use
It is inevitably caused to be bonded with substrate not tight, so that when luminous organic material is deposited, it is impossible to be formed correct
Pattern.
This not tight problem is bonded with mask plate in order to solve substrate when luminous organic material deposits, such as Fig. 3 institutes
Showing, the substrate bearing device that embodiments of the invention provide also includes fixture 5, and fixture 5 is detachably connected with substrate 1,
Fixture 5 is under connection status with substrate 1, and fixture 5 is located at side of the flat surfaces 4 away from adhesive member 3, fixture 5
Magnetic absorption part 6 (such as magnet, electromagnet etc.) is fixed with first surface (in Fig. 3 shown in label c), first surface is with putting down
Smooth surface 4 is parallel.Because fixture 5 is located at side of the flat surfaces 4 away from adhesive member 3, fixed on the first surface of fixture 5
Provided with magnetic absorption part 6, so when mask plate and substrate align, the can of magnetic absorption part 6 is to mask plate (metal material system
Into) magnetic absorption is carried out, so that mask plate is close to substrate, so as to which can solves substrate when luminous organic material deposits with covering
This not tight problem of template fitting；When the luminous organic material evaporation on substrate is finished, it is necessary to when mask plate is separated with substrate,
Because fixture 5 and substrate 1 are detachably connected, then can is inhaled magnetic by the way that fixture 5 is pulled down from substrate 1
Annex 6 removes from substrate 1, and such mask plate is just no longer influenced by the magnetic-adsorption of magnetic absorption part 6, so as to can easily
Separated from the surface of substrate.
Wherein, the structure of fixture 5 is not unique, for example fixture 5 can be following structure：As shown in figure 3, fixture
5 include chassis 51 and fixed strip 52, and chassis 51 is detachably connected with substrate 1, and fixed strip 52 is detachably connected with chassis 51, magnetic
Adsorption piece 6 is fixed on fixed strip 52.In addition, fixture 5 can also be following structure：Fixture 5 includes chassis 51, chassis 51
It is detachably connected with substrate 1, magnetic absorption part 6 is fixed on chassis 51.Compared to the scheme that fixture 5 only includes chassis 51, Gu
Determine in the scheme that part 5 includes chassis 51 and fixed strip 52, because fixed strip 52 and chassis 51 are detachably connected, magnetic absorption part 6
It is fixed on fixed strip 52, so when the size difference of the substrate carried in substrate 1, then just need to align different size
Mask plate, combine by the connection of different number of fixed strip 52 and chassis 51, it is possible to adapt to different size mask plate so that
Different size of mask plate can be adsorbed on the surface of substrate.
In the embodiment that fixture 5 includes chassis 51 and fixed strip 52, fixed strip 52 can combine in the following manner, such as
Shown in Fig. 6, fixed strip 52 includes the first fixed strip 521 and the second fixed strip 522, the number of the first fixed strip 521 be it is multiple, it is more
Individual first fixed strip 521 surrounds a region (in Fig. 6 shown in label e), and the second fixed strip 522 is arranged in the region.Wherein,
One fixed strip 521 can adsorb to the border area of mask plate, and the second fixed strip 522 can be to solid with first on mask plate
Determine bar 521 and surround the relative position in region to be adsorbed, so as to so that each position of mask plate fits with substrate, from
And improve the accuracy for the pattern being deposited out on substrate.
In the embodiment that fixture 5 includes chassis 51 and fixed strip 52, the first fixed strip 521 and the second fixed strip 522
It can be detachably connected by threaded fastener (such as screw) with chassis 51, can so ensure the He of the first fixed strip 521
The bonding strength of second fixed strip 522 and chassis 51, increases by the first fixed strip 521 and the second fixed strip 522 is connected with chassis 51
Steadiness.The convenient contraposition when being installed on chassis 51 for the first fixed strip 521 and the second fixed strip 522, as shown in figure 3,
The end face of chassis 51 is provided with the first neck 511, and the first fixed strip 521 is provided with the first clamping flange 5211, and the first clamping is convex
Edge 5211 and the phase clamping of the first neck 511；The side of chassis 51 is provided with the second neck 512, and the second fixed strip 522 is provided with the
Two clamping flanges 5221, the second clamping flange 5221 and the phase clamping of the second neck 512.By in this way, solid so first
The fixed strip 522 of bar 521 and second is determined when being installed on chassis 51, it is possible to real by the first neck 511 and the second neck 512
Now position, so as to facilitate follow-up fixed installation.
In fixture 5, chassis 51 and the structure that substrate 1 is detachably connected be not unique, for example chassis 51 can pass through
Screw is realized with substrate 1 and is detachably connected.In addition, as shown in Figure 6 and Figure 7, chassis 51 is removable by latch structure 7 and substrate 1
Unload connection, the first pin-and-hole 71 that latch structure 7 includes being opened on chassis 51, open up the second pin-and-hole 72 and pin on the base 1
Bar 73, the first pin-and-hole 71 and the second pin-and-hole 72 are coaxial, and pin rod 73 is inserted in the first pin-and-hole 71 and the second pin-and-hole 72, and is sold with first
Hole 71, the second pin-and-hole 72 are interference fitted.Compared to mode connects for screw, chassis 51 is detachably connected by latch structure 7 and substrate 1, just
It can save and tighten, unscrew the step of screw, so as to so that chassis 51 and the assembling process of substrate 1 are more convenient.
In the embodiment that chassis 51 is detachably connected by latch structure 7 and substrate 1, the setting on the base 1 of chassis 51
Seated position is not unique, for example chassis 51 can be set in the groove 12 opened up on the base 1, specifically, as shown in figure 3, edge
On the direction of flat surfaces 4, substrate 1 offers on the side surface (the N faces shown in Fig. 3) away from flat surfaces 4
Groove 12, chassis 51 are arranged in groove 12, as shown in fig. 7, the first pin-and-hole 71 is opened in the side wall of chassis 51, the second pin-and-hole
72 are opened on the cell wall of groove 12.In addition, chassis 51 can also be set directly on the N faces of substrate 1, chassis 51 is provided with edge
The flange extended laterally, flange and the N faces of substrate 1 are leant, and the first pin-and-hole 71 is opened on flange.Directly set compared to chassis 51
Put on the N faces of substrate 1, chassis 51 is set in the groove 12 opened up on the base 1, can facilitate the setting of latch structure 7, together
When chassis 51 and groove 12 are installed, groove 12 can play a part of positioning to chassis 51, in order to which follow-up chassis 51 is logical
Latch structure 7 is crossed to fix on the base 1.
In the substrate bearing device that embodiments of the invention provide, the structure of substrate 1 is not also unique, for example substrate 1 can be with
For solid rectangular plate-like structure, in addition, as shown in figure 5, substrate 1 can also be the rectangular frame knot with hollow out opening 13
Structure, i.e., hollow out opening 13 is offered in the substrate 1 of rectangle, to form rectangular frame structure.Compared to rectangular plate-like structure, substrate
1 when being rectangular frame structure, and its weight is lighter, and substrate 1 also subtracts significantly to the pressure of conveyer (such as roller, steel band etc.)
It is small, then the frictional force between substrate 1 and conveyer just greatly reduces, while is also greatly lowered substrate 1 and is filled with transmission
Friction occurs between putting and produces the probability of fine particle, so as to which particle caused by can reduction friction falls on substrate to aobvious
The display of showing device has undesirable effect.
Referring to Fig. 2 and Fig. 3, in substrate 1 in the embodiment of the rectangular frame structure with hollow out opening 13, first carries
The edge that bar 21 can surround hollow out opening 13 is set, i.e., the M faces of substrate 1 and offers the close to the edge of hollow out opening 13
One stopper slot 111, defining flange 23 and the phase clamping of the first stopper slot 111 in the first carrier strip 21；Second carrier strip 22 can be with
Set across hollow out opening 13, i.e., offer the second stopper slot 112 in the side wall of hollow out opening 13, the limit in the second carrier strip 22
Position flange 23 and the phase clamping of the second stopper slot 112.Wherein, in the first stopper slot 111, the second stopper slot 112, pad can be increased
Piece, to finely tune the position of the first carrier strip 21, the second carrier strip 22, so that the first carrier strip 21, the carrying of the second carrier strip 22
Face flush.
Referring to Fig. 3, in substrate 1 in the embodiment of the rectangular frame structure with hollow out opening 13, chassis 51 can be set
Put magnetic absorption caused by set part magnetic absorption part 6 on the edge of hollow out opening 13, such fixed strip 52
Power is just without the barrier of substrate 1, it is possible to directly mask plate is adsorbed by hollow out opening 13, can so improve magnetic
For property adsorption piece 6 to the adsorption effect of mask plate, further increase mask plate and substrate is bonded effect.
, it is necessary to which substrate is removed from substrate 1 after substrate covers each road production process, because substrate is to pass through adhesive member
3 are fitted on the loading end of carrier strip 2 of substrate 1, are separated in order to facilitate substrate and substrate 1, as shown in Fig. 2 carrier strip 2
Loading end is provided with multiple first through hole 24, and adhesive member 3 can be bonded at first through hole 24, can also be bonded in multiple first
Between through hole 24.When adhesive member 3 is bonded at first through hole 24, adhesive member 3 is the porose structure of tool, and on adhesive member 3
Hole it is relative with first through hole 24.As shown in figure 8, when substrate separates (in figure shown in label a) with substrate 1, substrate and substrate 1
Motionless, multiple push rods (in pin figures shown in label b) correspond and extend among multiple first through hole 24, and by substrate with
Substrate 1 is slowly lifted off, and multiple push rods can be arranged in some single equipment, such as in OLED evaporated devices, Duo Geding
Bar is provided on the substrate separating mechanism that substrate is set out in equipment.
In order to prevent fixed strip 52 from being interfered during push rod extend into first through hole 24 with push rod, such as Fig. 6 institutes
Show, the avoiding structure 8 for avoiding push rod is offered on fixed strip 52, wherein, avoiding structure 8 can be avoid holes, or keep away
Allow groove, or both combinations, opening up avoid holes and escape groove is determined by the particular location of push rod and fixed strip 52.
The avoiding structure 8 of push rod is avoided by being offered on fixed strip 52, it is ensured that push rod is smoothly lifted off substrate, with completing substrate
With the separation of substrate 1.
Referring to Fig. 2 and Fig. 3, it is additionally provided with the surrounding side wall of substrate 1 to the (base of substrate support 14 extended laterally
Rail), substrate support 14 is in contact with conveyer, and substrate 1 is played a supporting role.Wherein, substrate support 14 can be with base
Bottom 1 is integrally formed, can also split production, then substrate support 14 install on the base 1.
On the other hand, the embodiment of the present invention additionally provides a kind of evaporated device, including described in any of the above-described embodiment
Substrate bearing device.
Due in the substrate bearing device included by evaporated device provided in an embodiment of the present invention and any of the above-described embodiment
Described substrate bearing device is identical, so also solving same technical problem, has reached same technique effect.The present invention
The evaporated device that embodiment provides can be OLED evaporated devices, be art technology on the other structures of evaporated device
Well known to personnel, it will not be repeated here.
More than, it is only embodiment of the invention, but protection scope of the present invention is not limited thereto, and it is any to be familiar with
Those skilled in the art the invention discloses technical scope in, change or replacement can be readily occurred in, should all be covered
Within protection scope of the present invention.Therefore, protection scope of the present invention should be defined by scope of the claims.
Claims (11)
1. a kind of substrate bearing device, it is characterised in that including substrate and carrier strip, the carrier strip and the substrate are detachable
Connection, the loading end of the carrier strip are provided with adhesive member, in the case where the carrier strip and the substrate are in connection status, with institute
The loading end for stating all carrier strips of substrate connection forms flat surfaces.
2. substrate bearing device according to claim 1, it is characterised in that the number of the carrier strip is multiple, in institute
State carrier strip to be under connection status with the substrate, the loading end flush of multiple carrier strips.
3. substrate bearing device according to claim 2, it is characterised in that the carrier strip includes the first carrier strip and the
Two carrier strips, the number of first carrier strip are multiple, and multiple first carrier strips surround a bearing area, described second
Carrier strip is arranged in the bearing area.
4. substrate bearing device according to claim 1, it is characterised in that the carrier strip passes through threaded fastener and institute
Substrate is stated to be detachably connected.
5. substrate bearing device according to claim 1, it is characterised in that the carrier strip is provided with defining flange, institute
State and stopper slot is offered in substrate, the defining flange and stopper slot phase clamping.
6. according to substrate bearing device according to any one of claims 1 to 5, it is characterised in that the substrate is with engraving
It is spaced apart the rectangular frame structure of mouth.
7. according to substrate bearing device according to any one of claims 1 to 5, it is characterised in that described also including fixture
Fixture is detachably connected with the substrate, in the case where the fixture and the substrate are in connection status, the fixture position
In side of the flat surfaces away from the adhesive member, magnetic absorption part is fixed with the first surface of the fixture,
The first surface is parallel with the flat surfaces.
8. substrate bearing device according to claim 7, it is characterised in that the fixture includes chassis and fixed strip,
The chassis is detachably connected with the substrate, and the fixed strip is detachably connected with the chassis, and the magnetic absorption part is consolidated
Due on the fixed strip.
9. substrate bearing device according to claim 8, it is characterised in that the chassis passes through latch structure and the base
Bottom is detachably connected, the first pin-and-hole that the latch structure includes being opened on the chassis, open up on the substrate the
Two pin-and-holes and pin rod, first pin-and-hole and second pin-and-hole are coaxial, and the pin rod inserts first pin-and-hole and described the
In two pin-and-holes, and it is interference fitted with first pin-and-hole, second pin-and-hole.
10. substrate bearing device according to claim 9, it is characterised in that along perpendicular to the direction of the flat surfaces
On, the substrate opens up fluted on the side surface away from the flat surfaces, the chassis is arranged in the groove, institute
State the first pin-and-hole to be opened in the side wall of the chassis, second pin-and-hole is opened on the cell wall of the groove.
11. a kind of evaporated device, it is characterised in that including substrate bearing device according to any one of claims 1 to 10.
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| CN201710757002.9A CN107475680B (en) | 2017-08-29 | 2017-08-29 | Substrate bearing device and evaporation equipment |
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| CN111778490A (en) * | 2020-07-14 | 2020-10-16 | 北京北方华创微电子装备有限公司 | Semiconductor device and lower electrode assembly thereof |
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