CN107452770A - The anode electrode structure and preparation method of organic TOP EMISSION DISPLAY DEVICESThe, display - Google Patents
The anode electrode structure and preparation method of organic TOP EMISSION DISPLAY DEVICESThe, display Download PDFInfo
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- CN107452770A CN107452770A CN201710365172.2A CN201710365172A CN107452770A CN 107452770 A CN107452770 A CN 107452770A CN 201710365172 A CN201710365172 A CN 201710365172A CN 107452770 A CN107452770 A CN 107452770A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/302—Details of OLEDs of OLED structures
- H10K2102/3023—Direction of light emission
- H10K2102/3026—Top emission
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Abstract
The present invention relates to the anode electrode structure of organic TOP EMISSION DISPLAY DEVICESThe and preparation method, display, and the anode electrode structure includes substrate, and is made in the anode electrode of substrate surface；Substrate is silicon substrate；Anode electrode is the anode electrode comprising multi-layer film structure, and multi-layer film structure includes the first metal layer, second metal layer and the coat of metal for being made in substrate surface successively.Implement that the anode electrode of the present invention can not only obtain higher work function but also chemical stability is good, resistance to oxidation, corrosion-resistant, in top light emitting OLED, anode electrode is not easy by chemical attacks such as steam, display brightness is uniform, contact resistance is also unaffected, while can also obtain higher reflectivity and good electric conductivity.
Description
Technical field
The present invention relates to display technology field, more specifically to a kind of anode of organic TOP EMISSION DISPLAY DEVICESThe
Electrode structure and preparation method, display.
Background technology
OLED Display Techniques have self-luminous, wide viewing angle, almost infinite high contrast, compared with low power consumption, it is high reaction speed
The advantages that spending, and many excellent specific properties such as simple preparation technology, relatively low operating voltage, high-effect, low energy consumption, by complete
Ball is shown and the common concern of Lighting Industry.
Wherein, top light emitting OLED basic structure is as anode by layer of metal, is organic luminous layer on anode,
The negative electrode being finally fabricated to by transparent materials such as ITO forms a light emitting diode construction.
Conventional top emitting OLED structure is as other OLED structures, by anode, negative electrode (and between anode and the moon
Organic luminous layer between pole is formed).OLED luminescence mechanism and process is to be injected separately into electronics and hole, quilt from cathode and anode
Injected electrons and hole are transmitted in organic layer, and compound in luminescent layer, are swashed so as to excite luminescent layer molecule to produce singlet
Son, singlet exciton attenuation and light.
Anode electrode currently used for this class formation is generally the metal of the high reflectances such as Al/Ag, but these single gold
Either belong to electrode work function to mismatch, or poor chemical stability, not resistance to oxidation, not corrosion-resistant, in top light emitting OLED
In, anode can be caused display brightness uneven after the chemical attacks such as steam, contact resistance rise etc. influences.Therefore,
Need to provide a kind of reflectivity that should have ensured, again the stable anode construction of chemical property.
The content of the invention
The technical problem to be solved in the present invention is, for the drawbacks described above of prior art, there is provided a kind of organic top hair
The anode electrode structure and preparation method of optical display unit, display.
The technical solution adopted for the present invention to solve the technical problems is：Construct a kind of sun of organic TOP EMISSION DISPLAY DEVICESThe
Pole electrode structure, including substrate, and it is made in the anode electrode of the substrate surface；
The substrate is silicon substrate；
The anode electrode is the anode electrode comprising multi-layer film structure, and the multi-layer film structure includes being made in institute successively
State the first metal layer, second metal layer and the coat of metal of substrate surface.
In the anode electrode structure of organic TOP EMISSION DISPLAY DEVICESThe of the present invention, it is preferable that first metal
Layer, second metal layer and coat of metal are made in the substrate surface successively by the way of evaporation or magnetron sputtering.
In the anode electrode structure of organic TOP EMISSION DISPLAY DEVICESThe of the present invention, it is preferable that first metal
Layer is layers of chrome.
In the anode electrode structure of organic TOP EMISSION DISPLAY DEVICESThe of the present invention, it is preferable that second metal
Layer is aluminium lamination.
In the anode electrode structure of organic TOP EMISSION DISPLAY DEVICESThe of the present invention, it is preferable that the metal coating
Layer is titanium nitride layer.
In the anode electrode structure of organic TOP EMISSION DISPLAY DEVICESThe of the present invention, it is preferable that first metal
The thickness of layer and the thickness of the coat of metal are respectively less than the thickness of the second metal layer.
The present invention also provides a kind of organic TOP EMISSION DISPLAY DEVICESThe, organic TOP EMISSION DISPLAY DEVICESAny of the above-described institute
The anode electrode stated.
In organic TOP EMISSION DISPLAY DEVICESThe of the present invention, it is preferable that also include being located at the anode electrode surface
Luminescent layer and the cathode electrode positioned at the luminous layer surface.
A kind of preparation method of the anode electrode of organic TOP EMISSION DISPLAY DEVICESThe, the preparation method bag are also provided in invention
Include following steps：
S1, provide a silicon substrate；
S2, using evaporation or magnetron sputtering by the way of, make the first metal layer, the second metal successively on the silicon substrate
Layer and coat of metal；The first metal layer is layers of chrome, and the second metal layer is aluminium lamination, and the coat of metal is
Titanium nitride layer.
In the preparation method of the anode electrode of organic TOP EMISSION DISPLAY DEVICESThe of the present invention, it is preferable that described
The thickness of the thickness of one metal level and the coat of metal is respectively less than the thickness of the second metal layer.
Implement the anode electrode structure of organic TOP EMISSION DISPLAY DEVICESThe of the present invention, have the advantages that：The anode
Electrode structure includes substrate, and is made in the anode electrode of substrate surface, and substrate is silicon substrate；The anode electrode be comprising
The anode electrode of multi-layer film structure, the multi-layer film structure include the first metal layer, second metal layer and coat of metal,
And the first metal layer, second metal layer and coat of metal are made in the substrate surface successively.Implement the present invention's
Anode electrode can not only obtain higher work function but also chemical stability is good, resistance to oxidation, corrosion-resistant, in top light emitting
In OLED, anode electrode is not easy by chemical attacks such as steam, and display brightness is uniform, and contact resistance is not also by shadow
Ring, while higher reflectivity and good electric conductivity can also be obtained.
Brief description of the drawings
Below in conjunction with drawings and Examples, the invention will be further described, in accompanying drawing：
Fig. 1 is the structural representation of the anode electrode structure first embodiment of the organic TOP EMISSION DISPLAY DEVICESThe of the present invention；
Fig. 2 is the structural representation of the organic TOP EMISSION DISPLAY DEVICESThe first embodiment of the present invention；
Fig. 3 is the flow of the preparation method first embodiment of the anode electrode structure of the organic TOP EMISSION DISPLAY DEVICESThe of the present invention
Schematic diagram.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
For the problem of the prior art mentioned in background technology, the invention provides a kind of organic TOP EMISSION DISPLAY DEVICESThe
Anode electrode structure, the anode electrode structure includes substrate and is made in the anode electrode of substrate surface；Wherein, the base
Plate is silicon substrate.Anode electrode is the anode electrode comprising multi-layer film structure, and the multi-layer film structure is described including being made in successively
The first metal layer, second metal layer and the coat of metal of substrate surface.In other words, the first metal layer is made in silicon substrate
Surface, make second metal layer and coat of metal successively from the bottom up.
Preferably, in the present embodiment, the first metal layer primarily serves connection second metal layer and silicon as bottoming metal level
The effect of substrate, and the first metal layer can be the metallic film made of the metal material of high work function.Second metal layer can adopt
It is made of the metal material that resistivity is low, reflectivity is high and work function is high, it is mainly as conductive and reflex.Metal coating
Layer can be the film made of chemical property stabilization, high work function material, and it mainly acts the erosion for obstructing outer bound pair metal anode
Effect.
As shown from the above technical solution, the present invention uses multiple layer metal membrane structure as organic TOP EMISSION DISPLAY DEVICESThe
Anode electrode, and conductive and reflecting layer metallic film is the metal material system that resistivity is low, reflectivity is high and work function is high
It is good so as to can obtain electric conductivity and reflectivity into, outer protective layer then using chemical property is stable, material of high work function is made
Anode electrode, and be also equipped with high work function, characteristic resistant to chemical etching, resistance to oxidation, improve the reliability and yield of product,
Add the competitiveness of product in market.
Technical scheme is described in detail below by specific embodiment.
An embodiment provides a kind of anode electrode structure of organic TOP EMISSION DISPLAY DEVICESThe, such as Fig. 1 institutes
Show, the anode electrode structure of the embodiment includes substrate 100 and is made in the anode electrode 200 on the surface of substrate 100；Anode
Electrode 200 is the anode electrode 200 comprising multi-layer film structure, wherein, the anode electrode 200 of multi-layer film structure includes the first metal
Layer 201, second metal layer 202 and coat of metal 203, and the first metal layer 201, second metal layer 202 and metal
Protective layer 203 is made in the surface of substrate 100 successively.
It should be noted that the first metal layer 201 of the present embodiment is preferably layers of chrome, because chromium hardness is high and has resistance to
Corrosivity and high work function, and crome metal directly contacts the phenomenon that will not dissolve each other with silicon substrate 100, its chemical property is stable,
It can be stabilized, and keep its physical switch not change, therefore, the first metal layer 201 in the present embodiment is with layers of chrome
As prime coat, can play a part of connecting second metal layer 202 and silicon substrate 100 well.
When it is implemented, the work function of the layers of chrome of the present embodiment can reach 4.6eV.
In the present embodiment, second metal layer 202 is preferably aluminium lamination, because the anode construction in OLED needs
There are higher electric conductivity and low power consumption characteristic requirement, therefore, it is necessary to made using the metal material of high conductivity, low-resistivity
For conductive layer.And the electric conductivity and conductivity of heat of aluminium are higher in a metal, and aluminium is also equipped with the high and low electricity of light weight, reflectivity
The characteristic of resistance rate, therefore, using conduction and reflective metal layer of the aluminium as anode electrode 200, it can not only strengthen organic light emission
The electric conductivity and reflectivity of display, the energy for reducing hole emission is also helped, that is, reduces the power consumption of OLED,
Further increase the competitiveness of product in market.
Because OLED should have high conductivity to require low-power consumption, high reflectance, therefore, the present embodiment again
In, the thickness of aluminium lamination is most thick, that is, is all higher than the thickness of layers of chrome and titanium nitride layer.
When it is implemented, the work function of the aluminium lamination of the present embodiment can reach 4.25eV.
In the present embodiment, coat of metal 203 is preferably titanium nitride layer.The anode electrode of common OLED
Generally using homogenous material (such as ITO) or duplicature (such as Al/Mo) as anode electrode, the anode electrode 200 of this kind of structure is easily
By chemical attack, chemical property is highly unstable, is easily influenceed by external environment, and resistivity is high, should so that using
The OLED power consumption of kind of structure anode electrode 200 is big, poor reliability.And titanium nitride is the compound of quite stable,
Do not reacted under normal temperature with other metals, therefore, the surface that titanium nitride can be plated to aluminium lamination is used for protecting aluminium lamination, prevents aluminium
Layer is oxidized, corrosion, in addition, the chemical property of titanium nitride is related to the chemical property of aluminium a lot, be not in similar mix
Problem, and titanium nitride has the heat resistance of superelevation, so as to which the conduction of aluminium lamination in aluminium lamination surface direct plating titanium nitride layer, will not be reduced
Performance, and then aluminium lamination is played a protective role.
Further, titanium nitride is also big with hardness, and physical arrangement is stable, corrosion-resistant and wear-resisting characteristic, titanium nitride
These characteristics can be very good to rush to the effect of protection aluminium lamination far above conventional metal material.And titanium nitride directly connects with aluminium
The property of aluminium will not be changed by touching, and therefore, can still obtain electric conductivity and the good anode electrode of reflectivity.
Because the resistivity of titanium nitride is higher, therefore, the thickness of titanium nitride film should not be too thick, typically can reach guarantor
Aluminium lamination is protected, generally for protection aluminium lamination, aluminium lamination can be completely covered in titanium nitride film.
When it is implemented, the work function of the titanium nitride layer of the present embodiment can reach 4.7eV.
Preferably, the first metal layer 201 of the present embodiment, second metal layer 202 and coat of metal 203 can use
The mode of evaporation or magnetron sputtering is made in the surface of substrate 100 successively, i.e. the order of evaporation or magnetron sputtering is：The first metal layer
201st, second metal layer 202 is arrived again, is finally coat of metal 203.After the making of layers of chrome is completed, you can start from aluminium
Layer, is finally plated in aluminium lamination surface by titanium nitride layer again.
The structure of the anode electrode 200 of the present invention is using silicon as substrate, and the bottoming gold using chromium as connection aluminium and silicon substrate
Belong to layer, using aluminium as conduction and reflecting layer, using titanium nitride as outer protective layer, not only ensure that the conduction of anode electrode 200
Property and reflectivity, have also taken into account the chemical stability of outer layer, have enhanced the corrosion resistance and wearability of anode electrode 200.
Present invention also offers a kind of organic TOP EMISSION DISPLAY DEVICESThe, as shown in Fig. 2 organic top light emitting of the embodiment
Display includes the anode electrode 200 of the anode electrode structure of organic TOP EMISSION DISPLAY DEVICESThe shown in Fig. 1.
Further, organic TOP EMISSION DISPLAY DEVICESThe also include positioned at the surface of anode electrode 200 luminescent layer 300, with
And the cathode electrode 400 positioned at the surface of luminescent layer 300.
The anode electrode 200 of organic TOP EMISSION DISPLAY DEVICESThe of the present embodiment has good electric conductivity and reflectivity, also
With resistant to chemical etching, resistance to oxidation and antiwear characteristic.
During specific works, organic TOP EMISSION DISPLAY DEVICESThe of the present embodiment injects from cathode electrode 400 as shown in Figure 2
Electronics with being transmitted from the injected holes of anode electrode 200 in organic layer, it is and compound in luminescent layer 300, so as to excite hair
The molecule of photosphere 300 produces singlet exciton, single too exciton attenuation and light, the light part sent is directed through cathode electrode
400 transmittings, another part then reaches anode electrode 200, then passes through organic layer by the transmitting of anode electrode 200, passes through negative electrode electricity
Outwards launch pole 400.
The anode electrode 200 of organic TOP EMISSION DISPLAY DEVICESThe of the present embodiment includes multi-layer film structure, the multi-layer film structure
The first metal layer 201, second metal layer 202 and coat of metal 203 including being made in the surface of silicon substrate 100 successively, and
The first metal layer 201 is preferably layers of chrome, and second metal layer 202 is preferably aluminium lamination, and coat of metal 203 is preferably titanium nitride layer.
In addition, the thickness of titanium nitride layer protects aluminium lamination to play, should not be too thick.The thickness of aluminium lamination is all higher than layers of chrome thickness and nitridation
Titanium layer thickness.
Present invention also offers a kind of preparation method of the anode electrode of organic TOP EMISSION DISPLAY DEVICESThe, as shown in figure 3, being
The preparation method of the anode electrode of organic TOP EMISSION DISPLAY DEVICESThe of one embodiment of the invention.In this embodiment, anode electricity
The preparation method of pole 200 specifically includes following steps：
S1, provide a silicon substrate 100；
S2, by the way of evaporation or magnetron sputtering, make the first metal layer 201, the successively on the silicon substrate 100
Two metal levels 202 and coat of metal 203；The first metal layer 201 is layers of chrome, and the second metal layer 202 is aluminium
Layer, the coat of metal 203 is titanium nitride layer.
Further, in step S2 coating process, the thickness of the first metal layer 201 (such as layers of chrome) is less than the second metal
The thickness of 202 (such as aluminium lamination) of layer, the thickness of coat of metal 203 (such as titanium nitride layer) are less than second metal layer 202 (such as aluminium lamination)
Thickness.In addition, when coat of metal 203 is titanium nitride layer, because titanium nitride resistivity is higher, therefore, its film layer is unsuitable
It is too thick, typically protect aluminium lamination that can reach.
Above example only technical concepts and features to illustrate the invention, its object is to allow person skilled in the art
Scholar can understand present disclosure and implement accordingly, can not limit the scope of the invention.It is all to be wanted with right of the present invention
The equivalent changes and modifications that scope is done are sought, the covering scope of the claims in the present invention all should be belonged to.
It should be appreciated that for those of ordinary skills, can according to the above description be improved or converted,
And all these modifications and variations should all belong to the protection domain of appended claims of the present invention.
Claims (10)
1. a kind of anode electrode structure of organic TOP EMISSION DISPLAY DEVICESThe, it is characterised in that including substrate (100), and make
Anode electrode (200) in the substrate (100) surface；
The substrate (100) is silicon substrate (100)；
The anode electrode (200) is the anode electrode (200) comprising multi-layer film structure, and the multi-layer film structure includes making successively
Make in the first metal layer (201), second metal layer (202) and the coat of metal (203) on the substrate (100) surface.
2. the anode electrode structure of organic TOP EMISSION DISPLAY DEVICESThe according to claim 1, it is characterised in that described first
Metal level (201), second metal layer (202) and coat of metal (203) are made successively by the way of evaporation or magnetron sputtering
Make in the substrate (100) surface.
3. the anode electrode structure of organic TOP EMISSION DISPLAY DEVICESThe according to claim 1, it is characterised in that described first
Metal level (201) is layers of chrome.
4. the anode electrode structure of organic TOP EMISSION DISPLAY DEVICESThe according to claim 3, it is characterised in that described second
Metal level (202) is aluminium lamination.
5. the anode electrode structure of organic TOP EMISSION DISPLAY DEVICESThe according to claim 4, it is characterised in that the metal
Protective layer (203) is titanium nitride layer.
6. the anode electrode structure of organic TOP EMISSION DISPLAY DEVICESThe according to claim 1, it is characterised in that described first
The thickness of metal level (201) and the thickness of the coat of metal (203) are respectively less than the thickness of the second metal layer (202).
7. a kind of organic TOP EMISSION DISPLAY DEVICESThe, it is characterised in that including the anode electrode described in claim any one of 1-6
(200)。
8. organic TOP EMISSION DISPLAY DEVICESThe according to claim 7, it is characterised in that also include being located at the anode electrode
(200) luminescent layer on surface and the cathode electrode positioned at the luminous layer surface.
9. a kind of preparation method of the anode electrode of organic TOP EMISSION DISPLAY DEVICESThe, it is characterised in that comprise the following steps：
S1, provide a silicon substrate (100)；
S2, by the way of evaporation or magnetron sputtering, make the first metal layer (201), the successively on the silicon substrate (100)
Two metal levels (202) and coat of metal (203)；The first metal layer (201) is layers of chrome, the second metal layer
(202) it is aluminium lamination, the coat of metal (203) is titanium nitride layer.
10. the preparation method of the anode electrode of organic TOP EMISSION DISPLAY DEVICESThe according to claim 9, it is characterised in that
The thickness of the first metal layer (201) and the thickness of the coat of metal (203) are respectively less than the second metal layer (202)
Thickness.
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| CN201710365172.2A CN107452770A (en) | 2017-05-22 | 2017-05-22 | The anode electrode structure and preparation method of organic TOP EMISSION DISPLAY DEVICESThe, display |
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| CN201710365172.2A CN107452770A (en) | 2017-05-22 | 2017-05-22 | The anode electrode structure and preparation method of organic TOP EMISSION DISPLAY DEVICESThe, display |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108365126A (en) * | 2018-04-25 | 2018-08-03 | 江苏集萃有机光电技术研究所有限公司 | Anode construction and anode construction manufacturing method |
| CN109148708A (en) * | 2018-08-30 | 2019-01-04 | 上海天马有机发光显示技术有限公司 | A kind of display panel and display device |
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| CN101459226A (en) * | 2008-12-26 | 2009-06-17 | 云南北方奥雷德光电科技股份有限公司 | Anode construction for top light emitting organic display and manufacturing process thereof |
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| CN109148708A (en) * | 2018-08-30 | 2019-01-04 | 上海天马有机发光显示技术有限公司 | A kind of display panel and display device |
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