CN107421668A - A kind of differential capacitance sensor suitable for moment inspecting - Google Patents
A kind of differential capacitance sensor suitable for moment inspecting Download PDFInfo
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- CN107421668A CN107421668A CN201710415670.3A CN201710415670A CN107421668A CN 107421668 A CN107421668 A CN 107421668A CN 201710415670 A CN201710415670 A CN 201710415670A CN 107421668 A CN107421668 A CN 107421668A
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- electrode
- capacitance
- inductance
- inductance capacitance
- differential
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- 239000003990 capacitor Substances 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 230000035945 sensitivity Effects 0.000 claims abstract description 6
- 238000005259 measurement Methods 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 230000009467 reduction Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 abstract 1
- 238000001514 detection method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
- G01L3/02—Rotary-transmission dynamometers
- G01L3/14—Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft
Abstract
The invention discloses a kind of differential capacitance sensor suitable for moment inspecting, including at least torque input disc, torque output panel, some ladder beams, the moving electrode of a pair of inductance capacitances, a pair of inductance capacitances stationary electrode and substrate.The moving electrode of a pair of inductance capacitances is fixed with one between the outer shroud of torque input disc and the inner ring of torque output panel and with the outer shroud of torque input disc respectively；The stationary electrode of a pair of inductance capacitances is respectively positioned at moving electrode the same side of corresponding inductance capacitance, and remain with certain interval with the moving electrode of corresponding inductance capacitance；The moving electrode of inductance capacitance and the stationary electrode composition differential structure vertical-electrode type capacitor of inductance capacitance.Differential capacitance sensor proposed by the present invention has preferable sensitivity, less linearity error and preferable antijamming capability, substantially increases the linearity of sensor in addition；The present invention can be processed to realize using conventional mechanical, be simple to manufacture, the torque suitable for detecting tandem type joint of robot transmission.
Description
Technical field
The invention belongs to instrument and meter for automation sensor technology and robot control field, is related to a kind of capacitance sensor, special
It is not related to a kind of differential capacitance sensor suitable for moment inspecting.
Background technology
At present in torgue measurement, detect that the sensor application of torque is quite varied, and mode can as caused by torque signals
It is divided into optical profile type, photo-electric, magneto-electric and resistance-strain type etc..For example, the essence of magneto-electric torque sensor output signal
It is that two-way has dephased angular displacement signal, obtains moment information after processing is combined to signal, it is contactless biography
Sensor, no abrasion, but volume is larger, is not suitable for the torque transmitted in tandem type robot field's robot measurement joint, and
It is not easy to install；Resistance-strain type torque sensor is using voltage signal caused by resistance variations as detection signal, so as to obtain power
Square information, its is complicated, it is necessary to which extra amplifying circuit, A/D converter etc., sensors with auxiliary electrode price is more high at present
It is expensive.
Capacitor torque sensor at present, such as a kind of dynamic based on electric capacity that Chinese patent CN201344846Y is proposed
Torque sensor, its axle change with shell relative position, then the capacitance signal at axle both ends can produce phase difference, pass through detection
This capacitive differential, so as to set up the relation between capacitance difference and moment of torsion, the measurement of moment of torsion is realized, this capacitor torque sensing
Device physical dimension is larger, can only be used in specific occasion, is not easy to detect torque in tandem type robot field.Based on electric capacity side
The polar distance vertical-electrode type capacitance sensor of edge effect, its sensitivity compared to traditional parallel pole formula capacitance sensor by
Electrode spacing influences smaller, but polar distance vertical-electrode type capacitance sensor is there is serious non-linear, and is done by noise
Disturb larger.
The content of the invention
A kind of it is an object of the present invention to deficiency existing for the sensor, there is provided difference suitable for moment inspecting
Dynamic formula capacitance sensor, make it have small linearity error, high sensitivity, strong antijamming capability and advantages of simple structure and simple.
To realize above-mentioned target, the present invention adopts the following technical scheme that：
A kind of differential capacitance sensor suitable for moment inspecting, including at least torque input disc 1, torque output panel 2,
Stationary electrode 4, substrate 5 and the ladder beam 8 of the moving electrode 3 of a pair of inductance capacitances, a pair of inductance capacitances.
The moving electrode 3 of the inductance capacitance be located between the outer shroud of torque input disc 1 and the inner ring of torque output panel 2 and with
The outer shroud of torque input disc 1 is fixed with one；The moving electrode 3 of the inductance capacitance includes the moving electrode 3-1 of a pair of inductance capacitances
With the moving electrode 3-2 of inductance capacitance and symmetrical on Y-axis.
The stationary electrode 4 of the inductance capacitance is close at the groove 6 of substrate 5, and the boss 7 of substrate 5 and torque output panel 2 is connected
It is integrated；The stationary electrode 4 of the inductance capacitance includes the stationary electrode 4-1 of a pair of inductance capacitances and the stationary electrode 4-2 of inductance capacitance
Composition；The stationary electrode 4-1 of the inductance capacitance and stationary electrode 4-2 of the inductance capacitance moving electrode 3-1 positioned at inductance capacitance and senses respectively
Answer moving electrode 3-2 the same sides of electric capacity and remained with respectively with the moving electrode 3-1 of inductance capacitance and the moving electrode 3-2 of inductance capacitance
Certain interval.
The moving electrode 3-1 of the inductance capacitance and the stationary electrode 4-1 of inductance capacitance form first vertical-electrode type electric capacity
Device；The moving electrode 3-2 of the inductance capacitance and stationary electrode 4-2 of inductance capacitance forms second vertical-electrode type capacitor, the
One vertical-electrode type capacitor and second vertical-electrode type capacitor form differential structure vertical-electrode type capacitor.
The beneficial effects of the present invention are：
A kind of differential capacitance sensor suitable for moment inspecting of the invention, using two vertical electrode capacitor banks into
Differential structure, first vertical-electrode type condenser capacitance are C1, second vertical-electrode type condenser capacitance is C2, with C1-
C2As the measurement signal of capacitance sensor, the measured value of capacitance change is added, counteracts capacitance sensor minimum capacity
And capacitance sensor noise electric capacity is reduced, so that having preferably suitable for the differential capacitance sensor of moment inspecting
Sensitivity, less linearity error and preferable antijamming capability, substantially increase the linearity of sensor in addition.This hair
Bright processed using conventional mechanical realized, have the advantages that to be simple to manufacture, packaging technology difficulty it is small, suitable for serial manipulator
Multiple fields.
Brief description of the drawings
Fig. 1 is differential capacitance sensor decomposing schematic representation.
Fig. 2 is differential capacitance sensor assembling schematic diagram.
Fig. 3 is differential capacitance sensor mechanism body schematic diagram.
Fig. 4 is differential capacitance sensor base plate schematic diagram.
In accompanying drawing：1- torque input discs；2- torque output panels；The moving electrode of 3- inductance capacitances；The electrostatic of 4- inductance capacitances
Pole；5- substrate 6- grooves；7- boss；8- ladder beams.
Embodiment
The present invention is further illustrated below in conjunction with accompanying drawing.
A kind of differential capacitance sensor suitable for moment inspecting of the invention, as shown in figure 1 and 2, including at least power
Square input disc 1, torque output panel 2, the moving electrode 3 of a pair of inductance capacitances, the stationary electrode 4 of a pair of inductance capacitances, substrate 5 and trapezoidal
Beam 8.
The moving electrode 3 of inductance capacitance is located between the outer shroud of torque input disc 1 and the inner ring of torque output panel 2 and and torque
The outer shroud of input disc 1 is fixed with one；Moving electrode 3-1 and inductance capacitance of the moving electrode 3 of inductance capacitance including inductance capacitance
Moving electrode 3-2 and symmetrical on Y-axis.
As shown in Figure 3, the stationary electrode 4 of inductance capacitance is close at the groove 6 of substrate 5；Substrate 5 is fixed on torque output panel
On 2 boss 7；The stationary electrode 4 of inductance capacitance includes the stationary electrode 4-1 of inductance capacitance and the stationary electrode 4-2 of inductance capacitance；Sensing
The stationary electrode 4-1 of the electric capacity and stationary electrode 4-2 of inductance capacitance is respectively positioned at the moving electrode 3-1 of inductance capacitance and moving for inductance capacitance
Electrode 3-2 the same sides and remain with certain interval with the moving electrode 3-1 of inductance capacitance and the moving electrode 3-2 of inductance capacitance respectively.
As shown in Figure 4, capacitance sensor basic machine comprises at least torque input disc 1, torque output panel 2, induced electricity
The moving electrode 3 and some ladder beams 8 of appearance；The both ends of ladder beam respectively with the outer shroud and torque output panel 2 of torque input disc 1
Ring is fixed with one.
The moving electrode 3-1 of inductance capacitance and the stationary electrode 4-1 of inductance capacitance form first vertical-electrode type capacitor；Sense
The moving electrode 3-2 of electric capacity and the stationary electrode 4-2 of inductance capacitance is answered to form second vertical-electrode type capacitor；First vertical electricity
Polar form capacitor and second vertical-electrode type capacitor form differential vertical electrode type capacitor.
The present invention basic functional principle be：Torque input disc 1 transmits torque to torque output panel by some ladder beams 8
2, so as to cause the moving electrode 3 of inductance capacitance to rotate micro angular displacement around former heart O along the outer of torque input disc 1；Tied more than
The differential structure vertical-electrode type capacitor being configured to, one of vertical electrode condenser capacitance increase (reduction) arrive C1,
Then corresponding another vertical electrode condenser capacitance reduction (increase) arrives C2, with C1-C2Measurement as capacitance sensor is believed
Number, then the knots modification of electric capacity is (△ C1+C0+CC)-(-△C2+C0+CC) it is △ C1+△C2, wherein C0With CCRespectively vertical electricity
The minimum capacity value of electrode capacitor and noise capacitance, △ C1With-△ C2Respectively electric capacity C1With C2Variable quantity.That is differential type
Structure vertical electrode type capacitor adds the variable quantity of electric capacity, counteracts capacitance sensor minimum capacity and reduces electric capacity
Sensor noise electric capacity, so that there is preferable sensitivity, smaller suitable for the differential capacitance sensor of moment inspecting
Linearity error and preferable antijamming capability, substantially increase the linearity of sensor in addition.
Differential capacitance sensor of the present invention, the moving electrode 3 of inductance capacitance are grounded metal, the stationary electrode 4 of inductance capacitance
For the fritter copper sheet at proximate recesses 6 on substrate 5；Substrate 7 is printed circuit board (PCB) or other solid insulations；Printing
There is the detection circuit and sensing element of detection electric capacity on circuit board (PCB).
Here description of the invention and application are illustrative, are not wishing to limit the scope of the invention to above-described embodiment
In, the deformation and change of embodiments disclosed herein are possible.It should be appreciated by the person skilled in the art that do not departing from
In the case of the spirit or essential characteristics of the present invention, the present invention can in other forms, structure, arrangement, ratio, and with other
Component, material and part are realized.It is every to carry out other modifications, retouching and equivalent variations according to technical scheme, and
The thought and scope of technical solution of the present invention are not departed from, it all should cover among scope of the presently claimed invention.
Claims (8)
- A kind of 1. differential capacitance sensor suitable for moment inspecting, it is characterised in that：It comprises at least torque input disc (1), the stationary electrode (4) and substrate (5) of torque output panel (2), the moving electrode (3) of a pair of inductance capacitances, a pair of inductance capacitances；The moving electrode (3) of the inductance capacitance includes the moving electrode (3-1) of inductance capacitance and the moving electrode (3-2) of inductance capacitance；The stationary electrode (4) of the inductance capacitance includes the stationary electrode (4-1) of inductance capacitance and the stationary electrode (4-2) of inductance capacitance；The moving electrode (3) of the inductance capacitance forms differential structure vertical-electrode type electric capacity with the stationary electrode (4) of inductance capacitance Device.
- A kind of 2. differential capacitance sensor suitable for moment inspecting according to claim 1, it is characterised in that：It is described The moving electrode (3) of inductance capacitance is located between the outer shroud of torque input disc (1) and the inner ring of torque output panel (2) and defeated with torque The outer shroud for entering disk (1) is fixed with one.
- A kind of 3. differential capacitance sensor suitable for moment inspecting according to claim 1, it is characterised in that：It is described The moving electrode (3-1) of inductance capacitance and the moving electrode (3-2) of inductance capacitance are symmetrical on Y-axis.
- A kind of 4. differential capacitance sensor suitable for moment inspecting according to claim 1, it is characterised in that：It is described The stationary electrode (4-1) of inductance capacitance and the moving electrode (3-1) positioned at inductance capacitance and the sense respectively of the stationary electrode (4-2) of inductance capacitance Answer moving electrode (3-2) the same side of electric capacity；And the stationary electrode (4-2) of the stationary electrode (4-1) of the inductance capacitance and inductance capacitance Respectively certain interval is remained with the moving electrode (3-1) of inductance capacitance and the moving electrode (3-2) of inductance capacitance.
- A kind of 5. differential capacitance sensor suitable for moment inspecting according to claim 1, it is characterised in that：It is described Stationary electrode (4-1) position of the moving electrode (3-1) of inductance capacitance and inductance capacitance is mutually perpendicular to, and forms first vertical-electrode type Capacitor；Stationary electrode (4-2) position of the moving electrode (3-2) of the inductance capacitance and inductance capacitance is mutually perpendicular to, and forms second Individual vertical-electrode type capacitor.
- A kind of 6. differential capacitance sensor suitable for moment inspecting according to claim 1 or 5, it is characterised in that： The differential structure vertical-electrode type capacitor is stationary electrode (4) institute of the moving electrode (3) by inductance capacitance and inductance capacitance The first vertical-electrode type capacitor and second vertical-electrode type capacitor formed is formed.
- A kind of 7. differential capacitance sensor suitable for moment inspecting according to claim 1, it is characterised in that：It is described The stationary electrode (4) of inductance capacitance is close to groove (6) place of substrate (5)；The substrate (5) is fixed on the convex of torque output panel (2) On platform (7).
- A kind of 8. differential capacitance sensor suitable for moment inspecting according to claim 1 or 6, it is characterised in that： Outer circular former heart O rotation micro angular displacement of the moving electrode (3) of the inductance capacitance along the torque input disc (1), described one Individual vertical-electrode type condenser capacitance increase (reduction) arrives C1, then another vertical-electrode type condenser capacitance reduce (increase) arrive C2, with C1-C2As the measurement signal of vertical-electrode type capacitance sensor, that is, realize vertical-electrode type capacitor differential measurement Capacitance change, improve sensitivity and the linearity of sensor.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710219063 | 2017-03-29 | ||
| CN201710219063X | 2017-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107421668A true CN107421668A (en) | 2017-12-01 |
Family
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Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710415670.3A Withdrawn CN107421668A (en) | 2017-03-29 | 2017-06-05 | A kind of differential capacitance sensor suitable for moment inspecting |
| CN201720643311.9U Expired - Fee Related CN207280646U (en) | 2017-03-29 | 2017-06-05 | A kind of differential capacitance sensor suitable for moment inspecting |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720643311.9U Expired - Fee Related CN207280646U (en) | 2017-03-29 | 2017-06-05 | A kind of differential capacitance sensor suitable for moment inspecting |
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| Country | Link |
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| CN (2) | CN107421668A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107421668A (en) * | 2017-03-29 | 2017-12-01 | 广西大学 | A kind of differential capacitance sensor suitable for moment inspecting |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1044853A (en) * | 1990-02-19 | 1990-08-22 | 许建平 | Capacitance type angular-displacement sensor for detecting directional inclination |
| JP2001255217A (en) * | 2000-03-09 | 2001-09-21 | Koyo Seiko Co Ltd | Torque sensor |
| CN201344846Y (en) * | 2009-01-19 | 2009-11-11 | 中国计量学院 | Dynamic torque sensor based on capacitors |
| CN102589792A (en) * | 2011-01-13 | 2012-07-18 | 发那科株式会社 | Capacitance-type force sensor |
| CN103430000A (en) * | 2011-07-27 | 2013-12-04 | 三角力量管理株式会社 | Dynamic sensor |
| US8893563B1 (en) * | 2014-01-15 | 2014-11-25 | King Fahd University Of Petroleum And Minerals | Differential capacitance torque sensor |
| US20150292969A1 (en) * | 2014-04-14 | 2015-10-15 | Research & Business Foundation Sungkyunkwan University | Capacitive type 6-axial force/torque sensor |
| CN207280646U (en) * | 2017-03-29 | 2018-04-27 | 广西大学 | A kind of differential capacitance sensor suitable for moment inspecting |
-
2017
- 2017-06-05 CN CN201710415670.3A patent/CN107421668A/en not_active Withdrawn
- 2017-06-05 CN CN201720643311.9U patent/CN207280646U/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1044853A (en) * | 1990-02-19 | 1990-08-22 | 许建平 | Capacitance type angular-displacement sensor for detecting directional inclination |
| JP2001255217A (en) * | 2000-03-09 | 2001-09-21 | Koyo Seiko Co Ltd | Torque sensor |
| CN201344846Y (en) * | 2009-01-19 | 2009-11-11 | 中国计量学院 | Dynamic torque sensor based on capacitors |
| CN102589792A (en) * | 2011-01-13 | 2012-07-18 | 发那科株式会社 | Capacitance-type force sensor |
| CN103430000A (en) * | 2011-07-27 | 2013-12-04 | 三角力量管理株式会社 | Dynamic sensor |
| US8893563B1 (en) * | 2014-01-15 | 2014-11-25 | King Fahd University Of Petroleum And Minerals | Differential capacitance torque sensor |
| US20150292969A1 (en) * | 2014-04-14 | 2015-10-15 | Research & Business Foundation Sungkyunkwan University | Capacitive type 6-axial force/torque sensor |
| CN207280646U (en) * | 2017-03-29 | 2018-04-27 | 广西大学 | A kind of differential capacitance sensor suitable for moment inspecting |
Non-Patent Citations (1)
| Title |
|---|
| YONG BUM KIM: "A Novel Capacitive type Torque Sensor for Robotic Applications", 2016 IEEE INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS, pages 993 - 998 * |
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| CN207280646U (en) | 2018-04-27 |
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Application publication date: 20171201 |