CN107389459A - A kind of thin film mechanical performance real-time test device - Google Patents
A kind of thin film mechanical performance real-time test device Download PDFInfo
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- CN107389459A CN107389459A CN201710565352.5A CN201710565352A CN107389459A CN 107389459 A CN107389459 A CN 107389459A CN 201710565352 A CN201710565352 A CN 201710565352A CN 107389459 A CN107389459 A CN 107389459A
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- film
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- thin film
- pressure
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- 238000012360 testing method Methods 0.000 title claims abstract description 37
- 239000010409 thin film Substances 0.000 title claims abstract description 21
- 239000010408 film Substances 0.000 claims abstract description 54
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 26
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 26
- 239000010703 silicon Substances 0.000 claims abstract description 26
- 230000003287 optical effect Effects 0.000 claims abstract description 14
- 238000003384 imaging method Methods 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 7
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims description 2
- 238000005286 illumination Methods 0.000 claims description 2
- 238000012856 packing Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 20
- 238000005259 measurement Methods 0.000 abstract description 9
- 210000003454 tympanic membrane Anatomy 0.000 abstract description 9
- 239000000463 material Substances 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007592 spray painting technique Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000009747 swallowing Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
- G01N3/10—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces generated by pneumatic or hydraulic pressure
- G01N3/12—Pressure testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
- G01N3/06—Special adaptations of indicating or recording means
- G01N3/068—Special adaptations of indicating or recording means with optical indicating or recording means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0014—Type of force applied
- G01N2203/0016—Tensile or compressive
- G01N2203/0019—Compressive
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/003—Generation of the force
- G01N2203/0042—Pneumatic or hydraulic means
- G01N2203/0044—Pneumatic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/0641—Indicating or recording means; Sensing means using optical, X-ray, ultraviolet, infrared or similar detectors
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The present invention proposes a kind of thin film mechanical performance real-time test device, belongs to optical measurement mechanics, material mechanical performance technical field of measurement and test.Test device mainly includes laser deflection metrology part, pressure-loaded part, film clamp structure.During test, stepper motor pusher cylinder realizes pressure-loaded, and eardrum deformation occurs for film, while utilizes the amount of deflection of Michelson laser interference principle measurement film.Pressure and amount of deflection are detected by pressure sensor and silicon photocell respectively.Realize that step motor control, data acquisition and host computer communicate using Programmable FPGA, host computer realizes that data show and handled.The present invention combines optical measuring technique and eardrum method principle, can carry out the test of thin film mechanical performance, the elastoplasticity film for having certain reflectance suitable for surface.
Description
Technical field
The present invention combines optical measuring technique and eardrum method principle, proposes a kind of thin film mechanical performance real-time test device, belongs to
Optical measurement mechanics, material mechanical performance technical field of measurement and test.
Background technology
Film is a kind of collection for having excellent power, light, heat, the semi-conducting material of electrical property, being minute mechanical and electrical system device
Condition is created into change and miniaturization.It is often used as the fields such as light emitting diode, field-effect transistor, protective layer, solar cell
Close.Linear one dimensional and planar free standing structure film structure, it is the important component of minute mechanical and electrical system, detection and improvement film
The mechanical property such as the modulus of elasticity of material and residual stress, it is the key for improving thin-film device Stability and dependability.
The method of testing of thin film mechanical performance mainly has pulling method, Nanoindentation, eardrum method etc., and wherein pulling method is scarce
Point is the influence for being difficult to overcome bare terminal end, and film is fragile in installation process；Nanoindentation is difficult to overcome substrate to film
The influence of mechanical property, hardly result in accurate test result；Eardrum method principle is simple, and measurement accuracy is high, overcomes the above two
The shortcomings that kind method, and measuring multiple parameters can be carried out simultaneously, including the modulus of elasticity of film and residual stress etc..
Chinese patent CN106198206A proposes to carry out thin film mechanical performance measurement, test using Digital Speckle Correlation Method
When, it is necessary to carry out image procossing to speckle pattern, complex operation and have delay, obtained deflection value with pressure value corresponding relation not
It is good；Deflection value is to convert to obtain according to projection angle by in-plane displacement, and angle value is difficult to accurately control during test；In order to obtain compared with
Good speckle pattern in film surface, it is necessary to carry out spray painting processing, and film thickness is even more small in micron order, and coating is possible to film
The performance of itself, problems described above, the test result accuracy of this device are difficult to ensure that.
Negger et al. proposes a kind of eardrum of minute yardstick in 2014 on Experimental Mechanics periodicals
Testing program, the 3 D deformation of film is measured using confocal optics microscope combination loading by means of digital image correlation method, existed
Deficiency to be film prepared using micro fabrication, process is complicated.Berdova et al. 2014 is in the Acta Materialia phases
It is proposed that a kind of post rod type Bulge test method measures the mechanical property of nano oxidized aluminium film on periodical, this method has film preparation
The shortcomings that process complexity and the small scope of application.
The content of the invention
It is an object of the invention to provide a kind of thin film mechanical performance real-time test device.
For realize the object of the invention use technical scheme be：
It is an advantage of the invention that：
For the present situation of thin film mechanical performance test device, we utilize optical measuring technique and eardrum method principle, it is proposed that one
Kind thin film mechanical performance real-time test device.The present apparatus, which is applied to surface, the elastoplasticity film of certain reflectance.This test fills
Put that pressure-loaded part is easily controllable and good airproof performance, deflection metrology part measurement accuracy is high, data acquisition and procession it is accurate and
Real-time is good.Without handling film surface during test, test result is more accurate；Pressed using stepper motor and cylinder
Power loads, and pressure process is steady, easily controllable and good airproof performance；Many places are provided with multiaxis Manual micromatic device in test device, just
In quick adjustment before carrying out test；Test device application Michelson laser interference principle carries out deflection metrology, measurement accuracy ratio
It is higher, the amount of deflection of Nano grade can be measured；The sub- gram glass square for being machined with three interfaces is used as pressure chamber, steady pressurization
And pressure value can be accurately detected in real time；Clamping film is engaged using ring flange, specimen stage, rubber washer, good airproof performance and
Test result accuracy is influenceed smaller；Carry out interference fringe information extraction using silicon photocell series resistance, it is accurate and
Real-time is good；Using Programmable (FPGA) to reflecting that the magnitude of voltage of pressure and the voltage signal of silicon photocell are carried out in real time simultaneously
The degree of correspondence of collection, pressure and deflection value is high, and test result is more accurate.Programmable (FPGA) controls stepper motor driver
And communicated with host computer, test device manipulation is convenient, and the experimental data collected is without carrying out complicated processing, Bian Keji
Calculate thin film mechanical performance parameter values.
Brief description of the drawings
Fig. 1 is the overall plan schematic diagram of the present invention.
Fig. 2 is pressure chamber and film clamp structural representation.
Fig. 3 is eardrum method principle schematic.
Fig. 4 is silicon photocell connection diagram.
Embodiment
1-4 further illustrates the concrete structure and embodiment of the present invention below in conjunction with the accompanying drawings：
A kind of thin film mechanical performance real-time test device, including pressure-loaded part, laser deflection metrology part, film folder
Hold structure；
Pressure-loaded part includes stepper motor 1, slide unit 3, cylinder 2, pressurization tracheae 4, pressure chamber 7；
Stepper motor 1 is connected with stepper motor driver 5；
The ball-screw of the output end of stepper motor 1 is fixed on bearing, and slide unit 3 is applied on ball-screw, slide unit 3 with
The piston rod of cylinder 2 is fixedly connected, and cylinder 2 is fixed on bearing, and the output end of cylinder 2 is connected by the tracheae 4 that pressurizes with pressure chamber 7；
Pressure chamber 7 is made up of acrylic crystal square, and inside is machined with first interface 22, the interface of second interface 23 and the 3rd
24, first interface 22 is connected with film clamp structure 9, and second interface 23 is connected with pressurization tracheae 4, and the 3rd interface 24 is connected with pressure
Force snesor 6, wherein pressure sensor 6 and film clamp structure 9 are arranged symmetrically.
Laser deflection metrology part includes laser 10, beam expanding lens 11, Amici prism 12, reference planes mirror 16, imaging
Screen 15, silicon photocell 14；
The first side of Amici prism 12 arrangement corresponding with film clamp structure 9,12 another second side of Amici prism are arranged outside
There are silicon photocell 14 and imaging optical screen 15；
Amici prism 12 the 3rd is disposed with reference planes mirror 16 outside side；
Beam expanding lens 11 and laser 10 are arranged outside the side of Amici prism 12 the 4th；Laser 10 by beam expanding lens 11 to point
The projecting beam of light prism 12, Amici prism 12 separate two-way light beam, and light beam projects the film 26 in film clamp structure 9 all the way
On；Light beam is incident upon on reference planes mirror 16 all the way；The light beam reflected through film 26 and reference planes mirror 16 is thrown through Amici prism
Penetrate on silicon photocell 14 and imaging optical screen 15 and form equal inclination fringe.
Film clamp structure 9 includes ring flange 20, specimen stage 21, screw 25, rubber washer 27；
Ring flange 20 is connected by screw 25 with specimen stage 21；It is provided with ring flange 20 and specimen stage corresponding surface circular recessed
Groove；Film 26 is clamped with two rubber washers 27, is subsequently placed in circular groove fixed.
Reference planes mirror 16 is arranged on Three Degree Of Freedom support 17, it is possible to achieve front and rear, pitching, the adjustment of rotation.
Pressure chamber 7 is placed on the axle manual fine-tuning platforms of XYZR tetra-, realizes the tune of tetra- frees degree of surface XYZR of film 26
It is whole.
Silicon photocell 14 is arranged on adjustable for height pole 13, according to the position at interference fringe center on imaging optical screen 15
Carry out the adjustment of XZ axle both directions；The bright dark detection in interference fringe center is carried out using silicon photocell.
Silicon photocell 14 is connected with resistance 28, and the strong and weak detection of illumination is realized by the magnitude of voltage at detection resistance both ends.
Programmable (FPGA) 19 is additionally provided with, pressure sensor 6 and silicon photocell are gathered using Programmable (FPGA) 19
14 voltage signal；Programmable (FPGA) 19 outputs control signals to stepper motor driver 5；Programmable (FPGA) 19 is also
Communicated to connect with host computer 18.
Embodiment
Correspondence sample stage being sealably coupled on pressure chamber connects hole, and two rubber washers are individually placed into specimen stage and method
In circular groove on blue disk, depth of groove is less than rubber washer thickness, therefore packing ring still has projection after being put into, by film to be measured
It is placed between specimen stage and ring flange, makes two rubber washer bossings by film compression, by eight uniform on ring flange
Hex screw tightens.
Motor driver one end is connected with stepper motor, the other end is connected with FPGA plates, by pressure sensor power line
It is connected with 24V power supplys, signal wire is connected with FPGA plates.Silicon photocell is in series with a resistor, and resistance both ends are measured into drawing for voltage
Outlet is connected to FPGA plates.
Laser is opened, the support and the axle manual fine-tuning platforms of XYZR tetra- of reference planes mirror is adjusted, makes to go out on imaging optical screen
The preferable equal inclination fringe of existing circularity, while laser beam is beaten in the center of film.Silicon photocell is adjusted to interference
The center of striped, when Membrane deflection changes, equal inclination fringe center can produce it is bright it is dark alternately change, often alternately one
It is secondary, amount of deflection changing value be laser half-wavelength, i.e. 316nm.The output current of silicon photocell and light intensity are linear, with etc.
The bright dark change in interference fringe of inclining center, the output current of silicon photocell change, and then the partial pressure for the resistance connected is therewith
Change.
FPGA plates are connected with PC by serial ports, open host computer, click on the start button on host computer, stepper motor
Start to rotate, pressure starts loading, eardrum deformation occurs for film, equal inclination fringe center is bright dark alternately change while carry out.
The voltage signal of silicon photocell and pressure sensor is gathered by FPGA and is transmitted to host computer, and real-time is good, deflection value and pressure
The corresponding relation of value is good, and host computer displaying data in real-time waveform simultaneously stores.Click on the stop button on host computer TT＆C system, step
Stepper motor is stopped operating, and test is completed.
Theoretical model according to Fig. 3, the film under gradual increased pressure value and corresponding pressure is obtained by test and scratched
Degree, the mechanics parameters such as the modulus of elasticity of film are calculated using existing formula.
The course of work
During test, host computer 18 sends " beginning " instruction, and Programmable (FPGA) 19, Programmable are transmitted to by serial ports
(FPGA) 19 control stepper motors 1 start to rotate, and then slide unit 3 drives the piston rod of cylinder 2 to be moved along a straight line, in cylinder 2
Compressed gas flowed by the tracheae 4 that pressurizes to pressure chamber 7, and then the pressure in pressure chamber 7 starts to gradually rise, pressure chamber 7
In first interface 22 at film 26 gradually heaved, the pressure sensor 6 at the 3rd interface 24 detects pressure value in real time.
The light beam after beam expanding lens 11 expands that laser 10 is sent, separates two-way light beam, all the way light through Amici prism 12
Beam is projected on the film 26 in film clamp structure 9, and light beam is incident upon on reference planes mirror 16 all the way；Through film 26 and reference
The light beam that level crossing 16 reflects is incident upon on silicon photocell 14 and imaging optical screen 15 through Amici prism and forms equal inclination fringe.
When film 26 is gradually heaved by the pressure in pressure chamber 7, the motion of " swallowing ", i.e. equal inclination interference can occur for equal inclination fringe
Bright dark alternately change occurs for fringe center.Silicon photocell 14 at fringe center detects bright dark situation of change, electric when bright
Stream is maximum, and electric current is minimum when dark.
The pressure value that pressure sensor 6 detects passes through the size reflection of magnitude of voltage, the bright dark alternately situation of change of interference fringe
Reflect that Programmable (FPGA) 19 gathers two-way voltage simultaneously by the partial pressure size for the resistance connected with silicon photocell 14, and
Host computer 18 is transmitted to by serial ports.Because stepper motor 1 controls and voltage acquisition is by Programmable (FPGA) 19, therefore above-mentioned
Process is carried out simultaneously.
Theoretical model according to Fig. 3, the film under gradual increased pressure value and corresponding pressure is obtained by test and scratched
Degree, the mechanics parameters such as the modulus of elasticity of film are calculated using existing formula.
Claims (8)
- A kind of 1. thin film mechanical performance real-time test device, it is characterised in that：Including pressure-loaded part, laser deflection metrology portion Divide, film clamp structure；Pressure-loaded part includes stepper motor, slide unit, cylinder, pressurization tracheae, pressure chamber；Stepper motor is connected with stepper motor driver；The ball-screw of stepper motor output end is fixed on bearing, and slide unit is applied on ball-screw, and slide unit is lived with cylinder Stopper rod is fixedly connected, and cylinder is fixed on bearing, and cylinder output end is connected by the tracheae that pressurizes with pressure chamber；Pressure chamber is made up of acrylic crystal square, and inside is machined with first interface, second interface and the 3rd interface, first interface Film clamp structure is connected with, second interface is connected with pressurization tracheae, and the 3rd interface is connected with pressure sensor, and wherein pressure passes Sensor and film clamp symmetrical configuration arrangement.
- 2. thin film mechanical performance real-time test device according to claim 1, it is characterised in that：Laser deflection metrology part Including laser, beam expanding lens, Amici prism, reference planes mirror, imaging optical screen, silicon photocell；Amici prism first side arrangement corresponding with film clamp structure, the another second side of Amici prism are disposed with silicon photocell outside With imaging optical screen；Amici prism the 3rd is disposed with reference planes mirror outside side；Beam expanding lens and laser are arranged outside the side of Amici prism the 4th；Laser by beam expanding lens to Amici prism projecting beam, Amici prism separates two-way light beam, and light beam is projected on the film in film clamp structure all the way；Light beam is incident upon reference all the way On level crossing；Simultaneously shape is incident upon on silicon photocell and imaging optical screen through Amici prism through the light beam that film and reference planes mirror reflect Into equal inclination fringe.
- 3. thin film mechanical performance real-time test device according to claim 1, it is characterised in that：Film clamp structure includes ring flange, specimen stage, screw, rubber washer；Ring flange is connected by screw with specimen stage；Circular groove is provided with ring flange and specimen stage corresponding surface；With two rubber Film clamp is subsequently placed in circular groove fixed by packing ring.
- 4. thin film mechanical performance real-time test device according to claim 1, it is characterised in that：Reference planes mirror is arranged on On Three Degree Of Freedom support, it is possible to achieve front and rear, pitching, the adjustment of rotation.
- 5. thin film mechanical performance real-time test device according to claim 1, it is characterised in that：Pressure chamber is placed on XYZR On four axle manual fine-tuning platforms, the adjustment of tetra- frees degree of film surface XYZR is realized.
- 6. thin film mechanical performance real-time test device according to claim 1, it is characterised in that：Silicon photocell is arranged on height Spend on adjustable pole, the adjustment of XZ axle both directions is carried out according to the position at interference fringe center on imaging optical screen；Use silicon Photocell carries out the bright dark detection in interference fringe center.
- 7. described thin film mechanical performance real-time test device is required according to right 1, it is characterised in that：Silicon photocell and resistance string Connection, the strong and weak detection of illumination is realized by the magnitude of voltage at detection resistance both ends.
- 8. thin film mechanical performance real-time test device according to claim 1, it is characterised in that：It is additionally provided with Programmable, The voltage signal of pressure sensor and silicon photocell is gathered using Programmable；Programmable outputs control signals to stepper motor Driver；Programmable also communicates to connect with host computer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710565352.5A CN107389459A (en) | 2017-07-12 | 2017-07-12 | A kind of thin film mechanical performance real-time test device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710565352.5A CN107389459A (en) | 2017-07-12 | 2017-07-12 | A kind of thin film mechanical performance real-time test device |
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| Publication Number | Publication Date |
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| CN107389459A true CN107389459A (en) | 2017-11-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710565352.5A Pending CN107389459A (en) | 2017-07-12 | 2017-07-12 | A kind of thin film mechanical performance real-time test device |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108181035A (en) * | 2018-02-26 | 2018-06-19 | 成都理工大学 | Saddle type membrane structure experimental rig |
| CN112924283A (en) * | 2021-01-29 | 2021-06-08 | 中国石油大学(华东) | Nano-film tensile tester and tensile test method |
| CN113640133A (en) * | 2021-08-11 | 2021-11-12 | 中国工程物理研究院激光聚变研究中心 | Sealing film mechanical property testing device based on expansion method |
| CN114441326A (en) * | 2021-12-31 | 2022-05-06 | 天津大学 | Multifunctional thin film material bulging testing device |
| CN117451525A (en) * | 2023-12-22 | 2024-01-26 | 国机传感科技有限公司 | System and method for testing rigidity of pressure sensor diaphragm |
| CN117890043A (en) * | 2024-03-15 | 2024-04-16 | 山东省汶上县丝杠有限责任公司 | Bending deflection detection device and method for ball screw |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108181035A (en) * | 2018-02-26 | 2018-06-19 | 成都理工大学 | Saddle type membrane structure experimental rig |
| CN108181035B (en) * | 2018-02-26 | 2023-12-08 | 成都理工大学 | Saddle-shaped film structure test device |
| CN112924283A (en) * | 2021-01-29 | 2021-06-08 | 中国石油大学(华东) | Nano-film tensile tester and tensile test method |
| CN112924283B (en) * | 2021-01-29 | 2023-09-08 | 中国石油大学(华东) | Nanometer film stretching experiment instrument and stretching experiment method |
| CN113640133A (en) * | 2021-08-11 | 2021-11-12 | 中国工程物理研究院激光聚变研究中心 | Sealing film mechanical property testing device based on expansion method |
| CN113640133B (en) * | 2021-08-11 | 2024-05-07 | 中国工程物理研究院激光聚变研究中心 | Sealing film mechanical property testing device based on expansion method |
| CN114441326A (en) * | 2021-12-31 | 2022-05-06 | 天津大学 | Multifunctional thin film material bulging testing device |
| CN114441326B (en) * | 2021-12-31 | 2024-03-12 | 天津大学 | Multifunctional film material bulging testing device |
| CN117451525A (en) * | 2023-12-22 | 2024-01-26 | 国机传感科技有限公司 | System and method for testing rigidity of pressure sensor diaphragm |
| CN117890043A (en) * | 2024-03-15 | 2024-04-16 | 山东省汶上县丝杠有限责任公司 | Bending deflection detection device and method for ball screw |
| CN117890043B (en) * | 2024-03-15 | 2024-05-24 | 山东省汶上县丝杠有限责任公司 | Bending deflection detection device and method for ball screw |
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Application publication date: 20171124 |