CN1673666A - Micro-structural 3D information obtaining method based on phase shifting interference image sequence analysis - Google Patents
Micro-structural 3D information obtaining method based on phase shifting interference image sequence analysis Download PDFInfo
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Abstract
The present invention discloses the micro structure 3D information extracting method based on phase shift interference image analysis and capable of being used in phase shift interference system. The method features that phase shift interference image sequence is superposed to extract micro structure planar image without interference fringe directly for planar geometric parameter test, and performing edge extraction and binarization on the said planar image obtains the template image of the measured area for phase expansion operation of the phase shift interference image sequence obtaining off-plane height image. The method may be combined with strobe imaging or high speed photographic technology to obtain planar image sequence containing motion information and surface height image sequence of the measured area and further to extract planar and off-line motion parameters via image matching algorithm and height information comparison.
Description
Technical field
The present invention relates to a kind of micro-structural 3 D information obtaining method based on phase shifting interference image sequence analysis.Belong to towards the geometric sense and the mechanical value measuring technology of the photoelectricity noncontact method of MEMS (micro electro mechanical system).
Background technology
MEMS (micro electro mechanical system) (MEMS) is to grow up on the basis of microelectric technique, the integrated device or the system that form by electronics and mechanical organ, adopt with the mass disposal technology of integrated circuit compatibility and make, size arrives between the millimeter at micron, calculating, sensing and execution are combined together, thereby changed perception and the natural mode of control.Most of manufacturing process of MEMS (micro electro mechanical system) (MEMS) and the processing technology of microelectronics technology are compatible mutually, and its micro mechanical structure is generally three-dimensional, and a considerable amount of MEMS device comprises movable structure, and this is the maximum difference with microelectronic component.
From test angle, the test of three-dimensional micro mechanical structure geometric sense comprises the plane and from the test of face geometric parameter; Movable micro mechanical structure distributes according to the coordinate of motion among the MEMS, also can be divided into plane motion parameter testing and off-plane movement parameter testing.
Optical test method is used widely in the MEMS field tests owing to its noncontact, quick, precision advantages of higher.Because the dwindling of size, the motion frequency of most microstructures be all than higher, generally about 50K～500KHz, in addition higher.Utilize optical means to carry out the microstructure test, effective method is to obtain its motion change in location of moment, directly method is to adopt high-speed camera to carry out the image acquisition of transient motion state, another round-about way is to adopt the stroboscopic imaging technique, and it is the common camera of tens frames that this technology can adopt the per second images acquired.Because the single stroboscopic can not obtain enough light intensity and carry out imaging, therefore need carry out the imaging of several times stroboscopic to same movement moment, the image that video camera obtains comes from the summation of light intensity under the several times stroboscopic illumination, and this also just requires tested microstructure to carry out the very high periodic motion of repeatability.
Can obtain comprising the image sequence of the movable information of microstructure plane motion each moment by high-speed camera or stroboscopic imaging method, can extract microstructure plane geometry parameter to each width of cloth image, the utilization image matching technology can extract microstructure plane motion parameter from image sequence; Can obtain the three-dimensional appearance of micro-structure surface by optical interference techniques, can obtain microstructure in conjunction with high-speed camera or stroboscopic imaging technique equally and change, wherein comprise microstructure plane and off-plane movement parameter information because of kinetic three-dimensional appearance.
Can obtain its plane geometry parameter and kinematic parameter to direct high speed imaging of microstructure or stroboscopic imaging method, though also can use up the method for cutting, promptly gather the surface image under the different focal planes, can obtain geometric parameter and kinematic parameter, but its precision is lower from face.The method of utilizing optical interference and high speed imaging or stroboscopic imaging to combine can obtain micro-structural 3 D pattern and movable information, by analysis-by-synthesis and comparison to prior art, mainly there is the problem of following several respects in actual applications in the technical scheme of being reported at present: microstructure can reach tens even the hundreds of micron in the range of size from face in (1) MEMS device, general monochromatic light interference technique generally has only several microns in the measurement range from face, therefore under whole visual field, can only could form interference fringe, promptly can not obtain the three-dimensional appearance of microstructure under the whole visual field in certain zone; (2) though wherein the microstructures of overwhelming majority motion from the scope of face physical dimension and motion amplitude at several microns, adjustable full employment distance makes the micro-structure surface of motion form interference fringe, the edge that interference fringe disappears generally comprises face profile and movable information, but when utilization phase shift interference method, need successively carry out phase extraction and phase unwrapping step, the failure that the edge interference data causes three-dimensional appearance to extract easily, general all the needs goes to select the zone of inside, edge to carry out the interference fringe processing artificially, and losing of image edge information will make plane geometry amount parameter and kinematic parameter not to extract; (3) the white light scanning interferometer can obtain the big surface topography of height change scope, but directly utilizes three-dimensional appearance to extract the algorithm complexity of plane geometry parameter and movable information, and precision is lower.Having article to be reported in increases by an adjustable dimmer on the reference path in the interferometry, the advantages of direct imaging and optical interferometry can be got up, when dimmer is worked, be the direct imaging working method, can obtain plane geometry parameter and kinematic parameter, when dimmer is not worked, be the interferometry mode, the planar structure that direct imaging obtains can be used for the phase extraction and the expansion of interference image, can obtain from face geometric parameter and kinematic parameter; But the combination of above-mentioned two kinds of metering systems requires to carry out respectively twice measurement, image and interference image that direct imaging obtains must be set up one-to-one relationship, this realizes in static measurement easily, but in motion measurement, introduce synchronous error easily, and can only be applicable to separation optical interference circuit structure, as: micro-phase shift optical interference circuit of Michelson (Michelson) and the micro-phase shift optical interference circuit of Lin Nike (Linnik), inapplicable to the Mirau light channel structure of compact conformation.
Summary of the invention
The object of the present invention is to provide the 3-D information fetching method of microstructure in a kind of MEMS (micro electro mechanical system) (MEMS) based on micro-phase shifting interference image sequence analysis, not only can be used for static geometric parameter measurement, and the available motion parameter measurement, and solve phase extraction and the expansion and the three-dimensional motion exact solution coupled problem of irregular micro structure effectively.
The present invention is realized by following technical proposals, employing comprises optical microscope, Mirau interference objective, phase shift controller, ccd video camera, image pick-up card, data processing and control computer, the micro-phase shift interference system of the typical Mirau hardware of microstructure motion-activated drive unit, stroboscopic light source or high-speed camera, based on the phase shifting interference image sequence analysis method, realize extracting the method for the three-dimensional information of microstructure in the MEMS (micro electro mechanical system) (MEMS), it is characterized in that may further comprise the steps:
(1) adjust be placed on the optical microscope objective table by the upright position of micro-measuring structure, make that interference fringe appears in tested zone under the microscopic field of view, this moment, phase shift controller was in initial position, utilized the interference image under the ccd video camera acquisition field of view;
(2) step number that phase shift is set is 4 multiple, calculates step pitch=monochromatic source optical wavelength/(2 * phase shift step number) of phase shift, make finish the phase shift that step number is set after, the light and shade that each gray values of pixel points produces one-period in the interference image changes;
(3) after each phase shift, utilize the interference image under the microscopic fields of view of ccd video camera collection light path change back; After finishing phase shift, comprise initial position, obtain phase shift step number+1 width of cloth interference image;
(4) interference image of final phase shift position is preserved separately, other interference images are formed new phase shifting interference image sequence 1, interference image after all interference images in the new sequence or the fringe contrast normalized is carried out linear superposition, eliminate interference fringe, obtain by the plane picture of micro-measuring structure;
(5) edge in the plane picture of microstructure is carried out spacing and the relative position analysis just can obtain the plane geometry parameter;
(6) degree of comparing in the plane picture of microstructure is strengthened and edge extracting, just can obtain having the occluding contour in the tested zone of interference fringe, carry out binaryzation then: the closed region is filled to 1, and the perimeter is filled to 0, and the image after the above-mentioned processing is stored as template image;
(7) according to the corresponding requirements of employing phase shift extraction algorithm to phase shift control, from all interference images, choose the interference image of respective amount, form phase shifting interference image sequence 2, according to the phase shift extraction algorithm selected interference image is carried out the phase shift extraction and calculate phase diagram;
(8) each pixel in the template image of phase diagram and binaryzation is multiplied each other, obtain local weighted phase diagram, the weight that is tested zone is 1, other region weight is 0, and the path following algorithm that tested zone utilization is judged based on residual carried out phase unwrapping, and calculate the surface topography in tested zone;
(9) to carried out the periodic motion excitation by micro-measuring structure, the frequency of operation of stroboscopic light source is identical with motion frequency, the different stroboscopics that constantly carry out in periodic motion, under identical stroboscopic condition, carry out the collection and the parsing of the phase shifting interference image sequence of above step, constantly just can obtain the surface topography sequence in microstructure plane picture sequence and tested zone corresponding to different stroboscopics, just can obtain the plane motion parameter to the plane picture sequence by images match, the surface topography and the plane motion displacement in tested zone are carried out relatedly just can obtaining the off-plane movement parameter.
The invention has the advantages that: phase shifting interference image can obtain high-precision from the face elevation information, utilize therefrom filtering interference fringe of phase shifting interference image sequence analysis, obtain the microstructure plane picture, also can realize the test of the plane geometry and the kinematic parameter of inferior pixel precision simultaneously; Utilize the microstructure plane picture can extract the closed edge in tested zone, strengthen the correctness of interference image phase unwrapping and the power of test of irregular test zone, thereby improve accuracy from the extraction of face height and movable information.
Description of drawings
Fig. 1 is based on the micro-structural 3 D information obtaining method process flow diagram of phase shifting interference image sequence analysis;
Fig. 2 is based on the typical application system block diagram of the micro-structural 3 D information obtaining method of phase shifting interference image sequence analysis;
Fig. 3 micro-resonator interference image;
The micro-resonator plane picture of Fig. 4 after based on phase shifting interference image sequence analysis;
The template image that Fig. 5 micro-resonator plane picture obtains;
Fig. 6 micro-resonator wrapped phase image;
Fig. 7 micro-resonator surface topography image;
Fig. 8 stroboscopic illumination realizes the signal timing diagram of high frequency motion parameter measurement.
Embodiment
Embodiment 1:
Present embodiment is mainly paid close attention to the generation of the template image that utilizes phase shifting interference image sequence analysis to obtain the extraction of microstructure plane picture, plane information and be used for extracting from surface information.
Fig. 2 is the micro-structural 3 D information obtaining method canonical system block diagram in concrete enforcement based on phase shifting interference image sequence analysis.
In this embodiment, micro-resonator is as test component, and the step number of phase shift is set to 16, and the wavelength of led light source is 617nm, and the displacement that calculates per step phase shift is λ/32=19.3nm.
Initial position state at phase shift controller utilizes the interference image under the ccd video camera acquisition field of view, as shown in Figure 3.Step-by-step movement control phase shift controller, step pitch is 19.3nm, utilizes the interference image under the ccd video camera acquisition field of view after each control is finished.Can obtain 17 width of cloth interference image F after finishing 16 step phase shifts
0(x, y)～F
16(x, y).
Preceding 16 width of cloth interference images are superposeed, i.e. image after the stack
As shown in Figure 4, can find out that interference fringe is by filtering, promptly obtain the plane picture of micro-resonator, this image degree of comparing has been strengthened, utilized edge contour information just can obtain the plane geometry parameter of micro-resonator: as: the length of prong, width and relative position etc.; Continuation is carried out edge extracting to plane picture, just can obtain the outline line of structure, and the zone of central motion structure is filled to 1, and the perimeter is filled to 0, obtains template image F
Templet(x, y), as shown in Figure 5.The place carries out above processing in the different motion phase place, just can obtain plane picture and template image sequence, the relative position of feature structure in the plane picture is analyzed just can be extracted plane motion parameter (Δ x, Δ y, Δ θ).
In order to improve the interference image stack to eliminate the signal to noise ratio (S/N ratio) of interference fringe, available quadric surface match draws the maximum gray scale enveloping surface F of interference fringe grey scale change
I, max(x is y) with minimal gray enveloping surface F
I, min(x y), gets the maximum spacing of two enveloping surfaces, is respectively I in enveloping surface corresponding gray separately
MaxAnd I
Min, original interference fringe striped is carried out normalized, its computing formula is:
At last normalized image is carried out linear superposition,
Can obtain the plane and have template image under the distortion situation even more than handle.There is the rigid plane motion if suppose microstructure,, can carries out original template image F to the plane picture that is parsed under stationary state or one of them motion phase earlier in order to simplify processing
Templet(x y) extracts, and the template image at other motion phase places is directly used the plane motion parameter that is extracted that characteristic area in the original template image is moved and obtained, i.e. translation (Δ x, Δ y), rotation Δ θ.
Embodiment 2:
Present embodiment is mainly paid close attention to the template image that utilizes phase shifting interference image sequence and embodiment 1 to obtain and is carried out the extraction of microstructure from surface information.
Adopt 5 step phase extraction algorithms in the present embodiment, therefore from embodiment 1, select 5 width of cloth interference images, sequence number difference 0,4,8,12,16, that is: F in the sequence of resulting 17 width of cloth phase shifting interference images
0, F
4, F
8, F
12, F
16, and renumber and be 1-5, be: I
1, I
2, I
3, I
4, I
5, the computing formula of phase diagram is:
The phase diagram F that calculates
PhaseAs shown in Figure 6, this phase diagram is wrapped phase figure, in order to extract from surface information, must carry out phase unwrapping.Owing in entire image, have only tested zone that interference fringe is arranged, entire image is carried out phase unwrapping mistake can occur, utilize for this reason that resulting template image shown in Figure 5 intercepts phase diagram among the embodiment 1, computing formula is
New(x, y)= (x, y) F
Templet(x y), utilizes path following algorithm to carry out phase unwrapping then, obtains the surface elevation pattern in tested zone as shown in Figure 7.Path following algorithm adopts based on residual removal method carries out the phase unwrapping judgement, and the computing formula of residual is
Select in the present embodiment to constitute minimum closed-loop path by four adjacent image points, be M=N=2, when calculating residual and be 0, the phase place that shows this point is correct, carrying out conventional phase launches, otherwise be labeled as bad data, so just can realize only valid data being carried out phase unwrapping, just can finish the phase unwrapping of entire image by traversal.The conventional phase deployment step that is adopted in the present embodiment is:
1) selects a fixed threshold T, such as 1.2 π less than 2 π;
2) is set earlier
0(x
0, y)=0, begin by i=0 then, carry out following operation:
3) calculate adjacent phase differential at 2:
Δ(x
i，y)＝(x
i，y)-(x
i-1，y)
4) judge | Δ | 〉=T?
If | Δ |＜T,
0(x
i, y)=
0(x
I-1, y); Otherwise
5) repeat 3), 4) operation, until end.
For the Y direction, also can do similar processing.
Embodiment 3:
Present embodiment is mainly paid close attention to and is utilized phase shifting interference image sequence analysis to carry out the extraction of three-dimensional motion of microstructure information.
In the present embodiment, micro-resonator is as test component, and by sinusoidal wave electric signal excitation generation motion, the frequency of motion-activated signal is 20kHz, bias voltage is 20V, crest voltage is 160V, produces cyclic movement on the Y direction, and causes producing coupled motions at X and Z direction because of the imperfectization factor of the skew of position and processing.
The signal sequence that stroboscopic illumination realizes the high frequency motion parameter measurement as shown in Figure 8, the time delay of two signals is by measuring and control computer control, the delay of two signals when only having enumerated 0 ° and 30 ° of motion phase plane motion image acquisition among the figure.The motion-activated signal is the sinusoidal signal in cycle, and the stroboscopic drive signal is a positive pulse, and its width is about 1 microsecond, appear at the particular phases place in each cycle, and repeat 1000 times, ccd video camera is gathered the image under the optical microscope visual field, and the time shutter is the T.T. of stroboscopic 1000 times.
The imaging of utilization stroboscopic, can think certain of periodic motion has been carried out " freezing " in a flash, should can see stationary state as by " freezing " state, can use embodiment 1 and implementation column 2 described micro-resonator stationary state lower planes and handle from the extracting method of surface information, obtain plane picture and tested zone from the face height image.
By adjusting the time delay of stroboscopic and motion-activated signal, can respectively the some moments in the periodic motion be carried out " freezing ", all can obtain plane picture and from the face height image in each " frozen state ".The plane picture sequence is carried out images match, comprise image block coupling, relevant, the optical flow field of phase place, can obtain the plane motion displacement and the anglec of rotation; Utilize the plane motion displacement and the anglec of rotation to adjusting, set up and pass through pixel in the face height image from the relative position of face height image sequence
In sum, by determining the plane motion parameter of micro-resonator among the embodiment 1 based on the method for images match, and come in the conduct example 2 just can to obtain the micro-resonator three-dimensional motion parameter based on the off-plane movement analysis of phase shift interference technology with this.
Claims (1)
1. micro-structural 3 D information obtaining method based on phase shifting interference image sequence analysis, employing comprises optical microscope, Mirau interference objective, phase shift controller, ccd video camera, image pick-up card, data processing and control computer, the micro-phase shift interference system of the typical Mirau hardware of microstructure motion-activated drive unit, stroboscopic light source or high-speed camera, realize extracting the three-dimensional information of microstructure in the MEMS (micro electro mechanical system), it is characterized in that may further comprise the steps:
(1) adjust be placed on the optical microscope objective table by the upright position of micro-measuring structure, make the tested zone of microscopic field of view interference fringe occur, this moment, phase shift controller was in initial position, utilized the interference image under the ccd video camera acquisition field of view;
(2) step number that phase shift is set is 4 multiple, calculates step pitch=monochromatic source optical wavelength/2 * phase shift step number of phase shift, make finish the phase shift that step number is set after, the light and shade that each gray values of pixel points produces one-period in the interference image changes;
(3) after each phase shift, utilize the interference image under the microscopic fields of view of ccd video camera collection light path change back; After finishing phase shift, comprise initial position, obtain phase shift step number+1 width of cloth interference image;
(4) interference image of final phase shift position is preserved separately, other interference images are formed new phase shifting interference image sequence 1, interference image after all interference images in the new sequence or the fringe contrast normalized is carried out linear superposition, eliminate interference fringe, obtain by the plane picture of micro-measuring structure;
(5) edge in the plane picture of microstructure is carried out spacing and the relative position analysis just can obtain the plane geometry parameter;
(6) degree of comparing in the plane picture of microstructure is strengthened and edge extracting, just can obtain having the occluding contour in the tested zone of interference fringe, carry out binaryzation then: the closed region is filled to 1, and the perimeter is filled to 0, and the image after the above-mentioned processing is stored as template image;
(7) according to the corresponding requirements of employing phase shift extraction algorithm to phase shift control, from all interference images, choose the interference image of respective amount, form phase shifting interference image sequence 2, according to the phase shift extraction algorithm selected interference image is carried out the phase shift extraction and calculate phase diagram;
(8) each pixel in the template image of phase diagram and binaryzation is multiplied each other, obtain local weighted phase diagram, the weight that is tested zone is 1, other region weight is 0, and the path following algorithm that tested zone utilization is judged based on residual carried out phase unwrapping, and calculate the surface topography in tested zone;
(9) to carried out the periodic motion excitation by micro-measuring structure, the frequency of operation of stroboscopic light source is identical with motion frequency, the different stroboscopics that constantly carry out in periodic motion, under identical stroboscopic condition, carry out the collection and the parsing of the phase shifting interference image sequence of above step, constantly just can obtain the surface topography sequence in microstructure plane picture sequence and tested zone corresponding to different stroboscopics, just can obtain the plane motion parameter to the plane picture sequence by images match, the surface topography and the plane motion displacement in tested zone are carried out relatedly just can obtaining the off-plane movement parameter.
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