CN107364853A - The graphene transfer method of the low damage of large area on a kind of flexible material based on boundary layer hot pressing separation - Google Patents

The graphene transfer method of the low damage of large area on a kind of flexible material based on boundary layer hot pressing separation Download PDF

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Publication number
CN107364853A
CN107364853A CN201710711900.0A CN201710711900A CN107364853A CN 107364853 A CN107364853 A CN 107364853A CN 201710711900 A CN201710711900 A CN 201710711900A CN 107364853 A CN107364853 A CN 107364853A
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CN
China
Prior art keywords
boundary layer
graphene
flexible substrate
hot pressing
flexible
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Pending
Application number
CN201710711900.0A
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Chinese (zh)
Inventor
张安平
杨明超
陈家玉
赵炎
魏葳
张晓东
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Shaanxi Coal and Chemical Technology Institute Co Ltd
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Xian Jiaotong University
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Priority to CN201710711900.0A priority Critical patent/CN107364853A/en
Publication of CN107364853A publication Critical patent/CN107364853A/en
Pending legal-status Critical Current

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Abstract

The present invention is a kind of graphene transfer method of the low damage of large area on flexible substrates based on boundary layer hot pressing separation.Specifically include and flexible substrate is surface-treated using plasma, react to form boundary layer by the surface of self-organizing on flexible substrate surface.The graphene being grown in metal substrate is combined with the boundary layer in flexible substrate, is reacted under specific temperature and pressure, is formed the combination of firm graphene and flexible substrate, afterwards peel off metal substrate.Utilized it is an advantage of the invention that reducing time loss and can ensure that metallic substrates are repeatable simultaneously, and the graphene transfer of large-area high-quality can be carried out, realize lossless transfer of the large-area graphene on flexible material.

Description

The graphite of the low damage of large area on a kind of flexible material based on boundary layer hot pressing separation Alkene transfer method
Technical field
The invention belongs to material preparation and manufacture field, and in particular to a kind of flexible material based on boundary layer hot pressing separation The graphene transfer method of the low damage of upper large area, especially a kind of dry method rapid large-area transfer graphene method.
Background technology
Graphene (Graphene) be one kind by carbon atom with sp2The cellular quasi- two-dimensional material that hybrid form is formed, tool There is very outstanding physical and chemical performance, there is huge development potentiality in fields such as materialogy, microelectronics and Aero-Space.Stone The light transmittance of black alkene is high, conducts electricity very well, and is the important transparent electrode material for manufacturing Flexible Displays, in addition, shifts soft Graphene on property substrate, can be applied in wearing, energy-conserving and environment-protective, many aspects such as environmental protection.
At present, graphene film typically passes through chemical vapor deposition (CVD) method catalytic growth on transition metal.CVD The graphene film area of preparation is big, quality is high, the number of plies is controllable, is prepared by current low-cost and high-quality large-area graphene film Main method.Grow obtained graphene film and metal substrate surface, traditional transfer side are incorporated in by Van der Waals force Method poor repeatability, substrate utilization rate is low, and the graphene damage being transferred in flexible substrate is big, and this has had a strong impact on grapheme material Application.
The content of the invention
In order to overcome the above-mentioned deficiencies of the prior art, separated it is an object of the invention to provide one kind based on boundary layer hot pressing Flexible material on the low damage of large area graphene transfer method.
To achieve these goals, the technical solution adopted by the present invention is:
A kind of graphene transfer method of the low damage of large area on flexible substrates based on boundary layer hot pressing separation, it is special Sign is, flexible substrate is surface-treated using plasma, anti-by the surface of self-organizing on flexible substrate surface Boundary layer should be formed.The graphene being grown in metal substrate is combined with the boundary layer in flexible substrate, in specific temperature With reacted under pressure, form the combination of firm graphene and flexible substrate, afterwards peel off metal substrate.
The flexible substrate includes but is not limited to polyethylene terephthalate (pet) and polystyrene (PS) material.
It is described to be passed through the gases such as carbon monoxide, carbon dioxide when being surface-treated using plasma to flexible substrate, In flexible substrate Surface Creation functional group.
By the stacking nitride of flexible material surface coating one of corona treatment, react to form boundary layer by surface, The graphene being grown in metal substrate is combined with the boundary layer in flexible substrate.Apply temperature and be less than 20-200 DEG C, pressure For 100-1000psi, time 10-60min.
After firm chemical bond is formed between graphene and flexible substrate, pass through external force, mechanical stripping metal substrate.
Compared with prior art, it is an advantage of the invention that reducing time loss and can ensure that metallic substrates repeat simultaneously Utilize, and the graphene transfer of large-area high-quality can be carried out, realize that large-area graphene is lossless on flexible material Transfer.
Brief description of the drawings
Fig. 1 is grown in the graphene schematic diagram on copper foil.
Boundary layer schematic diagram is formed on Fig. 2 flexible substrates PET.
Boundary layer combination schematic diagram on graphene and PET on Fig. 3 copper foils.
Fig. 4 peels off copper foil schematic diagram.
Fig. 5 be the present invention prepare general flow chart.
Embodiment
Describe embodiments of the present invention in detail with reference to the accompanying drawings and examples.
Copper foil 2 is placed in growth graphene 1 in LPCVD equipment, temperature is 1030 DEG C, methane flow 1sccm, hydrogen stream 300sccm, time 1h are measured, as shown in Figure 1.
PET substrate 4 is placed in plasma chamber room, vacuumizes afterwards and is passed through 10sccm CO2Gas, apply 70W work( Rate, time 5min.The functional groups such as hydroxyl, carboxyl occur in the surface of PET substrate 4 after corona treatment.
N- ethyl oxyethylamine -4- nitrine tetrafluoros benzoate is coated in the plasma treated table of PET substrates 4 Face, to form boundary layer 3, as shown in Figure 2.
As shown in figure 3, the graphene 1 being grown on copper foil 2 is bonded with PET boundary layers 3, it is put into bonder and applies 500psi pressure 30min.After hot-pressing processing, the interface of graphene 1 and PET substrate 4 forms the chemical bond of high intensity.
After interface stability, by external force mechanical stripping copper foil substrate 2, obtain shifting the large area in flexible substrate 4 Graphene 1, as shown in Figure 4.
Main-process stream such as Fig. 5 of the present invention.

Claims (6)

1. the graphene transfer method of the low damage of large area, its feature exist on a kind of flexible material based on boundary layer hot pressing separation In being surface-treated using plasma to flexible substrate, react shape by the surface of self-organizing on flexible substrate surface Into boundary layer, the graphene being grown in metal substrate is combined with the boundary layer in flexible substrate, in specific temperature and pressure Reacted under power, form the combination of firm graphene and flexible substrate, afterwards peel off metal substrate.
2. the graphene transfer of the low damage of large area on the flexible material according to claim 1 based on boundary layer hot pressing separation Method, it is characterised in that the flexible substrate is polyethylene terephthalate (pet) or polystyrene (PS) material.
3. the graphene transfer of the low damage of large area on the flexible material according to claim 1 based on boundary layer hot pressing separation Method, it is characterised in that when being surface-treated using plasma to flexible substrate, be passed through carbon monoxide or carbon dioxide etc. Gas, in flexible substrate Surface Creation functional group.
4. the graphene transfer of the low damage of large area on the flexible material according to claim 1 based on boundary layer hot pressing separation Method, it is characterised in that by the stacking nitride of flexible substrate surface coating one of corona treatment, react to be formed by surface Boundary layer, the graphene being grown in metal substrate is combined with the boundary layer in flexible substrate.
5. the graphene transfer of the low damage of large area on the flexible material according to claim 1 based on boundary layer hot pressing separation Method, it is characterised in that 20-200 DEG C of the reaction temperature, pressure 100-1000psi, time 10-60min.
6. the graphene transfer of the low damage of large area on the flexible material according to claim 1 based on boundary layer hot pressing separation Method, it is characterised in that after firm chemical bond is formed between graphene and flexible substrate, pass through external force, mechanical stripping gold Belong to substrate.
CN201710711900.0A 2017-08-18 2017-08-18 The graphene transfer method of the low damage of large area on a kind of flexible material based on boundary layer hot pressing separation Pending CN107364853A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111845003A (en) * 2020-06-18 2020-10-30 华中科技大学 Controllable hot-pressing implementation method of nano material

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120244358A1 (en) * 2011-03-22 2012-09-27 Lock Evgeniya H Dry Graphene Transfer from Metal Foils

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120244358A1 (en) * 2011-03-22 2012-09-27 Lock Evgeniya H Dry Graphene Transfer from Metal Foils

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
EVGENIYA H. LOCK ET AL.: "High-Quality Uniform Dry Transfer of Graphene to Polymers", 《NANO LETT.》 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111845003A (en) * 2020-06-18 2020-10-30 华中科技大学 Controllable hot-pressing implementation method of nano material

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Inventor after: Zhao Yan

Inventor after: Zhang Anping

Inventor after: Yang Mingchao

Inventor after: Chen Jiayu

Inventor after: Wei Wei

Inventor after: Zhang Xiaodong

Inventor after: Tian Zhanyuan

Inventor before: Zhang Anping

Inventor before: Yang Mingchao

Inventor before: Chen Jiayu

Inventor before: Zhao Yan

Inventor before: Wei Wei

Inventor before: Zhang Xiaodong

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Effective date of registration: 20180207

Address after: 710199 room 807, golden antelope mansion, No. 59, Changan District space Avenue, Xi'an, Shaanxi

Applicant after: Shaanxi Coal and Chemical Technology Institute Co., Ltd.

Applicant after: Xi'an Jiaotong University

Address before: Beilin District Xianning West Road 710049, Shaanxi city of Xi'an province No. 28

Applicant before: Xi'an Jiaotong University

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Application publication date: 20171121

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