CN107354445A - A kind of bearing fixture for sputter coating - Google Patents
A kind of bearing fixture for sputter coating Download PDFInfo
- Publication number
- CN107354445A CN107354445A CN201710716839.9A CN201710716839A CN107354445A CN 107354445 A CN107354445 A CN 107354445A CN 201710716839 A CN201710716839 A CN 201710716839A CN 107354445 A CN107354445 A CN 107354445A
- Authority
- CN
- China
- Prior art keywords
- plate
- intermediate bar
- slot
- frame body
- sputter coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Abstract
The invention discloses a kind of bearing fixture for sputter coating, there is the intermediate bar of connection in square frame body and outer frame body, the outer frame body is formed by fixedly connecting by left plate, upper plate, right plate and lower shoe ending, and the both sides of the left plate, the inner side of upper plate and right plate and intermediate bar are all provided with the slot for being easily installed substrate；The right plate upper hinge is connected with the pressing plate that can be pressed on lower shoe, and the locating slot that fixation clip is provided with pressing plate is corresponded on the left plate；The lead screw device of regulation intermediate bar position is provided between the intermediate bar and right plate, the lead screw device is arranged on the mounting blocks that intermediate bar and right plate are correspondingly arranged.Apparatus of the present invention are simple to operate, convenient, have a wide range of application, and improve operating efficiency.
Description
Technical field
The present invention relates to sputter coating field, especially a kind of bearing fixture for sputter coating.
Background technology
Sputtering is current wide variety of coating technique, is widely used at microelectronics, optical thin film and material surface
In reason field.Substrate used can be glass, silicon chip, metal-back, acrylic etc.；During sputter coating, it would be desirable to the base of sputtering
Plate is placed on the slot of bearing substrate tool, realizes the process of plated film.And conventional tool is mostly single for size
The fixed dimension tool of substrate design, just need to design more set bearing fixtures for the substrate without size, increase cost, in addition
In order to prevent the substrate being pushed into slot from being dropped in sputter procedure, have what is loaded and unloaded by screw in the porch increase that pushes away of slot
Block, so as to add process, operation inconvenience, lose time.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of carrying that size regulation can be carried out for different sputtering substrates
Tool.
To solve the above problems, the present invention is achieved by the following technical solutions：
A kind of bearing fixture for sputter coating, there is the intermediate bar of connection in square frame body and outer frame body, the housing
Body is formed by fixedly connecting by left plate, upper plate, right plate and lower shoe ending, the left plate, upper plate and right plate
Inner side and the both sides of intermediate bar are all provided with the slot for being easily installed substrate；Described intermediate bar one end is stuck in the slot of upper plate
The other end is placed on lower shoe and parallel to left plate and right plate；The right plate upper hinge, which is connected with, can be pressed in bottom
Pressing plate on plate, the locating slot that fixation clip is provided with pressing plate is corresponded on the left plate；Between the intermediate bar and right plate
The lead screw device of regulation intermediate bar position is provided with, the lead screw device is arranged on the installation that intermediate bar and right plate are correspondingly arranged
On block.Position of the intermediate bar on outer frame body is adjusted by lead screw device, the upper end of intermediate bar is stuck on the inside of upper plate
In slot and move lower end on lower shoe along slot to move, intermediate bar is determined according to the size requirement of required sputtering substrate
Position, substrate is installed in the slot on the inside of outer frame body, will be then pressed in the hinged pressing plate of right plate on lower shoe
Pressing plate end is located in the locating slot of left plate simultaneously, the lower surface of intermediate bar is propped up on the inside of pressing plate, so as to prevent substrate from splashing
Penetrate in coating process and dropped from outer frame body.
Preferably, the left side of the pressing plate be provided with shell fragment and corresponding to pressing plate locating slot in be provided with cooperation shell fragment
Recess, pressure board in locating slot after fix the position of pressing plate in shell fragment press-in recess.
Preferably, being labeled with scale on the upper plate and lower shoe, size degree of regulation is improved.
Preferably, the spigot that enters of slot is all arc port on the left plate, right plate and intermediate bar, facilitate substrate
Insert as in slot.
Preferably, being all provided with screwed hole on the lateral surface of the upper plate and lower shoe, whole outer frame body can be connected
On film-coating mechanism and overturn, be easy to complete sputtering process.
Compared with prior art, the present invention is advantageous in that：Apparatus of the present invention are adjusted by lead screw device, are applied to
Various sizes of substrate is carried, application is wider, and degree of regulation is high；The pressing plate being connected through the hinge is more real
Now stop that the substrate in slot prevents from dropping, and reduces the process of dismounting block, improve operating efficiency.
Brief description of the drawings
The present invention is further described below in conjunction with the accompanying drawings：
Fig. 1 is schematic structural view of the invention；
Fig. 2 is overlooking the structure diagram of the present invention；
Fig. 3 is backsight structural representation of the present invention；
Fig. 4 present invention positioning slot structure schematic diagram；
Fig. 5 is elastic piece structure schematic diagram of the present invention.
In figure：1st, outer frame body；11st, left plate；12nd, upper plate；13rd, right plate；14th, lower shoe；15th, intermediate bar；16th, press
Plate；2nd, slot；21st, arc port；3rd, locating slot；4th, lead screw device；5th, mounting blocks；6th, shell fragment；7th, recess；8th, scale；9th, screw thread
Hole.
Embodiment
Below in conjunction with the accompanying drawings and embodiment the present invention will be described in detail：
A kind of bearing fixture for sputter coating as shown in Figure 1, Figure 2 and Figure 3, have in square frame body 1 and outer frame body 1
The intermediate bar 15 of connection, the outer frame body 1 are fixedly connected by left plate 11, upper plate 12, right plate 13 and lower shoe 14 ending
Form, the both sides of the left plate 11, the inner side of upper plate 12 and right plate 13 and intermediate bar 15, which are all provided with, is easily installed base
The slot 2 of plate；Described one end of intermediate bar 15 be stuck in the other end in the slot 2 of upper plate 15 be placed on lower shoe 14 and parallel to
Left plate 11 and right plate 13；The upper hinge of right plate 13 is connected with the pressing plate 16 that can be pressed on lower shoe 14, the left side
The locating slot 3 that fixation clip 16 is provided with pressing plate 16 is corresponded on side plate 11；It is provided between the intermediate bar 15 and right plate 13
The lead screw device 4 of the position of intermediate bar 15 is adjusted, the lead screw device 4 is arranged on the peace that intermediate bar 15 and right plate 13 are correspondingly arranged
Fill on block 5.Be labeled with scale 8 on the upper plate 12 and lower shoe 14, lead screw device 4 according to scale 8 to intermediate bar 15 outside
Position in framework 1 is adjusted, and the upper end of intermediate bar 15 is stuck in the inboard cinch slot 2 of upper plate 12 and moved together along slot 2
When its lower end moved on lower shoe 14, according to it is required sputtering substrate size requirement determine intermediate bar 15 on outer frame body 1
Position, substrate is installed in the slot 2 of the inner side of outer frame body 1, is then pressed in pressing plate 16 hinged with right plate 13
On the lower shoe 14 and end of pressing plate 16 is located in the locating slot 3 of left plate 11, and the inner side of pressing plate 16 props up the lower end of intermediate bar 15
Face, so as to prevent substrate from being dropped during sputter coating from outer frame body 1.The lateral surface of the upper plate 12 and lower shoe 14
On be all provided with screwed hole 9, be easy to outer frame body 1 being connected on film-coating mechanism, overturn during sputter coating.
As shown in Figure 4 and Figure 5, the left side of the pressing plate 16 is provided with shell fragment 6 and corresponding in the locating slot 3 of pressing plate 16
It is provided with the recess 7 for coordinating shell fragment 6.Its left end is stuck in the locating slot 3 of left plate 11 after pressing plate 16 is pressed on lower shoe 14, left end
Shell fragment 6 on face is just pressed into the recess 7 to match in locating slot 3 with shell fragment 6, avoids using so as to fix pressing plate 16
During because outer frame body 1 rotate be thrown out of.
Scale 8 is combined by feed screw apparatus 4 and carries out accurate adjustment so that the bearing fixture is applied to various sizes of substrate
Sputter coating is carried out, pressing plate 16 is hingedly connected on right plate 13 and can quickly realize the substrate carried on tool is stopped
Avoid dropping, reduce the process for loading and unloading block on tool originally, improve operating efficiency.
It is emphasized that：It the above is only presently preferred embodiments of the present invention, not the present invention made any formal
Limitation, every any simple modification, equivalent change and modification for being made to above example of technical spirit according to the present invention,
In the range of still falling within technical solution of the present invention.
Claims (5)
- A kind of 1. bearing fixture for sputter coating, it is characterised in that：With square frame body（1）And outer frame body（1）Interior company The intermediate bar connect（15）, the outer frame body（1）By left plate（11）, upper plate（12）, right plate（13）And lower shoe（14）Receive Tail is formed by fixedly connecting, the left plate（11）, upper plate（12）And right plate（13）Inner side and intermediate bar（15）Two Side is all provided with the slot for being easily installed substrate（2）；The intermediate bar（15）One end is stuck in upper plate（15）Slot（2）In it is another End is placed on lower shoe（14）Above and parallel to left plate（11）And right plate（13）；The right plate（13）Upper hinge is connected with Lower shoe can be pressed in（14）On pressing plate（16）, the left plate（11）Upper corresponding pressing plate（16）Place is provided with fixation clip（16） Locating slot（3）；The intermediate bar（15）And right plate（13）Between be provided with regulation intermediate bar（15）The lead screw device of position （4）, the lead screw device（4）Installed in intermediate bar（15）And right plate（13）The mounting blocks being correspondingly arranged（5）On.
- 2. the bearing fixture according to claim 1 for sputter coating, it is characterised in that：The pressing plate（16）Left end Face is provided with shell fragment（6）And correspond to pressing plate（16）Locating slot（3）Inside it is provided with cooperation shell fragment（6）Recess（7）.
- 3. the bearing fixture according to claim 1 for sputter coating, it is characterised in that：The upper plate（12）With under Bottom plate（14）On be labeled with scale（8）.
- 4. the bearing fixture according to claim 1 for sputter coating, it is characterised in that：The left plate（11）, it is right Side plate（13）And intermediate bar（15）Upper slot（2）The spigot that enters all be arc port（21）.
- 5. the bearing fixture according to claim 1 for sputter coating, it is characterised in that：The upper plate（12）With under Bottom plate（14）Lateral surface on be all provided with screwed hole（9）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710716839.9A CN107354445A (en) | 2017-08-21 | 2017-08-21 | A kind of bearing fixture for sputter coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710716839.9A CN107354445A (en) | 2017-08-21 | 2017-08-21 | A kind of bearing fixture for sputter coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107354445A true CN107354445A (en) | 2017-11-17 |
Family
ID=60287862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710716839.9A Pending CN107354445A (en) | 2017-08-21 | 2017-08-21 | A kind of bearing fixture for sputter coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107354445A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004211133A (en) * | 2002-12-27 | 2004-07-29 | Optrex Corp | Holder for forming film on glass substrate |
| CN204779897U (en) * | 2015-07-21 | 2015-11-18 | 洪霞 | Be applied to perpendicular electroplating anchor clamps of flexible circuit board |
| CN105506571A (en) * | 2015-12-15 | 2016-04-20 | 重庆晶宇光电科技有限公司 | Clamping device for film coating to optical filter |
| CN206052144U (en) * | 2016-08-30 | 2017-03-29 | 苏州京浜光电科技股份有限公司 | A kind of adjustable optical filter coating frock clamp |
| CN106803489A (en) * | 2017-03-20 | 2017-06-06 | 常州亿晶光电科技有限公司 | Solar panel testing equipment |
| CN207047316U (en) * | 2017-08-21 | 2018-02-27 | 苏州展迪科机电设备有限公司 | Bearing fixture for sputter coating |
-
2017
- 2017-08-21 CN CN201710716839.9A patent/CN107354445A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004211133A (en) * | 2002-12-27 | 2004-07-29 | Optrex Corp | Holder for forming film on glass substrate |
| CN204779897U (en) * | 2015-07-21 | 2015-11-18 | 洪霞 | Be applied to perpendicular electroplating anchor clamps of flexible circuit board |
| CN105506571A (en) * | 2015-12-15 | 2016-04-20 | 重庆晶宇光电科技有限公司 | Clamping device for film coating to optical filter |
| CN206052144U (en) * | 2016-08-30 | 2017-03-29 | 苏州京浜光电科技股份有限公司 | A kind of adjustable optical filter coating frock clamp |
| CN106803489A (en) * | 2017-03-20 | 2017-06-06 | 常州亿晶光电科技有限公司 | Solar panel testing equipment |
| CN207047316U (en) * | 2017-08-21 | 2018-02-27 | 苏州展迪科机电设备有限公司 | Bearing fixture for sputter coating |
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| SE01 | Entry into force of request for substantive examination | ||
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| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20171117 |
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| WD01 | Invention patent application deemed withdrawn after publication |