CN107338413B - Manual round target baffle structure capable of synchronously adjusting height and angle - Google Patents
Manual round target baffle structure capable of synchronously adjusting height and angle Download PDFInfo
- Publication number
- CN107338413B CN107338413B CN201710793854.3A CN201710793854A CN107338413B CN 107338413 B CN107338413 B CN 107338413B CN 201710793854 A CN201710793854 A CN 201710793854A CN 107338413 B CN107338413 B CN 107338413B
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- China
- Prior art keywords
- round target
- baffle
- flange
- angle
- clamping mechanism
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Abstract
The invention discloses a manual round target baffle structure capable of synchronously adjusting height and angle, which is characterized by comprising a round target, a round target steering clamping mechanism, a flange, a welded bellows assembly, a support tube, a sealing structure and a baffle; a baffle plate adjusting mechanism; the baffle is arranged above the round target, and the round target steering clamping mechanism is arranged below the round target; the middle of the round target steering clamping mechanism is connected with a welding corrugated pipe assembly; the lower end of the welded corrugated pipe assembly is connected with a supporting pipe; the support tube extends into a sealing structure arranged on the flange; the right side of the round target steering clamping mechanism is provided with a clamping baffle adjusting mechanism; the baffle adjusting mechanism synchronously adjusts the angle and the height along with the round target and the round target steering clamping mechanism; the baffle structure in the round target baffle structure can be synchronously adjusted in height and angle, and the process continuity of the round target coating is further improved.
Description
Technical Field
The invention relates to an adjusting structure, in particular to a round target baffle structure capable of manually and synchronously adjusting height and angle.
Background
In current coating equipment, if the baffle mechanism is installed to the round target, often can't be at the in-process of adjusting the round target, also realize the regulation to the baffle, need the effect that the baffle mechanism just can reach the regulation of dismantling of high frequency, greatly reduced the efficiency of coating film, also increased staff's work burden.
Disclosure of Invention
The invention aims to realize a round target baffle structure capable of manually and synchronously adjusting the height and the angle according to the defects of the prior art, and is characterized by comprising a round target, a round target steering clamping mechanism, a flange, a welded corrugated pipe assembly, a supporting pipe, a sealing structure and a baffle; a baffle plate adjusting mechanism; the baffle is arranged above the round target, and the round target steering clamping mechanism is arranged below the round target; the middle of the round target steering clamping mechanism is connected with a welded corrugated pipe assembly; the lower end of the welded corrugated pipe assembly is connected with a supporting pipe; the supporting tube extends into a sealing structure arranged on the flange; the right side of the round target steering clamping mechanism is provided with a clamping baffle adjusting mechanism; the baffle adjusting mechanism is synchronously adjusted in angle and height along with the round target and the round target steering clamping mechanism.
Further, the baffle plate adjusting mechanism also comprises a connecting rod, a universal joint, a lifting rod, a positioning pin, a groove-shaped sleeve and a driving shaft; the baffle is connected with a connecting rod, and the connecting rod penetrates through the upper end of the round target steering clamping mechanism; one end of a universal joint is connected; the other end of the universal joint is connected with a lifting rod; the lifting rod extends into a groove-shaped sleeve, and symmetrical kidney-shaped grooves are symmetrically formed in the groove-shaped sleeve; inserting a positioning pin into the kidney-shaped groove; the positioning pin slides up and down along with the lifting rod in the kidney-shaped groove, and the lower end of the groove-shaped sleeve is fixedly connected with a driving shaft; the driving shaft penetrates through the flange and is connected with a motor device arranged below the flange
Further, the motor device also comprises a support column, a coupler and a motor; a support plate; the support column is in threaded connection with the flange; the driving shaft is arranged in the middle of the supporting column; a supporting plate is arranged on the supporting column; the driving shaft penetrates through the supporting plate and is connected with the coupler; the coupler is also arranged between the support columns; the lower end of the supporting column is provided with threads, penetrates into a cover plate on the motor and is in threaded connection with the motor.
Further, the motor is any one of a servo motor, a speed regulating motor, a synchronous motor and an asynchronous motor.
Further, the sealing structure comprises an upper sealing sleeve, wherein the upper sealing sleeve is fixed above the flange and is in threaded connection with the flange; the lower sealing sleeve is fixed below the flange, a sealing rubber ring is arranged in the middle of the lower sealing sleeve, and an end cover is arranged below the lower sealing sleeve; the supporting tube sequentially passes through the sealing sleeve, the flange, the lower sealing sleeve and the end cover.
The invention has the technical effects that the baffle structure in the round target baffle structure can be synchronously adjusted in height and angle, the continuity of the round target coating process is further improved, and the time is saved.
Drawings
Fig. 1 is a front view of the present invention.
Fig. 2 is a right side view of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1 and 2, the embodiment discloses a round target baffle structure capable of manually and synchronously adjusting the height and the angle, which comprises a round target 1, a round target steering clamping mechanism 2, a welded bellows assembly 3, a flange 4, a support tube 6, a sealing structure 5 and a baffle 7; a shutter adjusting mechanism 30; the baffle plate 2 is arranged above the round target 1, and the round target steering clamping mechanism 2 is arranged below the round target 1; the middle of the round target steering clamping mechanism 2 is connected with a welding corrugated pipe assembly 3; the lower end of the welded corrugated pipe assembly 3 is connected with a supporting pipe 6; the support tube 6 extends into a sealing structure 5 arranged on the flange 4; the right side of the round target steering clamping mechanism 2 is provided with a clamping baffle adjusting mechanism 30; the baffle adjusting mechanism 30 is synchronously adjusted in angle and height along with the round target 1 and the round target steering clamping mechanism 2. The structure solves the problem that the baffle structure in the round target baffle structure can be adjusted in height and angle, and the baffle structure in the round target coating process can not be synchronously adjusted in height and angle along with the round target 1 and the round target steering clamping mechanism 2.
Referring to fig. 1 and 2, the baffle regulator 30 further comprises a connecting rod 8, a universal joint 9, a lifting rod 10, a positioning pin 11, a groove sleeve 12 and a driving shaft 13; the baffle 7 is connected with a connecting rod 8, and the connecting rod 8 penetrates through the upper end of the round target steering clamping mechanism 2; one end of a universal joint 9 is connected; the other end of the universal joint 9 is connected with a lifting rod 10; the lifting rod 10 extends into a groove-shaped sleeve 12, and symmetrical kidney-shaped grooves 121 are symmetrically formed in the groove-shaped sleeve 12; inserting a positioning pin 11 into the kidney-shaped groove 121; the positioning pin 11 slides up and down along with the lifting rod 10 in the kidney-shaped groove 121, and the lower end of the groove sleeve 12 is fixedly connected with a driving shaft 13; the drive shaft 13 passes through the flange 4 and is connected with a motor device 40 arranged below the flange 4; the problem of synchronous adjustment of the round target 1 and the round target steering clamping mechanism 2 in height is solved by adopting the lifting rod 10 and the structure that the lifting rod 10 and the positioning pin 11 slide up and down along with the lifting rod 10 in the kidney-shaped groove 121; meanwhile, the universal joint 9 is adopted in the baffle plate regulator 30, so that the round target 1 and the round target steering clamping mechanism 2 can be synchronously regulated in angle; therefore, the problem that the baffle plate structure in the round target coating process cannot be synchronously adjusted in height and angle along with the round target 1 and the round target steering clamping mechanism 2 is solved.
Referring to fig. 1 and 2, the motor device 40 further includes a support column 15, a coupling 16, and a motor 14; a support plate 18; the support column 15 is in threaded connection with the flange 4; the driving shaft 13 is arranged in the middle of the supporting column 15; a supporting plate 18 is arranged on the supporting column 15; the driving shaft 13 passes through the supporting plate 18 and is connected with the coupling 16; the coupling 16 is also arranged between the support columns 15; threads are arranged at the lower end of the supporting column 15, penetrate through a cover plate 141 on the motor 14 and are connected with the motor 14 in a threaded mode. The above structure completes the structure that the motor device 40 drives the baffle 7 to rotate in the circular target baffle structure with the height and angle being manually and synchronously adjusted, thereby forming the structure that the baffle 7 controls the rotating speed and can control the coating process of the circular target 1.
In order to realize a round target baffle structure capable of manually and synchronously adjusting the height and the angle, the round targets 1 and the round target steering clamping mechanism 2 are arranged on the structural sides; in the sealing structure 5, the sealing structure 5 comprises an upper sealing sleeve 51, and an upper sealing sleeve 52 is fixed above the flange 4 and is in threaded connection with the flange 4; the lower sealing sleeve 52 is fixed below the flange 4, a sealing rubber ring 54 is arranged in the middle of the lower sealing sleeve 52, and an end cover 53 is arranged below the lower sealing sleeve 52; the support tube 6 passes through the upper gland 52, flange 4, lower gland 2 and end cap 53 in sequence. The sealing structure of the supporting tube 6 is formed, and the up and down synchronous adjustment of the round targets 1 and the round targets steering clamping mechanism 2 can be realized at the same time.
As a preferred embodiment of the present invention, it is apparent to those skilled in the art that the present invention is not limited to the details of the above-described exemplary embodiment, but that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof, and is also the scope of the present invention. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (5)
1. The round target baffle structure capable of manually and synchronously adjusting the height and the angle is characterized by comprising a round target, a round target steering clamping mechanism, a flange, a welded corrugated pipe assembly, a supporting pipe, a sealing structure and a baffle; a baffle plate adjusting mechanism; the baffle is arranged above the round target, and the round target steering clamping mechanism is arranged below the round target; the middle of the round target steering clamping mechanism is connected with a welded corrugated pipe assembly; the lower end of the welded corrugated pipe assembly is connected with a supporting pipe; the supporting tube extends into a sealing structure arranged on the flange; the right side of the round target steering clamping mechanism is provided with a clamping baffle adjusting mechanism; the baffle adjusting mechanism is synchronously adjusted in angle and height along with the round target and the round target steering clamping mechanism.
2. The structure of a round target baffle plate with the height and the angle being manually and synchronously adjustable as claimed in claim 1, wherein the baffle plate adjusting mechanism further comprises a connecting rod, a universal joint, a lifting rod, a positioning pin, a groove sleeve and a driving shaft; the baffle is connected with a connecting rod, and the connecting rod penetrates through the upper end of the round target steering clamping mechanism; one end of a universal joint is connected; the other end of the universal joint is connected with a lifting rod; the lifting rod extends into a groove-shaped sleeve, and symmetrical kidney-shaped grooves are symmetrically formed in the groove-shaped sleeve; inserting a positioning pin into the kidney-shaped groove; the positioning pin slides up and down along with the lifting rod in the kidney-shaped groove, and the lower end of the groove-shaped sleeve is fixedly connected with a driving shaft; the driving shaft penetrates through the flange and is connected with a motor device arranged below the flange.
3. The structure of a round target baffle plate with the height and the angle being synchronously manually adjustable according to claim 2, wherein the motor device further comprises a support column, a coupler and a motor; a support plate; the support column is in threaded connection with the flange; the driving shaft is arranged in the middle of the supporting column; a supporting plate is arranged on the supporting column; the driving shaft penetrates through the supporting plate and is connected with the coupler; the coupler is also arranged between the support columns; the lower end of the supporting column is provided with threads, penetrates into a cover plate on the motor and is in threaded connection with the motor.
4. A manual synchronous height and angle adjustable circular target baffle structure as claimed in claim 3, wherein the motor is any one of a servo motor, a speed regulating motor, a synchronous motor and an asynchronous motor.
5. The circular target baffle structure capable of manually and synchronously adjusting the height and the angle according to claim 1, wherein the sealing structure comprises an upper sealing sleeve, and the upper sealing sleeve is fixed above a flange and is in threaded connection with the flange; the lower sealing sleeve is fixed below the flange, a sealing rubber ring is arranged in the middle of the lower sealing sleeve, and an end cover is arranged below the lower sealing sleeve; the supporting tube sequentially passes through the upper sealing sleeve, the flange, the lower sealing sleeve and the end cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710793854.3A CN107338413B (en) | 2017-09-06 | 2017-09-06 | Manual round target baffle structure capable of synchronously adjusting height and angle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710793854.3A CN107338413B (en) | 2017-09-06 | 2017-09-06 | Manual round target baffle structure capable of synchronously adjusting height and angle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107338413A CN107338413A (en) | 2017-11-10 |
| CN107338413B true CN107338413B (en) | 2023-06-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710793854.3A Active CN107338413B (en) | 2017-09-06 | 2017-09-06 | Manual round target baffle structure capable of synchronously adjusting height and angle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107338413B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112746254B (en) * | 2019-10-29 | 2022-10-18 | 中国电子科技集团公司第四十八研究所 | Magnetron sputtering target baffle mechanism |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3313556A1 (en) * | 1983-04-14 | 1984-10-25 | Hoffmann GmbH & Co KG Qualitätswerkzeuge, 8000 München | Vertically adjustable and rotatable holding device for fastening a tool |
| CN106435498A (en) * | 2016-09-26 | 2017-02-22 | 中国电子科技集团公司第四十八研究所 | Magnetron sputtering target baffle plate mechanism |
| CN207176064U (en) * | 2017-09-06 | 2018-04-03 | 上海福宜真空设备有限公司 | A kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually |
-
2017
- 2017-09-06 CN CN201710793854.3A patent/CN107338413B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3313556A1 (en) * | 1983-04-14 | 1984-10-25 | Hoffmann GmbH & Co KG Qualitätswerkzeuge, 8000 München | Vertically adjustable and rotatable holding device for fastening a tool |
| CN106435498A (en) * | 2016-09-26 | 2017-02-22 | 中国电子科技集团公司第四十八研究所 | Magnetron sputtering target baffle plate mechanism |
| CN207176064U (en) * | 2017-09-06 | 2018-04-03 | 上海福宜真空设备有限公司 | A kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually |
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| Publication number | Publication date |
|---|---|
| CN107338413A (en) | 2017-11-10 |
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