CN107338413A - A kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually - Google Patents
A kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually Download PDFInfo
- Publication number
- CN107338413A CN107338413A CN201710793854.3A CN201710793854A CN107338413A CN 107338413 A CN107338413 A CN 107338413A CN 201710793854 A CN201710793854 A CN 201710793854A CN 107338413 A CN107338413 A CN 107338413A
- Authority
- CN
- China
- Prior art keywords
- circle target
- flange
- clamping device
- adjusted
- circle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Abstract
The invention discloses a kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually, it is characterised in that turns to clamping device, flange, welding bellows component, support tube, sealing structure, baffle plate including circle target, circle target；Baffle plate governor motion；Baffle plate setting circle target top, circle target lower section set circle target turn to clamping device；Circle target turns to the one welding bellows component of middle connection of clamping device；The lower end connection support tube of welding bellows component；Support tube stretches into the sealing structure being arranged on flange；Circle target turns to the right side clamping baffle plate governor motion of clamping device；Baffle plate governor motion turns to clamping device angle with circle target, circle target and high level of synchronization is adjusted；The baffle arrangement realized in circle target baffle arrangement can synchronously be adjusted in height and angle, further improve the process continuity of round target plated film.
Description
Technical field
The present invention relates to a kind of adjustment structure, more particularly to a kind of circle target baffle plate that can be adjusted in synchronism height and angle manually
Structure.
Background technology
In existing filming equipment, if circle target baffle mechanism is installed, often can not regulation circle target during,
Also the regulation to baffle plate is realized, it is necessary to the dismounting baffle mechanism of high frequency time can be only achieved the effect of regulation, greatly reduces plated film
Efficiency, also increase the work load of employee.
The content of the invention
The purpose of the present invention is that the object of the invention realizes that one kind manually can be synchronous according in place of above-mentioned the deficiencies in the prior art
The circle target baffle arrangement of regulation height and angle, it is characterised in that turn to clamping device, flange, welding ripple including circle target, circle target
Line tube assembly, support tube, sealing structure, baffle plate；Baffle plate governor motion；Described baffle plate setting is justifying the top of target, in circle target
Lower section set described circle target to turn to clamping device；Described circle target turns to one welding bellows of middle connection of clamping device
Component；The lower end connection support tube of described welding bellows component；Described support tube stretches into the sealing being arranged on flange
Structure；Described circle target turns to the right side clamping baffle plate governor motion of clamping device；Described baffle plate governor motion is with circle target, circle
Target turns to clamping device and is adjusted in synchronism together in angle and height.
Further, described baffle plate governor motion, in addition to connecting rod, universal joint, elevating lever, alignment pin, groove profile sleeve pipe,
Drive shaft；Described baffle plate connects a connecting rod, and described connecting rod passes through the upper end of circle target steering clamping device；Connect 10,000
To one end of section；The other end of universal joint connects an elevating lever；Elevating lever is stretched into a groove profile sleeve pipe, symmetrical on groove profile sleeve pipe
Open up symmetrical kidney slot；An alignment pin is inserted in kidney slot；It is fixedly connected with elevating lever, alignment pin is in kidney slot with lifting
The upper and lower slip of bar, the lower end of groove profile sleeve pipe are fixedly connected with a drive shaft；Drive shaft is through flange and is arranged on below flange
Electric machine is connected
Further, described electric machine also includes support column, shaft coupling, motor；Supporting plate；Support column and flange screw thread
Connection；Described drive shaft is arranged on the centre of support column；One supporting plate is set on support column；Described drive shaft passes through support
Plate is connected with shaft coupling；Shaft coupling is similarly disposed between support column；It is threaded, is penetrated on motor in the lower end of support column
Cover plate, it is threadedly coupled with motor.
Further, described motor is any one in servomotor, buncher, synchronous motor, asynchronous motor
Kind.
Further, described sealing structure, including upper sleeve gasket, upper sleeve gasket are fixed on the top of flange, are with flange
Threaded connection；Lower sleeve gasket is fixed on the lower section of flange, O-ring seal is set among lower sleeve gasket, in the lower section of lower sleeve gasket
One end cap is set；Described support tube sequentially passes through sealing shroud, flange, lower sleeve gasket and end cap.
The technical effects of the invention are that, be realize circle target baffle arrangement in baffle arrangement height and angle
It can synchronously be adjusted, further improve the continuity of round target coating process, save the time.
Brief description of the drawings
Fig. 1 is the front view of the present invention.
Fig. 2 is the right view of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.Based on this
Embodiment in invention, the every other reality that those of ordinary skill in the art are obtained under the premise of creative work is not made
Example is applied, belongs to the scope of protection of the invention.
With reference to shown in accompanying drawing 1, accompanying drawing 2, originally implement and disclose a kind of circle target that can be adjusted in synchronism height and angle manually
Baffle arrangement, including circle target 1, circle target turn to clamping device 2, welding bellows component 3, flange 4, support tube 6, sealing structure 5,
Baffle plate 7；Baffle plate governor motion 30；Baffle plate 2 is arranged on the top of round target 1, sets circle target to turn to clamping device in the lower section of circle target 1
2；Circle target turns to the one welding bellows component 3 of middle connection of clamping device 2；The lower end connection support of welding bellows component 3
Pipe 6；Support tube 6 stretches into the sealing structure 5 being arranged on flange 4；Circle target turns to the right side clamping baffle plate regulation machine of clamping device 2
Structure 30；Baffle plate governor motion 30 turns to clamping device 2 and is adjusted in synchronism in angle and height with circle target 1, circle target.It is such
Structure, the baffle arrangement solved in circle target baffle arrangement can be adjusted in height and angle, solve in circle target plating
Baffle arrangement in membrane process can not turn to clamping device 2 be adjusted in synchronism in height and angle the problem of with circle target 1, circle target.
With reference to shown in accompanying drawing 1, accompanying drawing 2, baffle plate regulation machine 30, in addition to connecting rod 8, universal joint 9, elevating lever 10, positioning
Pin 11, groove profile sleeve pipe 12, drive shaft 13；Baffle plate 7 connects a connecting rod 8, and connecting rod 8 passes through circle target to turn to the upper of clamping device 2
End；Connect one end of a universal joint 9；The other end of universal joint 9 connects an elevating lever 10；Elevating lever 10 stretches into a groove profile sleeve pipe 12
In, symmetrical kidney slot 121 is symmetrically opened up on groove profile sleeve pipe 12；An alignment pin 11 is inserted in kidney slot 121；With elevating lever 10
It is fixedly connected, alignment pin 11 is fixedly connected in kidney slot 121 with the upper and lower slip of elevating lever 10, the lower end of groove profile sleeve pipe 12
One drive shaft 13；Drive shaft 13 is connected through flange 4 with being arranged on the electric machine 40 of the lower section of flange 4；Using elevating lever
10 and with alignment pin 11 in kidney slot 121 with the structure of the upper and lower slip of elevating lever 10 solve round target 1, circle target turn to
The problem of clamping device 2 is adjusted in synchronism in height；Meanwhile employ universal joint 9 in baffle plate adjusts machine 30 so that circle target 1,
Circle target turns to clamping device 2 and can be also adjusted in synchronism in angle；So as to solve the baffle arrangement in circle target coating process not
Can with circle target 1, circle target turn to clamping device 2 height and angle on be adjusted in synchronism the problem of.
With reference to shown in accompanying drawing 1, accompanying drawing 2, electric machine 40 also includes support column 15, shaft coupling 16, motor 14；Supporting plate
18；Support column 15 is threadedly coupled with flange 4；Drive shaft 13 is arranged on the centre of support column 15；One support is set on support column 15
Plate 18；Drive shaft 13 is connected through supporting plate 18 with shaft coupling 16；Shaft coupling 16 is similarly disposed between support column 15；Supporting
The lower end of post 15 is threaded, and the cover plate 141 penetrated on motor 14, is threadedly coupled with motor 14.Said structure completes motor
Device 40 drives the structure that baffle plate 7 rotates in it can be adjusted in synchronism the circle target baffle arrangement of height and angle manually, so as to be formed
Baffle plate 7 is controlled its rotating speed, can control the coating process process of round target 1, in order to realize further control, in this hair
In bright, the motor 14 used is any one in servomotor, buncher, synchronous motor, asynchronous motor, Ke Yigen
Selected according to different control accuracies.
In order to realize the circle target baffle arrangement that can be adjusted in synchronism height and angle manually, clamping machine is turned in circle target 1, circle target
The structure side of structure 2；In described sealing structure 5, sealing structure 5 is included into upper sleeve gasket 51, upper sleeve gasket 52 is fixed on method
The top of orchid 4, it is to be threadedly coupled with flange 4；Lower sleeve gasket 52 is fixed on the lower section of flange 4, is set among lower sleeve gasket 52
O-ring seal 54, one end cap 53 is set in the lower section of lower sleeve gasket 52；Support tube 6 sequentially pass through upper sleeve gasket 52, flange 4, under
Sealing shroud 2 and end cap 53.Result in formation of while the sealing structure of support tube 6, can also realize round target 1, circle target steering
The upper and lower synchronous adjustment of the structure side of clamping device 2.
As a preferred embodiment of the present invention, it is obvious to a person skilled in the art that the invention is not restricted to above-mentioned
The details of one exemplary embodiment, and without departing from the spirit or essential characteristics of the present invention, can have with others
Body form realizes the present invention, and protection scope of the present invention.Which point therefore, no matter from the point of view of, embodiment all should be regarded as
It is exemplary, and is nonrestrictive, the scope of the present invention is limited by appended claims rather than described above, therefore
It is intended to include all changes fallen in the implication and scope of the equivalency of claim in the present invention.Should not be by right
Any reference in it is required that is considered as the involved claim of limitation.
Moreover, it will be appreciated that although the present specification is described in terms of embodiments, not each embodiment is only wrapped
Containing an independent technical scheme, this narrating mode of specification is only that those skilled in the art should for clarity
Using specification as an entirety, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
It is appreciated that other embodiment.
Claims (5)
1. a kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually, it is characterised in that turned to including circle target, circle target
Clamping device, flange, welding bellows component, support tube, sealing structure, baffle plate；Baffle plate governor motion；Described baffle plate setting
In the top of circle target, described circle target is set to turn to clamping device in the lower section of circle target；Described circle target turns to clamping device
One welding bellows component of centre connection；The lower end connection support tube of described welding bellows component；Described support tube is stretched
Enter to be arranged on the sealing structure on flange；Described circle target turns to the right side clamping baffle plate governor motion of clamping device；Described
Baffle plate governor motion turns to clamping device and is adjusted in synchronism in angle and height with circle target, circle target.
A kind of 2. circle target baffle arrangement that can be adjusted in synchronism height and angle manually as claimed in claim 1, it is characterised in that
Described baffle plate governor motion, in addition to connecting rod, universal joint, elevating lever, alignment pin, groove profile sleeve pipe, drive shaft；Described gear
Plate connects a connecting rod, and described connecting rod passes through the upper end of circle target steering clamping device；Connect one end of a universal joint；It is universal
The other end of section connects an elevating lever；Elevating lever is stretched into a groove profile sleeve pipe, and symmetrical kidney slot is symmetrically opened up on groove profile sleeve pipe；
An alignment pin is inserted in kidney slot；Be fixedly connected with elevating lever, alignment pin in kidney slot with the upper and lower slip of elevating lever,
The lower end of groove profile sleeve pipe is fixedly connected with a drive shaft；Drive shaft is connected through flange with the electric machine being arranged on below flange
Connect.
A kind of 3. circle target baffle arrangement that can be adjusted in synchronism height and angle manually as claimed in claim 2, it is characterised in that
Described electric machine also includes support column, shaft coupling, motor；Supporting plate；Support column is threadedly coupled with flange；Described driving
Axle is arranged on the centre of support column；One supporting plate is set on support column；Described drive shaft is connected through supporting plate with shaft coupling；
Shaft coupling is similarly disposed between support column；It is threaded in the lower end of support column, the cover plate penetrated on motor, with motor screw thread
Connection.
A kind of 4. circle target baffle arrangement that can be adjusted in synchronism height and angle manually as claimed in claim 3, it is characterised in that
Described motor is any one in servomotor, buncher, synchronous motor, asynchronous motor.
A kind of 5. circle target baffle arrangement that can be adjusted in synchronism height and angle manually as claimed in claim 1, it is characterised in that
Described sealing structure, including upper sleeve gasket, upper sleeve gasket are fixed on the top of flange, are to be threadedly coupled with flange；Lower sealing
Set is fixed on the lower section of flange, and O-ring seal is set among lower sleeve gasket, and an end cap is set in the lower section of lower sleeve gasket；It is described
Support tube sequentially pass through upper sleeve gasket, flange, lower sleeve gasket and end cap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710793854.3A CN107338413B (en) | 2017-09-06 | 2017-09-06 | Manual round target baffle structure capable of synchronously adjusting height and angle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710793854.3A CN107338413B (en) | 2017-09-06 | 2017-09-06 | Manual round target baffle structure capable of synchronously adjusting height and angle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107338413A true CN107338413A (en) | 2017-11-10 |
| CN107338413B CN107338413B (en) | 2023-06-23 |
Family
ID=60215444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710793854.3A Active CN107338413B (en) | 2017-09-06 | 2017-09-06 | Manual round target baffle structure capable of synchronously adjusting height and angle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107338413B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112746254A (en) * | 2019-10-29 | 2021-05-04 | 中国电子科技集团公司第四十八研究所 | Magnetron sputtering target baffle mechanism |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3313556A1 (en) * | 1983-04-14 | 1984-10-25 | Hoffmann GmbH & Co KG Qualitätswerkzeuge, 8000 München | Vertically adjustable and rotatable holding device for fastening a tool |
| CN106435498A (en) * | 2016-09-26 | 2017-02-22 | 中国电子科技集团公司第四十八研究所 | Magnetron sputtering target baffle plate mechanism |
| CN207176064U (en) * | 2017-09-06 | 2018-04-03 | 上海福宜真空设备有限公司 | A kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually |
-
2017
- 2017-09-06 CN CN201710793854.3A patent/CN107338413B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3313556A1 (en) * | 1983-04-14 | 1984-10-25 | Hoffmann GmbH & Co KG Qualitätswerkzeuge, 8000 München | Vertically adjustable and rotatable holding device for fastening a tool |
| CN106435498A (en) * | 2016-09-26 | 2017-02-22 | 中国电子科技集团公司第四十八研究所 | Magnetron sputtering target baffle plate mechanism |
| CN207176064U (en) * | 2017-09-06 | 2018-04-03 | 上海福宜真空设备有限公司 | A kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112746254A (en) * | 2019-10-29 | 2021-05-04 | 中国电子科技集团公司第四十八研究所 | Magnetron sputtering target baffle mechanism |
| CN112746254B (en) * | 2019-10-29 | 2022-10-18 | 中国电子科技集团公司第四十八研究所 | Magnetron sputtering target baffle mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107338413B (en) | 2023-06-23 |
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