CN207176064U - A kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually - Google Patents

A kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually Download PDF

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Publication number
CN207176064U
CN207176064U CN201721135272.8U CN201721135272U CN207176064U CN 207176064 U CN207176064 U CN 207176064U CN 201721135272 U CN201721135272 U CN 201721135272U CN 207176064 U CN207176064 U CN 207176064U
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CN
China
Prior art keywords
circle target
flange
clamping device
adjusted
circle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201721135272.8U
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Chinese (zh)
Inventor
杨元才
朱振东
熊凯
钱鹏亮
褚景豫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHANGHAI FUYI VACUUM EQUIPMENT Co Ltd
Original Assignee
SHANGHAI FUYI VACUUM EQUIPMENT Co Ltd
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Filing date
Publication date
Application filed by SHANGHAI FUYI VACUUM EQUIPMENT Co Ltd filed Critical SHANGHAI FUYI VACUUM EQUIPMENT Co Ltd
Priority to CN201721135272.8U priority Critical patent/CN207176064U/en
Application granted granted Critical
Publication of CN207176064U publication Critical patent/CN207176064U/en
Withdrawn - After Issue legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually, it is characterised in that turns to clamping device, flange, welding bellows component, support tube, sealing structure, baffle plate including circle target, circle target;Baffle plate governor motion;Baffle plate setting circle target top, circle target lower section set circle target turn to clamping device;Circle target turns to the one welding bellows component of middle connection of clamping device;The lower end connection support tube of welding bellows component;Support tube stretches into the sealing structure being arranged on flange;Circle target turns to the right side clamping baffle plate governor motion of clamping device;Baffle plate governor motion turns to clamping device angle with circle target, circle target and high level of synchronization is adjusted;The baffle arrangement realized in circle target baffle arrangement can synchronously be adjusted in height and angle, further improve the process continuity of round target plated film.

Description

A kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually
Technical field
A kind of adjustment structure is the utility model is related to, more particularly to a kind of circle target that can be adjusted in synchronism height and angle manually Baffle arrangement.
Background technology
In existing filming equipment, if circle target baffle mechanism is installed, often can not regulation circle target during, Also the regulation to baffle plate is realized, it is necessary to the dismounting baffle mechanism of high frequency time can be only achieved the effect of regulation, greatly reduces plated film Efficiency, also increase the work load of employee.
Utility model content
The purpose of this utility model is that the utility model purpose realizes a kind of hand according in place of above-mentioned the deficiencies in the prior art The dynamic circle target baffle arrangement that can be adjusted in synchronism height and angle, it is characterised in that turn to clamping device, method including circle target, circle target Orchid, welding bellows component, support tube, sealing structure, baffle plate;Baffle plate governor motion;Described baffle plate setting is upper circle target Side, described circle target is set to turn to clamping device in the lower section of circle target;Described circle target turns to the middle connection one of clamping device Welding bellows component;The lower end connection support tube of described welding bellows component;Described support tube stretches into the method for being arranged on Sealing structure on orchid;Described circle target turns to the right side clamping baffle plate governor motion of clamping device;Described baffle plate regulation machine Structure turns to clamping device and is adjusted in synchronism in angle and height with circle target, circle target.
Further, described baffle plate governor motion, in addition to connecting rod, universal joint, elevating lever, alignment pin, groove profile sleeve pipe, Drive shaft;Described baffle plate connects a connecting rod, and described connecting rod passes through the upper end of circle target steering clamping device;Connect 10,000 To one end of section;The other end of universal joint connects an elevating lever;Elevating lever is stretched into a groove profile sleeve pipe, symmetrical on groove profile sleeve pipe Open up symmetrical kidney slot;An alignment pin is inserted in kidney slot;It is fixedly connected with elevating lever, alignment pin is in kidney slot with lifting The upper and lower slip of bar, the lower end of groove profile sleeve pipe are fixedly connected with a drive shaft;Drive shaft is through flange and is arranged on below flange Electric machine is connected
Further, described electric machine also includes support column, shaft coupling, motor;Supporting plate;Support column and flange screw thread Connection;Described drive shaft is arranged on the centre of support column;One supporting plate is set on support column;Described drive shaft passes through support Plate is connected with shaft coupling;Shaft coupling is similarly disposed between support column;It is threaded, is penetrated on motor in the lower end of support column Cover plate, it is threadedly coupled with motor.
Further, described motor is any one in servomotor, buncher, synchronous motor, asynchronous motor Kind.
Further, described sealing structure, including upper sleeve gasket, upper sleeve gasket are fixed on the top of flange, are with flange Threaded connection;Lower sleeve gasket is fixed on the lower section of flange, O-ring seal is set among lower sleeve gasket, in the lower section of lower sleeve gasket One end cap is set;Described support tube sequentially passes through sealing shroud, flange, lower sleeve gasket and end cap.
Had technical effect that of the present utility model, be realize circle target baffle arrangement in baffle arrangement height and Angle can synchronously be adjusted, and further improve the continuity of round target coating process, save the time.
Brief description of the drawings
Fig. 1 is front view of the present utility model.
Fig. 2 is right view of the present utility model.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out Clearly and completely describe, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole realities Apply example.Based on the embodiment in the utility model, those of ordinary skill in the art institute under the premise of creative work is not made The every other embodiment obtained, belong to the scope of the utility model protection.
With reference to shown in accompanying drawing 1, accompanying drawing 2, originally implement and disclose a kind of circle target that can be adjusted in synchronism height and angle manually Baffle arrangement, including circle target 1, circle target turn to clamping device 2, welding bellows component 3, flange 4, support tube 6, sealing structure 5, Baffle plate 7;Baffle plate governor motion 30;Baffle plate 2 is arranged on the top of round target 1, sets circle target to turn to clamping device in the lower section of circle target 1 2;Circle target turns to the one welding bellows component 3 of middle connection of clamping device 2;The lower end connection support of welding bellows component 3 Pipe 6;Support tube 6 stretches into the sealing structure 5 being arranged on flange 4;Circle target turns to the right side clamping baffle plate regulation machine of clamping device 2 Structure 30;Baffle plate governor motion 30 turns to clamping device 2 and is adjusted in synchronism in angle and height with circle target 1, circle target.It is such Structure, the baffle arrangement solved in circle target baffle arrangement can be adjusted in height and angle, solve in circle target plating Baffle arrangement in membrane process can not turn to clamping device 2 be adjusted in synchronism in height and angle the problem of with circle target 1, circle target.
With reference to shown in accompanying drawing 1, accompanying drawing 2, baffle plate regulation machine 30, in addition to connecting rod 8, universal joint 9, elevating lever 10, positioning Pin 11, groove profile sleeve pipe 12, drive shaft 13;Baffle plate 7 connects a connecting rod 8, and connecting rod 8 passes through circle target to turn to the upper of clamping device 2 End;Connect one end of a universal joint 9;The other end of universal joint 9 connects an elevating lever 10;Elevating lever 10 stretches into a groove profile sleeve pipe 12 In, symmetrical kidney slot 121 is symmetrically opened up on groove profile sleeve pipe 12;An alignment pin 11 is inserted in kidney slot 121;With elevating lever 10 It is fixedly connected, alignment pin 11 is fixedly connected in kidney slot 121 with the upper and lower slip of elevating lever 10, the lower end of groove profile sleeve pipe 12 One drive shaft 13;Drive shaft 13 is connected through flange 4 with being arranged on the electric machine 40 of the lower section of flange 4;Using elevating lever 10 and with alignment pin 11 in kidney slot 121 with the structure of the upper and lower slip of elevating lever 10 solve round target 1, circle target turn to The problem of clamping device 2 is adjusted in synchronism in height;Meanwhile employ universal joint 9 in baffle plate adjusts machine 30 so that circle target 1, Circle target turns to clamping device 2 and can be also adjusted in synchronism in angle;So as to solve the baffle arrangement in circle target coating process not Can with circle target 1, circle target turn to clamping device 2 height and angle on be adjusted in synchronism the problem of.
With reference to shown in accompanying drawing 1, accompanying drawing 2, electric machine 40 also includes support column 15, shaft coupling 16, motor 14;Supporting plate 18;Support column 15 is threadedly coupled with flange 4;Drive shaft 13 is arranged on the centre of support column 15;One support is set on support column 15 Plate 18;Drive shaft 13 is connected through supporting plate 18 with shaft coupling 16;Shaft coupling 16 is similarly disposed between support column 15;Supporting The lower end of post 15 is threaded, and the cover plate 141 penetrated on motor 14, is threadedly coupled with motor 14.Said structure completes motor Device 40 drives the structure that baffle plate 7 rotates in it can be adjusted in synchronism the circle target baffle arrangement of height and angle manually, so as to be formed Baffle plate 7 is controlled its rotating speed, can control the coating process process of round target 1, in order to realize further control, in this reality In new, the motor 14 used, can for any one in servomotor, buncher, synchronous motor, asynchronous motor To be selected according to different control accuracies.
In order to realize the circle target baffle arrangement that can be adjusted in synchronism height and angle manually, clamping machine is turned in circle target 1, circle target The structure side of structure 2;In described sealing structure 5, sealing structure 5 is included into upper sleeve gasket 51, upper sleeve gasket 52 is fixed on method The top of orchid 4, it is to be threadedly coupled with flange 4;Lower sleeve gasket 52 is fixed on the lower section of flange 4, is set among lower sleeve gasket 52 O-ring seal 54, one end cap 53 is set in the lower section of lower sleeve gasket 52;Support tube 6 sequentially pass through upper sleeve gasket 52, flange 4, under Sealing shroud 2 and end cap 53.Result in formation of while the sealing structure of support tube 6, can also realize round target 1, circle target steering The upper and lower synchronous adjustment of the structure side of clamping device 2.
As preferred embodiment of the present utility model, it is obvious to a person skilled in the art that the utility model is not It is limited to the details of above-mentioned one exemplary embodiment, and in the case of without departing substantially from spirit or essential attributes of the present utility model, energy It is enough to realize the utility model, and the scope of protection of the utility model in other specific forms.Which point therefore, no matter come from See, embodiment all should be regarded as exemplary, and be nonrestrictive, the scope of the utility model is by appended claims Rather than described above limits, it is intended that all changes capsule in the implication and scope of the equivalency of claim will be fallen Include in the utility model.Any reference in claim should not be considered as to the involved claim of limitation.
Moreover, it will be appreciated that although the present specification is described in terms of embodiments, not each embodiment is only wrapped Containing an independent technical scheme, this narrating mode of specification is only that those skilled in the art should for clarity Using specification as an entirety, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art It is appreciated that other embodiment.

Claims (5)

1. a kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually, it is characterised in that turned to including circle target, circle target Clamping device, flange, welding bellows component, support tube, sealing structure, baffle plate;Baffle plate governor motion;Described baffle plate setting In the top of circle target, described circle target is set to turn to clamping device in the lower section of circle target;Described circle target turns to clamping device One welding bellows component of centre connection;The lower end connection support tube of described welding bellows component;Described support tube is stretched Enter to be arranged on the sealing structure on flange;Described circle target turns to the right side clamping baffle plate governor motion of clamping device;Described Baffle plate governor motion turns to clamping device and is adjusted in synchronism in angle and height with circle target, circle target.
A kind of 2. circle target baffle arrangement that can be adjusted in synchronism height and angle manually as claimed in claim 1, it is characterised in that Described baffle plate governor motion, in addition to connecting rod, universal joint, elevating lever, alignment pin, groove profile sleeve pipe, drive shaft;Described gear Plate connects a connecting rod, and described connecting rod passes through the upper end of circle target steering clamping device;Connect one end of a universal joint;It is universal The other end of section connects an elevating lever;Elevating lever is stretched into a groove profile sleeve pipe, and symmetrical kidney slot is symmetrically opened up on groove profile sleeve pipe; An alignment pin is inserted in kidney slot;Be fixedly connected with elevating lever, alignment pin in kidney slot with the upper and lower slip of elevating lever, The lower end of groove profile sleeve pipe is fixedly connected with a drive shaft;Drive shaft is connected through flange with the electric machine being arranged on below flange Connect.
A kind of 3. circle target baffle arrangement that can be adjusted in synchronism height and angle manually as claimed in claim 2, it is characterised in that Described electric machine also includes support column, shaft coupling, motor;Supporting plate;Support column is threadedly coupled with flange;Described driving Axle is arranged on the centre of support column;One supporting plate is set on support column;Described drive shaft is connected through supporting plate with shaft coupling; Shaft coupling is similarly disposed between support column;It is threaded in the lower end of support column, the cover plate penetrated on motor, with motor screw thread Connection.
A kind of 4. circle target baffle arrangement that can be adjusted in synchronism height and angle manually as claimed in claim 3, it is characterised in that Described motor is any one in servomotor, buncher, synchronous motor, asynchronous motor.
A kind of 5. circle target baffle arrangement that can be adjusted in synchronism height and angle manually as claimed in claim 1, it is characterised in that Described sealing structure, including upper sleeve gasket, upper sleeve gasket are fixed on the top of flange, are to be threadedly coupled with flange;Lower sealing Set is fixed on the lower section of flange, and O-ring seal is set among lower sleeve gasket, and an end cap is set in the lower section of lower sleeve gasket;It is described Support tube sequentially pass through upper sleeve gasket, flange, lower sleeve gasket and end cap.
CN201721135272.8U 2017-09-06 2017-09-06 A kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually Withdrawn - After Issue CN207176064U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721135272.8U CN207176064U (en) 2017-09-06 2017-09-06 A kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721135272.8U CN207176064U (en) 2017-09-06 2017-09-06 A kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually

Publications (1)

Publication Number Publication Date
CN207176064U true CN207176064U (en) 2018-04-03

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CN201721135272.8U Withdrawn - After Issue CN207176064U (en) 2017-09-06 2017-09-06 A kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually

Country Status (1)

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CN (1) CN207176064U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107338413A (en) * 2017-09-06 2017-11-10 上海福宜真空设备有限公司 A kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107338413A (en) * 2017-09-06 2017-11-10 上海福宜真空设备有限公司 A kind of circle target baffle arrangement that can be adjusted in synchronism height and angle manually
CN107338413B (en) * 2017-09-06 2023-06-23 上海福宜真空设备有限公司 Manual round target baffle structure capable of synchronously adjusting height and angle

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Granted publication date: 20180403

Effective date of abandoning: 20230623

AV01 Patent right actively abandoned

Granted publication date: 20180403

Effective date of abandoning: 20230623