CN107328786A - A kind of film surface defect detection apparatus and its detection method - Google Patents
A kind of film surface defect detection apparatus and its detection method Download PDFInfo
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- CN107328786A CN107328786A CN201710717851.1A CN201710717851A CN107328786A CN 107328786 A CN107328786 A CN 107328786A CN 201710717851 A CN201710717851 A CN 201710717851A CN 107328786 A CN107328786 A CN 107328786A
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- 230000007547 defect Effects 0.000 title claims abstract description 52
- 238000001514 detection method Methods 0.000 title claims abstract description 48
- 238000003384 imaging method Methods 0.000 claims abstract description 58
- 238000005286 illumination Methods 0.000 claims abstract description 27
- 230000002950 deficient Effects 0.000 claims abstract description 16
- 238000007619 statistical method Methods 0.000 claims description 8
- 230000001154 acute effect Effects 0.000 claims description 6
- 239000012528 membrane Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 33
- 239000000758 substrate Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 238000007689 inspection Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
- G01N2021/8825—Separate detection of dark field and bright field
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/066—Modifiable path; multiple paths in one sample
- G01N2201/0668—Multiple paths; optimisable path length
Abstract
The invention discloses a kind of film surface defect detection apparatus and its detection method, described device includes：Dark-ground illumination light path, bright field illumination light path, half-reflecting half mirror, total reflective mirror, imaging lens, line sweep camera；Wherein, imaging lens and line sweep camera above the vertical direction of half-reflecting half mirror, and imaging lens are swept between camera and half-reflecting half mirror positioned at line；Bright field illumination light path is located at the horizontal direction side of half-reflecting half mirror, and total reflective mirror is located at the horizontal direction of half-reflecting half mirror and bright field illumination light path is in the opposite side of 180 degree phase.The present invention realizes the quick detection to the surface kick of OLED flexible membranes and identification by the judgement of the order of severity to defect, improves the detection effect to defective products, improves the quality of product.
Description
Technical field
The present invention relates to a kind of film surface defect detection apparatus and its detection method, and in particular to one kind utilizes bright dark field light
Source carries out the device and method of film surface defects detection.
Background technology
OLED flexible screens are using flexible material as substrate, and this substrate is one layer of very thin film, and this film surface is very small
Projection all can on subsequent technique produce influence, cause yield to decline, therefore need to be detected and identify.Existing inspection
Survey technology is divided into high-speed plane detection and low speed solid detection, is first detected those suspected defects with high-speed plane detection, then use
Low speed solid detection identifies real defect, less efficient, it is impossible to meet industry demand.
Existing disclosed Chinese invention patent application number 201510412058.1, discloses a kind of oled substrate evaporation structure
And OLED mask defect inspection methods, the structure includes：Substrate；Fit in the mask of substrate surface；And be arranged at described
Piezoelectric sense film between substrate and the mask.The oled substrate evaporation structure of the invention can be before substrate be deposited
It was found that the defect that mask is present.This mode detected in advance can avoid finding asking for mask presence after finished product is produced
Topic, so that the stability and yield of product.
But need especially to set up piezoelectric sense film in above-mentioned patented technology, testing cost is improved, is also currently to need
The problem of overcoming.
In addition, the disclosed Chinese invention patent application number 201510320557.8 of the applicant discloses a kind of glass table
Planar defect intensifier and its monitoring method, disclose a kind of glass surface defects enhancing detection means, including bright field illumination light
Road, dark-ground illumination light path, scanning imagery camera lens, line scan image sensor.Tested glass is transported to sports platform through feed conveyor belt,
Light field line source is opened successively, and scanning imagery camera lens, line scan image sensor carry out light field imaging；It is then turned off light field linear light
Source, laser sends laser and is transformed to line source, scanning imagery camera lens, line scan image sensor through Bao Weier prism, collimater
Carry out dark-field imaging；Light field imaging, the data after dark-field imaging and are converged by the defect information on its surface of intelligence system statistical analysis
Total output, by the judgement of the order of severity to defect, improves the detection effect to defective products, improves the quality of product.
However, the above method can not simply be converted in film surface defects detection, it is necessary to specific element set and
Detection method is further improved.
The content of the invention
To solve problem above, the present invention combines the characteristic of bright field and details in a play not acted out on stage, but told through dialogues sidelight, using both mixed lightings, realizes
Quick detection and identification to the surface kick of OLED flexible membranes.
Specifically, according to an aspect of the invention, there is provided a kind of film surface defect detection apparatus, described device bag
Include：Dark-ground illumination light path, bright field illumination light path, half-reflecting half mirror, total reflective mirror, imaging lens, line sweep camera；Wherein, imaging lens
Head and line sweep camera above the vertical direction of half-reflecting half mirror, imaging lens be located at line sweep camera and half-reflecting half mirror it
Between；Bright field illumination light path be located at half-reflecting half mirror horizontal direction side, total reflective mirror be located at half-reflecting half mirror horizontal direction with
Bright field illumination light path is in the opposite side of 180 degree phase.
It is preferred that, the half-reflecting half mirror is placed with horizontal direction in 45 degree of angles.
It is preferred that, the dark-ground illumination light path includes details in a play not acted out on stage, but told through dialogues condenser lens, light guide plate, details in a play not acted out on stage, but told through dialogues line source from top to bottom, leads
Tabula rasa and details in a play not acted out on stage, but told through dialogues line source are located on the focal plane of details in a play not acted out on stage, but told through dialogues condenser lens, the focal plane of the details in a play not acted out on stage, but told through dialogues condenser lens and horizontal direction
It is at an acute angle to place.
It is furthermore preferred that the acute angle is 45 degree or 60 degree.
It is preferred that, the bright field illumination light path includes bright field condenser lens and bright field line source, wherein bright field condenser lens
Between bright field line source and half-reflecting half mirror.
According to another aspect of the present invention, a kind of inspection using film surface defect detection apparatus as described above is additionally provided
Survey method, comprises the following steps：
A. it is tested film and is delivered to sports platform through feed conveyor belt, and is positioned on sports platform；
B. light field line source is opened, the bright field light that light field line source is sent is irradiated to film surface through half-reflecting half mirror, total reflective mirror, then
Camera, which is swept, through total reflective mirror, half-reflecting half mirror, imaging lens, line carries out light field imaging；
C. light field line source is closed, details in a play not acted out on stage, but told through dialogues line source is opened, dark field light is irradiated to tested film through light guide plate and details in a play not acted out on stage, but told through dialogues condenser lens
Surface, sweeps camera through total reflective mirror, half-reflecting half mirror, imaging lens, line and carries out dark-field imaging；
D. light field imaging, the data after dark-field imaging and collect output by the defect information on its surface of intelligence system statistical analysis,
By the judgement of the order of severity to defect, certified products send conveyer belt back to, and defective work delivers to defective work box.
According to a further aspect of the invention, a kind of inspection using film surface defect detection apparatus as described above is additionally provided
Survey method, comprises the following steps：
A. it is tested film and is delivered to sports platform through feed conveyor belt, and is positioned on sports platform；
B. open light field line source and details in a play not acted out on stage, but told through dialogues line source simultaneously, the bright field light that wherein light field line source is sent through half-reflecting half mirror,
Total reflective mirror is irradiated to film surface, then sweeps camera progress light field imaging through total reflective mirror, half-reflecting half mirror, imaging lens, line；Dark field light
Tested film surface is irradiated to through light guide plate and details in a play not acted out on stage, but told through dialogues condenser lens, phase is swept through total reflective mirror, half-reflecting half mirror, imaging lens, line
Machine carries out dark-field imaging；
C. light field imaging, the data after dark-field imaging and collect output by the defect information on its surface of intelligence system statistical analysis,
By the judgement of the order of severity to defect, certified products send conveyer belt back to, and defective work delivers to defective work box.
The advantage of the invention is that：
The present invention realizes the quick detection to the surface kick of OLED flexible membranes and knowledge by the judgement of the order of severity to defect
Not, the detection effect to defective products is improved, the quality of product is improved.
Brief description of the drawings
By reading the detailed description of hereafter preferred embodiment, various other advantages and benefit is common for this area
Technical staff will be clear understanding.Accompanying drawing is only used for showing the purpose of preferred embodiment, and is not considered as to the present invention
Limitation.And in whole accompanying drawing, identical part is denoted by the same reference numerals.In the accompanying drawings：
Accompanying drawing 1 shows the light path principle figure of the film surface defect detection apparatus according to embodiment of the present invention.
Accompanying drawing 2 shows the side view of the film surface defect detection apparatus according to embodiment of the present invention.
Accompanying drawing 3 shows the dorsal view of the film surface defect detection apparatus according to embodiment of the present invention.
Embodiment
The illustrative embodiments of the disclosure are more fully described below with reference to accompanying drawings.Although showing this public affairs in accompanying drawing
The illustrative embodiments opened, it being understood, however, that may be realized in various forms the disclosure without the reality that should be illustrated here
The mode of applying is limited.Conversely it is able to be best understood from the disclosure there is provided these embodiments, and can be by this public affairs
The scope opened completely convey to those skilled in the art.
As shown in Figure 1, 2, according to the embodiment of the present invention, a kind of film surface defect detection apparatus, described device are proposed
Including：Dark-ground illumination light path 1, bright field illumination light path 2, half-reflecting half mirror 3, total reflective mirror 4, imaging lens 5, line sweep camera 6.Its
In, imaging lens 5 and line sweep camera 6 above the vertical direction of half-reflecting half mirror 3, imaging lens 5 be located at line sweep camera 6 and
Between half-reflecting half mirror 3.Bright field illumination light path 2 is located at the horizontal direction side of half-reflecting half mirror 3, and total reflective mirror 4 is located at half anti-half
The horizontal direction of lens 3 and the opposite side that bright field illumination light path 2 is in 180 degree phase.Half-reflecting half mirror 3 is in 45 degree with horizontal direction
Place at angle.
Dark-ground illumination light path 1 includes details in a play not acted out on stage, but told through dialogues condenser lens 11, light guide plate 12, details in a play not acted out on stage, but told through dialogues line source 13, light guide plate from top to bottom
12 and details in a play not acted out on stage, but told through dialogues line source 13 be located at details in a play not acted out on stage, but told through dialogues condenser lens 11 focal plane on, the focal plane of the details in a play not acted out on stage, but told through dialogues condenser lens 11 and level
Direction is at an acute angle to place.It is preferred that, the acute angle is 45 degree, or 60 degree are angularly.
Bright field illumination light path 2 includes bright field condenser lens 21 and bright field line source 22, and wherein bright field condenser lens 21 is located at
Between bright field line source 22 and half-reflecting half mirror 3.
Film 7 to be measured is located at the bottommost of whole device, and dark field light and/or bright field light are after the diffusing reflection of film 7 to be measured
Line is eventually entered into through total reflective mirror 4, half-reflecting half mirror 3, imaging lens 5 sweep camera 6 be imaged.
Operation principle using the film surface defect detection apparatus of the present invention is as follows：
Tested OLED flexible membranes are transported to sports platform through feed conveyor belt, open successively or open bright field line source 22 simultaneously and dark
Field wire light source 13, sweeps camera 6 by imaging lens 5, line and is imaged.It is guide-lighting when wherein details in a play not acted out on stage, but told through dialogues line source 13 sends dark field light
The dark field light that details in a play not acted out on stage, but told through dialogues line source 13 is sent is directed at the lower section of bright field illumination light path 2 by plate 12, then is irradiated to focusing with condenser lens 11
To imaging line（The normal direction of imaging lens 5）On.When bright field line source 22 sends bright field light, condenser lens 21 is by light focusing
Onto half-reflecting half mirror 3, it is being transmitted through in imaging line.
Data after imaging and are selectively exported by the defect information feature on its surface of intelligence system statistical analysis,
By the judgement of the order of severity to defect, the detection effect to defective products is improved, the quality of product is improved.
OLED flexible membranes surface is primarily present three kinds of defects, projection, depression and dust, it is impossible to from color identifying, projection and
Depression can not also be differentiated from brightness, open the details in a play not acted out on stage, but told through dialogues line source for having certain orientation, and projection and the bright position that is recessed have trickle
Difference, is positioned, it is possible to distinguished in conjunction with bright field line source.Bright field illumination 2 can obtain the letter of large scale defect
Breath, dark-ground illumination 1 can obtain the information of fine size defect, and sweep camera 6 by line is acquired to these images respectively, and
Collect output, by the size and number of detection image flaw, to judge the grade and quality of product, detection can be greatly reduced
Time, raising detection efficiency.Because imaging lens 5 are when generating bright field image, darkfield image, paths traversed is identical, can
With according to acquisitions image pixel mark coordinate in the form of progress defect acquisition, facilitate the judgement and confirmation of defect.
Accordingly, the detection method of the film surface defect detection apparatus, comprises the following steps（Open successively）：
A. it is tested film and is delivered to sports platform through feed conveyor belt, and is positioned on sports platform；
B. light field line source 22 is opened, the light that light field line source 22 is sent is irradiated to film table through half-reflecting half mirror 3, total reflective mirror 4
Face, then sweep the progress light field imaging of camera 6 through total reflective mirror 4, half-reflecting half mirror 3, imaging lens 5, line；
C. light field line source 22 is closed, details in a play not acted out on stage, but told through dialogues line source 13 is opened, dark field light irradiates through light guide plate 12 and details in a play not acted out on stage, but told through dialogues condenser lens 11
To tested film surface, sweep camera 6 through total reflective mirror 4, half-reflecting half mirror 3, imaging lens 5, line and carry out dark-field imaging；
D. light field imaging, the data after dark-field imaging and collect output by the defect information on its surface of intelligence system statistical analysis,
By the judgement of the order of severity to defect, certified products send conveyer belt back to, and defective work delivers to defective work box.
According to another embodiment of the invention, the detection method of the film surface defect detection apparatus, can also include following step
Suddenly（Open simultaneously）：
A. it is tested film and is delivered to sports platform through feed conveyor belt, and is positioned on sports platform；
B. light field line source 22 and details in a play not acted out on stage, but told through dialogues line source 13 are opened simultaneously, and the light that wherein light field line source 22 is sent is through half-reflecting half mirror
3rd, total reflective mirror 4 is irradiated to film surface, then through total reflective mirror 4, half-reflecting half mirror 3, imaging lens 5, line sweep camera 6 carry out light field into
Picture；Dark field light is irradiated to tested film surface through light guide plate 12 and details in a play not acted out on stage, but told through dialogues condenser lens 11, through total reflective mirror 4, half-reflecting half mirror 3,
Imaging lens 5, line sweep camera 6 and carry out dark-field imaging；
C. light field imaging, the data after dark-field imaging and collect output by the defect information on its surface of intelligence system statistical analysis,
By the judgement of the order of severity to defect, certified products send conveyer belt back to, and defective work delivers to defective work box.
Intelligence system used in the present invention, uses the intelligence in Chinese invention patent application number 201510320557.8 point
Analysis system, has mentioned, repeats no more here in the introduction.The system may be mounted at the meter accessed after data export
In calculation machine.
In embodiments of the invention, the film be OLED films, but the present invention device and detection method can also use
In other similar thin film testings.
The foregoing is only a preferred embodiment of the present invention, but protection scope of the present invention be not limited thereto, it is any
Those familiar with the art the invention discloses technical scope in, the change or replacement that can be readily occurred in, all should
It is included within the scope of the present invention.Therefore, protection scope of the present invention should using the scope of the claims as
It is accurate.
Claims (7)
1. a kind of film surface defect detection apparatus, it is characterised in that：
Described device includes：Dark-ground illumination light path, bright field illumination light path, half-reflecting half mirror, total reflective mirror, imaging lens, line sweep phase
Machine；Wherein, imaging lens and line sweep camera positioned at half-reflecting half mirror vertical direction above, imaging lens be located at line sweep camera and
Between half-reflecting half mirror；Bright field illumination light path is located at the horizontal direction side of half-reflecting half mirror, and total reflective mirror is located at half-reflecting half mirror
Horizontal direction and bright field illumination light path be in 180 degree phase opposite side.
2. a kind of film surface defect detection apparatus according to claim 1, it is characterised in that：
The half-reflecting half mirror is placed with horizontal direction in 45 degree of angles.
3. a kind of film surface defect detection apparatus according to claim 1 or 2, it is characterised in that：
The dark-ground illumination light path includes details in a play not acted out on stage, but told through dialogues condenser lens, light guide plate, details in a play not acted out on stage, but told through dialogues line source, light guide plate and dark field line from top to bottom
Light source is located on the focal plane of details in a play not acted out on stage, but told through dialogues condenser lens, focal plane and the horizontal direction placement at an acute angle of the details in a play not acted out on stage, but told through dialogues condenser lens.
4. a kind of film surface defect detection apparatus according to claim 3, it is characterised in that：
The acute angle is 45 degree or 60 degree.
5. a kind of film surface defect detection apparatus according to claim 1 or 2, it is characterised in that：
The bright field illumination light path includes bright field condenser lens and bright field line source, and wherein bright field condenser lens is located at bright field linear light
Between source and half-reflecting half mirror.
6. a kind of detection method using the film surface defect detection apparatus as described in claim 1-5 any one, including it is as follows
Step：
A. it is tested film and is delivered to sports platform through feed conveyor belt, and is positioned on sports platform；
B. light field line source is opened, the bright field light that light field line source is sent is irradiated to film surface through half-reflecting half mirror, total reflective mirror, then
Camera, which is swept, through total reflective mirror, half-reflecting half mirror, imaging lens, line carries out light field imaging；
C. light field line source is closed, details in a play not acted out on stage, but told through dialogues line source is opened, dark field light is irradiated to tested film through light guide plate and details in a play not acted out on stage, but told through dialogues condenser lens
Surface, sweeps camera through total reflective mirror, half-reflecting half mirror, imaging lens, line and carries out dark-field imaging；
D. light field imaging, the data after dark-field imaging and collect output by the defect information on its surface of intelligence system statistical analysis,
By the judgement of the order of severity to defect, certified products send conveyer belt back to, and defective work delivers to defective work box.
7. a kind of detection method using the film surface defect detection apparatus as described in claim 1-5 any one, including it is as follows
Step：
A. it is tested film and is delivered to sports platform through feed conveyor belt, and is positioned on sports platform；
B. open light field line source and details in a play not acted out on stage, but told through dialogues line source simultaneously, the bright field light that wherein light field line source is sent through half-reflecting half mirror,
Total reflective mirror is irradiated to film surface, then sweeps camera progress light field imaging through total reflective mirror, half-reflecting half mirror, imaging lens, line；Dark field light
Tested film surface is irradiated to through light guide plate and details in a play not acted out on stage, but told through dialogues condenser lens, phase is swept through total reflective mirror, half-reflecting half mirror, imaging lens, line
Machine carries out dark-field imaging；
C. light field imaging, the data after dark-field imaging and collect output by the defect information on its surface of intelligence system statistical analysis,
By the judgement of the order of severity to defect, certified products send conveyer belt back to, and defective work delivers to defective work box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710717851.1A CN107328786A (en) | 2017-08-21 | 2017-08-21 | A kind of film surface defect detection apparatus and its detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710717851.1A CN107328786A (en) | 2017-08-21 | 2017-08-21 | A kind of film surface defect detection apparatus and its detection method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107328786A true CN107328786A (en) | 2017-11-07 |
Family
ID=60224454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710717851.1A Pending CN107328786A (en) | 2017-08-21 | 2017-08-21 | A kind of film surface defect detection apparatus and its detection method |
Country Status (1)
| Country | Link |
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| CN (1) | CN107328786A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110609040A (en) * | 2019-09-30 | 2019-12-24 | 苏州精濑光电有限公司 | Optical detection method of diaphragm |
| CN112782175A (en) * | 2019-11-11 | 2021-05-11 | 深圳中科飞测科技股份有限公司 | Detection equipment and detection method |
| CN113686879A (en) * | 2021-09-09 | 2021-11-23 | 杭州利珀科技有限公司 | Optical film defect visual detection system and method |
| CN114419045A (en) * | 2022-03-30 | 2022-04-29 | 武汉中导光电设备有限公司 | Method, device and equipment for detecting defects of photoetching mask plate and readable storage medium |
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| US4232937A (en) * | 1978-10-16 | 1980-11-11 | American Optical Corporation | Bright field-dark field illumination system |
| JP2000227331A (en) * | 1998-11-30 | 2000-08-15 | Olympus Optical Co Ltd | Measuring instrument |
| US20060001869A1 (en) * | 2002-10-31 | 2006-01-05 | David Tuschel | Method and apparatus for dark field chemical imaging |
| US20120044344A1 (en) * | 2009-05-15 | 2012-02-23 | Yuan Zheng | Method and system for detecting defects of transparent substrate |
| CN207215722U (en) * | 2017-08-21 | 2018-04-10 | 中导光电设备股份有限公司 | A kind of film surface defect detection apparatus |
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- 2017-08-21 CN CN201710717851.1A patent/CN107328786A/en active Pending
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| US4232937A (en) * | 1978-10-16 | 1980-11-11 | American Optical Corporation | Bright field-dark field illumination system |
| JP2000227331A (en) * | 1998-11-30 | 2000-08-15 | Olympus Optical Co Ltd | Measuring instrument |
| US20060001869A1 (en) * | 2002-10-31 | 2006-01-05 | David Tuschel | Method and apparatus for dark field chemical imaging |
| US20120044344A1 (en) * | 2009-05-15 | 2012-02-23 | Yuan Zheng | Method and system for detecting defects of transparent substrate |
| CN207215722U (en) * | 2017-08-21 | 2018-04-10 | 中导光电设备股份有限公司 | A kind of film surface defect detection apparatus |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110609040A (en) * | 2019-09-30 | 2019-12-24 | 苏州精濑光电有限公司 | Optical detection method of diaphragm |
| WO2021062939A1 (en) * | 2019-09-30 | 2021-04-08 | 苏州精濑光电有限公司 | Method for optical detection of diaphragm |
| CN110609040B (en) * | 2019-09-30 | 2022-01-07 | 苏州精濑光电有限公司 | Optical detection method of diaphragm |
| CN112782175A (en) * | 2019-11-11 | 2021-05-11 | 深圳中科飞测科技股份有限公司 | Detection equipment and detection method |
| CN113686879A (en) * | 2021-09-09 | 2021-11-23 | 杭州利珀科技有限公司 | Optical film defect visual detection system and method |
| CN114419045A (en) * | 2022-03-30 | 2022-04-29 | 武汉中导光电设备有限公司 | Method, device and equipment for detecting defects of photoetching mask plate and readable storage medium |
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Application publication date: 20171107 |