CN107314740B - Position calibration system and calibration method of double-vibrating-mirror scanning system - Google Patents
Position calibration system and calibration method of double-vibrating-mirror scanning system Download PDFInfo
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Abstract
The invention relates to a position calibration system and a calibration method of a double-vibration mirror scanning system, wherein the calibration method comprises the following steps: rotating a horizontal galvanometer of a double-galvanometer scanning system at a step angle, and measuring distance data fed back by a distance measuring device of the horizontal galvanometer at each step angle; when the horizontal galvanometer rotates to a first position which enables laser spots emitted by the distance measuring device to irradiate the edge of a first plate of the calibrating device, the horizontal galvanometer is adjusted to rotate by a first preset angle at the first position so as to adjust the horizontal galvanometer to a horizontal zero point position; rotating a vertical galvanometer of a double-galvanometer scanning system at a step angle, and measuring distance data fed back by a distance measuring device of the vertical galvanometer at each step angle; and when the vertical vibrating mirror rotates to a second position at which the laser spot emitted by the distance measuring device irradiates the edge of the second plate of the calibrating device, adjusting the vertical vibrating mirror to rotate by a second preset angle at the second position so as to adjust the vertical vibrating mirror to the vertical zero position. The invention has simple and quick calibration and high calibration precision.
Description
Technical Field
The invention relates to a dual-vibration mirror calibration system and a calibration method, in particular to a dual-vibration mirror position calibration system and a calibration method.
Background
The double-vibrating-mirror scanning system is a common scanning system, has a simple structure, high precision and easy operation and control, and is widely applied to scanning of large and medium-sized scenes. In a scanning system, the position of the selected zero point is one of keys related to the accuracy and precision of the whole scanning data calculation, and if the zero point is incorrect, errors and deviations of the measured data are directly caused. The calibration of the system zero point is usually very complicated, and even can be completed by means of various other tools and instruments, so that the general scanning system designs the function of zero point calibration after the zero point is calibrated, and can indicate whether the current zero point position of the system is correct or not through calibration.
Generally, the existing solutions are usually implemented by the following methods:
1. the method is low in zero point detection precision, low in cost and simple in maintenance, and is mainly applied to occasions with low precision requirements.
2. The method is characterized in that a position sensor such as an encoder is additionally arranged, the position of a zero point is recorded and then marked on the sensor, and the position marked on the sensor is used as the standard during each calibration.
3. The method is complex to install, is only suitable for medium and large-scale fixed scanning occasions, and is easily interfered by external conditions.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a double-vibrating mirror position calibration system and a calibration method which are low in cost, simple to implement and high in precision.
In order to achieve the above object, the position calibration method of the double-oscillating mirror scanning system of the present invention comprises a distance measuring device and a calibration device, and comprises the following steps:
rotating a horizontal galvanometer of the double-galvanometer scanning system at a step angle, and measuring distance data fed back by the distance measuring device under each step angle by the horizontal galvanometer;
when the horizontal galvanometer rotates to a first position at which a laser spot emitted by the distance measuring device irradiates the edge of a first plate of the calibrating device, the horizontal galvanometer is adjusted to rotate by a first preset angle at the first position so as to adjust the horizontal galvanometer to a horizontal zero point position;
rotating a vertical galvanometer of the double-galvanometer scanning system at a step angle, and measuring distance data fed back by the distance measuring device under each step angle by the vertical galvanometer;
and when the vertical vibrating mirror rotates to a second position at which the laser spot emitted by the distance measuring device irradiates the edge of the second plate of the calibrating device, adjusting the vertical vibrating mirror to rotate by a second preset angle at the second position so as to adjust the vertical vibrating mirror to a vertical zero position.
Further, when the distance data change measured by the distance measuring device corresponding to the rotation of the horizontal vibrating mirror meets a preset condition, the horizontal vibrating mirror rotates to a first position where a laser spot emitted by the distance measuring device irradiates the edge of the first plate of the calibrating device.
Further, when the distance data change measured by the distance measuring device corresponding to the rotation of the vertical galvanometer meets a preset condition, the vertical galvanometer rotates to a second position where the laser spot emitted by the distance measuring device irradiates the edge of the second plate of the calibrating device.
Further, still include: after the horizontal galvanometer is rotated for an angle, when distance jump occurs in distance data measured by the distance measuring device, the horizontal galvanometer is rotated at a first preset angle at a jump point so as to adjust the horizontal galvanometer to a first position adjacent to a zero point;
and after the horizontal galvanometer is adjusted to the first adjacent zero point position, rotating the vertical galvanometer by an angle, and when the distance data measured by the distance measuring device has a distance jump, rotating the vertical galvanometer by the second preset angle at the jump point so as to adjust the vertical galvanometer to the second adjacent zero point position.
Further, still include: after the horizontal galvanometer is rotated for a circle, when the distance data measured by the distance measuring device does not have distance jump, the vertical galvanometer is rotated for an angle, and then the jump point is searched again by rotating the horizontal galvanometer, when the distance data measured by the distance measuring device has distance jump, the horizontal galvanometer is rotated by the first preset angle at the jump point of the horizontal galvanometer corresponding to the distance jump, so that the horizontal galvanometer is adjusted to a first position close to the zero point;
and after the horizontal galvanometer is adjusted to the first adjacent zero point position, rotating the vertical galvanometer by an angle, and when the distance measuring device measures distance data and distance jump occurs, rotating the vertical galvanometer by the second preset angle at the jump point of the vertical galvanometer corresponding to the distance jump, so as to adjust the vertical galvanometer to the second adjacent zero point position.
Further, still include: after the vertical galvanometer is rotated for an angle, when distance jump occurs in distance data measured by the distance measuring device, the vertical galvanometer is rotated at a second preset angle at a jump point so as to adjust the vertical galvanometer to a second position adjacent to a zero point;
and after the vertical galvanometer is adjusted to the second adjacent zero point position, rotating the horizontal galvanometer by an angle, and when the distance data measured by the distance measuring device has a distance jump, rotating the horizontal galvanometer by the first preset angle at the jump point so as to adjust the horizontal galvanometer to the first adjacent zero point position.
Further, still include: after the vertical galvanometer is rotated for one circle, when the distance data measured by the distance measuring device does not have distance jump, the horizontal galvanometer is rotated for an angle, and then the jump point is searched again by rotating the vertical galvanometer, when the distance data measured by the distance measuring device has distance jump, the vertical galvanometer is rotated by the second preset angle at the jump point of the vertical galvanometer corresponding to the distance jump, so that the vertical galvanometer is adjusted to a second position close to the zero point;
and after the vertical galvanometer is adjusted to the second adjacent zero point position, rotating the horizontal galvanometer by an angle, and when the distance measuring device measures distance data and distance jump occurs, rotating the horizontal galvanometer by the first preset angle at the jump point of the horizontal galvanometer corresponding to the distance jump, so as to adjust the horizontal galvanometer to the first adjacent zero point position.
Further, still include: after the horizontal galvanometer is rotated at an angle at the first position adjacent to the zero point, the horizontal galvanometer is rotated at the step angle, the distance value is measured for N times at the step angle through the distance measuring device, and whether the horizontal galvanometer is positioned at the first position is judged according to the distance value measured for N times.
Further, the statistics satisfy Lch-σ≤Li≤Lch+ σ of the number of measured distance values M, where σ is the measurement standard deviation of the distance measuring device, LiIs the distance value of the ith measurement, LchThe theoretical value of the horizontal vibrating mirror reflecting laser to the first plate when the vertical vibrating mirror is positioned at the zero point;
when the condition that M/N is more than or equal to 0.5 and more than or equal to 0.5+ lambda is met, the horizontal galvanometer is located at the first position;
where λ represents the width of the interval range.
Further, still include: and after the vertical galvanometer is rotated at an angle at the second position adjacent to the zero point, the vertical galvanometer is rotated at the step angle, distance data are measured for N times at the step angle through a distance measuring device, and whether the vertical galvanometer is positioned at the second position is judged according to the distance data measured for multiple times.
Further, the statistics satisfy Lcv-σ≤Li≤Lcv+ σ of the number M of measured distance values, where σ is the measurement of the distance measuring deviceAmount standard deviation, LiIs the distance value of the ith measurement, LcvThe theoretical value is that when the horizontal vibrating mirror is positioned at the zero point, the vertical vibrating mirror reflects the laser to the second plate;
when the condition that M/N is more than or equal to 0.5-gamma and less than or equal to 0.5+ gamma is met, the vertical galvanometer is located at the second position;
where γ represents the width of the interval range.
The position calibration system of the double-oscillating-mirror scanning system comprises:
a calibration device including a first plate disposed in a first direction and a second plate disposed in a second direction crossing the first direction;
the distance measuring device is used for emitting laser to the double-vibrating-mirror scanning system and measuring the distance;
when laser spots are adjusted to irradiate the edge of the first plate, rotating a horizontal galvanometer of the double-galvanometer scanning system at a first preset angle to enable the horizontal galvanometer to be at a zero point position;
and when the laser spots are adjusted to irradiate the edge of the second plate, rotating the vertical galvanometer of the double-galvanometer scanning system at a second preset angle to enable the vertical galvanometer to be at a zero position.
The invention uses the light spot irradiated on the edge of the calibrating device by the distance measuring device as a reference to calibrate the zero points of the horizontal vibrating mirror and the vertical vibrating mirror of the double-vibrating-mirror scanning system, finds the edge of the calibrating device by the distance measuring device when calibrating the zero point according to the preset angle relation between the edge of the calibrating device and the zero point position, and adjusts the vibrating mirror to be calibrated to the zero point position by adjusting the rotating of the vibrating mirror to be calibrated at the preset angle, so that the zero point calibration is simpler and quicker.
Drawings
A more complete understanding of the present invention and many of the attendant advantages thereof will be more readily apparent as the same becomes better understood by reference to the following detailed description considered in connection with the accompanying drawings in which like reference numbers indicate the same or similar elements and wherein
FIG. 1 is a schematic diagram of a position calibration system for a dual-galvanometer scanning system in accordance with an exemplary embodiment of the present invention;
FIG. 2 is a schematic diagram of an optical path for a position calibration system to correct the zero position of a vertical galvanometer mirror in an exemplary embodiment of the present invention;
FIG. 3 is a schematic optical path diagram of a position calibration system for calibrating the zero position of a horizontal galvanometer in accordance with an exemplary embodiment of the present invention;
FIG. 4 is a schematic flow chart of a method for calibrating the position of a dual-galvanometer scanning system in accordance with an exemplary embodiment of the present invention;
FIG. 5 is a flow chart of adjusting the initial position of the galvanometer in an exemplary embodiment of the present invention;
FIG. 6 is a flowchart of a calibration plate edge calibration scan according to an exemplary embodiment of the present invention.
Detailed Description
FIG. 1 is a schematic diagram of a position calibration system of a dual-galvanometer scanning system in accordance with an exemplary embodiment of the present invention.
As shown in FIG. 1, the position calibration system of the dual-mirror scanning system 10 includes a calibration device 20 and a distance measuring device 30.
The double-galvanometer scanning system comprises a horizontal galvanometer 101 and a vertical galvanometer 102, wherein the horizontal galvanometer 101 can be driven to rotate by a horizontal scanning motor 103, and the vertical galvanometer 102 can be driven to rotate by a vertical scanning motor 104. The horizontal and vertical scanning motors are controlled to drive the horizontal and vertical galvanometers to rotate, so that the light path of light emitted by the laser range finder is changed, and the scanning of a three-dimensional space is realized.
The calibration device 20 includes a first calibration plate 201 disposed in a horizontal direction and a second calibration plate 202 disposed in a vertical direction. The calibration device 20 is located a distance d from the dual galvanometer scanning system, for example the distance d may be about 10 cm. After the dual-galvanometer scanning system 1 is calibrated, the position of the "zero point" of the dual-galvanometer is determined, and the positions of the first calibration plate 101 and the second calibration plate 102 relative to the horizontal galvanometer 101 and the vertical galvanometer 102 are fixed.
The distance measuring device 30 is used to emit laser light to the dual-mirror scanning system and measure distance. The laser emitted from the distance measuring device 30 is reflected to the vertical galvanometer 102 through the horizontal galvanometer 101, and then reflected to the calibrating device 20 through the vertical galvanometer 102. The distance measuring device 30 in the present embodiment may be, for example, a laser distance meter. When the galvanometer is positioned at the zero point position, the position of the laser irradiated on the calibration plate and the edge of the calibration plate have a fixed position relation, namely, when the laser is irradiated on the edge of the calibration plate, the angle of the galvanometer is different from the angle of the zero point position of the galvanometer by a preset angle difference. Therefore, when the laser spot is adjusted to be irradiated on the edge of the second alignment plate 202, the horizontal mirror 101 can be adjusted to the zero point position by rotating the horizontal mirror 101 at a predetermined angle. Similarly, when the laser spot is adjusted to irradiate the edge of the first calibration plate 201, the vertical mirror 102 can be adjusted to the zero position by rotating the vertical mirror 102 at a predetermined angle.
Fig. 2 and 3 are schematic optical path diagrams of the position calibration system for correcting zero positions of the vertical galvanometer and the horizontal galvanometer according to the exemplary embodiment of the invention.
As shown in fig. 2, when the zero point position of the vertical galvanometer 102 is corrected, it is necessary to irradiate a laser spot at the upper edge O1 of the first calibration plate 201. As shown in fig. 3, when the zero point position of the horizontal galvanometer 101 is corrected, the laser spot needs to be irradiated to the right edge O2 of the second calibration plate 202.
FIG. 4 is a flowchart illustrating a method for calibrating a position of a dual-galvanometer scanning system in accordance with an exemplary embodiment of the present invention.
As shown in fig. 4, the position calibration method of the dual-galvanometer scanning system of the present invention includes the following steps:
the position calibration method of the double-oscillating-mirror scanning system comprises the following steps:
step S41: the horizontal galvanometer 101 of the dual-galvanometer scanning system is rotated at a step angle to scan the edge position of the laser spot irradiated on the second calibration plate 202. The horizontal oscillating mirror 101 rotates at a step angle, the distance data at each step angle is measured by the distance measuring device, and when the change of the distance data measured by the distance measuring device meets a predetermined condition, that is, when a distance jump occurs, it can be determined that the horizontal oscillating mirror 101 rotates until the laser spot irradiates the edge position O2 of the second calibration board 202.
Step S42: when the horizontal galvanometer 101 is rotated until the laser spot irradiates the edge of the second calibration plate 202, the horizontal galvanometer 101 is adjusted to rotate by a predetermined angle to adjust the horizontal galvanometer 101 to the horizontal zero point position.
Step S43: the vertical galvanometer 102 of the dual-galvanometer scanning system is rotated at a step angle to scan the edge position of the laser spot irradiated on the first calibration plate 201. The distance data at each step angle is measured by the distance measuring device as the vertical galvanometer 102 rotates at the step angle, and when the change of the distance data measured by the distance measuring device meets a predetermined condition, that is, when a distance jump occurs, it can be determined that the vertical galvanometer 102 rotates until the laser spot irradiates the edge position O1 of the first calibration board 201.
Step S44: when the vertical galvanometer 102 is rotated until the laser spot irradiates the edge of the first calibration plate 201, the vertical galvanometer 102 is adjusted to rotate by a predetermined angle so as to adjust the vertical galvanometer 102 to the horizontal zero point position.
The principle and steps of the position calibration method of the double galvanometer scanning system will be detailed below:
determination of the initial position:
the zero positions of the horizontal vibrating mirror and the vertical vibrating mirror are respectively recorded as HoAnd VoAnd the positions of the horizontal vibrating mirror and the vertical vibrating mirror at the initial calibration are respectively recorded as HuAnd Vu. After the calibration plate is installed and fixed, the theoretical values of the edge, the horizontal zero point and the vertical zero point are also fixed and respectively marked as ChAnd CvAnd when the vertical vibrating mirror is positioned at the zero point, the theoretical value of reflecting the laser from the horizontal vibrating mirror to the first calibration plate is recorded as LchAnd when the horizontal vibrating mirror is positioned at the zero point, the theoretical value of the vertical vibrating mirror reflecting the laser to the second calibration plate is recorded as Lcv。
At the beginning of calibration, the positions of the horizontal galvanometer and the vertical galvanometer may or may not be at zero, and in the worst case, are not within the range of the available scanning area. In order to improve the calibration efficiency and simplify the calibration method, the laser emergent light spot is firstly adjusted to be within the effective scanning area, and the optimal position is near the zero point.
In order to adjust the initial position of the calibration to the optimal position, what needs to be done is to detect the approximate position of the edge of the calibration plate, as shown in fig. 5, the flow chart for adjusting the initial position of the galvanometer is as follows:
1. the fixed point measurement is carried out at the initial position, if the measured distance is in the effective range, namely the measured distance is far larger than the distance value of the calibration plate, or no return value exists (the light spot of the laser range finder does not fall on an effective reflection object, or no return value exists when the energy returned by the target is too little), at the moment, the fixed point measurement is carried out after the horizontal galvanometer is gradually adjusted to rotate anticlockwise for α degrees until the distance jump occurs, namely the distance value is changed into LcThe preferred range of the system is 0.5 x LcTo 2 x LcAnd clockwise returning the horizontal mirror back to the C position at the jumping pointhGradually adjusting the vertical vibrating mirror to rotate anticlockwise for α degrees, performing fixed-point measurement until distance jump occurs, and adjusting the horizontal mirror back clockwise to C at the jump pointvα, selecting an angle, taking the width of the calibration plate as a reference, selecting two points on the calibration plate which can be measured by the rotating galvanometer, and selecting an equal division angle of 360 degrees, wherein the system is preferably 6 degrees;
2. if the fixed point measurement at the initial position is not in the effective range, the scanning position is not in the effective area, at the moment, the horizontal galvanometer is gradually adjusted to rotate clockwise α degrees for fixed point measurement, whether a jump point occurs or not is judged, namely the distance value is changed to be far more than the distance of the calibration plate or to be an invalid value, and the horizontal galvanometer is continuously adjusted clockwise C at the jump pointhIf the horizontal galvanometer rotates for a full circle and no jump point is found, the vertical galvanometer is adjusted clockwise α degrees and then the jump point is searched again until the horizontal galvanometer is continuously adjusted clockwise C after the jump point is foundhAnd (4) an angle.
3. At the moment, the scanning point of the system is positioned in the effective area, and the step of adjusting the vertical galvanometer in the first step is executed.
Calibration plate edge scanning and data analysis resolving:
as shown in fig. 6, the flow of calibration plate edge calibration scan is as follows:
first, starting from the adjusted position, i.e. around zero, the horizontal galvanometer is adjusted to rotate counterclockwise by Chα degrees, then the horizontal galvanometer is rotated at the system minimum step angle delta and measured N times at that location fixed point, the system preferably takes N1000.
The horizontal galvanometer gradually moves, a far target is measured by the laser range finder at the beginning, when the distance value of the target reaches the edge of the calibration plate, a part of laser spots fall on the calibration plate, and the spots gradually become all to fall on the calibration baffle along with the continuous movement of the galvanometer.
The distance value measured for the ith time is recorded as Li。
After N measurements are completed, all L are measurediMaking statistics, and making statistics to satisfy Lch-σ≤Li≤LchThe number of + σ measurements is denoted as M. Where σ is the measured standard deviation of the laser rangefinder.
When the condition 0.5-lambda.ltoreq.M/N.ltoreq.0.5 + lambda is satisfied, this position is indicated as the edge position of the calibration plate.
λ in the above formula represents the width of the interval range, and this value is determined by the distance of the calibration plate and the size of the spot. λ can be determined by: after calibration was completed, the horizontal edge scan of the calibration plate was performed manually, and the value of M/N for each minimum step angle was recorded as: 0.5-K0,0.5-K1,0.5-K2…, selecting three numbers closest to 0.5, respectively marked as 0.5-Ki-1,0.5+Ki,0.5+Ki+1Then λ ═ Ki+1+Ki-1)/4。
And the position of the ith point from the horizontal zero point is Ho。
Starting from the edge position, the clockwise rotation H of the horizontal alignment mirroroIt returns to zero.
Next, the zero point of the vertical galvanometer is continuously calibrated:
adjusting horizontal galvanometer to rotate anticlockwise Cvα degrees, then rotate the horizontal galvanometer at the system minimum step angle delta and perform fixed point measurement N times at the position.
The vertical galvanometer moves step by step, when a far target at the beginning of a target distance value measured by the laser range finder reaches the edge of the calibration plate, a part of laser spots fall on the calibration plate, and the spots gradually become all to fall on the calibration baffle along with the continuous movement of the galvanometer, as shown in fig. 2.
The distance value measured for the ith time is recorded as Li。
After N measurements are completed, all L are measurediMaking statistics, and making statistics to satisfy Lcv-σ≤Li≤LcvThe number of + σ measurements is denoted as M. Where σ is the measured standard deviation of the laser rangefinder.
When the condition 0.5-gamma is less than or equal to M/N is less than or equal to 0.5+ gamma, the position is shown to be at the edge position of the calibration plate.
γ in the above formula represents the width of the interval range, and this value is determined by the distance of the calibration plate and the size of the spot. γ can be determined by the following method: after calibration was completed, the horizontal edge scan of the calibration plate was performed manually, and the value of M/N for each minimum step angle was recorded as: 0.5-K0,0.5-K1,0.5-K2…, selecting three numbers closest to 0.5, respectively marked as 0.5-Ki-1,0.5+Ki,0.5+Ki+1Then γ is (K)i+1+Ki-1)/4。
It is noted that there may be differences in the values of λ and γ, since the shape of the laser spot may not be uniform in the horizontal and vertical directions.
And the position of the ith point from the vertical zero point is Vo。
Starting from the edge position, the clockwise rotation V of the horizontal alignment mirroroIt returns to zero.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. A position calibration method of a double-oscillating-mirror scanning system comprises a distance measuring device and a calibration device, and is characterized by comprising the following steps:
rotating a horizontal galvanometer of the double-galvanometer scanning system at a step angle, and measuring distance data fed back by the distance measuring device under each step angle by the horizontal galvanometer;
when the horizontal galvanometer rotates to a first position at which a laser spot emitted by the distance measuring device irradiates the edge of a first plate of the calibrating device, the horizontal galvanometer is adjusted to rotate by a first preset angle at the first position so as to adjust the horizontal galvanometer to a horizontal zero point position;
rotating a vertical galvanometer of the double-galvanometer scanning system at a step angle, and measuring distance data fed back by the distance measuring device under each step angle by the vertical galvanometer;
when the vertical galvanometer rotates to a second position at which the laser spot emitted by the distance measuring device irradiates the edge of a second plate of the calibrating device, adjusting the vertical galvanometer to rotate by a second preset angle at the second position so as to adjust the vertical galvanometer to a vertical zero point position; and
after the horizontal galvanometer is rotated for a circle, when the distance data measured by the distance measuring device does not have distance jump, the vertical galvanometer is rotated for an angle, and then the jump point is searched again by rotating the horizontal galvanometer, when the distance data measured by the distance measuring device has distance jump, the horizontal galvanometer is rotated by the first preset angle at the jump point of the horizontal galvanometer corresponding to the distance jump, so that the horizontal galvanometer is adjusted to a first position close to the zero point; after the horizontal galvanometer is adjusted to the first adjacent zero point position, rotating the vertical galvanometer by an angle, and when the distance measuring device measures distance data and distance jump occurs, rotating the vertical galvanometer by the second preset angle at the jump point of the vertical galvanometer corresponding to the distance jump, so as to adjust the vertical galvanometer to the second adjacent zero point position; or
After the vertical galvanometer is rotated for one circle, when the distance data measured by the distance measuring device does not have distance jump, the horizontal galvanometer is rotated for an angle, and then the jump point is searched again by rotating the vertical galvanometer, when the distance data measured by the distance measuring device has distance jump, the vertical galvanometer is rotated by the second preset angle at the jump point of the vertical galvanometer corresponding to the distance jump, so that the vertical galvanometer is adjusted to a second position close to the zero point; after the vertical galvanometer is adjusted to the second adjacent zero point position, rotating the horizontal galvanometer by an angle, and when the distance measuring device measures distance data and distance jump occurs, rotating the horizontal galvanometer by the first preset angle at a jump point of the horizontal galvanometer corresponding to the distance jump, so as to adjust the horizontal galvanometer to the first adjacent zero point position;
when the distance data measured by the distance measuring device is changed into a theoretical value that the vertical vibrating mirror reflects laser to the first plate when the vertical vibrating mirror is positioned at the zero point or a theoretical value that the vertical vibrating mirror reflects laser to the second plate when the horizontal vibrating mirror is positioned at the zero point is 0.5-2 times, the distance jump is judged to occur.
2. The method for position calibration of a dual-mirror scanning system according to claim 1,
when the distance data change measured by the distance measuring device corresponding to the rotation of the horizontal vibrating mirror meets a preset condition, the horizontal vibrating mirror rotates to a first position where a laser spot emitted by the distance measuring device irradiates the edge of a first plate of the calibrating device.
3. The method for position calibration of a dual-mirror scanning system according to claim 1,
and when the distance data change measured by the distance measuring device corresponding to the rotation of the vertical galvanometer meets a preset condition, the vertical galvanometer rotates to a second position where the laser spot emitted by the distance measuring device irradiates the edge of a second plate of the calibrating device.
4. The method for calibrating the position of a dual-mirror scanning system of claim 1, further comprising:
after the horizontal galvanometer is rotated for an angle, when distance jump occurs in distance data measured by the distance measuring device, the horizontal galvanometer is rotated at a first preset angle at a jump point so as to adjust the horizontal galvanometer to a first position adjacent to a zero point;
and after the horizontal galvanometer is adjusted to the first adjacent zero point position, rotating the vertical galvanometer by an angle, and when the distance data measured by the distance measuring device has a distance jump, rotating the vertical galvanometer by the second preset angle at the jump point so as to adjust the vertical galvanometer to the second adjacent zero point position.
5. The method for calibrating the position of a dual-mirror scanning system of claim 1, further comprising:
after the vertical galvanometer is rotated for an angle, when distance jump occurs in distance data measured by the distance measuring device, the vertical galvanometer is rotated at a second preset angle at a jump point so as to adjust the vertical galvanometer to a second position adjacent to a zero point;
and after the vertical galvanometer is adjusted to the second adjacent zero point position, rotating the horizontal galvanometer by an angle, and when the distance data measured by the distance measuring device has a distance jump, rotating the horizontal galvanometer by the first preset angle at the jump point so as to adjust the horizontal galvanometer to the first adjacent zero point position.
6. The method for calibrating the position of a dual-mirror scanning system according to any of claims 4 to 5, further comprising:
after the horizontal galvanometer is rotated at an angle at the first position adjacent to the zero point, the horizontal galvanometer is rotated at the step angle, the distance value is measured for N times at the step angle through the distance measuring device, and whether the horizontal galvanometer is positioned at the first position is judged according to the distance value measured for N times.
7. The method for position calibration of a dual-mirror scanning system according to claim 6,
statistical satisfaction of Lch-σ≤Li≤Lch+ σ of the number of measured distance values M, where σ is the measurement standard deviation of the distance measuring device, LiIs the distance value of the ith measurement, LchThe theoretical value of the horizontal vibrating mirror reflecting laser to the first plate when the vertical vibrating mirror is positioned at the zero point;
when the condition that M/N is more than or equal to 0.5 and more than or equal to 0.5+ lambda is met, the horizontal galvanometer is located at the first position;
where λ represents the width of the interval range.
8. The method for calibrating the position of a dual-mirror scanning system according to any of claims 4 to 5, further comprising:
and after the vertical galvanometer is rotated at an angle at the second position adjacent to the zero point, the vertical galvanometer is rotated at the step angle, distance data are measured for N times at the step angle through a distance measuring device, and whether the vertical galvanometer is positioned at the second position is judged according to the distance data measured for multiple times.
9. The method for position calibration of a dual-mirror scanning system according to claim 8,
statistical satisfaction of Lcv-σ≤Li≤Lcv+ σ of the number of measured distance values M, where σ is the measurement standard deviation of the distance measuring device, LiIs the distance value of the ith measurement, LcvThe theoretical value is that when the horizontal vibrating mirror is positioned at the zero point, the vertical vibrating mirror reflects the laser to the second plate;
when the condition that M/N is more than or equal to 0.5-gamma and less than or equal to 0.5+ gamma is met, the vertical galvanometer is located at the second position;
where γ represents the width of the interval range.
10. A position calibration system for a dual-mirror scanning system, comprising:
a calibration device including a first plate disposed in a first direction and a second plate disposed in a second direction crossing the first direction;
the distance measuring device is used for emitting laser to the double-vibrating-mirror scanning system and measuring the distance;
when laser spots are adjusted to irradiate the edge of the first plate, rotating a horizontal galvanometer of the double-galvanometer scanning system at a first preset angle to enable the horizontal galvanometer to be at a zero point position;
when laser spots are adjusted to irradiate the edge of the second plate, rotating a vertical galvanometer of the double-galvanometer scanning system at a second preset angle to enable the vertical galvanometer to be at a zero position; and
after the horizontal galvanometer is rotated for a circle, when the distance data measured by the distance measuring device does not have distance jump, the vertical galvanometer is rotated for an angle, and then the jump point is searched again by rotating the horizontal galvanometer, when the distance data measured by the distance measuring device has distance jump, the horizontal galvanometer is rotated by the first preset angle at the jump point of the horizontal galvanometer corresponding to the distance jump, so that the horizontal galvanometer is adjusted to a first position close to the zero point; after the horizontal galvanometer is adjusted to the first adjacent zero point position, rotating the vertical galvanometer by an angle, and when the distance measuring device measures distance data and distance jump occurs, rotating the vertical galvanometer by the second preset angle at the jump point of the vertical galvanometer corresponding to the distance jump, so as to adjust the vertical galvanometer to the second adjacent zero point position; or
After the vertical galvanometer is rotated for one circle, when the distance data measured by the distance measuring device does not have distance jump, the horizontal galvanometer is rotated for an angle, and then the jump point is searched again by rotating the vertical galvanometer, when the distance data measured by the distance measuring device has distance jump, the vertical galvanometer is rotated by the second preset angle at the jump point of the vertical galvanometer corresponding to the distance jump, so that the vertical galvanometer is adjusted to a second position close to the zero point; after the vertical galvanometer is adjusted to the second adjacent zero point position, rotating the horizontal galvanometer by an angle, and when the distance measuring device measures distance data and distance jump occurs, rotating the horizontal galvanometer by the first preset angle at a jump point of the horizontal galvanometer corresponding to the distance jump, so as to adjust the horizontal galvanometer to the first adjacent zero point position;
when the distance data measured by the distance measuring device is changed into a theoretical value that the vertical vibrating mirror reflects laser to the first plate when the vertical vibrating mirror is positioned at the zero point or a theoretical value that the vertical vibrating mirror reflects laser to the second plate when the horizontal vibrating mirror is positioned at the zero point is 0.5-2 times, the distance jump is judged to occur.
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| CN109773332B (en) * | 2018-12-29 | 2021-04-27 | 大族激光科技产业集团股份有限公司 | Multi-galvanometer system correction method and multi-galvanometer correction system |
| CN114378425A (en) * | 2020-10-15 | 2022-04-22 | 深圳市大族数控科技股份有限公司 | Laser processing equipment and vibrating mirror installation method |
| CN113092068B (en) * | 2021-04-02 | 2022-05-03 | 国网浙江省电力有限公司嘉兴供电公司 | Zero calibration method and zero calibration system of laser scanning galvanometer system |
| CN113390346A (en) * | 2021-05-20 | 2021-09-14 | 爱司凯科技股份有限公司 | Track geometric parameter measuring instrument using double-galvanometer laser scanning module |
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