CN113092068B - Zero calibration method and zero calibration system of laser scanning galvanometer system - Google Patents
Zero calibration method and zero calibration system of laser scanning galvanometer system Download PDFInfo
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- CN113092068B CN113092068B CN202110362366.3A CN202110362366A CN113092068B CN 113092068 B CN113092068 B CN 113092068B CN 202110362366 A CN202110362366 A CN 202110362366A CN 113092068 B CN113092068 B CN 113092068B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
Abstract
The invention discloses a zero calibration method and a zero calibration system of a laser scanning galvanometer system, which comprise the following steps: emitting a correction light source to the galvanometer lens, and detecting the light source power p of the correction light source after the light source is reflected by the galvanometer lens; comparing the light source power P with a preset maximum power value P, and entering the next step when the light source power P is smaller than the maximum power value P; sending a control voltage V to a galvanometer motor, and changing the numerical value of the control voltage V from the minimum value to the maximum value so that the galvanometer lens scans once along the whole range; continuously detecting the power p of the light source and the control voltage V in the scanning process; when the value of the light source power P is consistent with the maximum power value P, recording the control voltage V of the current state, and adjusting the galvanometer motor by taking the control voltage V as a zero calibration signal Vcal to finish the correction work. The invention has the characteristics of good universality, high calibration precision and low calibration cost.
Description
Technical Field
The invention relates to a laser scanning galvanometer system, in particular to a zero calibration method and a zero calibration system of the laser scanning galvanometer system.
Background
When the laser scanning galvanometer system works, the galvanometer motor can swing the laser reflector by a certain angle according to an input signal and a certain control protocol to control the laser beam to deflect. The control precision of the laser scanning galvanometer system is mainly related to the scanning precision of a galvanometer motor and the position stability of a galvanometer lens, wherein the control precision of the laser scanning galvanometer system is ensured by a closed loop feedback control system driven by the galvanometer motor, and the control precision of the laser scanning galvanometer system is ensured by the zero position of the galvanometer. However, in the working process of the laser scanning galvanometer system, the laser scanning track on the irradiation target is often relatively translated due to zero offset of the galvanometer lens, so that the laser scanning track deviates from the original picture center. And because the offset can not be found and corrected by monitoring the galvanometer motor, how to solve the zero offset of the galvanometer lens becomes a problem which needs to be solved urgently by manufacturers at present.
In order to solve the problem, patent 201410192548.0 discloses a method for sensing and correcting the position of a galvanometer based on a calibration grid on a working surface, which is based on the principle that an industrial camera is used to shoot an image of the calibration grid, then the image is compared with an original image to obtain an error value, and then the position of the galvanometer is corrected according to the error value. Although the mode can correct the zero position of the galvanometer lens, the calibration network on the working surface is required to be utilized, so that the mode is only suitable for scanning of laser projection application, cannot be applied to space scanning of laser radars and the like, and is poor in universality. On the other hand, the calibration accuracy of the correction method is also highly correlated with the pixel resolution of the industrial camera; when an industrial camera with low pixels is selected, a large calibration error exists, and when an industrial camera with high pixels is selected, the calibration cost is greatly increased, and the cost performance of the laser scanning galvanometer system is reduced.
Therefore, the existing galvanometer zero calibration method for the laser scanning galvanometer system has the problems of poor universality, low calibration precision and high calibration cost.
Disclosure of Invention
The invention aims to provide a zero calibration method and a zero calibration system of a laser scanning galvanometer system. The method has the characteristics of good universality, high calibration precision and low calibration cost.
The technical scheme of the invention is as follows: the zero calibration method of the laser scanning galvanometer system comprises the following steps:
firstly, emitting a correction light source to a galvanometer lens, and detecting the power p of the light source after the correction light source is reflected by the galvanometer lens;
comparing the light source power P with a preset maximum power value P, and finishing correction when the light source power P1 is the same as the maximum power value P; when the light source power P is smaller than the maximum power value P, entering the next step;
thirdly, a control voltage V is sent to the galvanometer motor, the numerical value of the control voltage V is changed from the minimum value to the maximum value, and the galvanometer lens is scanned once along the whole range; continuously detecting the power p of the light source and the control voltage V in the scanning process;
and fourthly, when the value of the light source power P is consistent with the maximum power value P, recording the control voltage V in the current state, and adjusting the galvanometer motor by taking the control voltage V as a zero calibration signal Vcal to finish the correction work.
The zero calibration system used for realizing the zero calibration method of the laser scanning galvanometer system comprises a galvanometer body, wherein the galvanometer body comprises a galvanometer motor and galvanometer lenses, one or more groups of calibration systems are arranged on the outer sides of the galvanometer lenses, each calibration system comprises an emitter and a detector, a zero calibrator is connected to the outside of the detector, a galvanometer control unit and a galvanometer driver are connected to the outside of the zero calibrator, and the galvanometer driver is respectively connected with the galvanometer control unit and the galvanometer motor.
In the zero calibration system, the plurality of sets of calibration systems are respectively arranged outside the galvanometer main bodies with different dimensions.
In the zero calibration system, the detector is a photodetector.
In the zero calibration system, the detector is a collimator and a photodetector which are connected with each other.
In the zero calibration system, the detector includes a circulator, and a collimator, a photodetector, and an emitter are sequentially connected to the outside of the circulator.
In the zero calibration system, the transmitter is a laser.
Compared with the prior art, the invention has the following characteristics:
(1) according to the invention, the whole detection process can be independently completed by emitting the correction light source to the galvanometer lens and then receiving and detecting the power of the reflected correction light source without the assistance of external equipment, so that the universality of the invention is effectively improved;
(2) by comparing the light source power P with the maximum power value P and adjusting the control voltage V of the galvanometer motor according to the comparison result, the calibration precision and the calibration time of the laser scanning galvanometer system can be effectively improved, so that the calibration precision can be controlled within the range of +/-0.015 degrees, and the calibration process can be completed within 4 seconds;
(3) compared with the prior art, the invention can effectively reduce the precision requirement on the detection piece by optimizing the structure of the zero calibration system, thereby reducing the equipment cost of the calibration system and improving the universality and the cost performance of the invention;
(4) compared with the existing image calibration mode, the mode of receiving and detecting the correction light source can effectively reduce the accommodating space required by the calibration system, further reduce the overall volume of the laser scanning galvanometer system and improve the integration and the universality of the scanning galvanometer system;
(5) the structure of the zero calibration system is further limited aiming at the calibration effect, and the collimator and the photoelectric detector are connected with each other and then receive the calibration light source, so that the receiving surface of the detector can be effectively shortened, and the calibration precision of the zero calibration system is improved; the detector consisting of the circulator, the collimator and the photoelectric detector not only can improve the calibration precision of the invention, but also can effectively reduce the installation volume required by the detector, so that the overall appearance of the correction system and the vibrating mirror system can be controlled within 90mm x 70mm x 15mm, and the installation volume of the vibrating mirror system with zero calibration is further reduced;
therefore, the invention has the characteristics of good universality, high calibration precision and low calibration cost.
Drawings
FIG. 1 is a diagram illustrating the detection effect of the present invention when the galvanometer lens is shifted;
FIG. 2 is a graph showing the effect of the present invention after the galvanometer lens calibration;
FIG. 3 is a functional schematic of the zero calibration system;
FIG. 4 is a schematic view of the structure of the probe in embodiment 1;
FIG. 5 is a schematic view of the structure of the detector in embodiment 2;
fig. 6 is a schematic structural view of a detector in embodiment 3.
The labels in the figures are: the system comprises a 1-galvanometer motor, a 2-galvanometer lens, a 3-emitter, a 4-detector, a 5-zero calibrator, a 6-galvanometer control unit, a 7-galvanometer driver, a 401-photoelectric detector, a 402-collimator and a 403-circulator.
Detailed Description
The invention is further illustrated by the following figures and examples, which are not to be construed as limiting the invention.
Example 1. The zero calibration method of the laser scanning galvanometer system comprises the following steps:
firstly, a transmitter sends a correction light source to a galvanometer lens, and a detector detects the power p of the light source after the correction light source is reflected by the galvanometer lens;
comparing the light source power P with a preset maximum power value P by a zero calibrator, wherein the maximum power value P is the light source power received by the detector when the galvanometer lens is in a zero position; when the light source power P1 is the same as the maximum power value P, finishing the correction work; when the light source power P is smaller than the maximum power value P, entering the next step;
driving a galvanometer control unit to send a control voltage V to a galvanometer driver by a zero calibrator, changing the numerical value of the control voltage V from a minimum value to a maximum value, and controlling a galvanometer motor to rotate by the galvanometer driver according to the control voltage V so that a galvanometer lens scans once along the whole range; the zero calibrator continuously detects the power p of the light source and the control voltage V in the scanning process;
when the value of the light source power P is consistent with the maximum power value P, the zero calibrator records the control voltage V in the current state and outputs the control voltage V as a zero calibration signal Vcal to the galvanometer control unit; and then the galvanometer control unit outputs the zero calibration signal Vcal to a galvanometer driver, and the galvanometer driver drives a galvanometer motor to rotate the galvanometer lens to a zero position so as to finish the correction work.
The zero calibration system used for realizing the zero calibration method of the laser scanning galvanometer system is shown in figures 1-4 and comprises a galvanometer body, wherein the galvanometer body comprises a galvanometer motor 1 and a galvanometer lens 2, one or more groups of calibration systems are arranged on the outer side of the galvanometer lens 2, each calibration system comprises an emitter 3 and a detector 4, a zero calibrator 5 is connected to the outer part of each detector 4, a galvanometer control unit 6 and a galvanometer driver 7 are connected to the outer part of each zero calibrator 5, and the galvanometer driver 7 is respectively connected with the galvanometer control unit 6 and the galvanometer motor 1.
The mark A in FIG. 1 is the incident laser of the laser scanning galvanometer system, and the mark B in FIG. 1 is the scanning line of the incident laser reflected by the laser scanning galvanometer system
The multiple groups of correction systems are respectively arranged on the outer sides of the galvanometer main bodies with different dimensions.
The detector 4 is a photodetector 401.
The emitter 3 is a laser.
The working principle of the invention is as follows: in the invention, during correction, the emitter 3 and the detector 4 respectively transmit and receive a correction light source, and then the zero calibrator 5 judges whether the galvanometer lens 2 is in the zero position according to the received light source power p. When the galvanometer lens 2 deviates, the zero calibrator 5 outputs a signal to the galvanometer control unit 6, the galvanometer control unit 6 sends a control voltage V to the galvanometer driver 7, and the control voltage V is sequentially increased from the minimum value to the maximum value; the galvanometer driver 7 controls the galvanometer motor 1 to rotate based on the control voltage V, so that the galvanometer lens 2 completes the whole rotation action and scans the correction light source once in the whole range. When the galvanometer lens 2 scans, the zero calibrator 5 detects the light source power p and the control voltage V received by the detector 4 in real time; when the galvanometer lens 2 rotates until the light source power P is consistent with the maximum power value P, the galvanometer lens 2 is in a zero position at the moment, and the zero calibrator 5 outputs the control voltage V in the state to the galvanometer control unit 6 as a zero calibration signal Vcal. After receiving the corresponding zero calibration signal Vcal, the galvanometer control unit 6 transmits the corresponding control voltage V to the galvanometer driver 7, and the galvanometer driver 7 controls the galvanometer motor 1 to rotate the galvanometer lens 2 to the zero position, thereby completing calibration of the galvanometer lens 2.
Taking a conventional laser galvanometer with a light spot of 10mm as an example, the small step response time of the laser galvanometer is 0.4ms, and the detection time is 0.4 ms; the time for scanning once in the whole range is 4 seconds by calculating within the range of +/-2 degrees with the minimum precision of 15 micro radians. Meanwhile, the positioning accuracy of the conventional laser galvanometer with 10mm light spots is 15urad, the power monitoring resolution accuracy is 1%, and the angle control accuracy of the laser galvanometer is 0.015 degree.
The overall shape of the correction system and the existing galvanometer system of the embodiment can be controlled within 90mm x 70mm x 15mm, and the size of the conventional galvanometer shell is 105mm x 115mm x 90mm, so that the space cost of the laser scanning galvanometer system introduced by the invention is not obvious, and the laser scanning galvanometer system has excellent applicability.
Example 2. The zero calibration method of the laser scanning galvanometer system comprises the following steps:
firstly, a transmitter sends a correction light source to a galvanometer lens, and a detector detects the power p of the light source after the correction light source is reflected by the galvanometer lens;
comparing the light source power P with a preset maximum power value P by a zero calibrator, and finishing the correction work when the light source power P1 is the same as the maximum power value P; when the light source power P is smaller than the maximum power value P, entering the next step;
driving a galvanometer control unit to send a control voltage V to a galvanometer driver by a zero calibrator, changing the numerical value of the control voltage V from a minimum value to a maximum value, and controlling a galvanometer motor to rotate by the galvanometer driver according to the control voltage V so that a galvanometer lens scans once along the whole range; the zero calibrator continuously detects the power p of the light source and the control voltage V in the scanning process;
when the value of the light source power P is consistent with the maximum power value P, the zero calibrator records the control voltage V in the current state and outputs the control voltage V as a zero calibration signal Vcal to the galvanometer control unit; and then the galvanometer control unit outputs the zero calibration signal Vcal to a galvanometer driver, and the galvanometer driver drives a galvanometer motor to rotate the galvanometer lens to a zero position so as to finish the correction work.
The zero calibration system used for realizing the zero calibration method of the laser scanning galvanometer system comprises a galvanometer main body, the galvanometer main body comprises a galvanometer motor 1 and a galvanometer lens 2, one or more groups of calibration systems are arranged on the outer side of the galvanometer lens 2, the calibration systems comprise an emitter 3 and a detector 4, the detector 4 is externally connected with a zero calibrator 5, the zero calibrator 5 is externally connected with a galvanometer control unit 6 and a galvanometer driver 7, and the galvanometer driver 7 is respectively connected with the galvanometer control unit 6 and the galvanometer motor 1.
The multiple groups of correction systems are respectively arranged on the outer sides of the galvanometer main bodies with different dimensions.
The detector 4 is a collimator 402 and a photodetector 401 connected to each other.
The emitter 3 is a laser.
In this embodiment, by optimizing the structure of the detector 4, the reflected correction light source can be received by the collimator 402, and then the correction light source received by the collimator 402 is detected by the photodetector 401; thereby reducing the collection range of the correction light source by the collimator 402, i.e. improving the calibration accuracy of the present embodiment.
Example 3. The zero calibration method of the laser scanning galvanometer system comprises the following steps:
firstly, a transmitter sends a correction light source to a galvanometer lens, and a detector detects the power p of the light source after the correction light source is reflected by the galvanometer lens;
comparing the light source power P with a preset maximum power value P by a zero calibrator, and finishing the correction work when the light source power P1 is the same as the maximum power value P; when the light source power P is smaller than the maximum power value P, entering the next step;
driving a galvanometer control unit to send a control voltage V to a galvanometer driver by a zero calibrator, changing the numerical value of the control voltage V from a minimum value to a maximum value, and controlling a galvanometer motor to rotate by the galvanometer driver according to the control voltage V so that a galvanometer lens scans once along the whole range; the zero calibrator continuously detects the power p of the light source and the control voltage V in the scanning process;
when the value of the light source power P is consistent with the maximum power value P, the zero calibrator records the control voltage V in the current state and outputs the control voltage V as a zero calibration signal Vcal to the galvanometer control unit; then, the galvanometer control unit outputs the zero calibration signal Vcal to a galvanometer driver, and the galvanometer driver drives a galvanometer motor to rotate a galvanometer lens to a zero position so as to finish the calibration work.
The zero calibration system used for realizing the zero calibration method of the laser scanning galvanometer system is composed of a galvanometer main body, the galvanometer main body comprises a galvanometer motor 1 and a galvanometer lens 2, one or more groups of calibration systems are arranged on the outer side of the galvanometer lens 2, the calibration systems comprise an emitter 3 and a detector 4, a zero calibrator 5 is connected to the outer part of the detector 4, a galvanometer control unit 6 and a galvanometer driver 7 are connected to the outer part of the zero calibrator 5, and the galvanometer driver 7 is respectively connected with the galvanometer control unit 6 and the galvanometer motor 1.
The multiple groups of correction systems are respectively arranged on the outer sides of the galvanometer main bodies with different dimensions.
The detector 4 comprises a circulator 403, the circulator 403 can be a three-port device circulator, and a collimator 402, a photodetector 401 and a correction light source 3 are sequentially connected to the exterior of the circulator 403.
The emitter 3 is a laser.
In the embodiment, the structure of the detector 4 is optimized, so that the detector 4 is formed by integrating the transmitting and receiving of a circulator structure, when the laser collimator works, the transmitter 3 transmits laser, the laser is input through the port 1 of the circulator 403, then is output from the port 2, passes through the collimator 402, and is collimated by the collimator 402 and then directly emits to the galvanometer lens 2. The laser light is reflected by the galvanometer mirror 2 and then input into the port 2 of the circulator 403 again, and then output from the port 3 and enter the photoelectric detector 401 for detection. Under the cooperation, the detector 4 can not only improve the calibration precision, but also further reduce the installation volume of the detector, further compress the size of 50% on the basis of embodiment 1, and meet the requirement of the integration space of the existing laser galvanometer system.
Claims (1)
1. The zero calibration method of the laser scanning galvanometer system is characterized by comprising the following steps of:
firstly, emitting a correction light source to a galvanometer lens, and detecting the power p of the light source after the correction light source is reflected by the galvanometer lens;
comparing the light source power P with a preset maximum power value P, and finishing correction when the light source power P1 is the same as the maximum power value P; when the light source power P is smaller than the maximum power value P, entering the next step;
thirdly, a control voltage V is sent to the galvanometer motor, the numerical value of the control voltage V is changed from the minimum value to the maximum value, and the galvanometer lens is scanned once along the whole range; continuously detecting the power p of the light source and the control voltage V in the scanning process;
and fourthly, when the value of the light source power P is consistent with the maximum power value P, recording the control voltage V in the current state, and adjusting the galvanometer motor by taking the control voltage V as a zero calibration signal Vcal to finish the correction work.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1605278A (en) * | 1977-04-13 | 1987-09-16 | Comp Generale Electricite | Laser cavity |
| CN101804521A (en) * | 2010-04-15 | 2010-08-18 | 中国电子科技集团公司第四十五研究所 | Galvanometer system correction device and correction method thereof |
| CN104259656A (en) * | 2014-08-20 | 2015-01-07 | 湖南华曙高科技有限责任公司 | Laser galvanometer calibration system and calibration method thereof |
| WO2017057243A1 (en) * | 2015-09-30 | 2017-04-06 | 三菱電機株式会社 | Device and method for optical axis alignment and assembly of optical communication module |
| CN106891099A (en) * | 2017-03-02 | 2017-06-27 | 华中科技大学 | A kind of automatic laser scanning galvanometer calibration equipment and laser galvanometer equipment |
| CN107314740A (en) * | 2016-04-27 | 2017-11-03 | 深圳中集天达空港设备有限公司 | A kind of position calibration system and calibration method of dual galvanometer scanning system |
| CN110497075A (en) * | 2019-09-18 | 2019-11-26 | 中国科学院福建物质结构研究所 | A kind of galvanometer correction system and galvanometer bearing calibration |
| CN210451366U (en) * | 2019-09-18 | 2020-05-05 | 中国科学院福建物质结构研究所 | Galvanometer correction system |
| CN214474226U (en) * | 2021-04-02 | 2021-10-22 | 国网浙江省电力有限公司嘉兴供电公司 | Zero calibration laser scanning galvanometer system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI240097B (en) * | 2003-11-25 | 2005-09-21 | Delta Electronics Inc | Alignment method for the optical-electrical element of an optical-electrical device and an optical fiber |
-
2021
- 2021-04-02 CN CN202110362366.3A patent/CN113092068B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1605278A (en) * | 1977-04-13 | 1987-09-16 | Comp Generale Electricite | Laser cavity |
| CN101804521A (en) * | 2010-04-15 | 2010-08-18 | 中国电子科技集团公司第四十五研究所 | Galvanometer system correction device and correction method thereof |
| CN104259656A (en) * | 2014-08-20 | 2015-01-07 | 湖南华曙高科技有限责任公司 | Laser galvanometer calibration system and calibration method thereof |
| WO2017057243A1 (en) * | 2015-09-30 | 2017-04-06 | 三菱電機株式会社 | Device and method for optical axis alignment and assembly of optical communication module |
| CN107314740A (en) * | 2016-04-27 | 2017-11-03 | 深圳中集天达空港设备有限公司 | A kind of position calibration system and calibration method of dual galvanometer scanning system |
| CN106891099A (en) * | 2017-03-02 | 2017-06-27 | 华中科技大学 | A kind of automatic laser scanning galvanometer calibration equipment and laser galvanometer equipment |
| CN110497075A (en) * | 2019-09-18 | 2019-11-26 | 中国科学院福建物质结构研究所 | A kind of galvanometer correction system and galvanometer bearing calibration |
| CN210451366U (en) * | 2019-09-18 | 2020-05-05 | 中国科学院福建物质结构研究所 | Galvanometer correction system |
| CN214474226U (en) * | 2021-04-02 | 2021-10-22 | 国网浙江省电力有限公司嘉兴供电公司 | Zero calibration laser scanning galvanometer system |
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