CN107300799B - Display panel identification component and display panel - Google Patents
Display panel identification component and display panel Download PDFInfo
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- CN107300799B CN107300799B CN201710684934.5A CN201710684934A CN107300799B CN 107300799 B CN107300799 B CN 107300799B CN 201710684934 A CN201710684934 A CN 201710684934A CN 107300799 B CN107300799 B CN 107300799B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133374—Constructional arrangements; Manufacturing methods for displaying permanent signs or marks
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Liquid Crystal (AREA)
Abstract
The invention provides a display panel mark component and a display panel, wherein the display panel mark component comprises: the first mark part is provided with a first mark outer edge, and the shape of the first mark outer edge is a rectangle; the second mark part is provided with a first mark inner edge; the first identification part surrounds the first identification part, and the first identification outer edge and the first identification inner edge are used for identifying the coordinates of the display panel identification component in the two-dimensional plane corresponding to the display panel. Has the advantages that: the coordinates of the display panel identification member in the two-dimensional plane, which are collectively constituted by the first coordinates identified by the first identification portion and the second coordinates identified by the second identification portion, can make the measurement result for the display panel identification member within a predetermined deviation range, so that the measurement result can be made more accurate.
Description
Technical Field
The invention relates to the field of flat panel display manufacturing, in particular to a display panel identification member and a display panel.
Background
In recent years, display technology has been rapidly developed, and flat panel displays have been increasingly developed into people's daily lives instead of bulky CRT (Cathode ray tube) displays. Currently, commonly used flat panel displays include LCD (Liquid Crystal Display) and OLED (Organic Light-Emitting Diode) displays.
The precision length measuring machine is an important optical measuring machine in the manufacture process of a thin film transistor liquid crystal display, is mainly used for measuring the length of the exposure precision of an exposure machine when a first layer of pixel patterns of a glass substrate are manufactured, and directly determines the exposure alignment of the subsequent image manufacture process and the final accuracy of the alignment and lamination. Meanwhile, the apparatus is also commonly used for line width measurement, and the precision length measuring machine is also called a TTP (Total Pitch, alignment precision measurement and inspection mark) length measuring machine.
The TTP is an index of the substrate deformation, and the substrate is subjected to the X and Y deformation measurement after the array process is completed. As shown in fig. 1, a prior art TTP coordinate marking member 101 is shown, which is of a square design. Before deformation, the distance between each side of the square and the coordinate axis is measured, namely X shown in the figure1、X2、Y1、Y2Obtaining the coordinates of the center point of the identification component 101 as
And measuring the central point of the marking member according to the same method after the substrate is deformed.
In some special cases, as shown in fig. 2, after the deformation, the abnormal pattern residue occurs outside the first mark of the mark member 201, and the distance between the abnormal first mark outside of the mark member and the coordinate axis cannot be accurately measured, so that the coordinate of the center point of the mark member cannot be obtained, the exposure alignment of the subsequent image process is affected, and finally, the accuracy of the group bonding is also affected to a certain extent.
Disclosure of Invention
The invention provides a display panel identification member and a display panel, and aims to solve the problem that the display panel identification member cannot be accurately measured (positioned) through an abnormal first identification outer edge due to the abnormality of the first identification outer edge.
In order to achieve the purpose, the technical scheme provided by the invention is as follows:
the present invention provides a display panel identification member, comprising:
the first mark part is provided with a first mark outer edge, and the shape of the first mark outer edge is a rectangle; and
the second mark part is provided with a first mark inner edge;
the first identification part surrounds the second identification part, and the first identification outer edge and the first identification inner edge are used for identifying the coordinates of the display panel identification component in the two-dimensional plane corresponding to the display panel.
According to a preferred embodiment of the present invention, the first identification outer edge includes a first sub-outer edge, a second sub-outer edge, a third sub-outer edge and a fourth sub-outer edge;
the first sub-outer edge, the second sub-outer edge, the third sub-outer edge, and the fourth sub-outer edge are used to identify a first coordinate of the display panel identification member in the two-dimensional plane.
According to a preferred embodiment of the present invention, the shape of the first identification inner edge is any one of a triangle, a rectangle or a circle.
According to a preferred embodiment of the present invention, in a case that the shape formed by the first identification inner edge is a rectangle, the first identification inner edge includes a first sub inner edge, a second sub inner edge, a third sub inner edge and a fourth sub inner edge;
first sub interior limit the second sub interior limit the third sub interior limit with the fourth sub interior limit is used for the sign display panel sign component is in second coordinate in the two-dimensional plane.
According to a preferred embodiment of the present invention, the first mark portion and the second mark portion are formed in the same photolithography process.
The present invention also provides a display panel, including:
a display panel main body;
a display panel identification member disposed on the display panel main body, the display panel identification member comprising:
the first mark part is provided with a first mark outer edge, and the shape of the first mark outer edge is a rectangle; and
the second mark part is provided with a first mark inner edge;
the first identification part surrounds the second identification part, and the first identification outer edge and the first identification inner edge are used for identifying the coordinates of the display panel identification component in the two-dimensional plane corresponding to the display panel.
According to a preferred embodiment of the present invention, the first identification outer edge includes a first sub-outer edge, a second sub-outer edge, a third sub-outer edge and a fourth sub-outer edge;
the first sub-outer edge, the second sub-outer edge, the third sub-outer edge, and the fourth sub-outer edge are used to identify a first coordinate of the display panel identification member in the two-dimensional plane.
According to a preferred embodiment of the present invention, the shape of the first identification inner edge is any one of a triangle, a rectangle or a circle.
According to a preferred embodiment of the present invention, in a case that the shape formed by the first identification inner edge is a rectangle, the first identification inner edge includes a first sub inner edge, a second sub inner edge, a third sub inner edge and a fourth sub inner edge;
first sub interior limit the second sub interior limit the third sub interior limit with the fourth sub interior limit is used for the sign display panel sign component is in second coordinate in the two-dimensional plane.
According to a preferred embodiment of the present invention, the first mark portion and the second mark portion are formed in the same photolithography process.
The invention has the beneficial effects that: compared with the prior art, the second identification part is arranged in the identification component, and the second identification part is in a regular shape; the coordinates of the display panel identification member in the two-dimensional plane, which are formed by the first coordinates identified (located) by the first identification portion (first identification outer edge) and the second coordinates identified (located) by the second identification portion (first identification inner edge), can be such that the measurement result (location result) for the display panel identification member is within a predetermined deviation range, thereby making the measurement result (location result) more accurate.
Drawings
In order to illustrate the embodiments or the technical solutions in the prior art more clearly, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the invention, and it is obvious for a person skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a prior art measurement mark before deformation occurs;
FIG. 2 is a schematic structural diagram of a prior art measurement mark after deformation;
FIG. 3 is a schematic structural diagram of a display panel marking device according to a preferred embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a second display panel of the preferred embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a three-panel display according to a preferred embodiment of the present invention.
Detailed Description
The following description of the various embodiments refers to the accompanying drawings that illustrate specific embodiments in which the invention may be practiced. The directional terms mentioned in the present invention, such as [ upper ], [ lower ], [ front ], [ rear ], [ left ], [ right ], [ inner ], [ outer ], [ side ], are only referring to the directions of the attached drawings. Accordingly, the directional terms used are used for explanation and understanding of the present invention, and are not used for limiting the present invention. In the drawings, elements having similar structures are denoted by the same reference numerals.
The present invention provides a display panel identification member, which is provided in the present embodiment, and can solve the defect that the first identification portion cannot be accurately used for identifying the first coordinate of the display panel identification member in the two-dimensional plane due to the abnormal graph of the identification member outside the first identification in the prior art.
The present invention provides a display panel identification member, comprising: a first mark portion 301 and a second mark portion 302, wherein the first mark portion 301 and the second mark portion 302 are formed in the same photolithography process.
The first mark part is provided with a first mark outer side 303, and the shape formed by the first mark outer side 303 is a rectangle; the first identification outer edge 303 comprises a first sub outer edge, a second sub outer edge, a third sub outer edge and a fourth sub outer edge; the first sub-outer edge, the second sub-outer edge, the third sub-outer edge, and the fourth sub-outer edge are used to identify a first coordinate of the display panel identification member in the two-dimensional plane.
The second mark portion has an inner edge 304 of a first mark, the first mark portion 301 surrounds the first mark portion 301, the outer edge 303 of the first mark portion and the inner edge 304 of the first mark portion are used for identifying the coordinates of the display panel identification component in the two-dimensional plane corresponding to the display panel.
Under the condition that the shape formed by the first mark inner edge 304 is a rectangle, the first mark inner edge 304 comprises a first sub inner edge, a second sub inner edge, a third sub inner edge and a fourth sub inner edge; first sub interior limit the second sub interior limit the third sub interior limit with the fourth sub interior limit is used for the sign display panel sign component is in second coordinate in the two-dimensional plane.
The shape of the first label inner edge 304 is any one of a triangle, a rectangle or a circle.
Fig. 3 is a schematic structural diagram of a display panel marking member according to a preferred embodiment of the present invention, in which the first marking portion 301 and the second marking portion 302 are both square.
As can be seen from the figure, after the display panel identification member deforms, an outer edge of a certain first identifier in the first identifier outer edge 303 of the first identification portion 301 is an irregular edge, and a measurement machine cannot accurately measure a distance from the outer edge of the first identifier to a coordinate axis, so that the first identification portion 301 cannot be accurately used for identifying the first coordinate of the display panel identification member in the two-dimensional plane, and exposure alignment of a subsequent image processing process is affected.
In this embodiment, the second coordinate of the display panel identification member identified by the second identification portion 302 in the two-dimensional plane replaces the first coordinate identified by the first identification portion 301, so as to measure the identification member accurately.
Before deformation, a rectangular coordinate system is established by taking a certain fixed point on a substrate as a coordinate origin, the distances between the coordinate axes and the first sub inner edge, the second sub inner edge, the third sub inner edge and the fourth sub inner edge in the second identification part 302 are measured, and the corresponding coordinates of the second identification in the coordinate system are calculated; in this embodiment, the first sub inner side and the third sub inner side are parallel to the Y axis, and the second sub inner side and the fourth sub inner side are parallel to the X axis.
After deformation, measuring the horizontal distances between the first sub inner edge and the Y-axis and the third sub inner edge and the Y-axis as A1 and A2, and measuring the vertical distances between the second sub inner edge and the fourth sub inner edge and the X-axis as B1 and B2; therefore, the corresponding coordinates of the second identification portion 302 in the coordinate system are obtained as
And obtaining the deformation quantity of the display panel according to the coordinates before and after deformation.
Fig. 4 is a schematic structural diagram of a second display panel identification member according to a preferred embodiment of the present invention, in this embodiment, the first identification portion 401 and the second identification portion 402 are both square; wherein the first mark 401 coincides with the center of the second mark 402.
As can be seen from the figure, after the display panel identification member is deformed, the sub-outer edge of the first identification outer edge 403 of the first identification part 401 is a regular edge; at this time, the first coordinate marked in the two-dimensional plane by the first marking part 401 and the second coordinate marked in the two-dimensional plane by the second marking part 402 both play a role in positioning the display panel marking member;
since the center points of the first marking portion 401 and the second marking portion 402 are overlapped, the measurement error can be reduced according to the average value of the first coordinate and the second coordinate, and the exposure alignment of the subsequent image process is accurate.
Similar to the embodiment, before the deformation, a rectangular coordinate system is established with a fixed point on the substrate as the origin of coordinates, and the distances between the edges of the first marking portion 401 and the second marking portion 402 and the coordinate system are measured to obtain the coordinates of the display panel marking member; after the deformation, measuring the horizontal distances between the first sub-outer edge and the third sub-outer edge and the Y axis as C1 and C4, and the vertical distances between the second sub-outer edge and the fourth sub-outer edge and the X axis as D1 and D4; measure the horizontal spacing of the first sub inner side and the third sub inner side and the Y axis is C2, C3, the second sub inner side and the fourth sub inner side and the vertical spacing of the X axis are D2D3; obtaining the coordinates of the display panel identification component as
Fig. 5 is a schematic structural diagram of a third display panel identification component according to a preferred embodiment of the present invention, in this embodiment, the first identification portion 501 is a square, and the second identification portion 502 is a circle; wherein, the center of the first mark 501 and the center of the second mark 502 do not coincide.
After the display panel identification member is deformed, a sub-outer edge of the first identification outer edge 503 in the first identification portion 501 is an irregular edge, and a measurement machine cannot accurately measure the distance from the edge to a coordinate axis, so that the first identification portion 501 cannot be accurately used for identifying the first coordinate of the display panel identification member in the two-dimensional plane, and exposure alignment of a subsequent image processing procedure is affected.
In this embodiment, before the deformation, a rectangular coordinate system is established with a fixed point on the substrate as an origin of coordinates, a distance between a center of a circle in the second identification portion 502 and the coordinate axis is measured, and a corresponding coordinate of the second identification portion 502 in the coordinate system is calculated;
after the deformation, the position of the center of the circle of the second marker portion 502 is determined according to the mark recognition device, the horizontal distance between the center of the circle and the Y axis is measured to be A3, the vertical distance between the center of the circle and the X axis is measured to be B3, and the coordinate of the second marker portion 502 is calculated to be
And obtaining the deformation quantity of the display panel according to the coordinates before and after deformation.
The present invention also provides a display panel, comprising: a display panel main body and a display panel identification member, the display panel identification member being disposed on the display panel main body;
the display panel identification member includes: the first mark part and the second mark part are both formed in the same photoetching process.
The first mark part is provided with a first mark outer edge, and the shape of the first mark outer edge is rectangular; the first identification outer edge comprises a first sub outer edge, a second sub outer edge, a third sub outer edge and a fourth sub outer edge; the first sub-outer edge, the second sub-outer edge, the third sub-outer edge, and the fourth sub-outer edge are used to identify a first coordinate of the display panel identification member in the two-dimensional plane.
The second mark portion has the interior limit of first sign, first sign portion surrounds second sign portion, the first sign outside with the interior limit of first sign is used for common sign display panel sign component with the coordinate in the two-dimensional plane that display panel corresponds.
Under the condition that the shape formed by the first mark inner edge is a rectangle, the first mark inner edge comprises a first sub inner edge, a second sub inner edge, a third sub inner edge and a fourth sub inner edge; first sub interior limit the second sub interior limit the third sub interior limit with the fourth sub interior limit is used for the sign display panel sign component is in second coordinate in the two-dimensional plane.
Wherein, the shape that the interior limit of first sign constitutes is triangle-shaped, rectangle or the arbitrary one in circular.
The specific embodiment of the display panel is similar to the display panel identification component, and is not described in detail herein.
The invention provides a display panel identification component and a display panel, wherein a second identification part is arranged in the identification component, and the second identification part is in a regular shape; the coordinates of the display panel identification member in the two-dimensional plane, which are formed by the first coordinates identified (located) by the first identification portion (first identification outer edge) and the second coordinates identified (located) by the second identification portion (first identification inner edge), can be such that the measurement result (location result) for the display panel identification member is within a predetermined deviation range, thereby making the measurement result (location result) more accurate. Wherein the value of the coordinate of the display panel identification member in a first dimension is equal to the average (median) of the first and second coordinates in the first dimension, and the value of the coordinate of the display panel identification member in a second dimension is equal to the average (median) of the first and second coordinates in the second dimension.
Or, when the figure residue is abnormal outside the first mark in the mark member, the first mark part cannot accurately mark the first coordinate of the display panel mark member in the two-dimensional plane; the second coordinate of the display panel identification component identified by the second identification part in the two-dimensional plane replaces the first coordinate identified by the first identification part, so that the identification component is accurately measured, the measurement distortion caused by the edge deformation of the graph is improved, and the measurement success rate is increased. The pattern residual abnormality refers to an abnormality that an edge (edge line) of the first mark outer edge (the first mark part) is not straight (for example, uneven and wavy) due to improper exposure or improper etching of the first mark outer edge (the first mark part) in a process of forming the first mark outer edge (the first mark part) by using a photomask manufacturing process (including two sub-processes of exposure and etching).
In summary, although the present invention has been described with reference to the preferred embodiments, the above-described preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, therefore, the scope of the present invention shall be determined by the appended claims.
Claims (6)
1. A display panel identification member, comprising:
the first mark part is provided with a first mark outer edge, and the shape of the first mark outer edge is a rectangle; and
the second mark part is provided with a first mark inner edge, and the shape formed by the first mark inner edge is circular or triangular;
wherein, first sign portion surrounds second sign portion, first sign outside with the interior limit of first sign is used for the common sign display panel sign component with the coordinate in the two-dimensional plane that display panel corresponds, the shape that first sign outside constitutes with the geometric centre of the shape that the interior limit of first sign constitutes does not coincide.
2. The display panel identification member of claim 1 wherein said first identification outer edge comprises a first sub-outer edge, a second sub-outer edge, a third sub-outer edge and a fourth sub-outer edge;
the first sub-outer edge, the second sub-outer edge, the third sub-outer edge, and the fourth sub-outer edge are used to identify a first coordinate of the display panel identification member in the two-dimensional plane.
3. The display panel marking member according to claim 1 or 2, wherein the first marking portion and the second marking portion are formed in the same photolithography process.
4. A display panel, comprising:
a display panel main body;
a display panel identification member disposed on the display panel main body, the display panel identification member comprising:
the first mark part is provided with a first mark outer edge, and the shape of the first mark outer edge is a rectangle; and
the second mark part is provided with a first mark inner edge, and the shape formed by the first mark inner edge is circular or triangular;
wherein, first sign portion surrounds second sign portion, first sign outside with the interior limit of first sign is used for the common sign display panel sign component with the coordinate in the two-dimensional plane that display panel corresponds, the shape that first sign outside constitutes with the geometric centre of the shape that the interior limit of first sign constitutes does not coincide.
5. The display panel of claim 4, wherein the first logo outer edge comprises a first sub-outer edge, a second sub-outer edge, a third sub-outer edge, and a fourth sub-outer edge;
the first sub-outer edge, the second sub-outer edge, the third sub-outer edge, and the fourth sub-outer edge are used to identify a first coordinate of the display panel identification member in the two-dimensional plane.
6. The display panel according to claim 4 or 5, wherein the first mark portion and the second mark portion are formed in the same photolithography process.
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| JP2006330512A (en) * | 2005-05-27 | 2006-12-07 | Sharp Corp | Coordinate specification method |
| CN103376594A (en) * | 2012-04-27 | 2013-10-30 | 株式会社日本显示器东 | Liquid crystal display panel |
| CN105405134A (en) * | 2015-11-05 | 2016-03-16 | 山东科技大学 | Camera calibration mark center coordinate extraction method |
| CN106328554A (en) * | 2016-08-26 | 2017-01-11 | 武汉华星光电技术有限公司 | Overlay structure, display device and method for measuring overlay precision by utilizing overlay structure |
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2017
- 2017-08-11 CN CN201710684934.5A patent/CN107300799B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006330512A (en) * | 2005-05-27 | 2006-12-07 | Sharp Corp | Coordinate specification method |
| CN103376594A (en) * | 2012-04-27 | 2013-10-30 | 株式会社日本显示器东 | Liquid crystal display panel |
| CN105405134A (en) * | 2015-11-05 | 2016-03-16 | 山东科技大学 | Camera calibration mark center coordinate extraction method |
| CN106328554A (en) * | 2016-08-26 | 2017-01-11 | 武汉华星光电技术有限公司 | Overlay structure, display device and method for measuring overlay precision by utilizing overlay structure |
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