CN107287576A

CN107287576A - Precipitation equipment and deposition process

Info

Publication number: CN107287576A
Application number: CN201710116613.5A
Authority: CN
Inventors: 林钟熙; 金圭范; 金兑龙; 朴宰奭; 朴镇翰
Original assignee: Samsung Display Co Ltd
Current assignee: Samsung Display Co Ltd
Priority date: 2016-04-12
Filing date: 2017-02-28
Publication date: 2017-10-24
Also published as: KR102519797B1; KR20170117250A

Abstract

The present invention relates to precipitation equipment and deposition process.Precipitation equipment according to an embodiment of the present invention includes performing substrate the sedimentation unit of depositing operation including the carrier of the fixed substrate and the delivery unit for the transfer member for transmitting the carrier and is arranged to maintenance unit adjacent with the sedimentation unit and that maintenance is performed to the carrier, and the transfer member includes safeguarding transfer member, and the maintenance transfer member is arranged between the sedimentation unit and the maintenance unit carrier being sent to the maintenance unit from the sedimentation unit.

Description

Precipitation equipment and deposition process

Technical field

The present invention relates to precipitation equipment and deposition process.

Background technology

Recently, the organic light-emitting display device (Organic with low power consumption, high brightness and quick response speed Light Emitting Diode Display；OLED) got most of the attention as panel display apparatus of future generation.

Generally, organic light-emitting display device includes self luminous emissive type organic illuminating element, and due to not needing Extra light source and light-type can be fabricated to and slim.

It is main to be filled using vacuum heat deposition as the precipitation equipment that organic thin film is formed on this organic illuminating element Put (Thermal evaporation apparatus).

Vacuum heat deposition device is made up of the multiple vacuum chambers deposited under high vacuum state.In the true of precipitation equipment Cavity inside, organic matter is implemented during the top movement that substrate is fixed on carrier (carrier) and in crucible to substrate Deposition.

The content of the invention

For this carrier, carrier is fetched into the outside of precipitation equipment, and changes by operating personnel anti-deposition manually Part removes particle (particle) of electrostatic chuck etc. to be safeguarded (maintenance).

However, increasing with the size of substrate due to the development of nearest technology, the carrier of transmission substrate also becomes large-scale And high loading.

Therefore, it is that maximization carrier is safeguarded on depositing operation line and the carrier of high loading is fetched into deposition dress The operation for the outside put can cause the safety problem of operating personnel and the poor efficiency of operation.

The problem to be solved in the present invention is that there is provided following precipitation equipment and deposition process, i.e. by precipitation equipment Inside arranges maintenance unit (maintenance unit) and the carrier for becoming maximization is tieed up in flow (process) Shield.

Of the invention the problem of, is not limited to technical problem mentioned above, and those skilled in the art will pass through following note NM other technical problems are expressly understood in load.

To realize that the precipitation equipment according to an embodiment of the present invention of above mentioned problem includes performing depositing operation to substrate Sedimentation unit including the fixed substrate carrier and the transmission carrier transfer member delivery unit, be arranged to and institute State sedimentation unit it is adjacent and to the carrier perform maintenance maintenance unit, and the transfer member may include safeguard transmission Part, the maintenance transfer member, which is arranged between the sedimentation unit and the maintenance unit, to sink the carrier from described Product unit is sent to the maintenance transfer member of the maintenance unit.

The sedimentation unit may include deposit cavity, is arranged in the deposit cavity and provide deposited material to the substrate Deposit subassembly, be arranged in the lower section of the deposit cavity and be connected to the maintenance unit return cavity, be arranged in it is described heavy The substrate feeding chamber of the side of product chamber and the return cavity and the opposite side for being arranged in the deposit cavity and the return cavity Substrate reclaims chamber.

The transfer member may also include the first transfer member being arranged in the deposit cavity and be arranged in described return The second transfer member of intracavitary is returned, and described safeguards that transfer member can be branched out and can arranged from second transfer member Between the return cavity and the maintenance unit.

The carrier may include body, be arranged on a surface of the body and be fixed to the substrate Electrostatic chuck on the body, it is arranged on a surface of the body and is bound to anti-means of deposition described At least one first bonded block on body and be arranged in the outside of the body and make the body with The cam follower of the transfer member movement.

The transfer member may include at least one bearing-surface and the guiding institute on the surface for supporting the cam follower State the guide surface of the side of cam follower.

The maintenance unit may include to perform the carrier carrier maintenance department of maintenance and change to be bound to the load The anti-deposition component maintenance portion of anti-means of deposition on body.

The carrier maintenance department may include to be storaged and be fixed with the carrier stowage portion of the carrier, is arranged in the carrier product On the both sides side wall in load portion and remove be attached to the carrier particle particle removal portion and to the carrier supply moisten The oil injecting part of lubricating oil.

The carrier stowage portion, which may also include, to be formed at and can be come in and gone out for the particle removal portion in the side wall Hole.

The carrier stowage portion is formed as multilayer to stack multiple carriers.

The anti-deposition component maintenance portion may include the anti-deposition portion that multilayer is stacked as the extra anti-means of deposition Part stowage portion and the anti-means of deposition is performed from the anti-deposition part replacement portion of the replacing of the carrier, and it is described anti- Means of deposition replacing portion can be disposed between the carrier stowage portion and the anti-means of deposition stowage portion.

Described device can also include validating the control unit for whether repairing the carrier, and the control unit can respectively with institute Sedimentation unit, the delivery unit and maintenance unit connection are stated, and the sedimentation unit, the biography can be controlled respectively That send unit and the maintenance unit is driven such that the maintenance unit performs maintenance to the carrier.

It may include for the precipitation equipment according to another embodiment of the invention that solves the above problems：Including being performed to substrate The delivery unit of the carrier of the sedimentation unit of the process cavity of depositing operation including the transmission substrate, it is arranged in the process cavity Side and including to the carrier perform maintenance safeguard the maintenance unit of chamber, be arranged in the process cavity with it is described safeguard Conversion chamber between chamber and it is connected to the first connecting portion of the process cavity and the conversion chamber and is connected to the conversion chamber With the second connecting portion for safeguarding chamber.

The process cavity can be configured to vacuum chamber, and described safeguard that chamber can be configured to common pressure chamber.

The first connecting portion and the second connecting portion may include gate valve, and the gate valve changes the conversion chamber For vacuum state or atmospheric pressure state.

The deposition process of precipitation equipment according to an embodiment of the present invention may include following steps：Substrate confession will be put into Combined to the substrate in chamber with carrier；The carrier is sent to deposit cavity from the substrate feeding chamber；It is described that will be combined with During the carrier of substrate is sent to the substrate recovery chamber with the first transfer member from the deposit cavity, to being bound to The substrate of the carrier performs depositing operation；The substrate of executed depositing operation is separated from the carrier, and The substrate of executed depositing operation is moved to the outside that the substrate reclaims chamber；The load of the substrate will be isolated from Body is sent to return cavity from the deposit cavity；The carrier of the return cavity will be sent to as the second transfer member is sent to The substrate feeding chamber；And judge whether to need to perform maintenance to the carrier for being sent to the return cavity；Carried described The first vector repaired the need in body is sent to the maintenance transfer member branched out from second transfer member Maintenance unit；Maintenance is sent to the first vector of the maintenance unit；And by the first vector through maintenance with It is described to safeguard that transfer member is recycled to the return cavity.

Methods described can also include the steps of：The carrier for being sent to the return cavity is divided into what is needed repairing First vector and the Second support in addition to the first vector；And by the Second support with second transport unit Part is sent to the substrate feeding chamber.

Methods described can also include the steps of：The carrier for being sent to the return cavity is divided into what is needed repairing First vector and the Second support in addition to the first vector；And by be recycled to the return cavity through described in maintenance First vector is sent to the substrate feeding chamber with second transfer member.

The step of maintenance is sent to the first vector of the maintenance unit may include following steps：It is described to being sent to The first vector of maintenance unit is fixed；The anti-deposition portion of the first vector is changed using anti-deposition part replacement portion Part；And to the electrostatic chuck gas injection of the first vector to remove particle, and to the cam follower of first vector Inject grease.

The detail of other embodiment is included in detailed description and accompanying drawing.

Work can be improved by arranging maintenance unit in precipitation equipment according to the precipitation equipment of embodiment of the present invention The safety of industry personnel.

In addition, depositing operation can be reduced to greatest extent according to the precipitation equipment and deposition process of embodiment of the present invention Loss (Loss).

In addition, the dimension of carrier can be shortened to greatest extent according to the precipitation equipment and deposition process of embodiment of the present invention The shield time.

Content illustrated above is not limited to according to the effect of embodiment of the present invention, and included more in this specification Multi-effect.

Brief description of the drawings

Fig. 1 is the planar configuration of precipitation equipment according to an embodiment of the present invention.

Fig. 2 is the schematic cross section configuration diagram of Fig. 1 precipitation equipment.

Fig. 3 is the A-A' sectional views of Fig. 1 sedimentation unit.

Fig. 4 is the partial perspective view of transfer member according to an embodiment of the present invention.

Fig. 5 is the partial perspective view of the transfer member according to another embodiment of the invention.

Fig. 6 is the sectional view that amplification shows the maintenance unit shown in Fig. 2.

Fig. 7 is the block diagram of control unit according to an embodiment of the present invention.

Fig. 8 is the flow chart of deposition process according to an embodiment of the present invention.

Fig. 9 to Figure 12 is the section view of each processing step of the service procedure of precipitation equipment according to an embodiment of the present invention Figure.

Figure 13 is the sectional view of the maintenance unit of the precipitation equipment according to another embodiment of the invention.

Figure 14 is the sectional view of the maintenance unit of the precipitation equipment according to a further embodiment of this invention.

Embodiment

With reference to the embodiment being described in detail below in association with accompanying drawing, advantages and features of the invention and realize described excellent The method of point and feature will become clear and definite.However, the present invention is not limited to embodiment as disclosed hereinafter, but it can realize For variform different from each other.These embodiments are intended merely to make disclosure of the invention complete and in order to by the model of invention Enclose and intactly inform and provided to those skilled in the art, and the present invention is only by claims Scope is defined.

When element (elements) or layer are referred to as at other elements or layer " upper (on) ", including the element or layer it is direct On other elements or in two kind situations of the centre inserted with other layers or other elements.It is identical in entire description Reference indicate identical inscape.

It should be appreciated that although first, second grade is used to describe a variety of inscapes, these inscapes are not arranged by these Diction limitation.These wording are only used for distinguishing an inscape and other inscapes.Therefore, it should be appreciated that without departing substantially from In the case of the technological thought of the present invention, the first inscape hereinafter referred to is alternatively referred to as the second inscape.

Hereinafter, embodiments of the present invention are illustrated with reference to the accompanying drawings.

First, the structure to precipitation equipment according to the embodiment of the present invention is illustrated.

Fig. 1 is the planar configuration of precipitation equipment according to an embodiment of the present invention, Fig. 2 as Fig. 1 precipitation equipment Schematic cross section configuration diagram, more specifically, Fig. 2 is to project Fig. 1 precipitation equipment to the schematic cross section in XZ planes to match somebody with somebody Figure is put, and Fig. 3 is the A-A' sectional views of Fig. 1 sedimentation unit.

Referring to figs. 1 to Fig. 3, precipitation equipment 1000 includes sedimentation unit 100, maintenance unit 200 and delivery unit 300.

The substrate S that depositing operation is carried out in precipitation equipment 1000 can be that (such as organic light emission shows for display device Showing device) substrate.Substrate S can be female glass (mother glass) substrate, wherein be defined in female glass substrate useful In the multiple substrate areas for forming multiple display devices.However it is not limited to this, and for indivedual linings of single display device Bottom may also used as substrate S.

Deposition to the material in substrate S can be such as organic luminous layer, hole applied to organic light-emitting display device The organic matter of the organic illuminating elements such as implanted layer, hole transmission layer, electric charge injection layer and charge transport layer.However, not limiting In this, and it can also be organic matter for interlayer dielectric or planarization film, colour filter etc. to deposit to the material of substrate S.

Sedimentation unit 100 includes process cavity 110 and at least one deposit subassembly 130, wherein at least one deposit subassembly 130 It is arranged in the inside of process cavity 110 and provides deposited material to substrate S.

Process cavity 110 may include deposition portion, return, substrate supply unit and substrate recoverer.Deposition portion, return, Substrate supply unit and substrate recoverer can be made up of independent chamber respectively, but also a chamber can be divided into multiple regions It is arranged in afterwards in each region divided.For example, in the case of deposition portion and return, can also be divided into by an alveolus After first layer and the second layer, return is arranged in first layer, and deposition portion is arranged in the second layer.In following embodiment party In formula, by by deposition portion, return, substrate supply unit and substrate recoverer respectively by independent chamber constituted in case of enter Row explanation.

Process cavity 110 may include to implement the deposit cavity 111 of depositing operation, be arranged in the return cavity of the lower section of deposit cavity 111 112 and be arranged in deposit cavity 111 and return cavity 112 side (left side on the basis of accompanying drawing) substrate feeding chamber 113, And it is arranged in the substrate recovery chamber 114 of the opposite side (right side on the basis of accompanying drawing) of deposit cavity 111 and return cavity 112.

Deposit cavity 111 is the chamber for implementing depositing operation.Deposit cavity 111 can be vacuum chamber.Deposit cavity 111 can have the The shape extended on one direction X.

At least one deposit subassembly 130 is arranged in deposit cavity 111.Although in the accompanying drawings exemplified with multiple deposit subassemblies 130 are arranged to the situation that X along a first direction is spaced at certain intervals, but also the arrangement of deposit subassembly 130 can be entered Row is a variety of to be changed.

Deposit subassembly 130 play by deposited material be emitted into substrate S side so as in substrate S in face of deposit subassembly 130 The effect of deposition film on one surface.Deposit subassembly 130 may be arranged at the lower section of substrate S.Deposit subassembly 130 may include to accommodate The crucible 131 of deposited material, the outside for being arranged in crucible 131 and crucible 131 is heated so that deposited material gasify Heater and discharge the deposited material through gasification at least one nozzle 135.Nozzle 135 can crucible 131 top cloth It is set to towards substrate S.

Return cavity 112 is played is back to deposit cavity 111 by the carrier 310 that substrate S has been separated after depositing operation is completed Input port or the side of substrate feeding chamber 113 effect.Return cavity 112 may be arranged at the lower section of deposit cavity 111.Return cavity 112 can There is the shape extended on X in a first direction identically with deposit cavity 111.Return cavity 112 may be disposed to and the weight of deposit cavity 111 It is folded.For example, return cavity 112 can be located at first layer, and deposit cavity 111 may be arranged on return cavity 112 and constitute the second layer.

Substrate feeding chamber 113 is arranged in the side of deposit cavity 111 and return cavity 112.Substrate S is supplied from outside input substrate In chamber 113.The substrate S in substrate feeding chamber 113 is put into be fixed in substrate feeding chamber 113 on carrier 310.

Substrate feeding chamber 113 may include the first lift 331.Carrier 310 puts into substrate from the return cavity 112 of first layer In feeding chamber 113, the first lift 331 can rise the carrier 310 of input, and the carrier 310 risen can be put into second The deposit cavity 111 of layer.Moreover, carrier 310 can fix the substrate S put into substrate feeding chamber 113 and to the sidesway of deposit cavity 111 It is dynamic, depositing operation is then carried out in deposit cavity 111.

Substrate reclaims the opposite side that chamber 114 is arranged in deposit cavity 111 and return cavity 112.Deposition is completed in deposit cavity 111 The substrate S of technique is together moved to substrate with carrier 310 and reclaimed in chamber 114, and reclaims substrate S and load in chamber 114 in substrate Body 310 separates and is moved to the outside that substrate reclaims chamber 114.

Substrate, which reclaims chamber 114, may include the second lift 333.Second lift 333 can make the carrier for having separated substrate S 310 decline, and the carrier 310 declined can be put into the return cavity 112 of first layer.Moreover, putting into return cavity 112 Carrier 310 may return to the side of substrate feeding chamber 113.Returned in deposit cavity 111, return cavity 112, substrate feeding chamber 113 and substrate Chamber 114 is received by the case that independent chamber is constituted, connecting portion 400 is disposed between each chamber.

Specifically, connecting portion 400 may be arranged between substrate feeding chamber 113 and deposit cavity 111, deposit cavity 111 and substrate Reclaim between chamber 114, return cavity 112 and substrate are reclaimed between chamber 114 and between return cavity 112 and substrate feeding chamber 113.

Connecting portion 400 includes opening and closing connecting portion 401 and gate connecting portion 402.

Return cavity 112, substrate feeding chamber 113 and substrate reclaim chamber 114 it is identical with deposit cavity 111 be vacuum In the case of chamber, opening and closing connecting portion 401 is arranged between each chamber to play a part of being opened and closed each chamber.It is opened and closed connecting portion 401 can be opening and closing baffle plate.

In the case that there is atmosphere different from each other in each chamber, for example, maintaining vacuum and adjacent lining in deposit cavity 111 In the case that the maintenance normal pressure of chamber 114 (or atmospheric pressure) is reclaimed at bottom, gate connecting portion 402, which is played, makes deposit cavity 111 maintain vacuum shape State and the effect for making the substrate recovery maintenance atmospheric pressure state of chamber 114.Gate connecting portion 402 can include the opening and closing gear of gate valve Plate.

Delivery unit 300 plays a part of mobile substrate S, and includes the carrier 310 and mobile vehicle of fixed substrate S 310 transfer member 350.

Carrier 310 may include body 311, the electrostatic chuck being arranged on the one side of body 311 317, Yi Jibu It is placed in the cam follower 313 of width (direction parallel with the moving direction of body) outside of body 311.

Body 311 is as the part of the loading of supporting substrate S, and it is formed as various shapes and structure.Body 311 Can be configured to can bear the loading of substrate S, for example, can have rigid metal to constitute by iron or SUS etc..

Electrostatic chuck 317 can be located at the central portion on a surface of body 311, and play and fixed using electrostatic force The effect of substrate S.Electrostatic chuck 317 may include the electrode of the body being made up of ceramics and embedded body interior.Electrostatic chuck 317 The applicable integrally formed female electrostatic chuck (mother Electro Static Chuck) of entirety.It is mother in electrostatic chuck 317 In the case of electrostatic chuck, it can prevent from producing stain on the substrate S as fixed object.

Cam follower 313 is arranged on the side of body 311.Cam follower 313 can body 311 side cloth It is equipped with multiple.

Cam follower 313 is as one kind of bearing, and it can play a part of the wheel for transmitting body 311.Cam from Moving part 313 is formed as roller form with treating that transfer member 350 described later moves.

Cam follower 313 can also include porcupine roller on the inside of it.Above-mentioned porcupine roller is as driving cam driven member 313 Roller, it occurs uneven wear as carrier 310 is moved.This uneven wear can be by treating maintenance unit described later Supply the lubricating oil such as grease (grease) to reduce to cam follower 313 in 200.

Multiple cam followers 313 can have different sizes respectively.When each cam follower 313 it is of different sizes when, Even in the case of being damaged in transfer member 350 in depositing operation and forming barrier, also easily crossing above-mentioned barrier.

Carrier 310, which may also include, will treat that anti-deposition part B described later is bound to the first bonded block of body 311 315a.Multiple first combinations can be disposed with being combined with the both sides of the edge on a surface of electrostatic chuck 317 for body 311 Part 315a.However it is not limited to this, and a variety of changes can be carried out to the first bonded block 315a quantity.

As being exemplarily illustrated in Fig. 3, the first bonded block 315a can be bound to a surface of body 311 and phase For body 311 a surface portion it is prominent.

Treating that anti-deposition part B described later is settable has the second bonded block 315b combined with the first bonded block 315a. Second bonded block 315b is formed as the first bonded block 315a protruded with a surface portion relative to body 311 Form correspondence.That is, the second bonded block 315b can be formed as and the first bonded block on a surface of anti-deposition part B The form of the 315a corresponding lead-ingroove of shape.

Therefore, when the first bonded block 315a is combined with the second bonded block 315b, a surface of body 311 with The surface of anti-deposition part B can be in direct contact with one another, and can be adjacent to each other.Benchmark clamp can be applied and be used as the first bonded block 315a and the second bonded block 315b, but be not restricted to that this.

Referring again to Fig. 1 and Fig. 2, transfer member 350 includes the He of main transfer member 351 being arranged in sedimentation unit 100 352 and the maintenance that branches out and be arranged between sedimentation unit 100 and maintenance unit 200 from main transfer member 351 and 352 Transfer member 353.Main transfer member 351 and 352 includes the first transfer member 351 being arranged in deposit cavity 111 and is arranged in The second transfer member 352 in return cavity 112.First transfer member 351, the second transfer member 352 and safeguard transfer member 353 only have differences in position and functionally, and its structure and shape can be substantially the same.

First transfer member 351 plays from substrate feeding chamber 113 via deposit cavity 111 and reclaims the transmission of the side of chamber 114 to substrate It is fixed with the effect of the carrier 310 of substrate S.

Second transfer member 352 is played to be transmitted from substrate recovery chamber 114 via return cavity 112 to the side of substrate feeding chamber 113 The effect of the carrier 310 separated with substrate S.

Safeguard that transfer member 353 is functioned as follows, i.e. when need carry out carrier 310 repair when, from return cavity 112 to Carrier 310 is transmitted in the side of maintenance unit 200, and stresses from maintenance unit 200 to return cavity 112 carrier that new loopback completes maintenance 310。

Safeguard that transfer member 353 can be branched out in return cavity 112 from the second transfer member 352.Can in return cavity 112 By treat control unit 600 described later determine with the carrier 310 that the second transfer member 352 of return cavity 112 is moved be to continue with Second transfer member 352, which moves also to be moved to, safeguards transfer member 353.

The various structures of transfer member 350 are described in more details for reference picture 4 and Fig. 5.

Fig. 4 is the partial perspective view of transfer member according to an embodiment of the present invention.Fig. 5 is according to another reality of the invention Apply the partial perspective view of the transfer member of mode.

The situation that Fig. 4 is made up of exemplified with transfer member 350 bottom surface 350a and side wall 350b.Bottom surface 350a is bearer cams The bearing-surface on the surface of driven member 313, and side wall 350b is the guide surface of the side of drive cam driven member 313.

Fig. 5 also includes upper lid 350c situation exemplified with transfer member 350_1 in addition to bottom surface 350a and side wall 350b. Bottom surface 350a and upper lid 350c are the bearing-surfaces on the surface of above and below bearer cams driven member 313, and side wall 350b It is the guide surface of the side of drive cam driven member 313 as described above.

In addition, although not shown in figures, but it may also be formed with least one groove in bottom surface 350a and upper lid 350c. Cam follower 313 be can be placed in above-mentioned groove so that carrier 310 can be moved accurately.

Here, transfer member 350 can by bend a flat board or with screw combine multiple flat boards come be formed bottom surface 350a, Side wall 350b and upper lid 350c.

Transfer member 350 can be the transmission guide rail for transmitting carrier 310.

Referring again to Fig. 1 and Fig. 2, carrier 310 can be moved to from the second transfer member 352 and safeguard transfer member 353, to pass Deliver to maintenance unit 200.

Maintenance unit 200 is rendered as the lower section just as being arranged in sedimentation unit 100 in fig. 2, but this is in order on Fig. 2 It is specifically illustrated in sedimentation unit 100, maintenance unit 200 and the structure for changing chamber 500.Therefore, the maintenance unit shown in Fig. 2 200 are arranged in the identical plane of return cavity 112 with sedimentation unit 100.That is, maintenance unit 200 can be arranged on X/Y plane In on identical Y lines.

Maintenance unit 200 plays a part of performing maintenance to the carrier 310 sent.Maintenance unit 200 may be disposed to It is adjacent with process cavity 110.Maintenance unit 200 is described in detail reference picture 6.

Fig. 6 is the sectional view that amplification shows the maintenance unit shown in Fig. 2.Reference picture 6, maintenance unit 200 includes carrier Maintenance department 230 and anti-deposition component maintenance portion 250.

Carrier maintenance department 230 includes carrier and safeguards chamber 213 and be respectively arranged the carrier stowage safeguarded in carrier in chamber 213 Portion 231 and 237, particle removal portion 233 and oil injecting part 235.

Carrier safeguards that chamber 213 is the chamber that maintenance is performed to the carrier 310 sent.Carrier safeguards that chamber 213 can be normal Press chamber.It is adjacent with return cavity 112 that carrier safeguards that chamber 213 may be disposed to.Carrier safeguards that the inside of chamber 213 is disposed with carrier stowage portion 231 and 237.

There is from the carrier 310 for safeguarding that transfer member 353 is sent stowage in carrier stowage portion 231 and 237.Carrier is storaged Portion 231 and 237 can be shelf shape grid frame.Carrier stowage portion 231 and 237 includes support plate 237 and at least one side wall 231.Carrier 310 can be accommodated in the space limited by support plate 237 and side wall 231.Support plate 237, which may be arranged at, to be sent Carrier 310 lower section and branching carrier 310 a surface.

In addition, carrier maintenance department 230 may additionally include it is arranged apart at certain intervals on a surface of support plate 237 Fixed component 236.

Fixed component 236 play the fixed carrier 310 for being sent to carrier stowage portion 231 and 237 and prevent carrier 310 to The effect that the outside in carrier stowage portion 231 and 237 departs from.Fixed component 236 is formed as plate shape, and as shown in Figure 6, Gu Determining part 236 may include to have the groove with a surface of carrier 310 or the corresponding shape of electrostatic chuck 317 of carrier 310.And And, the electrostatic chuck 317 of carrier 310 be can be inserted into above-mentioned groove, and thus carrier 310 can be fixed in fixed component 236.So And, the form of fixed component 236 is not limited to this.For example, fixed component 236 can also be shaft-like such as stopper.

The side wall 231 in carrier stowage portion 231 and 237, which may be connected to, safeguards transfer member 353, and side wall 231 can be from dimension Protect the received vector 310 of transfer member 353 and to the medial movement carrier 310 in carrier stowage portion 231 and 237.However, carrier 310 Moving method be not limited to this.For example, carrier stowage portion 231 and 237 and safeguarding and can also arrange organic between transfer member 353 Tool arm, and mechanical arm is from safeguarding medial movement carrier 310 of the transfer member 353 to carrier stowage portion 231 and 237.

In addition, carrier maintenance department 230 may also include the ribs 234 for being bound to side wall 231.Ribs 234 plays lifting Rigid effect for the side wall 231 in carrier stowage portion 231 and 237 that carrier 310 is storaged.

Carrier maintenance department 230 may also include the mesopore 232 being formed in side wall 231.Treat the He of particle removal portion 233 described later Anti- deposition part replacement portion 253 can be inserted into mesopore 232, can also be separated from mesopore 232.

Play a part of removing the particle being attached on the electrostatic chuck 317 of carrier 310 in particle removal portion 233.Multiple Grain removal portion 233 may be connected to the both sides side wall 231 in carrier stowage portion 231 and 237.Particle removal portion 233 may be disposed to in Hole 232 is adjacent, and can be according to treating the decision of control unit 600 described later via mesopore 232 to carrier stowage portion 231 and 237 Move inner side and outer side.Therefore, particle removal portion 233 can be connected to side wall 231 by extra moving parts, and it is exemplary Ground, above-mentioned moving parts can be slide rail.However, particle removal portion 233 and the connection of side wall 231 are not limited to this.For example, Grain removal portion 233 can be by being connected to the mechanical arm on the side of side wall 231 to the inner side in carrier stowage portion 231 and 237 and outer Side is passed in and out.In addition, particle removal portion 233 can carry out angular adjustment in multiple angles.Particle removal portion 233 can be air Nozzle.

Oil injecting part 235 plays the porcupine roller supply such as oil on the cam follower 313 for transmitting body 311 to configuration The effect of the lubricating oil of fat.Multiple oil injecting parts 235 can be disposed at the side of the side wall 231 in carrier stowage portion 231 and 237.Oiling Portion 235 can in the lateral direction be moved according to the decision of control unit 600 on the basis of accompanying drawing, and may be disposed to and carrier 310 cam follower 313 is adjacent.Therefore, oil injecting part 235 can be connected to carrier stowage portion 231 by extra moving parts With 237 side wall 231, and above-mentioned moving parts can be exemplarily slide rail.However, the company of oil injecting part 235 and side wall 231 Connect and be not limited to this.For example, oil injecting part 235 is also arranged to mechanical arm and cam by being connected on the side of side wall 231 Driven member 313 is adjacent.

Reference picture 1 and Fig. 6, as described above, carrier safeguards that chamber 213 can be common pressure chamber.Therefore, configured in return cavity 112 In the case of vacuum chamber, return cavity 112 and carrier can be disposed with conversion chamber 500 between safeguarding chamber 213.Changing chamber 500 can be with It is with safeguarding that carrier 310 that transfer member 353 is sent is transferred into before carrier safeguards chamber 213 as conversion atmosphere The chamber waited for, i.e. cushion chamber.For example, when carrier 310 in the return cavity 112 in vacuum state with safeguarding transport unit Part 353 is to during the conversion movement of chamber 500, and the internal state of conversion chamber 500 becomes vacuum state.Then, conversion chamber 500 is with returning Gate connecting portion (or first connecting portion) 402 between chamber 112 can be unlocked, and carrier 310 can enter the interior of conversion chamber 500 Portion.Thus, it is possible to maintain the vacuum state of return cavity 112.After carrier 310 enters the inside of conversion chamber 500, chamber is changed First connecting portion 402 between 500 and return cavity 112 can be closed, and changed the inside of chamber 500 and can be changed into normal pressure shape State.Then, conversion chamber 500 and carrier safeguard that the gate connecting portion (or second connecting portion) 402 between chamber 213 can be unlocked, and And the carrier 310 in conversion chamber 500 can safeguard that chamber 213 is moved to carrier.Thus, it is possible to maintain carrier to safeguard the normal pressure of chamber 213 State.

As described above, return cavity 112 and conversion chamber 500 between and conversion chamber 500 and carrier safeguard chamber 213 between can divide The gate connecting portion 402 for maintaining atmosphere is not disposed with.

Carrier safeguards that the opposite side for being not connected to change chamber 500 of chamber 213 is disposed with anti-deposition component maintenance portion 250.

Play a part of performing maintenance to anti-deposition part B in anti-deposition component maintenance portion 250.Anti- deposition component maintenance portion 250 include anti-deposition component maintenance chamber 215, the anti-means of deposition stowage portion 251 being arranged in anti-deposition component maintenance chamber 215 with And it is arranged in anti-deposition component maintenance chamber 215 and carrier safeguards anti-deposition part replacement portion 253 between chamber 213.

Safeguard that chamber 213 is identical with carrier, anti-deposition component maintenance chamber 215 can be common pressure chamber.Anti- deposition component maintenance chamber Anti- means of deposition stowage portion 251 is disposed with 215 center of inside.

The extra anti-deposition part B that anti-means of deposition stowage portion 251 plays a part of being storaged and keeping is to be replaced.It is anti-settling Product part stowage portion 251 is formed as step shelf shape.

Anti- deposition part B plays a part of preventing deposited material from depositing to carrier 310 when carrying out depositing operation.It is anti-settling Product part B can be wide iron plate.Anti- deposition part B may include above-mentioned second bonded block (Fig. 3 315b).It is bound to carrier Anti- deposition part B on 310 can be changed by anti-deposition part replacement portion 253.

Anti- deposition part replacement portion 253 may be arranged at carrier and safeguard between chamber 213 and anti-deposition component maintenance chamber 215.Though So anti-deposition part replacement portion 253 can be arranged in together with anti-means of deposition stowage portion 251 in anti-deposition component maintenance chamber 215 Portion, but as shown in Figure 6, anti-deposition part replacement portion 253 is also disposed at the outside of anti-deposition component maintenance chamber 215.It is anti- Play according to treating the decision of control unit 600 described later by the anti-deposition part B of consume from carrier 310 in means of deposition replacing portion 253 Remove and new anti-deposition part B is bound to the effect on the carrier 310 for the anti-deposition part B for having removed consume.Anti- deposition Part replacement portion 253 can be bound to the anti-deposition part B being storaged in anti-means of deposition stowage portion 251 to be formed at carrier The mechanical arm of the first bonded block 315a on 310 surface.

Fig. 7 is the schematic block diagram of precipitation equipment according to an embodiment of the present invention.

Control unit 600 according to an embodiment of the present invention is may also include, and control unit 600 can control sedimentation unit 100th, the driving of maintenance unit 200, delivery unit 300 and connecting portion 400.

Specifically, control unit 600 can be confirmed whether to repair carrier 310, and control the driving of delivery unit 300 To enable carrier 310 to be moved in sedimentation unit 100 and maintenance unit 200.

Exemplarily, control unit 600 can determine whether to need to perform maintenance to carrier 310.Second transfer member 352 and dimension Protect transfer member 353 stub area in can be set have from the second transfer member 352 to safeguard transfer member 353 change sender To conversion equipment or to safeguard transfer member 353 move the second transfer member 352 on carrier 310 mechanical arm.Converting means Put and can be switched over and operate according to the decision of control unit 600 with mechanical arm.The carrier 310 circulated in precipitation equipment 1000 it In the carrier 310 (or first vector) that needs repairing can according to the control of control unit 600 by conversion equipment or mechanical arm from Second transfer member 352, which is sent to, safeguards transfer member 353, and is transmitted with transfer member 353 is safeguarded via chamber 500 is changed Chamber 213 is safeguarded to carrier.

In addition, the carrier (or Second support) 310 that need not be repaired among the carrier 310 circulated in precipitation equipment 1000 With the second transfer member 352 it can continue to be sent in the substrate feeding chamber 113 of next step according to the control of control unit 600. That is, above-mentioned Second support 310 continues to be sent to substrate feeding chamber 113 with the second transfer member 352, dynamic without interrupting transmission Make.

In addition, control unit 600 may be connected to the connecting portion 400 being arranged between each chamber, and it is controllable be connected to it is each The operation of connecting portion 400 between individual chamber.

However, the operation of control unit 600 is not limited to above-mentioned situation.With the state of carrier 310 independently, carrier 310 can It is sent to according to the control of control unit 600 according to the predetermined cycle from the second transfer member 352 and safeguards transfer member 353.Example Property, when a carrier 310 moves pre-determined number (illustratively 5 times) with the second transfer member 352, the carrier 310 It can be sent to according to the control of control unit 600 from the second transfer member 352 and safeguard transfer member 353.

The driving of the controllable maintenance unit 200 that maintenance is performed to carrier 310 of control unit 600.

The carrier 310 for completing maintenance can be according to the control of control unit 600 with safeguarding that transfer member 353 is recycled to return cavity 112.Here, the carrier 310 for completing maintenance is waited in conversion chamber 500, is then recycled to again in return cavity 112. Therefore, the multiple carriers 310 circulated in process cavity 110 can continue to be sent to next step, without interrupting transfer operation.

Next, the operation with precipitation equipment 1000 is together carried out to deposition process according to an embodiment of the present invention Explanation.

Fig. 8 is the flow chart for showing deposition process according to an embodiment of the present invention.Reference picture 8, according to the present invention one The deposition process of embodiment includes：By the substrate put into substrate feeding chamber and carrier-bound step S11；By carrier from Substrate feeding chamber is sent to the step S12 of deposit cavity；Make to be combined with the carrier of substrate as the first transfer member is from deposit cavity It is sent to the step S13 to combining the substrate execution depositing operation on carrier during substrate reclaims chamber；Executed is deposited The substrate of technique separates from carrier and the substrate of executed depositing operation is moved into the step that substrate reclaims the outside of chamber S14；The carrier for having separated substrate is sent to the step S15 of return cavity from deposit cavity；To be sent to the carrier of return cavity with Second transfer member is sent to the step S16 of substrate feeding chamber；And judge whether to need to perform the step of repairing to carrier S17；And it may also include：By carrier as the second transfer member is sent to the step S18 of substrate feeding chamber；By carrier with from What the second transfer member was branched out safeguards that transfer member is sent to the step S19 of maintenance unit；And maintenance is sent to maintenance list The step S20 of the carrier of member.

Hereinafter, Fig. 9 and Figure 12 will be referred to further to carry out in more detail deposition process according to an embodiment of the present invention Explanation.

Reference picture 2, Fig. 8 can be carried out to Figure 12, step S11 and step S12 as follows.

The formation that the not deposited substrate S put into substrate feeding chamber 113 is arranged on into carrier 310 has electrostatic chuck On 317 surface.Then, the side that will be provided with the carrier 310 of substrate S is connected to the first transfer member 351.Now, Carrier 310 can be transmitted along the direct of travel of the first transfer member 351.

Then, the carrier 310 of the first transfer member 351 will be connected to and is sent to deposit cavity 111 from substrate feeding chamber 113.

Step S13 and step S14 can be carried out as follows.

Make to be sent to the carrier 310 of deposit cavity 111 in the top of deposit subassembly 130 along the first transfer member 351 During direct of travel is moved, deposited material is deposited to being installed in the substrate S of carrier 310.

Then, the carrier 310 for being provided with the substrate S for completing depositing operation is sent to substrate from deposit cavity 111 and reclaims chamber 114.Then, the substrate S for completing depositing operation is separated from carrier 310, and the substrate S for completing depositing operation is moved to substrate Reclaim the outside of chamber 114.

Step S15 to step S17 can be carried out as follows.

The carrier 310 for having separated substrate S is set to drop to first from the deposit cavity 111 of the second layer using the second lift 333 The return cavity 112 of layer.

Then, the side for the carrier 310 put into return cavity 112 is connected to the second transfer member 352.Then, will It is connected to direct of travel of the carrier 310 of the second transfer member 352 along the second transfer member 352 and is back to substrate feeding chamber 113 sides.

Next, it is determined that whether need to perform maintenance to the carrier 310 sent with the second transfer member 352, and The carrier 310 sent with the second transfer member 352 is divided into the first vector that needs repairing and except first vector it Outer Second support.

Step S19 can be carried out as follows.

Before first vector to be sent to conversion chamber 500, the first connecting portion between return cavity 112 and conversion chamber 500 402 by the internal conversion for changing chamber 500 into vacuum state.Then, when changing the internal conversion of chamber 500 into vacuum state, beat Open the first connecting portion 402 between conversion chamber 500 and return cavity 112.Then, first vector 310 is sent to conversion chamber 500 It is internal.Then, after first vector 310 to be sent to the inside of conversion chamber 500, closing conversion chamber 500 and return cavity 112 it Between first connecting portion 402.Then, conversion chamber 500 and carrier safeguard that the second connecting portion 402 between chamber 213 will change chamber 500 Internal conversion be atmospheric pressure state.Then, when changing the internal conversion of chamber 500 into atmospheric pressure state, conversion chamber 500 is opened with carrying Body safeguards the second connecting portion 402 between chamber 213.Then, by first vector 310 with safeguard transfer member 353 from conversion chamber Carrier is sent in 500 and safeguards chamber 213.

Then, when first vector 310 is with safeguarding that transfer member 353 enters carrier stowage portion 231 and 237, dimension is stopped Protect the operation of transfer member 353.

Step S20 can be carried out as follows.

First, the step of first vector for being sent to maintenance unit 200 is fixed.Specifically, in above-mentioned step In rapid, the first vector for being sent to maintenance unit 200 is fixed to the branch in carrier stowage portion 231 and 237 using fixed component 236 On board 237.

Next, carrying out the step changed using anti-deposition part replacement portion 253 to the anti-deposition part B of first vector Suddenly.Specifically, in above-mentioned steps, the anti-deposition part B of consume is separated from carrier 310 using anti-deposition part replacement portion 253. Then, the anti-deposition part B being storaged in anti-means of deposition stowage portion 251 is moved to using anti-deposition part replacement portion 253 One surface of the separated carrier 310 of anti-deposition part B of consume.Then, the anti-part replacement portion 253 that deposits is by anti-deposition portion Part B is plugged in a surface of carrier 310 and is combined.

Next, carrying out the gas injection of electrostatic chuck 317 to first vector to remove particle and to first vector The step of cam follower 313 supplies lubricating oil.Specifically, in above-mentioned steps, particle removal portion 233 is arranged to and particle The region at place is adjacent, and to the area spray gas where particle to remove particle.At this moment, particle removal portion 233 can adjust The angle of injection nozzle is with to correct position gas injection.

Then, after certain injecting time such as 5 seconds to 30 seconds, the operation in particle removal portion 233 is stopped.

Then, oil injecting part 235 is navigated at the oiling position of cam follower 313.Oiling at oiling position The lubricating oil such as grease is injected in portion 235 to cam follower 313.Then, when reaching predetermined injection flow, oil injecting part 235 is stopped Operation.

Then, the first vector for completing maintenance is separated from carrier stowage portion 231 and 237, and the first of maintenance will be completed Carrier, which is recycled to, safeguards transfer member 353.Then, by carrier 310 with safeguard transfer member 353 be sent to conversion chamber (Fig. 1's 500).At this moment, first vector can be waited in conversion chamber 500 and previously circulated with that can be recycled in process cavity 110 When original position.

Then, will when the original position that previous first vector is arranged is rotating back to next after by the regular hour First vector is from safeguarding that transfer member 353 is recycled to the second transfer member 352.

Then, the direct of travel by first vector along the second transfer member 352 is sent to substrate feeding chamber 113.Transmission Carrier 310 to substrate feeding chamber 113 can be circulated according to the circulation step of above-mentioned carrier 310 in process cavity 110.

More specifically, step S18 can be carried out as follows.

It is sent to the second transfer member 352 after substrate feeding chamber 113, carrier 310 is passed through the first lift 331 rise to the deposit cavity 111 of the second layer from the return cavity 112 of first layer.Thereafter, by the way that behaviour as described above is repeated Make, carrier 310 is circulated in process cavity 110.

Hereinafter, by being illustrated according to the precipitation equipment of another embodiment of the invention.

Reference picture 13, according to the difference of the maintenance unit 200_1 and Fig. 1 of the precipitation equipment of present embodiment embodiment It is, carrier maintenance department 230_1 and anti-deposition component maintenance portion 250_1 are together arranged in one and safeguarded in chamber 210.

Specifically, it can be vacuum chamber to safeguard chamber 210.Therefore, in the case where return cavity 112 is configured to vacuum chamber, Return cavity 112 is with safeguarding that the side of chamber 210 can be directly connected to.In return cavity 112 and in the case of safeguarding that chamber 210 is directly connected to, The structure of conversion chamber (the 500 of Fig. 1) that then need not as shown in the embodiment of figure 1.Therefore, because eliminate conversion chamber (Fig. 1's 500) structure, so the embodiment compared to Fig. 1, present embodiment can shorten maintenance time.

In addition, safeguarding that the inside of chamber 210 is respectively disposed with carrier maintenance department 230_1 and anti-deposition component maintenance portion 250_1. Therefore, present embodiment safeguards chamber (the 213 of Fig. 1) and anti-deposition component maintenance chamber (figure without the carrier of the embodiment such as Fig. 1 1 structure 215).Therefore, because eliminating carrier safeguards chamber (the 213 of Fig. 1) and anti-deposition component maintenance chamber (the 215 of Fig. 1) Structure, so the embodiment compared to Fig. 1, present embodiment can shorten maintenance time.

That is, according to the maintenance unit 200_1 of present embodiment there is the embodiment compared to Fig. 1 can shorten and safeguards work The advantage of skill time.

Hereinafter, the precipitation equipment according to a further embodiment of this invention will be illustrated.

Figure 14 is the sectional view of the maintenance unit of the precipitation equipment according to another embodiment of the invention.

Reference picture 14, the embodiment party according to the maintenance unit 200_2 of present embodiment and descriptions of the Fig. 1 to Fig. 6 The difference of formula is, multiple support plate 237a and 237b, particle are disposed with carrier stowage portion 231_1,237a and 237b and is removed Portion 233a and 233b, mesopore 232a and 232b, oil injecting part 235a and 235b and fixed component 236a and 236b.

Specifically, multiple support plates are separatedly disposed with certain intervals on carrier stowage portion 231_1,237a and 237b 237a and 237b.Therefore, carrier stowage portion 231_1,237a and 237b has been internally formed multiple accommodation spaces.Carrier stowage portion Multiple first vectors can be stacked with 231_1,237a and 237b multiple accommodation spaces respectively along third direction Z.

Carrier stowage portion 231_1,237a and 237b are arranged to adjacent with safeguarding transfer member 353.Carrier stowage portion 231_ 1st, 237a and 237b and safeguard and can be disposed with mechanical arm between transfer member 353.Mechanical arm, which is played, passes first vector from maintenance Send part 353 to be moved to carrier stowage portion 231_1,237a and 237b, or the first vector for completing maintenance is storaged from carrier Portion 231_1,237a and 237b are moved to the effect for safeguarding transfer member 353.

In addition, being disposed with multiple particle removal portions on carrier stowage portion 231_1,237a and 237b both sides side wall 231 233a and 233b, mesopore 232a and 232b, oil injecting part 235a and 235b and fixed component 236a and 236b.Multiple particles are removed Portion 233a and 233b, mesopore 232a and 232b, oil injecting part 235a and 235b and fixed component 236a and 236b may be disposed to point Not Dui Yingyu carrier stowage portion 231_1,237a and 237b multiple accommodation spaces.Therefore, multiple particle removal portion 233a and 233b, mesopore 232a and 232b, oil injecting part 235a and 235b and fixed component 236a and 236b can be performed for stacking respectively The maintenance of multiple first vectors on carrier stowage portion 231_1,237a and 237b.

That is, in the maintenance unit 200_2 of present embodiment, it is stacked with carrier stowage portion 231_1,237a and 237b many Individual first vector, and multiple first vectors of stacking can simultaneously be repaired.

In addition to the foregoing structure, the embodiment described in description of the other structures with Fig. 1 to Fig. 6 is substantially the same, because This omission is illustrated.

Although embodiment of the present invention is illustrated above with reference to accompanying drawing, in the technical field of the invention Technical staff be appreciated that the present invention can not change the present invention technological thought or essential feature in the case of be embodied as it Its concrete form.It will be understood, therefore, that above described embodiment is exemplary, and non-limiting in all respects Property.

The explanation of reference

1000：Precipitation equipment S：Substrate

B：Anti- means of deposition

100：Sedimentation unit 110：Process cavity

111：Deposit cavity 112：Return cavity

113：Substrate feeding chamber 114：Substrate reclaims chamber

130：Deposit subassembly 200,200_1,200_2：Maintenance unit

210：Safeguard chamber 213：Carrier safeguards chamber

215：Anti- deposition component maintenance chamber

230、230_1、230_2：Carrier maintenance department

231：Carrier stowage portion 233：Particle removal portion

235：Oil injecting part

250、250_1、250_2：Anti- deposition component maintenance portion

251：Anti- means of deposition stowage portion 253：Anti- deposition part replacement portion

300：Delivery unit 310：Carrier

311：Body 313：Cam follower

315：Bonded block 315a：First bonded block

315b：Second bonded block 317：Electrostatic chuck

350：Transfer member 400：Connecting portion

401：It is opened and closed connecting portion 402：Gate connecting portion

500：Change chamber

Claims

1. precipitation equipment, including：

Sedimentation unit, depositing operation is performed to substrate；

Delivery unit, includes the carrier and the transfer member of the transmission carrier of the fixed substrate；

Maintenance unit, is arranged to adjacent with the sedimentation unit, and performs maintenance to the carrier,

Wherein, the transfer member includes safeguarding transfer member, described to safeguard that transfer member is arranged in the sedimentation unit and institute State between maintenance unit the carrier being sent to the maintenance unit from the sedimentation unit.

2. precipitation equipment as claimed in claim 1, wherein,

The sedimentation unit includes：

Deposit cavity；

Deposit subassembly, is arranged in the deposit cavity, and provides deposited material to the substrate；

Return cavity, is arranged in the lower section of the deposit cavity, and is connected to the maintenance unit；

Substrate feeding chamber, is arranged in the side of the deposit cavity and the return cavity；And

Substrate reclaims chamber, is arranged in the opposite side of the deposit cavity and the return cavity,

Wherein, the transfer member also includes：

First transfer member, is arranged in the deposit cavity；And

Second transfer member, is arranged in the return cavity,

Wherein, it is described to safeguard that transfer member is branched out from second transfer member, and be arranged in the return cavity with it is described Between maintenance unit.

3. precipitation equipment as claimed in claim 1, wherein,

The carrier includes：

Body；

Electrostatic chuck, is arranged on a surface of the body, and the substrate is fixed on the body；

At least one first bonded block, is arranged on a surface of the body, and anti-means of deposition is bound to On the body；And

Cam follower, is arranged in the outside of the body, and the body is moved with the transfer member,

Wherein, the transfer member includes：

At least one bearing-surface, supports the surface of the cam follower；And

Guide surface, guides the side of the cam follower.

4. precipitation equipment as claimed in claim 1, wherein,

The maintenance unit includes：

Carrier maintenance department, maintenance is performed to the carrier；And

Anti- deposition component maintenance portion, changes the anti-means of deposition being bound on the carrier.

5. precipitation equipment as claimed in claim 4, wherein,

The carrier maintenance department includes：

Carrier stowage portion, is storaged and is fixed with the carrier；

Particle removal portion, is arranged on the both sides side wall in the carrier stowage portion, and removes the particle for being attached to the carrier； And

Oil injecting part, lubricating oil is supplied to the carrier,

Wherein, the anti-deposition component maintenance portion includes：

Anti- means of deposition stowage portion, is stacked as many for the extra anti-means of deposition in the anti-means of deposition stowage portion Layer；And

Anti- deposition part replacement portion, performs replacing of the anti-means of deposition from the carrier,

Wherein, the anti-deposition part replacement portion is arranged between the carrier stowage portion and the anti-means of deposition stowage portion.

6. precipitation equipment as claimed in claim 1, in addition to：

Control unit, is confirmed whether to repair the carrier,

Wherein, the control unit is connected with the sedimentation unit, the delivery unit and the maintenance unit respectively, and point Do not control the sedimentation unit, the delivery unit and the maintenance unit is driven such that the maintenance unit to described Carrier performs maintenance.

7. precipitation equipment, including：

Sedimentation unit, including the process cavity of depositing operation is performed to substrate；

Delivery unit, includes the carrier of the transmission substrate；

Maintenance unit, is arranged in the side of the process cavity, and including performing the maintenance chamber of maintenance to the carrier；

Chamber is changed, the process cavity is arranged in and described safeguards between chamber；

First connecting portion, is connected to the process cavity and the conversion chamber；And

Second connecting portion, is connected to the conversion chamber and described safeguards chamber.

8. precipitation equipment as claimed in claim 7, wherein,

The process cavity is configured to vacuum chamber,

It is described to safeguard that chamber is configured to common pressure chamber, and

The first connecting portion and the second connecting portion include gate valve, and the conversion chamber is converted to vacuum by the gate valve State or atmospheric pressure state.

9. deposition process, comprises the following steps：

The substrate put into substrate feeding chamber is combined with carrier；

The carrier is sent to deposit cavity from the substrate feeding chamber；

Returned by the carrier for being combined with the substrate as the first transfer member is sent to the substrate from the deposit cavity During receiving chamber, depositing operation is performed to the substrate for being bound to the carrier；

The substrate of executed depositing operation is separated from the carrier, and the substrate of executed depositing operation is moved Go out to the substrate to reclaim the outside of chamber；

The carrier of the substrate will have been separated and be sent to return cavity from the deposit cavity；

Judge whether to need to perform maintenance to the carrier for being sent to the return cavity；

The carrier for being sent to the return cavity is divided into the first vector that needs repairing and except the first vector it Outer Second support；

By the first vector repaired the need in the carrier with the maintenance transport unit branched out from the second transfer member Part is sent to maintenance unit；

Maintenance is sent to the first vector of the maintenance unit；

The first vector through maintenance is safeguarded that transfer member is back to the return cavity with described；And

The first vector through maintenance of the return cavity will be recycled to as second transfer member is sent to the lining Bottom feeding chamber,

Wherein, it is described divide into the first vector and the Second support in addition to the first vector the step of it Afterwards, it is further comprising the steps of：

By the Second support as second transfer member is sent to the substrate feeding chamber.

10. deposition process as claimed in claim 9, wherein, it is described to repair first load for being sent to the maintenance unit The step of body, comprise the following steps：

The first vector for being sent to the maintenance unit is fixed；

The anti-means of deposition of the first vector is changed using anti-deposition part replacement portion；And

To the electrostatic chuck gas injection of the first vector to remove particle, and injected to the cam follower of first vector Grease.