CN107270839B - Device and method for measuring coaxiality of rotator in hole - Google Patents

Device and method for measuring coaxiality of rotator in hole Download PDF

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CN107270839B
CN107270839B CN201710676631.9A CN201710676631A CN107270839B CN 107270839 B CN107270839 B CN 107270839B CN 201710676631 A CN201710676631 A CN 201710676631A CN 107270839 B CN107270839 B CN 107270839B
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positioning
displacement sensor
hole
chromatic dispersion
piece
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CN107270839A (en
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沈志远
宋玮
谭维兵
李小泽
苏建仓
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Northwest Institute of Nuclear Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes

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  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention provides a device and a method for measuring coaxiality of a rotator in a hole, which are used for solving the problem that the coaxiality of the rotator in a narrow hole cannot be quantitatively measured by the existing method. The device comprises a positioning support assembly, a chromatic dispersion confocal displacement sensor, a reflecting mirror, a rotary positioning tool and a controller; the positioning support assembly comprises a positioning piece, a support piece and a reflector bracket; when the positioning support assembly and the chromatic dispersion confocal displacement sensor are integrally positioned in the reference hole, four fillets of the positioning piece and elastic support points of the support piece are in close contact with the inner wall of the reference hole; the reflecting mirror is fixed through the reflecting mirror bracket, and the position and the posture of the reflecting mirror meet the requirement that the light beam emitted by the chromatic dispersion confocal displacement sensor is reflected by the reflecting mirror and then vertically incident to the surface to be measured of the revolving body; the rotary positioning tool comprises a deflector rod, and the deflector rod can drive the positioning support assembly to rotate and cannot generate radial force on the positioning support assembly; the controller is used for obtaining the optical path length, and then calculates the axiality of the axis of the tested rotator relative to the axis of the reference hole.

Description

Device and method for measuring coaxiality of rotator in hole
Technical Field
The invention belongs to the technical field of optical precision measurement, and particularly relates to a device and a method for measuring coaxiality of a rotator in a hole.
Background
Electron accelerators typically place an annular cathode that emits an electron beam in the magnet bore, constraining the electron motion track with a magnetic field, and the assembly coaxiality between the annular cathode and the magnet bore directly affects the system's operating efficiency. In some systems that use electron accelerators to generate microwaves, it is often desirable that the cathode be offset from the magnet bore axis by less than 0.1mm, and that the magnet bore aperture be typically in the tens of millimeters range, with the cathode end face to magnet bore end face distance being on the order of tens of centimeters, it is difficult for conventional measuring instruments or tools to perform accurate measurements in such small spaces. For some electron accelerator systems containing permanent magnets, the technical scheme of measuring coaxiality by using a dial indicator or a common displacement sensor cannot be applied due to the ferromagnetic material in the instrument. At present, in the assembly process of the cathode and the magnet of the electron accelerator, a centering block made of nonferromagnetic materials is mainly adopted to check whether the coaxiality meets the requirement, the outer cylindrical surface of the centering block is matched with the inner hole of the magnet, the inner hole of the centering block is matched with the outer cylindrical surface of the cathode, and the coaxiality is judged by sensing the resistance of the centering block sleeved with the cathode when the electron accelerator is used. Although the method has low cost and is simple and easy to implement, the method has the following problems:
(1) The method can not quantitatively give the magnitude and the direction of the axis deviation, and has certain blindness in centering assembly;
(2) Because the centering block needs to slide in the inner hole of the magnet, the fit clearance exists between the inner and outer fit surfaces of the centering block, the axis deviation after centering can only be guaranteed to be about 0.1mm, the fit clearance can be gradually increased along with the use and abrasion of the centering block, the centering precision is lower and lower, and in addition, the centering block is influenced by gravity and can cause eccentric after centering;
(3) The method belongs to a contact method, and can cause collision or scratch to the cathode in the process of inspection.
Disclosure of Invention
Based on the background, the invention provides a device and a method for measuring the coaxiality of a narrow-hole inner revolving body based on a chromatic dispersion confocal displacement sensor and a four-point rigid positioning tool, and aims to solve the problem that the existing method cannot quantitatively measure the axis deviation and the direction of the narrow-space inner revolving body.
The technical scheme of the invention is as follows:
the device for measuring the coaxiality of the revolving body in the hole comprises a positioning support assembly; the special feature is that: the device also comprises a chromatic dispersion confocal displacement sensor, a reflecting mirror, a rotary positioning tool and a controller;
the positioning support assembly comprises a positioning piece and a support piece which are fixedly arranged relatively, and a space between the positioning piece and the support piece is used for fixedly mounting the chromatic dispersion confocal displacement sensor;
the bottom surface of the positioning piece is a rectangular plane with four corners being rounded angles, and at least one elastic supporting point is arranged on the bottom surface of the supporting piece; when the positioning piece, the supporting piece and the chromatic dispersion confocal displacement sensor are integrally positioned in the reference hole, four fillets on the bottom surface of the positioning piece and elastic supporting points on the bottom surface of the supporting piece are in close contact with the inner wall of the reference hole;
the positioning support assembly further comprises a reflector bracket fixedly connected with the positioning piece or the support piece, the reflector is fixed in the reference hole through the reflector bracket, and the position and the posture of the reflector are required to meet the condition that a light beam emitted by the chromatic dispersion confocal displacement sensor can vertically enter the tested surface of the rotator in the reference hole after being reflected by the reflector;
the rotary positioning tool comprises at least one deflector rod, one end of the deflector rod is in contact with the positioning piece and/or the supporting piece, the deflector rod can drive the positioning piece and/or the supporting piece to rotate in the reference hole and cannot generate radial force on the positioning piece and/or the supporting piece, and the other end of the deflector rod extends out of the reference hole;
the controller is positioned outside the reference hole, connected with the chromatic dispersion confocal displacement sensor through a transmission optical fiber and used for acquiring the optical path length; the coaxiality of the axis of the measured rotator relative to the axis of the reference hole can be calculated through the optical path length;
the optical path refers to the path of light emitted from the chromatic dispersion confocal displacement sensor probe and reflected to the surface of the measured rotator through the reflecting mirror.
Further, the rotary positioning tool further comprises a positioning turntable positioned at one side of the chromatic dispersion confocal displacement sensor; the positioning turntable is of a cock type structure, a through hole for passing the transmission optical fiber is formed in the middle along the axis direction, and the bottom extends outwards along the radial direction and is matched with the end part of the reference hole to realize axial positioning; one end of the deflector rod penetrates through the positioning rotary disc to be in contact with the positioning piece and/or the supporting piece, the middle part of the deflector rod is locked with the positioning rotary disc through a set screw, and the other end of the deflector rod extends out of the positioning rotary disc.
Further, the positioning piece and the supporting piece are integrated.
Further, an axial strip-shaped hole and a radial strip-shaped hole are formed in the positioning piece, wherein the axial strip-shaped hole is formed in the surface of the positioning piece, which is used for fixing the chromatic dispersion confocal displacement sensor, the chromatic dispersion confocal displacement sensor is fixed on the positioning piece through the axial strip-shaped hole, and the axial distance between the reflecting mirror and the probe of the chromatic dispersion confocal displacement sensor can be adjusted through the axial strip-shaped hole; the radial strip-shaped holes are arranged on the surface of the positioning piece for fixing the reflector bracket, the reflector bracket is fixed on the positioning piece through the radial strip-shaped holes, and the height adjustment from the reflector to the surface of the tested rotator can be realized through the radial strip-shaped holes.
Further, the elastic supporting point is a spring plunger.
The invention also provides a method for measuring the coaxiality of the rotator in the hole, which comprises the following steps:
1) Placing the device for measuring the coaxiality of the revolving body in the hole into a reference hole;
2) Adjusting a rotary positioning tool, positioning the chromatic dispersion confocal displacement sensor in a reference hole under a set depth and a set angle, defining the chromatic dispersion confocal displacement sensor as an initial position, and opening the chromatic dispersion confocal displacement sensor;
3) The probe of the chromatic dispersion confocal displacement sensor emits a beam of white light and irradiates on a reflecting mirror, and the white light is perpendicularly irradiated on the measured surface of the rotator in the reference hole after being reflected by the reflecting mirror;
4) The chromatic dispersion confocal displacement sensor receives an optical signal returned by the tested surface of the rotator in the reference hole and sends the optical signal to the controller;
5) The controller displays the displacement of the current state through spectrum analysis and marks as S 0
6) Adjusting a rotary positioning tool, and rotating the chromatic dispersion confocal displacement sensor for three times along the same direction, wherein each time is rotated by 90 degrees; after each rotation, the displacement of the current state is measured according to the same method as steps 3) to 5), and is respectively marked as S 90 ,S 180 And S is 270
7) And (3) obtaining the coaxiality of the axis of the revolving body relative to the axis of the reference hole through the displacement measured in the steps 5) -6).
Further, the specific method for calculating the coaxiality in the step 7) is as follows:
7.1 Taking the center of a cross-section circle where a measured point is located on the reference hole as an origin O, taking the direction of the origin O pointing to the initial position as an X axis, taking the direction of the origin O pointing to the position after the first rotation as a Y axis, and establishing a rectangular coordinate system XOY, wherein the coordinate components of the deviation of the center of the revolving body relative to the axis of the reference hole are as follows:
7.2 Axiality of the revolution body axis with respect to the reference hole axis is:
the invention has the following beneficial effects:
1. compared with the traditional method for qualitatively checking coaxiality by using the centering slide block, the method can quantitatively give out the magnitude and the direction of the axis deviation, and provide a basis for centering assembly;
2. the invention adopts the chromatic dispersion confocal displacement sensor to realize micron-level high-precision measurement, can obviously improve the assembly efficiency and greatly improve the centering precision;
3. according to the invention, 4 vertexes of the rectangular bottom surface of the positioning piece are used for rigid positioning, so that the processing and manufacturing cost is low, and the requirement on the assembly precision of the device is low;
4. the invention can be applied in strong magnetic field environment;
5. the invention belongs to a non-contact method, and the cathode cannot be knocked or scratched in the inspection process.
Drawings
FIG. 1 is a schematic diagram of a device for measuring coaxiality of a rotator in a hole; reference numerals in the drawings: 1-annular cathode, 2-magnet inner cylinder, 3-magnet, 4-positioning support component, 41-positioning piece, 42-support piece, 43-spring plunger, 44-reflector bracket, 45-reflector, 5-dispersion confocal displacement sensor, 51-probe, 52-optical fiber, 53-controller, 6-rotary positioning tool, 61-positioning turntable, 62-deflector rod and 63-set screw;
FIG. 2 is a schematic view of the structure of the rigid anchor points and the elastic support points according to the present invention; reference numerals in the drawings: 43-spring plunger, 46-rigid anchor point;
FIG. 3 is a schematic view of the separable contact between the end of the lever and the positioning support assembly provided by the present invention; reference numerals in the drawings: 64-junction.
FIG. 4 is a schematic view of the positioning support assembly of the present invention; reference numerals in the drawings: 411-axial strip holes, 412-radial strip holes.
Fig. 5 is a schematic diagram of a coordinate system established when the coaxiality is calculated according to the invention.
Detailed Description
The invention is further illustrated by the following figures and examples.
Referring to fig. 1-3, the device for measuring coaxiality of the in-hole revolving body provided by the invention comprises a positioning support assembly 4, a chromatic dispersion confocal displacement sensor 5, a reflecting mirror 45, a rotary positioning tool 6 and a controller 53.
The positioning support assembly 4 comprises a positioning member 41 and a support member 42 which are fixedly arranged relative to each other (the positioning member 41 and the support member 42 can be integrated), and a space between the positioning member 41 and the support member 42 is used for fixedly mounting the chromatic dispersion confocal displacement sensor 5; the bottom surface of the positioning piece 41 is a rectangular plane with four corners being rounded corners, and the four rounded corners of the rectangular plane are used as rigid positioning points 46; two spring plungers 43 are provided on the bottom surface of the support member 42 as elastic support points; when the positioning piece 41, the supporting piece 42 and the dispersive confocal displacement sensor 5 are integrally positioned in the reference hole after being assembled, four rigid positioning points 46 on the bottom surface of the positioning piece 41 and spring plungers on the bottom surface of the supporting piece 42 are in close contact with the inner wall of the reference hole.
The positioning support assembly 4 further comprises a reflector bracket 44 fixedly connected with the positioning piece 41 or the support piece 42, the reflector 45 is fixed in the reference hole through the reflector bracket 44, and the position and the posture of the reflector 45 are required to meet the condition that the light beam emitted by the chromatic dispersion confocal displacement sensor 5 can vertically enter the surface to be measured of the rotator positioned in the reference hole after being reflected by the reflector 45.
The rotary positioning tool 6 comprises at least one deflector rod 62, one end of the deflector rod 62 is in contact with the positioning piece 41 and/or the supporting piece 42, the deflector rod can drive the positioning piece and/or the supporting piece to rotate in the reference hole and can not generate radial force on the positioning piece and/or the supporting piece, and the other end of the deflector rod 62 extends out of the reference hole; in this embodiment, two levers are used and are in contact with the positioning member 41 and the supporting member 42, respectively, as shown at the connection 64 in fig. 3; when the deflector 62 is rotated, the positioning piece 41 and the supporting piece 42 rotate, so that the dispersive confocal displacement sensor 5 and the reflecting mirror 45 are driven to rotate, and the purpose of adjusting the positioning angle of the dispersive confocal displacement sensor 5 in the reference hole is achieved. When the shift lever 62 is moved along the axis direction of the reference hole, the positioning member 41 and the supporting member 42 are driven to move along the axis direction of the reference hole, so that the purpose of adjusting the positioning depth of the dispersive confocal displacement sensor 5 in the reference hole is achieved.
The controller 53 is located outside the reference hole, connected to the dispersive confocal displacement sensor 5 through a transmission fiber, and used for obtaining the optical path length, and can calculate the height of the measured surface through the optical path length.
In order to facilitate operation when adjusting the position and angle of the chromatic dispersion confocal displacement sensor 5, the rotary positioning tool 6 of the invention further comprises a positioning turntable 61 positioned at one side of the chromatic dispersion confocal displacement sensor 5; the positioning turntable 61 has a cock structure, the neck of which is matched with the inner wall of the reference hole to realize positioning, the middle of which is provided with a through hole for the transmission optical fiber to pass through along the axial direction, and the bottom of which is outwards extended along the radial direction to be matched with the end part of the reference hole to realize positioning; one end of the deflector rod 62 passes through the positioning turntable 61 to be in contact with the positioning piece 41 and/or the supporting piece 42, the middle part of the deflector rod 62 is locked with the positioning turntable 61 through a set screw 63, and the other end of the deflector rod 62 extends out of the positioning turntable 61.
In order to adjust the axial distance between the reflecting mirror and the probe 51 of the dispersive confocal displacement sensor 5 and adjust the height of the reflecting mirror relative to the surface to be measured, the positioning piece 41 is provided with an axial strip-shaped hole 411 and a radial strip-shaped hole 412, as shown in fig. 4. The axial strip-shaped hole 411 is arranged on the surface of the positioning piece 41 for fixing the dispersive confocal displacement sensor 5, the dispersive confocal displacement sensor 5 is fixed on the positioning piece 41 through the axial strip-shaped hole 411, and the adjustment of the axial distance between the reflecting mirror 45 and the probe 51 of the dispersive confocal displacement sensor 5 can be realized through the axial strip-shaped hole 411; a radial strip-shaped hole 412 is provided on the surface of the positioning member 41 for fixing the mirror holder 44, and the mirror holder 44 is fixed to the positioning member 41 through the radial strip-shaped hole 412, and the height adjustment of the mirror 45 to the surface of the measured rotator can be achieved through the radial strip-shaped hole 412.
The working principle of the invention is as follows:
the probe 51 can emit a beam of white light, and the white light is dispersed along the beam direction by an optical system in the probe 51, so that only light with specific wavelength is converged into a light spot on the surface of the measured object; the probe 51 receives the reflected light and transmits the reflected light to the controller 53 through the transmission optical fiber, the controller 53 calculates the optical path length by analyzing the frequency component of the reflected light, and further calculates the height of the surface of the measured object, and finally the coaxiality of the axis of the measured object relative to the reference hole is obtained. In the invention, white light beams emitted by a chromatic dispersion confocal displacement sensor 5 are reflected by a reflecting mirror 45 and then vertically hit the surface to be measured of a hole revolving body, the light rays are reflected back into the chromatic dispersion confocal displacement sensor 5 in an original way, and the displacement of the current state is obtained by analyzing the frequency of light signals received by the chromatic dispersion confocal displacement sensor 5; through adjusting the rotary positioning tool 6, the combination body of the positioning support assembly 4 and the chromatic dispersion confocal displacement sensor 5 can be driven to be positioned to other angles in the reference hole, and the coaxiality of the axis of the revolving body to be measured relative to the axis of the reference hole can be obtained through measuring displacement values under a plurality of uniform distribution angles.
The method for measuring the coaxiality of the in-hole revolving body by using the in-hole revolving body coaxiality measuring device comprises the following steps:
1) Placing the device for measuring the coaxiality of the revolving body in the hole into a reference hole;
2) The rotational positioning tool 6 is adjusted, the dispersive confocal displacement sensor 5 is positioned in the reference hole under the set depth and the set angle, the dispersive confocal displacement sensor at the moment is defined as an initial position (namely, the 0-degree position shown in fig. 5), and the dispersive confocal displacement sensor 5 is opened;
3) The probe 51 of the chromatic dispersion confocal displacement sensor 5 emits a beam of white light and is incident on the reflecting mirror 45, and the white light is reflected by the reflecting mirror 45 and then vertically incident on the measured surface of the rotator in the reference hole;
4) The dispersive confocal displacement sensor 5 receives the optical signal returned by the tested surface of the rotator in the reference hole and sends the optical signal to the controller 53;
5) The controller 53 displays the displacement of the current state of the output by spectral analysis, denoted S 0
6) The rotary positioning tool 6 is adjusted, the chromatic dispersion confocal displacement sensor 5 is rotated for three times along the same direction, and each time is rotated for 90 degrees; after each rotation, the displacement of the current state is measured according to the same method as steps 3) to 5), and is respectively marked as S 90 ,S 180 And S is 270 The method comprises the steps of carrying out a first treatment on the surface of the 7) And (3) obtaining the deviation and the direction of the axis of the revolving body relative to the axis of the reference hole, namely the coaxiality, through the displacement measured in the steps 5) to 6).
The specific calculation method in the step 7) is as follows:
taking the center of a cross-section circle of a measured point on the axis of the reference hole as an origin O, taking the direction of the origin O pointing to the initial position as an X axis, taking the direction of the origin O pointing to the position (namely, the 90 DEG position shown in fig. 5) after the first rotation as a Y axis, and establishing a rectangular coordinate system XOY, wherein the coordinate components of the deviation of the center of the revolution body relative to the axis of the reference hole are as follows:
7.2 Axiality of the revolution body axis with respect to the reference hole axis is:
examples:
the inner diameter of the annular cathode 1 is 19mm, and the inner diameter of the magnet inner cylinder 2 is 52mm; the magnet 3 is a permanent magnet, and the distance from the end face of the annular cathode 1 to the end face of the orifice of the magnet inner cylinder 2 is about 300mm. The positioning and supporting assembly 4 is made of aluminum alloy, wherein the positioning piece 41 obtains the rounded corner vertex at 4 positions on the rectangular surface, namely 4 rigid positioning points 46 through an integral processing mode. The measuring center distance of the adopted chromatic dispersion confocal displacement sensor 5 is 20mm, and the measuring range is +/-1 mm. According to the measuring method, the coordinate components of the axial deviation of the annular cathode 1 relative to the axial deviation of the magnet inner cylinder 2 in the 2 orthogonal directions can be obtained by measuring the displacement values under 4 uniform distribution angles, and coaxiality can be obtained through conversion.
The invention is not only suitable for measuring the coaxiality of the annular cathode of the electron accelerator and the inner cylinder of the magnet, but also suitable for measuring the coaxiality of other in-hole gyrorotor.

Claims (5)

1. The device for measuring the coaxiality of the revolving body in the hole comprises a positioning support assembly; the method is characterized in that: the device also comprises a chromatic dispersion confocal displacement sensor, a reflecting mirror, a rotary positioning tool and a controller;
the positioning support assembly comprises a positioning piece and a support piece which are fixedly arranged relatively, and a space between the positioning piece and the support piece is used for fixedly mounting the chromatic dispersion confocal displacement sensor;
the bottom surface of the positioning piece is a rectangular plane with four corners being rounded angles, and at least one elastic supporting point is arranged on the bottom surface of the supporting piece and is a spring plunger; when the positioning piece, the supporting piece and the chromatic dispersion confocal displacement sensor are integrally positioned in the reference hole, four fillets on the bottom surface of the positioning piece and elastic supporting points on the bottom surface of the supporting piece are in close contact with the inner wall of the reference hole;
the positioning support assembly further comprises a reflector bracket fixedly connected with the positioning piece or the support piece, the reflector is fixed in the reference hole through the reflector bracket, and the position and the posture of the reflector are required to meet the condition that a light beam emitted by the chromatic dispersion confocal displacement sensor can vertically enter the tested surface of the rotator in the reference hole after being reflected by the reflector;
the rotary positioning tool comprises at least one deflector rod, one end of the deflector rod is in contact with the positioning piece and/or the supporting piece, the deflector rod can drive the positioning piece and/or the supporting piece to rotate in the reference hole and cannot generate radial force on the positioning piece and/or the supporting piece, and the other end of the deflector rod extends out of the reference hole;
the controller is positioned outside the reference hole, connected with the chromatic dispersion confocal displacement sensor through a transmission optical fiber and used for acquiring the optical path length; the coaxiality of the axis of the measured rotator relative to the axis of the reference hole can be calculated through the optical path length;
the optical path refers to the path of light emitted from the chromatic dispersion confocal displacement sensor probe and reflected to the surface of the measured rotator through the reflector;
the positioning piece is provided with an axial strip-shaped hole and a radial strip-shaped hole, wherein the axial strip-shaped hole is arranged on the surface of the positioning piece for fixing the chromatic dispersion confocal displacement sensor, the chromatic dispersion confocal displacement sensor is fixed on the positioning piece through the axial strip-shaped hole, and the axial distance between the reflecting mirror and the probe of the chromatic dispersion confocal displacement sensor can be adjusted through the axial strip-shaped hole; the radial strip-shaped holes are arranged on the surface of the positioning piece for fixing the reflector bracket, the reflector bracket is fixed on the positioning piece through the radial strip-shaped holes, and the height adjustment from the reflector to the surface of the tested rotator can be realized through the radial strip-shaped holes.
2. The in-hole rotator coaxiality measuring device according to claim 1, wherein: the rotary positioning tool also comprises a positioning turntable positioned at one side of the chromatic dispersion confocal displacement sensor; the positioning turntable is of a cock type structure, a through hole for passing the transmission optical fiber is formed in the middle along the axis direction, and the bottom extends outwards along the radial direction and is matched with the end part of the reference hole to realize axial positioning; one end of the deflector rod penetrates through the positioning rotary disc to be in contact with the positioning piece and/or the supporting piece, the middle part of the deflector rod is locked with the positioning rotary disc through a set screw, and the other end of the deflector rod extends out of the positioning rotary disc.
3. The in-hole rotator coaxiality measuring device according to claim 2, wherein: the positioning piece and the supporting piece are integrated.
4. The method for measuring the coaxiality of the rotary body in the hole is characterized by comprising the following steps of:
1) Placing the in-hole rotator coaxiality measuring device according to any one of claims 1 to 3 into a reference hole;
2) Adjusting a rotary positioning tool, positioning the chromatic dispersion confocal displacement sensor in a reference hole under a set depth and a set angle, defining the chromatic dispersion confocal displacement sensor as an initial position, and opening the chromatic dispersion confocal displacement sensor;
3) The probe of the chromatic dispersion confocal displacement sensor emits a beam of white light and irradiates on a reflecting mirror, and the white light is perpendicularly irradiated on the measured surface of the rotator in the reference hole after being reflected by the reflecting mirror;
4) The chromatic dispersion confocal displacement sensor receives an optical signal returned by the tested surface of the rotator in the reference hole and sends the optical signal to the controller;
5) The controller displays the displacement of the current state through spectrum analysis and marks as S 0
6) Adjusting a rotary positioning tool, and rotating the chromatic dispersion confocal displacement sensor for three times along the same direction, wherein each time is rotated by 90 degrees; after each rotation, the displacement of the current state is measured according to the same method as steps 3) to 5), and is respectively marked as S 90 ,S 180 And S is 270
7) And (3) obtaining the coaxiality of the axis of the revolving body relative to the axis of the reference hole through the displacement measured in the steps 5) -6).
5. The method for measuring coaxiality of a revolving body in a hole according to claim 4, wherein the specific method for calculating coaxiality in the step 7) is as follows:
7.1 Taking the center of a cross-section circle where a measured point is located on the reference hole as an origin O, taking the direction of the origin O pointing to the initial position as an X axis, taking the direction of the origin O pointing to the position after the first rotation as a Y axis, and establishing a rectangular coordinate system XOY, wherein the coordinate components of the deviation of the center of the revolving body relative to the axis of the reference hole are as follows:
7.2 Axiality of the revolution body axis with respect to the reference hole axis is:
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