CN107270839A - Revolving body coaxality measuring mechanism and method in hole - Google Patents
Revolving body coaxality measuring mechanism and method in hole Download PDFInfo
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- CN107270839A CN107270839A CN201710676631.9A CN201710676631A CN107270839A CN 107270839 A CN107270839 A CN 107270839A CN 201710676631 A CN201710676631 A CN 201710676631A CN 107270839 A CN107270839 A CN 107270839A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
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Abstract
The present invention proposes revolving body coaxality measuring mechanism and method in a kind of hole, to solve existing method without in the narrow and small hole of method quantitative measurement the problem of revolving body axiality.Device includes positioning support component, the confocal displacement transducer of dispersion, speculum, rotational positioning frock and controller;Positioning support component includes keeper, support member and mirror support;When positioning support component and the confocal displacement transducer of dispersion are integrally located in datum hole, four fillets of keeper and the elastic support points of support member are in close contact with datum hole inwall;Speculum is fixed by mirror support, and its position and attitude meets after the reflected mirror reflection of light beam that the confocal displacement transducer of dispersion sends vertical incidence to revolving body measured surface;Rotational positioning frock includes driving lever, and driving lever can drive the rotation of positioning support component and will not produce radial load to positioning support component;Controller is used to obtain optical path length, and then calculates axiality of the tested revolving body axis relative to benchmark axially bored line.
Description
Technical field
The invention belongs to technical field of optical precision measurement, and in particular in a kind of hole revolving body coaxality measuring mechanism and
Method.
Background technology
The hollow cathode of launching electronics beam is generally arranged in magnet endoporus by electron accelerator, utilizes magnetically confined electronics
Moment track, and the assembling axiality between hollow cathode and magnet endoporus directly affects the operating efficiency of system.One
A little applying electronic accelerators are produced in the system of microwaves, usually require that negative electrode and magnet endoporus misalignment of axe are less than 0.1mm, and magnetic
Internal hole aperture is generally in tens millimeters of scopes, and negative electrode end face to magnet endoporus end face distance is conventional in tens cms
Measuring instrument or instrument are difficult to implement accurate measurement in such narrow space.Accelerate for some electronics comprising permanent magnet
Device system, using the technical scheme of amesdial or common displacement sensor axiality due to there is ferrimagnet in instrument
Also it can not apply.It is main using pair being made up of nonferromugnetic material in electron accelerator negative electrode and magnet assembling process at present
Whether heart block check axiality meets the requirements, to external cylindrical surface and the magnet inner hole of heart block, to the endoporus and negative electrode of heart block
External cylindrical surface coordinate, the size of axiality is judged the drag size of the heart block fit negative electrode when using by experiencing.This side
Method is although with low cost, simple and easy to do, but there are the following problems:
(1) this method can not quantify and provide misalignment of axe size and direction, exist certain " blindness " to heart assembling;
(2) due to using needing to slide in magnet endoporus to heart block, there is fit clearance to mating surface inside and outside heart block, only
It can guarantee that to the misalignment of axe after the heart in 0.1mm or so, and fit clearance is with using and wearing and tearing and can gradually increase to heart block
Greatly, cause more and more lower to heart precision, the bias that will also result in after the heart is affected by gravity to heart block in addition;
(3) this method belongs to contact method, during inspection negative electrode can be caused to collide with or scratched.
The content of the invention
Based on background above, the present invention proposes a kind of based on the confocal displacement transducer of dispersion and 4 points of rigid positioning tools
Narrow and small hole in revolving body coaxality measuring mechanism and method, it is intended to solve existing method without method quantitative measurement small space
The size of revolving body misalignment of axe and the problem of direction in hole.
The present invention technical solution be:
Revolving body coaxality measuring mechanism in hole, including positioning support component;It is characterized in that:It is also common including dispersion
Burnt displacement transducer, speculum, rotational positioning frock and controller;
The positioning support component includes being relatively fixed the keeper and support member of setting, between keeper and support member
Space is used to the confocal displacement transducer of the dispersion is fixedly mounted;
The bottom surface of keeper is to be provided with least one bullet on the rectangle plane that four angles are fillet, the bottom surface of support member
The property strong point;When keeper, support member and the confocal displacement transducer of dispersion are integrally located in datum hole, the bottom surface of keeper
The elastic support points of four fillets and support member bottom surface are in close contact with datum hole inwall;
The positioning support component also includes leading to keeper or the connected mirror support of support member, the speculum
Cross mirror support to be fixed in datum hole, the position of speculum and posture should meet the light that the confocal displacement transducer of dispersion is sent
Can be in vertical incidence to datum hole on the measured surface of revolving body after the reflection of beam reflected mirror;
The rotational positioning frock includes at least one driving lever, and one end of driving lever connects with the keeper and/or support member
Touch, driving lever can drive the keeper and/or support member to be rotated in datum hole and will not be to the keeper and/or support member
Radial load is produced, the other end of driving lever stretches out datum hole;
Controller is located at outside datum hole, is connected with the confocal displacement transducer of dispersion by Transmission Fibers, for obtaining light path
Length;Axiality of the tested revolving body axis relative to benchmark axially bored line can be calculated by the optical path length;
The light path refers to light and reflexes to tested revolving body surface from the confocal reflected mirror of displacement sensor probe outgoing of dispersion
Distance.
Further, above-mentioned rotational positioning frock also includes the locating turntable positioned at the confocal displacement transducer side of dispersion;
Locating turntable is cock-type structure, and middle part offers the through hole for passing through Transmission Fibers in the axial direction, and bottom is radially
It is overhanging to realize axially position with the cooperation of benchmark bore ends;One end of the driving lever through locating turntable and the keeper and/or
Support member is contacted, and the middle part of driving lever is locked by holding screw and locating turntable, and the other end of driving lever stretches out locating turntable.
Further, above-mentioned keeper and support member are integrated part.
Further, axial bar hole and radial direction bar hole are offered on above-mentioned keeper, wherein, axial bar hole is set
It is used for the face for fixing the confocal displacement transducer of dispersion in keeper, the confocal displacement transducer of dispersion is solid by the axial bar hole
Between the probe of speculum and the confocal displacement transducer of dispersion on keeper, can be realized by the axial bar hole axially away from
From regulation;Radial direction bar hole, which is arranged on keeper, is used for the face of fixation reflex mirror support, and mirror support passes through the radial direction
Bar hole is fixed on keeper, and the height that can realize speculum to tested revolving body surface by radial direction bar hole is adjusted.
Further, above-mentioned elastic support points are spring-loaded plunger.
Invention also provides revolving body method for measuring coaxiality in a kind of hole, comprise the following steps:
1) revolving body coaxality measuring mechanism in above-mentioned hole is put into datum hole;
2) rotational positioning frock is adjusted, the confocal displacement transducer of dispersion is positioned at set depth and set angle in datum hole
Under degree, it is initial position to define the confocal displacement transducer of now dispersion, opens the confocal displacement transducer of dispersion;
3) probe of the confocal displacement transducer of dispersion sends beam of white light and is incident on speculum, after reflected mirror reflection
In vertical incidence to datum hole on the measured surface of revolving body;
4) the confocal displacement transducer of dispersion receives the optical signal that the measured surface of revolving body in datum hole is returned, and should
Optical signal sends into controller;
5) controller is designated as S by the displacement of spectrum analysis display output current state0;
6) rotational positioning frock is adjusted, the confocal displacement transducer of dispersion is rotated three times in the same direction, every time rotation
90°;Every time rotation after all according to step 3) -5) and identical method measure a current state displacement, S is designated as respectively90, S180
And S270;
7) by step 5) -6) the middle displacement measured, obtain axiality of the revolving body axis relative to benchmark axially bored line.
Further, above-mentioned steps 7) in calculate axiality specific method be:
7.1) center of circle of section circle, as origin O, the initial position is pointed to origin O where measured point using on datum hole
Direction is X-axis, and the direction of position after rotating for the first time is pointed to using origin O as Y-axis, rectangular coordinate system XOY is set up, then revolving body is justified
The coordinate components of heart relative datum axially bored line deviation are:
7.2) revolving body axis is relative to the axiality of benchmark axially bored line:
The invention has the advantages that:
1. compared to tradition using the method to heart sliding block qualitative reaction axiality, the present invention can quantify and provide misalignment of axe
Size and direction, provide foundation to the heart to assemble;
2. the present invention can realize micron-sized high-acruracy survey using the confocal displacement transducer of dispersion, dress can be significantly improved
With efficiency, greatly improve to heart precision;
3. 4 summits of the rectangular bottom surface that the present invention passes through keeper carry out rigid positioning, processing and manufacturing cost is low, to dress
The assembly precision for putting itself is less demanding;
4. the present invention can be applied under strong magnetic field circumstance;
5. the invention belongs to eyes with non-contact method, negative electrode will not be caused to collide with during inspection or scratched.
Brief description of the drawings
Fig. 1 is the structural representation of revolving body coaxality measuring mechanism in hole;Label in figure:1- hollow cathodes, 2- magnets
Inner cylinder, 3- magnets, 4- positioning support components, 41- keepers, 42- support members, 43- spring-loaded plungers, 44- mirror supports, 45-
Speculum, the confocal displacement transducer of 5- dispersions, 51- probes, 52- optical fiber, 53- controllers, 6- rotational positioning frocks, 61- positioning
Rotating disk, 62- driving levers, 63- holding screws;
Fig. 2 is rigid anchor point provided by the present invention and the structural representation of elastic support points;Label in figure:43- bullets
Spring plunger, 46- rigidity anchor points;
Fig. 3 is the structural representation of the separable contact between driving lever end provided by the present invention and positioning support component
Figure;Label in figure:64- junctions.
Fig. 4 is the structural representation of the positioning support component of the present invention;Label in figure:411- axial bars hole, 412- footpaths
To bar hole.
Fig. 5 is the schematic diagram that the present invention calculates the coordinate system set up during axiality.
Embodiment
Below by the drawings and specific embodiments, the present invention is further illustrated.
Referring to Fig. 1-3, revolving body coaxality measuring mechanism in hole provided by the present invention, including positioning support component 4, color
Dissipate confocal displacement transducer 5, speculum 45, rotational positioning frock 6 and controller 53.
Positioning support component 4 includes being relatively fixed the keeper 41 and support member 42 (keeper 41 and support member 42 of setting
Part can be integrated), the space between keeper 41 and support member 42 is used to the confocal displacement transducer 5 of dispersion is fixedly mounted;It is fixed
The bottom surface of position part 41 is the rectangle plane of fillet for four angles, and four fillets of rectangle plane are used as rigid anchor point 46;Branch
Two spring-loaded plungers 43 are provided with the bottom surface of support member 42 as elastic support points;Keeper 41, support member 42 and dispersion are common
When burnt displacement transducer 5 is integrally located in datum hole after assembling, four rigid anchor points 46 of the bottom surface of keeper 41 and support
The spring-loaded plunger of the bottom surface of part 42 is in close contact with datum hole inwall.
Positioning support component 4 also includes and keeper 41 or the connected mirror support 44 of support member 42, speculum 45
It is fixed on by mirror support 44 in datum hole, the position of speculum 45 and posture should meet the confocal displacement transducer 5 of dispersion
The reflected mirror 45 of the light beam that sends reflect after can vertical incidence to being located in datum hole on the measured surface of revolving body.
Rotational positioning frock 6 includes at least one driving lever 62, and one end and the keeper 41 and/or support member 42 of driving lever 62 connect
Touch, driving lever can drive the keeper and/or support member to be rotated in datum hole and will not be to the keeper and/or support member
Radial load is produced, the other end of driving lever 62 stretches out datum hole;Two driving levers, and two driving lever difference are employed in the present embodiment
Contacted with keeper 41 and support member 42, as shown in Figure 3 junction 64;When rotating lever 62, keeper 41 and support member
42 can rotate, so as to drive the confocal displacement transducer 5 of dispersion and speculum 45 to rotate, reach that the confocal displacement of adjustment dispersion is passed
The purpose of the orientation angle in datum hole of sensor 5.When along datum hole axis direction moving 62, the He of keeper 41 can be driven
Support member 42 is moved along datum hole axis direction, so as to reach the adjustment confocal displacement transducer 5 of dispersion in the default locating depth of datum hole
The purpose of degree.
Controller 53 is located at outside datum hole, is connected with the confocal displacement transducer of dispersion 5 by Transmission Fibers, for obtaining light
Cheng Changdu, the height of measured surface can be calculated by the optical path length.
In order to be easy to operation, rotational positioning work of the invention when adjusting the confocal position of displacement transducer 5 of dispersion and angle
Filling 6 also includes the locating turntable 61 positioned at the confocal side of displacement transducer 5 of dispersion;Locating turntable 61 is cock-type structure, its neck
Portion coordinates with datum hole inwall realizes positioning, and its middle part offers the through hole for passing through Transmission Fibers in the axial direction, its
Bottom is radially overhanging to coordinate realization positioning with benchmark bore ends;One end of driving lever 62 passes through locating turntable 61 and keeper 41
And/or support member 42 is contacted, the middle part of driving lever 62 is locked by holding screw 63 with locating turntable 61, and the other end of driving lever 62 is stretched
Go out locating turntable 61.
In order to adjust the axial distance between speculum and the probe 51 of the confocal displacement transducer 5 of dispersion, and regulation is instead
Height of the mirror with respect to measured surface is penetrated, the present invention offers axial bar hole 411 and radial direction bar hole 412 on keeper 41,
As shown in Figure 4.Axial bar hole 411 is arranged on that face that keeper 41 is used to fix the confocal displacement transducer 5 of dispersion, color
Confocal displacement transducer 5 is dissipated to be fixed on keeper 41 by the axial bar hole 411, can be real by the axial bar hole 411
The regulation of axial distance between the probe 51 of existing speculum 45 and the confocal displacement transducer 5 of dispersion;Radial direction bar hole 412 is arranged on
Keeper 41 is used for the face of fixation reflex mirror support 44, and mirror support 44 is fixed on positioning by the radial direction bar hole 412
On part 41, it can realize that speculum 45 arrives the height regulation of tested revolving body surface by radial direction bar hole 412.
The operation principle of the present invention:
Probe 51 can send beam of white light, by the optical system inside probe 51 by white light along beam direction dispersion, this
The light of sample only specific wavelength pools hot spot on testee surface;Probe 51 receives reflected light and conducted through Transmission Fibers to control
Device 53 processed, controller 53 calculates optical path length by analyzing the frequency content of reflected light, and then calculates the height on testee surface
Degree, finally gives axiality of the testee axis relative to datum hole.In the present invention, the confocal displacement transducer 5 of dispersion is penetrated
The reflected mirror 45 of white light beam gone out is vertically got in hole on the measured surface of revolving body after reflecting, and light original road is reflected back dispersion
Inside confocal displacement transducer 5, current shape is obtained by the frequency for analyzing the optical signal that the confocal displacement transducer 5 of dispersion is received
The displacement of state;By adjusting rotational positioning frock 6, the combination of positioning support component 4 and the confocal displacement transducer 5 of dispersion can be driven
Body is positioned in datum hole to other angles, so be can be obtained by by measuring the shift value under multiple uniform angles and is treated the survey time
Turn axiality of the axis relative to benchmark axially bored line.
Using the method for revolving body axiality is in revolving body coaxality measuring mechanism measured hole in above-mentioned hole:
1) revolving body coaxality measuring mechanism in above-mentioned hole is put into datum hole;
2) adjustment rotational positioning frock 6, set depth and setting in datum hole are positioned at by the confocal displacement transducer 5 of dispersion
Under angle, it is initial position (0 ° of position i.e. shown in Fig. 5) to define the confocal displacement transducer of now dispersion, opens the confocal displacement of dispersion
Sensor 5;
3) probe 51 of the confocal displacement transducer 5 of dispersion sends beam of white light and is incident on speculum 45, reflected mirror
After 45 reflections in vertical incidence to datum hole on the measured surface of revolving body;
4) the confocal displacement transducer 5 of dispersion receives the optical signal that the measured surface of revolving body in datum hole is returned, and will
The optical signal sends into controller 53;
5) controller 53 is designated as S by the displacement of spectrum analysis display output current state0;
6) adjustment rotational positioning frock 6, the confocal displacement transducer 5 of dispersion is rotated three times in the same direction, every time rotation
90°;Every time rotation after all according to step 3) -5) and identical method measure a current state displacement, S is designated as respectively90, S180
And S270;7) by step 5) -6) in measurement displacement, obtain revolving body axis relative to the deviation size of benchmark axially bored line and
Direction, i.e. axiality.
Above-mentioned steps 7) in circular be:
The initial position is pointed to origin O as origin O in the center of circle using section circle where measured point on benchmark axially bored line
Direction is X-axis, and the direction of position (90 ° of positions i.e. shown in Fig. 5) after rotating for the first time is pointed to using origin O as Y-axis, right angle seat is set up
Mark system XOY, then the coordinate components of revolving body center of circle relative datum axially bored line deviation be:
7.2) revolving body axis is relative to the axiality of benchmark axially bored line:
Embodiment:
The internal diameter 19mm of hollow cathode 1, the internal diameter 52mm of magnet inner cylinder 2;Magnet 3 is permanent magnet, the end face of hollow cathode 1 to magnet
The aperture end face distance of inner cylinder 2 is about 300mm.Positioning support component 4 uses aluminum alloy material, and wherein keeper 41 is added by one
The mode of work obtains the rigid anchor point 46 of radiused apex, i.e., 4 at 4 in square surface.The confocal displacement transducer 5 of dispersion of use
Measuring center away from for 20mm, measurement range is ± 1mm.According to foregoing measuring method by measuring the position under 4 uniform angles
Shifting value can be obtained by the coordinate point of misalignment of axe of the axis relative to magnet inner cylinder 2 of hollow cathode 1 under 2 orthogonal directions
Amount, axiality can be obtained through conversion.
The present invention is applicable not only to the measurement of electron accelerator hollow cathode and magnet inner cylinder axiality, applies also for other
Revolving body coaxality measurement in hole.
Claims (7)
1. revolving body coaxality measuring mechanism in hole, including positioning support component;It is characterized in that:Also include the confocal displacement of dispersion
Sensor, speculum, rotational positioning frock and controller;
The positioning support component includes being relatively fixed the keeper and support member of setting, the space between keeper and support member
For the confocal displacement transducer of the dispersion to be fixedly mounted;
The bottom surface of keeper is that at least one elasticity branch is provided with the rectangle plane that four angles are fillet, the bottom surface of support member
Support point;When keeper, support member and the confocal displacement transducer of dispersion are integrally located in datum hole, four of the bottom surface of keeper
The elastic support points of fillet and support member bottom surface are in close contact with datum hole inwall;
The positioning support component also includes the mirror support being connected with keeper or support member, and the speculum passes through anti-
Penetrate mirror support to be fixed in datum hole, the position of speculum and posture should meet the light beam warp that the confocal displacement transducer of dispersion is sent
Can be in vertical incidence to datum hole on the measured surface of revolving body after speculum reflection;
The rotational positioning frock includes at least one driving lever, and one end of driving lever is contacted with the keeper and/or support member, dials
Bar can drive the keeper and/or support member to rotate and will not be produced to the keeper and/or support member in datum hole
Radial load, the other end of driving lever stretches out datum hole;
Controller is located at outside datum hole, is connected with the confocal displacement transducer of dispersion by Transmission Fibers, for obtaining optical path length;
Axiality of the tested revolving body axis relative to benchmark axially bored line can be calculated by the optical path length;
The light path refers to the road that light reflexes to tested revolving body surface from the confocal reflected mirror of displacement sensor probe outgoing of dispersion
Journey.
2. revolving body coaxality measuring mechanism in hole according to claim 1, it is characterised in that:The rotational positioning frock
Also include the locating turntable positioned at the confocal displacement transducer side of dispersion;Locating turntable is cock-type structure, and middle part is along axis side
To the through hole offered for passing through Transmission Fibers, bottom is radially overhanging to realize axially position with the cooperation of benchmark bore ends;
One end of the driving lever is contacted through locating turntable with the keeper and/or support member, and the middle part of driving lever passes through holding screw
Locked with locating turntable, the other end of driving lever stretches out locating turntable.
3. revolving body coaxality measuring mechanism in hole according to claim 2, it is characterised in that:The keeper and support
Part is integrated part.
4. revolving body coaxality measuring mechanism in the hole according to claim 1,2 or 3, it is characterised in that:The keeper
On offer axial bar hole and radial direction bar hole, wherein, axial bar hole be arranged on keeper be used for fix the confocal position of dispersion
On the face of displacement sensor, the confocal displacement transducer of dispersion is fixed on keeper by the axial bar hole, passes through the axial bars
Shape hole can realize the regulation of axial distance between the probe of speculum and the confocal displacement transducer of dispersion;Radial direction bar hole is arranged on
Keeper is used for the face of fixation reflex mirror support, and mirror support is fixed on keeper by the radial direction bar hole, passed through
Radial direction bar hole can realize speculum to the height regulation of tested revolving body surface.
5. revolving body coaxality measuring mechanism in the hole according to claim 1,2 or 3, it is characterised in that:The elasticity branch
Support point is spring-loaded plunger.
6. revolving body method for measuring coaxiality in hole, it is characterised in that comprise the following steps:
1) revolving body coaxality measuring mechanism in any described hole of claim 1 to 5 is put into datum hole;
2) rotational positioning frock is adjusted, the confocal displacement transducer of dispersion is positioned at set depth and set angle in datum hole
Under, it is initial position to define the confocal displacement transducer of now dispersion, opens the confocal displacement transducer of dispersion;
3) probe of the confocal displacement transducer of dispersion sends beam of white light and is incident on speculum, vertical after reflected mirror reflection
It is incident in datum hole on the measured surface of revolving body;
4) the confocal displacement transducer of dispersion receives the optical signal that the measured surface of revolving body in datum hole is returned, and the light is believed
Number feeding controller;
5) controller is designated as S by the displacement of spectrum analysis display output current state0;
6) rotational positioning frock is adjusted, the confocal displacement transducer of dispersion is rotated three times in the same direction, is rotated by 90 ° every time;Often
All according to step 3 after secondary rotation) -5) identical method measure a current state displacement, S is designated as respectively90, S180And S270;
7) by step 5) -6) the middle displacement measured, obtain axiality of the revolving body axis relative to benchmark axially bored line.
7. revolving body method for measuring coaxiality in hole according to claim 6, it is characterised in that step 7) middle calculating is coaxially
The specific method of degree is:
7.1) center of circle of section circle, as origin O, the direction of the initial position is pointed to origin O where measured point using on datum hole
For X-axis, the direction of position after rotating for the first time is pointed to using origin O as Y-axis, rectangular coordinate system XOY is set up, then revolving body center of circle phase
It is to the coordinate components of datum hole misalignment of axe:
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<mn>2</mn>
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<mo>(</mo>
<msub>
<mi>S</mi>
<mn>0</mn>
</msub>
<mo>-</mo>
<msub>
<mi>S</mi>
<mn>180</mn>
</msub>
<mo>)</mo>
</mrow>
</mrow>
<mrow>
<mi>Y</mi>
<mo>=</mo>
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<mi>S</mi>
<mn>90</mn>
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<mo>-</mo>
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<mn>270</mn>
</msub>
<mo>)</mo>
</mrow>
</mrow>
7.2) revolving body axis is relative to the axiality of benchmark axially bored line:
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CN107270839B (en) | 2023-10-20 |
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