CN207280399U - Revolving body coaxality measuring mechanism in hole - Google Patents

Revolving body coaxality measuring mechanism in hole Download PDF

Info

Publication number
CN207280399U
CN207280399U CN201720992659.9U CN201720992659U CN207280399U CN 207280399 U CN207280399 U CN 207280399U CN 201720992659 U CN201720992659 U CN 201720992659U CN 207280399 U CN207280399 U CN 207280399U
Authority
CN
China
Prior art keywords
locating piece
hole
dispersion
revolving body
displacement sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201720992659.9U
Other languages
Chinese (zh)
Inventor
沈志远
宋玮
谭维兵
李小泽
苏建仓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northwest Institute of Nuclear Technology
Original Assignee
Northwest Institute of Nuclear Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northwest Institute of Nuclear Technology filed Critical Northwest Institute of Nuclear Technology
Priority to CN201720992659.9U priority Critical patent/CN207280399U/en
Application granted granted Critical
Publication of CN207280399U publication Critical patent/CN207280399U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

The utility model proposes revolving body coaxality measuring mechanism in a kind of hole, to solve the problems, such as existing method without revolving body concentricity in the narrow and small hole of method quantitative measurement.Including positioning support component, the confocal displacement sensor of dispersion, speculum, rotational positioning frock and controller;Positioning support component includes locating piece, supporting item and mirror support;When positioning support component and the confocal displacement sensor of dispersion are integrally located in datum hole, four fillets of locating piece and the elastic support points of supporting item are in close contact with datum hole inner wall;Speculum is fixed by mirror support, its position and attitude meet light beam that the confocal displacement sensor of dispersion is sent after speculum reflects vertical incidence to revolving body measured surface;Rotational positioning frock includes driving lever, and driving lever can drive the rotation of positioning support component and will not produce radial load to positioning support component;Controller is used to obtain optical path length, and then calculates concentricity of the tested revolving body axis relative to benchmark axially bored line.

Description

Revolving body coaxality measuring mechanism in hole
Technical field
The utility model belongs to technical field of optical precision measurement, and in particular to revolving body coaxality measurement fills in a kind of hole Put.
Background technology
The hollow cathode of launching electronics beam is usually arranged in magnet endoporus by electron accelerator, utilizes magnetically confined electronics Moment track, and the assembling concentricity between hollow cathode and magnet endoporus directly affects the work efficiency of system.One A little applying electronic accelerators are produced in the system of microwaves, usually require that cathode and magnet endoporus misalignment of axe are less than 0.1mm, and magnetic Hole end surface distance is conventional at tens centimetres or so usually in tens millimeters of scopes, cathode end face to magnet in internal hole aperture Measuring instrument or instrument are difficult to implement accurate measurement in such narrow space.Accelerate for some electronics comprising permanent magnet Device system, using the technical solution of amesdial or common displacement sensor concentricity since there are ferrimagnet in instrument Also can not apply.It is right made of nonferromugnetic material with mainly being used in magnet assembling process in electron accelerator cathode at present Whether heart block check concentricity meets the requirements, to external cylindrical surface and the magnet inner hole of heart block, to the endoporus and cathode of heart block External cylindrical surface coordinate, the size of concentricity is judged the drag size of the heart block fitting cathode during use by experiencing.This side Method is although of low cost, simple and easy to do, but there are the following problems:
(1) this method cannot quantify and provide misalignment of axe size and direction, exist certain " blindness " to heart assembling;
(2) need to slide in magnet endoporus due to the use of to heart block, to mating surface inside and outside heart block there are fit clearance, only It can guarantee that to the misalignment of axe after the heart in 0.1mm or so, and fit clearance is with using and wearing and can gradually increase to heart block Greatly, cause more and more lower to heart precision, the bias that will also result in after the heart in addition is affected by gravity to heart block;
(3) this method belongs to contact method, during inspection cathode can be caused to collide with or scratched.
Utility model content
Based on background above, the utility model proposes one kind based on the confocal displacement sensor of dispersion and 4 points of rigidity positioning The coaxality measuring mechanism of revolving body in the narrow and small hole of frock, it is intended to solve hole of the existing method without method quantitative measurement small space The problem of size of interior revolving body misalignment of axe and direction.
The technical solution of the utility model is:
Revolving body coaxality measuring mechanism in hole, including positioning support component;It is characterized in that:Dispersion is further included to be total to Burnt displacement sensor, speculum, rotational positioning frock and controller;
The positioning support component includes being relatively fixed the locating piece and supporting item of setting, between locating piece and supporting item Space is used to the confocal displacement sensor of the dispersion be fixedly mounted;
The bottom surface of locating piece is the rectangle plane that four angles are fillet, and at least one bullet is provided with the bottom surface of supporting item Property supporting point;When locating piece, supporting item and the confocal displacement sensor of dispersion are integrally located in datum hole, the bottom surface of locating piece The elastic support points of four fillets and supporting item bottom surface are in close contact with datum hole inner wall;
The positioning support component further includes the mirror support being connected with locating piece or supporting item, and the speculum leads to Cross mirror support to be fixed in datum hole, the position of speculum and posture should meet the light that the confocal displacement sensor of dispersion is sent Beam can be in vertical incidence to datum hole on the measured surface of revolving body after speculum reflects;
The rotational positioning frock connects including an at least driving lever, one end of driving lever with the locating piece and/or supporting item Touch, driving lever can drive the locating piece and/or supporting item to be rotated in datum hole and will not be to the locating piece and/or supporting item Radial load is produced, the other end of driving lever stretches out datum hole;
Controller is located at outside datum hole, is connected with the confocal displacement sensor of dispersion by Transmission Fibers, for obtaining light path Length;Concentricity of the tested revolving body axis relative to benchmark axially bored line can be calculated by the optical path length;
The light path refers to light and reflexes to tested revolving body surface through speculum from the confocal displacement sensor probe outgoing of dispersion Distance.
Further, above-mentioned rotational positioning frock further includes the locating turntable positioned at the confocal displacement sensor side of dispersion; Locating turntable is cock-type structure, and middle part offers the through hole for passing through Transmission Fibers in the axial direction, and bottom is radially It is overhanging to realize axially position with the cooperation of benchmark bore ends;One end of the driving lever through locating turntable and the locating piece and/or Supporting item contacts, and the middle part of driving lever is locked by holding screw and locating turntable, and the other end of driving lever stretches out locating turntable.
Further, above-mentioned locating piece and supporting item are integrated part.
Further, axial bar hole and radial direction bar hole are offered on above-mentioned locating piece, wherein, axial bar hole is set It is used for the face for fixing the confocal displacement sensor of dispersion in locating piece, the confocal displacement sensor of dispersion is consolidated by the axial bar hole Between the probe of speculum and the confocal displacement sensor of dispersion on locating piece, can be realized by the axial bar hole axially away from From adjusting;Radial direction bar hole is arranged on the face that locating piece is used for fixation reflex mirror support, and mirror support passes through the radial direction Bar hole is fixed on locating piece, and the height that can realize speculum to tested revolving body surface by radial direction bar hole is adjusted.
Further, above-mentioned elastic support points are spring-loaded plunger.
The utility model provides revolving body method for measuring coaxiality in a kind of hole at the same time, comprises the following steps:
1) revolving body coaxality measuring mechanism in above-mentioned hole is put into datum hole;
2) rotational positioning frock is adjusted, the confocal displacement sensor of dispersion is positioned at set depth and set angle in datum hole Under degree, it is initial position to define the confocal displacement sensor of dispersion at this time, opens the confocal displacement sensor of dispersion;
3) probe of the confocal displacement sensor of dispersion sends beam of white light and is incident on speculum, after speculum reflects In vertical incidence to datum hole on the measured surface of revolving body;
4) the confocal displacement sensor of dispersion receives the optical signal that the measured surface of revolving body in datum hole is returned, and should Optical signal is sent into controller;
5) controller is denoted as S by the displacement of spectrum analysis display output current state0
6) rotational positioning frock is adjusted, the confocal displacement sensor of dispersion is rotated three times in the same direction, every time rotation 90°;Every time all in accordance with step 3) -5 after rotation) identical method measures the displacement of a current state, S is denoted as respectively90, S180 And S270
7) pass through step 5) -6) in measurement displacement, obtain concentricity of the revolving body axis relative to benchmark axially bored line.
Further, the specific method of calculating concentricity is in step 7):
7.1) using the center of circle of section circle where measured point on datum hole as origin O, the initial position is directed toward with origin O Direction is X-axis, and the direction of position after rotating for the first time is directed toward using origin O as Y-axis, establishes rectangular coordinate system XOY, then revolving body is justified The coordinate components of heart relative datum axially bored line deviation are:
7.2) revolving body axis is relative to the concentricity of benchmark axially bored line:
The utility model has the advantages that:
1. it can quantify using the method to heart sliding block qualitative reaction concentricity, the utility model compared to tradition and provide axis The size of deviation and direction, foundation is provided for assembling to the heart;
2. the utility model can realize micron-sized high-acruracy survey using the confocal displacement sensor of dispersion, can significantly carry High efficiency of assembling, greatly improves to heart precision;
3. 4 vertex of the rectangular bottom surface that the utility model passes through locating piece carry out rigid positioning, processing and manufacturing cost is low, It is of less demanding to the assembly precision of device in itself;
4. the utility model can be applied under strong magnetic field circumstance;
5. the utility model belongs to eyes with non-contact method, cathode will not be caused to collide with during inspection or scratched.
Brief description of the drawings
Fig. 1 is the structure diagram of revolving body coaxality measuring mechanism in hole;Figure label:1- hollow cathodes, 2- magnets Inner cylinder, 3- magnets, 4- positioning support components, 41- locating pieces, 42- supporting items, 43- spring-loaded plungers, 44- mirror supports, 45- Speculum, the confocal displacement sensor of 5- dispersions, 51- probes, 52- optical fiber, 53- controllers, 6- rotational positioning frocks, 61- positioning Turntable, 62- driving levers, 63- holding screws;
Fig. 2 is rigid anchor point provided by the utility model and the structure diagram of elastic support points;Figure label: 43- spring-loaded plungers, 46- rigidity anchor points;
Fig. 3 is that the structure of the separable contact between driving lever end provided by the utility model and positioning support component is shown It is intended to;Figure label:64- junctions.
Fig. 4 is the structure diagram of the positioning support component of the utility model;Figure label:411- axial bars hole, 412- radial direction bar holes.
Fig. 5 is the schematic diagram that the utility model calculates the coordinate system established during concentricity.
Embodiment
The utility model is further described below by the drawings and specific embodiments.
Referring to Fig. 1-3, revolving body coaxality measuring mechanism in hole provided by the utility model, including positioning support component 4th, the confocal displacement sensor 5 of dispersion, speculum 45, rotational positioning frock 6 and controller 53.
Positioning support component 4 includes being relatively fixed the locating piece 41 and supporting item 42 (locating piece 41 and supporting item 42 of setting Part can be integrated), the space between locating piece 41 and supporting item 42 is used to the confocal displacement sensor 5 of dispersion be fixedly mounted;It is fixed The bottom surface of position part 41 is the rectangle plane that four angles are fillet, and four fillets of rectangle plane are as rigid anchor point 46;Branch Two spring-loaded plungers 43 are provided with the bottom surface of support member 42 and are used as elastic support points;Locating piece 41, supporting item 42 and dispersion are total to When burnt displacement sensor 5 is integrally located in datum hole after assembling, four rigid anchor points 46 of the bottom surface of locating piece 41 and support The spring-loaded plunger of 42 bottom surface of part is in close contact with datum hole inner wall.
Positioning support component 4 further includes the mirror support 44 connected with locating piece 41 or supporting item 42, speculum 45 It is fixed on by mirror support 44 in datum hole, the position of speculum 45 and posture should meet the confocal displacement sensor 5 of dispersion The light beam sent after the reflection of speculum 45 can vertical incidence in the datum hole on the measured surface of revolving body.
Rotational positioning frock 6 includes an at least driving lever 62, and one end and the locating piece 41 and/or supporting item 42 of driving lever 62 connect Touch, driving lever can drive the locating piece and/or supporting item to be rotated in datum hole and will not be to the locating piece and/or supporting item Radial load is produced, the other end of driving lever 62 stretches out datum hole;Two driving levers, and two driving lever difference are employed in the present embodiment Contacted with locating piece 41 and supporting item 42, as shown in Figure 3 junction 64;When rotating lever 62, locating piece 41 and supporting item 42 can rotate, so as to drive the confocal displacement sensor 5 of dispersion and speculum 45 to rotate, reach the confocal displacement of adjustment dispersion and pass The purpose of the orientation angle in datum hole of sensor 5.When along datum hole axis direction moving 62,41 He of locating piece can be driven Supporting item 42 is moved along datum hole axis direction, so as to reach the adjustment confocal displacement sensor 5 of dispersion in the default locating depth of datum hole The purpose of degree.
Controller 53 is located at outside datum hole, and displacement sensor 5 confocal with dispersion is connected by Transmission Fibers, for obtaining light Cheng Changdu, the height of measured surface can be calculated by the optical path length.
In order to easy to operation when adjusting confocal 5 position of displacement sensor of dispersion and angle, the rotation of the utility model is determined Position frock 6 further includes the locating turntable 61 positioned at confocal 5 side of displacement sensor of dispersion;Locating turntable 61 is cock-type structure, Its neck coordinates with datum hole inner wall realizes positioning, its middle part offers logical for passing through Transmission Fibers in the axial direction Hole, its bottom is radially overhanging to coordinate realization positioning with benchmark bore ends;One end of driving lever 62 is through locating turntable 61 with positioning Part 41 and/or supporting item 42 contact, and the middle part of driving lever 62 is locked by holding screw and locating turntable 61, the other end of driving lever 62 Stretch out locating turntable 61.
In order to adjust the axial distance between speculum and the probe 51 of the confocal displacement sensor 5 of dispersion, and adjust anti- Height of the mirror with respect to measured surface is penetrated, the utility model offers axial bar hole 411 and radial direction bar hole on locating piece 41 412, as shown in Figure 4.Axial bar hole 411 is arranged on that face that locating piece 41 is used to fix the confocal displacement sensor 5 of dispersion On, the confocal displacement sensor 5 of dispersion is fixed on locating piece 41 by the axial bar hole 411, passes through the axial bar hole 411 The adjusting of axial distance between speculum 45 and the probe 51 of the confocal displacement sensor 5 of dispersion can be achieved;Radial direction bar hole 412 is set The face for being used for fixation reflex mirror support 44 in locating piece 41 is put, mirror support 44 is fixed on by the radial direction bar hole 412 On locating piece 41, it can realize that speculum 45 arrives the height adjusting of tested revolving body surface by radial direction bar hole 412.
The operation principle of the utility model:
Probe 51 can send beam of white light, by the optical system inside probe 51 by white light along beam direction dispersion, this The light that sample only has specific wavelength pools hot spot on testee surface;Probe 51 receives reflected light and is conducted through Transmission Fibers to control Device 53 processed, controller 53 calculates optical path length by analyzing the frequency content of reflected light, and then calculates the height on testee surface Degree, finally obtains concentricity of the testee axis relative to datum hole.In the utility model, the confocal displacement sensor of dispersion 5 white light beams projected are vertically got in hole on the measured surface of revolving body after the reflection of speculum 45, and light original road is reflected back Inside the confocal displacement sensor 5 of dispersion, the frequency of the optical signal received by analyzing the confocal displacement sensor 5 of dispersion is worked as The displacement of preceding state;By adjusting rotational positioning frock 6, positioning support component 4 and the confocal displacement sensor 5 of dispersion can be driven Assembly is positioned in datum hole to other angles, so be can be obtained by by measuring the shift values under multiple uniformly distributed angles and is treated Survey time turns axis relative to benchmark axially bored line concentricity.
Using the method for revolving body concentricity is in revolving body coaxality measuring mechanism measured hole in above-mentioned hole:
1) revolving body coaxality measuring mechanism in above-mentioned hole is put into datum hole;
2) rotational positioning frock 6 is adjusted, the confocal displacement sensor 5 of dispersion is positioned at set depth and setting in datum hole Under angle, it is initial position (0 ° of position i.e. shown in Fig. 5) to define the confocal displacement sensor of dispersion at this time, opens the confocal displacement of dispersion Sensor 5;
3) probe 51 of the confocal displacement sensor 5 of dispersion sends beam of white light and is incident on speculum 45, through speculum After 45 reflections in vertical incidence to datum hole on the measured surface of revolving body;
4) the confocal displacement sensor 5 of dispersion receives the optical signal that the measured surface of revolving body in datum hole is returned, and will The optical signal is sent into controller 53;
5) controller 53 is denoted as S by the displacement of spectrum analysis display output current state0
6) rotational positioning frock 6 is adjusted, the confocal displacement sensor 5 of dispersion is rotated three times in the same direction, every time rotation 90°;Every time all in accordance with step 3) -5 after rotation) identical method measures the displacement of a current state, S is denoted as respectively90, S180 And S270;7) pass through step 5) -6) in measurement displacement, obtain revolving body axis relative to the deviation size of benchmark axially bored line and Direction, i.e. concentricity.
Above-mentioned steps 7) in circular be:
Using the center of circle of section circle where measured point on benchmark axially bored line as origin O, the initial position is directed toward with origin O Direction is X-axis, and the direction of position (90 ° of positions i.e. shown in Fig. 5) after rotating for the first time is directed toward using origin O as Y-axis, establishes right angle seat Mark system XOY, then the coordinate components of revolving body center of circle relative datum axially bored line deviation be:
7.2) revolving body axis is relative to the concentricity of benchmark axially bored line:
Embodiment:
1 internal diameter 19mm of hollow cathode, 2 internal diameter 52mm of magnet inner cylinder;Magnet 3 is permanent magnet, 1 end face of hollow cathode to magnet 2 orifice end identity distance of inner cylinder is from about 300mm.Positioning support component 4 uses aluminum alloy material, and wherein locating piece 41 is added by one The mode of work obtains radiused apex at 4 in square surface, i.e., 4 rigid anchor points 46.The confocal displacement sensor 5 of dispersion of use Measuring center away from being ± 1mm for 20mm, measurement range.According to foregoing measuring method by measuring the position under 4 uniformly distributed angles Shifting value can be obtained by the axis of hollow cathode 1 under 2 orthogonal directions relative to the coordinate point of the misalignment of axe of magnet inner cylinder 2 Amount, concentricity can be obtained through conversion.
The utility model is applicable not only to the measurement of electron accelerator hollow cathode and magnet inner cylinder concentricity, applies also for Revolving body coaxality measurement in other holes.

Claims (5)

1. revolving body coaxality measuring mechanism in hole, including positioning support component;It is characterized in that:Further include the confocal displacement of dispersion Sensor, speculum, rotational positioning frock and controller;
The positioning support component includes being relatively fixed the locating piece and supporting item of setting, the space between locating piece and supporting item For the confocal displacement sensor of the dispersion to be fixedly mounted;
The bottom surface of locating piece is the rectangle plane that four angles are fillet, and at least one elasticity branch is provided with the bottom surface of supporting item Support point;When locating piece, supporting item and the confocal displacement sensor of dispersion are integrally located in datum hole, four of the bottom surface of locating piece The elastic support points of fillet and supporting item bottom surface are in close contact with datum hole inner wall;
The positioning support component further includes the mirror support being connected with locating piece or supporting item, and the speculum passes through anti- Penetrate mirror support to be fixed in datum hole, the position of speculum and posture should meet the light beam warp that the confocal displacement sensor of dispersion is sent Can be in vertical incidence to datum hole on the measured surface of revolving body after speculum reflection;
The rotational positioning frock is contacted including an at least driving lever, one end of driving lever with the locating piece and/or supporting item, is dialled Bar can drive the locating piece and/or supporting item to rotate and will not be produced to the locating piece and/or supporting item in datum hole Radial load, the other end of driving lever stretch out datum hole;
Controller is located at outside datum hole, is connected with the confocal displacement sensor of dispersion by Transmission Fibers, for obtaining optical path length; Concentricity of the tested revolving body axis relative to benchmark axially bored line can be calculated by the optical path length;
The light path refers to the road that light reflexes to tested revolving body surface from the confocal displacement sensor probe outgoing of dispersion through speculum Journey.
2. revolving body coaxality measuring mechanism in hole according to claim 1, it is characterised in that:The rotational positioning frock Further include the locating turntable positioned at the confocal displacement sensor side of dispersion;Locating turntable is cock-type structure, and middle part is along axis side To the through hole offered for passing through Transmission Fibers, bottom is radially overhanging to realize axially position with the cooperation of benchmark bore ends; One end of the driving lever is contacted through locating turntable with the locating piece and/or supporting item, passes through holding screw in the middle part of driving lever Locked with locating turntable, the other end of driving lever stretches out locating turntable.
3. revolving body coaxality measuring mechanism in hole according to claim 2, it is characterised in that:The locating piece and support Part is integrated part.
4. revolving body coaxality measuring mechanism in the hole according to claim 1,2 or 3, it is characterised in that:The locating piece On offer axial bar hole and radial direction bar hole, wherein, axial bar hole be arranged on locating piece be used for fix the confocal position of dispersion On the face of displacement sensor, the confocal displacement sensor of dispersion is fixed on locating piece by the axial bar hole, passes through the axial bars Shape hole can realize the adjusting of axial distance between the probe of speculum and the confocal displacement sensor of dispersion;Radial direction bar hole is arranged on Locating piece is used for the face of fixation reflex mirror support, and mirror support is fixed on locating piece by the radial direction bar hole, passed through Radial direction bar hole can realize that the height of speculum to tested revolving body surface is adjusted.
5. revolving body coaxality measuring mechanism in the hole according to claim 1,2 or 3, it is characterised in that:The elasticity branch Support point is spring-loaded plunger.
CN201720992659.9U 2017-08-09 2017-08-09 Revolving body coaxality measuring mechanism in hole Expired - Fee Related CN207280399U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720992659.9U CN207280399U (en) 2017-08-09 2017-08-09 Revolving body coaxality measuring mechanism in hole

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720992659.9U CN207280399U (en) 2017-08-09 2017-08-09 Revolving body coaxality measuring mechanism in hole

Publications (1)

Publication Number Publication Date
CN207280399U true CN207280399U (en) 2018-04-27

Family

ID=61987073

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720992659.9U Expired - Fee Related CN207280399U (en) 2017-08-09 2017-08-09 Revolving body coaxality measuring mechanism in hole

Country Status (1)

Country Link
CN (1) CN207280399U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112045368A (en) * 2020-08-31 2020-12-08 江苏力源液压机械有限公司 Valve body machining process of hydraulic reversing valve
CN115788398A (en) * 2022-10-27 2023-03-14 西北核技术研究所 Centering installation device and method for flexible sensor support
CN107270839B (en) * 2017-08-09 2023-10-20 西北核技术研究所 Device and method for measuring coaxiality of rotator in hole

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107270839B (en) * 2017-08-09 2023-10-20 西北核技术研究所 Device and method for measuring coaxiality of rotator in hole
CN112045368A (en) * 2020-08-31 2020-12-08 江苏力源液压机械有限公司 Valve body machining process of hydraulic reversing valve
CN112045368B (en) * 2020-08-31 2022-01-07 江苏力源液压机械有限公司 Valve body machining process of hydraulic reversing valve
CN115788398A (en) * 2022-10-27 2023-03-14 西北核技术研究所 Centering installation device and method for flexible sensor support

Similar Documents

Publication Publication Date Title
CN107270839A (en) Revolving body coaxality measuring mechanism and method in hole
CN207280399U (en) Revolving body coaxality measuring mechanism in hole
EP1503175A1 (en) Device and method for calibrating the alignment of a device under test
CN104949630B (en) A kind of adjustable point-diffraction interference device of large-numerical aperture fringe contrast
CN110749293A (en) Device and method for measuring coaxiality of large-span shaft hole type components
US20130329217A1 (en) Laser System for Aligning a Bed Transport Mechanism in an Imaging System
JP2002258172A (en) Scanning method and apparatus therefor, inspecting method of light intensity and apparatus therefor, aligning method and apparatus therefor
CN203053678U (en) Detection calibration apparatus for multi-optical axis dynamic consistency
CN104037486A (en) Antenna stand of anechoic chamber testing system of quasi single station
CN114544151A (en) Lens transmittance detection device and detection method thereof
CN215813327U (en) Laser radar timing device
CN110887449A (en) Thread measuring device
CN210664376U (en) Coaxiality measuring device for large-span shaft hole type components
CN110695677A (en) Device and method for correcting ship shafting stern tube
CN106705806B (en) Device for detecting position of hanging point of airplane
CN108196133B (en) System and method for adjusting space alignment of three-axis turntable and spherical scanning device
CN106289096B (en) A kind of convex spherical mirror surface testing system and detection method
CN213210462U (en) Distance measuring optical system
CN210834103U (en) Vibration lens precision detection device
CN118046254A (en) Installation and adjustment method for revolving body shaft/aperture measuring device and auxiliary adjustment device
CN108931185A (en) A kind of detection device and detection method of ray machine mould group
CN110376700B (en) Light path adjusting mechanism based on digital micromirror unit and adjusting method thereof
CN108534699B (en) Laser light curtain target distance accurate measurement device and measurement method
CN208921103U (en) Deformation test system for optical system of photoelectric theodolite
CN117470070A (en) High-precision reflector angle measurement equipment and measurement method

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180427

Termination date: 20200809