CN107263749A - A kind of new clamping tool - Google Patents
A kind of new clamping tool Download PDFInfo
- Publication number
- CN107263749A CN107263749A CN201710441135.5A CN201710441135A CN107263749A CN 107263749 A CN107263749 A CN 107263749A CN 201710441135 A CN201710441135 A CN 201710441135A CN 107263749 A CN107263749 A CN 107263749A
- Authority
- CN
- China
- Prior art keywords
- connecting rod
- connection component
- rubber blanket
- fixed plate
- silicon ingot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 6
- 239000010432 diamond Substances 0.000 claims abstract description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 37
- 229910052710 silicon Inorganic materials 0.000 abstract description 37
- 239000010703 silicon Substances 0.000 abstract description 37
- 238000005520 cutting process Methods 0.000 abstract description 18
- 229910000831 Steel Inorganic materials 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 6
- 239000010959 steel Substances 0.000 abstract description 6
- 238000006073 displacement reaction Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 7
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 7
- 239000002210 silicon-based material Substances 0.000 description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 240000008042 Zea mays Species 0.000 description 2
- 235000016383 Zea mays subsp huehuetenangensis Nutrition 0.000 description 2
- 235000002017 Zea mays subsp mays Nutrition 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 235000009973 maize Nutrition 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000008602 contraction Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0017—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools
- B28D5/0023—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools rectilinearly
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
Abstract
A kind of new clamping tool of the present invention, on the base of diamond wire intercept unit, including cylinder, air cylinder fixed plate, connection component, support block and rubber blanket, two cylinders are symmetricly set on the both sides of silicon ingot to be cut, Synchronization Control is realized by the control of same controlling switch, the silicon ingot in operation process is set not shift, each connection component includes a contiguous block and two connecting rods in addition, connecting rod is parallel two, wafer sections under synchronously clamping silicon ingot main body respectively in cutting process and being to be cut, when silicon ingot bottom is cut to, silicon chip is avoided to be driven displacement or even the phenomenon toppled over, cause cut surface rough and occur broken string phenomenon, the problem of steel wire loses；Rubber blanket is fixed at the top of connecting rod simultaneously, connecting rod is not acted directly on silicon ingot, it is to avoid catcher mark occurs in surface during clamping, Si wafer quality is influenceed；The inventive structure is simple, and reasonable in design, with wide applicability, suitable popularization is come.
Description
Technical field
The present invention relates to a kind of line cutting technology field, and in particular to a kind of new clamping tool.
Background technology
Line cutting technology is more advanced silicon chip process technology in the world at present, and its principle is transported at a high speed by one
Dynamic steel wire drives the cutting blade material being attached on steel wire to rub the hard brittle materials such as semiconductor, so as to reach cutting mesh
's.Line cutting technology has high with efficiency high, production capacity height, precision compared with traditional knife saw piece, grinding wheel and inscribed circle are cut
The advantages of.
Silicon material includes virgin polycrystalline silicon material and monocrystalline silicon returns, and virgin polycrystalline silicon is commonly referred to as positive material, and its purity is higher,
Price is also high, and monocrystalline silicon returns such as silicon single crystal rod expect end to end, edge skin material, pot bottom material, cell piece are after cleaning treatment
Raw material arrived etc..
Silicon ingot is the product that silicon material directional solidification is made.In general, silicon material includes virgin polycrystalline silicon material and monocrystalline silicon is returned
Materials, virgin polycrystalline silicon is commonly referred to as positive material, and its purity is higher, and price is also high;Monocrystalline silicon returns such as silicon single crystal rod is end to end
Raw material that material, edge skin material, pot bottom material, cell piece are obtained after cleaning treatment etc..By silicon material in single crystal growing furnace (in solar level
It is more typical with Czochralski furnace in the production technology of monocrystalline silicon) in melt after can grow into monocrystalline silicon ear of maize by series of processes again,
Monocrystalline silicon ear of maize is subsequently machined, monocrystal silicon is obtained, slicing machines is reused and slice processing is carried out to silicon ingot, then
To silicon chip.It is exactly the process cut using line cutting technology into the process of silicon chip by silicon ingot processing, the equipment used is golden
Firm line intercept unit.
In cutting process, the silicon chip of lower sheet is cut from overall silicon ingot, because the part of silicon chip is smaller, in gold
When firm wire cutting is to bottom, easily there is silicon chip and be driven the phenomenon that displacement is even toppled over, one be easily cut surface not only
It is sliding, there is defective products, cause significant loss, two be easy generation broken string phenomenon, causes steel wire to lose.
The content of the invention
It is an object of the invention to provide a kind of new clamping tool, when wire cutting is carried out, while to silicon ingot sheet
Body and silicon chip to be cut, which are synchronized, to be fixedly clamped, it is to avoid the wafer sections cut are driven displacement, causes broken string or product
Bad the problem of.
What the present invention was achieved through the following technical solutions：
A kind of new clamping tool, on the base of diamond wire intercept unit, it is characterised in that including cylinder, cylinder
Fixed plate, connection component, support block and rubber blanket, the air cylinder fixed plate are two pieces, and the air cylinder fixed plate is symmetrically fixed on
The both sides of the base, the air cylinder fixed plate is structure of the section in L, and the cylinder includes cylinder body and piston rod, institute
State cylinder body to be fixedly mounted in the air cylinder fixed plate, the cylinder is in be oppositely arranged in the air cylinder fixed plate, institute
The one end for stating piston rod is connected with the cylinder body, and the other end of the piston rod is fixedly connected with the connection component, institute
Stating connection component includes contiguous block and connecting rod, and the connection component realizes fixed connect by the contiguous block and the piston rod
Connect, the connecting rod is four, the connecting rod two be one group respectively horizontal positioned and it is parallel, be symmetrically fixed on it is described each
The two ends of contiguous block, the connecting rod is additionally provided with thread segment in one end of the remote contiguous block, and the rubber blanket is located at the company
One end of extension bar, the rubber blanket is the rectangular parallelepiped structure that end face is square, and the one side of the rubber blanket is provided with screwed hole, institute
Screwed hole is stated for blind hole, the screwed hole is corresponding relation with the thread segment, the rubber blanket passes through the screwed hole and institute
Screwed hole cooperation is stated to be fixed in the connecting rod；The support block is positioned over the lower end of the connection component, the support block
It is fixedly mounted on the base；
A kind of above-mentioned new clamping tool, wherein, described two cylinders are connected to same controlling switch Synchronization Control；
A kind of above-mentioned new clamping tool, wherein, the center of the connecting rod and the piston rod is at grade.
The invention has the advantages that：
A kind of new clamping tool of the present invention, on the base of diamond wire intercept unit, including cylinder, cylinder are fixed
Plate, connection component, support block and rubber blanket, two of which cylinder are symmetricly set on the both sides of silicon ingot to be cut, and with same control
The Synchronization Control of two cylinders is realized in system switch control, the silicon ingot in operation process is not shifted, in addition each connection
Component includes a contiguous block and two connecting rods, and contiguous block plays a part of cylinder and connecting rod connection, and connecting rod is flat
Capable two, then the wafer sections under can synchronously clamping silicon ingot main body respectively in cutting process and be to be cut, synchronous clamping,
Make in cutting process, when especially cutting to silicon ingot bottom, it is to avoid silicon chip is driven displacement or even the phenomenon toppled over, and makes
It is rough into cut surface, there is defective products, significant loss and generation broken string phenomenon, the problem of steel wire loses；Simultaneously in connecting rod
Top also fix rubber blanket, making the connecting rod of rigid material will not act directly on silicon ingot, it is to avoid during clamping surface occur
Vestige is clamped, Si wafer quality is influenceed.The inventive structure is simple, and reasonable in design, with wide applicability, suitable popularization is come.
Brief description of the drawings
Fig. 1 front views of the present invention.
Fig. 2 top views of the present invention.
Fig. 3 connection component front views of the present invention.
Fig. 4 connection component A-A of the present invention are to schematic diagram.
Fig. 5 rubber blanket B-B direction schematic diagrames of the present invention.
Embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings：
It is as shown in Figure 1 a kind of new clamping tool of the present invention, on the base 1 of diamond wire intercept unit, including
Cylinder 6, air cylinder fixed plate 4, connection component 7, support block 3 and rubber blanket 8, the air cylinder fixed plate 4 are two pieces, and the cylinder is consolidated
Fixed board 4 is symmetrically fixed on the both sides of the base 1, and the air cylinder fixed plate 4 is structure of the section in L, and the cylinder 6 includes gas
Cylinder body 61 and piston rod 62, the cylinder body 61 are fixedly mounted in the air cylinder fixed plate 4, and the cylinder 6 is described
In being oppositely arranged in air cylinder fixed plate 4, described two cylinders 6 are connected with same controlling switch realizes cylinder 6 described in Synchronization Control
Contraction and release, one end of the piston rod 62 is connected with the cylinder body 61, the other end of the piston rod 62 and institute
State connection component 7 to be fixedly connected, the connection component 7 includes contiguous block 71 and connecting rod 72, and the connection component 7 is by described
Contiguous block 71 achieves a fixed connection with the piston rod 72, and the connecting rod 72 is four, and the connecting rod 72 two is one group
Horizontal positioned and two ends that are parallel, being symmetrically fixed on each contiguous block 71 respectively, the connecting rod 72 is in the remote connection
One end of block 71 is additionally provided with thread segment 73, and the rubber blanket 8 is located at one end of the connecting rod 72, and the rubber blanket 8 is end face
For the rectangular parallelepiped structure of square, the one side of the rubber blanket 8 is provided with screwed hole 81, and the screwed hole 81 is blind hole, the spiral shell
Pit 81 is corresponding relation with the thread segment 73, and the rubber blanket 8 is coordinated by the screwed hole 81 and the screwed hole 73
It is fixed in the connecting rod 72；The support block 3 is positioned over the lower end of the connection component 7, and the support block 7 is fixedly mounted
On the base 1, the height of the support block 7 and the air cylinder fixed plate 4 is corresponding relation, it is ensured that the connecting rod 72 with
The center of the piston rod 62 is at grade.
Silicon ingot 5 is placed on track 2, and track 2 is fixed on the base 1 of diamond wire intercept unit, and silicon ingot 5 passes through track 2
The cutting charging before and after track 2 is realized, when being ready for wire cutting operation, silicon ingot 5 is first moved and arrives suitable position, then
Start cylinder 6, the synchronous release of cylinder 6 on the both sides of silicon ingot 5 drives connection component 7 to be moved to silicon ingot 5, and final realize clamps, due to
The contact surface of clamping is rubber blanket 8, so the both side surface of silicon ingot 5 is not in catcher mark, after stepping up, carries out wire cutting, due to
Two relative connecting rods 72 clamp respectively silicon ingot 5 main body and it is to be cut under silicon chip, be not susceptible in cutting process slide
It is dynamic, when especially cutting to 5 bottom of silicon ingot, it is to avoid silicon chip is driven displacement or even the phenomenon toppled over, and causes cut surface not
It is smooth, there is defective products, significant loss and generation broken string phenomenon, the problem of steel wire loses；The inventive structure is simple, and design is closed
Reason, with wide applicability, suitable popularization is come.
The foregoing is only a preferred embodiment of the present invention, but protection scope of the present invention be not limited thereto,
Any one skilled in the art the invention discloses technical scope in, the change or replacement that can be readily occurred in,
It should all cover within the scope of the present invention.Therefore, protection scope of the present invention should be with the protection domain of claims
It is defined.
Claims (3)
1. a kind of new clamping tool, on the base of diamond wire intercept unit, it is characterised in that including cylinder, gas
Cylinder fixed plate, connection component, support block and rubber blanket, the air cylinder fixed plate are two pieces, and the air cylinder fixed plate is symmetrically fixed
In the both sides of the base, the air cylinder fixed plate is structure of the section in L, and the cylinder includes cylinder body and piston rod,
The cylinder body is fixedly mounted in the air cylinder fixed plate, and the cylinder is in be oppositely arranged in the air cylinder fixed plate,
One end of the piston rod is connected with the cylinder body, and the other end of the piston rod is fixedly connected with the connection component,
The connection component includes contiguous block and connecting rod, and the connection component is realized by the contiguous block and the piston rod and fixed
Connection, the connecting rod is four, the connecting rod two be one group respectively horizontal positioned and it is parallel, be symmetrically fixed on it is described every
The two ends of individual contiguous block, the connecting rod is additionally provided with thread segment in one end of the remote contiguous block, and the rubber blanket is located at described
One end of connecting rod, the rubber blanket is the rectangular parallelepiped structure that end face is square, and the one side of the rubber blanket is provided with screwed hole,
The screwed hole is blind hole, and the screwed hole and the thread segment are corresponding relation, the rubber blanket by the screwed hole and
The screwed hole, which coordinates, to be fixed in the connecting rod；The support block is positioned over the lower end of the connection component, the support
Block is fixedly mounted on the base.
2. a kind of new clamping tool according to claim 1, it is characterised in that described two cylinders are connected to same
Individual controlling switch Synchronization Control.
3. a kind of new clamping tool according to claim 1, it is characterised in that the connecting rod and the piston rod
Center at grade.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710441135.5A CN107263749A (en) | 2017-06-13 | 2017-06-13 | A kind of new clamping tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710441135.5A CN107263749A (en) | 2017-06-13 | 2017-06-13 | A kind of new clamping tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107263749A true CN107263749A (en) | 2017-10-20 |
Family
ID=60067542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710441135.5A Pending CN107263749A (en) | 2017-06-13 | 2017-06-13 | A kind of new clamping tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107263749A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108689157A (en) * | 2018-06-05 | 2018-10-23 | 黄梅县云泰时代光学仪器有限公司 | A kind of core takes machine |
| CN114932436A (en) * | 2022-07-21 | 2022-08-23 | 常州四杰机械科技有限公司 | Horizontal machining clamp for single crystal furnace body |
| CN115537934A (en) * | 2022-09-21 | 2022-12-30 | 常州时创能源股份有限公司 | Novel semi-automatic bar splicing equipment for silicon ingots and production process of novel semi-automatic bar splicing equipment |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004230594A (en) * | 2003-01-28 | 2004-08-19 | Sumitomo Mitsubishi Silicon Corp | Ingot cutter and ingot cutting method |
| JP2012144014A (en) * | 2011-01-14 | 2012-08-02 | Sumco Corp | Workpiece cutting device |
| CN204249125U (en) * | 2014-11-27 | 2015-04-08 | 乐山新天源太阳能科技有限公司 | Silicon rod cutting device |
| CN205734009U (en) * | 2016-06-15 | 2016-11-30 | 台州市洁星卫浴有限公司 | Fixing tool and use the drilling-tapping machine of this kind of fixing tool |
| CN205766948U (en) * | 2016-06-29 | 2016-12-07 | 上海日进机床有限公司 | Workpiece is from clamping device and workpiece intercept unit |
| CN206999351U (en) * | 2017-06-13 | 2018-02-13 | 江苏美科硅能源有限公司 | A kind of new clamping tool |
-
2017
- 2017-06-13 CN CN201710441135.5A patent/CN107263749A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004230594A (en) * | 2003-01-28 | 2004-08-19 | Sumitomo Mitsubishi Silicon Corp | Ingot cutter and ingot cutting method |
| JP2012144014A (en) * | 2011-01-14 | 2012-08-02 | Sumco Corp | Workpiece cutting device |
| CN204249125U (en) * | 2014-11-27 | 2015-04-08 | 乐山新天源太阳能科技有限公司 | Silicon rod cutting device |
| CN205734009U (en) * | 2016-06-15 | 2016-11-30 | 台州市洁星卫浴有限公司 | Fixing tool and use the drilling-tapping machine of this kind of fixing tool |
| CN205766948U (en) * | 2016-06-29 | 2016-12-07 | 上海日进机床有限公司 | Workpiece is from clamping device and workpiece intercept unit |
| CN206999351U (en) * | 2017-06-13 | 2018-02-13 | 江苏美科硅能源有限公司 | A kind of new clamping tool |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108689157A (en) * | 2018-06-05 | 2018-10-23 | 黄梅县云泰时代光学仪器有限公司 | A kind of core takes machine |
| CN114932436A (en) * | 2022-07-21 | 2022-08-23 | 常州四杰机械科技有限公司 | Horizontal machining clamp for single crystal furnace body |
| CN114932436B (en) * | 2022-07-21 | 2022-09-20 | 常州四杰机械科技有限公司 | Horizontal machining clamp for single crystal furnace body |
| CN115537934A (en) * | 2022-09-21 | 2022-12-30 | 常州时创能源股份有限公司 | Novel semi-automatic bar splicing equipment for silicon ingots and production process of novel semi-automatic bar splicing equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20201228 Address after: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Applicant after: Jiangsu Meike Solar Energy Technology Co.,Ltd. Address before: 968 GANGLONG Road, Yanjiang Industrial Park, Zhenjiang City, Jiangsu Province Applicant before: JIANGSU MEIKE SILICON ENERGY Co.,Ltd. |
|
| TA01 | Transfer of patent application right | ||
| CB02 | Change of applicant information |
Address after: 212200 No. 198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Applicant after: Jiangsu Meike Solar Energy Technology Co.,Ltd. Address before: 212200 No. 198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Applicant before: Jiangsu Meike Solar Energy Technology Co.,Ltd. |
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| CB02 | Change of applicant information | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20171020 |
|
| RJ01 | Rejection of invention patent application after publication |