CN107237752A - Dry vacuum pump apparatus and vacuum pumping system - Google Patents
Dry vacuum pump apparatus and vacuum pumping system Download PDFInfo
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- CN107237752A CN107237752A CN201710586825.XA CN201710586825A CN107237752A CN 107237752 A CN107237752 A CN 107237752A CN 201710586825 A CN201710586825 A CN 201710586825A CN 107237752 A CN107237752 A CN 107237752A
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- inverter
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- pump
- current limit
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- 238000005086 pumping Methods 0.000 title claims abstract description 15
- 230000005611 electricity Effects 0.000 claims description 16
- 238000007599 discharging Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 33
- 238000009434 installation Methods 0.000 description 21
- 239000000047 product Substances 0.000 description 10
- 238000004891 communication Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000008054 signal transmission Effects 0.000 description 4
- 210000000515 tooth Anatomy 0.000 description 4
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2210/00—Fluid
- F04C2210/22—Fluid gaseous, i.e. compressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S415/00—Rotary kinetic fluid motors or pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
The present invention provides dry vacuum pump apparatus and vacuum pumping system, and motor and inverter can not be made to break down ground steady running when loading increase.A kind of dry vacuum pump apparatus (1) of the control device (5) with least one pump unit and control pump unit, pump unit has dry vacuum pump (2), drive the motor (3) of dry vacuum pump (2), with the inverter (4) of the rotating speed of control motor (3), control device (5) has the function that the output current limits value of inverter (4) is switched to the 2nd current limit value from the 1st current limit value, 1st current limit value is the maximum i.e. continuous rating current value for the electric current that inverter (4) can continuously flow to motor (3), 2nd current limit value is the value more than continuous rating current value.
Description
The application is the applying date for September in 2013 30 days, Application No. 201310460434.5, entitled " dry type
Vacuum pump apparatus and in control device used in the dry vacuum pump " application for a patent for invention divisional application.
Technical field
The present invention relates to dry vacuum pump apparatus and in control device used in the dry vacuum pump.
Background technology
Typically, there is dry vacuum pump apparatus dry vacuum pump, the motor for driving dry vacuum pump, control motor to turn
The inverter of fast (speed) and the control device of control inverter action.Dry vacuum pump is sometimes for by semiconductor system
Make the discharge of the gas in the vacuum chamber of device and use, but product is generated because of chemical reaction according to gaseous species difference sometimes
(reaction product).When the such gas of discharge, product is generated in pump sometimes, product enters pump rotor.In addition, attached
The product in the inwall of vacuum chamber peels off and enters pump rotor sometimes.As a result, the rotating speed reduction of pump.
It is mutual in the presence of the so-called loading that load-lock chambers (load lock chamber) are provided between vacuum chamber and pump
The vacuum pumping system of lock mode.Load-lock chambers are for being carried out when the vacuum chamber to keeping vacuum passes in and out chip from air
Press to the decompression of vacuum and from vacuum to the small space of the boosting of atmospheric pressure.Vacuum chamber is in vacuum state all the time in principle.Energy
Carry out chip conveying between enough vacuum spaces and atmospheric pressure space in the vacuum chamber is load-lock chambers.Chip is in vacuum
Interior is processed, and the output for shortening time relationship to entirety that chip is passed in and out to vacuum chamber is improved.Accordingly, it would be desirable to will load mutual
The indoor gas of lock is quickly discharged, and vacuum is formed in the load-lock chambers.However, from air pressure in by load-lock chambers
Gas comes true space-time, applies overload to motor sometimes and reduces motor rotary speed, the exhaust velocity reduction of pump.
In order to maintain the rotating speed of pump when being so applied with overload to motor, it is necessary to use the motor of Large Copacity.Therefore,
In semiconductor- fabricating device etc., the motor of the Large Copacity compared with the motor that needs when generally operating is selected and used.
The content of the invention
The present invention is the invention completed to solve above-mentioned conventional the problem of point, even if its object is to provide one kind
The motor compared with low capacity can be also used to carry out the dry vacuum pump apparatus of steady running when loading increase.In addition, this hair
Bright purpose is to provide one kind in control device used in such dry vacuum pump apparatus.
To achieve the above object, a mode of the invention is that have at least one pump unit and the control pump list
The dry vacuum pump apparatus of the control device of member, it is characterised in that the pump unit has：Dry vacuum pump；Driving is described dry
The motor of formula vavuum pump；With the inverter for controlling the motor rotary speed, the control device has the output of the inverter
Current limit value switches to the function of the 2nd current limit value from the 1st current limit value, and the 1st current limit value is described inverse
The maximum i.e. continuous rating current value of electric current of the motor can continuously be flowed to by becoming device, and the 2nd current limit value is super
Cross the value of the continuous rating current value.
The preferred embodiment of the present invention is characterised by, according to from the outside being arranged at outside the dry vacuum pump apparatus
The instruction of command device, the 2nd electricity is switched to by the output current limits value of the inverter from the 1st current limit value
Flow limits value.
The preferred embodiment of the present invention is characterised by that the control device is in inverter output and the 1st electric current
, will be described inverse in the case where the rotating speed of the dry vacuum pump is less than predetermined rotating speed of target during the suitable electric current of limits value
The output current limits value for becoming device switches to the 2nd current limit value from the 1st current limit value.
The preferred embodiment of the present invention is characterised by that the control device reverts to described in the rotating speed for detecting the pump
During rotating speed of target, the 1st electric current is switched to limit from the 2nd current limit value output current limits value of the inverter
Value processed.
The preferred embodiment of the present invention is characterised by that the control device is in the electricity suitable with the 2nd current limit value
It is in the case that the output time of stream has exceeded predetermined threshold value, the output current limits value of the inverter is electric from the described 2nd
Stream limits value switches to the 1st current limit value.
The preferred embodiment of the present invention is characterised by that at least one temperature also with the temperature for determining the pump unit is passed
Sensor, the control device by the temperature of the temperature sensor measurement when exceeding predetermined threshold value, by the inversion
The output current limits value of device switches to the 1st current limit value from the 2nd current limit value.
The preferred embodiment of the present invention is characterised by that at least one described temperature sensor, which is selected from, determines the dry vacuum
The temperature sensor of the temperature of the pump case of pump, the temperature sensor of the temperature of the bearing of the measure dry vacuum pump, measure
The temperature sensor of the temperature of the motor, the temperature sensor of the temperature of the pump rotor of the measure dry vacuum pump, measure
The temperature of the exhaust of the temperature sensor and the measure dry vacuum pump of the temperature of the suction gas of the dry vacuum pump
Temperature sensor.
The preferred embodiment of the present invention is characterised by that at least one described pump unit is the main pump for the gas for discharging atmospheric pressure
The supercharging pump unit of unit and the gas of discharge vacuum pressure, so as to be supplied to the electric power of the dry vacuum pump apparatus no more than pre-
The mode of the value first set operates the main pump and the booster pump.
The another way of the present invention is with dry vacuum pump, the motor of the driving dry vacuum pump and control institute
Control device used in the dry vacuum pump apparatus for the inverter for stating motor rotary speed, it is characterised in that the control device
It is described with the function that the output current limits value of the inverter is switched to the 2nd current limit value from the 1st current limit value
1st current limit value is the maximum i.e. continuous rating current value for the electric current that the inverter can continuously flow to the motor,
2nd current limit value is the value more than the continuous rating current value.
The preferred embodiment of the present invention is characterised by, the control device is filled according to from being arranged at the dry vacuum pump
The instruction of the external command device of outside is put, the output current limits value of the inverter is cut from the 1st current limit value
It is changed to the 2nd current limit value.
The preferred embodiment of the present invention is characterised by that the control device is in inverter output and the 1st electric current
, will be described inverse in the case where the rotating speed of the dry vacuum pump is less than predetermined rotating speed of target during the suitable electric current of limits value
The output current limits value for becoming device switches to the 2nd current limit value from the 1st current limit value.
The preferred embodiment of the present invention is characterised by that the control device reverts to described in the rotating speed for detecting the pump
During rotating speed of target, the 1st electric current is switched to limit from the 2nd current limit value output current limits value of the inverter
Value processed.
The preferred embodiment of the present invention is characterised by that the control device is in the electricity suitable with the 2nd current limit value
It is in the case that the output time of stream has exceeded predetermined threshold value, the output current limits value of the inverter is electric from the described 2nd
Stream limits value switches to the 1st current limit value.
According to the present invention, when loading big, the output current limits value of inverter is temporarily switched into the 2nd current limit
Value, thus, it is possible to stably operate dry vacuum pump in the state of rotating speed is maintained.
Brief description of the drawings
Fig. 1 is the figure of the vacuum pumping system for the dry vacuum pump apparatus for representing the 1st embodiment with the present invention.
Fig. 2 is the sectional view of dry vacuum pump and motor.
Fig. 3 is Fig. 2 III-III line sectional views.
Fig. 4 is Fig. 2 IV-IV line sectional views.
Fig. 5 is the figure for the control sequence for representing dry vacuum pump apparatus.
Fig. 6 is the figure at the configuration position for representing the temperature sensor in pump unit.
Fig. 7 is the figure for the switching for representing the 1st current limit value and the 2nd current limit value.
Fig. 8 is the figure of one of the operating control for representing dry vacuum pump.
Fig. 9 is the figure for illustrating the judgement of the switching of output current limits value.
Figure 10 (a) is represented in the case where the output current limits value of inverter is set as into the 1st current limit value
Inverter output power and motor rotary speed relation curve map, Figure 10 (b) be represent the output current of inverter with
The curve map of the relation of motor rotary speed, Figure 10 (c) is the curve of the relation of the output voltage and motor rotary speed that represent inverter
Figure.
Figure 11 (a) is represented in the case where the output current limits value of inverter is set as into the 2nd current limit value
Inverter output power and motor rotary speed relation curve map, Figure 11 (b) be represent the output current of inverter with
The curve map of the relation of motor rotary speed, Figure 11 (c) is the curve of the relation of the output voltage and motor rotary speed that represent inverter
Figure.
Figure 12 is the figure of another for representing the vacuum pumping system with dry vacuum pump apparatus.
Figure 13 is the schematic diagram of the pump installation of the 2nd embodiment of the present invention.
Figure 14 is denoted as external command device substitution guidance panel and is connected host controller with control device
The schematic diagram of state.
Figure 15 is the figure for the system for schematically illustrating the pump installation shown in Figure 13 and Figure 14.
Figure 16 is the figure of one of the operating control for representing booster pump and main pump.
Figure 17 (a) is the output power and motor rotary speed for the inverter for representing main pump unit when booster pump is preferentially operated
Relation curve map, Figure 17 (b) be the inverter for representing main pump unit output current and motor rotary speed relation song
Line chart, Figure 17 (c) be the inverter for representing main pump unit output voltage and motor rotary speed relation curve map.
Figure 18 (a) is that the output power for the inverter for representing supercharging pump unit when booster pump is preferentially operated and motor turn
The curve map of the relation of speed, Figure 18 (b) is the output current and the relation of motor rotary speed for representing to be pressurized the inverter of pump unit
Curve map, Figure 18 (c) be represent be pressurized pump unit inverter output voltage and motor rotary speed relation curve map.
Description of reference numerals
1st, 90 pump installation
2 pumps
3rd, 103,107 motor
4th, 104,108 inverter
5 control devices
7 source power supplies
8th, 130 air inlet pipe
9th, 131 blast pipe
11 vacuum chambers
12 link pipe arrangement
13 flow sensors
14th, 120 pump temperature sensor
20th, 121 pump case
21 pump rotors
22 rotor cases
23 rotary shafts
24th, 25,123 bearing
27 timing gears
28 gear-boxes
30 motor shells
35 motor rotors
36 permanent magnets
37 stator cores
39 magnetic pole tooths
40th, 126 coil
41 host controllers
42nd, 122 bearing temperature sensor
43rd, 124 rotor temperature sensor
44th, 125 motor temperature sensor
45th, 127 intake air temperature sensor
46th, 128 exhaust gas temperature sensor
50 load-lock chambers
51 communicating pipes
52 sluice valves
53 inlet valves
92 supercharging pump units
93 main pump units
102 booster pumps
106 main pumps
110 control devices
111 air inlet pipe
115 guidance panels
Embodiment
Hereinafter, embodiments of the present invention are illustrated referring to the drawings.Fig. 1 is to represent the 1st implementation with the present invention
The figure of the vacuum pumping system of the dry vacuum pump apparatus of mode.The vacuum pumping system have dry vacuum pump apparatus 1 and with
The vacuum chamber 11 that dry vacuum pump apparatus 1 is connected.As shown in figure 1, dry vacuum pump apparatus 1 has pump 2, the motor of transfer tube 2
3rd, the control device 5 of the action of the inverter 4 of the rotating speed of control motor 3 and control inverter 4.Pump 2 is in the stream of gas
Without using the dry vacuum pump of oil.1 pump unit is constituted by pump 2, motor 3 and inverter 4.Control device 5 is built-in inside it
There is central operation processing unit (CPU), be connected by communication signal transmissions unit or contact with inverter 4.Dry vacuum pump is filled
1 is put to be connected with source power supply 7.The air inlet pipe 8 and vacuum chamber 11 of pump 2 are connected by link pipe arrangement 12, pass through the operating of pump 2, vacuum
Gas in room 11 is discharged by linking pipe arrangement 12 from the blast pipe 9 of pump 2.
The flow sensor 13 for the flow for determining the gas flowed into pump 2 is installed in air inlet pipe 8.The gas determined
Flow flow signal is converted into by flow sensor 13, and be sent to control device 5.The temperature for determining pump 2 is installed in pump 2
The pump temperature sensor 14 of degree.The temperature of the pump 2 determined is converted into temperature signal by pump temperature sensor 14, and sends
To control device 5.And then, the temperature signal obtained by pump temperature sensor 14 is sent to upper control described later from control device 5
Device 41 processed.
Fig. 2 is the sectional view of pump 2 and motor 3.The pump illustrated in present embodiment is Roots type vavuum pump, but except Roots
The vavuum pump of its alloytype such as screw type can also be selected beyond type vavuum pump.As shown in Fig. 2 being configured with multiple in pump case 20
Pump rotor (roots rotor) 21.Pump rotor 21 is housed in rotor case 22, is formed between pump rotor 21 and rotor case 22
There is small gap.Pump rotor 21 is fixed on rotary shaft 23.Although it is not shown, but being abreast configured with other with pump rotor 21
Pump rotor, the pump rotor also is secured to rotary shaft (not shown).Rotary shaft 23 is to rotate freely by the supporting of bearing 24,25.In rotation
The one end of rotating shaft 23 is provided with intermeshing a pair of timing gears 27, and is housed in gear-box 28.In rotary shaft 23
The other end is provided with motor 3.
Reference picture 3 and Fig. 4 are illustrated to the concrete structure of motor 3.Fig. 3 is Fig. 2 III-III line sectional views.Such as Fig. 3
It is shown, a pair of motor rotors 35,35 are contained in motor shell 30.The outer peripheral face of motor rotor 35,35 is by permanent magnet 36,36
Formed, stator core 37 is arranged to surround around motor rotor 35,35.
Fig. 4 is Fig. 2 IV-IV line sectional views.As shown in figure 4, the stator core 37 in motor shell 30 has to surround horse
The magnetic pole tooth 39 arranged up to the mode of rotor 35,35.Coil 40 is wound with each magnetic pole tooth 39.By flowing electricity in coil 40
Flow and form magnetic field in magnetic pole tooth 39, motor rotor 35,35 is rotated by the magnetic field.
By the driving of motor 3, opposite direction rotates pump rotor to each other, and the gas in vacuum chamber 11 is blocked in pump and turned
Blast pipe 9 is transplanted between son and rotor case 22.Transferred by being carried out continuously such gas, to the gas in vacuum chamber 11
Body carries out vacuum exhaust.
Then, reference picture 5 is illustrated to the control sequence of pump installation 1.Fig. 5 is the control sequence for representing pump installation 1
Figure.In the outside of pump installation 1 host controller 41 is provided with as external command device.Pump installation 1 and host controller 41 are passed through
Connected by communication signal transmissions unit or contact.When host controller 41 generates the start command signal of pump 2, enabled instruction
Signal is passed to control device 5, and pump 2 starts.Host controller 41 is, for example, the control for the action for controlling semiconductor- fabricating device
Device processed.Outside that can also be as external command device in pump installation 1 sets guidance panel, passes through the operation of staff
The start command signal of pump 2 is sent to control device 5 from guidance panel.
When control device 5 receives the start command signal of pump 2, control device 5 to inverter 4 send instruct so that its
Drive motor 3 is come with rotating speed of target set in advance.Inverter 4 will be with target when receiving the instruction for carrying out self-control device 5
The corresponding power supply of rotating speed is to motor 3.The optimum value of the voltage applied to motor 3 is determined by the specification of coil 40.For example,
In the case of permanent-magnet type DC motors, the rotating speed and generally proportionate therefore proportional to the rotating speed electricity of service voltage of motor 3
Pressure is applied to motor 3.The torque of motor 3 is controlled by being supplied to the size of the electric current of motor 3.Control device 5 controls inverse
Become the output power of device 4 so that motor 3 is rotated with rotating speed of target.The rotating speed of motor 3 can be by rotation sensing (not shown)
Device is detected, or can also calculate turning for motor 3 according to the electric current by the current feedback for flowing through motor 3 to control device 5
Speed.Or, the current feedback of motor 3 can also will be flowed through to inverter 4, and inverter 4 calculates turning for motor 3 according to the electric current
Speed.
In pump installation 1, multiple temperature sensors are also equipped with addition to pump temperature sensor 14.Reference picture 6 is to this
A little temperature sensors are illustrated.Fig. 6 is the figure at the configuration position for representing the temperature sensor in pump installation 1.Pump temperature is sensed
Device 14 is installed on pump case 20, determines pump case 20.Bearing temperature sensor 42 is configured near the bearing 25 of pump 2, determines axle
Hold 25 temperature.Rotor temperature sensor 43 is configured at the inside of pump 2, determines the temperature of pump rotor 21.Motor temperature sensor
44 are installed on the coil 40 of motor 3, determine the temperature of motor 3.Intake air temperature sensor 45 is installed on air inlet pipe 8, determines to pump 2
The temperature of the gas of inflow.Exhaust gas temperature sensor 46 is installed on blast pipe 9, determines the temperature for the gas discharged from pump 2.By this
The temperature that a little temperature sensors are detected is converted into temperature signal by each temperature sensor, and is sent to control device 5.Enter
And, the temperature signal obtained by each temperature sensor is sent to host controller 41 from control device 5.It is being difficult to TEMP
In the case that device is installed on coil 40, control device 5 can also estimate the temperature of coil 40 according to the output current of inverter 4
Degree.
By the electric current more than continuous rating current value be supplied to motor 3 as a result, when the heat of motor 3 and inverter 4 surpasses
When crossing the cooling capacity of pump installation 1 itself, motor 3 and inverter 4 can be overheated.If however, overheated in inverter 4 and motor 3
Reduce current value before, then being capable of the temporary flow electric current bigger than continuous rating current value.In this manual, can be temporary by this
Shi Liudong maximum current value is referred to as instantaneous load current value.
Control device 5 has the limits value for the electric current for exporting inverter 4 in the driving of motor 3 in the 1st current limit
The function of being switched between value and the 2nd current limit value.1st current limit value is above-mentioned continuous rating current value, the 2nd electricity
It is above-mentioned instantaneous load current value to flow limits value.These the 1st current limit values and the 2nd current limit value are stored in advance in control
In device 5.The specific switching of 7 pairs of reference picture is illustrated.
Fig. 7 is the figure for the switching for representing the 1st current limit value and the 2nd current limit value.As shown in fig. 7, the energy of control device 5
Enough switch the 1st current limit value and the 2nd current limit value.In order to prevent the failure of motor 3 and inverter 4, the 1st current limit value
It is configured to the smaller side in the continuous rating current value of the continuous rating current value of motor 3 and inverter 4.Equally, the 2nd electricity
Stream limits value is configured to the smaller side in the instantaneous load current value of the instantaneous load current value of motor 3 and inverter 4.
In Fig. 7, because the continuous rating current value of the continuous rating current value ratio inverter 4 of motor 3 is small, so the continuous volume of motor 3
Determine current value and be configured to the 1st current limit value.Due to instantaneous specified electricity of the instantaneous load current value than inverter 4 of motor 3
Flow valuve is small, so the instantaneous load current value of motor 3 is configured to the 2nd current limit value.
The size of instantaneous load current value is determined by the time of streaming current.Therefore, it is short in the time of streaming current
In the case of, compared with the situation of the time length of streaming current, bigger electric current can be flowed.2nd current limit value is configured to
Several times~decades of times of continuous rating current value.
The preferred pair of control device 5 switches to the aggregate-value of the number of times of the 2nd current limit value to be counted from the 1st current limit value
Number, in the case of predetermined threshold value has been exceeded in the aggregate-value, control device 5 reduces the 2nd current limit value in itself.Or, control
Device 5 processed can also be counted to the frequency switched from the 1st current limit value to the 2nd current limit value, in the frequency than pre-
In the case that fixed threshold value is high, control device 5 reduces the 2nd current limit value in itself.
The condition of 8 pairs of the 1st current limit values of switching of reference picture and the 2nd current limit value is illustrated.Fig. 8 is to represent pump 2
Operating control the figure of one.In fig. 8, current limit value corresponding with 15kW electric power is set to the 1st current limit value,
Current limit value corresponding with 20kW electric power is set to the 2nd current limit value.In the example shown in Fig. 8, passed by pump temperature
Sensor 14, motor temperature sensor 44 and bearing temperature sensor 42 determine pump temperature, motor temperature and bearing temperature.Respectively
From the higher limit of temperature be set to 100 DEG C.In addition, the operating condition shown in Fig. 8 is not limited to this, can also arbitrarily it set
Determine operating condition.For example, because the temperature that temperature sensor is detected is different according to the position difference of setting, therefore each temperature
Higher limit is not limited to this.Further, since the 1st current limit value and the 2nd current limit value all according to the inverter used and
Motor is different and different, therefore is not limited to example illustrated.
In the case where continuously running the situation (condition 1) of pump 2, the output current limits value of inverter 4 is configured to the 1st electric current limit
Value processed.In the case where starting the situation (condition 2) of pump 2, control device 5 is by the output current limits value of inverter 4 from the 1st current limit
Value switches to the 2nd current limit value.Thus, the torque increase of motor 3, can make pump 2 be increase rapidly up to normal speed.From pump
2 were initiated through after the scheduled time (in Fig. 8 be 30 seconds), and control device 5 is by the output current limits value of inverter 4 from the
2 current limit values switch to the 1st current limit value.Stably operated thereby, it is possible to not make pump 3 and inverter 4 break down
Pump 2.
When product enters pump 2, the load to motor 3 increases, and hampers the operating of pump 2.By the product of entrance
In the situation (condition 3) of removing, control device 5 limits the output current of inverter 4 according to the instruction from host controller 41
Value processed switches to the 2nd current limit value from the 1st current limit value.Become when the temperature of pump 2 exceedes as 100 DEG C of its higher limit
For 120 DEG C when, the output current limits value of inverter 4 is switched to the 1st current limit by control device 5 from the 2nd current limit value
Value.When the temperature of pump 2 is changed into below 100 DEG C, according to the instruction from host controller 41, control device 5 is again by inversion
The output current limits value of device 4 switches to the 2nd current limit value from the 1st current limit value.
Atmospheric pressure in by vacuum chamber 11 gas discharge situation (condition 4) under, control device 5 with the institute of condition 3
The operating condition shown carries out the control of inverter 4 under the same conditions.When pump 2 starts, for the drop of the rotating speed that prevents pump 2
Low, according to the instruction from host controller 41, the output current limits value of inverter 4 is switched to the 2nd electric current by control device 5
Limits value.When the temperature of motor 3 is changed into 120 DEG C and motor temperature sensor 44 detects this case, control device 5 will be inverse
The output current limits value for becoming device 4 switches to the 1st current limit value from the 2nd current limit value.When the temperature of motor 3 is changed into 100
When below DEG C, according to the instruction from host controller 41, control device 5 again by the output current limits value of inverter 4 from
1st current limit value switches to the 2nd current limit value.
The above-mentioned switching from the 1st current limit value to the 2nd current limit value, according to the instruction from host controller 41
To carry out, but it is also possible to control device 5 is carried out the judgement of the switching of the output current limits value of inverter 4.9 pairs of tools of reference picture
The judgement of the switching of the output current limits value of body is illustrated.Fig. 9 is for illustrating sentencing for the switching of output current limits value
Disconnected figure.Transverse axis shown in Fig. 9 represents the output current of inverter 4, and the longitudinal axis represents the rotating speed of pump 2.It is sufficiently small in the load of pump 2
In the case of, inverter 4 exports the electric current smaller than the 1st limitation current value, pump 2 is operated (P1) with normal speed.Control device 5
The output current of inverter 4 is adjusted according to the load of pump 2, so that the invariablenes turning speed of pump 2.When the load increase of pump 2, inversion
Device 4 exports the electric current suitable with the 1st current limit value, pump 2 is operated (P2) with normal speed.
When the load of pump 2 further increases, the rotating speed reduction (P3) of pump 2.In the output of inverter 4 and the 1st current limit
When being worth suitable electric current, if control device 5 detects the reduction of the rotating speed of pump 2, control device 5 is electric by the output of inverter 4
Stream limits value switches to the 2nd current limit value from the 1st current limit value.Thus, the output current of inverter 4 rises to the 2nd electricity
Flow limits value (P4).The electric current suitable with the 2nd current limit value is supplied to motor 3 by inverter 4, and the thus torque of motor 3 increases
Greatly, the rotating speed of pump 2 returns to normal speed (P5).If load reduces, control device 5 limits the output current of inverter 4
Value processed switches to the 1st limitation current value (P2) from the 2nd current limit value.In the case where load is still big, to be limited with the 2nd electric current
The corresponding electric power of system value carrys out drive motor 3.In order to prevent the overheat of motor 3 and inverter 4, in motor 3 with the 2nd current limit value
The duration of runs exceeded the predetermined time in the case of, control device 5 by the output current limits value of inverter 4 from the 2nd electricity
Stream limits value switches to the 1st current limit value.
In the standby operating of pump 2, control device 5 controls inverter 4 so that the rotating speed of motor 3 drops to necessary minimum
The rotating speed (P6) of degree.By the operation of signal or guidance panel from host controller 41, pump 2 returns to specified speed immediately
Degree.
In order to prevent the failure caused by the overheat of pump unit, control device 5 has fault-avoidance function.For example, by
The temperature that at least one temperature sensor measurement goes out in temperature sensor 14,42,43,44,45 and 46 has exceeded predetermined threshold value
In the case of, the fault-avoidance Function effect of control device 5 limits the output current limits value of inverter 4 from the 2nd electric current
Value processed switches to the 1st current limit value.In the case where the detection temperature of said temperature sensor has exceeded predetermined threshold value, control
Device 5 processed can also reduce the 2nd current limit value in itself.
In above-mentioned example, the predetermined time is exceeded in the output time of the electric current suitable with the 2nd current limit value
In the case of, control device 5 switches to the 1st current limit value from the 2nd current limit value.Replace, control device 5 can also
According to the flow of the gas detected by flow sensor 13 by the output current limits value of inverter 4 from the 2nd current limit value
Switch to the 1st current limit value.For example, in the case where discharging a large amount of gases, control device 5, which is received, comes from host controller 41
Or the signal of guidance panel, the output current limits value of inverter 4 is switched into the 2nd current limit value from the 1st current limit value,
It is when the flow-reduction determined by flow sensor 13 is to predetermined value, the output current limits value of inverter 4 is electric from the 2nd
Stream limits value switches to the 1st current limit value.
In the case that the output current of inverter 4 is big few although the flow determined by flow sensor 13, it is believed that
Pump rotor 21 is attached with product.Therefore, in such cases it is preferred to by by the output current limits value of inverter 4 from
1st current limit value switches to the 2nd current limit value to remove product.Specifically, preferably, by flow sensor 13
The flow determined be below predetermined threshold value and the output current of inverter 4 be it is more than predetermined threshold value in the case of, control
The output current limits value of inverter 4 is switched to the 2nd current limit value by device 5 from the 1st current limit value.By flow sensing
In the case that the flow that device 13 is determined is big and output current of inverter 4 is also big, it is believed that this is common operating condition, therefore
The output current limits value of inverter 4 is maintained the 1st current limit value.
In addition, in the case where the aggregate-value of the output power of inverter 4 has exceeded predetermined threshold value, control device 5 can
So that the output current limits value of inverter 4 is switched into the 1st current limit value from the 2nd current limit value.Specifically, control dress
The output power of inverter 4 can be stored by the often predetermined unit interval (such as 0.1 second) by putting 5, calculate (the example during predetermined
Such as the several seconds) every above-mentioned predetermined unit interval output power aggregate-value, predetermined threshold value has been exceeded in the aggregate-value
In the case of, the output current limits value of inverter 4 is switched into the 1st current limit value from the 2nd current limit value.
In the case where the switching from the 1st current limit value to the 2nd current limit value frequently occurs, it is believed that due to foreign matter
Into etc. the external cause danger that causes pump 2 to stop it is high.Therefore control device 5 is preferably from the 1st current limit value to the 2nd electric current
The frequency of limits value switching gives a warning in the case of being higher than predetermined threshold value.Additionally, it is preferred that passing through communication signal transmissions unit
Or contacts, by warning notice to host controller 41 or guidance panel.
As described above, control device 5 temporarily increases the output current limits value of inverter 4, thus, it is possible to prevent pump unit
Overheat, operate pump unit Simultaneous Stabilization.
Figure 10 (a) is represented in the case where the output current limits value of inverter 4 is set as into the 1st current limit value
Inverter 4 output power and motor 3 rotating speed relation curve map, Figure 10 (b) is the output electricity for representing inverter 4
Stream and the curve map of the relation of the rotating speed of motor 3, Figure 10 (c) is rotating speed of the output voltage with motor 3 for representing inverter 4
The curve map of relation.In Figure 10 (a), when starter motor 3, the rotating speed of motor 3 rises to normal speed.Inverter 4 with
The rotating speed of motor 3 is set to keep constant mode output power.It is inverse shown in such as Figure 10 (b) when the load for putting on pump 2 increases
The output current for becoming device 4 reaches the 1st current limit value.When the load for putting on pump 2 further increases, load torque is more than motor
During 3 rotating torques, in the state of the output current value of inverter 4 is maintained the 1st current limit value, the rotating speed drop of motor 3
It is low.When the rotating speed reduction of motor 3, shown in such as Figure 10 (c), the output voltage reduction of inverter 4, therewith such as Figure 10 (a)
It is shown, the output power reduction of inverter 4.
Figure 11 (a) is represented in the case where the output current limits value of inverter 4 is set as into the 2nd current limit value
Inverter 4 output power and motor 3 rotating speed relation curve map, Figure 11 (b) is the output electricity for representing inverter 4
Stream and the curve map of the relation of the rotating speed of motor 3, Figure 11 (c) is rotating speed of the output voltage with motor 3 for representing inverter 4
The curve map of relation.Dotted line shown in Figure 11 (a) is identical with the curve map of Figure 10 (a), the dotted line shown in Figure 11 (b) with
Curve map shown in Figure 10 (b) is identical.The electric power of inverter 4 is controlled to make the rotating speed of motor 3 be maintained normal speed.When
During the load increase of pump 2, shown in such as Figure 11 (b), the output power of inverter 4 reaches the 2nd current limit value.When putting on pump
2 load further increases, when load torque is more than the rotating torques of motor 3, and the is maintained in the output current value of inverter 4
In the state of 2 current limit values, the rotating speed reduction of motor 3.When the rotating speed reduction of motor 3, shown in such as Figure 11 (c), inversion
The output voltage reduction of device 4, therewith as shown in Figure 11 (a), the output power reduction of inverter 4.
As shown in Figure 11 (a), driven the output current limits value of inverter 4 is set as into the 2nd current limit value
In the case of motor 3, compared with the situation of drive motor shown in Figure 10 (a), the electric power adds the amount suitable with length L.
Therefore, the torque increase of motor 3, increases speed even if load and is also difficult to reduce.
Figure 12 is the figure of another for representing the vacuum pumping system with dry vacuum pump apparatus.The vacuum pumping system
The load-lock chambers 50 being connected with pump installation 1, with pump installation 1 and the vacuum chamber 11 being connected with load-lock chambers 50.In vacuum
Load-lock chambers 50 are configured between room 11 and pump installation 1.Load-lock chambers 50 and vacuum chamber 11 are connected by communicating pipe 51,
The sluice valve 52 that can be opened and closed is installed communicating pipe 51.By closing sluice valve 52, cut-out vacuum chamber 11 and load-lock chambers 50
Between gas connection.Load-lock chambers 50 are the devices used in such as semiconductor- fabricating device, can be by vacuum
Maintain to pass in and out substrate to vacuum chamber 11 in the state of vacuum state in room 11.
Vacuum is always maintained in vacuum chamber 11.Chip is put into load-lock chambers 50, by pump 2 by load-lock chambers 50
Interior exhaust.Become in load-lock chambers 50 after vacuum, open sluice valve 52, chip is sent into vacuum from load-lock chambers 50
Room 11.Handled in vacuum chamber 11 after chip, chip is transplanted on load-lock chambers 50 from vacuum chamber 11, closed lock formula
After valve 52, the air pressure in load-lock chambers 50 is returned into atmospheric pressure, chip is taken out from load-lock chambers 50.
Exhaust in load-lock chambers 50 is for example following to be done by.Pump 2 is set to be operated with normal speed, in this condition,
Open the inlet valve 53 between load-lock chambers 50 and pump 2.Then, the gas of the atmospheric pressure in load-lock chambers 50 is by without a break
In inspiration pump 2, vacuum is vented into from atmospheric pressure in load-lock chambers 50.In the vacuum exhaust process, when opening inlet valve
When 53, the gas in load-lock chambers 50 is flowed into pump 2 without a break, therefore excessive load is applied with to pump 2.Therefore, sometimes
The rotating speed of motor 3 can be reduced, and the exhaust velocity of pump 2 can be reduced.
In order to solve the problem, in the present embodiment, before from being opened inlet valve 53 by the scheduled time, inverse
The output current limits value for becoming device 4 is set to drive motor 3 under conditions of the 2nd current limit value.It is to open inlet valve 53
The output current limits value of inverter 4 is switched to the 2nd current limit value by opportunity, control device 5 from the 1st current limit value.
Open after inlet valve 53, high a few percent of rotating ratio normal speed of pump 2 can be made within the time set in advance to percentage
More than ten.The exhaust velocity of pump 2 can be improved by improving the rotating speed of pump 2.Thus, the row in load-lock chambers 50 can be shortened
Gas time, productivity is improved.
Figure 13 is the schematic diagram of the dry vacuum pump apparatus 90 of the 2nd embodiment of the present invention.Pair with the 1st embodiment phase
Same or suitable inscape mark identical reference, the repetitive description thereof will be omitted.As shown in figure 13, dry vacuum pump apparatus
90 have the supercharging pump unit 92 being connected via link pipe arrangement 12 with vacuum chamber 11 and the main pump list being connected with supercharging pump unit 92
Member 93.Being pressurized pump unit 92 has booster pump 102, motor 103 and inverter 104.Main pump unit 93 has main pump 106, motor
107 and inverter 108.Main pump 106 is the pump for discharging the gas in vacuum chamber 11 from atmospheric pressure, and booster pump 102 is by vacuum
The pump of vacuum is further discharged and improved to gas in room 11.Booster pump 102 can be started after main pump 106 is started, also may be used
To start these pumps 102,106 simultaneously.
Main pump 106 in present embodiment has to be constructed with the identical of pump 2 shown in Fig. 2.The air inlet pipe 111 of main pump 106
It is connected with the exhaust outlet of booster pump 102.Booster pump 102 is made up of the pump rotor of the series fewer than main pump 106.Booster pump 102 has
There is the exhaust velocity bigger than main pump 106.
Booster pump 102 is connected with motor 103, and motor 103 is connected with inverter 104.Main pump 106 is connected with motor 107, horse
It is connected up to 107 with inverter 108.Control inverter 104 and inverter are configured with the vicinity of inverter 104 and inverter 108
The control device 110 of 108 action.Control device 110 and guidance panel (the external command dress being arranged on outside pump installation 90
Put) 115 connections, staff operates to guidance panel 115, thus will be in the 1st current limit value and the 2nd current limit value
Between the command signal of output current limits value of switching inverter 104 and/or inverter 108 be sent to control device 110.Not yet
There are structure and the action of the control device 110 of special instruction identical with above-mentioned control device 5, therefore omit saying for its repetition
It is bright.
The multiple temperature for determining the temperature in these pump units 92,93 are installed in supercharging pump unit 92 and main pump unit 93
Sensor.Although it is not shown, but being provided with main pump unit 93 with being pressurized the identical temperature sensor of pump unit 92.Hereinafter, it is right
The temperature sensor for being installed on supercharging pump unit 92 is illustrated, and omits the explanation of the temperature sensor repeated.
Pump temperature sensor 120 is installed on the pump case 121 of booster pump 102, determines the temperature of pump case 121.Bearing temperature
Degree sensor 122 is configured at the vicinity of the bearing 123 of booster pump 102, determines the temperature of bearing 123.Rotor temperature sensor 124
The inside of booster pump 102 is configured at, the temperature of pump rotor (not shown) is determined.Motor temperature sensor 125 is installed on motor 103
Coil 126, determine motor 103 temperature.Intake air temperature sensor 127 is installed on the air inlet pipe 130 of booster pump 102, determines
The temperature of the gas flowed into booster pump 102.Exhaust gas temperature sensor 128 is installed on the blast pipe 131 of main pump 106, determine from
The temperature for the gas that main pump 106 is discharged.
In order to prevent the failure caused by the overheat of pump unit, control device 110 has fault-avoidance function.For example in peace
The temperature that at least one temperature sensor in temperature sensor loaded on supercharging pump unit 92 and main pump unit 93 is detected exceedes
In the case of predetermined threshold value, the fault-avoidance Function effect of control device 110, by inverter 104 or inverter 108
Output current limits value switch to the 1st current limit value from the 2nd current limit value.In the detection temperature of said temperature sensor
In the case of having exceeded predetermined threshold value, control device 110 can also reduce the 2nd current limit value in itself.
Figure 14 be denoted as external command device substitution guidance panel 115 and by host controller 41 and control device
The schematic diagram of the state of 110 connections.Control device 110 is according to the switching command signal sent from host controller 41, by inversion
The output current limits value of device 104 and/or inverter 108 switches to the 2nd current limit value from the 1st current limit value.
Figure 15 is the figure for the system for schematically illustrating the pump installation 90 shown in Figure 13, Figure 14.Temperature sensor shown in Figure 15
Inclusive earth's surface temperature displaying function sensor 120,122,124,125,127 and 128.As shown in figure 15, it is installed on supercharging pump unit
92 and the temperature sensor of main pump unit 93, it is connected via communication signal transmissions unit or contact with control device 110.By each temperature
The temperature signal that degree sensor is obtained is sent to host controller 41 or guidance panel 115 from control device 110.Control device
110 are also connected to inverter 104 and inverter 108, according to inverse from guidance panel 115 or the control of the signal of host controller 41
Become the action of device 104 and inverter 108.
Figure 16 is the figure of one of the operating control for representing booster pump 102 and main pump 106.In figure 16, by with 15kW's
The corresponding current limit value of electric power is set to the 1st current limit value, and current limit value corresponding with 20kW electric power is set into the 2nd electricity
Limits value is flowed, current limit value corresponding with 10kW electric power is set to the 3rd current limit value.As shown in figure 16, it will supply
When being set to 30kW to the total electricity of pump installation 90, make in the situation (condition 1) that pump installation 90 is generally operated, inverter 104,108
Output current limits value be set to the 1st current limit value.Therefore, to the maximum each confession of supercharging pump unit 92 and main pump unit 93
Electric power to 15kW.
The situation (condition 2) for starting pump installation 90 is illustrated.When pump installation 90 starts, make the preferentially fortune of main pump 106
In the case of turning, the output current limits value of inverter 108 is switched to the 2nd current limit value, the output current of inverter 104
Limits value is set to 3rd current limit value lower than the 1st current limit value.Therefore, the most senior general 20kW of inverter 108 electric power
It is supplied to motor 107, the most senior general 10kW of inverter 104 power supply to motor 103.Then, the preferentially fortune of booster pump 102 is made
Turn.In this case, the output current limits value of inverter 108 is switched to the 3rd current limit value, the output of inverter 104
Current limit value is switched to the 2nd current limit value.Therefore, the most senior general 20kW of inverter 104 power supply is to motor 103,
The most senior general 10kW of inverter 108 power supply is to motor 107.Then, pump installation 90 is operated under usual operation mode.At this
Generally in operating, the output current limits value of inverter 104,108 is switched to the 1st current limit value.Therefore, inverter 104,
108 respectively supply 15kW electric power to the maximum of motor 103,107.
In the case where removing the situation (condition 3) of product, carry out booster pump and preferentially operate.That is, inverter 104 is defeated
Go out current limit value and be switched to the 2nd current limit value, the output current limits value of inverter 108 is switched to the 3rd electric current limit
Value processed.Therefore, the most senior general 20kW of inverter 104 power supply is to motor 103, and the most senior general 10kW of inverter 108 electric power is supplied
It is given to motor 107.Because the most senior general 20kW of inverter 104 power supply increases to motor 103, therefore the torque of motor 103,
Product is removed.
In the situation (condition 4) that gas in by vacuum chamber 11 is discharged from atmospheric pressure, main pump is carried out first and is preferentially operated.
That is, the output current limits value of inverter 108 is switched to the 2nd current limit value, the output current limit of inverter 104
Value processed is switched to the 3rd current limit value.Therefore, the most senior general 20kW of inverter 108 power supply is to motor 107, inverter
104 most senior general 10kW power supply is to motor 103.After gas discharge to a certain degree in vacuum chamber 11, then carry out
Booster pump is preferentially operated.That is, the output current limits value of inverter 104 is switched to the 2nd current limit value, inverter
108 output current limits value is switched to the 3rd current limit value.Therefore, the most senior general 20kW of inverter 104 power supply is arrived
Motor 103, the most senior general 10kW of inverter 108 power supply to motor 107.By operating supercharging under such operating condition
Pump 102 and main pump 106, can discharge the gas in vacuum chamber 11 at a high speed.As a result, can shorten true until forming target
Time before sky.In addition, the operating condition shown in Figure 16 is not limited to this, operating condition can be arbitrarily set.
Figure 17 (a) is output power and the horse for the inverter 108 for representing the main pump unit 93 when booster pump is preferentially operated
Up to the curve map of the relation of 107 rotating speed, Figure 17 (b) is rotating speed of the output current with motor 107 for representing inverter 108
The curve map of relation, Figure 17 (c) is the output voltage and the curve map of the relation of the rotating speed of motor 107 for representing inverter 108.
The dotted line of Figure 17 (a) represents the motor when the output current limits value of inverter 108 is set as into 1 current limit value
The relation of 107 rotating speed and the output power of inverter 108, the solid line of Figure 17 (a) is represented the output of inverter 108 is electric
The relation of the rotating speed and the output power of inverter 108 of motor 107 when stream limits value is set as 3 current limit value.
When starter motor 107, the rotating speed of motor 107 rises to normal speed.Inverter 108 is so that turn of motor 107
Speed keeps constant mode output power.When the load for putting on main pump 106 increases, shown in such as Figure 17 (b), inverter
108 output current reaches the 3rd current limit value.When the load for putting on main pump 106 further increases, in inverter 108
Output current be maintained in the state of the 3rd current limit value, the reduction of the rotating speed of motor 107.When the rotating speed of motor 107 is reduced
When, shown in such as Figure 17 (c), the output voltage reduction of inverter 108, therewith as shown in Figure 17 (a), inverter 108 it is defeated
Go out electric power reduction.
In the case where making booster pump 102 preferentially operate, due to being supplied to the electric power ratio and the 1st current limit of motor 107
Be worth that corresponding electric power is small, thus as Figure 17 (a) and Figure 17 (b) shown in solid, the small electricity of electric current during than generally operating
Stream is fed into motor 107.
Figure 18 (a) be the inverter 104 for representing the supercharging pump unit 92 when booster pump is preferentially operated output power with
The curve map of the relation of the rotating speed of motor 103, Figure 18 (b) is the output for representing the inverter 104 when booster pump is preferentially operated
Electric current and the curve map of the relation of the rotating speed of motor 103, Figure 18 (c) is to represent the inverter 104 when booster pump is preferentially operated
Output voltage and motor 103 rotating speed relation curve map.
The dotted line of Figure 18 (a) is represented when the output current limits value of inverter 104 is set as into 1 current limit value
Motor 103 rotating speed and inverter 104 output power relation, the solid line of Figure 18 (a) represented by inverter 104
The pass of the rotating speed of motor 103 when output current limits value is set as 2 current limit value and the output power of inverter 104
System.As shown in Figure 18 (a), the 2nd electric current is switched to limit from the 1st current limit value the output current limits value of inverter 104
Power value in the case of value processed, adds the amount suitable with length L.Thus, the torque increase of motor 103, even if load increases
The rotating speed of big booster pump 102 also remains constant.(a) of curve map and Figure 11 shown in Figure 18 (a) to Figure 18 (c) to Figure 11
(c) shown in curve map it is identical.
So far embodiments of the present invention are illustrated, but the present invention is not limited to above-mentioned embodiment, when
So can in a variety of ways it implement in the range of its technological thought.
Claims (8)
1. a kind of dry vacuum pump apparatus, the control device with least one pump unit and the control pump unit is described dry
Formula vacuum pump apparatus is characterised by,
The pump unit has：
Dry vacuum pump；
Drive the motor of the dry vacuum pump；With
The inverter of the rotating speed of the motor is controlled,
The control device has switches to the 2nd electric current by the output current limits value of the inverter from the 1st current limit value
The function of limits value, the 1st current limit value is the maximum for the electric current that the inverter can continuously flow to the motor
That is continuous rating current value, the 2nd current limit value is the value more than the continuous rating current value,
The output current limits value of the inverter is being switched to described by the control device from the 1st current limit value
The frequency of 2 current limit values gives a warning when exceeding predetermined threshold value.
2. a kind of dry vacuum pump apparatus, the control device with least one pump unit and the control pump unit is described dry
Formula vacuum pump apparatus is characterised by,
The pump unit has：
Dry vacuum pump；
Drive the motor of the dry vacuum pump；With
The inverter of the rotating speed of the motor is controlled,
The control device has switches to the 2nd electric current by the output current limits value of the inverter from the 1st current limit value
The function of limits value, the 1st current limit value is the maximum for the electric current that the inverter can continuously flow to the motor
That is continuous rating current value, the 2nd current limit value is the value more than the continuous rating current value,
The control device from the 1st current limit value by the output current limits value of the inverter to switching to described
The aggregate-value of the number of times of 2 current limit values is counted, in the case where the aggregate-value is higher than predetermined threshold value, the control
Device reduces the 2nd current limit value in itself, or, the control device is to by the output current limits value of the inverter
Switch to the frequency of the number of times of the 2nd current limit value to be counted from the 1st current limit value, be higher than in the frequency
In the case of predetermined threshold value, the control device reduces the 2nd current limit value in itself.
3. a kind of dry vacuum pump apparatus, control device and survey with least one pump unit and the control pump unit
Constant current enters the flow sensor of the flow of the gas of the pump unit, and the dry vacuum pump apparatus is characterised by,
The pump unit has：
Dry vacuum pump；
Drive the motor of the dry vacuum pump；With
The inverter of the rotating speed of the motor is controlled,
The control device has switches to the 2nd electric current by the output current limits value of the inverter from the 1st current limit value
The function of limits value, the 1st current limit value is the maximum for the electric current that the inverter can continuously flow to the motor
That is continuous rating current value, the 2nd current limit value is the value more than the continuous rating current value,
The control device is below predetermined threshold value and the inverter in the flow determined by the flow sensor
Output current be predetermined threshold value more than in the case of, the output current limits value of the inverter is limited from the 1st electric current
Value processed switches to the 2nd current limit value.
4. a kind of dry vacuum pump apparatus, the control device with least one pump unit and the control pump unit is described dry
Formula vacuum pump apparatus is characterised by,
The pump unit has：
Dry vacuum pump；
Drive the motor of the dry vacuum pump；With
The inverter of the rotating speed of the motor is controlled,
The control device has switches to the 2nd electric current by the output current limits value of the inverter from the 1st current limit value
The function of limits value, the 1st current limit value is the maximum for the electric current that the inverter can continuously flow to the motor
That is continuous rating current value, the 2nd current limit value is the value more than the continuous rating current value,
, will be described in the case that the control device has exceeded predetermined threshold value in the aggregate-value of the output power of the inverter
The output current limits value of inverter switches to the 1st current limit value from the 2nd current limit value.
5. a kind of vacuum pumping system, it is characterised in that including：
Dry vacuum pump apparatus described in any one of Claims 1 to 4；And
It is connected to the vacuum chamber of the dry vacuum pump apparatus.
6. a kind of vacuum pumping system, it is characterised in that with dry vacuum pump apparatus, the dry vacuum pump apparatus includes：
Pump；Drive the motor of the pump；Control the inverter of the rotating speed of the motor；Control dress with the action for controlling the inverter
Put,
The vacuum pumping system includes：
Load-lock chambers, it is connected with the dry vacuum pump apparatus；And
Vacuum chamber, it is connected with the load-lock chambers,
The control device is opening the suction to open the inlet valve between the load-lock chambers and the pump as opportunity
Until by before the stipulated time, the output current limits value of the inverter is switched into height from the 1st current limit value after valve
In the 2nd current limit value of the 1st current limit value.
7. a kind of vacuum pumping system, it is characterised in that with dry vacuum pump apparatus,
The dry vacuum pump apparatus includes：The supercharging pump unit being connected with vacuum chamber；The master being connected with the supercharging pump unit
Pump unit；With the control device of the action for the inverter and the inverter of the supercharging pump unit for controlling the main pump unit,
The control device makes the main pump of the main pump unit preferentially operate, then when discharging the gas in the vacuum chamber
The booster pump of the supercharging pump unit is set preferentially to operate.
8. a kind of vacuum pumping system, it is characterised in that filled with the dry vacuum pump for including main pump unit and supercharging pump unit
Put,
The main pump unit has main pump and the 1st inverter,
The supercharging pump unit has booster pump and the 2nd inverter,
The dry vacuum pump apparatus has the control device for the action for controlling the 1st inverter and the 2nd inverter,
When making the main pump preferentially operate, the control device is according to from the outside located at the dry vacuum pump apparatus
The instruction of external command device, the output current limits value of the 1st inverter is switched to higher than the 1st current limit value
2 current limit values, the 3rd electricity less than the 1st current limit value is switched to by the output current limits value of the 2nd inverter
Flow limits value；
When making the booster pump preferentially operate, the control device is according to the instruction from the external command device, by institute
The output current limits value for stating the 1st inverter switches to the 3rd current limit value, by the output current of the 2nd inverter
Limits value switches to the 2nd current limit value.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-222878 | 2012-10-05 | ||
| JP2012222878A JP6050081B2 (en) | 2012-10-05 | 2012-10-05 | Dry vacuum pump device |
| CN201310460434.5A CN103711697B (en) | 2012-10-05 | 2013-09-30 | Dry vacuum pump apparatus and in control device used in the dry vacuum pump |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310460434.5A Division CN103711697B (en) | 2012-10-05 | 2013-09-30 | Dry vacuum pump apparatus and in control device used in the dry vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107237752A true CN107237752A (en) | 2017-10-10 |
| CN107237752B CN107237752B (en) | 2019-05-28 |
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ID=50404956
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310460434.5A Active CN103711697B (en) | 2012-10-05 | 2013-09-30 | Dry vacuum pump apparatus and in control device used in the dry vacuum pump |
| CN201710586825.XA Active CN107237752B (en) | 2012-10-05 | 2013-09-30 | Dry vacuum pump apparatus and vacuum pumping system |
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| CN201310460434.5A Active CN103711697B (en) | 2012-10-05 | 2013-09-30 | Dry vacuum pump apparatus and in control device used in the dry vacuum pump |
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| Country | Link |
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| JP (1) | JP6050081B2 (en) |
| KR (1) | KR101707267B1 (en) |
| CN (2) | CN103711697B (en) |
| TW (1) | TWI601881B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107524608B (en) * | 2016-06-22 | 2019-11-01 | 泓记精密股份有限公司 | Electric fuel oil pumping |
| JP6944249B2 (en) * | 2017-01-27 | 2021-10-06 | 株式会社荏原製作所 | Water supply device |
| JP2018178846A (en) * | 2017-04-12 | 2018-11-15 | 株式会社荏原製作所 | Device and method for controlling operation of vacuum pump device |
| FI20175411A (en) * | 2017-05-08 | 2018-11-09 | Lappeenrannan Teknillinen Yliopisto | A method and a control system for controlling a vacuum pump |
| DE202018003585U1 (en) * | 2018-08-01 | 2019-11-06 | Leybold Gmbh | vacuum pump |
| CN111756296B (en) * | 2019-03-29 | 2022-06-17 | 安川电机（中国）有限公司 | Frequency converter, control method of output voltage of frequency converter and control method of vacuum system |
| KR102376859B1 (en) * | 2020-09-28 | 2022-03-22 | 주식회사 플랜 | System and method for discharging fluid treatment of semiconductor manufacturing equipment |
| JP7189394B1 (en) * | 2021-11-04 | 2022-12-13 | 株式会社アルバック | VACUUM PUMP, CONTROL METHOD FOR VACUUM PUMP, POWER CONVERTER FOR VACUUM PUMP, POWER CONVERSION DEVICE FOR COMPRESSOR, AND COMPRESSOR |
| GB2619964A (en) * | 2022-06-24 | 2023-12-27 | Edwards Ltd | Method for detection of a bearing condition of a vacuum pump |
| CN115145201B (en) * | 2022-07-19 | 2023-03-28 | 长沙昌佳自动化设备有限公司 | Special controller for dry vacuum pump |
| CN116641881B (en) * | 2023-04-25 | 2024-01-23 | 北京通嘉宏瑞科技有限公司 | Vacuum pump control method, device, computer equipment and storage medium |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR101707267B1 (en) | 2017-02-15 |
| CN103711697A (en) | 2014-04-09 |
| JP2014074380A (en) | 2014-04-24 |
| TWI601881B (en) | 2017-10-11 |
| KR20140044734A (en) | 2014-04-15 |
| TW201418578A (en) | 2014-05-16 |
| JP6050081B2 (en) | 2016-12-21 |
| CN103711697B (en) | 2017-11-10 |
| CN107237752B (en) | 2019-05-28 |
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