CN107222181A - FBAR based on SOI Substrate and preparation method thereof - Google Patents
FBAR based on SOI Substrate and preparation method thereof Download PDFInfo
- Publication number
- CN107222181A CN107222181A CN201710342092.5A CN201710342092A CN107222181A CN 107222181 A CN107222181 A CN 107222181A CN 201710342092 A CN201710342092 A CN 201710342092A CN 107222181 A CN107222181 A CN 107222181A
- Authority
- CN
- China
- Prior art keywords
- fbar
- cavity
- thin film
- stacked structure
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 31
- 238000002360 preparation method Methods 0.000 title claims description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 39
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 39
- 239000010703 silicon Substances 0.000 claims abstract description 39
- 239000010409 thin film Substances 0.000 claims abstract description 30
- 239000012212 insulator Substances 0.000 claims abstract description 27
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000012528 membrane Substances 0.000 claims abstract description 9
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 9
- 238000004891 communication Methods 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 238000012546 transfer Methods 0.000 claims description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 8
- 229910052721 tungsten Inorganic materials 0.000 claims description 8
- 239000010937 tungsten Substances 0.000 claims description 8
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 7
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 7
- 239000004411 aluminium Substances 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052741 iridium Inorganic materials 0.000 claims description 7
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 7
- 229910052750 molybdenum Inorganic materials 0.000 claims description 7
- 239000011733 molybdenum Substances 0.000 claims description 7
- 229910052707 ruthenium Inorganic materials 0.000 claims description 7
- UPIXZLGONUBZLK-UHFFFAOYSA-N platinum Chemical compound [Pt].[Pt] UPIXZLGONUBZLK-UHFFFAOYSA-N 0.000 claims description 6
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 claims description 6
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 3
- 229910003327 LiNbO3 Inorganic materials 0.000 claims description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 26
- 238000005530 etching Methods 0.000 abstract description 10
- 230000008569 process Effects 0.000 abstract description 8
- 239000010408 film Substances 0.000 abstract description 7
- 238000013461 design Methods 0.000 abstract description 6
- 238000005240 physical vapour deposition Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000010923 batch production Methods 0.000 abstract description 2
- 230000002401 inhibitory effect Effects 0.000 abstract description 2
- 238000003672 processing method Methods 0.000 abstract 2
- 238000005516 engineering process Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000010897 surface acoustic wave method Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000005360 phosphosilicate glass Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
- H03H3/0075—Arrangements or methods specially adapted for testing microelecro-mechanical resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H2003/023—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the membrane type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H2003/027—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the microelectro-mechanical [MEMS] type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H2009/155—Constructional features of resonators consisting of piezoelectric or electrostrictive material using MEMS techniques
Abstract
The present invention proposes a kind of FBAR (FBAR) and its processing method.The acoustic resonator includes silicon substrate, silica membrane, piezoelectric thin film transducer stacked structure, and piezoelectric thin film transducer stacked structure includes top electrode, piezoelectric layer, hearth electrode successively from top to bottom.It manufactures processing method：Grown buffer layer, physical vapour deposition (PVD) growth hearth electrode, piezoelectric and top electrode, form piezoelectric thin film transducer stacked structure on a silicon substrate.Then the insulator silicon chip with cavity is bonded with piezoelectric thin film transducer stacked structure, forms air chamber, finally peel off original silicon substrate.Compared to other film bulk acoustic resonator structures, the present invention uses default cavity structure, advantageously reduces the adhesion formed in traditional cavity etching process and mechanical structure fracture, damage, can effectively improve device production yield, is adapted to batch production.Because prefabricated cavity width is more than the horizontal width of piezoelectric thin film transducer stacked structure, the design also can have good inhibiting effect to the transverse noise of FBAR, so as to improve device performance.
Description
Technical field
The present invention relates to a kind of wireless communication RF front-end devices, particularly FBAR (FBAR) and its system
Preparation Method.
Background technology
Since 21st century, the Rapid Expansion in consumer electronics product and person communication system market is caused
To the very big demand of wireless communication system (such as palm PC, mobile phone, navigation system, satellite communication and various data communication).
Since particularly nearly 2 years, with the issue of the third generation and forth generation communication standard, the developing trend of individual radio communication system
It is integrated into by increasing functional module in wireless terminal.Present mobile phone not only needs basic call and short message work(
Can, in addition it is also necessary to have the functions such as GPS navigation, web page browsing, video/audio broadcasting, photograph and live tv reception.Further, since going through
The reason such as history and area causes the presence of various wireless communication standards so that need integrated a variety of moulds in the mobile phone for using new standard
Formula, multiple frequency ranges realize the trans-regional roaming between country to facilitate.More than it is a variety of so that the development of radio communication is towards increasing
Plus functional module, reduction system size, reduce cost and the direction of power consumption is developed.Therefore, prepare high-performance, small size, it is low into
Originally the radio system with low-power consumption just turns into a focus of research.
In the past few years, developing rapidly with RF IC (RFIC) technology, some are previously used for communication
Discrete component in system, such as low-noise amplifier (LNA) and intermediate-frequency filter (IF), it is already possible to integrated using radio frequency
The mode of circuit is realized；But the radio-frequency oscillator of other components, such as Low phase noise (RF Oscillator) and radio-frequency front-end
Wave filter (RF Filter) etc., is but still difficult to realize by the way of RF IC.On the other hand, with MEMS skills
The development of art, some use RF Components prepared by MEMS technology, such as RF switch (RF Switch), radio frequency inductive (RF
Inductor) and rf-resonator (RF Resonator) etc., obtained due to the premium properties that it has extensive research and
Using.FBAR (Film Bulk Acoustic Resonator, FBAR) is that research recent years is awfully hot
A kind of use MEMS technology realize rf-resonator.It is produced on silicon or GaAs substrate, mainly by metal electrode/
A kind of device that piezoelectric membrane/metal electrode is constituted.Under some specific frequencies, FBAR devices are shown as quartz crystal is humorous
The same resonance characteristic of the device that shakes, therefore oscillator or wave filter can be built into applied in modern communication systems.Relative to biography
System is used for constituting LC oscillators, ceramic dielectric resonator and surface acoustic wave (SAW) device of bandpass filter and microwave generating source
For, FBAR device is except with small size, low-power consumption, low insertion loss and senior engineer's working frequency
Outside the advantage of (0.5GHz-10GHz), it is often more important that its preparation technology can be compatible with CMOS technology, thus can with it is outer
Enclose circuit and constitute system-on-a-chip, greatly reduce the size and power consumption of system.
Radio-frequency oscillator based on FBAR devices mainly has low power consumption and small volume and can be compatible with standard CMOS process
Feature, the Single-Chip Integration of feasible system.It is this kind of with the improvement to FBAR device frequency temperature coefficient
Oscillator has very big ample scope for abilities in the RF system for need low power consumption and small volume.
The preparation technology of FBAR device is for other MEMSs and uncomplicated, prepares at present
FBAR is mainly completed by sacrificial layer surface technique or back etch process.Sacrificial layer surface technique is main
By the use of the material such as phosphosilicate glass or silica as filling sacrifice layer, piezoelectric thin film transducer stacked structure is deposited on it
Surface.The later stage of technique removes sacrifice layer to reach the purpose to form cavity.The problem of sacrificial layer surface technique is main
It is that sacrifice layer can not be removed thoroughly, a certain degree of adhesion can be caused, so as to influences the performance of device.And back etch process master
If by carrying out body silicon etching in wafer rear, so that at the back side for the piezoelectric thin film transducer stacked structure that front is formed
In cavity environment.The subject matter of back-etching technique is to need layer of silicon dioxide plus one layer of silicon nitride film thin as piezoelectricity
The supporting layer of film transducer stacked structure so that device avoids etching the erosion of industry in technique productions.But such design
It is easy to produce larger stress, fold and rupture, the performance of meeting extreme influence device easily occurs in device.Remaining answer is not solved
The problem of power, it can not just prepare high performance FBAR devices.
The content of the invention
It is difficult with release in sacrifice layer formation cavity scheme in above-mentioned existing process technology in order to overcome, and back etching
The problems such as stress concentration caused, the present invention proposes a kind of FBAR of the insulator silicon substrate based on perforated cavities
(FBAR).Due to bonding together to form the cavity of closing using insulator silicon chip and piezoelectric thin film transducer stacked structure, so as to keep away
Above-mentioned technical problem is exempted from.Further, since prefabricated cavity width is more than the horizontal width of piezoelectric thin film transducer stacked structure,
The design also can have good inhibiting effect to the transverse noise of FBAR, so as to improve device performance.
Specifically, scheme proposed by the invention is as follows：
A kind of FBAR, it is characterised in that：
The resonator includes insulator silicon chip and piezoelectric thin film transducer stacked structure with cavity；The piezoelectricity is thin
Film transducer stacked structure includes top electrode, piezoelectric and hearth electrode, wherein top electrode, piezoelectric, hearth electrode heap successively
Folded, the piezoelectric thin film transducer stacked structure is placed in the cavity of the insulator silicon chip, the piezoelectric thin film transducer
With insulator silicon chip by bonding together to form closed cavity structure.
Further, the top electrode, the hearth electrode extension it is in the same plane.
Further, the top electrode, the hearth electrode include one of tungsten, molybdenum, platinum platinum, ruthenium, iridium, titanium tungsten, aluminium or
Combination.
Further, the piezoelectric includes aluminium nitride (AlN), zinc oxide (ZnO), lithium niobate (LiNbO3), tantalic acid
Lithium (LiTaO3) one of or combination.
The present invention also proposes a kind of preparation method of FBAR, comprises the following steps：
Piezoelectric thin film transducer stacked structure is prepared on transfer base substrate；
Prepare the insulator silicon chip with cavity；
The piezoelectric thin film transducer stacked structure is placed in the cavity, is bonded the piezoelectric thin film transducer stacking knot
Structure and the insulator silicon chip with cavity, form the cavity structure of closing；
The transfer base substrate is peeled off, cavity type FBAR is formed.
Further, the step of being additionally included in buffer layer on the transfer base substrate, the cushion is used to peel off institute
State transfer base substrate.
Further, the piezoelectric thin film transducer stacked structure includes the hearth electrode, piezoelectric, top electricity stacked gradually
Pole.
Further, it is additionally included in the step of forming bonding metal layer on the insulator silicon chip with cavity.
Further, the cushion includes silica.
The present invention also proposes a kind of communication device, including FBAR.
Brief description of the drawings
Fig. 1 is the structural representation of the FBAR (FBAR) of a wherein embodiment of the invention；
Fig. 2 is the piezoelectric thin film transducer stacked structure schematic diagram of a wherein embodiment of the invention；
Fig. 3 is the schematic diagram of the insulator silicon chip with cavity of a wherein embodiment of the invention；
Fig. 4 is the piezoelectric thin film transducer stacked structure of a wherein embodiment of the invention and the insulator silicon chip with cavity
The schematic diagram of bonding；
Fig. 5 is the schematic diagram that wherein embodiment bonding back substrate of the invention is peeled off.
Embodiment
Embodiment 1
The present invention proposes a kind of FBAR (FBAR).As shown in Figure 1-2, it includes：With the exhausted of cavity
Edge substrate 1, the insulating substrate is, for example, SOI Substrate；The piezoelectric thin film transducer stacked structure 2 being placed in cavity, the stacking knot
Structure 2 includes top electrode 21, piezoelectric material layer 22, hearth electrode 23, and trilaminate material is stacked gradually.Wherein top electrode 21, hearth electrode 23
It is bonded with insulating substrate, forms closed cavity, realizes that FBAR (FBAR) is filtered.Finally, top electrode
21st, hearth electrode 23 is in same level, is easy to connecting lead wire to test.
In the present embodiment, the material of top electrode 21 can be one of tungsten, molybdenum, platinum platinum, ruthenium, iridium, titanium tungsten, aluminium or group
Close；The material of hearth electrode 23 can be one of tungsten, molybdenum, platinum platinum, ruthenium, iridium, titanium tungsten, aluminium or combination.
Embodiment 2
The invention also provides a kind of FBAR (FBAR) preparation method, specifically, such as Fig. 2-5 institutes
Show：Comprise the following steps：
One layer of cushion 24,50-500 nanometers of thickness are grown on transfer base substrate 25.It will be understood by those skilled in the art that
Substrate in the present embodiment it is common for silicon substrate, can also be glass substrate, organic material substrate, quartz substrate or its
It all be applied to prepare the carrier substrates material of FBAR (FBAR).Cushion 24 in the present embodiment is used for
Later separation transfer base substrate and FBAR (FBAR), the material of the cushion can be silica, silicon nitride,
Silicon oxynitride, the material such as phosphoric acid glass.According to actual process, can in silica membrane Doped ions, such as phosphorus, fluorine,
Carbon, boron etc., preferably to etch.
Hearth electrode 23 is deposited, and graphically, the hearth electrode material that can be applied to the present embodiment can be white for tungsten, molybdenum, platinum
One of gold, ruthenium, iridium, titanium tungsten, aluminium or combination, the thickness of hearth electrode 23 is between 100-2000 nanometers.
Deposit the piezoelectric membrane 21 of high C axis oriented；The method of deposit piezoelectric membrane 21 has a variety of, and those skilled in the art can
Know, the methods such as physical vapour deposition (PVD), chemical vapor deposition, reactive radio frequency magnetron sputtering, ald can be included.Wherein,
Piezoelectric film material can be aluminium nitride (AlN), zinc oxide (ZnO), lithium nickelate (LiNbO3), lithium tantalate (LiTaO3) one of or
Person combines.
It is thin using reactive ion etching or wet-etching technology etching piezoelectricity in graphical piezoelectric membrane, the present embodiment
Film, forms the through hole for drawing hearth electrode.
Top electrode 21 is deposited, required figure is lithographically formed.Top electrode material can be tungsten, molybdenum, platinum platinum, ruthenium, iridium, titanium
One of tungsten, aluminium or combination, thickness are 100-2000 nanometers.
Prepare the insulator silicon chip with cavity.The cavity of the insulator silicon chip can be formed by dry etching, empty
The size of chamber should match with piezoelectric thin film transducer stacked structure.
Insulator silicon chip with cavity is bonded with piezoelectric thin film transducer stacked structure, one is made
Entirety simultaneously forms closed cavity.
The wet method of cushion 24 is removed, so that the carrier substrates of FBAR be peeled off from device, formed
Whole FBAR (FBAR) structure.Top electrode 21, hearth electrode 23 are final on the insulator silicon chip with cavity
In same level, connecting lead wire is facilitated to test.
In the present embodiment, it is related to the insulation silicon chip with cavity, its specific manufacture craft is as follows：
Prepare insulator silicon chip, and its surface clean is clean.The insulator silicon chip is silicon, two respectively from top to bottom
Silica (BOX), silicon substrate.
Using dry method or wet etching insulator silicon chip formation cavity, specifically, by the upper strata in etching window
Silicon is removed completely, until the silicon dioxide layer 11 in cavity is exposed.After etching, the transverse width of cavity is changed more than piezoelectric membrane
The transverse width of energy device stacked structure.
Cleaning wafer surface, makes not staying residual thing in cavity.
The present embodiment further relates to being bonded for the insulator silicon chip with cavity and piezoelectric thin film transducer stacked structure, its key
Close technique as follows：
First in the insulator silicon substrate surface deposition layer of metal material 14 with cavity, metal material 14 can be
One of tungsten, molybdenum, platinum platinum, ruthenium, iridium, titanium tungsten, aluminium or combination, thickness are 100-2000 nanometers；Carved using dry method or wet method
Etching technique removes the metal level in cavity, retains the metal level outside cavity；By the metal of the insulator silicon chip with cavity
Layer 14 aligns with top electrode 21, the metal of hearth electrode 23 of piezoelectric thin film transducer stacked structure, by metal bonding technique by two
Person's bonding is a device.
In other embodiment, can also on insulator silicon chip first deposited metal material layer 14, then carve again
Erosion forms cavity structure.
FBAR proposed by the invention is widely used in communication device, for example：Radio-frequency oscillator, filter
Ripple device and duplexer.
The present invention is the film bulk acoustic resonator of new CMOS complementary metal-oxide-semiconductor (CMOS) process compatible
Device (FBAR), its design solve that long-standing problem the design of FBAR (FBAR) field cavity realize that technique is asked
Topic.Using the technique compatible with CMOS complementary metal-oxide-semiconductor (CMOS), it can enter under existing wafer formation condition
Row batch production, due to its novel bonding technology design, can effectively avoid adhesion and the back side of surface sacrificial process
The stress problem of etching technics.
Although the present invention is described in detail above, the invention is not restricted to this, those skilled in the art of the present technique
Various modifications can be carried out according to the principle of the present invention.Therefore, all modifications made according to the principle of the invention, all should be understood to
Fall into protection scope of the present invention.
Claims (10)
1. a kind of FBAR, it is characterised in that：
The resonator includes insulator silicon chip and piezoelectric thin film transducer stacked structure with cavity；The piezoelectric membrane is changed
Energy device stacked structure includes top electrode, piezoelectric and hearth electrode, and wherein top electrode, piezoelectric, hearth electrode is stacked gradually, institute
State piezoelectric thin film transducer stacked structure to be placed in the cavity of the insulator silicon chip, the piezoelectric thin film transducer and insulation
Body silicon chip is by bonding together to form closed cavity structure.
2. FBAR according to claim 1, it is characterised in that：The top electrode, the hearth electrode
Extension is in the same plane.
3. FBAR according to claim 1, it is characterised in that：The top electrode, the hearth electrode bag
Include one of tungsten, molybdenum, platinum platinum, ruthenium, iridium, titanium tungsten, aluminium or combination.
4. FBAR according to claim 1, it is characterised in that：The piezoelectric includes aluminium nitride
(AlN), zinc oxide (ZnO), lithium niobate (LiNbO3), lithium tantalate (LiTaO3) one of or combination.
5. a kind of preparation method of FBAR, it is characterised in that comprise the following steps：
Piezoelectric thin film transducer stacked structure is prepared on transfer base substrate；
Prepare the insulator silicon chip with cavity；
The piezoelectric thin film transducer stacked structure is placed in the cavity, be bonded the piezoelectric thin film transducer stacked structure with
The insulator silicon chip with cavity, forms the cavity structure of closing；
The transfer base substrate is peeled off, cavity type FBAR is formed.
6. the preparation method of FBAR according to claim 5, it is characterised in that：It is additionally included in described turn
The step of moving buffer layer on substrate, the cushion is used to peel off the transfer base substrate.
7. the preparation method of FBAR according to claim 5, it is characterised in that：The piezoelectric membrane is changed
Energy device stacked structure includes hearth electrode, piezoelectric, the top electrode stacked gradually.
8. the preparation method of FBAR according to claim 5, it is characterised in that：It is additionally included in the band
The step of bonding metal layer being formed on the insulator silicon chip of cavity.
9. the preparation method of FBAR according to claim 6, it is characterised in that：The cushion includes
Silica.
10. a kind of communication device, including the FBAR described in claim 1-4.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2016112438073 | 2016-12-29 | ||
| CN201611243807 | 2016-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107222181A true CN107222181A (en) | 2017-09-29 |
Family
ID=59944019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710342092.5A Pending CN107222181A (en) | 2016-12-29 | 2017-05-16 | FBAR based on SOI Substrate and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107222181A (en) |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108231995A (en) * | 2018-02-05 | 2018-06-29 | 武汉衍熙微器件有限公司 | A kind of piezoelectric device and preparation method thereof |
| CN108566174A (en) * | 2018-04-17 | 2018-09-21 | 武汉大学 | Default cavity protection wall type thin film bulk acoustic wave resonator and preparation method |
| CN109217841A (en) * | 2018-11-27 | 2019-01-15 | 杭州左蓝微电子技术有限公司 | One kind combining resonator based on surface acoustic wave and cavity type film bulk acoustic |
| CN109945966A (en) * | 2019-03-29 | 2019-06-28 | 中北大学 | The single electrode hydrophone of AlN bilayer film |
| CN110166015A (en) * | 2018-02-13 | 2019-08-23 | 天津大学 | A kind of transferable acoustic wave device |
| CN110504938A (en) * | 2019-07-26 | 2019-11-26 | 杭州左蓝微电子技术有限公司 | Thin film bulk acoustic wave resonator, filter and preparation method thereof |
| WO2020062364A1 (en) * | 2018-09-26 | 2020-04-02 | 中国科学院苏州纳米技术与纳米仿生研究所 | Thin-film bulk acoustic resonator and manufacturing method therefor |
| CN111245397A (en) * | 2019-12-06 | 2020-06-05 | 天津大学 | Bulk acoustic wave resonator, method of manufacturing bulk acoustic wave resonator, bulk acoustic wave resonator unit, filter, and electronic apparatus |
| WO2020125308A1 (en) * | 2018-12-20 | 2020-06-25 | 苏州敏芯微电子技术股份有限公司 | Bulk acoustic resonator and preparation method therefor |
| WO2020134594A1 (en) * | 2018-12-29 | 2020-07-02 | 中芯集成电路（宁波）有限公司上海分公司 | Integrated structure of and integrated method for crystal resonator and control circuit |
| CN111384912A (en) * | 2018-12-29 | 2020-07-07 | 中芯集成电路（宁波）有限公司上海分公司 | Integrated structure of crystal resonator and control circuit and integration method thereof |
| CN111628748A (en) * | 2019-02-28 | 2020-09-04 | 无锡华润上华科技有限公司 | Surface acoustic wave device and method for manufacturing the same |
| CN112039460A (en) * | 2019-07-19 | 2020-12-04 | 中芯集成电路（宁波）有限公司 | Film bulk acoustic resonator and manufacturing method thereof |
| WO2021012379A1 (en) * | 2019-07-19 | 2021-01-28 | 中芯集成电路（宁波）有限公司上海分公司 | Method for manufacturing thin-film bulk acoustic wave resonator |
| WO2021042342A1 (en) * | 2019-09-05 | 2021-03-11 | 刘宇浩 | Bulk acoustic wave resonance device and bulk acoustic wave filter |
| CN112787614A (en) * | 2019-11-11 | 2021-05-11 | 上海珏芯光电科技有限公司 | Thin film lamb wave resonator, filter and manufacturing method thereof |
| EP4027516A4 (en) * | 2019-09-05 | 2023-06-07 | Changzhou Chemsemi Co., Ltd. | Method for forming bulk acoustic wave resonance device |
| EP4027515A4 (en) * | 2019-09-05 | 2023-06-14 | Changzhou Chemsemi Co., Ltd. | Method for forming bulk acoustic wave resonance device |
Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040090891A (en) * | 2003-04-18 | 2004-10-27 | 삼성전자주식회사 | One-Chip Duplexer fabrication method using substrate bonding and One-Chip Duplexer fabricated by the same |
| JP2004343359A (en) * | 2003-05-14 | 2004-12-02 | Fujitsu Media Device Kk | Method of manufacturing surface acoustic wave element |
| US20040257171A1 (en) * | 2003-04-18 | 2004-12-23 | Samsung Electronics Co., Ltd. | Air-gap type FBAR, duplexer using the FBAR, and fabricating methods thereof |
| US20050012571A1 (en) * | 2003-05-29 | 2005-01-20 | Samsung Electronics Co., Ltd. | Film bulk acoustic resonator having supports and manufacturing method therefore |
| JP2006109431A (en) * | 2004-09-10 | 2006-04-20 | Matsushita Electric Ind Co Ltd | Filter module using piezoelectric resonator, duplexer, communication device, and method for fabricating the same |
| US20060152110A1 (en) * | 2005-01-12 | 2006-07-13 | Fujitsu Media Devices Limited | Piezoelectric thin-film resonator and filter using the same |
| CN1977450A (en) * | 2004-07-20 | 2007-06-06 | 株式会社村田制作所 | Piezoelectric filter |
| CN101049903A (en) * | 2006-04-04 | 2007-10-10 | 台达电子工业股份有限公司 | Method for producing micro suspension structure |
| CN101111993A (en) * | 2005-01-28 | 2008-01-23 | 索尼株式会社 | Process for producing micromachine, and micromachine |
| WO2009151050A1 (en) * | 2008-06-10 | 2009-12-17 | 日本化薬株式会社 | Photosensitive resin composition for hollow package, cured product thereof, multilayer body using the resin composition and microdevice |
| US20100301703A1 (en) * | 2009-03-31 | 2010-12-02 | Sand9, Inc. | Integration of piezoelectric materials with substrates |
| CN102122940A (en) * | 2010-11-01 | 2011-07-13 | 中国电子科技集团公司第二十六研究所 | Preset cavity type SOI (silicon on insulator) substrate film bulk acoustic wave resonator and manufacturing method thereof |
| CN102498667A (en) * | 2009-09-18 | 2012-06-13 | 住友电气工业株式会社 | Substrate, manufacturing method of substrate, saw device, and device |
| US20130147319A1 (en) * | 2011-12-12 | 2013-06-13 | International Business Machines Corporation | Loading element of a film bulk acoustic resonator |
| US20130214877A1 (en) * | 2012-02-21 | 2013-08-22 | International Business Machines Corporation | Switchable filters and design structures |
| CN103296992A (en) * | 2013-06-28 | 2013-09-11 | 中国电子科技集团公司第二十六研究所 | Film bulk acoustic resonator structure and manufacture method thereof |
-
2017
- 2017-05-16 CN CN201710342092.5A patent/CN107222181A/en active Pending
Patent Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040090891A (en) * | 2003-04-18 | 2004-10-27 | 삼성전자주식회사 | One-Chip Duplexer fabrication method using substrate bonding and One-Chip Duplexer fabricated by the same |
| US20040257171A1 (en) * | 2003-04-18 | 2004-12-23 | Samsung Electronics Co., Ltd. | Air-gap type FBAR, duplexer using the FBAR, and fabricating methods thereof |
| JP2004343359A (en) * | 2003-05-14 | 2004-12-02 | Fujitsu Media Device Kk | Method of manufacturing surface acoustic wave element |
| US20050012571A1 (en) * | 2003-05-29 | 2005-01-20 | Samsung Electronics Co., Ltd. | Film bulk acoustic resonator having supports and manufacturing method therefore |
| CN1977450A (en) * | 2004-07-20 | 2007-06-06 | 株式会社村田制作所 | Piezoelectric filter |
| JP2006109431A (en) * | 2004-09-10 | 2006-04-20 | Matsushita Electric Ind Co Ltd | Filter module using piezoelectric resonator, duplexer, communication device, and method for fabricating the same |
| US20060152110A1 (en) * | 2005-01-12 | 2006-07-13 | Fujitsu Media Devices Limited | Piezoelectric thin-film resonator and filter using the same |
| CN101111993A (en) * | 2005-01-28 | 2008-01-23 | 索尼株式会社 | Process for producing micromachine, and micromachine |
| CN101049903A (en) * | 2006-04-04 | 2007-10-10 | 台达电子工业股份有限公司 | Method for producing micro suspension structure |
| WO2009151050A1 (en) * | 2008-06-10 | 2009-12-17 | 日本化薬株式会社 | Photosensitive resin composition for hollow package, cured product thereof, multilayer body using the resin composition and microdevice |
| US20100301703A1 (en) * | 2009-03-31 | 2010-12-02 | Sand9, Inc. | Integration of piezoelectric materials with substrates |
| CN102498667A (en) * | 2009-09-18 | 2012-06-13 | 住友电气工业株式会社 | Substrate, manufacturing method of substrate, saw device, and device |
| CN102122940A (en) * | 2010-11-01 | 2011-07-13 | 中国电子科技集团公司第二十六研究所 | Preset cavity type SOI (silicon on insulator) substrate film bulk acoustic wave resonator and manufacturing method thereof |
| US20130147319A1 (en) * | 2011-12-12 | 2013-06-13 | International Business Machines Corporation | Loading element of a film bulk acoustic resonator |
| US20130214877A1 (en) * | 2012-02-21 | 2013-08-22 | International Business Machines Corporation | Switchable filters and design structures |
| CN103296992A (en) * | 2013-06-28 | 2013-09-11 | 中国电子科技集团公司第二十六研究所 | Film bulk acoustic resonator structure and manufacture method thereof |
Non-Patent Citations (5)
| Title |
|---|
| MOTOAKI HARA, TSUYOSHI YOKOYAMA, TAKESHI SAKASHITA, SHINJI TANIG: "Super-High-Frequency Band Filters Configured with Air-Gap-Type Thin-Film Bulk Acoustic Resonators", 《JAPANESE JOURNAL OF APPLIED PHYSICS》 * |
| TANIGUCHI, S: "An air-gap type FBAR filter fabricated using a thin sacrificed layer on a flat substrate", 《IEEE TRANSACTIONS ON INDUSTRIAL INFORMATICS》 * |
| UEDA, M: "Development of an X-Band Filter Using Air-Gap-Type Film Bulk Acoustic Resonators", 《JAPANESE JOURNAL OF APPLIED PHYSICS 》 * |
| 谢红: "压电薄膜体声波液体传感器的制备及性能初步研究", 《中国优秀硕士学位论文全文数据库（信息科技辑）》 * |
| 金浩: "薄膜体声波谐振器（FBAR）技术的若干问题研究", 《中国优秀博士学位论文全文数据库（信息科技辑）》 * |
Cited By (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108231995A (en) * | 2018-02-05 | 2018-06-29 | 武汉衍熙微器件有限公司 | A kind of piezoelectric device and preparation method thereof |
| CN108231995B (en) * | 2018-02-05 | 2024-04-19 | 武汉衍熙微器件有限公司 | Piezoelectric device and preparation method thereof |
| CN110166015A (en) * | 2018-02-13 | 2019-08-23 | 天津大学 | A kind of transferable acoustic wave device |
| CN108566174A (en) * | 2018-04-17 | 2018-09-21 | 武汉大学 | Default cavity protection wall type thin film bulk acoustic wave resonator and preparation method |
| US11942916B2 (en) | 2018-09-26 | 2024-03-26 | Suzhou Institute Of Nano-Tech And Nano-Bionics (Sinano), Chinese Academy Of Sciences | Fabricating method of film bulk acoustic resonator |
| WO2020062364A1 (en) * | 2018-09-26 | 2020-04-02 | 中国科学院苏州纳米技术与纳米仿生研究所 | Thin-film bulk acoustic resonator and manufacturing method therefor |
| CN109217841A (en) * | 2018-11-27 | 2019-01-15 | 杭州左蓝微电子技术有限公司 | One kind combining resonator based on surface acoustic wave and cavity type film bulk acoustic |
| CN109217841B (en) * | 2018-11-27 | 2024-03-01 | 杭州左蓝微电子技术有限公司 | Film bulk acoustic wave combined resonator based on acoustic surface wave and cavity |
| WO2020125308A1 (en) * | 2018-12-20 | 2020-06-25 | 苏州敏芯微电子技术股份有限公司 | Bulk acoustic resonator and preparation method therefor |
| CN111384916B (en) * | 2018-12-29 | 2022-08-02 | 中芯集成电路（宁波）有限公司上海分公司 | Integrated structure of crystal resonator and control circuit and integration method thereof |
| CN111384912B (en) * | 2018-12-29 | 2023-09-29 | 中芯集成电路（宁波）有限公司上海分公司 | Integrated structure of crystal resonator and control circuit and integrated method thereof |
| CN111384916A (en) * | 2018-12-29 | 2020-07-07 | 中芯集成电路（宁波）有限公司上海分公司 | Integrated structure of crystal resonator and control circuit and integration method thereof |
| CN111384912A (en) * | 2018-12-29 | 2020-07-07 | 中芯集成电路（宁波）有限公司上海分公司 | Integrated structure of crystal resonator and control circuit and integration method thereof |
| WO2020134594A1 (en) * | 2018-12-29 | 2020-07-02 | 中芯集成电路（宁波）有限公司上海分公司 | Integrated structure of and integrated method for crystal resonator and control circuit |
| CN111628748A (en) * | 2019-02-28 | 2020-09-04 | 无锡华润上华科技有限公司 | Surface acoustic wave device and method for manufacturing the same |
| CN111628748B (en) * | 2019-02-28 | 2022-10-14 | 无锡华润上华科技有限公司 | Surface acoustic wave device and method for manufacturing the same |
| CN109945966A (en) * | 2019-03-29 | 2019-06-28 | 中北大学 | The single electrode hydrophone of AlN bilayer film |
| CN112039460A (en) * | 2019-07-19 | 2020-12-04 | 中芯集成电路（宁波）有限公司 | Film bulk acoustic resonator and manufacturing method thereof |
| WO2021012379A1 (en) * | 2019-07-19 | 2021-01-28 | 中芯集成电路（宁波）有限公司上海分公司 | Method for manufacturing thin-film bulk acoustic wave resonator |
| US11942917B2 (en) | 2019-07-19 | 2024-03-26 | Ningbo Semiconductor International Corporation | Film bulk acoustic resonator and fabrication method thereof |
| CN110504938A (en) * | 2019-07-26 | 2019-11-26 | 杭州左蓝微电子技术有限公司 | Thin film bulk acoustic wave resonator, filter and preparation method thereof |
| CN110504938B (en) * | 2019-07-26 | 2022-07-19 | 杭州左蓝微电子技术有限公司 | Film bulk acoustic wave resonator, filter and preparation method thereof |
| EP4027516A4 (en) * | 2019-09-05 | 2023-06-07 | Changzhou Chemsemi Co., Ltd. | Method for forming bulk acoustic wave resonance device |
| EP4027515A4 (en) * | 2019-09-05 | 2023-06-14 | Changzhou Chemsemi Co., Ltd. | Method for forming bulk acoustic wave resonance device |
| WO2021042342A1 (en) * | 2019-09-05 | 2021-03-11 | 刘宇浩 | Bulk acoustic wave resonance device and bulk acoustic wave filter |
| CN112787614A (en) * | 2019-11-11 | 2021-05-11 | 上海珏芯光电科技有限公司 | Thin film lamb wave resonator, filter and manufacturing method thereof |
| CN111245397A (en) * | 2019-12-06 | 2020-06-05 | 天津大学 | Bulk acoustic wave resonator, method of manufacturing bulk acoustic wave resonator, bulk acoustic wave resonator unit, filter, and electronic apparatus |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107222181A (en) | FBAR based on SOI Substrate and preparation method thereof | |
| CN107231138A (en) | FBAR with supporting construction and preparation method thereof | |
| CN112532195B (en) | Passive cavity type single crystal film bulk acoustic resonator structure and preparation method thereof | |
| US9106199B2 (en) | Acoustic wave device including a surface wave filter and a bulk wave filter, and method for making same | |
| CN102122941B (en) | Tunable preset cavity type silicon on insulator (SOI) substrate film body acoustic resonator and manufacturing method thereof | |
| CN104202010B (en) | Hollow cavity-type film bulk acoustic resonator and production method for same | |
| KR100880791B1 (en) | Hbar oscillator and method of manufacture | |
| CN103560763B (en) | Integrated-type body wave resonator and its manufacture method on piece | |
| CN105811914B (en) | A kind of bulk acoustic wave device, integrated morphology and manufacturing method | |
| CN101977026A (en) | Manufacturing method of cavity-type film bulk acoustic resonator (FBAR) | |
| WO2014094887A1 (en) | Mems component comprising aln and sc and method for manufacturing a mems component | |
| CN206542385U (en) | FBAR and communication device with supporting construction | |
| CN109150127A (en) | Thin film bulk acoustic wave resonator and preparation method thereof, filter | |
| CN111082771A (en) | Bulk acoustic wave resonator, preparation method thereof and filter | |
| CN115694412A (en) | Integrated capacitor bulk acoustic wave resonator, filter and manufacturing method | |
| KR100485703B1 (en) | Film bulk acoustic resonator having air gap floating from substrate and method for manufacturing the same | |
| CN112671367A (en) | Novel FBAR filter and preparation method thereof | |
| US7253703B2 (en) | Air-gap type FBAR, method for fabricating the same, and filter and duplexer using the same | |
| CN109995342B (en) | Preparation method of air-gap type film bulk acoustic resonator | |
| CN206542386U (en) | FBAR and communication device based on insulator silicon chip | |
| WO2020062364A1 (en) | Thin-film bulk acoustic resonator and manufacturing method therefor | |
| JP2009194915A (en) | Filtering circuit with coupled acoustic resonator | |
| CN210273998U (en) | Film bulk acoustic resonator with buffering support structure in cavity and communication device | |
| WO2022228385A1 (en) | Bulk acoustic wave resonator having thickened electrode, filter, and electronic device | |
| CN215222148U (en) | Novel FBAR filter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |